Details of the Researcher

PHOTO

Ken Suzuki
Section
Green Goals Initiative
Job title
Professor
Degree
  • Ph.D. in Engineering (Tohoku University)

Professional Memberships 3

  • 日本材料学会

    2023/04 - Present

  • 応用物理学会

  • Japan society of mechanical engineers

Research Areas 1

  • Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Machine materials and mechanics /

Awards 6

  1. Outstanding Technical Paper Award of International Conference on Electronic Packaging

    2013/03 エレクトロニクス実装学会

  2. Best Paper Award of ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, MEMS and NEMS

    2011/07 ASME

  3. ASME INTERNATIONAL InterPACK ’09 Best Poster

    2009/07 ASME

  4. International Conference on Electronics Packaging Outstanding Technical Paper Award

    2009/04 Japan Institute of Electronics Packaging

  5. Outstanding Paper Award of Packageing Material and Process Track

    2007/07 ASME

  6. 応用物理学会講演奨励賞

    1997/03 応用物理学会

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Papers 294

  1. Highly Sensitive Metal Ion Detection Using Tetraphenylporphyrin-Functionalized Graphene Field-Effect Transistors

    Tuerdi, G., Zhang, Q., Bao, L., Zhang, X., Suzuki, K., Miura, H., Zhang, Z., Fu, W.

    ACS Applied Electronic Materials 8 (1) 2026

    DOI: 10.1021/acsaelm.5c01839  

    ISSN: 2637-6113

  2. Polymorph-Specific Electronic Transduction in WO3 during Molecular Sensing

    D{'}Andria, M., Yin, M., Neuhauser, S., Mavrantzas, V.G., Chen, Y., Suzuki, K., G{\"u}ntner, A.T.

    Advanced Materials 2026

    DOI: 10.1002/adma.202516840  

    ISSN: 0935-9648 1521-4095

  3. Single Cu Atom Sites on Co3O4 Activate Interfacial Oxygen for Enhanced Reactivity and Selective Gas Sensing at Low Temperature

    Shin, H., D{'}Andria, M., Yin, M., Ko, J., Suzuki, K., Kim, D.-H., Krumeich, F., G{\"u}ntner, A.T.

    Small 2026

    DOI: 10.1002/smll.202600033  

    ISSN: 1613-6810 1613-6829

  4. Controlling NO2 adsorption on defective graphene through strain: A DFT study

    Meng Yin, Xiangyu Qiao, Ying Chen, Lei Wang, Hideo Miura, Ken Suzuki

    Surfaces and Interfaces 73 107542-107542 2025/09

    Publisher: Elsevier BV

    DOI: 10.1016/j.surfin.2025.107542  

    ISSN: 2468-0230

  5. Anharmonic properties of Prussian blue analogues MIIPtIV(CN)6 (MII = Cd, Fe, Zn)

    Wang, G., Yao, Z.-H., Suzuki, K., Chen, Y., Wang, L.

    Dalton Transactions 54 (31) 2025

    DOI: 10.1039/d5dt01119a  

    ISSN: 1477-9226 1477-9234

  6. Strain-modulated adsorption of gas molecule on graphene: First-principles calculations

    Meng Yin, Xiangyu Qiao, Lei Wang, Hideo Miura, Ken Suzuki

    Diamond and Related Materials 142 2024/02

    DOI: 10.1016/j.diamond.2024.110822  

    ISSN: 0925-9635

  7. Stress-Induced Acceleration of the Growth of δ-Phase Precipitates in Ni-Based Superalloy GH4169 (IN718) and Its Effect on the Acceleration of Intergranular Cracking Under Creep Loading at Elevated Temperature

    Ayumi Nakayama, Run Zi Wang, Ken Suzuki, Hideo Miura

    Minerals, Metals and Materials Series 369-378 2024

    DOI: 10.1007/978-3-031-63937-1_35  

    ISSN: 2367-1181

    eISSN: 2367-1696

  8. Creep damage evolution by cavity nucleation and growth considering the cavity closure under cyclic loading conditions

    Le Xu, Lv Yi Cheng, Kai Shang Li, Ken Suzuki, Hideo Miura, Run Zi Wang

    Fatigue and Fracture of Engineering Materials and Structures 2024

    DOI: 10.1111/ffe.14389  

    ISSN: 8756-758X

    eISSN: 1460-2695

  9. The uniaxial zero thermal expansion and zero linear compressibility in distorted Prussian blue analogue RbCuCo(CN)<inf>6</inf>

    Lei Wang, Ya Ning Sun, Xian Deng Wei, Meng Yin, Ying Chen, Hideo Miura, Ken Suzuki, Cong Wang

    Physical Chemistry Chemical Physics 25 (48) 32845-32852 2023/11/21

    DOI: 10.1039/d3cp04563c  

    ISSN: 1463-9076

  10. Geometric discontinuity effect on creep-fatigue behaviors in a nickel-based superalloy hole structure considering ratcheting deformation

    Lv Yi Cheng, Run Zi Wang, Kai Shang Li, Hai Long Guo, Le Xu, Ken Suzuki, Hideo Miura, Xian Cheng Zhang, Shan Tung Tu

    International Journal of Fatigue 175 2023/10

    DOI: 10.1016/j.ijfatigue.2023.107798  

    ISSN: 0142-1123

  11. Microstructural evolutions and life evaluation of non-proportional creep-fatigue considering loading path and holding position effects

    Le Xu, Run Zi Wang, Yu Chen Wang, Lei He, Takamoto Itoh, Ken Suzuki, Hideo Miura, Xian Cheng Zhang

    Materials Characterization 204 2023/10

    DOI: 10.1016/j.matchar.2023.113209  

    ISSN: 1044-5803

  12. Acceleration mechanism of the degradation of the lifetime of Ni-based superalloys under creep-fatigue loading at elevated temperatures

    Yifan Luo, Yukako Takahashi, Koki Nakayama, Ayumi Nakayama, Ken Suzuki, Hideo Miura

    Fatigue and Fracture of Engineering Materials and Structures 46 (8) 3043-3059 2023/08

    DOI: 10.1111/ffe.14013  

    ISSN: 8756-758X

    eISSN: 1460-2695

  13. Oxidation-involved life prediction and damage assessment under generalized creep-fatigue loading conditions based on engineering damage mechanics

    Run Zi Wang, Xian Cheng Zhang, Hang Hang Gu, Kai Shang Li, Jian Feng Wen, Hideo Miura, Ken Suzuki, Shan Tung Tu

    Journal of Materials Research and Technology 23 114-130 2023/03/01

    DOI: 10.1016/j.jmrt.2022.12.094  

    ISSN: 2238-7854

  14. Control of the Adsorption Behavior of Gas Molecule on Graphene by Strain: First-Principles Calculations for Development of Multi-Gas Selective Sensors

    Meng Yin, Xiangyu Qiao, Ken Suzuki, Hideo Miura, Lei Wang

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 241-244 2023

    DOI: 10.23919/SISPAD57422.2023.10319538  

  15. IMPROVEMENT OF SENSITIVITY AND SELECTIVITY OF GRAPHENE-BASED GAS SENSOR BY STRAIN

    Xiangyu Qiao, Meng Yin, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 4 2023

    DOI: 10.1115/IMECE2023-112231  

  16. SENSITIVITY IMPROVEMENT OF GRAPHENE-BASED GAS SENSORS BY DIRECT GROWTH OF CARBON NANOTUBES ON THE GRAPHENE

    Ken Suzuki, Yuto Hirose, Xiangyu Qiao, Wangyang Fu, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 4 2023

    DOI: 10.1115/IMECE2023-113221  

  17. Evaluation of fatigue and creep-fatigue damage levels on the basis of engineering damage mechanics approach

    Li Sun, Xian Cheng Zhang, Run Zi Wang, Xiao Wei Wang, Shan Tung Tu, Ken Suzuki, Hideo Miura

    International Journal of Fatigue 166 2023/01

    DOI: 10.1016/j.ijfatigue.2022.107277  

    ISSN: 0142-1123

  18. Strain-Induced Change of Gas Adsorption Properties of Graphene and its Application to a Gas Sensor

    Xiangyu Qiao, Meng Yin, Ken Suzuki, Hideo Miura

    2023 International Conference on Electronics Packaging, ICEP 2023 161-162 2023

    DOI: 10.23919/ICEP58572.2023.10129780  

  19. Penta-graphene and phagraphene: thermal expansion, linear compressibility, and Poisson’s ratio

    Lei Wang, Ying Chen, Hideo Miura, Ken Suzuki, Cong Wang

    Journal of Physics Condensed Matter 34 (50) 2022/12/14

    DOI: 10.1088/1361-648X/ac9c3e  

    ISSN: 0953-8984

    eISSN: 1361-648X

  20. Tunable uniaxial, area, and volume negative thermal expansion in quartz-like and diamond-like metal–organic frameworks Peer-reviewed

    Lei Wang, Ying Chen, Hideo Miura, Ken Suzuki, Cong Wang

    RSC Advances, 12 (34) 21770-21779 2022/08

    DOI: 10.1039/d2ra03292a  

    eISSN: 2046-2069

  21. Evaluation of fracture properties of annealed Fe–Si–B–Cr amorphous alloys using micro-tensile tests and blanking machinability

    Chieko Kuji, Masayoshi Mizutani, Keita Shimada, Ken Suzuki, Hideo Miura, Tsunemoto Kuriyagawa

    Materials Science and Engineering: A 848 143483-143483 2022/07

    Publisher: Elsevier BV

    DOI: 10.1016/j.msea.2022.143483  

    ISSN: 0921-5093

  22. Strain-Induced Change in the Photonic Properties of Dumbbell-Shaped Graphene Nanoribbon Structures

    Jowesh Avisheik Goundar, Ken Suzuki, Hideo Miura

    2022 International Conference on Electronics Packaging, ICEP 2022 81-82 2022

    DOI: 10.23919/ICEP55381.2022.9795457  

  23. Molecular Dynamics Analysis on the Degradation Mechanism of the Crystallinity and Strength of Grain Boundaries in Heat-Resistant Alloys Under Creep-Fatigue Loading at Elevated Temperature

    Shogo Tezuka, Ken Suzuki

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 2022

    DOI: 10.1115/IMECE2022-94286  

  24. PREDICTION OF THE GENERATION OF INTERGRANULAR CRACKING IN STAINLESS STEELS UNDER CREEP LOADING AT ELEVATED TEMPERATURES

    Ken Suzuki, Koki Nakayama, Ayumi Nakayama, Shogo Tezuka, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 2022

    DOI: 10.1115/IMECE2022-94891  

  25. STRAIN-INDUCED CHANGE OF ADSORPTION BEHAVIOUR OF GAS MOLECULES ON GRAPHENE ANALYZED BY DENSITY FUNCTIONAL METHOD

    Meng Yin, Xiangyu Qiao, Qinqiang Zhang, Ken Suzuki, Lei Wang

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 2022

    DOI: 10.1115/IMECE2022-94892  

  26. IMPROVEMENT OF THE SENSITIVITY AND SELECTIVITY OF GAS MOLECULES OF GRAPHENE-BASE GAS SENSOR WITH CARBON NANOTUBES UNDER THE APPLICATION OF STRAIN

    Yuto Hirose, Xiangyu Qiao, Wangyang Fu, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 2022

    DOI: 10.1115/IMECE2022-95307  

  27. CREEP-FATIGUE RELIABILITY ANALYSIS INTEGRATED WITH SURROGATE MODELLING: APPLICATION ON INDUSTRIAL CASE STUDIES

    Run Zi Wang, Ken Suzuki, Hideo Miura, Xian Cheng Zhang, Shan Tung Tu

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 2022

    DOI: 10.1115/IMECE2022-94273  

  28. Stability and Thermodynamics Properties of CrFeNiCoMn/Pd High Entropy Alloys from First Principles

    Nguyen Dung Tran, Arkapol Saengdeejing, Ken Suzuki, Hideo Miura, Ying Chen

    Journal of Phase Equilibria and Diffusion 42 (5) 606-616 2021/10

    DOI: 10.1007/s11669-021-00900-1  

    ISSN: 1547-7037

    eISSN: 1863-7345

  29. Theoretical study on strain-controllable gradient Schottky barrier of dumbbell-shape graphene nanoribbon for highly sensitive strain sensors

    Qinqiang Zhang, Ken Suzuki, Hideo Miura

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2021-September 171-174 2021/09/27

    DOI: 10.1109/SISPAD54002.2021.9592548  

  30. Development of highly sensitive strain sensor using area-arrayed graphene nanoribbons

    Ken Suzuki, Ryohei Nakagawa, Qinqiang Zhang, Hideo Miura

    Nanomaterials 11 (7) 2021/07

    DOI: 10.3390/nano11071701  

    eISSN: 2079-4991

  31. Electronic band-engineering of a dumbbell-shaped graphene nanoribbon by the application of uniaxial tensile strain

    Jowesh Avisheik Goundar, Qinqiang Zhang, Ken Suzuki, Hideo Miura

    2021 International Conference on Electronics Packaging, ICEP 2021 147-148 2021/05/12

    DOI: 10.23919/ICEP51988.2021.9451931  

  32. First-principles calculation on the uniaxial-strain-induced change of the adsorption behavior of gas molecules on graphene

    Meng YIN, Qinqiang ZHANG, Xiangyu QIAO, Ken SUZUKI, Hideo MIURA

    The Proceedings of The Computational Mechanics Conference 2021.34 012-012 2021

    Publisher: Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmecmd.2021.34.012  

    eISSN: 2424-2799

  33. CREEP-FATIGUE DAMAGE OF HEAT-RESISTANT ALLOYS CAUSED BY THE LOCAL LATTICE MISMATCH-INDUCED ACCELERATION OF THE GENERATION AND ACCUMULATION OF DISLOCATIONS AND VACANCIES

    Yifan Luo, Shogo Tezuka, Koki Nakayama, Ayumi Nakayama, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 12 2021

    DOI: 10.1115/IMECE2021-68489  

  34. DETACHABLE FINE BUMP CONNECTION USING MULTI-WALLED CARBON-NANOTUBE BUNDLES FOR 3D SEMICONDUCTOR MODULES

    Masasuke Kobayashi, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 12 2021

    DOI: 10.1115/IMECE2021-70172  

  35. EFFECT OF TENSILE STRAIN ON ELECTRON TRANSPORT PROPERTIES OF DUMBBELL-SHAPE GRAPHENE NANORIBBONS WITH METALLIC-SEMICONDUCTING INTERFACES

    Ken Suzuki, Qinqiang Zhang, Xiangyu Qiao

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 12 2021

    DOI: 10.1115/IMECE2021-70930  

  36. ACCELERATION MECHANISM OF INTERGRANULAR CRACKING OF SUS361L UNDER CREEP-FATIGUE LOADING AT ELEVATED TEMPERATURES

    Yukako Takahashi, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 12 2021

    DOI: 10.1115/IMECE2021-70108  

  37. IMPROVEMENT IN PHOTOSENSITIVITY OF DUMBBELL-SHAPED GRAPHENE NANORIBBON STRUCTURES BY USING ASYMMETRIC METALLIZATION TECHNIQUE

    Jowesh Avisheik Goundar, Qiao Xiangyu, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 12 2021

    DOI: 10.1115/IMECE2021-69917  

  38. MOLECULAR DYNAMICS ANALYSIS OF THE ACCELERATION OF THE DEGRADATION OF THE STRENGTH OF A GRAIN BOUNDARY UNDER CREEP-FATIGUE LOADS

    Shujiroh Suzuki, Shogo Tezuka, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 12 2021

    DOI: 10.1115/IMECE2021-70628  

  39. Stability and structural properties of vacancy-ordered and -disordered ZrCx

    Theresa Davey, Ken Suzuki, Hideo Miura, Ying Chen

    RSC Advances 11 (52) 32573-32589 2021

    Publisher: Royal Society of Chemistry (RSC)

    DOI: 10.1039/d1ra06362f  

    eISSN: 2046-2069

  40. A first-principles study on the strain-induced localized electronic properties of dumbbell-shape graphene nanoribbon for highly sensitive strain sensors

    Qinqiang Zhang, Ken Suzuki, Hideo Miura

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2020-September 379-382 2020/09/23

    DOI: 10.23919/SISPAD49475.2020.9241686  

  41. A quasi in-situ study on the deformation mechanism in a 2.2Cr heat resistant steel

    L. Cheng, Y. L. Chen, X. F. Gu, W. Yu, Q. W. Cai, K. Suzuki, H. Miura, R. D.K. Misra

    Materials Science and Engineering A 788 2020/06/24

    DOI: 10.1016/j.msea.2020.139557  

    ISSN: 0921-5093

  42. Initial Intergranular Cracking of Ni-Base Superalloys Due to the Degradation of the Crystallinity of Grain Boundaries Under Creep-Fatigue Loading

    Wataru Suzuki, Yifan Luo, Kenta Ishihara, Kens Suzuki, Hideo Miura

    Structural Integrity 16 325-331 2020

    DOI: 10.1007/978-3-030-47883-4_58  

    ISSN: 2522-560X

    eISSN: 2522-5618

  43. Theoretical study of heterojunction-like electronic properties between a semiconductive graphene nanoribbon and a metallic graphene for highly sensitive strain sensors

    Qinqiang Zhang, Xiangyu Qiao, Masasuke Kobayashi, Ken Suzuki

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 13 2020

    DOI: 10.1115/IMECE2020-23782  

  44. Non-destructive evaluation of the degradation of NI-base superalloy in the air by reflectance spectrum analysis

    Shin Kasama, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 12 2020

    DOI: 10.1115/IMECE2020-23354  

  45. Crystallinity dependence of grain and grain boundary strength of a bicrystal structure of copper

    Ken Suzuki, Yiqing Fan, Yifan Luo

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 13 2020

    DOI: 10.1115/IMECE2020-23757  

  46. Development of a strain-controlled graphene-based highly sensitive gas sensor

    Xiangyu Qiao, Qinqiang Zhang, Ken Suzuki

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 3 2020

    DOI: 10.1115/IMECE2020-23581  

  47. Molecular dynamics analysis of the acceleration of intergranular cracking of Ni-base superalloy caused by accumulation of vacancies and dislocations around grain boundaries

    Ryo Kikuchi, Shujiro Suzuki, Ken Suzuki

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 12 2020

    DOI: 10.1115/IMECE2020-23352  

  48. Crystallinity Dependence of Long-Term Reliability of Electroplated Gold Thin-Film Interconnections

    Ken Suzuki, Ryota Mizuno, Yutaro Nakoshi, Hideo Miura

    IEEE 2019 International 3D Systems Integration Conference, 3DIC 2019 2019/10

    DOI: 10.1109/3DIC48104.2019.9058897  

  49. Theoretical study of the edge effect of dumbbellshape graphene nanoribbon with a dual electronic properties by first-principle calculations

    Qinqiang Zhang, Takuya Kudo, Jowesh Gounder, Ying Chen, Ken Suzuki, Hideo Miura

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2019-September 2019/09

    DOI: 10.1109/SISPAD.2019.8870398  

  50. Variation of the Lifetime of Interconnections Due to the Crystallinity of Grain Boundaries in Thin-Film Interconnections

    Ryota Mizuno, Yutaro Nakoshi, Ken Suzuki, Hideo Miura

    EMAP 2018 - 2018 20th International Conference on Electronic Materials and Packaging 2019/03/05

    DOI: 10.1109/EMAP.2018.8660838  

  51. Bending Deformation-Induced Drastic Change of the Resistance of Graphene Nano-Ribbons

    Takuya Kudo, Zhi Wang, Ken Suzuki, Hideo Miura

    EMAP 2018 - 2018 20th International Conference on Electronic Materials and Packaging 2019/03/05

    DOI: 10.1109/EMAP.2018.8660828  

  52. Strain-induced Change of Electronic Band Structure of Dumbbell-Shape Graphene Nanoribbon

    Qinqiang Zhang, Ken Suzuki, Hideo Miura

    EMAP 2018 - 2018 20th International Conference on Electronic Materials and Packaging 2019/03/05

    DOI: 10.1109/EMAP.2018.8660806  

  53. A theoretical study of the effect of strain on the electronic structure of dumbbell-shape graphene nanoribbons

    Qinqiang Zhang, Takuya Kudo, Ken Suzuki, Hideo Miura

    Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT 2018-October 161-164 2019/01/24

    DOI: 10.1109/IMPACT.2018.8625809  

    ISSN: 2150-5934

    eISSN: 2150-5942

  54. Variation of the strength and fracture mode of a grain and a grain boundary in polycrystalline copper thin films

    Guoxiong Zheng, Yifan Luo, Ken Suzuki, Hideo Miura

    Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT 2018-October 119-122 2019/01/24

    DOI: 10.1109/IMPACT.2018.8625739  

    ISSN: 2150-5934

    eISSN: 2150-5942

  55. Development of 2D-graphene-based highly sensitive flexible strain sensor using fine columnar concentration structures

    Zhi Wang, Ken Suzuki, Hideo Miura

    Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT 2018-October 157-160 2019/01/24

    DOI: 10.1109/IMPACT.2018.8625746  

    ISSN: 2150-5934

    eISSN: 2150-5942

  56. Strain and photovoltaic sensitivities of dumbbell-shape GnR-base sensors

    Jowesh Avisheik Goundar, Takuya Kudo, Qinqiang Zhang, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 10 2019

    DOI: 10.1115/IMECE2019-11076  

  57. Change of the effective strength of grain boundaries in Alloy 617 under creep-fatigue loadings at 800°C

    Wataru Suzuki, Kenta Ishihara, Ryo Kikuchi, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 2019

    DOI: 10.1115/IMECE2019-11210  

  58. First principle analysis of the effect of strain on electronic transport properties of dumbbell-shape graphene nanoribbons

    Takuya Kudo, Qinqiang Zhang, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 10 2019

    DOI: 10.1115/IMECE2019-11107  

  59. Measurement of the residual stress distribution in the 3D-stacked electronic modules by embedded strain sensors

    Ryota Mizuno, Genta Nakauchi, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 10 2019

    DOI: 10.1115/IMECE2019-11106  

  60. Grain boundary cracking of nickel-based alloy 625 under creep loadings at elevated temperatures

    Yan Liang, Yifan Luo, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 2019

    DOI: 10.1115/IMECE2019-11186  

  61. Degradation of the Strength of a Grain Boundary in Ni-Base Superalloy Under Creep-Fatigue Loading

    Wataru Suzuki, Akari Sawase, Ken Suzuki, Hideo Miura

    Structural Integrity 5 227-232 2019

    DOI: 10.1007/978-3-319-91989-8_49  

    ISSN: 2522-560X

    eISSN: 2522-5618

  62. Effects of crystallinity on mechanical properties of electroplated gold thin films used for three-dimensional electronic packaging

    Yutaro Nakoshi, Ken Suzuki, Hideo Miura

    Japanese Journal of Applied Physics 58 (SB) 2019

    DOI: 10.7567/1347-4065/ab00f4  

    ISSN: 0021-4922

    eISSN: 1347-4065

  63. Effect of Defects on the Grain and Grain Boundary Strength in Polycrystalline Copper Thin Films

    Ken Suzuki, Fan Yiqing, Yifan Luo, Hideo Miura

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2018-September 88-91 2018/11/28

    DOI: 10.1109/SISPAD.2018.8551672  

  64. Effect of tungsten on microstructures of annealed electrodeposited Ni-W alloy and its corrosion resistance Peer-reviewed

    Lv Jinlong, Wang Zhuqing, Liang Tongxiang, Ken Suzuki, Miura Hideo

    Surface and Coatings Technology 337 516-524 2018/03/15

    DOI: 10.1016/j.surfcoat.2018.01.070  

    ISSN: 0257-8972

  65. Evaluation of the relationship between the tensile strength of a grain boundary in electroplated copper thin films and the crystallinity of the grain boundary using micro tensile test Peer-reviewed

    Guoxiong Zheng, Ken Suzuki, Hideo Miura

    Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT 2017- 179-182 2018/01/12

    DOI: 10.1109/IMPACT.2017.8255902  

    ISSN: 2150-5942 2150-5934

    eISSN: 2150-5942

  66. Flexible and highly sensitive pressure sensor using multi-walled carbon nanotubes Peer-reviewed

    Ryusaku Osada, Kanji Yumoto, Ken Suzuki, Hideo Miura

    Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT 2017- 218-221 2018/01/12

    DOI: 10.1109/IMPACT.2017.8255896  

    ISSN: 2150-5942 2150-5934

    eISSN: 2150-5942

  67. Graphene nano-ribbon-base highly sensitive pressure sensor using area-arrayed pillar structure Peer-reviewed

    Zhi Wang, Ken Suzuki, Hideo Miura

    Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT 2017- 46-49 2018/01/12

    DOI: 10.1109/IMPACT.2017.8255901  

    ISSN: 2150-5942 2150-5934

    eISSN: 2150-5942

  68. Relationship between mechanical properties and micro texture of electroplated gold thin films Peer-reviewed

    Yutaro Nakoshi, Ken Suzuki, Hideo Miura

    Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT 2017- 58-61 2018/01/12

    DOI: 10.1109/IMPACT.2017.8255898  

    ISSN: 2150-5942 2150-5934

    eISSN: 2150-5942

  69. Crystallinity control of the electroplated copper thin film interconnections for advanced electronic devices Peer-reviewed

    Ryota Mizuno, Ken Suzuki, Hideo Miura

    Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT 2017- 62-65 2018/01/12

    DOI: 10.1109/IMPACT.2017.8255899  

    ISSN: 2150-5942 2150-5934

    eISSN: 2150-5942

  70. Development of high-quality graphene nano-ribbon fabrication process for high sensitivity strain sensor Peer-reviewed

    Ryohei Nakagawa, Ken Suzuki, Hideo Miura

    Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT 2017- 214-217 2018/01/12

    DOI: 10.1109/IMPACT.2017.8255897  

    ISSN: 2150-5942 2150-5934

    eISSN: 2150-5942

  71. Disappearance of martensitic strengthened-micro-texture in modified 9Cr-1Mo steel caused by stress-induced acceleration of atomic diffusion at elevated temperatures

    Taichi Shinozaki, Ken Suzuki, Hideo Miura

    Key Engineering Materials 774 KEM 31-35 2018

    DOI: 10.4028/www.scientific.net/KEM.774.31  

    ISSN: 1013-9826

    eISSN: 1662-9795

  72. Theoretical study of electronic band structure of dumbbellshape graphene nanoribbons for highly-sensitive strain sensors

    Qinqiang Zhang, Takuya Kudo, Ken Suzuki

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 10 2018

    DOI: 10.1115/IMECE201888431  

  73. Area-arrayed graphene nano-ribbon-base strain sensor

    Ryohei Nakagawa, Zhi Wang, Ken Suzuki

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 10 2018

    DOI: 10.1115/IMECE201887277  

  74. Photosensitivity of monolayer graphene-base field effect transistor

    Jowesh Avisheik Goundar, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 10 2018

    DOI: 10.1115/IMECE201887245  

  75. Development of a flexible tactile sensor using area-arrayed bundle structures of multi-walled carbon nanotubes

    Ryusaku Osada, Ken Suzuki

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 10 2018

    DOI: 10.1115/IMECE201887275  

  76. Comparison of corrosion resistance of electrodeposited pure Ni and nanocrystalline Ni-Fe alloy in borate buffer solution Peer-reviewed

    Lv Jinlong, Meng Yang, Ken Suzuki, Hideo Miura, Yubo Zhang

    MATERIALS CHEMISTRY AND PHYSICS 202 15-21 2017/12

    DOI: 10.1016/j.matchemphys.2017.09.005  

    ISSN: 0254-0584

    eISSN: 1879-3312

  77. Comparing different microstructures of CoS formed on bare Ni foam and Ni foam coated graphene and their supercapacitors performance Peer-reviewed

