-
Nanoengineered micro-supercapacitors based on graphene nanowalls for self-powered wireless sensing system
Nguyen Van Toan, Hongtao Sui, Jinhua Li, Truong Thi Kim Tuoi, Takahito Ono
Journal of Energy Storage 81 2024/03/15
DOI：
10.1016/j.est.2024.110446
eISSN：
2352-152X
-
A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film
Chuan Hui Ou, Nguyen Van Toan, Yao Chuan Tsai, Ioana Voiculescu, Masaya Toda, Takahito Ono
Journal of Microelectromechanical Systems 33 (1) 46-53 2024/02/01
DOI：
10.1109/JMEMS.2023.3337333
ISSN：
1057-7157
eISSN：
1941-0158
-
An Electromagnetically Driven Micromirror with a Large Stroke
Chuan Hui Ou, Nguyen Van Toan, Takahito Ono
Sensors and Materials 36 (6) 2237-2248 2024
DOI：
10.18494/SAM5027
ISSN：
0914-4935
-
A Large-Stroke Tip-Tilt-Piston Micromirror with Electromagnetic Actuators Based on Metallic Glass
Chuan Hui Ou, Nguyen V. Toan, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2023-January 1103-1106 2023
DOI：
10.1109/MEMS49605.2023.10052335
ISSN：
1084-6999
-
Ultra-flexible thermoelectric generator based on silicone rubber sheet and electrodeposited thermoelectric material for waste heat harvesting
Nguyen Van Toan, Truong Thi Kim Tuoi, Hongtao Sui, Nguyen Huu Trung, Khairul Fadzli Samat, Takahito Ono
Energy Reports 8 5026-5037 2022/11
DOI：
10.1016/j.egyr.2022.03.121
eISSN：
2352-4847
-
Highly enhanced thermoelectric and mechanical properties of Bi<inf>2</inf>Te<inf>3</inf> hybrid nanocomposite with inclusion of Pt nanoparticles and SWCNTs
Khairul Fadzli Samat, Yijie Li, Nguyen Van Toan, Mohd Asyadi Azam, Takahito Ono
Journal of Materials Research 37 (20) 3445-3458 2022/10/28
DOI：
10.1557/s43578-022-00694-z
ISSN：
0884-2914
eISSN：
2044-5326
-
Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro-thermoelectric generator
Nguyen Van Toan, Keisuke Ito, Truong Thi Kim Tuoi, Masaya Toda, Po Hung Chen, Mohd Faizul Mohd Sabri, Jinhua Li, Takahito Ono
Energy Conversion and Management 267 2022/09/01
DOI：
10.1016/j.enconman.2022.115923
ISSN：
0196-8904
-
High-performance flexible thermoelectric generator for self-powered wireless BLE sensing systems
Nguyen Van Toan, Truong Thi Kim Tuoi, Takahito Ono
Journal of Power Sources 536 2022/07/15
DOI：
10.1016/j.jpowsour.2022.231504
ISSN：
0378-7753
-
Nanoengineered nanochannels for thermally ionic nanofluidic energy harvesting
Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Megat Muhammad Ikhsan Megat Hasnan, Masaya Toda, Ioana Voiculescu, Suhana Mohd Said, Takahito Ono
Energy Conversion and Management 264 2022/07/15
DOI：
10.1016/j.enconman.2022.115760
ISSN：
0196-8904
-
Density effects of vertical graphene nanowalls on supercapacitor performance
Hongtao Sui, Nguyen Van Toan, Takahito Ono
Materials Advances 3 (13) 5406-5417 2022/05/18
DOI：
10.1039/d2ma00074a
eISSN：
2633-5409
-
Self-powered wireless sensing system driven by daily ambient temperature energy harvesting
Truong Thi Kim Tuoi, Nguyen Van Toan, Takahito Ono
APPLIED ENERGY 311 2022/04
DOI：
10.1016/j.apenergy.2022.118679
ISSN：
0306-2619
eISSN：
1872-9118
-
High Density Micro-Thermoelectric Generator Based on Electrodeposition of Bi<inf>2</inf>Te<inf>3</inf>and Sb<inf>2</inf>Te<inf>3</inf>
