-
An absolute surface encoder employing a mode-locked femtosecond laser
Ryo Sato, Hiraku Matsukuma, Wei Gao
Holography, Diffractive Optics, and Applications XIV 13240 47-47 2024/11/23
Publisher:
SPIE
DOI：
10.1117/12.3035032
ISSN：
0277-786X
eISSN：
1996-756X
-
Improvement of angle measurement sensitivity using second harmonic wave interference
Jiahui Lin, Hiraku Matsukuma, Kuangyi Li, Ryo Sato, Wei Gao
Optics Express 32 (23) 40915-40915 2024/10/25
Publisher:
Optica Publishing Group
DOI：
10.1364/oe.537872
eISSN：
1094-4087
-
Design and testing of a two-axis surface encoder with a single Littrow configuration of a first-order diffraction beam
Yifan Hong, Ryo Sato, Hiraku Matsukuma, Wei Gao
Precision Engineering 91 577-586 2024/10
Publisher:
Elsevier BV
DOI：
10.1016/j.precisioneng.2024.10.019
ISSN：
0141-6359
-
A dual-detection chromatic confocal probe employing a mode-locked femtosecond laser
Ryo Sato, Chen Li, Hiraku Matsukuma, Wei Gao
Optical Manufacturing and Testing 2024 13134 1-1 2024/09/30
Publisher:
SPIE
DOI：
10.1117/12.3026365
ISSN：
0277-786X
eISSN：
1996-756X
-
An Improved Data Processing Algorithm for Spectrally Resolved Interferometry Using a Femtosecond Laser
Tao Liu, Hiraku Matsukuma, Amane Suzuki, Ryo Sato, Wei Gao
Sensors 24 (9) 2869-2869 2024/04/30
Publisher:
MDPI AG
DOI：
10.3390/s24092869
eISSN：
1424-8220
-
中赤外ファイバレーザの開発および精密計測への応用
Peer-reviewed
Hiraku MATSUKUMA
Journal of the Japan Society for Precision Engineering 90 (4) 325-329 2024/04/05
Publisher:
Japan Society for Precision Engineering
DOI：
10.2493/jjspe.90.325
ISSN：
0912-0289
eISSN：
1882-675X
-
Design of an Optical Head with Two Phase-Shifted Interference Signals for Direction Detection of Small Displacement in an Absolute Surface Encoder
Ryo Sato, Tao Liu, Satoru Maehara, Ryota Okimura, Hiraku Matsukuma, Wei Gao
International Journal of Automation Technology 18 (2) 249-256 2024/03
DOI：
10.20965/ijat.2024.p0249
ISSN：
1881-7629
eISSN：
1883-8022
-
Enhanced Data-Processing Algorithms for Dispersive Interferometry Using a Femtosecond Laser
Tao Liu, Hiraku Matsukuma, Amane Suzuki, Ryo Sato, Wei Gao
Sensors 24 (2) 370-370 2024/01/08
Publisher:
MDPI AG
DOI：
10.3390/s24020370
ISSN：
1424-8220
eISSN：
1424-8220
-
Repetition Frequency Control of a Mid-Infrared Ultrashort Pulse Laser
Hiraku Matsukuma, Masashi Nagaoka, Hisashi Hirose, Ryo Sato, Yuki Shimizu, Wei Gao
International Journal of Automation Technology 18 (1) 84-91 2024/01/05
Publisher:
Fuji Technology Press Ltd.