    Lv Jinlong, Liang Tongxiang, Yang Meng, Ken Suzuki, Hideo Miura

    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS 529 57-63 2017/09

    DOI: 10.1016/j.colsurfa.2017.05.074  

    ISSN: 0927-7757

    eISSN: 1873-4359

  78. Improving hydrogen evolution reaction for MoS2 hollow spheres Peer-reviewed

    Lv Jinlong, Guo Wenli, Liang Tongxiang, Suzuki Ken, Miura Hideo

    JOURNAL OF ELECTROANALYTICAL CHEMISTRY 799 304-307 2017/08

    DOI: 10.1016/j.jelechem.2017.06.024  

    ISSN: 1572-6657

    eISSN: 1873-2569

  79. The effect of graphene coated nickel foam on the microstructures of NiO and their supercapacitor performance Peer-reviewed

    Lv Jinlong, Zhuqing Wang, Liang Tongxiang, Yang Meng, Ken Suzuki, Hideo Miura

    JOURNAL OF ELECTROANALYTICAL CHEMISTRY 799 595-601 2017/08

    DOI: 10.1016/j.jelechem.2017.07.013  

    ISSN: 1572-6657

    eISSN: 1873-2569

  80. Performance comparison of NiCo2O4 and NiCo2S4 formed on Ni foam for supercapacitor Peer-reviewed

    Lv Jinlong, Liang Tongxiang, Yang Meng, Suzuki Ken, Miura Hideo

    COMPOSITES PART B-ENGINEERING 123 28-33 2017/08

    DOI: 10.1016/j.compositesb.2017.05.021  

    ISSN: 1359-8368

    eISSN: 1879-1069

  81. The effect of reduced graphene oxide on MoS2 for the hydrogen evolution reaction in acidic solution Peer-reviewed

    Lv Jinlong, Yang Meng, Liang Tongxiang, Ken Suzuki, Hideo Miura

    CHEMICAL PHYSICS LETTERS 678 212-215 2017/06

    DOI: 10.1016/j.cplett.2017.04.072  

    ISSN: 0009-2614

    eISSN: 1873-4448

  82. Effect of the Crystallinity on the Electromigration Resistance of Electroplated Copper Thin-Film Interconnections Peer-reviewed

    Takeru Kato, Ken Suzuki, Hideo Miura

    JOURNAL OF ELECTRONIC PACKAGING 139 (2) 2017/06

    DOI: 10.1115/1.4036442  

    ISSN: 1043-7398

    eISSN: 1528-9044

  83. Fabrication of 3D graphene foam for a highly conducting electrode Peer-reviewed

    Lv Jinlong, Yang Meng, Ken Suzuki, Hideo Miura

    MATERIALS LETTERS 196 369-372 2017/06

    DOI: 10.1016/j.matlet.2017.03.079  

    ISSN: 0167-577X

    eISSN: 1873-4979

  84. Investigation of microstructures of ZnCo2O4 on bare Ni foam and Ni foam coated with graphene and their supercapacitors performance Peer-reviewed

    Jinlong Lv, Tongxiang Liang, Meng Yang, Suzuki Ken, Miura Hideo

    JOURNAL OF ENERGY CHEMISTRY 26 (3) 330-335 2017/05

    DOI: 10.1016/j.jechem.2017.04.010  

    ISSN: 2095-4956

  85. Synthesis of CoMoO4@RGO nanocomposites as high-performance supercapacitor electrodes Peer-reviewed

    Lv Jinlong, Yang Meng, Ken Suzuki, Hideo Miura

    MICROPOROUS AND MESOPOROUS MATERIALS 242 264-270 2017/04

    DOI: 10.1016/j.micromeso.2017.01.034  

    ISSN: 1387-1811

    eISSN: 1873-3093

  86. The plume-like Ni3S2 supercapacitor electrodes formed on nickel foam by catalysis of thermal reduced graphene oxide Peer-reviewed

    Lv Jinlong, Liang Tongxiang, Yang Meng, Ken Suzuki, Hideo Miura

    JOURNAL OF ELECTROANALYTICAL CHEMISTRY 786 8-13 2017/02

    DOI: 10.1016/j.jelechem.2017.01.004  

    ISSN: 1572-6657

    eISSN: 1873-2569

  87. Enhancement of band gap and evolution of in-gap states in hydrogen-adsorbed monolayer graphene on SiC(0001)

    Sugawara, K., Suzuki, K., Sato, M., Sato, T., Takahashi, T.

    Carbon 124 2017

    DOI: 10.1016/j.carbon.2017.09.024  

    ISSN: 0008-6223

  88. Atomic scale degradation of the initial strengthened micro texture of heat-resistant alloys under creep and fatigue loadings

    Takuya Murakoshi, Taichi Shinozaki, Ken Suzuki, Hideo Miura

    ICF 2017 - 14th International Conference on Fracture 1 409-411 2017

  89. Degradation of the strength of grains and grain boundaries of Ni-base superalloy under creep and creep-fatigue loadings Peer-reviewed

    Takuya Murakoshi, Hayato Sakamoto, Taichi Shinozaki, Ken Suzuki, Hideo Miura

    Key Engineering Materials 754 31-34 2017

    Publisher: Trans Tech Publications Ltd

    DOI: 10.4028/www.scientific.net/KEM.754.31  

    ISSN: 1013-9826

  90. Mechanical stress monitoring sensor for 3-d module during manufacturing and operation Peer-reviewed

    Koki Isobe, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 10 IMECE2017-70323 2017

    DOI: 10.1115/IMECE201770323  

  91. Creep-damage-induced deterioration of the strength of ni-base superalloy due to the change of its microstructure Peer-reviewed

    Hayato Sakamoto, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 IMECE2017-70317 2017

    DOI: 10.1115/IMECE2017-70317  

  92. Largely deformable and highly sensitive strain sensor using carbon nanomaterials Peer-reviewed

    Kanji Yumoto, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 10 IMECE2017-70388 2017

    DOI: 10.1115/IMECE201770388  

  93. Evaluation of damage evolution in nickel-base heat-resistant alloy under creep-fatigue loading conditions Peer-reviewed

    Ken Suzuki, Takuya Murakoshi, Hiroki Sasaki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 IMECE2017-72139 2017

    DOI: 10.1115/IMECE2017-72139  

  94. Crystallinity-induced variation of the yield strength of electroplated copper thin films Peer-reviewed

    Yifan Luo, Kunio Tei, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 IMECE2017-70302 2017

    DOI: 10.1115/IMECE2017-70302  

  95. CRYSTALLINITY CONTROL OF ELECTROPLATED INTERCONNECTIONS FOR IMPROVING THEIR STABILITY AND LIFETIME Peer-reviewed

    Jiatong Liu, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2016, VOL. 10 2017

  96. CRYSTALLINITY-INDUCED DEGRADATION OF THE LIFETIME OF ADVANCED INTERCONNECTIONS Peer-reviewed

    Takeru Kato, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2016, VOL. 10 2017

  97. Stress-induced acceleration of the change of microstructure of ni-base superalloy CM247LC Peer-reviewed

    Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 IMECE2017-70314 2017

    DOI: 10.1115/IMECE2017-70314  

  98. MICROSCOPIC ANALYSIS OF THE INITIATION OF HIGH-TEMPERATURE DAMAGE OF NI-BASED HEAT-RESISTANT ALLOY Peer-reviewed

    Takuya Murakoshi, Ken Suzuki, Isamu Nonaka, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2016, VOL. 9 2017

  99. ATOMIC DIFFUSION INDUCED DAMAGE OF NI-BASE SUPER ALLOY AT ELEVATED TEMPERATURE Peer-reviewed

    Motoki Takahashi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2016, VOL. 9 2017

  100. Stress-induced change of the microstructure and strength of modified 9Cr-1Mo steel under fatigue and creep loadings at elevated temperatures Peer-reviewed

    Taichi Shinozaki, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 9 IMECE2017-70494 2017

    DOI: 10.1115/IMECE2017-70494  

  101. Enhancing the corrosion resistance of the 2205 duplex stainless steel bipolar plates in PEMFCs environment by surface enriched molybdenum Peer-reviewed

    Lv Jinlong, Wang Zhuqing, Liang Tongxiang, Suzuki Ken, Miura Hideo

    RESULTS IN PHYSICS 7 3459-3464 2017

    DOI: 10.1016/j.rinp.2017.09.001  

    ISSN: 2211-3797

  102. VARIATION OF THE STRENGTH OF GRAINS AND GRAIN BOUNDARIES CAUSED BY THE FLUCTUATION OF THEIR CRYSTALLINITY Peer-reviewed

    Takahiro Nakanishi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2016, VOL. 9 2017

  103. HIGHLY-SENSITIVE GRAPHENE NANO-RIBBON-BASE STRAIN SENSOR Peer-reviewed

    Shinichirou Sasaki, Meng Yang, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2016, VOL. 10 2017

  104. Measurement of the strength of a grain boundary in electroplated copper thin-film interconnections by using micro tensile-test Peer-reviewed

    T. Shinozaki, T Nakanishi, K Suzuki, H Miura

    Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium 2016- 2016/11/28

    Publisher: Institute of Electrical and Electronics Engineers Inc.

    DOI: 10.1109/IEMT.2016.7761963  

    ISSN: 1089-8190

  105. Effects of uniaxial compressive strain on the electronic-transport properties of zigzag carbon nanotubes Peer-reviewed

    Masato Ohnishi, Ken Suzuki, Hideo Miura

    NANO RESEARCH 9 (5) 1267-1275 2016/05

    DOI: 10.1007/s12274-016-1022-0  

    ISSN: 1998-0124

    eISSN: 1998-0000

  106. Electronic properties and strain sensitivity of CVD-grown graphene with acetylene Peer-reviewed

    Meng Yang, Shinichirou Sasaki, Masato Ohnishi, Ken Suzuki, Hideo Miura

    JAPANESE JOURNAL OF APPLIED PHYSICS 55 (4) 2016/04

    DOI: 10.7567/JJAP.55.04EP05  

    ISSN: 0021-4922

    eISSN: 1347-4065

  107. Control of the nucleation and quality of graphene grown by low-pressure chemical vapor deposition with acetylene Peer-reviewed

    Meng Yang, Shinichirou Sasaki, Ken Suzuki, Hideo Miura

    APPLIED SURFACE SCIENCE 366 219-226 2016/03

    DOI: 10.1016/j.apsusc.2016.01.089  

    ISSN: 0169-4332

    eISSN: 1873-5584

  108. Minimization of Residual Stress in TSV Interconnections by Controlling Their Crystallinity Peer-reviewed

    Jiatong Liu, Takeru Kato, Ken Suzuki, Hideo Miura

    2016 15TH IEEE INTERSOCIETY CONFERENCE ON THERMAL AND THERMOMECHANICAL PHENOMENA IN ELECTRONIC SYSTEMS (ITHERM) 58-63 2016

    DOI: 10.1109/ITHERM.2016.7517528  

    ISSN: 1087-9870

  109. HIGHLY SENSITIVE PRESSURE SENSOR USING TWO-DIMENSIONALLY ALIGNED CARBON NANOTUBE BUNDLES Peer-reviewed

    Takuya Nozaki, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2015, VOL 10 2016

  110. CHARACTERIZATION OF THE ELECTRONIC PROPERTIES AND STRAIN SENSITIVITY OF GRAPHENE FORMED BY C2H2 CHEMICAL VAPOR DEPOSITION Peer-reviewed

    Meng Yang, Masato Ohnishi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2015, VOL 10 2016

  111. Effect of the crystallinity of a grain boundary on the self-diffusion of copper in thin-film interconnections Peer-reviewed

    Hayato Sakamoto, Takeru Kato, Ken Suzuki, Hideo Miura

    2016 IEEE 37TH INTERNATIONAL ELECTRONICS MANUFACTURING TECHNOLOGY (IEMT) & 18TH ELECTRONICS MATERIALS AND PACKAGING (EMAP) CONFERENCE 2016

    ISSN: 1089-8190

  112. Development of MWCNT-based Strain Sensor Using Flexible Substrate Peer-reviewed

    Kanji Yumoto, Ken Suzuki, Hideo Miura

    2016 IEEE 37TH INTERNATIONAL ELECTRONICS MANUFACTURING TECHNOLOGY (IEMT) & 18TH ELECTRONICS MATERIALS AND PACKAGING (EMAP) CONFERENCE 2016

    ISSN: 1089-8190

  113. Initial Degradation Process of Heat-resistant Materials Based on the Change of Crystallinity of Grains and Grain Boundaries Peer-reviewed

    Takuya Murakoshi, Taichi Shinozaki, Ken Suzuki, Hideo Miura

    21ST EUROPEAN CONFERENCE ON FRACTURE, (ECF21) 2 1383-1390 2016

    DOI: 10.1016/j.prostr.2016.06.176  

    ISSN: 2452-3216

  114. CRYSTALLINITY DEGRADATION CAUSED BY ALLOYING ELEMENTS DIFFUSION DURING CREEP OF NI-BASE SUPERALLOY Peer-reviewed

    Ken Suzuki, Takuya Murakoshi, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2015, VOL. 14 2016

  115. ELUCIDATION OF THE HIGH CYCLE FATIGUE DAMAGE MECHANISM OF MODIFIED 9CR-1MO STEEL AT ELEVATED TEMPERATURE Peer-reviewed

    Takuya Murakoshi, Motoyuki Ochi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2015, VOL 9 2016

  116. Highly-sensitive graphene nano-ribbon-base strain sensor Peer-reviewed

    Shinichirou Sasaki, Yang Meng, Ken Suzuki, Hideo Miura

    ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 10 IMECE2017-70318 2016

    DOI: 10.1115/IMECE201667602  

  117. Effect of Crystallographic Quality of Grain Boundaries on Both Mechanical and Electrical Properties of Electroplated Copper Thin Film Interconnections Peer-reviewed

    Naokazu Murata, Naoki Saito, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    JOURNAL OF ELECTRONIC PACKAGING 137 (3) 2015/09

    DOI: 10.1115/1.4029931  

    ISSN: 1043-7398

    eISSN: 1528-9044

  118. Quantitative evaluation of orbital hybridization in carbon nanotubes under radial deformation using pi-orbital axis vector Peer-reviewed

    Masato Ohnishi, Ken Suzuki, Hideo Miura

    AIP ADVANCES 5 (4) 2015/04

    DOI: 10.1063/1.4918676  

    ISSN: 2158-3226

  119. IMPROVEMENT OF THERMAL CONDUCTIVITY OF ELECTROPLATED COPPER THIN-FILM INTERCONNECTIONS BY CONTROLLING THEIR MICRO TEXTURE Peer-reviewed

    Pornvitoo Rittinon, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2014, VOL 10 2015

  120. IMPROVEMENT OF THERMAL CONDUCTIVITY OF ELECTROPLATED COPPER INTERCONNECTIONS BY CONTROLLING THEIR CRYSTALLINITY Peer-reviewed

    Masaru Gotoh, Ken Suzuki, Hideo Miura

    INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2015, VOL 2 2015

    DOI: 10.1115/IPACK2015-48197  

  121. EFFECT OF THREE DIMENSIONAL STRAIN ON THE ELECTRONIC PROPERTIES OF GRAPHENE NANORIBBONS Peer-reviewed

    Meng Yang, Masato Ohnishi, Ken Suzuki, Hideo Miura

    INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2015, VOL 3 2015

    DOI: 10.1115/IPACK2015-48239  

  122. IMPROVEMENT OF THE LONG-TERM RELIABILITY OF INTERCONNECTION BY CONTROLLING THE CRYSTALLINITY OF GRAIN BOUNDARIES Peer-reviewed

    Takahiro Nakanishi, Ken Suzuki, Hideo Miura

    INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2015, VOL 2 2015

    DOI: 10.1115/IPACK2015-48200  

  123. HIGHLY SENSITIVE TWO DIMENSIONAL TACTILE SENSOR USING MULTI-WALLED CARBON NANOTUBE Peer-reviewed

    Takuya Nozaki, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2014, VOL 10 2015

    DOI: 10.1115/IMECE2014-36868  

  124. NANOTEXTURE CHANGE CAUSED BY STRAIN-INDUCED ANISOTROPIC DIFFUSION DURING CREEP OF NI-BASE SUPERALLOY Peer-reviewed

    Ken Suzuki, Motoyuki Ochi, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2014, VOL 9 2015

    DOI: 10.1115/IMECE2014-39430  

  125. IMPROVEMENT OF THE LONG-TERM RELIABILITY OF TSV INTERCONNECTIONS USED IN THREE-DIMENSIONAL STACKED MODULES Peer-reviewed

    Hideo Miura, Ken Suzuki

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2014, VOL 10 2015

    DOI: 10.1115/IMECE2014-36973  

  126. CHANGE IN SPATIAL DISTRIBUTION OF STATE DENSITIES OF CARBON NANOTUBES UNDER ANISOTROPIC STRAIN FIELD Peer-reviewed

    Masato Ohnishi, Yang Meng, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2014, VOL 10 2015

    DOI: 10.1115/IMECE2014-39470  

  127. HIGH CYCLE FATIGUE STRENGTH OF MODIFIED 9CR-1MO STEEL AT ELEVATED TEMPERATURES Peer-reviewed

    Motoyuki Ochi, Ken Suzuki, Isamu Nonaka, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2014, VOL 9 2015

    DOI: 10.1115/IMECE2014-36865  

  128. Change in Electronic Properties of Carbon Nanotubes Caused by Local Distortion under Axial Compressive Strain Peer-reviewed

    Ken Suzuki, Masato Ohnishi, Hideo Miura

    2015 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 88-91 2015

    DOI: 10.1109/SISPAD.2015.7292265  

    ISSN: 1946-1569

  129. Thermal Stability of Electroplated Copper Thin-Film Interconnections Peer-reviewed

    Pornvitoo Rittinon, Ken Suzuki, Hideo Miura

    2015 INTERNATIONAL 3D SYSTEMS INTEGRATION CONFERENCE (3DIC 2015) 2015

    ISSN: 2164-0157

  130. Variation of Thermal Stress in TSV Structures Caused by Crystallinity of Electroplated Copper Interconnections Peer-reviewed

    Jiatong Liu, Ken Suzuki, Hideo Miura

    2015 INTERNATIONAL 3D SYSTEMS INTEGRATION CONFERENCE (3DIC 2015) 2015

    ISSN: 2164-0157

  131. THE EFFECT OF STRAIN ON THE ELECTRONIC PROPERTIES OF GRAPHENE NANORIBBONS Peer-reviewed

    Meng Yang, Masato Ohnishi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2014, VOL 10 2015

    DOI: 10.1115/IMECE2014-39635  

  132. Long-range topological correlations of real polycrystalline grains in two dimensions Peer-reviewed

    Hao Wang, Guoquan Liu, Ying Chen, Arkapol Saengdeejing, Hideo Miura, Ken Suzuki

    MATERIALS CHARACTERIZATION 97 178-182 2014/11

    DOI: 10.1016/j.matchar.2014.09.017  

    ISSN: 1044-5803

    eISSN: 1873-4189

  133. Measurement of the local residual stress between fine metallic bumps in 3D flip chip structures Peer-reviewed

    Kota Nakahira, Hironori Tago, Takuya Sasaki, Ken Suzuki, Hideo Miura

    International Journal of Materials and Structural Integrity 8 (1-3) 21-31 2014/09/01

    Publisher: Inderscience Enterprises Ltd.

    DOI: 10.1504/IJMSI.2014.064770  

    ISSN: 1745-0063 1745-0055

  134. Quality Control of Grain Boundaries in Copper Thin Films Used for 3D Interconnections Peer-reviewed

    Takahiro Nakanishi, Ken Suzuki, Hideo Miura

    2014 9TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE (IMPACT) 88-91 2014

  135. Micro Texture Control for Highly Reliable Copper Fine Bumps for 3D Integration Peer-reviewed

    Masaru Gotoh, Ken Suzuki, Hideo Miura

    2014 9TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE (IMPACT) 53-56 2014

  136. Improvement of the Crystallinity of Electroplated Copper Thin Films for Highly Reliable 3D Interconnections Peer-reviewed

    Chuanhong Fan, Osamu Asai, Ryosuke Furuya, Ken Suzuki, Hideo Miura

    2014 IEEE 64TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC) 1885-1890 2014

    DOI: 10.1109/ECTC.2014.6897558  

    ISSN: 0569-5503

  137. IMPROVEMENT OF MECHANICAL RELIABILITY OF 3D ELECTRONIC PACKAGING BY CONTROLLING THE MECHANICAL PROPERTIES OF ELECTROPLATED MATERIALS Peer-reviewed

    Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2013, VOL 10 2014

    DOI: 10.1115/IMECE2013-65539  

  138. EFFECT OF THE CRYSTALLINITY ON THE LONG-TERM RELIABILITY OF ELECTROPLATED COPPER THIN-FILM INTERCONNECTIONS Peer-reviewed

    Takeru Kato, Ken Suzuki, Hideo Miura

    2014 9TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE (IMPACT) 359-362 2014

  139. HIGHLY SENSITIVE 2D STRAIN SENSOR USING CARBON NANOTUBE Peer-reviewed

    Hiroshi Kawakami, Masato Ohnishi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2013, VOL 1 2014

    DOI: 10.1115/IPACK2013-73156  

  140. EVALUATION OF THE CRYSTALLOGRAPHIC QUALITY OF ELECTROPLATED COPPER THIN-FILM INTERCONNECTION EMBEDDED IN A SI SUBSTRATE Peer-reviewed

    Ryosuke Furuya, Osamu Asai, Chuanhong Fan, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2013, VOL 1 2014

    DOI: 10.1115/IPACK2013-73148  

  141. Spatial Distribution of State Densities Dominating Strain Sensitivity of Carbon Nanotubes Peer-reviewed

    Masato Ohnishi, Ken Suzuki, Hideo Miura

    2014 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES (SISPAD) 165-168 2014

    DOI: 10.1109/SISPAD.2014.6931589  

    ISSN: 1946-1569

  142. Quantitative Evaluation of the Quality of Grains and Grain Boundaries in Copper Thin Films used for 3D Interconnections Peer-reviewed

    Takuya Murakoshi, Ken Suzuki, Hideo Miura

    2014 9TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE (IMPACT) 69-72 2014

  143. EFFECT OF ANISOTROPIC STRAIN FIELD ON THE ELECTRONIC CONDUCTANCE OF CARBON NANOTUBES Peer-reviewed

    Masato Ohnishi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2013, VOL 10 2014

    DOI: 10.1115/IMECE2013-64487  

  144. EFFECT OF ALLOYING ELEMENTS ON CREEP AND FATIGUE DAMAGE OF NI-BASE SUPERALLOY CAUSED BY STRAIN-INDUCED ANISOTROPIC DIFFUSION Peer-reviewed

    Ken Suzuki, Tomohiro Sano, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2013, VOL 9 2014

    DOI: 10.1115/IMECE2013-64314  

  145. IMPROVEMENT OF THE RELIABILITY OF THIN-FILM INTERCONNECTIONS BASED ON THE CONTROL OF THE CRYSTALLINITY OF THE THIN FILMS Peer-reviewed

    Osamu Asai, Ryosuke Furuya, Chuanhong Fan, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2013, VOL 1 2014

    DOI: 10.1115/IPACK2013-73149  

  146. HIGHLY SENSITIVE 2D STRAIN SENSOR USING CARBON NANOTUBE Peer-reviewed

    Hiroshi Kawakami, Masato Ohnishi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2013, VOL 1 (IPACK2013-73156) 1-6 2014

    DOI: 10.1115/IPACK2013-73156  

  147. IMPROVEMENT OF THE RELIABILITY OF THIN-FILM INTERCONNECTIONS BASED ON THE CONTROL OF THE CRYSTALLINITY OF THE THIN FILMS Peer-reviewed

    Osamu Asai, Ryosuke Furuya, Chuanhong Fan, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2013, VOL 1 (IPACK2013-73149) 1-7 2014

    DOI: 10.1115/IPACK2013-73149  

  148. EFFECT OF THE LATTICE MISMATCH BETWEEN COPPER THIN-FILM INTERCONNECTION AND BASE MATERIAL ON THE CRYSTALLINITY OF THE INTERCONNECTION Peer-reviewed

    Chuanhong Fan, Ryosuke Furuya, Osamu Asai, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2013, VOL 1 (IPACK2013-73147) 1-6 2014

    DOI: 10.1115/IPACK2013-73147  

  149. EVALUATION OF THE CRYSTALLOGRAPHIC QUALITY OF ELECTROPLATED COPPER THIN-FILM INTERCONNECTION EMBEDDED IN A SI SUBSTRATE Peer-reviewed

    Ryosuke Furuya, Osamu Asai, Chuanhong Fan, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2013, VOL 1 (IPACK2013-73148) 1-7 2014

    DOI: 10.1115/IPACK2013-73148  

  150. EFFECT OF ALLOYING ELEMENTS ON CREEP AND FATIGUE DAMAGE OF NI-BASE SUPERALLOY CAUSED BY STRAIN-INDUCED ANISOTROPIC DIFFUSION Peer-reviewed

    Ken Suzuki, Tomohiro Sano, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2013, VOL 9 (IMECE2013-64314) 1-6 2014

    DOI: 10.1115/IMECE2013-64314  

  151. EFFECT OF ANISOTROPIC STRAIN FIELD ON THE ELECTRONIC CONDUCTANCE OF CARBON NANOTUBES Peer-reviewed

    Masato Ohnishi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2013, VOL 10 (IMECE2013-64487) 1-5 2014

    DOI: 10.1115/IMECE2013-64487  

  152. IMPROVEMENT OF MECHANICAL RELIABILITY OF 3D ELECTRONIC PACKAGING BY CONTROLLING THE MECHANICAL PROPERTIES OF ELECTROPLATED MATERIALS Peer-reviewed

    Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2013, VOL 10 (IMECE2013-65539) 1-6 2014

    DOI: 10.1115/IMECE2013-65539  

  153. Improvement of Crystallographic Quality of Electroplated Copper Thin-Film Interconnections for Through-Silicon Vias Peer-reviewed

    Ken Suzuki, Naokazu Murata, Naoki Saito, Ryosuke Furuya, Osamu Asai, Hideo Miura

    JAPANESE JOURNAL OF APPLIED PHYSICS 52 (4) 2013/04

    DOI: 10.7567/JJAP.52.04CB01  

    ISSN: 0021-4922

  154. Change of the electronic conductivity of graphene nanoribbons and carbon nanotubes caused by a local deformation Peer-reviewed

    Masato Ohnishi, Ken Suzuki, Hideo Miura

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 131-134 2013

    DOI: 10.1109/SISPAD.2013.6650592  

  155. Micro-texture dependence of stress-induced migration of electroplated copper thin film interconnections used for 3D integration Peer-reviewed

    Ken Suzuki, Hideo Miura, Osamu Asai, Ryosuke Furuya, Jaeuk Sung, Naokazu Murata

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 264-267 2013

    DOI: 10.1109/SISPAD.2013.6650625  

  156. MICRO-TEXTURE DEPENDENCE OF THE STRENGTH OF FINE METALLIC BUMPS USED FOR ELECTRONIC PACKAGING Peer-reviewed

    Fumiaki Endo, Naokazu Murata, Ken Suzuki, Hideo Miura

    INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B 995-1000 2013

    DOI: 10.1115/IMECE2012-87342  

  157. Improvement of the reliability of TSV interconnections by controlling the crystallinity of electroplated copper thin films Peer-reviewed

    Ryosuke Furuya, Chuanhong Fan, Osamu Asai, Ken Suzuki, Hideo Miura

    Proceedings - Electronic Components and Technology Conference 635-640 2013

    DOI: 10.1109/ECTC.2013.6575640  

    ISSN: 0569-5503

  158. ANISOTROPIC STRAIN-FIELD-INDUCED CHANGE OF THE ELECTRONIC CONDUCTIVITY OF GRAPHENE SHEETS AND CARBON NANOTUBES Peer-reviewed

    Masato Ohnishi, Hiroshi Kawakami, Yusuke Suzuki, Ken Suzuki, Hideo Miura

    INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B 749-754 2013

    DOI: 10.1115/IMECE2012-87347  

  159. ANISOTROPIC STRAIN-FIELD-INDUCED CHANGE OF THE ELECTRONIC CONDUCTIVITY OF GRAPHENE SHEETS AND CARBON NANOTUBES Peer-reviewed

    Masato Ohnishi, Hiroshi Kawakami, Yusuke Suzuki, Ken Suzuki, Hideo Miura

    INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B IMECE2012-87347 749-754 2013

    DOI: 10.1115/IMECE2012-87347  

  160. MICRO-TEXTURE DEPENDENCE OF THE STRENGTH OF FINE METALLIC BUMPS USED FOR ELECTRONIC PACKAGING Peer-reviewed

    Fumiaki Endo, Naokazu Murata, Ken Suzuki, Hideo Miura

    INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B IMECE2012-87342 995-1000 2013

    DOI: 10.1115/IMECE2012-87342  

  161. First-principles study on the dilute Si in bcc Fe: Electronic and elastic properties up to 12.5 at.%Si Peer-reviewed

    Arkapol Saengdeejing, Ying Chen, Ken Suzuki, Hideo Miura, Tetsuo Mohri

    Computational Materials Science 70 100-106 2013

    DOI: 10.1016/j.commatsci.2012.12.028  

    ISSN: 0927-0256

  162. Effect of the Local Strain Distribution on the Electronic Conductivity of Carbon Nanotubes Peer-reviewed

    Masato OHNISHI, Hiroshi KAWAKAMI, Ken SUZUKI, Hideo MIURA

    Journal of Computational Science and Technology 7 (2) 231-238 2013

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jcst.7.231  

    ISSN: 1881-6894

    More details Close

    Even though there have been many efforts to develop carbon nanotube (CNT)-based electronic devices and sensors, drastic variation of the electronic functions depending on fabrication process has been reported. The authors have also validated the possibility of a highly sensitive strain sensor using various resins in which multi-walled CNTs (MWNTs) were dispersed uniformly, however, the strain sensitivity of the developed sensors fluctuated significantly. Therefore, it is indispensable for clarifying the dominant factors which change the electronic state of a deformed CNT for assuring the stable performance of the devices. In this study, the relationship between the deformation characteristic of a CNT under strain and its electronic properties was analyzed by using molecular dynamics analysis and the first principle calculation based on density functional theory (DFT). Orbital hybridization were found to occur when the local curvature exceeded about 0.3Å-1, inducing the decrease in the band gap.