Chan Cheng Hou, Nguyen Van Toan, Takahito Ono
IEEE Symposium on Mass Storage Systems and Technologies 2022-January 600-603 2022
DOI：
10.1109/MEMS51670.2022.9699661
ISSN：
2160-1968
-
Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices
Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Masaya Toda, Takahito Ono
Scientific Reports 11 (1) 2021/12
Publisher:
Springer Science and Business Media LLC
DOI：
10.1038/s41598-020-80880-3
eISSN：
2045-2322
-
Thermoelectric generator with a high integration density for portable and wearable self-powered electronic devices
Nguyen Van Toan, Truong Thi Kim Tuoi, Nguyen Van Hieu, Takahito Ono
Energy Conversion and Management 245 2021/10/01
DOI：
10.1016/j.enconman.2021.114571
ISSN：
0196-8904
-
Vertically-oriented graphene electrodeposited with MnO2 on native SiO2/Si for high-performance supercapacitor electrodes
Hongtao Sui, Nguyen Van Toan, Takahito Ono
JOURNAL OF ELECTROANALYTICAL CHEMISTRY 895 2021/08
DOI：
10.1016/j.jelechem.2021.115507
ISSN：
1572-6657
eISSN：
1873-2569
-
Heat Storage Thermoelectric Generator for Wireless IOT Sensing Systems
Truong Thi Kim Tuoi, Nguyen Van Toan, Takahito Ono
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 924-927 2021/06/20
DOI：
10.1109/Transducers50396.2021.9495686
-
Morphological Analysis and Properties Evaluation of Electrodeposited Thick BiSbTe Films with Cooperative Interactions among Multiple Additives
Wei Yu, Nguyen Van Toan, Yi Jie Li, Zhuqing Wang, Takahito Ono, Ruochen Wang
Journal of the Electrochemical Society 168 (2) 2021/02
DOI：
10.1149/1945-7111/abdd7b
ISSN：
0013-4651
eISSN：
1945-7111
-
Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices.
International-journal
Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Masaya Toda, Takahito Ono
Scientific reports 11 (1) 1204-1204 2021/01/13
DOI：
10.1038/s41598-020-80880-3
ISSN：
2045-2322
-
Formation and Evaluation of Silicon Substrate with Highly-Doped Porous Si Layers Formed by Metal-Assisted Chemical Etching
Yijie Li, Nguyen Van Toan, Zhuqing Wang, Khairul Fadzli Bin Samat, Takahito Ono
Nanoscale Research Letters 16 (1) 2021
DOI：
10.1186/s11671-021-03524-z
ISSN：
1931-7573
eISSN：
1556-276X
-
Heat storage thermoelectric generator as an electrical power source for wireless Iot sensing systems
Truong Thi Kim Tuoi, Nguyen Van Toan, Takahito Ono
International Journal of Energy Research 45 (10) 15557-15568 2021
DOI：
10.1002/er.6774
ISSN：
0363-907X
eISSN：
1099-114X
-
Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures
Masaya Toda, Hideki Hayashi, Nguyen van Toan, Naoki Inomata, Takahito Ono
Journal of Microelectromechanical Systems 30 (4) 560-568 2021
DOI：
10.1109/JMEMS.2021.3076791
ISSN：
1057-7157
eISSN：
1941-0158
-
Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane
Nguyen Van Toan, Truong Thi Kim Tuoi, Yao Chuan Tsai, Yu Ching Lin, Takahito Ono
Scientific Reports 10 (1) 2020/12/01
DOI：
10.1038/s41598-020-67150-y
ISSN：
2045-2322
eISSN：
2045-2322
-
Thermoelectric generators for heat harvesting: From material synthesis to device fabrication
Nguyen Van Toan, Truong Thi Kim Tuoi, Takahito Ono
Energy Conversion and Management 225 2020/12/01
DOI：
10.1016/j.enconman.2020.113442