DOI：
10.20965/ijat.2024.p0084
ISSN：
1881-7629
eISSN：
1883-8022
-
On-Machine Calibration of Pitch Deviations of a Linear Scale Grating by Using a Differential Angle Sensor
Jiucheng Wu, Yifang Hong, Dong Wook Shin, Ryo Sato, Lue Quan, Hiraku Matsukuma, Wei Gao
International Journal of Automation Technology 18 (1) 4-10 2024/01
DOI：
10.20965/ijat.2024.p0004
ISSN：
1881-7629
eISSN：
1883-8022
-
Angle Measurement Based on Second Harmonic Generation Using Artificial Neural Network
Kuangyi Li, Zhiyang Zhang, Jiahui Lin, Ryo Sato, Hiraku Matsukuma, Wei Gao
Nanomanufacturing and Metrology 6 (1) 2023/12
DOI：
10.1007/s41871-023-00206-5
ISSN：
2520-811X
-
Improved peak- to- peak method for cavity length measurement of a Fabry- Perot etalon using a mode-locked femtosecond laser
Dong Wook Shin, Hiraku Matsukuma, Ryo Sato, Eberhard Manske, Wei Gao
OPTICS EXPRESS 31 (16) 25797-25814 2023/07
DOI：
10.1364/OE.493507
ISSN：
1094-4087
eISSN：
1094-4087
-
Improved Algorithms of Data Processing for Dispersive Interferometry Using a Femtosecond Laser
Tao Liu, Jiucheng Wu, Amane Suzuki, Ryo Sato, Hiraku Matsukuma, Wei Gao
SENSORS 23 (10) 2023/05
DOI：
10.3390/s23104953
ISSN：
1424-8220
eISSN：
1424-8220
-
Confocal probe based on the second harmonic generation for measurement of linear and angular displacements
Ryo Sato, Yuki Shimizu, Hiroki Shimizu, Hiraku Matsukuma, Wei Gao
OPTICS EXPRESS 31 (7) 11982-11993 2023/03
DOI：
10.1364/OE.486421
ISSN：
1094-4087
eISSN：
1094-4087
-
Autocollimation employing optical frequency comb
H. Matsukuma, K. Ikeda, R. Sato, W. Gao
Proceedings of SPIE - The International Society for Optical Engineering 12607 2023
DOI：
10.1117/12.3005523
ISSN：
0277-786X
eISSN：
1996-756X
-
Investigation of Angle Measurement Based on Direct Third Harmonic Generation in Centrosymmetric Crystals
Kuangyi Li, Jiahui Lin, Zhiyang Zhang, Ryo Sato, Hiroki Shimizu, Hiraku Matsukuma, Wei Gao
APPLIED SCIENCES-BASEL 13 (2) 2023/01
DOI：
10.3390/app13020996
eISSN：
2076-3417
-
Fabry-Pérot angle sensor using a mode-locked femtosecond laser source
Dong Wook Shin, Hiraku Matsukuma, Ryo Sato, Wei Gao
Optics Express 30 (26) 46366-46382 2022/12/19
DOI：
10.1364/OE.477435
ISSN：
1094-4087
eISSN：
1094-4087
-
Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer
Xin Xiong, Chenguang Yin, Lue Quan, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Hideaki Tamiya, Wei Gao
Sensors 22 (23) 2022/12
DOI：
10.3390/s22239348
ISSN：
1424-8220
eISSN：
1424-8220
-
Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range
Yifan Hong, Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Hiroki Shimizu, Wei Gao
Sensors 22 (23) 2022/12
DOI：
10.3390/s22239563
ISSN：
1424-8220
eISSN：
1424-8220
-
Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction
Lue Quan, Yuki Shimizu, Ryo Sato, Dong Wook Shin, Hiraku Matsukuma, Andreas Archenti, Wei Gao
INTERNATIONAL JOURNAL OF AUTOMATION TECHNOLOGY 16 (5) 572-581 2022/09
DOI：
10.20965/ijat.2022.p0572
ISSN：
1881-7629
eISSN：
1883-8022
-
A Second Harmonic Wave Angle Sensor with a Collimated Beam of Femtosecond Laser
Wijayanti Dwi Astuti, Kuangyi Li, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
APPLIED SCIENCES-BASEL 12 (10) 2022/05
DOI：
10.3390/app12105211
eISSN：
2076-3417
-
Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser
Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
APPLIED SCIENCES-BASEL 12 (9) 2022/05
DOI：
10.3390/app12094736
eISSN：
2076-3417
-
A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range
Yifan Hong, Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
SENSORS 22 (8) 2022/04
DOI：
10.3390/s22083010
ISSN：
1424-8220
eISSN：
1424-8220
-
Theoretical Investigation for Angle Measurement Based on Femtosecond Maker Fringe
Kuangyi Li, Wijayanti Dwi Astuti, Ryo Sato, Hiraku Matsukuma, Wei Gao
APPLIED SCIENCES-BASEL 12 (7) 2022/04
DOI：
10.3390/app12073702
eISSN：
2076-3417
-
Theoretical investigation of angle measurement based on third-harmonic generation (THG) with a femtosecond laser