  163. Influence of Oxygen Composition and Carbon Impurity on Electronic Reliability of HfO2 Thin Films Peer-reviewed

    Ken SUZUKI, Hideo MIURA

    Journal of Computer Chemistry, Japan 12 (1) 52-60 2013

    Publisher: Society of Computer Chemistry, Japan

    DOI: 10.2477/jccj.2012-0018  

    ISSN: 1347-1767

    More details Close

    Highly reliable gate stack systems using a high-k dielectric thin film such as a hafnium dioxide film are indispensable for the development of ULSI (Ultra-Large-Scale Integration) devices. In this study, the degradation mechanisms of the electronic reliability of hafnium dioxide dielectric film caused by point defects such as oxygen vacancies and carbon interstitials was investigated by using quantum chemical molecular dynamics method. The magnitude of the band gap of the HfO2-x, which is hafnium dioxide with oxygen vacancies, decreased drastically from 5.7 eV to about 1.0 eV due to the generation of donor states within the band gap of hafnium dioxide. When a carbon atom as the impurity was introduced in HfO2 film, carbon impurity states (donor and acceptor) formed in the band gap of hafnium dioxide. The band gap calculated from the energy difference between the donor and acceptor decreases to 1.6 eV. The estimated changes of the magnitude of the band gap due to the point defects were validated by experiments using synchrotron radiation photoemission spectroscopy. We conclude therefore, it is very important to minimize point defects in the hafnium dioxide dielectric film in order to ensure the electronic performance and reliability of MOS transistors.

  164. Micro-texture Dependence of the Strength of Electroplated Copper Thin Film Used for Advanced 3D Electric Packages Peer-reviewed

    遠藤史明, 古屋亮輔, 鈴木研, 三浦英生

    電子情報通信学会論文誌C J96-C (11) 400-408 2013

    Publisher: The Institute of Electronics, Information and Communication Engineers

    ISSN: 1345-2827

  165. The effect of chemical composition and heat treatment conditions on stacking fault energy for Fe-Cr-Ni austenitic stainless steel Peer-reviewed

    Toshio Yonezawa, Ken Suzuki, Suguru Ooki, Atsushi Hashimoto

    Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science 44 (13) 5884-5896 2013

    DOI: 10.1007/s11661-013-1943-0  

    ISSN: 1073-5623

  166. Minimization of the Local Residual Stress in 3D Flip Chip Structures by Optimizing the Mechanical Properties of Electroplated Materials and the Alignment Structure of TSVs and Fine Bumps Peer-reviewed

    Kota Nakahira, Hironori Tago, Fumiaki Endo, Ken Suzuki, Hideo Miura

    JOURNAL OF ELECTRONIC PACKAGING 134 (2) 021006-1-021006-6 2012/06

    DOI: 10.1115/1.4006142  

    ISSN: 1043-7398

  167. Change of the electronic conductivity of cnts and graphene sheets caused by a three-dimensional strain field

    Masato Ohnishi, Ken Suzuki, Hideo Miura

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 86-89 2012

    Publisher: Institute of Electrical and Electronics Engineers Inc.

  168. Stress-induced migration of electroplated copper thin film interconnections depending on thermal history

    Ken Suzuki, Hideo Miura, Osamu Asai, Naoki Saito, Naokazu Murata

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 396-399 2012

    Publisher: Institute of Electrical and Electronics Engineers Inc.

  169. NANOSTRUCTURE DEPENDENCE OF THE ELECTRONIC CONDUCTIVITY OF CARBON NANOTUBES AND GRAPHENE SHEETS Peer-reviewed

    Masato Ohnishi, Katsuya Ohsaki, Yusuke Suzuki, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION 2010, VOL 4 449-+ 2012

  170. MINIMIZATION OF THE LOCAL RESIDUAL STRESS IN 3D FLIP CHIP STRUCTURES BY OPTIMIZING THE MECHANICAL PROPERTIES OF ELECTROPLATED MATERIALS AND THE ALIGNMENT STRUCTURE OF TSVS AND FINE BUMPS Peer-reviewed

    Kohta Nakahira, Hironori Tago, Fumiaki Endo, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME PACIFIC RIM TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC SYSTEMS, MEMS AND NEMS 2011, VOL 1 19-25 2012

    DOI: 10.1115/IPACK2011-52063  

  171. In-line Monitoring of the Change of Residual Stress in Nano-Scale Transistors during Their Thin-Film Processing and Packaging Peer-reviewed

    Hironori Tago, Ken Suzuki, Hideo Miura

    14TH INTERNATIONAL CONFERENCE ON ELECTRONIC MATERIALS AND PACKAGING (EMAP 2012) 2012

    ISSN: 2151-7231

  172. Micro Texture Dependence of Both the Mechanical and Electrical Properties of Electroplated Copper Thin Films Used for Interconnection Peer-reviewed

    Naokazu Murata, Naoki Saito, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION 2010, VOL 4 467-+ 2012

  173. STRESS-INDUCED AND ELECTRO-MIGRATION OF ELECTROPLATED COPPER THIN FILM INTERCONNECTIONS USED FOR 3D INTEGRATION Peer-reviewed

    Naoki Saito, Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME PACIFIC RIM TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC SYSTEMS, MEMS AND NEMS 2011, VOL 2 685-690 2012

    DOI: 10.1115/IPACK2011-52058  

  174. CHANGE OF THE ELECTRONIC CONDUCTIVITY OF CARBON NANOTUBE AND GRAPHENE SHEETS CAUSED BY A THREE-DIMENSIONAL STRAIN FIELD Peer-reviewed

    Masato Ohnishi, Yusuke Suzuki, Yusuke Ohashi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME PACIFIC RIM TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC SYSTEMS, MEMS AND NEMS 2011, VOL 1 457-462 2012

    DOI: 10.1115/IPACK2011-52057  

  175. Improvement of the Reliability of Thin-Film Interconnections Based on the Control of the Crystallinity of the Thin Films Peer-reviewed

    Osamu Asai, Naokazu Murata, Ken Suzuki, Hideo Miura

    14TH INTERNATIONAL CONFERENCE ON ELECTRONIC MATERIALS AND PACKAGING (EMAP 2012) 2012

    ISSN: 2151-7231

  176. TWO-DIMENSIONAL STRAIN-DISTRIBUTION SENSOR USING CARBON NANOTUBE-DISPERSED RESIN Peer-reviewed

    Yusuke Suzuki, Yusuke Ohashi, Masato Ohnishi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME PACIFIC RIM TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC SYSTEMS, MEMS AND NEMS 2011, VOL 1 381-386 2012

    DOI: 10.1115/IPACK2011-52062  

  177. Effect of the Lattice Mismatch between Copper Thin-film Interconnection and Base Material on the Crystallinity of the Interconnection Peer-reviewed

    Chuanhong Fan, Osamu Asai, Ken Suzuki, Hideo Miura

    14TH INTERNATIONAL CONFERENCE ON ELECTRONIC MATERIALS AND PACKAGING (EMAP 2012) 2012

    ISSN: 2151-7231

  178. NON-CONTACT AND REMOTE MEASUREMENT METHOD OF THE CHANGE OF THE ELECTRICAL CONDUCTIVITY OF CARBON NANOTUBES-DISPERSED RESIN UNDER STRAIN Peer-reviewed

    Yusuke Ohashi, Yusuke Suzuki, Masato Ohnishi, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME PACIFIC RIM TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC SYSTEMS, MEMS AND NEMS 2011, VOL 1 703-708 2012

    DOI: 10.1115/IPACK2011-52064  

  179. Evaluation of the Crystallographic Quality of Electroplated Copper Thin-Film Interconnections Embedded in TSV Structures Peer-reviewed

    Ryosuke Furuya, Ken Suzuki, Hideo Miura

    14TH INTERNATIONAL CONFERENCE ON ELECTRONIC MATERIALS AND PACKAGING (EMAP 2012) 2012

    ISSN: 2151-7231

  180. HIGH TEMPERATURE DAMAGES OF NI-BASE-SUPERALLOY CAUSED BY THE CHANGE OF NANOTEXTURE DUE TO STRAIN-INDUCED ANISOTROPIC DIFFUSION Peer-reviewed

    Yamato Sasaki, Hiroyuki Itoh, Naokazu Murata, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION (IMECE 2010), VOL 9 73-79 2012

    DOI: 10.1115/IMECE2010-37284  

  181. HIGH TEMPERATURE DAMAGE OF NI-BASE SUPERALLOY CAUSED BY THE CHANGE OF MICROTEXTURE DUE TO THE STRAIN-INDUCED ANISOTROPIC DIFFUSION OF COMPONENT ELEMENTS Peer-reviewed

    Hideo Miura, Ken Suzuki, Yamato Sasaki, Tomohiro Sano, Naokazu Murata

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2011, VOL 4, PTS A AND B 1649-1655 2012

  182. EFFECT OF CRYSTALLOGRAPHIC QUALITY OF GRAIN BOUNDARIES ON BOTH MECHANICAL AND ELECTRICAL PROPERTIES OF ELECTROPLATED COPPER THIN FILM INTERCONNECTIONS Peer-reviewed

    Naokazu Murata, Naoki Saito, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME PACIFIC RIM TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC SYSTEMS, MEMS AND NEMS 2011, VOL 2 677-684 2012

    DOI: 10.1115/IPACK2011-52048  

  183. Highly Sensitive Strain Sensor Using Carbon Nanotube Peer-reviewed

    Hiroshi Kawakami, Ken Suzuki, Hideo Miura

    14TH INTERNATIONAL CONFERENCE ON ELECTRONIC MATERIALS AND PACKAGING (EMAP 2012) 2012

    ISSN: 2151-7231

  184. Quantum Chemical Molecular Dynamics Study of Oxidation Process on Fe-Cr Alloy Surfaces in High Temperature Water Peer-reviewed

    Ken Suzuki, Hideo Miura

    NANOTECHNOLOGY 2012, VOL 2: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL 641-644 2012

  185. Micro Texture Dependence of Both the Mechanical and Electrical Properties of Electroplated Copper Thin Films Used for Interconnection Peer-reviewed

    Naokazu Murata, Naoki Saito, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION 2010, VOL 4 IMECE2010-37279 467-+ 2012

  186. HIGH TEMPERATURE DAMAGES OF NI-BASE-SUPERALLOY CAUSED BY THE CHANGE OF NANOTEXTURE DUE TO STRAIN-INDUCED ANISOTROPIC DIFFUSION Peer-reviewed

    Yamato Sasaki, Hiroyuki Itoh, Naokazu Murata, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION (IMECE 2010), VOL 9 IMECE2010-37284 73-79 2012

    DOI: 10.1115/IMECE2010-37284  

  187. NANOSTRUCTURE DEPENDENCE OF THE ELECTRONIC CONDUCTIVITY OF CARBON NANOTUBES AND GRAPHENE SHEETS Peer-reviewed

    Masato Ohnishi, Katsuya Ohsaki, Yusuke Suzuki, Ken Suzuki, Hideo Miura

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION 2010, VOL 4 IMECE2010-37277 449-+ 2012

  188. HIGH TEMPERATURE DAMAGE OF NI-BASE SUPERALLOY CAUSED BY THE CHANGE OF MICROTEXTURE DUE TO THE STRAIN-INDUCED ANISOTROPIC DIFFUSION OF COMPONENT ELEMENTS Peer-reviewed

    Hideo Miura, Ken Suzuki, Yamato Sasaki, Tomohiro Sano, Naokazu Murata

    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2011, VOL 4, PTS A AND B IMECE2011-62411 1649-1655 2012

  189. Two-dimensional strain distribution sensor using carbon nanotubes Peer-reviewed

    Yusuke Suzuki, Yusuke Ohashi, Masato Ohnishi, Ken Suzuki, Hideo Miura

    Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A 78 (789) 689-693 2012

    DOI: 10.1299/kikaia.78.689  

    ISSN: 0387-5008

  190. Dominant Factors of the Stress-Induced Migration in Electroplated Copper Thin-Films Interconnections Peer-reviewed

    齋藤直樹, 村田直一, 玉川欣治, 鈴木 研, 三浦英生

    電子情報通信学会論文誌C J95-C (11) 351-357 2012

  191. QUANTITATIVE EVALUATION OF THE CRYSTALLINITY OF GRAIN BOUNDARIES IN POLYCRYSTALLINE MATERIALS Peer-reviewed

    Naokazu Murata, Ken Suzuki, Hideo Miura

    INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 8 IMECE2012-87426 389-395 2012

    DOI: 10.1115/IMECE2012-87426  

  192. EFFECT OF DOPANT ELEMENT ON THE STRENGTH AND RELIABILITY OF NI-BASE SUPERALLOY AT HIGH TEMPERATURES Peer-reviewed

    Tomohiro Sano, Ken Suzuki, Hideo Miura

    INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 8 IMECE2012-87341 215-220 2012

    DOI: 10.1115/IMECE2012-87341  

  193. Evaluation of the Crystallinity of Grain Boundaries of Electronic Copper Thin Films for Highly Reliable Interconnections Peer-reviewed

    Naoki Saito, Naoakzu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    2012 IEEE 62ND ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC) 1153-1158 2012

    DOI: 10.1109/ECTC.2012.6248981  

  194. Effect of Crystallographic Quality of Grain Boundaries on Both Mechanical and Electrical Properties of Electroplated Copper Thin Film Interconnections Peer-reviewed

    Naokazu Murata, Naoki Saito, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    Proceedings of ASME InterPACK2011 IPACK2011-52048 1-8 2011/07/06

  195. Ionic Conductivity in Uniaxial Micro Strain/Stress Fields of Yttria-Stabilized Zirconia Peer-reviewed

    Kazuhisa Sato, Ken Suzuki, Ryo Narumi, Keiji Yashiro, Toshiyuki Hashida, Junichiro Mizusaki

    JAPANESE JOURNAL OF APPLIED PHYSICS 50 (5) 055803-1-055803-5 2011/05

    DOI: 10.1143/JJAP.50.055803  

    ISSN: 0021-4922

  196. Stress-induced Migration of the Electroplated Copper Thin Film Interconnection Peer-reviewed

    Naoki Saito, Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    International Conference on Electronics Packaging 871-874 2011/04/13

  197. Monitoring Method of Residual Stress in a Substrate During Thin Film Processing Peer-reviewed

    Kota Nakahira, Hironori Tago, Hiroki Kishi, Ken Suzuki, Hideo Miura

    International Conference on Electronics Packaging 853-856 2011/04/13

  198. Strain-Induced Change of Electronic Conductivity of Carbon Nanotubes

    SUZUKI Yusuke, OHNISHI Masato, SUZUKI Ken, MIURA Hideo

    Transactions of the Japan Society of Mechanical Engineers Series B 77 (777) 769-773 2011

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/kikaia.77.769  

    ISSN: 0387-5008

    More details Close

    A new strain measurement method has been developed by applying the highly sensitive change of electronic conductivity of CNTs. The authors dispersed the CNTs in polyisoprene and polycarbonate, and the volumetric concentration of CNT was about 6.0% and 11.5%, respectively. An uni-axial strain was applied to the CNT-dispersed resins, and the change of the electrical resistance was measured. The electrical resistance of CNT-dispersed polyisoprene increased monotonically with the increase of the applied strain, and that of CNT-dispersed polycarbonate also changed almost linearly. In addition, the change of atomic distance of the CNT under an uni-axial strain was analyzed by applying the molecular dynamics method. It was estimated that the local deformation of six membered-rings in the CNT caused the drastic change of resistance.

  199. Minimization of the local residual stress in 3DICs by controlling the structures and mechanical properties of 3D interconnections Peer-reviewed

    Kota Nakahira, Fumiaki Endo, Ryosuke Furuya, Ken Suzuki, Hideo Miura

    2011 IEEE International 3D Systems Integration Conference, 3DIC 2011 2011

    DOI: 10.1109/3DIC.2012.6262997  

  200. Evaluation of the change of the residual stress in nano-scale transistors during the deposition and fine patterning processes of thin films Peer-reviewed

    Kota Nakahira, Hironori Tago, Hiroki Kishi, Ken Suzuki, Hideo Miura, Masaki Yoshimaru, Ken-Ichiro Tatsuuma

    2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011 1-6 2011

    DOI: 10.1109/ESIME.2011.5765760  

  201. Mechanical and electrical reliability of copper interconnections for 3DIC Peer-reviewed

    Naoki Saito, Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    2011 IEEE International 3D Systems Integration Conference, 3DIC 2011 154-159 2011

    DOI: 10.1109/3DIC.2012.6262998  

  202. Micro Texture Dependence of the Mechanical and Electrical Reliability of Electroplated Copper Thin Film Interconnections Peer-reviewed

    Naokazu Murata, Naoki Saito, Fumiaki Endo, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    2011 IEEE 61ST ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC) 2119-2125 2011

    DOI: 10.1109/ECTC.2011.5898811  

    ISSN: 0569-5503

  203. Minimization of the local residual stress in 3D flip chip structures by optimizing the mechanical properties of electroplated materials and the alignment structure of TSVs and fine bumps Peer-reviewed

    Kohta Nakahira, Hironori Tago, Fumiaki Endo, Ken Suzuki, Hideo Miura

    ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011 1 19-25 2011

    DOI: 10.1115/IPACK2011-52063  

  204. Two-dimensional strain-distribution sensor using carbon nanotube-dispersed resin Peer-reviewed

    Yusuke Suzuki, Yusuke Ohashi, Masato Ohnishi, Ken Suzuki, Hideo Miura

    ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011 1 381-386 2011

    DOI: 10.1115/IPACK2011-52062  

  205. Change of the electronic conductivity of carbon nanotube and graphene sheets caused by a three-dimensional strain field Peer-reviewed

    Masato Ohnishi, Yusuke Suzuki, Yusuke Ohashi, Ken Suzuki, Hideo Miura

    ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011 1 457-462 2011

    DOI: 10.1115/IPACK2011-52057  

  206. Non-contact and remote measurement method of the change of the electrical conductivity of carbon nanotubes-dispersed resin under strain Peer-reviewed

    Yusuke Ohashi, Yusuke Suzuki, Masato Ohnishi, Ken Suzuki, Hideo Miura

    ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011 1 703-708 2011

    DOI: 10.1115/IPACK2011-52064  

  207. MEASUREMENT OF THE LOCAL RESIDUAL STRESS BETWEEN FINE METALLIC BUMPS IN 3D FLIP CHIP STRUCTURES Peer-reviewed

    Kohta Nakahira, Hironori Tago, Takuya Sasaki, Ken Suzuki, Hideo Miura

    12th International Conference on Electronics Materials and Packaging 137-142 2010/10/25

  208. REMOTE DYNAMIC STRAIN MEASUREMENT USING VERTICAL CAVITY SURFACE EMITTING LASER Peer-reviewed

    Yusuke Ohashi, Aya Kaisumi, Atsushi Kitamura, Ken Suzuki, Hideo Miura

    12th International Conference on Electronics Materials and Packaging 131-136 2010/10/25

  209. NONDESTRUCTIVE DETECTION OF OPEN FAILURES IN THREE-DIMENSIONALLY STACKED CHIPS MOUNTED BY AREA-ARRAYED FINE BUMPS Peer-reviewed

    Yuki Sato, Kohta Nakahira, Naokazu Murata, Ken Suzuki, Hideo Miura

    12th International Conference on Electronics Materials and Packaging 117-123 2010/10/25

  210. Effect of the Formation of the Intermetallic Compounds between a Tin Bump and an Electroplated Copper Thin Film on both Mechanical and Electrical Properties of the Jointed Structures Peer-reviewed

    Seongcheol Jeong, Naokazu Murata, Yuki Sato, Ken Suzuki, Hideo Miura

    Transactions of The Japan Institute of Electronics Packaging 2 (1) 91-97 2010/04/23

    Publisher: The Japan Institute of Electronics Packaging

    DOI: 10.5104/jiepeng.2.91  

    ISSN: 1883-3365

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    The mechanical and electrical reliabilities of fine bumps with diameters and heights on the order of scores of microns were studied, considering the growth of the intermetallic compound (IMC) at the interface between a tin bump and a copper thin-film interconnection. It was found that an increase in the thickness of the IMC changed the stress and strain fields around the interface significantly, and thus, changed the fracture mode from a fatigue crack of the solder to a fatigue crack of the copper interconnection or to delamination between the IMC and the copper interconnection. This is because the mechanical properties of the grown IMC differ from those of copper and tin and that a large number of Kirkendall voids appeared around the interface. In addition, the resistance of the bumps increased dramatically with the increment of the IMC layer because of the growth of the Kirkendall voids. Therefore, it is very important to minimize the growth of the IMC in order to assure the reliability of the bump joint structures.

  211. Quantum Chemical Molecular Dynamics Study of Chemical Reaction Dynamics on Ni-base Alloy Surfaces in Gas-cooled Reactors Peer-reviewed

    Ken Suzuki, Yoichi Takeda, Hideo Miura

    Journal of Solid Mechanics and Materials Engineering 4 (11) 1644-1653 2010/04/01

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jmmp.4.1644  

    ISSN: 1880-9871

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    In high-temperature gas-cooled reactors that use helium gas as a coolant, impurities in the helium coolant, such as H2, H2O, CO and CH4 molecules, react with the component materials of the reactors such as its heat transfer tubes. Theses reactions degrade the mechanical properties and shorten the lifetime of the components. In this study, tight-binding quantum chemical molecular dynamics simulations were employed to understand the chemical reactions caused by impurities (CH4 and O2) on Ni-Cr alloy surfaces. The molecules of the impurities were dissociated on the surface and dissociated oxygen and carbon atoms preferentially bonded with chromium atoms. Cr-C bonds were maintained during the simulation and consequently, chromium atoms were trapped by carbon atoms after the formation of Cr-C bonds. This result suggests that the carburized chromium atoms do not contribute significantly to the formation of oxide films because of the strong affinity of carbon for chromium. It is concluded, therefore, that the characteristics of the oxide film formed on the Ni-Cr alloy surface in a helium coolant are significantly affected by the chemical composition of the impurities in the coolant.

  212. Quantum chemical molecular dynamics simulation of oxidation process on clean metal surface in high temperature water

    Ken Suzuki, Hideo Miura

    Materials Research Society Symposium Proceedings 1263 25-30 2010

    ISSN: 0272-9172

  213. Mechanical and electrical properties of electroplated copper thin films used for thin film interconnection

    Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    Materials Research Society Symposium Proceedings 1249 271-276 2010

    ISSN: 0272-9172

  214. J0601-3-2 Underfill material dependence of the local residual stress of fli-chip on area-arrayed fine bump

    Nakahira Kota, Murata Naokazu, Suzuki Ken, Miura Hideo

    The proceedings of the JSME annual meeting 2010 265-266 2010

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmemecjo.2010.7.0_265  

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    Local large residual stress and the local deformation appears clearly in thinned flip chip structures because of the difference in material properties such as Young's modulus and the coefficient of thermal expansion among a bump, underfill, and a silicon chip. Since such large residual stress and the local deformation deteriorate the reliability of electronic devices, the authors measured them by using piezoresistive strain sensor chips. As a result, it was found that the amplitude of the local distribution of the residual stress reached about 100 MPa and the local deformation of about 5 μm remained on the back surface of the mounted chips. The dominant factors of the local residual stress and the deformation were the coefficient of thermal expansion and Young's modulus of underfill and the bump pitch.

  215. J0601-3-1 Micro structure dependence of the strength and reliability of electroplated copper thin films used for thin film interconnections

    MURATA Naokazu, SUZUKI Ken, MIURA Hideo, TAMAKAWA Kinji

    The proceedings of the JSME annual meeting 2010 263-264 2010

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmemecjo.2010.7.0_263  

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    Mechanical properties of the electroplated copper thin films, such as Young's modulus and the tensile strength were found to vary drastically comparing with those of the conventional bulk material. The reason for the variation of these mechanical properties was that the electroplated copper thin films mainly consisted of fine columnar grains with the diameter of a few hundred nm and the height of about a few urn. In this study, effects of brittle and porous grain boundaries which caused brittle fracture were discussed experimentally. The authors conducted fatigue tests of annealed films to clarify the relationship between their fatigue strength and microstructure including grain boundaries and grain size. In addition, their grain boundaries were evaluated by measurement of crystal orientation based on EBSD (Electron Back Scatter Diffraction). It was found that the crack propagation path during a fatigue test was dominated by the crystallinity of the grain boundaries. The crystallinity of the grain boundaries changed drastically depending the thermal history of the films after electroplating.