ISSN：
0196-8904
eISSN：
1879-2227
-
Temperature-dependence of the electrical impedance properties of sodium hydroxide-contained polyethylene oxide as an ionic liquid
Naoki Inomata, Nguyen van Toan, Takahito Ono
Sensors and Actuators A: Physical 316 112369-112369 2020/12
Publisher:
Elsevier BV
DOI：
10.1016/j.sna.2020.112369
ISSN：
0924-4247
-
Thermoelectrical properties of silicon substrates with nanopores synthesized by metal-assisted chemical etching
Yijie Li, Nguyen Van Toan, Zhuqing Wang, Khairul Fadzli Samat, Takahito Ono
Nanotechnology 31 (45) 2020/11/06
DOI：
10.1088/1361-6528/ab8fe1
ISSN：
0957-4484
eISSN：
1361-6528
-
Theoretical and experimental investigation of a thermoelectric generator (TEG) integrated with a phase change material (PCM) for harvesting energy from ambient temperature changes
Truong Thi Kim Tuoi, Nguyen Van Toan, Takahito Ono
Energy Reports 6 2022-2029 2020/11
DOI：
10.1016/j.egyr.2020.07.023
ISSN：
2352-4847
eISSN：
2352-4847
-
Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology
Nguyen Van Toan, Truong Thi Kim Tuoi, Jinhua Li, Naoki Inomata, Takahito Ono
Materials Research Bulletin 131 110977-110977 2020/11
DOI：
10.1016/j.materresbull.2020.110977
ISSN：
0025-5408
eISSN：
1873-4227
-
Bridged resonator based on assembled Si thin wire
Masaya Toda, Taichi Nakamura, Naoki Inomata, Nguyen Van Toan, Takahito Ono
Journal of Micromechanics and Microengineering 30 (10) 105015-105015 2020/10/01
DOI：
10.1088/1361-6439/aba6cc
ISSN：
0960-1317
eISSN：
1361-6439
-
Torsional resonator of Pd–Si–Cu metallic glass with a low rotational spring constant
Masaya Toda, Chunyang Li, Nguyen Van Toan, Yao-Chuan Tsai, Yu-Ching Lin, Takahito Ono
Microsystem Technologies 27 (3) 929-935 2020/08/14
DOI：
10.1007/s00542-020-04996-2
ISSN：
0946-7076
eISSN：
1432-1858
-
Micropatterning and Integration of Electrospun PVDF Membrane into Microdevice
Iman Aris Fadzallah, Nuur Syahidah Sabran, Nguyen Van Toan, Takahito Ono, Suhana Mohd Said, Mohd Faizul Mohd Sabri
Journal of Microelectromechanical Systems 29 (3) 438-445 2020/06
DOI：
10.1109/JMEMS.2020.2983717
ISSN：
1057-7157
eISSN：
1941-0158
-
Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures
Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Takahito Ono
Micromachines 11 (5) 523-523 2020/05/21
DOI：
10.3390/mi11050523
eISSN：
2072-666X
-
Logic gates based on electrically driven nanoelectromechanical switches
Peer-reviewed
Nguyen Van Toan, Dong Zhao, Naoki Inomata, Takahito Ono
IEEJ Transactions on Electrical and Electronic Engineering 14 (2) 335-336 2020/02
DOI：
10.1002/tee.22814
ISSN：
1931-4973
eISSN：
1931-4981
-
High Performance Micro-Thermoelectric Generator Based on Metal Doped Electrochemical Deposition
Nguyen Van Toan, Truong Thi Kim Tuoi, Khairul Fadzli Samat, Hongtao Sui, Naoki Inomata, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2020-January 570-573 2020/01
DOI：
10.1109/MEMS46641.2020.9056358
ISSN：
1084-6999
-
Carbon Black Nanoparticles Inclusion in Bismuth Telluride Film for Micro Thermoelectric Generator Application
Khairul Fadzli Samat, Yijie Li, Nguyen Van Toan, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2020-January 562-565 2020/01
DOI：