Kuangyi Li, Jiahui Lin, Wijayanti Dwi Astuti, Ryo Sato, Hiraku Matsukuma, Wei Gao
nanoMan 2022 and AETS 2022 - 2022 8th International Conference on Nanomanufacturing and 4th AET Symposium on ACSM and Digital Manufacturing 2022
DOI：
10.1109/Nanoman-AETS56035.2022.10119491
-
Theoretical Analysis on Gauge Block Length Measurement by Excess Fraction method
Tao Liu, Jiucheng Wu, Ryo Sato, Hiraku Matsukuma, Wei Gao
nanoMan 2022 and AETS 2022 - 2022 8th International Conference on Nanomanufacturing and 4th AET Symposium on ACSM and Digital Manufacturing 2022
DOI：
10.1109/Nanoman-AETS56035.2022.10119521
-
Correction: Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors (Nanomanufacturing and Metrology, (2021), 4, 1, (53-66), 10.1007/s41871-020-00091-2)
Hiraku Matsukuma, Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
Nanomanufacturing and Metrology 5 (4) 439 2022
DOI：
10.1007/s41871-022-00164-4
ISSN：
2520-811X
-
Mid-infrared autocollimation for linear motion error measurement
Hiraku Matsukuma, Kaede Matayoshi, Masashi Nagaoka, Yuki Shimizu, Wei Gao
Measurement: Sensors 18 2021/12
DOI：
10.1016/j.measen.2021.100265
eISSN：
2665-9174
-
Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation
Yuki Shimizu, Lue Quan, Dong Wook Shin, Hiraku Matsukuma, Wei Gao
Measurement: Sensors 18 2021/12
DOI：
10.1016/j.measen.2021.100135
eISSN：
2665-9174
-
An application of the edge reversal method for accurate reconstruction of the three-dimensional profile of a single-point diamond tool obtained by an atomic force microscope
Kai Zhang, Yuki Shimizu, Hiraku Matsukuma, Yindi Cai, Wei Gao
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 117 (9-10) 2883-2893 2021/12
DOI：
10.1007/s00170-021-07879-6
ISSN：
0268-3768
eISSN：
1433-3015
-
A Comparison of the Probes with a Cantilever Beam and a Double-Sided Beam in the Tool Edge Profiler for On-Machine Measurement of a Precision Cutting Tool
Bo Wen, Sho Sekine, Shinichi Osawa, Yuki Shimizu, Hiraku Matsukuma, Andreas Archenti, Wei Gao
MACHINES 9 (11) 2021/11
DOI：
10.3390/machines9110271
eISSN：
2075-1702
-
A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer
Xin Xiong, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
SENSORS 21 (21) 2021/11
DOI：
10.3390/s21217412
ISSN：
1424-8220
eISSN：
1424-8220
-
On-machine diameter measurement of a cylindrical workpiece with a reference artefact
Yuki Shimizu, Qiaolin Li, Masami Kogure, Kimitaka Nishimura, Yuki Sato, Hiraku Matsukuma, Wei Gao
MEASUREMENT SCIENCE AND TECHNOLOGY 32 (10) 2021/10
DOI：
10.1088/1361-6501/ac0ace
ISSN：
0957-0233
eISSN：
1361-6501
-
In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser
Dong Wook Shin, Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Yindi Cai, Eberhard Manske, Wei Gao
APPLIED SCIENCES-BASEL 11 (17) 2021/09
DOI：
10.3390/app11178028
eISSN：
2076-3417
-
Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source
Hiraku Matsukuma, Ryo Sato, Yuki Shimizu, Wei Gao
INTERNATIONAL JOURNAL OF AUTOMATION TECHNOLOGY 15 (4) 529-536 2021/07
DOI：
10.20965/ijat.2021.p0529
ISSN：
1881-7629
eISSN：
1883-8022
-
Self-calibration of a variable-line-spacing grating for an absolute optical encoder with a Fizeau interferometer
Xin Xiong, Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology 32 (6) 2021/06
DOI：
10.1088/1361-6501/abe9de
ISSN：
0957-0233
eISSN：
1361-6501
-
Improvement of a Stitching Operation in the Stitching Linear-Scan Method for Measurement of Cylinders in a Small Dimension
Qiaolin Li, Yuki Shimizu, Toshiki Saito, Hiraku Matsukuma, Yindi Cai, Wei Gao
APPLIED SCIENCES-BASEL 11 (10) 2021/05
DOI：
10.3390/app11104705
eISSN：
2076-3417
-
A technique for measurement of a prism apex angle by optical angle sensors with a reference artefact
Yuki Shimizu, Xu Ma, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology 32 (5) 2021/05
DOI：
10.1088/1361-6501/abd8a6
ISSN：
0957-0233
eISSN：
1361-6501
-
Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors
Hiraku Matsukuma, Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
Nanomanufacturing and Metrology 4 (1) 53-66 2021/03