  216. Remote non-contact strain sensor using carbon nanotube-dispersed resin Peer-reviewed

    Yusuke Suzuki, Masato Ohnishi, Ken Suzuki, Hideo Miura

    International Microsystems Packaging Assembly and Circuits Technology Conference, IMPACT 2010 and International 3D IC Conference, Proceedings 2010

    DOI: 10.1109/IMPACT.2010.5699465  

  217. REMOTE STRAIN MEASUREMENT BY MULTI-WALLED CARBON NANOTUBE-DISPERSED RESIN Peer-reviewed

    Katsuya Osaki, Hideki Fuji, Masato Onishi, Ken Suzuki, Hideo Miura

    IPACK 2009: PROCEEDINGS OF THE ASME INTERPACK CONFERENCE 2009, VOL 1 569-574 2010

    DOI: 10.1115/InterPACK2009-89146  

  218. MICRO TEXTURE DEPENDENCE OF MECHANICAL PROPERTIES OF ELECTROPLATED COPPER THIN FILMS USED FOR THIN FILM INTERCONNECTION Peer-reviewed

    Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    IPACK 2009: PROCEEDINGS OF THE ASME INTERPACK CONFERENCE 2009, VOL 1 353-359 2010

    DOI: 10.1115/InterPACK2009-89079  

  219. IN-LINE EVALUTION METHOD OF THE INTRINSIC STRESS OF THIN FILMS USED FOR TRANSISTOR STRUCTURES Peer-reviewed

    Hiroki Kishi, Takuya Sasaki, Nobuki Ueta, Ken Suzuki, Hideo Miura

    IPACK 2009: PROCEEDINGS OF THE ASME INTERPACK CONFERENCE 2009, VOL 1 239-245 2010

    DOI: 10.1115/InterPACK2009-89145  

  220. REMOTE STRAIN MEASUREMENT BY MULTI-WALLED CARBON NANOTUBE-DISPERSED RESIN Peer-reviewed

    Katsuya Osaki, Hideki Fuji, Masato Onishi, Ken Suzuki, Hideo Miura

    IPACK 2009: PROCEEDINGS OF THE ASME INTERPACK CONFERENCE 2009, VOL 1 569-574 2010

  221. IN-LINE EVALUTION METHOD OF THE INTRINSIC STRESS OF THIN FILMS USED FOR TRANSISTOR STRUCTURES Peer-reviewed

    Hiroki Kishi, Takuya Sasaki, Nobuki Ueta, Ken Suzuki, Hideo Miura

    IPACK 2009: PROCEEDINGS OF THE ASME INTERPACK CONFERENCE 2009, VOL 1 239-245 2010

  222. Creep and fatigue damages of Ni-base- superalloy caused by strain-induced anisotropic diffusion of component elements Peer-reviewed

    Hideo Miura, Ken Suzuki, Hiroyuki Ito, Tatsuya Inoue

    ADVANCES IN FRACTURE AND DAMAGE MECHANICS VIII 417-418 261-+ 2010

    DOI: 10.4028/www.scientific.net/KEM.417-418.261  

    ISSN: 1013-9826

  223. Dominant Structural Factors of the Local Deformation and Residual Stress of a Silicon Chip Mounted on Area-Arrayed Flip Chip Structures Peer-reviewed

    Kohta Nakahira, Naokazu Murata, Yuhki Sato, Ken Suzuki, Hideo Miura

    Proc. of ICEP 2010 345-348 2010

  224. MICRO TEXTURE DEPENDENCE OF MECHANICAL PROPERTIES OF ELECTROPLATED COPPER THIN FILMS USED FOR THIN FILM INTERCONNECTION Peer-reviewed

    Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    IPACK 2009: PROCEEDINGS OF THE ASME INTERPACK CONFERENCE 2009, VOL 1 353-359 2010

    DOI: 10.1557/PROC-1249-F08-07  

  225. Effect of the mechanical properties of underfill on the local deformation and residual stress in a chip mounted by area-arrayed flip chip structures Peer-reviewed

    Kohta Nakahira, Yuki Sato, Hiroki Kishi, Ken Suzuki, Hideo Miura

    2010 11th International Conference on Thermal, Mechanical and Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems, EuroSimE 2010 1-6 2010

    DOI: 10.1109/ESIME.2010.5464598  

  226. Nondestructive Evaluation of the Delamination of Fine Bumps in Three-Dimensionally Stacked Flip Chip Structures Peer-reviewed

    Yuhki Sato, Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    2010 PROCEEDINGS 60TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC) 1951-1956 2010

    DOI: 10.1109/ECTC.2010.5490684  

    ISSN: 0569-5503

  227. Improvement of the Interface Integrity between a High-k Dielectric Film and a Metal Gate Electrode by Controlling Point Defects and Residual Stress Peer-reviewed

    Ken Suzuki, Tatsuya Inoue, Hideo Miura

    SISPAD 2010 - 15TH INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES 213-216 2010

    DOI: 10.1109/SISPAD.2010.5604526  

    ISSN: 1946-1569

  228. Stress-induced migration of electroplated copper thin films used for 3D integration Peer-reviewed

    Naoki Saito, Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    International Microsystems Packaging Assembly and Circuits Technology Conference, IMPACT 2010 and International 3D IC Conference, Proceedings IPACK2011-52058 1-6 2010

    DOI: 10.1109/IMPACT.2010.5699464  

  229. Effect of copper-tin intermetallic compound on reliability of fine bump joint structures Peer-reviewed

    Seongchoel Jeong, Naokazu Murata, Yuki Sato, Ken Suzuki, Hideo Miura

    Zairyo/Journal of the Society of Materials Science, Japan 58 (10) 827-832 2009/10

    DOI: 10.2472/jsms.58.827  

    ISSN: 0514-5163

  230. Quantum Chemical Molecular Dynamics Study of Degradation Mechanism of Interface Integrity between a HfO2 Thin Film and a Metal Gate Electrode Peer-reviewed

    Tatusya Inoue, Ken Suzuki, Hideo Miura

    Proceedings of International Conference on Simulation of Semiconductor Processes and Devices, 2009 198-201 2009/09

    DOI: 10.1109/SISPAD.2009.5290215  

  231. Effect of Y2O3 addition on the conductivity and elastic modulus of (CeO2)(1-x)(YO1.5)(x) Peer-reviewed

    Kazuhisa Sato, Ken Suzuki, Keiji Yashiro, Tatsuya Kawada, Hiroo Yugami, Toshiyuki Hashida, Alan Atkinson, Junichiro Mizusaki

    SOLID STATE IONICS 180 (20-22) 1220-1225 2009/08

    DOI: 10.1016/j.ssi.2009.06.003  

    ISSN: 0167-2738

    eISSN: 1872-7689

  232. Early stage SCC initiation analysis of fcc Fe-Cr-Ni ternary alloy at 288 °C: A quantum chemical molecular dynamics approach Peer-reviewed

    Nishith Kumar Das, Ken Suzuki, Kazuhiro Ogawa, Tetsuo Shoji

    Corrosion Science 51 (4) 908-913 2009/04

    DOI: 10.1016/j.corsci.2009.01.005  

    ISSN: 0010-938X

  233. Nondestructive evaluation of creep and fatigue damages in nickel-base superalloys using a scanning blue laser microscope Peer-reviewed

    Hideo Miura, Kuniaki Akahoshi, Ken Suzuki

    NDT & E INTERNATIONAL 42 (3) 188-192 2009/04

    DOI: 10.1016/j.ndteint.2008.09.008  

    ISSN: 0963-8695

  234. Early stage SCC initiation analysis of fcc Fe-Cr-Ni ternary alloy at 288 °C: A quantum chemical molecular dynamics approach Peer-reviewed

    Nishith Kumar Das, Ken Suzuki, Kazuhiro Ogawa, Tetsuo Shoji

    Corrosion Science 51 (4) 908-913 2009/04

    DOI: 10.1016/j.corsci.2009.01.005  

    ISSN: 0010-938X

  235. Fatigue Strength of Electroplated Copper Thin Films under Uni-Axial Stress Peer-reviewed

    Naokazu MURATA, Kinji TAMAKAWA, Ken SUZUKI, Hideo MIURA

    Journal of Solid Mechanics and Materials Engineering 3 498-506 2009/03

    DOI: 10.1299/jmmp.3.498  

  236. Creep Damage Process of Ni-Base Superalloy Caused by Stress-Induced Anisotropic Atomic Diffusion Peer-reviewed

    Ken SUZUKI, Hiroyuki ITO, Tatsuya INOUE, Hideo MIURA

    Journal of Solid Mechanics and Materials Engineering 3 (3) 487-497 2009/03

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jmmp.3.487  

    ISSN: 1880-9871

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    In order to make clear the mechanism of the directional coarsening of γ' phases (rafting) of Ni-base superalloy under uni-axial strain, molecular dynamics (MD) analysis was applied to analyze the effect of strain on the diffusion characteristics around the interface between different materials. In a Ni (001)/Al (001) interface structure, the stress induced diffusion of Al atoms perpendicular to the interface was found. The stress induced anisotropic diffusion of Al was also found in a Ni (001)/Ni3Al (001) interface. These results imply that it is highly possible the rafting occurs predominantly by the stress induced anisotropic diffusion of Al atoms.

  237. Density functional study of atomic oxygen and water molecule adsorption on chromium substituted Ni surface Peer-reviewed

    N. K. Das, K. Suzuki, Y. Takeda, K. Ogawa, T. Shoji

    Molecular Simulation 2009

  238. Conductivity variation of yttria-stabilized zirconia under stress Peer-reviewed

    T. Izumi, R. Narumi, K. Sato, K. Suzuki, K. Yashiro, T. Hashida, J. Mizusaki

    ECS Transactions 16 125-132 2009

    DOI: 10.1149/1.3242227  

  239. Quantum Chemical Molecular Dynamics Study of Degradation Mechanism of Interface Integrity between a HfO(2) Thin Film and a Metal Gate Electrode Peer-reviewed

    Tatsuya Inoue, Ken Suzuki, Hideo Miura

    2009 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES 198-201 2009

    ISSN: 1946-1569

  240. MULTI-SCALE MEASUREMENT OF THE CHANGE OF THE RESIDUAL STRESS IN A SILICON CHIP DURING MANUFACTURING FROM THIN-FILM PROCESSING TO PACKAGING Peer-reviewed

    Hiroki Kishi, Takuya Sasaki, Nobuki Ueta, Ken Suzuki, Hideo Miura

    IMPACT: 2009 4TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE 259-262 2009

    ISSN: 2150-5934

  241. Effect of Micro-Texture of Electroplated Copper Thin-Films on Their Mechanical and Electrical Reliability Peer-reviewed

    Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    IMPACT: 2009 4TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE 385-388 2009

    ISSN: 2150-5934

  242. A quantum chemical molecular dynamics study of the strain effect on oxygen diffusion in fcc Fe (111) and Fe-Cr (111) surfaces at 288°C Peer-reviewed

    N. K. Das, T. Shoji, K. Suzuki, Y. Takeda

    12th International Conference on Fracture 2009, ICF-12 8 6061-6068 2009

  243. Microtexture Dependence of Mechanical Properties of Electroplated Copper Thin films Used for Thin Film Interconnections Peer-reviewed

    Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    ASME Proc. of InterPACK 2009,(IPACK2009-89079) 2009

  244. Effect of the Formation of the Intermetallic Compounds between a Tin Bump and an Electroplated Copper Thin Film on both Mechanical and Electrical Properties of the Jointed Structures Invited Peer-reviewed

    Seongcheol Jeong, Ken Suzuki, Hideo Miura

    International Conference on Electronic Packaging, (15B2) 2 (1) 91-97 2009

    Publisher: The Japan Institute of Electronics Packaging

    DOI: 10.5104/jiepeng.2.91  

    ISSN: 1883-3365

    More details Close

    The mechanical and electrical reliabilities of fine bumps with diameters and heights on the order of scores of microns were studied, considering the growth of the intermetallic compound (IMC) at the interface between a tin bump and a copper thin-film interconnection. It was found that an increase in the thickness of the IMC changed the stress and strain fields around the interface significantly, and thus, changed the fracture mode from a fatigue crack of the solder to a fatigue crack of the copper interconnection or to delamination between the IMC and the copper interconnection. This is because the mechanical properties of the grown IMC differ from those of copper and tin and that a large number of Kirkendall voids appeared around the interface. In addition, the resistance of the bumps increased dramatically with the increment of the IMC layer because of the growth of the Kirkendall voids. Therefore, it is very important to minimize the growth of the IMC in order to assure the reliability of the bump joint structures.

  245. DEGRADATION OF INTERFACE INTEGRITY BETWEEN A HIGH-K DIELECTRIC THIN FILM AND A GATE ELECTRODE DUE TO EXCESS OXYGEN IN THE FILM Peer-reviewed

    Hideo Miura, Ken Suzuki, Yuta Ito, Seiji Samukawa, Tomonori Kubota, Toru Ikoma, Hideki Yoshikawa, Shigenori Ueda, Yoshiyuki Yamashita, Keisuke Kobayashi

    2009 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, VOLS 1 AND 2 376-+ 2009

    DOI: 10.1109/IRPS.2009.5173282  

  246. Strain Dependence of Dielectric Properties and Reliability of High-k Thin Films Peer-reviewed

    K. Suzuki, K. Imasaki, Y. Ito, H. Miura

    2009 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES 59-62 2009

    DOI: 10.1109/SISPAD.2009.5290250  

    ISSN: 1946-1569

  247. Quantum chemical molecular dynamics study of strain effect on metal and oxide interface interaction at high temperature

    N.K. Das, K. Suzuki, Y. Takeda, K. Ogawa, T. Shoji

    EUROCORR 2008, September 7-11 2008, Edinburgh, Scotland (1226) 2008/09

  248. Effect of interface characteristics of W/HfO2 on electronic reliability : Quantum chemical molecular dynamics study Peer-reviewed

    Ken Suzuki, Tatsuya Inoue, Hideo Miura

    Proceedings of 2008 International Conference on Simulation of Semiconductor Processes and Devices 357-360 2008/09

    DOI: 10.1109/SISPAD.2008.4648311  

  249. Quantum chemical molecular dynamics study of stress corrosion cracking behavior for fcc Fe and Fe-Cr surfaces Peer-reviewed

    Nishith Kumar Das, Ken Suzuki, Yoichi Takeda, Kazuhiro Ogawa, Tetsuo Shoji

    Corrosion Science 50 (6) 1701-1706 2008/06

    DOI: 10.1016/j.corsci.2008.01.032  

    ISSN: 0010-938X

  250. 1213 The influence of trace additive element on mechanical strength property of Ni-base superalloy at high temperature

    Inoue Tatsuya, Suzuki Ken, Miura Hideo

    The proceedings of the JSME annual meeting 2008 167-168 2008

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmemecjo.2008.1.0_167  

  251. 1212 Analysis of deformation behavior of multi-walled CNT under compressive strain

    OOSAKI Katsuya, SUZUKI Ken, MIURA Hideo

    The proceedings of the JSME annual meeting 2008 165-166 2008

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmemecjo.2008.1.0_165  

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    In recent years, there is a demand for measuring damages of fast rotating machines, moving object like wheel, gas turbine, elevator and tire under their operation. But it is difficult to do it by traditional methods. So, we have developed carbon-nanotubes-dispersed resin as a new strain measurement method. We measured electrical resistance of multi-walled CNT-dispersed resin under strain. We also studied deformation behavior of a multi-walled CNT under compressive strain by using molecular dynamics simulation under strain.

  252. 1201 Effect of heat treatment on fatigue strength of electroplated copper thin films

    MURATA Naokazu, TAMAKAWA Kinji, SUZUKI Ken, MIURA Hideo

    The proceedings of the JSME annual meeting 2008 143-144 2008

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmemecjo.2008.1.0_143  

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    Effect of heat treatment on the fatigue strength of electroplated copper thin films was investigated. Test electroplated copper films were grown on stainless steel substrates by using acid copper sulfate bath without any additive agent. These films were annealed at 400℃ for 3 hours in argon atmosphere. Mechanical properties of annealed film were similar to that of bulk material because the grain size of the films was increased by annealing. It was also found that the fracture mode of the annealed films changed drastically. The annealed film showed ductile fracture though the initial film without annealing showed brittle fracture. The high cycle fatigue strength of the as-electroplated films was lower than that of the annealed films. This was because that the micro structure of the film consisted of fine columnar grains with weak grain boundaries.

  253. Fatigue strength of electroplated copper thin films under uni-axial stress Peer-reviewed

    Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    2008 EMAP CONFERENCE PROCEEDINGS 41-44 2008

    DOI: 10.1109/EMAP.2008.4784224  

  254. Effect of Interface Characteristics of W/HfO2 +/- x on Electronic Reliability: Quantum Chemical Molecular Dynamics Study Peer-reviewed

    Ken Suzuki, Tatsuya Inoue, Hideo Miura

    SISPAD: 2008 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES 357-360 2008

    DOI: 10.1109/SISPAD.2008.4648311  

  255. Fe(111) AND Fe-Cr(111) SURFACE H2O INTERACTION AT DIFFERENT TEMPERATURES BY QUANTUM CHEMICAL MOLECULAR DYNAMICS Peer-reviewed

    Nishith Kumar Das, Ken Suzuki, Yoichi Takeda, Kazuhiro Ogawa, Tetsuo Shoji

    Proceedings of JSCE Materials and Environments 2008 A302 105-108 2008

  256. Stress corrosion cracking analysis of Fe (111) and Fe-Cr (111) surface at different temperatures by quantum chemical molecular dynamics Peer-reviewed

    N. K. Das, K. Suzuki, Y. Takeda, K. Ogawa, T. Shoji

    16th Pacific Basin Nuclear Conference P16P1100 2008

  257. Theoretical design of SCC resistant Ni-base alloy by a computational chemistry approach Peer-reviewed

    Nishith Kumar Das, Ken Suzuki, Yoichi Takeda, Kazuhiro Ogawa, Tetsuo Shoji

    International Conference on Advances in Nuclear Power Plants, ICAPP 2008 4 2175-2182 2008

  258. Multiscale modeling approach to stress corrosion cracking Peer-reviewed

    Ismail Tirtom, Nishith Kumar Das, Ken Suzuki, Kazuhiro Ogawa, Tetsuo Shoji

    International Conference on Advances in Nuclear Power Plants, ICAPP 2008 4 2081-2089 2008

  259. Degradation of reliability of high-k gate dielectrics caused by point defects and residual stress Peer-reviewed

    Hideo Miura, Ken Suzuki, Toru Ikoma, Seiji Samukawa, Hideki Yoshikawa, Shigenori Ueda, Yoshiyuki Yamashita, Keisuke Kobayashi

    2008 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 46TH ANNUAL 713-+ 2008

    DOI: 10.1109/RELPHY.2008.4559002  

    ISSN: 1541-7026

  260. 1923 Mechanical reliability evaluation of a laser chip used for optical transmission systems

    KITAMURA Atsushi, Suzuki Ken, MIURA Hideo

    The proceedings of the JSME annual meeting 2007 211-212 2007

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmemecjo.2007.7.0_211  

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    Precise control of wavelength of multiple laser chips is very important for the development of the wavelength division multiplexing system. However, there is a strong strain dependence of radiation spectrum of a laser chip. Thus, we measured the change of a radiation spectrum of a laser chip by applying a four point bending test. It was found that the main wavelength of a laser chip shifts to shorter wavelength side almost linearly under tensile strain. The measured change rate was about 3nm/% strain.

  261. 2425 Analytical study of degradation mechanism of Ni-based superalloy caused by stress dependent anisotropic diffusion

    Ito Hiroyuki, Suzuki Ken, Miura Hideo

    The proceedings of the JSME annual meeting 2007 423-424 2007

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmemecjo.2007.1.0_423  

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    In order to make clear the fracture and degradation mechanisms of nickel based superalloy, we studied the atomic diffusion behavior of the Ni-based superalloy by using the molecular dynamics simulation. Diffusion constant of Al and Ni atoms are increased drastically by tensile strain. In addition, X-ray diffraction technique was used to characterize the microstructure of Ni based superalloy CM247LC after a creep test at 900℃ and 216MPa. For a fatigue sample and 80% creep damaged one, the 110 L1_2 superlattice reflection peak of Ni_3Al (□' phase) vanished. From these results, we suggest that the ordered L1_2 structure of Ni_3Al changes to the disordered fcc structure by stress dependent anisotropic diffusion under high temperature creep condition.

  262. Effect of packaging stress in a laser chip on its radiation spectrum Peer-reviewed

    Atsushi Kitamura, Ken Suzuki, Hideo Miura

    IPACK 2007: PROCEEDINGS OF THE ASME INTERPACK CONFERENCE 2007, VOL 2 687-692 2007

    DOI: 10.1115/IPACK2007-33262  

  263. Quantum chemical molecular dynamics analysis of the effect of oxygen vacancies and strain on dielectric characteristic of HfO2-x films Invited Peer-reviewed

    Y. Ito, K. Suzuki, H. Mura

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 150-153 2007

    DOI: 10.1109/SISPAD.2006.282860  

  264. Fluctuation mechanism of mechanical properties of electroplated-copper thin films used for three dimensional electronic modules Peer-reviewed

    Hideo Miura, Ken Suzuki, Kinji Tamakawa

    EUROSIME 2007: THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICRO-ELECTRONICS AND MICRO-SYSTEMS, PROCEEDINGS 177-+ 2007

  265. Degradation mechanism of dielectric properties of HfO2-x due to interaction of oxygen composition and strain Invited Peer-reviewed

    K. Suzuki, Y. Ito, H. Ito, H. Miura

    2007 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATIONS (VLSI-TSA), PROCEEDINGS OF TECHNICAL PAPERS 42-+ 2007

    DOI: 10.1109/VTSA.2007.378911  

  266. Micro texture-induced variation of mechanical properties of electroplated copper thin films Peer-reviewed

    Muneyuki Otani, Kazuhiko Sakutani, Kinji Tamakawa, Ken Suzuki, Hideo Miura

    IPACK 2007: PROCEEDINGS OF THE ASME INTERPACK CONFERENCE 2007, VOL 2 735-741 2007

    DOI: 10.1115/IPACK2007-33261  

  267. Influence of oxygen composition and carbon impurity on electronic reliability of HfO2 Peer-reviewed

    K. Suzuki, Y. Ito, H. Miura

    SISPAD 2007: SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES 2007 165-168 2007

  268. Influence of intrinsic defects and strain on electronic reliability of gate oxide films

    Ken Suzuki, Yuta Ito, Hideo Miura

    Materials Research Society Symposium Proceedings 917 82-87 2006

    Publisher: Materials Research Society

    DOI: 10.1557/proc-0917-e05-28  

    ISSN: 0272-9172

  269. P55 Analytical study of change of nanostructure of Ni-based superalloy caused by stress dependent anisotropic diffusion

    ITO Hiroyuki, SUZUKI Ken, MIURA Hideo

    Proceedings of the 1992 Annual Meeting of JSME/MMD 2006 629-630 2006

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmezairiki.2006.0_629  

  270. P78 Basic study of Non-Contact Strain Measurement Using CNT-Dispersed Resin

    FUJI Hideki, SUZUKI Ken, MIURA Hideo

    Proceedings of the 1992 Annual Meeting of JSME/MMD 2006 669-670 2006

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmezairiki.2006.0_669  

  271. P12 Effect of Residual Stress in Thin Films on Transmission Characteristics of a Laser Beam Through an Thin-Film Optical Wave-Guide

    KITAMURA Atsushi, Suzuki Ken, MIURA Hideo

    Proceedings of the 1992 Annual Meeting of JSME/MMD 2006 543-544 2006

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmezairiki.2006.0_543  

  272. 3961 Quantum Chemical Molecular Dynamics Study on Mechanisms of Stress Corrosion Cracking

    Suzuki Ken, Ito Hiroyuki, Miura Hideo

    The proceedings of the JSME annual meeting 2006 917-918 2006

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmemecjo.2006.1.0_917  

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    In order to explicate the fracture and degradation mechanisms of stress corrosion cracking (SCC) of stainless steel, we analyzed the chemical reaction dynamics of the alloy system by using the quantum chemical molecular dynamics simulation. Tight-binding quantum chemical molecular dynamics simulations enabled us to present a clear view of the oxidation process of metal surface including the anodic dissolution and formation of oxide or protective films at an atomic level. We found that the oxygen atoms preferably stay around the chromium atoms, implying that oxidizing species have the tendency to coordinate the chromium atoms and spontaneous formation of a chromium oxide film would take place on Fe-Cr clean surface at the beginning of its oxidation process.

  273. Fracture Properties of Ceria-based Ceramics at High Temperature Peer-reviewed

    Kazuhisa Sato, Ken Suzuki, Toshiyuki Hashida, Junichiro Mizusaki

    Proceedings of the 16th Symposium on Functionally Graded Materials (FGM2004) 139-143 2005/03

  274. 1816 Basic study of stress-induced migration by quantum chemical molecular dynamics analysis

    ITO Hiroyuki, SUZUKI Ken, MIURA Hideo

    The proceedings of the JSME annual meeting 2005 229-230 2005

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmemecjo.2005.6.0_229  

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    In order to make clear the mechanism of the texture change (rafting) of Ni-base superalloy under an uni-axial strain, molecular dynamics analysis was applied to analyze the effect of strain on the diffusion constant of element atoms around the interface between different materials. Since large strain more than a few percent exists at the interface due to mismatch in the lattice constant between the materials, the drastic change of the diffusion constant is expected to occur under high strain. Both the self-diffusion constants of Al and Ni increase drastically around the Al/Ni interface under tensile strain of 5%. The anisotropic diffusion was observed depending on the direction of the applied strain. The stress-induced diffusion occurs at the interface between different materials and it accelerates the diffusion constant of the component atom by about 10 times. This stress-induced diffusion may cause the texture change of the Ni-base superalloy.

  275. 1815 Effect of strain and oxygen vacancies on the band gap of thin films with high-k

    ITO Yuta, SUZUKI Ken, MIURA Hideo

    The proceedings of the JSME annual meeting 2005 227-228 2005

    Publisher: The Japan Society of Mechanical Engineers

    DOI: 10.1299/jsmemecjo.2005.6.0_227  

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    In order to make clear the effect of the strain and intrinsic defects on both electronic and structural characteristic of HfO_2, we performed a quantum chemical molecular dynamics analysis for HfO_<2-x> structures under strain. The band gap value of HfO_2 decreased drastically due to the oxygen vacancy. In addition, the band gap decreased further by the absolute value of strain. We can conclude, therefore, that both the existence of oxygen vacancies and strain in HfO_2 films deteriorate the electronic reliability of the oxide film seriously.

  276. Evaluation of Elastic Property of (CeO2) 1-x (YO1.5) x Ceramics Peer-reviewed

    Kazuhisa Sato, Toshiyuki Hashida, Ken Suzuki, Hiroo Yugami, Tatsuya Kawada, Junichiro Mizusaki

    Journal of the Japan Society of Powder and Powder Metallurgy 52 (11) 840-844 2005

    Publisher: Japan Society of Powder and Powder Metallurgy

    DOI: 10.2497/jjspm.52.840  

    ISSN: 0532-8799

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    The influences of the sintering additive content of Y2O3 on elastic modulus of ceria ceramics were investigated by small punch (SP) testing method and molecular dynamics (MD) method. Y2O3 doped ceria powders with a composition of (CeO2)1-x(YO1.5)x (x=0, 0.10, 0.15, 0.20, 0.30, 0.40) were prepared by a co-precipitation method. The powders were compacted by die pressing (50 MPa) followed by cold isostatic pressing (120 MPa), and sintered at 1500°C in air for 5 h. The elastic modulus was decreased significantly with increasing additive contents of the Y2O3 oxides. Especially, it tended to exhibit a minimum value at 10∼20 mol%. However, ionic conductivity increased with increasing additive content of the Y2O3 oxides, exhibited a maximum value at 15 mol%. Calculation model and interatomic potential were shown to be useful to evaluate the elastic property.