10.1109/MEMS46641.2020.9056323
ISSN：
1084-6999
-
Resonator with a low spring constant for polarization-degree of nuclear spins sensing
Peer-reviewed
李 春洋, 戸田 雅也, TOAN NGUYEN Van, 林 育菁, Tsai Yao-Chuan, 小野 崇人
Proceedings of Sensor Symposium on Sensors, Micromachines and Applied Systems 36 19pm3-T-5-1-19pm3-T-5-4 2019/11/19
-
Thermoelectric power battery using al<inf>2</inf>o<inf>3</inf> nanochannels of 10 nm diameter for energy harvesting of low-grade waste heat
Nguyen Van Toan, Megat Muhammad Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, Takahito Ono
Energy Conversion and Management 199 2019/11/01
DOI：
10.1016/j.enconman.2019.111979
ISSN：
0196-8904
eISSN：
1879-2227
-
Resonant magnetic sensor using concentration of magnetic field gradient by asymmetric permalloy plates
Peer-reviewed
Naoki Inomata, Wataru Suwa, Nguyen Van Toan, Masaya Toda, Takahito Ono
Microsystem Technologies 25 (10) 3983-3989 2019/10/01
DOI：
10.1007/s00542-018-4257-8
ISSN：
0946-7076
eISSN：
1432-1858
-
Electrostatically Driven Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition
Nguyen Van Toan, Dong Zhao, Naoki Inomata, Masaya Toda, Yunheub Song, Takahito Ono
Physica Status Solidi (A) Applications and Materials Science 216 (14) e1800797 2019/07/24
DOI：
10.1002/pssa.201800797
ISSN：
1862-6300
eISSN：
1862-6319
-
Magnetostrictive Performance of Electrodeposited TB<inf>X</inf>DY<inf>(1-X)</inf>FE<inf>Y</inf> Thin Filmevaluated from Microactuator
Peer-reviewed
Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Yunheub Song, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 1698-1700 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808489
-
Fabrication of on-chip vacuum pump using a silicon nanostructure by metal-assisted chemical etching
Peer-reviewed
Naoki Inomata, Kentaro Kamakura, Nguyen Van Toan, Takahito Ono
IEEJ Transactions on Electrical and Electronic Engineering 14 (6) 954-958 2019/06
DOI：
10.1002/tee.22887
ISSN：
1931-4973
eISSN：
1931-4981
-
Liquid Thermocouple Using Thermoelectric Ionic Liquids
Naoki Inomata, Nguyen Van Toan, Takahito Ono
IEEE Sensors Letters 3 (5) 1-4 2019/05
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
DOI：
10.1109/lsens.2019.2912418
eISSN：
2475-1472
-
Investigation of the Impact of External Stress on Memory Characteristics by Modifying the Backside of Substrate
Peer-reviewed
Young Taek Oh, Jae Min Sim, Nguyen Van Toan, Hisashi Kino, Takahito Ono, Tetsu Tanaka, Yun Heub Song
IEEE Transactions on Electron Devices 66 (4) 1741-1746 2019/04
DOI：
10.1109/TED.2019.2900155
ISSN：
0018-9383
eISSN：
1557-9646
-
Metal-assisted-chemical-etching of silicon nanowires for templating 3D graphene growth towards energy storage in microsystems
Peer-reviewed
Jinhua Li, Nguyen Van Toan, Zhuqing Wang, Takahito Ono
Journal of Micromechanics and Microengineering 29 (5) 2019/03/29
DOI：
10.1088/1361-6439/ab0b2f
ISSN：
0960-1317
eISSN：
1361-6439
-
Electrolyte Based Thermal to Electric Energy Conversion Utilising 10 nm Diameter AL<inf>2</inf>O<inf>3</inf> Nanochannels
Peer-reviewed
Nguyen Van Toan, Megat Muhammad Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2019-January 507-510 2019/01
DOI：
10.1109/MEMSYS.2019.8870755
ISSN：