DOI：
10.1007/s41871-020-00091-2
ISSN：
2520-811X
-
An optical frequency domain angle measurement method based on second harmonic generation
Wijayanti Dwi Astuti, Hiraku Matsukuma, Masaru Nakao, Kuangyi Li, Yuki Shimizu, Wei Gao
Sensors (Switzerland) 21 (2) 1-14 2021/01/02
DOI：
10.3390/s21020670
ISSN：
1424-8220
eISSN：
1424-8220
-
Measurement of the apex angle of a small prism by an oblique-incidence mode-locked femtosecond laser autocollimator
Yuki Shimizu, Yuri Kanda, Xu Ma, Kakeru Ikeda, Hiraku Matsukuma, Yasunari Nagaike, Masaki Hojo, Keita Tomita, Wei Gao
Precision Engineering 67 339-349 2021/01
DOI：
10.1016/j.precisioneng.2020.10.013
ISSN：
0141-6359
eISSN：
1873-2372
-
An absolute surface encoder with a planar scale grating of variable periods
Yuki Shimizu, Ryo Ishizuka, Kazuki Mano, Yuri Kanda, Hiraku Matsukuma, Wei Gao
Precision Engineering 67 36-47 2021/01
DOI：
10.1016/j.precisioneng.2020.09.007
ISSN：
0141-6359
eISSN：
1873-2372
-
A new method for evaluation of the pitch deviation of a linear scale grating by an optical angle sensor
Lue Quan, Yuki Shimizu, Xin Xiong, Hiraku Matsukuma, Wei Gao
Precision Engineering 67 1-13 2021/01
DOI：
10.1016/j.precisioneng.2020.09.008
ISSN：
0141-6359
eISSN：
1873-2372
-
An autocollimator with a mid-infrared laser for angular measurement of rough surfaces
Hiraku Matsukuma, Yun Asumi, Masashi Nagaoka, Yuki Shimizu, Wei Gao
Precision Engineering 67 89-99 2021/01
DOI：
10.1016/j.precisioneng.2020.09.022
ISSN：
0141-6359
eISSN：
1873-2372
-
Design and Construction of a Low-Force Stylus Probe for On-machine Tool Cutting Edge Measurement
Hiraku Matsukuma, Bo Wen, Shinichi Osawa, Sho Sekine, Yuki Shimizu, Wei Gao
Nanomanufacturing and Metrology 3 (4) 282-291 2020/12
DOI：
10.1007/s41871-020-00084-1
ISSN：
2520-811X
-
An off-axis differential method for improvement of a femtosecond laser differential chromatic confocal probe
Chong Chen, Yuki Shimizu, Ryo Sato, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland) 10 (20) 1-15 2020/10/02
DOI：
10.3390/app10207235
eISSN：
2076-3417
-
On-machine profile measurement of a micro cutting edge by using a contact-type compact probe unit
Bo Wen, Yuki Shimizu, Yu Watanabe, Hiraku Matsukuma, Wei Gao
Precision Engineering 65 230-239 2020/09
DOI：
10.1016/j.precisioneng.2020.03.014
ISSN：
0141-6359
eISSN：
1873-2372
-
A new signal processing method for a differential chromatic confocal probe with a mode-locked femtosecond laser
Peer-reviewed
Ryo Sato, Chong Chen, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Measurement Science and Technology 31 (9) 2020/09
DOI：
10.1088/1361-6501/ab8905
ISSN：
0957-0233
eISSN：
1361-6501
-
Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer
Peer-reviewed
Xin Xiong, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Measurement Science and Technology 31 (9) 2020/09
DOI：
10.1088/1361-6501/ab8b83
ISSN：
0957-0233
eISSN：
1361-6501
-
Measurement uncertainty analysis of a stitching linear-scan method for the evaluation of roundness of small cylinders
Peer-reviewed
Qiaolin Li, Yuki Shimizu, Toshiki Saito, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland) 10 (14) 2020/07
DOI：
10.3390/app10144750
eISSN：
2076-3417
-
High-precision cutting edge radius measurement of single point diamond tools using an atomic force microscope and a reverse cutting edge artifact
Peer-reviewed
Kai Zhang, Yindi Cai, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland) 10 (14) 2020/07
DOI：
10.3390/app10144799
eISSN：
2076-3417
-
A differential strategy for measurement of a static force in a single-point diamond cutting by a force-controlled fast tool servo
Peer-reviewed
Bo Wen, Yuki Shimizu, Hiraku Matsukuma, Keisuke Tohyama, Haruki Kurita, Yuan Liu Chen, Wei Gao
Measurement Science and Technology 31 (7) 2020/07
DOI：
10.1088/1361-6501/ab7d6f
ISSN：
0957-0233
eISSN：
1361-6501
-
Optical angle sensor technology based on the optical frequency comb laser
Peer-reviewed
Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland) 10 (11) 2020/06/01