  277. Influence of oxygen vacancies and strain on electronic reliability of SiO2-x films Peer-reviewed

    K Suzuki, Y Ito, H Miura, T Shoji

    Semiconductor Defect Engineering-Materials, Synthetic Structures and Devices 864 77-82 2005

    ISSN: 0272-9172

  278. Quantum chemical molecular dynamics analysis of the effect of intrinsic defects and strain on dielectric characteristic of gate oxide films Peer-reviewed

    K Suzuki, Y Ito, H Miura

    SISPAD: 2005 International Conference on Simulation of Semiconductor Processes and Devices 327-330 2005

  279. Electronic structure of the electrode/electrolyte interface: large-scale tight-binding quantum chemical simulation Peer-reviewed

    Y Makino, T Kusagaya, K Suzuki, A Endou, M Kubo, P Selvam, H Ota, F Yonekawa, N Yamazaki, A Miyamoto

    SOLID STATE IONICS 175 (1-4) 847-850 2004/11

    DOI: 10.1016/j.ssi.2004.09.053  

    ISSN: 0167-2738

  280. Computational Chemistry Study of Accelerated Oxidation Mechanism of IGSCC of Structural Materials in LWR Environments and Theoretical Design of SCC Resistant Alloys Peer-reviewed

    K. Suzuki, Y. Takeda, Z. Lu, T. Shoji

    Proceeding of International Congress on Advances in Nuclear Power Plants 2004

  281. Monte Carlo simulation of hydrogen absorption in palladium and palladium-silver alloys Peer-reviewed

    KA Hitoshi, T Nakayama, Y Kobayashi, K Suzuki, M Takahashi, S Takami, M Kubo, N Itoh, P Selvam, A Miyamoto

    CATALYSIS TODAY 82 (1-4) 233-240 2003/07

    DOI: 10.1016/S0920-5861(03)00237-2  

    ISSN: 0920-5861

  282. Materials design of perovskite-based oxygen ion conductor by molecular dynamics method Peer-reviewed

    Y Yamamura, C Ihara, S Kawasaki, H Sakai, K Suzuki, S Takami, M Kubo, A Miyamoto

    SOLID STATE IONICS 160 (1-2) 93-101 2003/05

    DOI: 10.1016/S0167-2738(03)00154-1  

    ISSN: 0167-2738

    eISSN: 1872-7689

  283. Computational chemistry study on the dynamics of lubricant molecules under shear conditions Peer-reviewed

    D Kamei, H Zhou, K Suzuki, K Konno, S Takami, M Kubo, A Miyamoto

    TRIBOLOGY INTERNATIONAL 36 (4-6) 297-303 2003/04

    DOI: 10.1016/S0301-679X(02)00201-3  

    ISSN: 0301-679X

  284. 高速化量子分子動力学法による電極・電解液界面反応の検討

    牧野 裕介, 草谷 友規, 鈴木 研, 遠藤 明, 久保 百司, 今村 詮, 太田 洋邦, 米川 文広, 山崎 信幸, 宮本 明

    化学工学会 研究発表講演要旨集 2003 65-65 2003

    Publisher: 公益社団法人 化学工学会

    DOI: 10.11491/scej.2003f.0.65.0  

  285. Tight-binding quantum chemical molecular dynamics study of cathode materials for lithium secondary battery Peer-reviewed

    K Suzuki, Y Kuroiwa, S Takami, M Kubo, A Miyamoto, A Imamura

    SOLID STATE IONICS 152 273-277 2002/12

    DOI: 10.1016/S0167-2738(02)00310-7  

    ISSN: 0167-2738

  286. Development and application of nonequilibrium simulation program for ion diffusion in battery Peer-reviewed

    CH Jung, H Morito, Y Kobayashi, K Suzuki, S Takami, M Kubo, A Miyamoto

    SOLID STATE IONICS 152 279-284 2002/12

    DOI: 10.1016/S0167-2738(02)00312-0  

    ISSN: 0167-2738

  287. Combinatorial computational chemistry approach to the design of cathode materials for a lithium secondary battery Peer-reviewed

    K Suzuki, Y Kuroiwa, S Takami, M Kubo, A Miyamoto

    APPLIED SURFACE SCIENCE 189 (3-4) 313-318 2002/04

    DOI: 10.1016/S0169-4332(01)01009-1  

    ISSN: 0169-4332

  288. The fate of a cluster colliding onto a substrate - Dissipation of translational kinetic energy Peer-reviewed

    S Takami, K Suzuki, M Kubo, A Miyamoto

    JOURNAL OF NANOPARTICLE RESEARCH 3 (2-3) 213-218 2001/06

    DOI: 10.1023/A:1017998707125  

    ISSN: 1388-0764

  289. Atomistic Crystal Growth Simulation of Metal Oxide Materials Peer-reviewed

    M. Kubo, H. Kurokawa, Y. Inaba, K. Suzuki, S. Takami, A. Miyamoto, M. Kawasaki, M. Yoshimoto, H. Koinuma

    Transactions of the Materials Research Society of Japan 26 989-992 2001

  290. Interaction between SiO2 surface and Au clusters studied by computational chemistry Peer-reviewed

    S Takami, K Yajima, K Suzuki, A Endou, M Kubo, A Miyamoto

    KAGAKU KOGAKU RONBUNSHU 26 (6) 770-775 2000/11

    DOI: 10.1252/kakoronbunshu.26.770  

    ISSN: 0386-216X

  291. Structural properties of LixMn2O4 as investigated by molecular dynamics and density functional theory Peer-reviewed

    K Suzuki, Y Oumi, S Takami, M Kubo, A Miyamoto, M Kikuchi, N Yamazaki, M Mita

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 39 (7B) 4318-4322 2000/07

    DOI: 10.1143/JJAP.39.4318  

    ISSN: 0021-4922

  292. Molecular dynamics simulations of adhesional forces via hydrocarbon films Peer-reviewed

    H Tamura, Z Hui, Y Inaba, K Suzuki, S Takami, M Kubo, A Miyamoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 39 (7B) 4425-4426 2000/07

    DOI: 10.1143/JJAP.39.4425  

    ISSN: 0021-4922

  293. Molecular dynamics simulation of enhanced oxygen ion diffusion in strained yttria-stabilized zirconia Peer-reviewed

    K Suzuki, M Kubo, Y Oumi, R Miura, H Takaba, A Fahmi, A Chatterjee, K Teraishi, A Miyamoto

    APPLIED PHYSICS LETTERS 73 (11) 1502-1504 1998/09

    DOI: 10.1063/1.122186  

    ISSN: 0003-6951

  294. Molecular dynamics simulations on oxygen ion diffusion in strained YSZ/CeO(2) superlattice Peer-reviewed

    K Suzuki, A Endou, R Miura, Y Oumi, H Takaba, M Kubo, A Chatterjee, A Fahmi, A Miyamoto

    APPLIED SURFACE SCIENCE 130 545-548 1998/06

    DOI: 10.1016/S0169-4332(98)00112-3  

    ISSN: 0169-4332

Show all ︎Show first 5

Misc. 172

  1. 120 Investigation of the Dominant Factor of Degradation of Ni-based Super Alloy Considering the Change of Atomic Configuration

    TAKAHASHI Motoki, SUZUKI Ken, MIURA Hideo

    2016 (51) 37-38 2016

    Publisher: The Japan Society of Mechanical Engineers

  2. 119 Damage Mechanism of Heat-Resistant Material Caused by the Change of Its Micro Texture Under Mechanical Loading at High Temperature

    Murakoshi Takuya, Suzuki Ken, Miura Hideo

    2016 (51) 35-36 2016

    Publisher: The Japan Society of Mechanical Engineers

  3. 144 Development of the Measurement method of the Strength of a Grain Boundary

    NAKANISHI Takahiro, ICHIKAWA Yuji, SUZUKI Ken, MIURA Hideo

    2016 (51) 85-86 2016

    Publisher: The Japan Society of Mechanical Engineers

  4. 136 Clarification and Control of the Multiple factors for the Long-term Reliability of the Sub-micro-size Copper Thin-film Interconnections

    KATO Takeru, SUZUKI Ken, MIURA Hideo

    2016 (51) 69-70 2016

    Publisher: The Japan Society of Mechanical Engineers

  5. 138 Effect of the Crystallinity of Underlayer Material on Microtexture of electroplated Copper thin Film

    LIU Jiatong, SUZUKI Ken, MIURA Hideo

    2016 (51) 73-74 2016

    Publisher: The Japan Society of Mechanical Engineers

  6. 143 Control of the Wide Variation of Mechanical Properties of Electroplated Copper Thin Films Used for Advance Semiconductor Devices

    Gotoh Masaru, Suzuki Ken, Miura Hideo

    2016 (51) 83-84 2016

    Publisher: The Japan Society of Mechanical Engineers

  7. 137 Development and evaluation of flexible strain sensor using graphene

    SASAKI Shinichiro, YANG Meng, SUZUKI Ken, MIURA Hideo

    2016 (51) 71-72 2016

    Publisher: The Japan Society of Mechanical Engineers

  8. PS0017-263 Proposal of modified normalized S-N curves considering the change of micro texture

    Murakoshi Takuya, SUZUKI Ken, MIURA Hideo

    2015 "PS0017-263-1"-"PS0017-263-2" 2015/11/21

    Publisher: The Japan Society of Mechanical Engineers

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    As a result of high temperature rotary bending test of modified 9Cr-1Mo steel, the reduction of the misorientation and change in the martensitic structure were observed at the surface of damaged specimens. In addition, nano-indentation test was performed on the surface of the fractured specimens to evaluate the decrease of the strength of this alloy due to the change of the micro texture. Based on the results of the hardness test, modified normalized S-N curves was proposed by considering the change of the 0.2% proof strength of the material.

  9. PS0021-294 Controlling Method of the Microtexure of Copper Thin-Film

    LIU Jiatong, SUZUKI Ken, MIURA Hideo

    2015 "PS0021-294-1"-"PS0021-294-3" 2015/11/21

    Publisher: The Japan Society of Mechanical Engineers

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    The long-term reliability of electroplated copper thin-film interconnections varied drastically depending on their crystallinity. The crystallinity was mainly dominated by the seed layer material for electroplating because of the lattice mismatch between the seed layer material and copper. Even though tantalum is indispensable for a barrier of copper diffusion into silicon or oxide, the quality of thin copper films is rather low because there is a large mismatch in the lattice constant between tantalum and copper. Ruthenium is one of the most effective materials for improving the crystallinity of the electroplated copper thin films and the stability of the copper thin films electroplated on the ruthenium seed layer was very high during annealing up to 200℃.

  10. OS1405-340 Buckling Deformation and Change of Electronic Characteristics of Multi-Wall Carbon Nanotubes

    SUZUKI Ken, MIURA Hideo

    2015 "OS1405-340-1"-"OS1405-340-2" 2015/11/21

    Publisher: The Japan Society of Mechanical Engineers

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    Highly sensitive strain sensors have been developed by using multi-wall carbon nanotubes. It was confirmed that a fine bundle of multi-wall carbon nanotubes showed elastic deformation even under the compressive strain of 60%. The high strain sensitivity was attributed to the buckling (local heavy) deformation of the compressed multi-wall nanotubes, and the drastic change of the electronic band structure of the heavily deformed carbon nanotubes. The electronic conductivity of multi-wall carbon nanotubes can vary drastically from metallic to semiconductive depending on the amplitude of the local deformation and the chirality of each single wall nanotube. The large reversible deformation of multi-wall carbon nanotubes was also analyzed by using molecular dynamics simulation.

  11. OS1429-361 Damage Evaluation of Ni-base Superalloy under High Temperature Creep

    SUZUKI Ken, MURAKOSHI Takuya, MIURA Hideo

    2015 "OS1429-361-1"-"OS1429-361-2" 2015/11/21

    Publisher: The Japan Society of Mechanical Engineers

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    In this study, the change of crystallinity of the Ni-base superalloys (CM247LC) under creep loading was analyzed by applying Electron Back-Scattered Diffraction (EBSD) method. The image quality (IQ) value obtained from the EBSD analysis was used for the quantitative evaluation of the crystallinity. The quality of the atomic alignment of both γ' and γ phases was found to degrade with increasing creep damage. The degradation of crystallinity suggests that the ordered L1_2 structure of Ni_3Al became disordered and the density of dislocations and vacancies increased. Therefore, the dominant factor of the creep damage of this alloy is the strain-induced diffusion of elements under loading, and the decrease of the crystallinity.

  12. PS0018-264 Development and evaluation of graphene strain sensor using flexible substrate

    SASAKI Shinichiro, SUZUKI Ken, MIURA Hideo

    2015 "PS0018-264-1"-"PS0018-264-3" 2015/11/21

    Publisher: The Japan Society of Mechanical Engineers

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    In order to enable the precise position control of machines and prevent various machinery failures in advance, it is necessary to monitor the stress and strain fields in the working parts with high sensitivity. Therefore, the authors have developed a strain sensor on a flexible substrate using graphene as a material for highly sensitive and micro-sized strain sensor. In this study, chemical vapor deposition (CVD) method was used for the synthesis of graphene on the Cu foil. After the synthesis, the graphene sheet was transferred on a Si/SiO_2 substrate and a graphene-based strain sensor was fabricated by applying MEMS technique. The strain dependence of the electrical conductivity of the sensor was evaluated.

  13. PS0019-272 Microstructure Dependence of Long-Term Reliability of Thin-Film Interconnections

    Kato Takeru, SUZUKI Ken, MIURA Hideo

    2015 "PS0019-272-1"-"PS0019-272-3" 2015/11/21

    Publisher: The Japan Society of Mechanical Engineers

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    In this study, the dominant diffusion path in the electroplated copper interconnections used for TSV (through silicon vais) was investigated in detail under the EM (Electromigration) load. The micro texture of the interconnection was analyzed by using an EBSD (Electron Back-scattered Diffraction) method. There were two dominant diffusion paths: the interfaces and random grain boundaries formed at the center of the interconnection. Both paths consisted of porous random grain boundaries with low crystallinity. The random grain boundaries at the center of the interconnection remained even after the annealing at 400℃. Therefore, it is necessary to improve the crystallinity of the as-electroplated film to improve the EM resistance of the electroplated interconnections.

  14. 237 The effect of three-dimensional strain fields on the electronic conductivity of graphene nano-ribbons

    Yang Meng, Ohnishi Masato, Suzuki Ken, Miura Hideo

    The Computational Mechanics Conference 2015 (28) "237-1"-"237-2" 2015/10/10

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

  15. 262 Change in electronic conductivity of carbon nanotubes caused by buckling deformation

    Suzuki Ken, Ohnishi Masato, Miura Hideo

    The Computational Mechanics Conference 2015 (28) "262-1"-"262-2" 2015/10/10

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

  16. OS12-4 Control of Mechanical Properties of Micro Electroplated Copper Interconnections(Mechanical properties of nano- and micro-materials-1,OS12 Mechanical properties of nano- and micro-materials,MICRO AND NANO MECHANICS)

    Gotoh Masaru, Suzuki Ken, Miura Hideo

    Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics 2015 (14) 186-186 2015/10/04

    Publisher: The Japan Society of Mechanical Engineers

  17. OS12-9 Development of Measurement Method of the Strength of a Grain Boundary(Mechanical properties of nano- and micro-materials-3,OS12 Mechanical properties of nano- and micro-materials,MICRO AND NANO MECHANICS)

    Nakanishi Takahiro, Kato Takeru, Ichikawa Yuji, Suzuki Ken, Miura Hideo

    Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics 2015 (14) 191-191 2015/10/04

    Publisher: The Japan Society of Mechanical Engineers

  18. OS8-32 Fatigue Strength of Mod. 9Cr-1Mo Steel at Elevated Temperatures(CFRP,OS8 Fatigue and fracture mechanics,STRENGTH OF MATERIALS)

    Ochi Motoyuki, Suzuki Ken, Miura Hideo

    Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics 2015 (14) 142-142 2015/10/04

    Publisher: The Japan Society of Mechanical Engineers

  19. 108 Damage evaluation of Ni-base Superalloy under High Temperature Creep

    Hagiwara Shuuhei, Suzuki Ken, Miura Hideo

    2015 (51) "108-1"-"108-2" 2015/09/26

    Publisher: The Japan Society of Mechanical Engineers

  20. 105 Development of a strain sensor using MWCNTs on a flexible substrate

    Yumoto Kanji, Suzuki Ken, Miura Hideo

    2015 (51) "105-1"-"105-2" 2015/09/26

    Publisher: The Japan Society of Mechanical Engineers

  21. 109 Analysis of the Initial Fatigue Damage of Modified 9Cr-1Mo Steel at Elevated Temperatures

    SHINOZAKI Taichi, SUZUKI Ken, MIURA Hideo

    2015 (51) "109-1"-"109-2" 2015/09/26

    Publisher: The Japan Society of Mechanical Engineers

  22. 107 Visualization of grain boundary diffusion by using the scanning probe microscopy

    Sakamoto Hayato, Suzuki Ken, Miura Hideo

    2015 (51) "107-1"-"107-2" 2015/09/26

    Publisher: The Japan Society of Mechanical Engineers

  23. 104 Development of Strain Sensor for The Measurement of Residual Stress in 3D Chips

    ISOBE Koki, SUZUKI Ken, MIURA Hideo

    2015 (51) "104-1"-"104-2" 2015/09/26

    Publisher: The Japan Society of Mechanical Engineers

  24. Effect of Microtexture in Electroplated Copper Thin-Film Interconnections on Their Migration Resistance

    SUZUKI Ken, KATO Takeru, MIURA Hideo

    Technical report of IEICE. SDM 114 (469) 33-38 2015/03/02

    Publisher: The Institute of Electronics, Information and Communication Engineers

    ISSN: 0913-5685

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    Both electrical and mechanical properties of electroplated copper thin-films vary drastically depending on their unique microtexture that mainly consists of fine columnar grains with porous grain boundaries. The variation of mechanical and electrical properties of electroplated copper thin-films should degrade the reliability of electronic devices seriously. In this study, in order to establish the design guideline for highly reliable copper interconnections, effects of the microtexture of electroplated copper thin-films, especially the crystallinity of grain boundaries, on stress-induced migration (SM) and electro migration (EM) were investigated.

  25. Microtexture dependence of stress-induced migration of copper thin film interconnections

    Suzuki Ken, Miura Hideo

    The Computational Mechanics Conference 2014 (27) 100-101 2014/11/22

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

  26. Change in Electronic Conductivity of Carbon Nanotubes Under Radial Strain

    Ohnishi Masato, Suzuki Ken, Miura Hideo

    The Computational Mechanics Conference 2014 (27) 102-103 2014/11/22

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

  27. 323 Effect of Base Material on the Crystallinity of Electroplated Copper Thin Films

    Liu Jiatong, Suzuki Ken, Miura Hideo

    2014 (50) 69-70 2014/09/05

    Publisher: The Japan Society of Mechanical Engineers

  28. 314 Highly Reliable Interface Structure of Electroplated Copper Thin-Film Interconnections

    Kato Takeru, Suzuki Ken, Miura Hideo

    2014 (50) 63-64 2014/09/05

    Publisher: The Japan Society of Mechanical Engineers

  29. 322 Strain Dependence of Electronics Conductivity Graphene Thin Films

    SASAKI Shinichiro, SUZUKI Ken, MIURA Hideo

    2014 (50) 67-68 2014/09/05

    Publisher: The Japan Society of Mechanical Engineers

  30. 321 Atomic Scale Analysis of the Initial Fatigue Damage of Modified 9Cr-1Mo Steel at Elevated Temperatures

    MURAKOSHI Takuya, SUZUKI Ken, NONAKA Isamu, MIURA Hideo

    2014 (50) 65-66 2014/09/05

    Publisher: The Japan Society of Mechanical Engineers

  31. PS10 Measurement of the Degradation Process of the Strength at Grain Boundaries in Thin-Film Copper Interconnections

    NAKANISHI Takahiro, SUZUKI Ken, MIURA Hideo

    2014 "PS10-1"-"PS10-2" 2014/07/19

    Publisher: The Japan Society of Mechanical Engineers

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    Electric and mechanical properties of the electroplated copper thin film interconnections vary drastically depending on not only the size of grains but also the crystallographic characteristics of grain boundaries. In particular, the effect of the quality of grain boundaries plays very important role on the physical properties when the volume ratio of grain boundaries increases with the decrease of average grain size. In this study, in order to evaluate the damage due to the electro migration (EM) of electroplated copper interconnections, the tensile strength at grain boundaries in the interconnection was measured by the micro-tensile test method using Focused Ion Beam (FIB) technique. The micro-texture dependence of the tensile strength and the change in the strength of electroplated copper thin-film interconnections after the EM test were evaluated quantitatively.

  32. PS15 Two-Dimensional Pressure Distribution Sensor Using Carbon Nanotubes

    NOZAKI Takuya, SUZUKI Ken, MIURA Hideo

    2014 "PS15-1"-"PS15-2" 2014/07/19

    Publisher: The Japan Society of Mechanical Engineers

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    A new highly sensitive strain sensor has been developed by applying the change of electronic conductivity of CNTs. In order to control the shape of MWCNTs, MWCNT is developed by applying a chemical vapor deposition (CVD) method. It was found that the shape of MWCNTs can be controlled by changing the thickness of catalyst particles and deposition temperature. The MWCNT bundles with the aspect ratio of 20 were grown by using the optimal growth conditions. This bundle structure showed the high load sensitivity of 10 mN.

  33. PS08 Fatigue Strength and Initial Damage of Modified 9Cr-1Mo Steel at Elevated Temperatures

    OCHI Motoyuki, SUZUKI Ken, NONAKA Isamu, MIURA Hideo

    2014 "PS08-1"-"PS08-3" 2014/07/19

    Publisher: The Japan Society of Mechanical Engineers

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    The fatigue limit did not appear within the range of 10^8 cycles at temperatures higher than 500℃ as a result of the high temperature rotary bending test of modified 9Cr-1Mo steel. It was clarified that fatigue cracks always started at the surface of the samples regardless of the existence of inclusions. Therefore, in order to discuss the mechanism of the crack initiation, the change of the micro texture of the alloy under the fatigue loading at elevated temperature was evaluated quantitatively by applying an EBSD method. As a result, both the reduction of the misorientation and change in the martensite structure were observed at the surface of the damaged specimens.

  34. PS09 Microtexture Dependence of the Thermal Conductivity of Copper Thin-Film Interconnections

    Rittinon Pornvitoo, Suzuki Ken, Miura Hideo

    2014 "PS09-1"-"PS09-3" 2014/07/19

    Publisher: The Japan Society of Mechanical Engineers

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    Copper thin films are indispensable for the interconnections in the advanced electronic products, such as Through Silicon Via (TSV), fine bumps, and thin-film interconnections in various devices and interposers. However, it has been reported that both electrical and mechanical properties of the films vary drastically comparing with those of conventional bulk copper due to the fluctuation of the crystallinity of grain boundaries in the films. Porous or sparse grain boundaries cause the very high resistivity and brittle fracture of the films. Thus, the thermal conductivity of the electroplated copper thin films should be varied drastically depending on their micro texture based on the Wiedemann-Franz's law. Since the copper interconnections are used for not only electrical conduction but also thermal heat conduction, it is very important to evaluate the crystallinity of the polycrystalline thin film materials quantitatively and clarify the relationship between the crystallinity and thermal properties of the films.

  35. PS11 Variation of the Mechanical Properties of Electroplated Copper Interconnections

    GOTOH Masaru, SUZUKI Ken, MIURA Hideo

    2014 "PS11-1"-"PS11-2" 2014/07/19

    Publisher: The Japan Society of Mechanical Engineers

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    Electroplated copper thin films have started to be applied to the interconnection material in TSV structures because of its low electrical resistivity and high thermal conductivity. However, the material properties were found to vary drastically comparing with those of bulk copper. This was because that the microtexture of the electroplated films was found to vary widely depending on their electroplating conditions. In this study, mechanical properties of the films were measured by a nano-indentation test. The result showed that it is very important to control the microtexture of the films to assure the stability and reliability of electronic products.

  36. OS1109 Effect of the Quality of Grain Boundaries on their Strength

    MIURA Hideo, SUZUKI Ken, MURATA Naokazu

    2014 "OS1109-1"-"OS1109-3" 2014/07/19

    Publisher: The Japan Society of Mechanical Engineers

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    The crystallinity of grains and grain boundaries were evaluated quantitatively by analyzing the quality of Kikuchi lines obtained from the conventional EBSD analysis. A grain boundary was defined as a transition area between nearby two crystals in polycrystalline materials, in which the order of the atomic alignment was degraded by various defects such as vacancies, dislocations, impurities, strain, and so on. The position of the grain boundary was detected by CI (Confidence Index) value and the order of the atomic alignment was evaluated by IQ (Image Quality) value obtained from the EBSD analysis. The crystallinity defined by the IQ value is independent of the density of dislocations and the crystallographic orientation f the grain boundary. The strength of the grain boundary can be analyzed by the IQ value.

  37. OS1110 Clarification of Dominant Factors of Stress-Induced Migration in Electroplated Copper Thin-Film Interconnections

    SUZUKI Ken, MIURA Hideo

    2014 "OS1110-1"-"OS1110-3" 2014/07/19

    Publisher: The Japan Society of Mechanical Engineers

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    In this study, the change of the crystallographic quality of electroplated copper thin-film interconnections due to stress-induced migration was investigated by using an EBSD (Electron Back Scatter Diffraction) method. This EBSD analysis clearly showed that the crystallinity of the annealed electroplated copper thin-film was degraded during the storage of the interconnection even at room temperature without any loading. This is due to the stress-induced migration caused by high tensile residual stress which occurred in the film after annealing. Molecular dynamics simulations showed that the diffusivity of copper atoms along grain boundaries with low crystallinity was enhanced significantly by high tensile residual stress. Therefore, the grain boundary diffusion accelerated by tensile residual stress is the main reason for the degradation of crystallinity the thin film interconnection after annealing.

  38. OS0205 Strain Dependence of Electronic Properties of Carbon Nanotubes

    OHNISHI Masato, YANG Meng, SUZUKI Ken, MIURA Hideo

    2014 "OS0205-1"-"OS0205-2" 2014/07/19

    Publisher: The Japan Society of Mechanical Engineers

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    Since carbon nanotubes (CNTs) have attractive electronic and mechanical properties, there have been many efforts to develop CNTs-based electronic devices and sensors. The authors have also validated the possibility of a highly sensitive strain sensor using vertically aligned multi-walled CNTs (MWNTs). However, the strain sensitivity (gauge factor) of our developed strain sensor was fluctuated largely from 0.3 to 100. Therefore, the effect of strain on their electronic properties was analyzed by the combination of molecular dynamics and the first principles calculation. In this study, the effect of radial strain on them was investigated in detail. It was found that the space distribution of state density of CNTs was localized at high-curvature region when a radial strain was applied. In addition, the localization of a state density decreased its state energy and increased the current through the CNT.