1084-6999
-
Nanoengineered thermoelectric energy devices for IoT sensing applications
Peer-reviewed
Takahito Ono, Trung Huu Nguyen, Khairul Fadzli Samat, Jinhua Li, Nguyen Van Toan
ECS Transactions 92 (4) 163-168 2019
DOI：
10.1149/09204.0163ecst
ISSN：
1938-6737
eISSN：
1938-5862
-
Mechanical resonant magnetic sensor utilizing magnetically induced compressive load from magnetostrictive material
Peer-reviewed
Naoki Inomata, Taiga Ezura, Nguyen Van Toan, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 139 (1) 21-26 2019
DOI：
10.1541/ieejsmas.139.21
ISSN：
1341-8939
eISSN：
1347-5525
-
Low Cost and High-Aspect Ratio Micro/Nano Device Fabrication by Using Innovative Metal-Assisted Chemical Etching Method
Nguyen Van Toan, Xiaoyue Wang, Naoki Inomata, Masaya Toda, Ioana Voiculescu, Takahito Ono
Advanced Engineering Materials 21 (8) e1900490 2019
DOI：
10.1002/adem.201900490
ISSN：
1438-1656
eISSN：
1527-2648
-
Impact of etch angles on cell characteristics in 3D NAND flash memory
Young Taek Oh, Kyu Beom Kim, Sang Hoon Shin, Hahng Sim, Nguyen Van Toan, Takahito Ono, Yun Heub Song
Microelectronics Journal 79 1-6 2018/09
DOI：
10.1016/j.mejo.2018.06.009
ISSN：
0026-2692
-
Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method
Peer-reviewed
Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono
Nanotechnology 29 (19) 2018/03/16
DOI：
10.1088/1361-6528/aab1d3
ISSN：
0957-4484
eISSN：
1361-6528
-
Knudsen pump produced via silicon deep RIE, thermal oxidation, and anodic bonding processes for on-chip vacuum pumping
Peer-reviewed
Nguyen Van Toan, Naoki Inomata, Nguyen Huu Trung, Takahito Ono
Journal of Micromechanics and Microengineering 28 (5) 2018/02/23
DOI：
10.1088/1361-6439/aaae26
ISSN：
0960-1317
eISSN：
1361-6439
-
Flexible thermoelectric power generator with Y-type structure using electrochemical deposition process
Peer-reviewed
Trung Nguyen Huu, Toan Nguyen Van, Ono Takahito
Applied Energy 210 467-476 2018/01/15
DOI：
10.1016/j.apenergy.2017.05.005
ISSN：
0306-2619
-
Evaluation of Piezoresistive Property of Vanadium Oxide Thin Film Deposited by Sputtering
Peer-reviewed
N. Inomata, N. V. Toan, M. Toda, T. Ono
IEEE Sensors Letters 2 (1) 2500204 2018
-
Piezoresistive property of an aluminum-doped zinc oxide thin film deposited via atomic-layer deposition for microelectromechanical system/nanoelectromenchanical system applications
Peer-reviewed
Naoki Inomata, Nguyen Van Toan, Takahito Ono
IEEJ Transactions on Electrical and Electronic Engineering 12 S120-S124 2017/12
DOI：
10.1002/tee.22570
ISSN：
1931-4973
eISSN：
1931-4981
-
High-aspect-ratio aluminum-doped zinc oxide nanomechanical resonator
Peer-reviewed
Nguyen Van Toan, Naoki Inomata, Takahito Ono
IEEJ Transactions on Electrical and Electronic Engineering 12 S141-S142 2017/12
DOI：
10.1002/tee.22561
ISSN：
1931-4973
eISSN：
1931-4981
-
Progress in performance enhancement methods for capacitive silicon resonators
Peer-reviewed
Nguyen Van Toan, Takahito Ono
Japanese Journal of Applied Physics 56 (11) 110101.1‐110101.11 2017/11
DOI：
10.7567/JJAP.56.110101
ISSN：
0021-4922
eISSN：
1347-4065
-
Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Takumi Hokama, Takahito Ono
