Improvement of silicon microdisk resonators with movable waveguides by hydrogen annealing treatment

Taiyu Okatani, Yuichi Sato, Kaoru Imai, Kazuhiro Hane, Yoshiaki Kanamori

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics　39　(3)　2021/05/01

DOI： 10.1116/6.0000971 　

ISSN： 2166-2746

eISSN： 2166-2754

Dielectric Optical Metamaterials Using Silicon Nanospheres Fabricated by Hydrogen Annealing

Kanamori Yoshiaki, Okatani Taiyu, Abe Yosuke, Hane Kazuhiro

JSAP Annual Meetings Extended Abstracts　2021.1　1036-1036　2021/02/26

DOI： 10.11470/jsapmeeting.2021.1.0_1036 　

eISSN： 2436-7613

Multileveled tunable silicon grating array bonded on large scale integration substrate by polymers Peer-reviewed

Tomohiro Suzuki, Chernroj Sawasdivorn, Takashi Sasaki, Hiroshi Matsuura, Kazuhiro Hane

Journal of Optical Microsystems　1　(01)　013501-1-013501-13　2021/01/26

DOI： 10.1117/1.jom.1.1.013501 　

ISSN： 2708-5260

Fabrication of silicon nanospheres placeable on a desired position for dielectric metamaterials in the visible region

Taiyu Okatani, Yosuke Abe, Takuya Nakazawa, Kazuhiro Hane, Yoshiaki Kanamori

Optical Materials Express　11　(1)　189-189　2021/01/01

DOI： 10.1364/ome.415313 　

eISSN： 2159-3930

Actively tunable THz filter based on an electromagnetically induced transparency analog hybridized with a MEMS metamaterial

Ying Huang, Kenta Nakamura, Yuma Takida, Hiroaki Minamide, Kazuhiro Hane, Yoshiaki Kanamori

Scientific Reports　10　(1)　2020/12

DOI： 10.1038/s41598-020-77922-1 　

eISSN： 2045-2322

Surface-plasmon-coupled optical force sensors based on metal-insulator-metal metamaterials with movable air gap

Taiyu Okatani, Shota Sekiguchi, Kazuhiro Hane, Yoshiaki Kanamori

SCIENTIFIC REPORTS　10　(1)　2020/09

DOI： 10.1038/s41598-020-71825-x 　

ISSN： 2045-2322

High-speed and large-amplitude resonant varifocal mirror Peer-reviewed

Takashi Sasaki, Takuro Kamada, Kazuhiro Hane

Journal of Robotics and Mechatronics　32　(2)　2020/04

MEMS-based wearable eyeglasses for eye health monitoring

Neelam Kaushik, Takashi Sasaki, Yoshiki Takahashi, Toru Nakazawa, Kazuhiro Hane

Biomedical Physics and Engineering Express　6　(1)　2020

DOI： 10.1088/2057-1976/ab562e 　

eISSN： 2057-1976

MEMS-Based Wearable Eyeglasses for Eye Health Monitoring Peer-reviewed

Neelam Kaushik, Takashi Sasaki, Yoshiki Takahashi, Toru Nakazawa, Kazuhiro Hane

Biomedical Physics & Engineering Express　6　015006-1-015006-8　2020/01

Fabrication of refractive index sensors using polarization independent metamaterial and their application to chemical concentration measurement and DNA detection Peer-reviewed

Kanamori Yoshiaki, Shimizu Tomoki, Nomura Shin-Ichiro, Hane Kazuhiro

ELECTRONICS AND COMMUNICATIONS IN JAPAN　2019/08/13

DOI： 10.1002/ecj.12208 　

ISSN： 1942-9533

Node supported varifocal mirror

Takashi Sasaki, Takuro Kamada, Kazuhiro Hane

International Conference on Optical MEMS and Nanophotonics　2019-　88-89　2019/07/01

DOI： 10.1109/OMN.2019.8925292 　

ISSN： 2160-5041 2160-5033

偏光無依存メタマテリアルを用いた屈折率センサの製作と化学物質濃度計測及びDNA検出への適用 Peer-reviewed

金森義明, 清水友己, 野村慎一郎, 羽根一博

電気学会論文誌E（センサ・マイクロマシン部門誌）　139　(7)　163-168　2019/07

DOI： 10.1541/ieejsmas.139.163 　

A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers

Takumi Nagai, Kazuhiro Hane

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII　1533-1536　2019/06/01

DOI： 10.1109/TRANSDUCERS.2019.8808766 　

Tunable Hybrid Gap Surface Plasmon Polariton Waveguides with Ultralow Loss Deep-Subwavelength Propagation Peer-reviewed