  39. OS0204 Change of the Electronic Properties of Graphene Under Strain

    YANG Meng, OHNISHI Masato, SUZUKI Ken, MIURA Hideo

    2014 "OS0204-1"-"OS0204-2" 2014/07/19

    Publisher: The Japan Society of Mechanical Engineers

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    Graphene has exhibited great potential for the application of next-generation electronic devices. However, undesirable interface stress induced during graphene transfer and device fabrication process causes the deformation of graphene, resulting in the change in its electronic properties. In this study, the effect of three-dimensional mechanical loading such as tensile, bending and folding deformations on the electronic states of armchair graphene nano-ribbons (AGNRs) is investigated based on density functional theory (DFT) calculation. It was found that the electronic structure of AGNRs shows differential sensitivity to various deformation modes. The effect of uniaxial tension on the electronic conductivity of AGNRs was also analyzed using quantum transport simulation and it was found that the uniaxial tensile strain changes the band gap of AGNRs, resulting in the change in the electronic conductivity. The current-strain (I-ε) relationship of AGNRs strongly depends on the length of the strained area. This understanding paves the way for the development of highly sensitive GNRs strain sensors.

  40. OS0208 Clarification of Dominant Factors of Stress-Induced Migration in Electroplated Copper Thin-Film Interconnections

    SUZUKI Ken, OCHI Motoyuki, MIURA Hideo

    2014 "OS0208-1"-"OS0208-2" 2014/07/19

    Publisher: The Japan Society of Mechanical Engineers

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    In order to make clear the mechanism of the directional coarsening (rafting) of y' phases in Ni-base superalloys under uni-axial tensile strain, molecular dynamics (MD) analysis was applied to investigate dominant factors of strain-induced anisotropic diffusion of Al atoms. The diffusion constant of Al atoms was changed drastically by the dopant elements and their contents. When the lattice constant of the γ phase was increased and its melting point was decreased by the addition of Cr or Al atoms, the strain-induced anisotropic diffusion of Al atoms in the γ' phase was accelerated. On the other hand, the addition of Co decreased the diffusion significantly. Therefore, the changes of lattice constant and melting point depending on the chemical composition of the γ/γ' interface are the dominant factors controlling the strain-induced anisotropic diffusion of Al atoms in the Ni-base superalloy.

  41. 145 Clarification of the dominant factors of stress-induced migration in through silicon via (TSV) interconnections used for three-dimensional electronic packaging

    Furuya Ryosuke, Suzuki Ken, Miura Hideo

    2014 (49) 91-92 2014

    Publisher: The Japan Society of Mechanical Engineers

  42. 102 Improvement of the Sensitivity of a Strain Sensor Using Carbon Nanotubes

    Nozaki Takuya, Suzuki Ken, Miura Hideo

    2014 (49) 5-6 2014

    Publisher: The Japan Society of Mechanical Engineers

  43. 101 Crystallinity of Electroplated Copper Thin Film Interconnections and Their Local Joule Heating

    Rittinon Pornvitoo, Suzuki Ken, Miura Hideo

    2014 (49) 3-4 2014

    Publisher: The Japan Society of Mechanical Engineers

  44. 146 Visualization of the degradation process of electroplated copper thin-film interconnections caused by electromigration, and improvement of their reliability

    Asai Osamu, Suzuki Ken, Miura Hideo

    2014 (49) 93-94 2014

    Publisher: The Japan Society of Mechanical Engineers

  45. 164 Explication of the dominant factors of the strength of the cold-sprayed copper coating

    Watanabe Yusuke, Ichikawa Yuji, Suzuki Ken, Miura Hideo

    2014 (49) 125-126 2014

    Publisher: The Japan Society of Mechanical Engineers

  46. 122 Dominant mechanism of the fatigue damage of Modified 9Cr-lMo Steel at Elevated Temperatures

    Ochi Motoyuki, Suzuki Ken, Nonaka Isamu, Miura Hideo

    2014 (49) 45-46 2014

    Publisher: The Japan Society of Mechanical Engineers

  47. 137 Explication of the Dominant Factors of the Crystallinity of Grain Boundaries in Polycrystalline Thin Films

    Fan Chuanhong, Suzuki Ken, Miura Hideo

    2014 (49) 75-76 2014

    Publisher: The Japan Society of Mechanical Engineers

  48. 141 Development of two-dimensional strain sensor using carbon nanotube

    Kawakami Hiroshi, Suzuki Ken, Miura Hideo

    2014 (49) 83-84 2014

    Publisher: The Japan Society of Mechanical Engineers

  49. 1505 Molecular dynamics study on stress-induced grain boundary diffusion of electroplated copper thin films

    SUZUKI Ken, ASAI Osamu, FAN Chuanhong, FURUYA Ryosuke, MIURA Hideo

    The Computational Mechanics Conference 2013 (26) "1505-1"-"1505-2" 2013/11/02

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

  50. OS1813 Development of a Two-dimensional Pressure Sensor Using Carbon Nanotube

    KAWAKAMI Hiroshi, SUZUKI Ken, MIURA Hideo

    2013 "OS1813-1"-"OS1813-3" 2013/10/12

    Publisher: The Japan Society of Mechanical Engineers

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    A new pressure measurement method has been developed by applying the change of the electronic conductivity of CNTs. It is reported that the electric conductivity of MWCNTs changes drastically under uniaxial strain because of the drastic change of their band gap. In this study, the authors have developed a two-dimensional pressure sensor, which consists of area-arrayed fine bundles of MWCNTs by applying MEMS technology. The special resolution of the developed sensor was 500 μm, which was higher than that of human finger, 1000 μm. Under the application of compressive strain, the electric resistance was confirmed to increase almost linearly with the applied strain.

  51. OS1002 Strain-induced Change of Electronic Conductivity of Graphene Sheets

    YANG Meng, OHNISHI Masato, SUZUKI Ken, MIURA Hideo

    2013 "OS1002-1"-"OS1002-3" 2013/10/12

    Publisher: The Japan Society of Mechanical Engineers

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    Graphene has great potential for ultra-sensitive strain sensors applications. This is because that its electrical conductivity response on structural deformation is very high due to the high piezoresistive sensitivity. In the current study, the effect of uniaxial strain on the electronic properties of armchair graphene nanoribbons (AGNRs) is investigated using a π-orbital tight-binding (TB) based Green's function method. When a bias voltage is applied to the strained AGNRs, the evolution of current is partly correlated with the band gap variations. The authors also found that the strain-current (ε-l) characteristics are strongly dependent on the length of strained region, so the strain sensitivity of AGNRs can be controlled precisely. This result indicates that our results provide a new possibility for ultra-sensitive strain sensors.

  52. OS1205 Quantitative Evaluation of Crystallinity of Grain Boundaries

    Fan Chuanhong, Suzuki Ken, Miura Hideo

    2013 "OS1205-1"-"OS1205-3" 2013/10/12

    Publisher: The Japan Society of Mechanical Engineers

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    A novel evaluation method of the crystallinity of grain boundaries was proposed by analyzing the quality of Kikuchi lines obtained from the conventional EBSD (Electron Backscatter Diffraction) analysis. This method can evaluate the porous and brittle grain boundaries by using the IQ (Image Quality) values and the CI (Confidence Index) values. Both the IQ and CI values are the parameters which are obtained from the observed Kikuchi pattern obtained from the area where electron beams penetrate during EBSD analysis. The position of the grain boundaries is determined by this CI value, and the crystallinity of the film around grain boundaries is evaluated by the IQ value quantitatively. By using this method, the grain boundary degradation of the electroplated copper thin-film interconnection due to SM (Stress-induced Migration) was evaluated quantitatively and the effectiveness of the concept of grain boundaries based on the ordering quality of atomic arrangement which is different from the conventional one based on the crystal orientation has been shown.

  53. OS1214 Improvement of Long-term Reliability of Through Silicon Via Structures for 3D Electronic Modules

    FURUYA Ryosuke, SUZUKI Ken, MIURA Hideo

    2013 "OS1214-1"-"OS1214-2" 2013/10/12

    Publisher: The Japan Society of Mechanical Engineers

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    Electroplated copper thin films have started to be applied to the interconnection material in TSV structures because of its low electrical resistivity and high thermal conductivity. However, the material properties were found to vary drastically comparing with those of bulk copper. This was because that the films consisted of fine columnar grains and grain boundaries with high defect density. In this study, both the residual stress and the micro-texture of the films embedded in a Si substrate were evaluated quantitatively by changing the electroplating conditions and thermal history after the electroplating. Therefore, it is very important to evaluate the crystallographic quality of the films after electroplating to assure the long-term reliability of TSV structures.

  54. OS1001 Effect of 3D-Strain Field on Electronic Conductivity of Carbon Nanotubes

    OHNISHI Masato, SUZUKI Ken, MIURA Hideo

    2013 "OS1001-1"-"OS1001-2" 2013/10/12

    Publisher: The Japan Society of Mechanical Engineers

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    Since carbon nanotubes (CNTs) have unique electronic and mechanical properties, there have been many efforts to develop CNTs-based electronic devices and sensors. We have also validated the possibility of a highly sensitive strain sensor using popular resin in which multi-walled CNTs (MWNTs) were dispersed uniformly. It is, however, indispensable for clarifying how to change the electronic state of a deformed CNT for assuring the stable performance of the sensor because the reported sensitivity has ranged widely. In this study, the relationship between the deformation characteristic of a CNT under strain and its electronic properties was analyzed. The analysis result obtained from density functional theory (DFT) calculation showed that the radial strain-induced orbital hybridization causes a drastic change in electronic properties of CNTs.

  55. OS0919 Electroplating Temperature Dependence of Recrystallization of Copper Thin Films

    TAMAKAWA Kinji, SUZUKI Ken, MIURA Hideo

    2013 "OS0919-1"-"OS0919-2" 2013/10/12

    Publisher: The Japan Society of Mechanical Engineers

  56. OS1204 Degradation Process of Electroplated Copper Thin Films Caused by Grain Boundary Diffusion

    ASAl Osamu, SUZUKI Ken, MIURA Hideo

    2013 "OS1204-1"-"OS1204-3" 2013/10/12

    Publisher: The Japan Society of Mechanical Engineers

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    Electroplated copper thin films have been applied to interconnections, because of its low electric resistivity and high thermal conductivity. However, electrical conductivity and Electro Migration (EM) resistance of electroplated copper thin films are lower than bulk copper because of its micro texture. Thus, it is necessary to clarify the degradation process for highly reliable interconnections. In this study, the degradation process by EM was investigated by using EBSD analysis. As the result, grain diffusion by EM was visualized and guide line for highly reliable interconnection was proposed.

  57. OS1008 Clarification of the dominant factors of the strain-induced anisotropic atomic diffusion around heterogeneous interfaces of stacked structures

    SUZUKI Ken, TAKAHASHI Motoki, OCHI Motoyuki, MIURA Hideo

    2013 "OS1008-1"-"OS1008-3" 2013/10/12

    Publisher: The Japan Society of Mechanical Engineers

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    Molecular dynamics (MD) analysis was applied to investigate effects of alloying elements (dopant elements) on strain-induced anisotropic diffusion of Al atoms around the interface between the γ phase and the γ' phase of Ni-base superalloy. In this study, a simple interface structure model corresponding to the γ/γ' interface, which consisted of Ni as γ and Ni_3Al as γ' structure, was used for the analysis. The diffusion constant of Al atoms was changed drastically by the dopant element and its atomic concentration. Both the atomic radius and the binding energy of the dopant element with Al are the dominant factors that change the diffusion of Al atoms m the Ni-base super-alloy. In addition, the magnitude of the binding energy between dopant elements is also dominant factor controlling the strain-induced anisotropic diffusion of Al atoms when two kinds of dopant elements were simultaneously added in the Ni/Ni_3Al interface.

  58. 108 Dominant Factors of Fatigue Strength of Modified 9Cr-1Mo Steel at Elevated Temperatures

    TAKAHASHI Motoki, SUZUKI Ken, NONAKA Isamu, MIURA Hideo

    2013 (49) 15-16 2013/09/20

    Publisher: The Japan Society of Mechanical Engineers

  59. 109 Residual stress around Through Silicon Via structures used for three-dimensional electronic modules

    NAKANISHI Takahiro, SUZUKI Ken, MIURA Hideo

    2013 (49) 17-18 2013/09/20

    Publisher: The Japan Society of Mechanical Engineers

  60. 107 Effect of crystallinity of electroplated copper thin-film interconnections on their heat transfer characteristics

    SUZUKI Ken, MIURA Hideo

    2013 (49) 13-14 2013/09/20

    Publisher: The Japan Society of Mechanical Engineers

  61. 110 Anisotropic mechanical properties of electroplated copper thin- film interconnections used for advanced semiconductor devices

    GOTO Masaru, SUZUKI Ken, MIURA Hideo

    2013 (49) 19-20 2013/09/20

    Publisher: The Japan Society of Mechanical Engineers

  62. 162 Two-dimensional Strain Distribution Sensor Using Carbon Nanotubes

    Kawakami Hiroshi, Suzuki Ken, Miura Hideo

    2013 (48) 126-127 2013/03/15

    Publisher: The Japan Society of Mechanical Engineers

  63. 172 Development of the Residual Stress Monitoring Method During Manufacturing Process of 3D Electronic Packages

    Tago Hironori, Suzuki Ken, Miura Hideo

    2013 (48) 146-147 2013/03/15

    Publisher: The Japan Society of Mechanical Engineers

  64. 171 Micro-texture dependence of strength of fine metallic bumps used for electronic packaging

    Endo Fumiaki, Suzuki Ken, Miura Hideo, Murata Naokazu

    2013 (48) 144-145 2013/03/15

    Publisher: The Japan Society of Mechanical Engineers

  65. 173 Clarification of dominant factors of the strain-induced anisotropic atomic diffusion around the various interface

    Sano Tomohiro, Suzuki Ken, Miura Hideo

    2013 (48) 148-149 2013/03/15

    Publisher: The Japan Society of Mechanical Engineers

  66. 121 Electroplating Condition Dependence of Micro Texture of Electroplated Copper Thin Films

    Tamakawa Kinji, Suzuki Ken, Miura Hideo

    2013 (48) 44-45 2013/03/15

    Publisher: The Japan Society of Mechanical Engineers

  67. Effect of a Three-dimensional Strain Field on the Electronic Band Structure of Carbon Nanotubes and Graphene Sheets

    SUZUKI Ken, OHNISHI masato, MIURA Hideo

    Technical report of IEICE. SDM 112 (290) 59-61 2012/11/08

    Publisher: The Institute of Electronics, Information and Communication Engineers

    ISSN: 0913-5685

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    The prediction of the change in the conductivity of carbon nanotubes (CNTs) under strain is crucially important to assure the reliability of the performance of CNT-based electronic devices. In this study, the change of the electronic state of CNTs caused by deformation was investigated. We found that the change of the electronic sate of CNTs was mainly dominated by (a) a change in the bond length ratio in a six-membered ring and (b) increase in the local curvature leading to an orbital hybridization.

  68. 205 Effect of the local strain distribution on the electronic conductivity of carbon nanotubes

    Ohnishi Masato, Kawakami Hiroshi, Suzuki Ken, Miura Hideo

    The Computational Mechanics Conference 2012 (25) 129-130 2012/10/06

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

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    The prediction of the change in conductivity of carbon nanotubes (CNTs) under strain is crucially important to assure the reliability of the performance of CNT-based electronic devices. In this study, the change of the electronic state of CNTs caused by deformation was analyzed. We found that the change of the electronic sate of CNTs was mainly dominated by (a) a change in the bond length ratio in a six-membered ring and (b) increase in the local curvature leading to an orbital hybridization.

  69. 119 Strain Dependence of the Electronic Conductivity of Carbon Nanotubes

    NOZAKI Takuya, KAWAKAMI Hiroshi, SUZUKI Ken, MIURA Hideo

    2012 (48) 42-43 2012/09/22

    Publisher: The Japan Society of Mechanical Engineers

  70. 116 Degradation Process of Copper Thin-film Interconnections Caused by Stress induced Migration

    SUNG Jaeuk, MURATA Naokazu, SUZUKI Ken, MIURA Hideo

    2012 (48) 36-37 2012/09/22

    Publisher: The Japan Society of Mechanical Engineers

  71. 117 Observation of the Change of the Crystallinity of Nickel-base Superalloy under Creep Loading

    OCHI Motoyuki, MURATA Naokazu, SUZUKI Ken, MIURA Hideo

    2012 (48) 38-39 2012/09/22

    Publisher: The Japan Society of Mechanical Engineers

  72. OS1312 Visualization of the degradation process of the crystallinity of thin-film interconnections in semiconductor devices

    Fan Chuanhong, Suzuki Ken, Miura Hideo

    2012 "OS1312-1"-"OS1312-2" 2012/09/22

    Publisher: The Japan Society of Mechanical Engineers

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    Electroplated copper thin films have started to be applied to thin film interconnections and TSV (Through Silicon Via) in semiconductor devices because of its low electric resistivity. However, both mechanical and electronic properties of electroplated copper films vary drastically depending on the electroplating conditions and thermal history. That is because the micro texture of the film is largely changed as a function of the electroplating conditions and the annealing temperature. In this study, the change of the crystallographic quality of the polycrystalline copper thin-film was observed by using an EBSD (Electron Back Scatter Diffraction) method. This EBSD analysis clearly showed that the degradation of the crystallinity of the electroplated copper thin film after the annealing was caused by stress-induced migration around the grain boundaries with low crystallinity.

  73. OS1311 Quantitative characterization of crystallinity of grain boundaries in nano-scale and its application to the strength evaluation of polycrystalline thin films

    MURATA Naokazu, SAITO Naoki, SUZUKI Ken, MIURA Hideo

    2012 "OS1311-1"-"OS1311-2" 2012/09/22

    Publisher: The Japan Society of Mechanical Engineers

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    A novel evaluation method of the crystallinity of grains and grain boundaries was proposed by analyzing the quality of Kikuchi lines obtained from the conventional EBSD analysis. This method can evaluate the porous and brittle grain boundaries by IQ (Image Quality) and CI (Confidence Index) . Both IQ and CI values are the parameters which are calculated from the observed result of the Kikuchi pattern obtained from the area where electron beams penetrate during EBSD analysis. The position of the grain boundaries is determined by this CI value, and the crystallinity of the film around the grain boundaries is evaluated by the IQ value quantitatively.

  74. PS19 Clarification of the dominant factors of the strain-induced anisotropic atomic diffusion around the various interfaces

    SANO Tomohiro, SUZUKI Ken, MIURA Hideo

    2012 "PS19-1"-"PS19-3" 2012/09/22

    Publisher: The Japan Society of Mechanical Engineers

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    In order to assure the reliability of advanced gas turbine systems, it is very important to evaluate the damage of high temperature materials such as Ni-base superalloy under creep and fatigue conditions quantitatively. The mechanism of the directional coarsening of γ phases (rafting) of the Ni-base superalloy under uniaxial strain at high temperatures was analyzed by molecular dynamics (MD) analysis. The stress-induced anisotropic diffusion of Al atoms perpendicular to the interface was observed clearly in a Ni(001)/Ni_3Al(001) interface structure. The stress-induced anisotropic diffusion was validated by experiment using the stacked thin film structure with the (001) face-centered cubic interface.

  75. PS18 Development of a monitoring method of residual stress in a silicon chip in a 3D stacked structure during its fabrication process

    TAGO Hironori, FURUYA Ryosuke, SUZUKI Ken, MIURA Hideo

    2012 "PS18-1"-"PS18-3" 2012/09/22

    Publisher: The Japan Society of Mechanical Engineers

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    The embedded strain gauges in a PQC-TEG in a silicon chip were applied to the measurement of the change of the residual stress in a transistor structure with a 50-nm wide gate during thin film processing. The change of the residual stress was successfully monitored through the process such as the deposition and etching of thin films. In addition, the sensors were also applied to measurement of thermal residual stress in a silicon wafer caused by flip-chip bonding and the stress was successfully monitored. The sensitivity of the measurement was 1 MPa and it was validated that the amplitude of the fluctuation exceeded 100 MPa. This technique has applicability to monitoring the residual stress from front-end wafer process to packaging process.

  76. OS2116 Evaluation of accumulative damage under random load by a stress measurement method using electroplated thin copper films

    TAMAKAWA Kinji, MURATA Naokazu, SUZUKI Ken, MIURA Hideo

    2012 "OS2116-1"-"OS2116-2" 2012/09/22

    Publisher: The Japan Society of Mechanical Engineers

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    The change of the microtexture of the electroplated copper thin films was applied to the evaluation of the accumulative damage under random load. The micro texture of the electroplated copper thin film at the edges of micro slits formed in the film was found to change as a function of the amplitude of the applied cyclic loading. The life of the change was expressed by the modified Miner's law wlich is applied to the evaluation of the accumulated damage of materials under fatigue loads. Thus, it is possible to apply this method to the evaluation of the accumulated load

  77. J032022 Quantitative Evaluation of the Crystallinity of Grain Boundaries in Nano-scale and its Application to the Control of Material Properties

    MURATA Naokazu, SUZUKI Ken, MIURA Hideo

    Mechanical Engineering Congress, Japan 2012 "J032022-1"-"J032022-4" 2012/09/09

    Publisher: The Japan Society of Mechanical Engineers

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    In this study, a novel method for evaluating the crystallinity of a grain boundary is proposed based on the definition that a grain boundary consists of a finite volume with disordered atomic configuration. An electron beam-scattering diffraction (EBSD) method is applied to the evaluation of the crystallinity. The effectiveness of the proposed method is validated by the application of this method to the crystallographic characterization of electroplated copper thin films. The crystallinity of grains and grain boundaries was evaluated by 1Q (Image Quality) value of EBSD analysis. Thin film interconnections for measurement of electrical properties were prepared based on damascene process. The crystallinity of the interconnection without annealing was low. The crystallinity of interconnection was improved by annealing at 400℃ for 30minutes. Though the EM (Electro-Migration) resistance of the annealed film was improved drastically, SM (Stress-induced Migration) was activated even though interconnection was kept at room temperature without any application of electrical current after annealing. This is because high residual stress was caused by shrinkage of electroplated copper due to change of crystallinity. Thus the control of the crystallinity of the electroplated film was very important to improve the reliability of the interconnection.

  78. J061024 Evaluation of the strength and reliability of through silicon via (TSV) interconnections used for three-dimensional electronic packaging

    FURUYA Ryosuke, SUZUKI Ken, MIURA Hideo

    Mechanical Engineering Congress, Japan 2012 "J061024-1"-"J061024-4" 2012/09/09

    Publisher: The Japan Society of Mechanical Engineers

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    Three-dimensional (3-D) integration of silicon microelectronic devices can improve device performance and realize new device functions dramatically. Through-silicon via (TSV) is a metallic conducting via which penetrates a silicon chip. Since TSV materials are surrounded by silicon and their materials properties are different from those of silicon, thermal stress is easily generated around the TSV structures during their fabrication process and operation. Recently, electroplated copper thin films have started to be applied to the interconnection material in the TSV because of its low electric resistivity. However, the electric resistivity of the electroplated copper thin films surrounded by SiO_2 was found to vary drastically comparing with those of the conventional bulk material. This was because that the electroplated copper thin films consisted of grains with low crystallinity and a lot of porous grain boundaries. Thus, annealing is necessary for improving the crystallographic quality of the films. In this study, we prepared the copper thin film samples embedded in a silicon substrate. It was observed that many voids and hillocks appeared on the surface of the films after annealed at 400°C. In addition, it was also found that the electrical resistivity of the copper thin films without annealing was much higher than that of bulk copper. As a result, it is very important to evaluate the crystallographic quality of the copper thin films after electroplating to assure both the mechanical and electrical properties of the films.

  79. J061031 Reliability design of thin-film interconnections in semiconductor devices based on the evaluation of nano-scale crystallinity of the thin films

    Asai Osamu, Murata Naokazu, Suzuki Ken, Miura Hideo

    Mechanical Engineering Congress, Japan 2012 "J061031-1"-"J061031-4" 2012/09/09

    Publisher: The Japan Society of Mechanical Engineers

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    With the high integration and the high speed operation of LSIs in recent years, interconnection material has rapidly changed over from conventionally used aluminum alloy to electroplated copper to improve the elevtronic performance of the LSIs. However, it was found that both the electronic characteristics and reliability of th electroplated copper thin films were rather low comparing with those of bulk copper. In this study, the authors clarified that the degradation of the electronic performance of the electroplated copper interconnections is caused by low crystallinity of the interconnectins and the grain boundary diffusion in the films is accelerated by the low crystallinity. The change of the crystallinity was observed by using an EBSD (Electron Back-scattered Diffraction) method. It was found that the crystallinity of the interconnection varied drastically depending on the electroplating conditions and seed layer material. Based on the results, the authors proposed a new design guideline for highly reliabile electroplated copper thin film interconnections.

  80. 152 Fluctuation of the accuracy of stress measurement using electroplated copper films caused by environmental factors

    Tamakawa Kinji, Suzuki Ken, Miura Hideo

    2012 (47) 110-111 2012/03/13

    Publisher: The Japan Society of Mechanical Engineers

  81. 150 On-line monitoring of residual stress during thin-film processing of transistors

    Tago Hironori, Nakahira Kota, Suzuki Ken, Miura Hideo

    2012 (47) 106-107 2012/03/13

    Publisher: The Japan Society of Mechanical Engineers

  82. 151 Micro-texture dependence of strength of fine metallic bumps used for electronic packaging

    Endo Fumiaki, Murata Naokazu, Suzuki Ken, Miura Hideo

    2012 (47) 108-109 2012/03/13

    Publisher: The Japan Society of Mechanical Engineers

  83. 230 Highly reliable structural design of three-dimensionally stacked semiconductor packages and modules

    Nakahira Kota, Suzuki Ken, Miura Hideo

    2012 (47) 266-267 2012/03/13

    Publisher: The Japan Society of Mechanical Engineers

  84. 225 Effect of the distribution of local strain on the electronic characteristics of carbon nanotubes

    Ohnishi Masato, Suzuki Ken, Miura Hideo

    2012 (47) 256-257 2012/03/13

    Publisher: The Japan Society of Mechanical Engineers

  85. 228 Improvement of the quality and reliability of electroplated copper thin-film interconnections by controling their micro-scale crystallinity

    Saito Naoki, Suzuki Ken, Miura Hideo

    2012 (47) 262-263 2012/03/13

    Publisher: The Japan Society of Mechanical Engineers

  86. 227 Remote noncontact strain measurement using electro-magnetic waves

    Ohashi Yusuke, Suzuki Ken, MIURA Hideo

    2012 (47) 260-261 2012/03/13

    Publisher: The Japan Society of Mechanical Engineers

  87. OS20-1-3 Stress-induced anisotropic diffusion of component elements in the stacked thin-film multi-layer structures

    Sano Tomohiro, Murata Naokazu, Suzuki Ken, Miura Hideo

    Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics 2011 (10) "OS20-1-3-1" 2011/09/19

    Publisher: The Japan Society of Mechanical Engineers

  88. OS20-1-4 A Novel Method for Evaluating the crystallinity of Grain Boundaries in Polycrystalline Materials

    Murata Naokazu, Suzuki Ken, Miura Hideo

    Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics 2011 (10) "OS20-1-4-1" 2011/09/19

    Publisher: The Japan Society of Mechanical Engineers

  89. J031052 Measurement of the change of the residual stress in nano-scale transistors

    TAGO Hironori, NAKAHIRA Kota, SUZUKI Ken, MIURA Hideo

    Mechanical Engineering Congress, Japan 2011 "J031052-1"-"J031052-3" 2011/09/11

    Publisher: The Japan Society of Mechanical Engineers

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    The embedded strain gauges in a PQC-TEG were applied to the measurement of the change of the residual stress in a transistor structure with a 50-nm wide gate during thin film processing. The change of the residual stress was successfully monitored through the process such as the deposition and etching of thin films. In addition, the fluctuation of the process such as the intrinsic stress of thin films and the height and the width of the etched structures was also detected by the statistical analysis of the measured data. The sensitivity of the measurement was 1 MPa and it was validated that the amplitude of the fluctuation exceeded 100 MPa. This technique is also effective for detecting the spatial distribution of the stress in a wafer and its fluctuation among wafers. It was also confirmed that the final residual stress in a transistor is varied by the fluctuation of both the intrinsic stress in the deposited thin films and the cross-sectional structure of the patterned film. Therefore, it is very important to monitor the stress for assuring the reliability of the thin-film processing. Thus, this embedded strain-gauge technique is very effective for monitoring the fluctuation of the residual stress in a transistor in mass production.