Advanced Engineering Materials 19 (11) ROMBUNNO.201700203 2017/11
DOI：
10.1002/adem.201700203
ISSN：
1438-1656
eISSN：
1527-2648
-
Fabrication of π-type flexible thermoelectric generators using an electrochemical deposition method for thermal energy harvesting applications at room temperature
Peer-reviewed
Nguyen Huu Trung, Nguyen Van Toan, Takahito Ono
Journal of Micromechanics and Microengineering 27 (12) 2017/10/30
DOI：
10.1088/1361-6439/aa8f16
ISSN：
0960-1317
eISSN：
1361-6439
-
Design and fabrication of capacitive silicon nanomechanical resonators with selective vibration of a high-order mode
Peer-reviewed
Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Yunheub Song, Takahito Ono
Micromachines 8 (10) 2017/10/20
DOI：
10.3390/mi8100312
ISSN：
2072-666X
eISSN：
2072-666X
-
Progress in performance enhancement methods for capacitive silicon resonators
Van Toan Nguyen, Ono Takahito
Jpn. J. Appl. Phys. 56 (11) 2017/09/29
Publisher:
Institute of Physics
ISSN：
0021-4922
-
Fabrication and evaluation of capacitive silicon resonators with piezoresistive heat engines
Peer-reviewed
Nguyen Van Toan, Nguyen Van Nha, Yunheub Song, Takahito Ono
Sensors and Actuators, A: Physical 262 99-107 2017/08/01
DOI：
10.1016/j.sna.2017.05.031
ISSN：
0924-4247
-
High Aspect Ratio Silicon Structures Produced via Metal-Assisted Chemical Etching and Assembly Technology for Cantilever Fabrication
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Takahito Ono
IEEE Transactions on Nanotechnology 16 (4) 567-573 2017/07
DOI：
10.1109/TNANO.2016.2645781
ISSN：
1536-125X
eISSN：
1941-0085
-
Fabrication of a SiO<inf>2</inf> optical window for controlling light transmission
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Tetsuro Saito, Naoki Inomata, Takahito Ono
Microsystem Technologies 23 (4) 919-927 2017/04
DOI：
10.1007/s00542-016-2826-2
ISSN：
0946-7076
eISSN：
1432-1858
-
Flexible thermoelectric power generators based on electrochemical deposition process of BI<inf>2</inf>TE<inf>3</inf> and SB<inf>2</inf>TE<inf>3</inf>
Peer-reviewed
Nguyen Huu Trung, Nguyen Van Toan, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 805-808 2017/02/23
DOI：
10.1109/MEMSYS.2017.7863530
ISSN：
1084-6999
-
Reversible low voltage electrowetting with SiO<inf>2</inf> capillary window for optical imaging
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Yoshisuke Ansai, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 1347-1350 2017/02/23
DOI：
10.1109/MEMSYS.2017.7863670
ISSN：
1084-6999
-
Knudsen Pump Based on Silicon Etching and Thermal Oxidation Process for On-Chip Vacuum Pumping
Peer-reviewed
Nguyen Van Toan, Naoki Inomata, Nguyen Huu Trung, Takahito Ono
2017 IEEE 12TH INTERNATIONAL CONFERENCE ON POWER ELECTRONICS AND DRIVE SYSTEMS (PEDS) 550-552 2017
ISSN：
2164-5256
-
Synthesis and evaluation of thick films of electrochemically deposited Bi<inf>2</inf>Te<inf>3</inf> and Sb<inf>2</inf>Te<inf>3</inf> thermoelectric materials
Peer-reviewed
Nguyen Huu Trung, Kei Sakamoto, Nguyen Van Toan, Takahito Ono
Materials 10 (2) 154 2017
DOI：
10.3390/ma10020154
ISSN：
1996-1944
eISSN：
1996-1944
-
Vacuum packaged micro-cantilever with a magnetic particle