Huong Thanh Nguyen, Son Ngoc Nguyen, Minh-Tuan Trinh, Kazuhiro Hane, Hoang, Manh Chu

Plasmonics　14　2019/05

DOI： 10.1007/s11468-019-00971-4 　

Silicon photonic microelectromechanical switch using lateral adiabatic waveguide couplers Peer-reviewed

Takumi Nagai, Kazuhiro Hane

Optics Express　26　(26)　33906-33917　2018/12

DOI： 10.1364/OE.26.033906 　

Fabrication of movable MIM metamaterial with air gap structures

Shota Sekiguchi, Yoshiaki Kanamori, Kazuhiro Hane

Digest of 31th International Microprocesses and Nanotechnology Conference (MNC 2018)　15P-7-86-15P-7-86　2018/11

Miniature Spectroscopes with Two-Dimensional Guided-Mode Resonant Metal Grating Filters Integrated on a Photodiode Array Peer-reviewed

Yoshiaki Kanamori, Daisuke Ema, Kazuhiro Hane

Materials　11　1924-1-1924-11　2018/11

DOI： 10.3390/ma11101924 　

Simple retinal imaging system using a MEMS scanning mirror Peer-reviewed

Neelam Kaushik, Takashi Sasaki, Toru Nakazawa, Kazuhiro Hane

Optical Engineering　57　(9)　095101-1-095101-8　2018/09

DOI： 10.1117/1.OE.57.9.095101 　

ISSN： 0091-3286

eISSN： 1560-2303

Nonlinear spring tuning by electrostatic combs in micro mirror scanner

Kazuhiro Hane, Takashi Izawa, Takashi Sasaki

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018　1-4　2018/06/22

DOI： 10.1109/DTIP.2018.8394239 　

GaN-based integrated photonics chip with suspended LED and waveguide Peer-reviewed

Xin Li, Yongjin Wang, Kazuhiro Hane, Zheng Shi, Jiang Yan

Optics Communications　415　43-47　2018/05/15

DOI： 10.1016/j.optcom.2017.12.077 　

ISSN： 0030-4018

Wafer-level vacuum package of two-dimensional micro-scanner Peer-reviewed

Hoang Manh Chu, Takashi Sasaki, Kazuhiro Hane

Microsystem Technologies　24　(5)　2159-2168　2018/05/01

DOI： 10.1007/s00542-017-3668-2 　

ISSN： 0946-7076

GaN microring waveguide resonators bonded to silicon substrate by a two-step polymer process Peer-reviewed

Ryohei Hashida, Takashi Sasaki, Kazuhiro Hane

Applied Optics　57　(9)　2073-2079　2018/03/20

DOI： 10.1364/AO.57.002073 　

ISSN： 2155-3165 1559-128X

Electro-optic guided-mode resonance tuning suppressible by optically induced screening in a vertically coupled hybrid GaN/Si microring resonator Peer-reviewed

B. Thubthimthong, T. Sasaki, K. Hane

Applied Physics Letters　112　(7)　071102-1-071102-5　2018/02/12

DOI： 10.1063/1.5013227 　

ISSN： 0003-6951

Integrated H-2 nano-sensor array on GaN honeycomb nanonetwork fabricated by MEMS-based technology Peer-reviewed

Aihua Zhong, Takashi Sasaki, Ping Fan, Dongping Zhang, Jingting Luo, Kazuhiro Hane

SENSORS AND ACTUATORS B-CHEMICAL　255　(3)　2886-2893　2018/02

DOI： 10.1016/j.snb.2017.09.107 　

ISSN： 0925-4005

Plasmonic Color Filters Integrated on a Photodiode Array Peer-reviewed

Daisuke Ema, Yoshiaki Kanamori, Hitoshi Sai, Kazuhiro Hane

Electronics and Communications in Japan　101　(2)　95-104　2018

DOI： 10.1002/ecj.12055 　

ISSN： 1942-9541 1942-9533

Structure Shift of GaN Among Nanowall Network, Nanocolumn, and Compact Film Grown on Si (111) by MBE Peer-reviewed

Aihua Zhong, Ping Fan, Yuanting Zhong, Dongping Zhang, Fu Li, Jingting Luo, Yizhu Xie, Kazuhiro Hane