  90. J031051 Minimization of the residual stress of three-dimensionally flip chip packaging structures

    NAKAHIRA Kota, TAGO Hironori, ENDO Fumiaki, SUZUKI Ken, MIURA Hideo

    Mechanical Engineering Congress, Japan 2011 "J031051-1"-"J031051-3" 2011/09/11

    Publisher: The Japan Society of Mechanical Engineers

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    Local large residual stress and local deformation appears clearly in area-array flip chip structures because of the difference in material properties such as Young's modulus and the coefficient of thermal expansion among a bump, underfill, and a silicon chip. Because such large residual stress and the local deformation deteriorate the reliability of electronic devices, they should be minimized for improving the reliability of products. In addition, the material properties of electroplated copper bumps were found to vary depending on their electroplating conditions and thermal history after the electroplating. Therefore, the authors measured the residual stress and the local deformation in a chip considering the influence of the material properties of electroplated copper bumps by using piezoresistive strain sensor chips. As a result, it was found that the amplitude of the local distribution of the residual stress reached about 100 MPa and the local deformation of about 650 nm remained on the back surface of mounted flip chip. It was also found that the local deformation decreased from 650 nm to 100 nm by annealing of copper bumps. Therefore, the mechanical properties of electroplated copper bumps influence the residual stress and the local deformation.

  91. OS1611 Strain-Induced Anisotropic Diffusion and Change of Micro Texture around Interfaces of Stacked Thin Film Structures

    SANO Tomohiro, SASAKI Yamato, SUZUKI Ken, MIURA Hideo

    2011 "OS1611-1"-"OS1611-2" 2011/07/16

    Publisher: The Japan Society of Mechanical Engineers

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    In order to assure the reliability of advanced gas turbine systems, it is very important to evaluate the damage of high temperature materials such as Ni-base superalloys under creep and fatigue conditions quantitatively. The mechanism of the directional coarsening of phases (rafting) of Ni-base superalloy under uni-axial strain at high temperatures was analyzed by molecular dynamics (MD) analysis. The stress-induced anisotropic diffusion of Al atoms perpendicular to the interface was observed clearly in a Ni(001)/Ni_3Al(001) interface structure. The stress-induced anisotropic diffusion was validated by experiment using the stacked thin film structure with the (001) face-centered cubic interface. The reduction of the diffusion of Al atoms perpendicular to the interface is thus, effective for improving the creep and fatigue resistance of the alloy. It was also found by MD analysis that the dopant elements in the superalloy also affected the strain-induced diffusion of Al atoms. Palladium was one of the most effective elements which restrain Al atoms from moving around the interface under the applied stress.

  92. OS1612 Relationship between the Strength and the Crystallographic Quality of Grain Boundaries in Polycrystalline Thin Film Materials

    MURATA Naokazu, SAITO Naoki, SUZUKI Ken, MIURA Hideo

    2011 "OS1612-1"-"OS1612-2" 2011/07/16

    Publisher: The Japan Society of Mechanical Engineers

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    Both mechanical and electronic properties of electroplated copper films used for interconnections were investigated experimentally considering the change of their micro texture caused by heat treatment. Both the mechanical and electrical properties of electroplated copper thin films were found to vary drastically depending on their micro texture. The quality of the grain boundaries can be evaluated by applying an EBSD (Electron Back Scatter Diffraction) analysis. New two experimentally determined parameters are proposed for evaluating the quality of grain boundaries quantitatively. It was confirmed that the crystallographic quality of grain boundaries can be evaluated quantitatively by using the two parameters, and it is possible to estimate both the strength and reliability of the interconnections.

  93. OS0303 Remote Strain Measurement Using Carbon Nanotube

    OHASHI Yusuke, SUZUKI Yusuke, OHNISHI Masato, SUZUKI Ken, MIURA Hideo

    2011 "OS0303-1"-"OS0303-3" 2011/07/16

    Publisher: The Japan Society of Mechanical Engineers

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    Carbon nanotube(CNT)-dispersed resin is expected to be a highly sensitive and remote strain sensor without interconnections. Application of microwave showed the possibility of the non-contact measurement of the change of electrical impedance of the resin under dynamic load by measuring the change of its reflectivity obtained from the surface of the resin. A theoretical method to estimate the change of the intensity of the microwave reflected from the resin was discussed based on the microwave theory. The change of the reflectance under tensile strain of 11% was calculated by the method using the measured change of the impedance of the resin under the frequency range between 1Hz and 10MHz. As a result, both real and imaginary parts of the impedance changed drastically with applied strain.

  94. OS1509 Atomic Scale Analysis of Degradation Mechanism of Ni-base Superalloy at High Temperatures

    Suzuki Ken, Sano Tomohiro, Sasaki Yamato, Miura Hideo

    2011 "OS1509-1"-"OS1509-2" 2011/07/16

    Publisher: The Japan Society of Mechanical Engineers

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    In order to clarify degradation mechanisms of Ni-base superalloy under creep or fatigue condition, the mechanism of the directional coarsening of y' phases (rafting) under uni-axial strain was analyzed by molecular dynamics (MD) analysis. Stress-induced anisotropic diffusion of Ni and Al atoms in γ' phases perpendicular to the interface was observed around the simulated γ/γ' interface structure. Therefore, reduction of strain-induced anisotropic diffusion is effective for decreasing the evolution of the rafting and improving the creep or fatigue resistance of the Ni-base superalloy.

  95. OS2403 3D Semiconductor Assembly Structure with Low-Residual Stress Controlled by Mechanical Properties of Electroplated Cu Bumps

    ENDO Fumiaki, NAKAHIRA Kota, SUZUKI Ken, MIURA Hideo

    2011 "OS2403-1"-"OS2403-2" 2011/07/16

    Publisher: The Japan Society of Mechanical Engineers

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    In this paper, the dominant structural factors of the local residual stress in a silicon chip are discussed quantitatively based on the results of a three-dimensional finite element analysis and the measurement of the local residual stress in a chip using stress sensor chips. The piezoresistive strain gauges were embedded in the sensor chips. The length of each gauge was 2 μm, and an unit cell consisted of 4 gauges with different crystallographic directions. This alignment of strain gauges enables to measure the tensor component of three-dimensional stress fields separately. Test flip chip substrates were made by silicon chip on which the area-arrayed tin/copper bumps were electroplated. The mechanical properties of the electroplated bumps were varied by changing the electroplating condition and the annealing temperature after the electroplating. It was validated that the residual stress in the silicon chip after the mounting changed drastically depending on the mechanical properties of the bumps and the pitch of the bumps.

  96. 193 Heat Resistance Improvement of Ni-base Superalloy Considering the Control of High Temperature Damage of Nano-Texture of the Alloy

    Sasaki Yamato, Suzuki Ken, Miura Hideo

    2011 (46) 188-189 2011/03/15

    Publisher: The Japan Society of Mechanical Engineers

  97. 115 Microtexture Change in Electroplated Copper Thin Films under Random Loads

    Tamakawa Kinji, Murata Naokazu, Suzuki Ken, Miura Hideo

    2011 (46) 34-35 2011/03/15

    Publisher: The Japan Society of Mechanical Engineers

  98. PS12 Measurement of Fine patterning-induced sfress of thin films by embedded strain gauges

    NAKAHIRA Kota, KISHI Hiroki, SUZUKI Ken, MIURA Hideo

    2010 31-32 2010/10/09

    Publisher: The Japan Society of Mechanical Engineers

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    During thin film deposition processing in semiconductor fabrication, both the intrinsic stress and thermal stress in thin films cause large change of the residual stress in a transistor structure. Since such large change of the residual stress in a transistor structure deteriorate both the electronic functions and reliability of the transistor, it has become very important to control the residual stress. The authors have developed a new nondestructive measurement method of the residual stress by using piezoresistive strain sensor chip. As a result, it was found that the tensile stress of about 20 MPa appeared after the deposition of a 50-nm thick W film and the residual stress changed to large compressive stress after the local etching of the film by using a focus ion beam method (FIB). These results corresponded well to analyzed ones. It was concluded that the developed strain sensor can measure the change of the residual stress in a transistor formation area during fabrication.

  99. 1503 Variation of the Strength of Electroplated Copper Thin Film Due to the Quality of its Gram Boundaries

    MURATA Naokazu, TAMAKAWA Kinji, SUZUKI Ken, MIURA Hideo

    2010 79-81 2010/10/09

    Publisher: The Japan Society of Mechanical Engineers

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    In this study, Quality of grain boundaries which caused briffle fracture was discussed experimentally. The authors conducted tensile and fatigue tests of annealed films to clarify the relationship between their mechanical properties and microstructure including grain boundaries and grain size. The fracture strain of the film annealed at 400℃ increased from initial about 7% to 25% and at the same time their yield stress decreased from about 300 MPa to 100 MPa. In addition, it was found that there were two fatigue fracture modes. One was a typical ductile fracture mode with plastic deformation and the other was brittle one. When brittle fracture occurred, the crack propagated along weak or porous grain boundaries which were formed during electroplating. These result clearly indicated that that the mechanical properties of electroplated copper thin films vaty drastically depending on their microsiructure. In addition, their grain boundaries were evaluated by measurement of ciystal orientation based on EBSD (Electron Back Scatter Diffraction). We created new evaluation method of quality of porous grain boundaries which caused briffle fracture. So it was found that the crack propagation path during a fatigue test was dominated by the quality of the grain boundaries and grain size.

  100. 1509 Change of microtexture of nickel-base superalloy caused by stress-induced anisotropic diffusion of element atoms

    Sasaki Yamato, Suzuki Ken, Miura Hideo

    2010 94-95 2010/10/09

    Publisher: The Japan Society of Mechanical Engineers

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    The mechanism of the directional coarsening of 'γ' phases (rafting) of Ni-base superalloy under an uni-axial strain was analyzed by molecular dynamics (MD) analysis. The stress-induced anisotropic diffusion of Al atoms perpendicular to the interface was observed clearly in a Ni(001)/Ni3Al(001) interface stnicture, The reduction of the diffusion of Al atoms perpendicular to the interface is thus, effective for improving the creep and fatigue resistance of the alloy. It was also found that the dopant elements in the superalloy also affected the strain-induced diffusion of Al atoms. Pd was one of the most effective elements which restrain Al atoms from moving around the interface.

  101. 107 Thermal history dependence of the mechanical properties of electroplated copper thin films

    Endo Fumiaki, Murata Naokazu, Suzuki Ken, Miura Hideo

    2010 (46) 13-14 2010/09/24

    Publisher: The Japan Society of Mechanical Engineers

  102. 109 Atomic Scale Analysis for Improving the heat resistance of Ni-base superalloy

    Sano Tomohiro, Sasaki Yamato, Suzuki Ken, Miura Hideo

    2010 (46) 17-18 2010/09/24

    Publisher: The Japan Society of Mechanical Engineers

  103. 108 Measurement of the change of the residual stress in nano-scale transistors

    Tago Hironori, Nakahira Kohta, Suzuki Ken, Miura Hideo

    2010 (46) 15-16 2010/09/24

    Publisher: The Japan Society of Mechanical Engineers

  104. 1704 Non-contact measure method of change of the electrical conductivity characteristics of carbon nanotubes

    Ohashi Yusuke, Suzuki Ken, Miura Hideo

    The Computational Mechanics Conference 2010 (23) 443-444 2010/09/23

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

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    Carbon nanotube(CNT)-dispersed resin is expected to be a highly sensitive and remote strain sensor without interconnections. Application of microwave showed the possibility of the non-contact measurement of the change of electrical impedance of the resin under dynamic load by measuring the change of its reflectivity obtained from the surface of the resin. A theoretical method to estimate the change of the intensity of the microvave reflected from the resin was discussed based on the microwave theory. The change of the reflectance under tensile strain of 20% was calculated by the method using the measured change of the impedance of the resin under the frequency range between 1 Hz and 10MHz. As a result, the maximum change of the reflectance was estimated as 1.2% at 630 kHz.

  105. 1703 Strain-induced change of electronic conductivity of graphene sheets

    OHNISHI Masato, SUZUKI Ken, MIURA Hideo

    The Computational Mechanics Conference 2010 (23) 441-442 2010/09/23

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

  106. 1112 Molecular dynamics analysis of strain-induced anisotropic diffusion around solid interfaces

    SUZUKI Ken, MIURA Hideo

    The Computational Mechanics Conference 2010 (23) 143-144 2010/09/23

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

  107. 114 Effect of local strain on the electronic conductivity of carbon nanotubes

    OHSAKI Katsuya, SUZUKI Ken, MIURA Hideo

    2010 (45) 30-31 2010/03/12

    Publisher: The Japan Society of Mechanical Engineers

  108. 116 Development of in-line evaluation measurement method of the change of the residual stress in nano-scale transistor structures during manufacturing.

    KISHI Hiroki, SUZUKI Ken, MIURA Hideo

    2010 (45) 34-35 2010/03/12

    Publisher: The Japan Society of Mechanical Engineers

  109. 134 Effect of grain boundaries on fatigue strength of electroplated copper thin films.

    MURATA Naokazu, TAMAKAWA Kinji, SUZUKI Ken, MIURA Hideo

    2010 (45) 70-71 2010/03/12

    Publisher: The Japan Society of Mechanical Engineers

  110. 130 The stress-induced anisotropic diffusion between dissimilar materials.

    Sasaki Yamato, Murata Naokazu, Suzuki Ken, Miura Hideo

    2010 (45) 62-63 2010/03/12

    Publisher: The Japan Society of Mechanical Engineers

  111. 135 Measurement of the Amplitude of the Cyclic Surface Strain Using Electroplated Copper Thin Films

    TAMAKAWA Kinji, ASAKAWA Yukihiro, SUZUKI Ken, MIURA Hideo

    2010 (45) 72-73 2010/03/12

    Publisher: The Japan Society of Mechanical Engineers

  112. 115 Dominant factors of the integrity of the interface between high-k dielectric and metallic thin films

    INOUE Tatsuya, SUZUKI Ken, MIURA Hideo

    2010 (45) 32-33 2010/03/12

    Publisher: The Japan Society of Mechanical Engineers

  113. 143 Degradation Mechanisms of Protection Properties of Oxide Films Formed on Stainless Steel in High Temperature Water: Quantum Chemical Molecular Dynamics Study

    SUZUKI Ken, SASAKI Yamato, MIURA Hideo

    2010 (45) 86-87 2010/03/12

    Publisher: The Japan Society of Mechanical Engineers

  114. 1215 Strain-induced change of electronic conductivity of carbon nanotubes

    SUZUKI Yusuke, SUZUKI Ken, MIURA Hideo

    10 (9) 612-613 2010

    Publisher: The Japan Society of Mechanical Engineers

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    A new strain measurement method has been developed by applying the highly sensitive change of electronic conductivity of CNTs. The authors dispersed the CNTs in polyisoprene and applied an uni-axial strain to the CNT-dispersed rubber. It was found that the resistance of the rubber increased monotonically with the increase of the amplitude of the applied tensile strain. The effect of the longitudinal axial strain on the band structures of electrons in CNTs was also analyzed by applying the abmitio calculation (Density functional theory). It was found that the electronic band structure of MWCNTs of changes significantly under the large axial deformation, and thus, their electronic conductivity changes drastically.

  115. Atomic Scale Analysis of the Degradation Mechanism of the Integrity High-k/Metal-gate Interface Caused by the Interaction between Point-Defects and Residual Strain around the Interface

    SUZUKI Ken, ITO Yuta, INOUE Tatsuya, MIURA Hideo, YOSHIKAWA Hideki, KOBAYASHI Keisuke, SAMUKAWA Seiji

    Technical report of IEICE. SDM 109 (278) 79-84 2009/11/05

    Publisher: The Institute of Electronics, Information and Communication Engineers

    ISSN: 0913-5685

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    Control of the interfacial crystallographic structure between a dielectric film and a gate electrode is one of the most critical issues for assuring the high performance and the reliability of a stacked MOS structure using high-k dielectric thin films. In this study, quantum chemical molecular dynamics method was applied to explicate the mechanism of degradation of interfacial integrity of the gate stack systems which is caused by point defects. We found that point defects such as oxygen and carbon interstitials deteriorate the electronic quality of a hafnium dioxide film and the W/HfO_2 interface structure.

  116. 101 Measurement of local deformation and residual stress in electronic modules

    Nakahira Kohta, Kishi Hiroki, Suzuki Ken, Miura Hideo

    2009 (45) 1-2 2009/09/26

    Publisher: The Japan Society of Mechanical Engineers

  117. 104 Degradation mechanism of Ni-base superalloy at high temperatures and improvement of its strength

    Sasaki Yamato, Murata Naokazu, Suzuki Ken, Miura Hideo

    2009 (45) 7-8 2009/09/26

    Publisher: The Japan Society of Mechanical Engineers

  118. 111 Remote measurement of dynamic strain using a laser chip

    Ohashi Yusuke, Kaisumi Aya, Suzuki Ken, Miura Hideo

    2009 (45) 21-22 2009/09/26

    Publisher: The Japan Society of Mechanical Engineers

  119. 102 Measurement of large deformation using multi-walled carbon nanotube-dispersed rubber

    Suzuki Yusuke, Ohnishi Masato, Suzuki Ken, Miura Hideo

    2009 (45) 3-4 2009/09/26

    Publisher: The Japan Society of Mechanical Engineers

  120. 103 Micro texture dependence of electromigration resistance of electroplated copper thin films

    Saito Naoki, Murata Naokazu, Suzuki Ken, Miura Hideo

    2009 (45) 5-6 2009/09/26

    Publisher: The Japan Society of Mechanical Engineers

  121. 114 Development of a multi-scale measurement method of local strain distribution in semiconductor devises

    SASAKI Takuya, UETA Nobuki, SUZUKI Ken, MIURA Hideo

    2009 (44) 26-27 2009/03/13

    Publisher: The Japan Society of Mechanical Engineers

  122. 113 Dependence of mechanical properties on the nanoscale texture of electroplated copper thin films

    MURATA Naokazu, TAMAKAWA Kinji, SUZUKI Ken, MIURA Hideo

    2009 (44) 24-25 2009/03/13

    Publisher: The Japan Society of Mechanical Engineers

  123. 405 Basic Study of Remote Strain Measurement Using Laser Beam

    Kaisumi Aya, Suzuki Ken, Miura Hideo

    2008 (44) 113-114 2008/09/27

    Publisher: The Japan Society of Mechanical Engineers

  124. 111 Basic Study of Stress-Induced Anisotropic Atomic Diffusion Near Solid Interface

    Sasaki Yamato, Murata Naokazu, Suzuki Ken, Miura Hideo

    2008 (44) 21-22 2008/09/27

    Publisher: The Japan Society of Mechanical Engineers

  125. 110 Large Strain Measurement Using Multi-Walled Carbon Nanotube-Dispersed Rubber

    Ohnishi Masato, Ohsaki Katsuya, Suzuki Ken, Miura Hideo

    2008 (44) 19-20 2008/09/27

    Publisher: The Japan Society of Mechanical Engineers

  126. 112 Effect of Micro Structure of Electroplated Copper Thin Films on Electromigration

    Kimura Motonori, Jeong Seongcheol, Suzuki Ken, Miura Hideo

    2008 (44) 23-24 2008/09/27

    Publisher: The Japan Society of Mechanical Engineers

  127. OS0409 Molecular simulation of a Ni/Ni_3Al interface

    YAMADA Mitsuru, OKABE Tomonaga, SUZUKI Ken

    2008 "OS0409-1"-"OS0409-2" 2008/09/16

    Publisher: The Japan Society of Mechanical Engineers

  128. OS0620 Effect of grain boundary characteristics on fatigue strength properties of electroplated copper thin films

    MURATA Naokazu, TAMAKAWA Kinji, SUZUKI Ken, MIURA Hideo

    2008 "OS0620-1"-"OS0620-2" 2008/09/16

    Publisher: The Japan Society of Mechanical Engineers

  129. OS0604 Influence of trace additive element on stress induced anisotropic atomic diffusion in Ni-base superalloy

    SUZUKI Ken, ITO Hiroyuki, INOUE Tatsuya, MIURA Hideo

    2008 "OS0604-1"-"OS0604-2" 2008/09/16

    Publisher: The Japan Society of Mechanical Engineers

  130. OS0116 Feasibility study of application of multi-walled CNT-dispersed resin to strain sensors

    OOSAKI Katsuya, OONISI Masato, SUZUKI Ken, MIURA Hideo

    2008 "OS0116-1"-"OS0116-2" 2008/09/16

    Publisher: The Japan Society of Mechanical Engineers

  131. OS1201 Form dependence analysis of deformation characteristics of carbon nanostructures

    INOUE Tatsuya, KISHI Hiroki, OSAKI Katsuya, Honda Takashi, SUZUKI Ken, MIURA Hideo

    2008 "OS1201-1"-"OS1201-2" 2008/09/16

    Publisher: The Japan Society of Mechanical Engineers

  132. OS1202 圧縮負荷環境におけるカーボンナノチューブ変形特性に及ぼすカイラリティの影響(ナノ・マイクロからの視点からの変形と破壊の力学(1),オーガナイズドセッション)

    岸 宏樹, 本多 崇, 井上 達也, 大崎 克也, 鈴木 研, 三浦 英生

    M&M材料力学カンファレンス 2008 "OS1202-1"-"OS1202-2" 2008/09/16

    Publisher: 一般社団法人日本機械学会

    More details Close

    超高感度ひずみセンサへの応用が期待されているカーボンナノチューブ(CNT)の電気伝導特性に著しい影響を及ぼす,圧縮変形特性に及ぼすCNTのカイラリティの影響について分子動力学を応用して解析的に検討した.その結果,座屈変形が開始する臨界軸ひずみ値は,直径と長さの比である構造アスペクト比が一定の場合はカイラリティには依存せずほぼ一定となることを明らかにした.しかし,内部の隣接炭素原子間距離の分布は同一負荷状態でもカイラリティに依存して複雑に変化し,電気伝導特性のひずみ依存性には強いカイラリティ依存性が存在することも明らかにした.

  133. 103 Deterioration mechanism of signal transmission quality in an optical module caused by packaging-induced stress

    KITAMURA Atsushi, Suzuki Ken, MIURA Hideo

    2008 (43) 7-8 2008/03/15

    Publisher: The Japan Society of Mechanical Engineers

  134. 143 Mechanical properties of intermetallic compounds formed at the interface between lead-free solder and an electroplated copper thin film

    JEONG SC, SUZUKI Ken, MIURA Hideo

    2008 (43) 87-88 2008/03/15

    Publisher: The Japan Society of Mechanical Engineers

  135. 107 High temperature damage of Ni-base superalloy based on stress induced anisotropic atomic diffusion

    Ito Hiroyuki, Suzuki Ken, Miura Hideo

    2008 (43) 15-16 2008/03/15

    Publisher: The Japan Society of Mechanical Engineers

  136. 113 Micro texture dependence of characteristics of electroplated Cu-thin-films for interconnections

    OTANI Muneyuki, TAMAKAWA Kinji, SUZUKI Ken, MIURA Hideo

    2008 (43) 27-28 2008/03/15

    Publisher: The Japan Society of Mechanical Engineers

  137. 503 Strain dependence of dielectric properties of high-k thin films used for semiconductor devices

    Inoue Tatsuya, SUZUKI Ken, MIURA Hideo

    2007 (43) 127-128 2007/09/29

    Publisher: The Japan Society of Mechanical Engineers

  138. 201 Strain dependence of dielectric properties of high-k thin films used for semiconductor devices

    Imasaki Kazuto, SUZUKI Ken, MIURA Hideo

    2007 (43) 31-32 2007/09/29

    Publisher: The Japan Society of Mechanical Engineers

  139. 202 Strain dependence of electrical resistivity of multi-walled CNT-dispersed resin

    Ohsaki Katsuya, SUZUKI Ken, MIURA Hideo

    2007 (43) 33-34 2007/09/29

    Publisher: The Japan Society of Mechanical Engineers

  140. 203 Mechanical properties of intermetallic compounds formed at the interface between lead-free solder and electroplated copper thin film

    JEONG SC, SUZUKI Ken, MIURA Hideo

    2007 (43) 35-36 2007/09/29

    Publisher: The Japan Society of Mechanical Engineers

  141. 188 Explication of Damage Mechanism of Ni-base superalloy at high temperatures

    AKAHOSHI Kuniaki, MIURA Hideo, Suzuki Ken

    2007 (42) 173-174 2007/03/13

    Publisher: The Japan Society of Mechanical Engineers

  142. 197 Measurement method of non-contact strain measurement using carbon-nanotube-dispersed resin

    FUJI Hideki, SUZUKI Ken, MIURA Hideo

    2007 (42) 191-192 2007/03/13

    Publisher: The Japan Society of Mechanical Engineers

  143. 196 Effect of Defects and Strain on Insulating Properties of HfO_2 Films Used for Nano-scale Semiconductor Devices

    ITO Yuta, SUZUKI Ken, MIURA Hideo

    2007 (42) 189-190 2007/03/13

    Publisher: The Japan Society of Mechanical Engineers

  144. 101 Basic Study of Spatial Distribution of Mechanical Properties in Electroplated Copper Thin Films

    SASAKI Takuya, TAMAKAWA Kinji, SUZUKI Ken, MIURA Hideo

    2006 (42) 1-2 2006/09/30

    Publisher: The Japan Society of Mechanical Engineers

  145. Effect of Residual Stress in Thin Films on the Radiation Spectrum of a Semiconductor Laser

    MIURA Hideo, KAWAUCHI Taira, SUZUKI Ken, SASAKI Minoru

    2006 662-663 2006/09/13

  146. 122 Effect of Defects and Strain on the Band Gap of HfO_2 and ZrO_2 Films analyzed by Ouantum Chemical Molecular Dynamics

    ITO Yuta, SUZUKI Ken, MIURA Hideo

    2006 (41) 49-50 2006/03/14

    Publisher: The Japan Society of Mechanical Engineers

  147. 519 Basic study of application of multi-wall-carbon-nanotubes dispersed in a resin to strain sensors

    FUJI Hideki, SUZUKI Ken, MIURA Hideo

    2006 (41) 229-230 2006/03/14

    Publisher: The Japan Society of Mechanical Engineers

  148. 1403 Quantum chemical molecular dynamics study of effect of defects and strain on band gap of HfO_2 films

    ITO Yuta, SUZUKI Ken, MIURA Hideo

    The Computational Mechanics Conference 2005 (18) 259-260 2005/11/17

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

  149. 611 Basic Study of a Measurement Method of a Two-dimensional Strain Distribution Using Carbon-Nano-Tube Dispersed Resin

    FUJI Hideki, SUZUKI Ken, MIURA Hideo

    2005 (41) 241-242 2005/09/09

    Publisher: The Japan Society of Mechanical Engineers

  150. 214 Prediction of Elastic Modulus of Ceria based Ceramic Composites for SOFCs by Molecular Dynamics

    SATO Kazuhisa, SUZUKI Ken, HASHIDA Toshiyuki, YUGAMI Hiroo, KAWADA Tatsuya, MIZUSAKI Junichiro