Nurasyikin Mohd, Gaopeng Xue, Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 137 (8) 245-246 2017
Publisher:
一般社団法人 電気学会
DOI：
10.1541/ieejsmas.137.245
ISSN：
1341-8939
eISSN：
1347-5525
-
Glass capillaries based on a glass reflow into nano-trench for controlling light transmission
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Naoki Inomata, Takahito Ono
Microsystem Technologies 22 (12) 2835-2840 2016/12/01
DOI：
10.1007/s00542-015-2607-3
ISSN：
0946-7076
eISSN：
1432-1858
-
Glass reflow process for microsystem applications
Nguyen Van Toan, Suguru Sangu, Takahito Ono
Journal of Micromechanics and Microengineering 26 (11) 2016/10/14
DOI：
10.1088/0960-1317/26/11/115018
ISSN：
0960-1317
eISSN：
1361-6439
-
Single and mechanically coupled capacitive silicon nanomechanical resonators
Nguyen Van Toan, Tsuyoshi Shimazaki, Takahito Ono
Micro and Nano Letters 11 (10) 591-594 2016/10/01
DOI：
10.1049/mnl.2016.0265
eISSN：
1750-0443
-
Fabrication of high aspect ratio SiO<inf>2</inf> and tempax glass pillar structures and its application for optical modulator device
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Takahito Ono
Journal of Microelectromechanical Systems 25 (4) 668-674 2016/08
DOI：
10.1109/JMEMS.2016.2581184
ISSN：
1057-7157
eISSN：
1941-0158
-
Fabrication of high aspect ratio SiO<inf>2</inf> and tempax glass pillar structures and its application for optical modulator device
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Takahito Ono
Journal of Microelectromechanical Systems 25 (4) 668-674 2016/08
Publisher:
Institute of Electrical and Electronics Engineers ({IEEE})
DOI：
10.1109/JMEMS.2016.2581184
ISSN：
1057-7157
-
Packaging Technique of Micro Cantilever for Magnetic Force Sensing
Peer-reviewed
Nurasyikin Mohd, Naoki Inomata, Nguyen Van Toan, Takahito Ono, Masaya Toda
Proceedings of the International Workshop on Nanomechanical Sensors 12 150-151 2016/06/22
-
Design and fabrication of a large area freestanding compressive stress SiO<inf>2</inf> optical window
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Takahito Ono
Journal of Micromechanics and Microengineering 26 (7) 075016 2016/06/21
DOI：
10.1088/0960-1317/26/7/075016
ISSN：
0960-1317
eISSN：
1361-6439
-
An investigation of processes for glass micromachining
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Takahito Ono
Micromachines 7 (3) 2016/03/22
DOI：
10.3390/mi7030051
ISSN：
2072-666X
eISSN：
2072-666X
-
High aspect ratio SiO<inf>2</inf> pillar structures capable of the integration of an image sensor for application of optical modulator
Nguyen Van Toan, Suguru Sangu, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 136 (2) 41-42 2016
Publisher:
一般社団法人 電気学会
DOI：
10.1541/ieejsmas.136.41
ISSN：
1341-8939
eISSN：
1347-5525
-
Fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer arrays using glass reflow process
Peer-reviewed
Nguyen Van Toan, Shim Hahng, Yunheub Song, Takahito Ono
Micromachines 7 (5) 2016
DOI：
10.3390/mi7050076
ISSN：
2072-666X
eISSN：
2072-666X
-
High Aspect Silicon Structures Using Metal Assisted Chemical Etching
Peer-reviewed
N. V. Toan, M. Toda, T. Ono
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) 720-723 2016
-
GLASS REFLOW PROCESS AND ITS APPLICATIONS