DOI：
10.3390/app10114047
eISSN：
2076-3417
-
Development of an optical angle sensor with a mode-locked femtosecond laser source for surface profile measurement
Yuki Shimizu, Shota Takazono, Yuri Kanda, Hiraku Matsukuma, Wei Gao, Hajime Inaba
JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020 2020
DOI：
10.1115/LEMP2020-8501
-
On-machine angle measurement of a precision V-groove on a ceramic workpiece
Yuki Shimizu, Wei Gao, Hiraku Matsukuma, Károly Szipka, Andreas Archenti
CIRP Annals 69 (1) 469-472 2020
DOI：
10.1016/j.cirp.2020.03.011
ISSN：
0007-8506
eISSN：
1726-0604
-
Profile measurement by using a femtosecond laser chromatic confocal probe
Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020 2020
DOI：
10.1115/LEMP2020-8626
-
Fabrication of a two-dimensional diffraction grating with isolated photoresist pattern structures
Peer-reviewed
Hiraku Matsukuma, Masanori Matsunaga, Kai Zhang, Yuki Shimizu, Wei Gao
International Journal of Automation Technology 14 (4) 546-551 2020
DOI：
10.20965/ijat.2020.p0546
ISSN：
1881-7629
eISSN：
1883-8022
-
A New Optical Angle Measurement Method Based on Second Harmonic Generation with a Mode-Locked Femtosecond Laser
Hiraku Matsukuma, Shuhei Madokoro, Wijayanti Dwi Astuti, Yuki Shimizu, Wei Gao
Nanomanufacturing and Metrology 2 (4) 187-198 2019/12/01
DOI：
10.1007/s41871-019-00052-4
ISSN：
2520-811X
-
Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings
Peer-reviewed
Yuki Shimizu, Kazuki Mano, Hiroki Murakami, Shunsuke Hirota, Hiraku Matsukuma, Wei Gao
Precision Engineering 60 280-290 2019/11
DOI：
10.1016/j.precisioneng.2019.07.022
ISSN：
0141-6359
eISSN：
1873-2372
-
Investigation and improvement of thermal stability of a chromatic confocal probe with a mode-locked femtosecond laser source
Peer-reviewed
Ryo Sato, Yuki Shimizu, Chong Chen, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland) 9 (19) 2019/10/01
DOI：
10.3390/app9194084
eISSN：
2076-3417
-
Integration of a Cr–N Thin-Film Displacement Sensor into an XY Micro-stage for Closed-Loop Nano-positioning
Keisuke Adachi, Hiraku Matsukuma, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
Nanomanufacturing and Metrology 2 (3) 131-139 2019/09/01
DOI：
10.1007/s41871-019-00040-8
ISSN：
2520-811X
-
Accurate polarization control in nonorthogonal two-axis Lloyd's mirror interferometer for fabrication of two-dimensional scale gratings
Peer-reviewed
Yuki Shimizu, Kazuki Mano, Kai Zhang, Hiraku Matsukuma, Wei Gao
Optical Engineering 58 (9) 2019/09/01
DOI：
10.1117/1.OE.58.9.092611
ISSN：
0091-3286
eISSN：
1560-2303
-
A Design Study of a Heat Flow-Type Reading Head for a Linear Encoder Based on a Micro Thermal Sensor
Yuki Shimizu, Ayaka Ishida, Yuki Matsuno, Hiraku Matsukuma, Wei Gao
Nanomanufacturing and Metrology 2 (2) 100-110 2019/06/01
DOI：
10.1007/s41871-019-00037-3
ISSN：
2520-811X
-
Reduction in Cross-Talk Errors in a Six-Degree-of-Freedom Surface Encoder
Peer-reviewed
Hiraku Matsukuma, Ryo Ishizuka, Masaya Furuta, Xinghui Li, Yuki Shimizu, Wei Gao
Nanomanufacturing and Metrology 2 (2) 111-123 2019/06/01
Publisher:
Springer Nature
DOI：
10.1007/s41871-019-00039-1
ISSN：
2520-811X
-
A method for expansion of Z-directional measurement range in a mode-locked femtosecond laser chromatic confocal probe
Peer-reviewed
Chong Chen, Ryo Sato, Yuki Shimizu, Taku Nakamura, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland) 9 (3) 2019/01/29
DOI：
10.3390/app9030454
ISSN：
2076-3417
eISSN：
2076-3417
-
Theoretical investigation on measurement range of a femtosecond laser chromatic confocal probe by utilizing side-lobe of axial response
Peer-reviewed
Chong Chen, Hiraku Matsukuma, Ryo Sato, Xiuguo Chen, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 362-364 2019/01/16
DOI：
10.1109/AMCON.2018.8615064
-
Development of a fiber-laser-based frequency comb for precision dimensional metrology
Peer-reviewed
Yuri Kanda, Hiraku Matsukuma, Shaoqing Yang, Yuki Shimizu, Hajime Inaba, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 18-19 2019/01/16