    2005 (40) 78-79 2005/03/15

    Publisher: The Japan Society of Mechanical Engineers

  151. トランジスタ用ナノ絶縁膜耐圧特性に及ぼす薄膜残留応力の影響

    三浦英生, 鈴木研, 庄子哲雄

    日本学術会議材料研究連合講演会講演論文集 48th 352-353 2004/10/20

  152. Quantum chemical molecular dynamics analysis of the structural properties and dielectric characteristic of SiO_<2-x>films

    SUZUKI Ken, ITO Yuta, MIURA Hideo, SHOJI Tetsuo

    The Proceedings of The Computational Mechanics Conference 2004 (0) 31-32 2004

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

  153. Influence of oxygen vacancies and strain on electronic reliability of Si0_<2-x> films

    ITO Yuta, SUZUKI Ken, MIURA Hideo, SHOJI Tetsuo

    The Proceedings of The Computational Mechanics Conference 2004 (0) 807-808 2004

    Publisher: The Japan Society of Mechanical Engineers

    ISSN: 1348-026X

  154. 鉄新生面の化学反応ダイナミックスに関する計算化学的検討

    鈴木研, 庄子哲雄, 宮本明

    材料と環境講演集 2003 395-396 2003/05/15

  155. 電極/電解液界面の大規模シミュレーションを可能とする高速化量子分子動力学法の開発

    鈴木 研, 宮内 政幸, 牧野 裕介, 中山 拓, 草谷 友規, 高見 誠一, 久保 百司, 今村 詮, 宮本 明

    日本コンピュータ化学会年会講演予稿集 2002 (1) 1O04 2002/07/03

  156. 光励起反応ダイナミクスの解明を可能とする高速化量子分子動力学プログラムの開発

    草谷 友規, 呂 晨, 鈴木 愛, 鈴木 研, 高見 誠一, 久保 百司, 今村 詮, 宮本 明

    日本コンピュータ化学会年会講演予稿集 2002 (1) 2P21 2002/07/03

  157. 高速化量子分子動力学プログラムの開発 (特集 計算科学技術の活用)

    鈴木 研, 高見 誠一, 久保 百司

    化学工業 53 (4) 274-280 2002/04

    Publisher: 化学工業社

    ISSN: 0451-2014

  158. コンビナトリアル計算化学

    鈴木 研, 高見誠一, 久保百司, 宮本 明

    有機合成化学協会誌 60 (5) 488-489 2002

    Publisher: 社団法人 有機合成化学協会

    DOI: 10.5059/yukigoseikyokaishi.60.488  

    ISSN: 0037-9980

  159. 高速化量子分子動力学法による核生成、成長のシミュレーション

    高見誠一, 横須賀俊之, 草谷友規, 鈴木 研, 久保百司, 宮本 明

    粉体工学会誌 39 (6) 459-463 2002

    Publisher: 粉体工学会

    ISSN: 0386-6157

  160. コンビナトリアル計算化学

    鈴木 研, 高見誠一, 久保百司, 宮本 明

    工業材料 50 118-119 2002

    Publisher: 日刊工業新聞社

  161. 高速化量子分子動力学プログラムの開発

    鈴木 研, 高見誠一, 久保百司, 宮本 明

    化学工業 53 274-280 2002

    Publisher: 社団法人 化学工学会

    ISSN: 1343-9936

  162. Accelerated Quantum Molecular Dynamics Studies on Silicon Plasma Oxidation Process

    KUROKAWA Hotoshi, SASATA Katsumi, TOKOSUKA Toshiyuki, SUZUKI Ken, TAKAMI Seiichi, KUBO Momoji, MIYAMOTO Akira, IMAMURA Akira

    Technical report of IEICE. SDM 101 (350) 65-67 2001/10/09

    Publisher: The Institute of Electronics, Information and Communication Engineers

    ISSN: 0913-5685

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    Scaling of semiconductor devices below sub-micron dimensions requires thinner silicon oxide films. However, high temperature processes such as thermal oxidation can cause severe degradation of device characteristics due to generation of lattice defects, diffusions of dopant and wrap in the silicon substrate. Thus, low-temperature and damage-free silicon oxidation techniques are highly required in various ultralarge-scale-integrated circuit(ULSI)processes. Then, much attention is paid to the plasma oxidation. The oxidation of silicon in an oxygen plasma enables us to prepare thin and high-quality films of silicon dioxide at temperatures down to room temperature in a clean vacuum environment. In this study, Accelerated Quantum molecular dynamics calculations of the plasma oxidation reaction process were carried out.

  163. Development of Accelerated Quantum Chemical Calculation Program and Its Application to Silicon-based Materials

    TAKAMI Seiichi, YOKOSUKA ToshiYuki, KUROKAWA Hitoshi, KUSAGAYA Tomonori, SUZUKI Ken, KUBO Momoji, MIYAMORO Akira, IMAMURA Akira

    Technical report of IEICE. SDM 101 (350) 61-63 2001/10/09

    Publisher: The Institute of Electronics, Information and Communication Engineers

    ISSN: 0913-5685

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    Recent integration of LSI devices requires the extensive shrinkage of feature size of silicon-based semiconductor. We believe that the development of simulators that can design and predict thin-film formation processes and electronic properties of semiconductor enables further integration and progress of silicon-based devices. In this presentation, we will discuss the development of faster and more reliable quantum chemical calculation program and its application to the both basic and complicated systems. We also show the application of out method to the growth processes of silicon-based materials.

  164. Crystal Growth Simulation on Electronics Materials

    KUBO Momoji, YOKOSUKA Toshiyuki, KUROKAWA Hitoshi, KUSAGAYA Tomonori, SUZUKI Ken, TAKAMI Seiichi, MIYAMOTO Akira, IMAMURA Akira

    Technical report of IEICE. SDM 101 (350) 73-74 2001/10/09

    Publisher: The Institute of Electronics, Information and Communication Engineers

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    Recently, theoretical design of electronics materials by computational chemistry is strongly desired. However, previous computational chemistry is only applied to the materials of which structures are already known experimentally. We confirm that the prediction of completely new structures which have interesting physical properties by computational chemistry is essential for the advancement of nano-technology. Hence, we developed a crystal growth simulator which can predict new material structure.Since this program is based on our accelerated quantum chemical molecular dynamics theory, the chemical reactions during the crystal growth process can be simulated on large systems.

  165. 高速化量子分子動力学法の開発と大規模触媒系への応用

    久保 百司, 草谷 友規, 黒川 仁, 安藤 美奈子, 鈴木 研, 高見 誠一, 宮本 明, 今村 詮

    触媒 43 (6) 373-375 2001/09/10

    Publisher: 触媒学会

    ISSN: 0559-8958

  166. コンビナトリアル計算化学

    鈴木 研, 高見誠一, 久保百司, 宮本 明

    機能材料 21 (1) 63-69 2001

    Publisher: シーエムシー出版

    ISSN: 0286-4835

  167. 分子シミュレーションの応用

    黒川 仁, 谷島健二, 鈴木 研, 高見誠一, 久保百司, 宮本 明

    ケミカルエンジニヤリング 46 (3) 43-48 2001

    Publisher: 化学工業社

    ISSN: 0387-1037

  168. コンピュータシミュレーションによる触媒材料設計

    安藤美奈子, 鈴木 研, 高見誠一, 久保百司, 宮本 明

    セラミックデータブック 29 39-42 2001

    Publisher: 工業製品技術協会

  169. 化学電池材料の分子設計

    鈴木 研, 高見誠一, 久保百司, 宮本 明

    ケミカルエンジニヤリング 46 436-442 2001

    Publisher: 化学工業社

  170. 材料開発の世界を切り開く計算化学とその最新の成果

    鈴木 研, 高見誠一, 久保百司, 宮本 明

    工業材料 50 (7) 89-93 2001

    Publisher: 日刊工業新聞社

    ISSN: 0452-2834

  171. コンビナトリアルケミストリー-計算化学的手法との接点

    鈴木 研, 高見誠一, 久保百司, 宮本 明

    ペトロテック 24 (10) 801-805 2001

    Publisher: 社団法人石油学会

    ISSN: 0386-2763

  172. 計算化学による材料設計の新展開

    鈴木 研, 高見誠一, 久保百司, 宮本 明

    JCPE Newsletter 10 (4) 3-11 1999

    Publisher: Japan Chemistry ProgramExchange

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Books and Other Publications 2

  1. 自動車用電気二重層キャパシタとリチウムイオン二次電池の高エネルギー密度化・高出力化技術

    久保百司, 鈴木 研, 坪井秀行, 古山通久, 宮本 明

    技術情報協会 2005/03

  2. コンビナトリアルサイエンスの新展開

    鈴木 研, 高見誠一, 久保百司, 宮本 明

    シーエムシー出版 2002/03

Research Projects 17

  1. 次世代パワーデバイス用樹脂/金属界面の劣化機構解明と高信頼化技術の創出

    鈴木 研

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 基盤研究(B)

    Institution: 東北大学

    2026/04/01 - 2029/03/31

  2. Strain-Controlled Graphene-Nanoribbon-Base Biochemical Sensors with High Selectivity and Sensitivity

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Fund for the Promotion of Joint International Research (Fostering Joint International Research (B))

    Institution: Tohoku University

    2020/10/27 - 2023/03/31

  3. ひずみ制御によるグラフェンナノリボン電子構造設計手法の構築と多機能センサへの応用

    鈴木 研

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 基盤研究(B)

    Institution: 東北大学

    2020/04/01 - 2023/03/31

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    本研究では,高機能,高効率なグラフェンナノリボン(GNR)デバイス安定製造のための基盤技術の構築を目的に,形状及びひずみ制御によるGNR電子構造設計手法の開発を行う.特に半導体的性質を示すGNRと金属的な性質を有するGNRを電極として一体成形したダンベル型のGNR構造に着目し,幅寸法とひずみ負荷制御に基づく多様なバンドギャップ制御の可能性を検討した. 幅広部を金属伝導GNR,幅狭部を半導体GNRで構成したダンベル型GNR構造に対し,密度汎関数理論に基づく第一原理解析を用いて電流-電圧特性を検討したところ,接合界面における界面電子状態の形成により半導体GNR単体と比較して電流が流れ始めるしきい値電圧が減少することを確認した.この結果より,半導体的伝導特性を示すGNRに安定した電気的接続を形成する手法としてダンベル型構造が有効であることが示された.また,ガスセンサへの応用を想定し,グラフェン表面におけるH2O,CO,NH3吸着特性のひずみ依存性を検討した.引張ひずみ負荷によりCO,NH3の吸着エネルギーが減少したのに対し,H2Oの吸着は安定化したことから,ひずみ負荷によるガス吸着制御の可能性が示された. 解析結果の妥当性及びひずみ制御によるガスセンサの感度向上及びガス選択性への影響を検討するため,ポリジメチルシロキサン(PDMS)基板上にグラフェンデバイスを試作し,その電流‐電圧特性を評価した.水蒸気を含んだガスを試作サンプル上面に断続的に流し,その際の電気抵抗を測定したところ,水蒸気の流入に対しグラフェンシートの抵抗が増加しH2Oに対するセンサ機能が確認された.また,20%の引張りひずみをサンプルに負荷し同様の試験を行ったところ,無負荷時と比較し,電気抵抗変化率の増加と水分子脱離までの時間の短縮が確認され,ひずみ負荷によるセンサ機能向上の可能性を実験的に実証した.

  4. Establishment of Scientific Basis of the Strength and Reliability of Materials Based on the Order of Atom Arrangement and Its Application to the Explication of the Degradation Process of Materials

    Miura Hideo

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (S)

    Institution: Tohoku University

    2016/05/31 - 2021/03/31

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    The degradation process of heat-resistant alloys used under large mechanical loads at elevated temperatures was quantitatively visualized by applying a scanning electron microscope. The mechanism of the disappearance of the strengthened micro texture and drastic decrease in the fracture lifetime was successfully analyzed by the mechanical stress-induced anisotropic acceleration of atomic diffusion of component elements at elevated temperatures. The degradation process was quantitatively predicted by using the modified Arrhenius equation. In addition, non-destructive inspection method of the micro texture change was established by applying the fine spectrum analysis of the deflected visible light in the atmosphere.

  5. Solid phase film formation of polymer/ceramic compound particles by hetero-structure control and comprehensive analysis of film formation mechanisms

    OGAWA Kazuhiro

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (A)

    Institution: Tohoku University

    2017/04/01 - 2020/03/31

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    By combining active nano-ceramic particles with a polymer, we succeeded in forming a solid state coatings by cold spray technique without melting the particles. The particle deposition mechanism was elucidated and its interfacial strength was evaluated by experimental approach and numerical simulation, and it was clarified that the hydroxyl groups on the surface of nano-ceramic particles are effective. Regarding this mechanism, it is considered that the hydroxyl groups on the particle surface promote hydrogen bonding and are chemically bonded.

  6. Degradation Analysis of Engineering Materials in Air Using White Light and Precise Optical Filter

    MIURA HIDEO, Suzuki Ken, Murakoshi Takuya, Shinozaki Taichi, Sakamoto Hayato, Suzuki Wataru, Sawase Akari, Kasama Shin, Cheng Lei, Cai Qingwu

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Challenging Research (Exploratory)

    Institution: Tohoku University

    2017/06/30 - 2019/03/31

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    The strength of heat-resistant alloys at elevated temperatures was found to decrease drastically due to the disappearance of the initially formed strengthening texture, which was caused by the stress-induced acceleration of atomic diffusion of component elements of the alloys. It is very important, therefore, to clarify the degradation mechanism quantitatively and to develop the effective method for monitoring the micro texture change. Thus, a novel observation method of the micro texture change was developed by applying the wavelength dependence of the optical reflectance of each element. For example, the reflectance of nickel starts to decrease drastically when the wavelength of the irradiated laser is shorter than 450 nm. By scanning a laser beams with different wavelength on the surface of the alloys, it is possible to detect the change of the local composition of the alloys qualitatively.

  7. Elucidation of mechanical, electrical and chemical factor interaction mechanism in all solid state battery and its application

    SATO Kazuhisa

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (B)

    Institution: Tohoku University

    2016/04/01 - 2019/03/31

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    This research is basic/applied research aiming to dramatically improve performance, durability and reliability by creating fuel cells and secondary batteries from ceramics and metals. The obstacle to the commercialization of solid state batteries is due to the fact that they are mainly composed of ceramic members with extremely low mechanical reliability. Therefore, in this research, we have succeeded in developing a battery that combines performance, durability, and reliability by combining some of the battery components with a metal having a nano-porous structure. In addition, we succeeded in developing the world's first non-destructive evaluation method that can quickly evaluate the stability of the interface structure.

  8. 原子配列の秩序性変化に着目した材料の高温初期損傷評価システムの開発

    三浦 英生, 鈴木 研

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 基盤研究(A)

    Institution: 東北大学

    2016/04/01 - 2017/03/31

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    本研究においては,地球温暖化防止対策に資する次世代エネルギー機器の高効率化に不可欠な,機器動作環境の過酷化(高温高負荷化)に起因して生じる構造材料の強化微細組織のナノスケールでの崩壊過程の可視化技術と,高温強度劣化過程の測定技術の開発を目的とした.特に原子配列の秩序性の変化に伴う材料強度の劣化という視点に基づき,ひずみ誘起異方的増速拡散現象に基づく,原子空孔や不純物原子などの点欠陥や転位の運動に代表される線欠陥の発生・増殖による原子配列の秩序性の変化を定量的に可視化するとともに,その原子配列の秩序性の変化と材料強度物性の相関性を解明するナノスケールでの材料強度測定技術の確立を目指した. 本年度は複数の元素濃度分布を同時に可視化する観察系の実現を目標に,実験設備の設計と観察用資料の準備に着手した.研究開始後に本実験システム拡張し材料劣化損傷評価学術基盤の創成を提案していた基盤研究(S)が採択されたことから,研究開始内容はそのまま基盤研究(S)で継続展開していく.

  9. Development of visualization technologies for battery security society

    Hashida Toshiyuki, SATO Kazuhisa, SUZUKI Ken, FUKUI Ken-ichi

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Challenging Exploratory Research

    Institution: Tohoku University

    2015/04/01 - 2017/03/31

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    This study presents technologies of visualizing the mechanical damage in Li ion secondary cells and solid oxide fuel cells (SOFCs) using acoustic emission (AE) method and laser microscope technique. For Li ion secondary cells, we have developed an AE/laser microscope technique for monitoring the dimensional change in Si-electrodes due to Li ion migration and the associated delamination of the Si-electrode from the substrate. Three stages in the Li ion migration process has been newly discovered in this study. We have also succeeded to detect the mechanical damages such as vertical cracking and delamination induced by the electro-chemical oxidation in the operation of SOFCs, and proposed a self-organization map of the mechanical damages on the basis of the AE monitoring. The above- mentioned technologies are expected to provide a viable foundation for the development of battery security society.

  10. Development and Evaluation of Multi-Functional Thin-Film Devices Using Graphene Nanoribbon Under Three-Dimensional Strain Field

    Miura Hideo, Suzuki Ken, Ohnishi Masato, Yang Meng, Sasaki Shin-ichiro

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Challenging Exploratory Research

    Institution: Tohoku University

    2015/04/01 - 2017/03/31

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    The change of the electronic properties of grapheme nanorobbons (GNRs) under the application of uniaxial strain along their longitudinal direction was analyzed by using the first principle calculations. It was found that band gap starts to open when the width of GNR is thinner than 70 nm, and the piezoresistance effect starts to appear in the GNR. The high quality grapheme film was successfully grown on the (111) copper foil using CVD method, and it was cut into nanoscale GNR by electron beam. It was confirmed that the semi conductive properties appeared in the GNR thinner than 70 nm. The manufactured GNR was transferred to a flexible substrate. Finally, the nano-scale GNR-base strain sensor was successfully fabricated on the flexible substrate. The strain sensitivity of about 100 was obtained from the sensor as was expected. This result clearly indicates the possibility of the development very high sensitive strain sensor using GNR.

  11. Fabrication of low-elastic modulus micro bumps by controlling crystallographic orientation

    Suzuki Ken

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Challenging Exploratory Research

    Institution: Tohoku University

    2014/04/01 - 2016/03/31

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    In this study, the fabrication method of low-elastic modulus micro Cu bumps with (100) crystallographic orientation was studied for reducing the thermal and residual stresses in three-dimensional (3D) integration of silicon microelectronic devices. Crystallographic orientation and quality of the atomic arrangement of the electroplated thin films were measured by XRD (X-ray diffraction) analysis and EBSD (Electron Back Scattering Diffraction) method. All the electroplated samples formed on the α-Ta/Cu base layer are oriented (111) preferentially. However, the ratio of (100) orientation in an electroplated Cu film was increased by applying β-Ta/Cu base layer. Young’s modulus of the film were measured by Nano-Indentation test and Young’s modulus of the film with (100) orientation decreased to 127 GPa from 145 GPa in the (111) oriented film. Therefore, the low-elastic modulus Cu micro bumps should be realized by usingβ-Ta/Cu base layer for the Cu electroplating.

  12. Quantitative Evaluation of the Crystallinity of Grain Boundaries in Nano Scale

    MIURA Hideo, SUZUKI Ken

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Challenging Exploratory Research

    Institution: Tohoku University

    2012/04/01 - 2014/03/31

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    A novel evaluation method of the crystallinity of grain boundaries was proposed by analyzing the quality of Kikuchi lines obtained from the conventional EBSD analysis. This method can evaluate the porous and brittle grain boundaries by IQ (Image Quality) and CI (Confidence Index). Both IQ and CI values are the parameters which are calculated from the observed result of the Kikuchi pattern obtained from the area where electron beams penetrate during EBSD analysis. It was found that the local areas with low IQ value and low CI value correspond to porous grain boundaries. The change of these values corresponded to the changes of mechanical and electrical properties of thin films. Therefore, the quality of grain boundaries can be evaluated by using the proposed combination of the IQ and CI values clearly, and thus, this method is effective for evaluating the crystallinity of grain boundaries and thus, the change of mechanical and electrical properties of the polycrystalline thin films.

  13. Remote dynamic-strain-distribution measurement system using a nano-scale texture-controlled thin film

    MIURA Hideo, SUZUKI Ken

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (A)

    Institution: Tohoku University

    2009 - 2012

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    A two-dimensional strain distribution sensor has been developed by applying multi-walled carbon nanotubes. The spatial resolution of the sensor was 50 mm, and its maximum gauge factor was 600. Dynamic strain was successfully measured at 1 kHz by using a micron wave at 99 GHz. These results clearly indicate that the developed sensor is effective for monitoring the strain on the surface of operating machines for assuring their integrity.

  14. Interface integrity based on the control of strain-induced anisotropic diffusion

    MIURA Hideo, SUZUKI Ken

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Challenging Exploratory Research

    Institution: Tohoku University

    2010 - 2011

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    The degradation mechanism of Ni-base superalloy under an uni-axial strain at high temperature was analyzed by molecular dynamics (MD)analysis. The strain-induced anisotropic diffusion of Al atoms perpendicular to the interface between finely dispersed .' (Ni3Al)phase and . phase (Ni matrix)was observed clearly in a Ni(001)/Ni3Al(001)interface structure. It was found that Al, Co, Cu, W, and Ti atoms accelerated the rafting. On the other hand, Ta, Pd, Zr, Mo, and Mg atoms were found to suppress the rafting. The estimated results were validated by experiments using thin-film stacked structures. The 0. 2%tensile strain was applied parallel to the interface during the annealing of the stacked structure by using a four-point bending method. It was confirmed that the diffusion of atoms perpendicular to the interface was accelerated drastically. It was also confirmed that titanium and tungsten atoms which are already doped in the alloy accelerated this phenomenon seriously. On the other hand, the addition of palladium and tantalum was found to be effective for suppressing the diffusion of Al atoms around the interface. Therefore, the application of MD analysis to the design of a novel heat resistant material is very effective for improving the efficiency of energy power plants for next generation.

  15. Materials designfor energy systems based on interface integrity

    SUZUKI Ken

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Young Scientists (A)

    Institution: Tohoku University

    2007 - 2009

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    Computational chemistry approach was applied to study the mechanism of Stress Corrosion Cracking (SCC). Enhanced chemical reactions and diffusion of oxygen atoms due to strain were found to be one of the important factors in the crack growth process of SCC. Hafnium was suggested to be effective element for the formation of stable oxide film and the decrease of strain-enhanced oxygen diffusion.

  16. 応力腐食割れ解析用量子分子動力学シミュレータの開発とき裂進展メカニズムの解明

    鈴木 研

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 萌芽研究

    Institution: 東北大学

    2005 - 2005

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    共有メモリマルチプロセッサにおいて並列計算が可能な応力腐食割れ解析用量子分子動力学シミュレータを開発した。高温水環境下におけるオーステナイトステンレス鋼のき裂先端で起こるメカノケミカル反応を原子・分子レベルで明らかにすることを目的とし、本シミュレータを用いて高温水(300℃)環境におけるFe-Cr新生面の反応ダイナミクス解析を行った。反応初期において、H_2O分子はFe-Cr表面上で分解しOHが生成する様子が観察された。その後最表面のCr原子、Fe原子がH_2O領域へ移動、すなわち溶解し始めた。内部のCr原子も最表面へ向かって拡散するため、H_2O界面ではCr原子の濃度が上昇し、H_2O、OHはFeよりも表面及び溶解したCr近傍に配位しやすいことがわかった。 Fe/H_2O界面ではH_2OやOH、O原子はFe内部深くまで拡散し、Feが溶解し続ける様子がみられたが、Fe-Cr合金においては、界面に濃縮したCrがH_2O、OHのトラップサイトとして働きH_2O、OHの内部拡散が妨げられるため、Fe溶解の程度が小さくなることが明らかとなった。この結果は、Fe-Cr新生面の酸化反応初期においてはCrリッチな酸化物が生成しやすいという実験事実と定性的に一致すると共に、Cr添加による耐腐食性向上メカニズムを示唆していると考えられる。さらに、本手法を用いて、Ni-Cr合金における原子拡散と欠陥の影響について検討を行ったところ、Ni-Cr(Ni, Cr比3:2)合金内に原子空孔が存在するとNi、Crとも拡散速度が大きくなることが確認された。Crの拡散によって合金内部のCr分布にゆらぎが発生し、Cr欠乏層が形成されると耐食性が著しく低下する可能性がある。現在、Ni基合金の耐食性向上のために様々な元素の添加が試みられているが、このような観点から、Cr拡散を低減させることが可能な添加元素の有効性が示唆された。

  17. 複合環境下における破壊機構の微視的解明と破壊予知・制御に関する計算化学的研究

    鈴木 研

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 特別研究員奨励費

    Institution: 東北大学

    2002 - 2003

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    研究計画に従って、複合環境下における破壊機構の微視的解明を目的とした研究を行った。 「材料」「応力」「環境」の三大因子があいまって発生する応力腐食割れは、原子炉内構造物の主要な損傷原因の一つであることから、原子力発電プラントの信頼性向上のためその対策が特に重要である。そこで、粒界応力腐食割れ(IGSCC)に関して、オーステナイト鋼を模擬したfcc-Feの粒界の電子状態や反応性を計算化学的手法を用いて検討を行った。粒界を含んだfcc鉄[001]面における水分子の吸着に関して量子化学的検討を行ったところ、粒界近傍のFe原子ほど正の電荷を取りやすいことがわかった。これは、粒界近辺のFe原子から優先的に酸化されることを示しており、粒界近傍は酸化反応に対する反応性が高いことが明らかとなった。また、量子分子動力学法を用いてFe内部における酸素イオン拡散挙動の検討を行ったところ、粒界近傍では粒内より酸素イオンの拡散速度が大きいことが確認された。 以上の結果より、酸素の内部拡散速度が小さく安定な皮膜を生成しやすい元素ほど耐IGSCC性に優れた元素と考え、耐SCC性の向上に効果的な添加元素の探索を行った。今回の研究では、オーステナイト鋼を対象としているので、Feに対する添加元素の効果を密度汎関数法を用いて検討した。元素の酸化反応に対する効果を、酸素を固溶した際のエネルギー変化によって評価した。また、金属内部を酸素イオンが拡散する際の活性化エネルギーより酸素イオンの拡散性について評価した。その結果、酸化物を生成しやすく、酸素が拡散しにくいという点から、添加元素としてTi、Mn、Sr、Y、Zr、Ce、Hfが耐SCC性の向上に有効であることがわかった。

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  1. 計算科学を援用したコールドスプレー法による火力発電用高温部材の革新的補修技術の開発

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    火力発電ガスタービン用動静翼等の高温保安部材は、長期間の運転により高温腐食やエロージョン等が発生し、廃却や補修が行われている。補修は溶接が主であるが、補修に費やす時間が長いことや溶接割れも危惧される。そこで本研究においては、低温高速流により未溶融の粒子を積層可能でかつ成形速度が速いコールドスプレー法を用い、さらに計算化学を援用することで科学的根拠に基づいた高温保安部品の革新的補修技術の確立に着手する。

  2. 多変量時空間ゆらぎ制御による高信頼合金設計技術に関する研究

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    多様な原子結合形態が混在する多元素系材料解析技術と数万原子規模の解析を実用的時間で終了させるための並列化量子分子動力学プログラムの開発を推進する。開発したプログラムをNi基合金に活用し、不純物、格子欠陥とひずみの相互作用に基づく原子拡散現象と、拡散に伴う構造変化が物性に及ぼす影響を検討する。また、Ni基合金の表面反応(腐食反応)を実験的に解析し、理論と実験の両面から材質劣化メカニズムを検証することによって、耐熱・耐食性に優れた次世代Ni基合金の開発を目指す。