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Takahito Ono
2016 IEEE 11TH ANNUAL INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) 2016
ISSN：
2474-3747
eISSN：
2474-3755
-
Flexible Thermoelectric Power Generator Based on Electrochemical Deposition Process
Peer-reviewed
Nguyen Huu Trung, Nguyen Van Toan, Takahito Ono
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) 423-425 2016
-
High aspect ratio SiO2 capillary based on silicon etching and thermal oxidation process for optical modulator
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Tetsuro Saito, Naoki Inomata, Takahito Ono
Journal of Environmental, Chemical, Ecological, Geological and Geophysical Engineering 9 (5) 464-469 2015
-
Optical windows with liquid penetration for controlling light transmittance
Nguyen Van Toan, Suguru Sangu, Tetsuro Saito, Naoki Inomata, Hirobumi Watanabe, Takahito Ono
IEEE Conference on Reliability Science for Advanced Materials and Device 2014/09/07
-
Mechanical quality factor enhancement in a silicon micromechanical resonator by low-damage process using neutral beam etching technology
Peer-reviewed
Nguyen Van Toan, Tomohiro Kubota, Halubai Sekhar, Seiji Samukawa, Takahito Ono
Journal of Micromechanics and Microengineering 24 (8) 085005,1-11 2014/08/01
DOI：
10.1088/0960-1317/24/8/085005
ISSN：
0960-1317
eISSN：
1361-6439
-
New trends in NEMS/MEMS device using neutral beam etching technology
Peer-reviewed
Sekhar Halubai, Toan Nguyen Van, Tomohiro Kubota, Takahito Ono, Seiji Samukawa
The 6th IEEE International Nanoelectronics Conference 2014 2014/07
-
A capacitive silicon resonator with a movable electrode structure for gap width reduction
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Yusuke Kawai, Takahito Ono
Journal of Micromechanics and Microengineering 24 (2) 025006,1-11 2014/02
DOI：
10.1088/0960-1317/24/2/025006
ISSN：
0960-1317
eISSN：
1361-6439
-
Fabrication of nano-gap structures based on plastic deformation of strained Si springs by stiction effects
Peer-reviewed
Masaya Toda, Atsushi Yokoyama, Nguyen Van Toan, Naoki Inomata, Takahito Ono
Microsystem Technologies 21 (3) 649-654 2014
DOI：
10.1007/s00542-014-2182-z
ISSN：
0946-7076
eISSN：
1432-1858
-
A long bar type silicon resonator with a high quality factor
Nguyen Van Toan, Masaya Toda, Yusuke Kawai, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 134 (2) 26-31 2014
Publisher:
一般社団法人 電気学会
DOI：
10.1541/ieejsmas.134.26
ISSN：
1341-8939
eISSN：
1347-5525
-
Fabrication of an hermetically packaged silicon resonator on LTCC substrate
Peer-reviewed
Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
Microsystem Technologies 19 (8) 1165-1175 2013/08
DOI：
10.1007/s00542-012-1716-5
ISSN：
0946-7076
-
FABRICATION OF HERMETICALLY-PACKAGED CAPACITIVE RESONATOR ON LTCC SUBSTRATE
N. V. Toan, H. Miyashita, M. Toda, Y. Kawai, T. Ono
Proceeding of The Asia-Pacific Conference on Transducers and Micro/Nano Technologies 268-268 2012/01
-
Design and fabrication of capacitive silicon resonator on LTCC substrate,
Toan Nguyen Van, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
Proceeding of international Conference on Micro and Nano Engineering (MNE) 286-286 2012/01