DOI：
10.1109/AMCON.2018.8614857
-
Measurement and uncertainty analysis of a precision V-shaped ceramic part
Peer-reviewed
Masami Kogure, Hiraku Matsukuma, Ryo Kobayashi, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 30-31 2019/01/16
DOI：
10.1109/AMCON.2018.8614901
-
Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique
Peer-reviewed
Xin Xiong, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 220-222 2019/01/16
DOI：
10.1109/AMCON.2018.8615000
-
An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings
Peer-reviewed
Lue Quan, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 47-48 2019/01/16
DOI：
10.1109/AMCON.2018.8614962
-
A compact two-axis Lloyd's mirror interferometer for scale grating fabrication
Peer-reviewed
Masanori Matsunaga, Kazuki Mano, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 28-29 2019/01/16
DOI：
10.1109/AMCON.2018.8614804
-
Angle measurement using a diffraction of optical frequency comb
Peer-reviewed
Kazuki Nakamura, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 26-27 2019/01/16
DOI：
10.1109/AMCON.2018.8614810
-
Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage
Peer-reviewed
Ryo Ishizuka, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 36-39 2019/01/16
DOI：
10.1109/AMCON.2018.8614803
-
An optical frequency comb operating in the mid-infrared region for wide-range and high-precision optical sensor
Peer-reviewed
Yun Asumi, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 32-35 2019/01/16
DOI：
10.1109/AMCON.2018.8614919
-
Theoretical calculation of the reading output from a micro thermal sensors for precision positioning
Peer-reviewed
Yuki Shimizu, Ayaka Ishida, Hiraku Matsukuma, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 24-25 2019/01/16
DOI：
10.1109/AMCON.2018.8614751
-
Theoretical investigation on measurement range expansion of a femtosecond laser chromatic confocal probe
Chong Chen, Hiraku MATSUKUMA, Ryo SATO, Yuki SHIMIZU, Wei GAO
The Proceedings of Conference of Tohoku Branch 2019.54 146-146 2019
Publisher:
Japan Society of Mechanical Engineers
DOI：
10.1299/jsmeth.2019.54.146
eISSN：
2424-2713
-
Measurement Technologies for Manufacturing
Yuki Shimizu, So Ito, Jungchul Lee, Shigeaki Goto, Hiraku Matsukuma, Wei Gao
Handbook of Manufacturing 541-568 2019/01/01
DOI：
10.1142/9789813271029_0010
-
An optical angle sensor based on second harmonic generation of a modelocked laser
Peer-reviewed
Hiraku Matsukuma, Shuhei Madokoro, Masaru Nakao, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering 11142 2019
ISSN：
0277-786X
eISSN：
1996-756X
-
Erbium-doped mid-infrared fiber lasers
Peer-reviewed
Ori Henderson-Sapir, Andrew Malouf, Nathaniel Bawden, Elizaveta Klantsataya, Jesper Munch, Matthew R. Majewski, Stuart D. Jackson, Hiraku Matsukuma, Shigeki Tokita, Sze Yun Set, Shinji Yamashita, David J. Ottaway
Proceedings of SPIE - The International Society for Optical Engineering 10981 2019
DOI：
10.1117/12.2524138
ISSN：
0277-786X
eISSN：
1996-756X
-
Plane-by-plane femtosecond laser inscription of first-order fiber Bragg gratings in fluoride glass fiber for in situ monitoring of lasing evolution
Peer-reviewed
Kenji Goya, Hiraku Matsukuma, Hiyori Uehara, Satoshi Hattori, Christian Schäfer, Daisuke Konishi, Masanao Murakami, Shigeki Tokita
Optics Express 26 (25) 33305-33313 2018/12/10
DOI：
10.1364/OE.26.033305
ISSN：
1094-4087
eISSN：
1094-4087
-
Uncertainty evaluation for measurements of pitch deviation and out-of-flatness of planar scale gratings by a Fizeau interferometer in Littrow configuration
Peer-reviewed
Xin Xiong, Yuki Shimizu, Xiuguo Chen, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland) 8 (12) 2539 2018/12/07
DOI：
10.3390/app8122539
ISSN：
2076-3417
eISSN：
2076-3417
-
Laser autocollimation based on an optical frequency comb for absolute angular position measurement
Peer-reviewed
Yuan Liu Chen, Yuki Shimizu, Jun Tamada, Kazuki Nakamura, Hiraku Matsukuma, Xiuguo Chen, Wei Gao
Precision Engineering 54 284-293 2018/10
DOI：
10.1016/j.precisioneng.2018.06.005
ISSN：
0141-6359
eISSN：
1873-2372
-
A chromatic confocal probe with a mode-locked femtosecond laser source
Peer-reviewed
Xiuguo Chen, Taku Nakamura, Yuki Shimizu, Chong Chen, Yuan Liu Chen, Hiraku Matsukuma, Wei Gao
Optics and Laser Technology 103 359-366 2018/07
DOI：
10.1016/j.optlastec.2018.01.051
ISSN：
0030-3992
eISSN：
1879-2545
-
Actively Q-switched dual-wavelength pumped Er3+ :ZBLAN fiber laser at 3.47 μm
Peer-reviewed
Nathaniel Bawden, Hiraku Matsukuma, Henderson Sapir Ori, Elizaveta Klantsataya, Shigeki Tokita, David J. Ottaway
Optics Letters 43 (11) 2724-2727 2018/06/01
DOI：
10.1364/OL.43.002724
ISSN：
0146-9592
eISSN：
1539-4794
-
A PD-edge method associated with the laser autocollimation for measurement of a focused laser beam diameter
Peer-reviewed
Yuki Shimizu, Taiji Maruyama, Shota Nakagawa, Yuan Liu Chen, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology 29 (7) 074006 2018/05/24
DOI：
10.1088/1361-6501/aac0a6
ISSN：
0957-0233
eISSN：
1361-6501
-
Fluoride-fiber-based side-pump coupler for high-power fiber lasers at 2.8 μm
Peer-reviewed
C. A. Schäfer, H. Uehara, D. Konishi, S. Hattori, H. Matsukuma, M. Murakami, S. Shimizu, S. Tokita
Optics Letters 43 (10) 2340-2343 2018/05/15
DOI：
10.1364/OL.43.002340
ISSN：
0146-9592
eISSN：
1539-4794
-
High quality-factor quartz tuning fork glass probe used in tapping mode atomic force microscopy for surface profile measurement
Peer-reviewed
Yuan Liu Chen, Yanhao Xu, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology 29 (6) 065014 2018/05/15
DOI：
10.1088/1361-6501/aab998
ISSN：
0957-0233
eISSN：
1361-6501
-
An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges
Peer-reviewed
Yindi Cai, Yuan Liu Chen, Malu Xu, Yuki Shimizu, So Ito, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology 29 (5) 054004 2018/03/23
DOI：
10.1088/1361-6501/aaa913
ISSN：
0957-0233
eISSN：
1361-6501
-
Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface
Peer-reviewed
Yuki Shimizu, Yuki Matsuno, Yuan Liu Chen, Hiraku Matsukuma, Wei Gao
Nanomanufacturing and Metrology 1 (1) 45-57 2018/03/01
Publisher:
Springer Nature
DOI：
10.1007/s41871-018-0007-x
ISSN：
2520-811X
-
The effects of microstructure on propagation of laser-driven radiative heat waves in under-dense high-Z plasma
Peer-reviewed
J. D. Colvin, H. Matsukuma, K. C. Brown, J. F. Davis, G. E. Kemp, K. Koga, N. Tanaka, A. Yogo, Z. Zhang, H. Nishimura, K. B. Fournier
Physics of Plasmas 25 (3) 2018/03/01
DOI：
10.1063/1.5012523
ISSN：
1070-664X
eISSN：
1089-7674
-
A liquid-surface-based three-axis inclination sensor for measurement of stage tilt motions
Peer-reviewed
Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao
Sensors (Switzerland) 18 (2) 2018/02
DOI：
10.3390/s18020398
ISSN：
1424-8220
-
Evaluation of the grating period based on laser diffraction by using a mode-locked femtosecond laser beam
Peer-reviewed
Yuki Shimizu, Kentaro Uehara, Hiraku Matsukuma, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing 12 (5) 2018
DOI：
10.1299/jamdsm.2018jamdsm0097
ISSN：
1881-3054
eISSN：
1881-3054
-
An optical angle sensor based on chromatic dispersion with a mode-locked laser source
Peer-reviewed
Yuki Shimizu, Shuhei Madokoro, Hiraku Matsukuma, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing 12 (5) 2018
DOI：
10.1299/jamdsm.2018jamdsm0096
ISSN：
1881-3054
eISSN：
1881-3054
-
Uncertainty analysis of a six-degree-of-freedom surface encoder for a planar motion stage
Peer-reviewed
Yuki Shimizu, Masaya Furuta, Yuan Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao
Procedia CIRP 75 355-360 2018
DOI：
10.1016/j.procir.2018.04.041
ISSN：
2212-8271
-
A stitching linear-scan method for roundness measurement of small cylinders
Peer-reviewed
Yuan Liu Chen, Yuki Machida, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
CIRP Annals 67 (1) 535-538 2018/01/01
DOI：
10.1016/j.cirp.2018.04.009
ISSN：
0007-8506
eISSN：
1726-0604
-
Error Separation Method for Precision Measurement of the Run-Out of a Microdrill Bit by Using a Laser Scan Micrometer Measurement System
Peer-reviewed
Zengyuan Niu, Yuan-Liu Chen, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Journal of Manufacturing and Materials Processing 2 (1) 4 2018/01
DOI：
10.3390/jmmp2010004
eISSN：
2504-4494
-
Q-switched dual-wavelength pumped 3.5-μm erbium-doped mid-Infrared fiber laser
Peer-reviewed
Nathaniel Bawden, Hiraku Matsukuma, Ori Henderson-Sapir, Elizaveta Klantsataya, Shigeki Tokita, David J. Ottaway
Proceedings of SPIE - The International Society for Optical Engineering 10512 2018
DOI：
10.1117/12.2288081
ISSN：
0277-786X
eISSN：
1996-756X
-
Far-infrared-light shadowgraphy for high extraction efficiency of extreme ultraviolet light from a CO<inf>2</inf>-laser-generated tin plasma
Peer-reviewed
Hiraku Matsukuma, Tatsuya Hosoda, Yosuke Suzuki, Akifumi Yogo, Tatsuya Yanagida, Takeshi Kodama, Hiroaki Nishimura
Applied Physics Letters 109 (5) 051104 2016/08/01
DOI：
10.1063/1.4960374
ISSN：
0003-6951
eISSN：
1077-3118
-
The measurement of plasma structure in a magnetic thrust chamber
Peer-reviewed
Ryosuke Kawashima, Taichi Morita, Naoji Yamamoto, Naoya Saito, Shinsuke Fujioka, Hiroaki Nishimura, Hiraku Matsukuma, Atsushi Sunahara, Yoshitaka Mori, Tomoyuki Johzaki, Hideki Nakashima
Plasma and Fusion Research 11 (2) 3406012 2016
DOI：
10.1585/pfr.11.3406012
ISSN：
1880-6821
eISSN：
1880-6821
-
Microwave discharge plasma production with resonant cavity for EUV mask inspection tool
Peer-reviewed
Saya Tashima, Masami Ohnishi, Waheed Hugrass, Keita Sugimoto, Masatugu Sakaguchi, Hodaka Osawa, Hiroaki Nishimura, Hiraku Matsukuma
Japanese Journal of Applied Physics 54 (12) 126701 2015/12
DOI：
10.7567/JJAP.54.126701
ISSN：
0021-4922
eISSN：
1347-4065
-
Correlation between laser absorption and radiation conversion efficiency in laser produced tin plasma
Peer-reviewed
Hiraku Matsukuma, Atsushi Sunahara, Tatsuya Yanagida, Hiroaki Tomuro, Kouichiro Kouge, Takeshi Kodama, Tatsuya Hosoda, Shinsuke Fujioka, Hiroaki Nishimura
Applied Physics Letters 107 (12) 121103 2015/09/21
DOI：
10.1063/1.4931698
ISSN：
0003-6951
eISSN：
1077-3118
-
Perturber dependence of disalignment cross sections of the argon 2p <inf>2</inf> atoms measured at temperatures between 77 and 295K
Peer-reviewed
Hiraku Matsukuma, Hirotaka Tanaka, Yukihiro Takaie, Taiichi Shikama, Cristian Bahrim, Masahiro Hasuo
Journal of the Physical Society of Japan 81 (11) 114302 2012/11
DOI：
10.1143/JPSJ.81.114302
ISSN：
0031-9015
eISSN：
1347-4073
-
27pAB-3 Perturber dependence for collisional disalignment of excited rare gas atoms
Peer-reviewed
Matsukuma Hiraku, Bahrim Cristian, Shikama Taiichi, Hasuo Masahiro
Meeting Abstracts of the Physical Society of Japan 67 (0) 240-240 2012
Publisher:
The Physical Society of Japan
DOI：
10.11316/jpsgaiyo.67.1.2.0_240_1
ISSN：
1342-8349
-
Disalignment rates of the neon 2p<inf>5</inf> and 2p<inf>10</inf> atoms due to helium atom collisions measured at temperatures between 77 and 294 K
Peer-reviewed
H. Matsukuma, T. Shikama, M. Hasuo
Journal of Physics B: Atomic, Molecular and Optical Physics 44 (7) 2011/04
DOI：
10.1088/0953-4075/44/7/075206
ISSN：
0953-4075
eISSN：
1361-6455
-
Depolarization of emission lines from polarized neon 2p<inf>10</inf> atoms due to radiation re-absorption in a glow discharge plasma
Peer-reviewed
H. Matsukuma, C. Bahrim, T. Shikama, M. Hasuo
37th EPS Conference on Plasma Physics 2010, EPS 2010 3 1584-1587 2010
-
Alignment relaxation of Ne∗(2p<inf>i</inf> [J1]) atoms in He-Ne∗ glow discharges
Peer-reviewed
Cristian Bahrim, Vaibhav Khadilkar, Hiraku Matsukuma, Masahiro Hasuo
Journal of Physics: Conference Series 194 (9) 2009/12/24
DOI：
10.1088/1742-6596/194/9/092004
ISSN：
1742-6588
eISSN：
1742-6596
-
Alignment relaxation of Ne*(2pi[J= 1]) atoms in He-Ne* glow discharges
Peer-reviewed
Cristian Bahrim, Vaibhav Khadilkar, Hiraku Matsukuma, Masahiro Hasuo
Journal of Physics: Conference Series 194 (9) 092004 2009/11
Publisher:
{IOP} Publishing
DOI：
10.1088/1742-6596/194/9/092004
ISSN：
1742-6596