Nanoscale Research Letters　13　(51)　51-1-51-7　2018

DOI： 10.1186/s11671-018-2461-1 　

ISSN： 1556-276X 1931-7573

面外配置された非対称型ダブルバーメタマテリアルの製作と光学応答 Peer-reviewed

大久保 藍, 金森 義明, 羽根 一博

電気学会論文誌E（センサ・マイクロマシン部門誌）　137　(11)　363-370　2017/11/01

DOI： 10.1541/ieejsmas.137.363 　

プラズモニックカラーフィルタ一体型フォトダイオードアレイ Peer-reviewed

江間 大祐, 金森 義明, 齋 均, 羽根 一博

電気学会論文誌E（センサ・マイクロマシン部門誌）　137　(11)　379-386　2017/11/01

DOI： 10.1541/ieejsmas.137.379 　

THz波用MEMS駆動ワイヤグリッド偏光子の製作と光学特性評価 Peer-reviewed

石井 雄大, 中田 陽介, 時実 悠, 瀧田 佑馬, 金森 義明, 南出 泰亜, 羽根 一博

電気学会論文誌E（センサ・マイクロマシン部門誌）　137　(11)　407-414　2017/11/01

DOI： 10.1541/ieejsmas.137.407 　

偏光無依存メタマテリアルを用いた屈折率センサ Peer-reviewed

清水 友己, 金森 義明, 羽根 一博

電気学会論文誌E（センサ・マイクロマシン部門誌）　137　(11)　415-416　2017/11/01

DOI： 10.1541/ieejsmas.137.415 　

Fabrication of varifocal scanner integrated with piezoresistive focal length and angle sensor Peer-reviewed

Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya, Kazuhiro Hane

International Conference on Optical MEMS and Nanophotonics　2017/09/26

DOI： 10.1109/OMN.2017.8051506 　

ISSN： 2160-5041 2160-5033

GaN microring waveguide bonded to Si substrate by polymer Peer-reviewed

R. Hashida, T. Sasaki, K. Hane

International Conference on Optical MEMS and Nanophotonics　2017/09/26

DOI： 10.1109/OMN.2017.8051464 　

ISSN： 2160-5041 2160-5033

Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity Peer-reviewed

Takashi Izawa, Takashi Sasaki, Kazuhiro Hane

MICROMACHINES　8　(8)　240-1-240-13　2017/08

DOI： 10.3390/mi8080240 　

ISSN： 2072-666X

Confocal laser displacement sensor using a micro-machined varifocal mirror Peer-reviewed

Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya, Kazuhiro Hane

APPLIED OPTICS　56　(24)　6911-6916　2017/08

DOI： 10.1364/AO.56.006911 　

ISSN： 1559-128X

eISSN： 2155-3165

Nonlinearity compensation of micro-mirror hard-spring by electrostatic combs Peer-reviewed

Takashi Izawa, Takashi Sasaki, Kazuhiro Hane

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems　1987-1990　2017/07/26

DOI： 10.1109/TRANSDUCERS.2017.7994460 　

Confocal laser displacement sensor using MEMS varifocal mirror Peer-reviewed

K. Nakazawa, T. Sasaki, H. Furnia, J. Kamiya, H. Sasaki, T. Kamiya, K. Hane

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems　2139-2142　2017/07/26

DOI： 10.1109/TRANSDUCERS.2017.7994498 　

Polymer bonding of GaN crystal layer on silicon substrate for micro mechanical resonator applications Peer-reviewed

Takashi Sasaki, Yuta Hayakawa, Kazuhiro Hane

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS　23　(7)　2891-2898　2017/07

DOI： 10.1007/s00542-016-3075-0 　

ISSN： 0946-7076

eISSN： 1432-1858

Varifocal Scanner Using Wafer Bonding Peer-reviewed

Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Toshikazu Kamiya, Kazuhiro Hane

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS　26　(2)　440-447　2017/04

DOI： 10.1109/JMEMS.2017.2661979 　

ISSN： 1057-7157

eISSN： 1941-0158

Fabrication of Metamaterial Absorbers in THz Region and Evaluation of the Absorption Characteristics Peer-reviewed

Yuta Ishii, Yuma Takida, Yoshiaki Kanamori, Hiroaki Minamide, Kazuhiro Hane

ELECTRONICS AND COMMUNICATIONS IN JAPAN　100　(4)　15-24　2017/04

DOI： 10.1002/ecj.11943 　

ISSN： 1942-9533

eISSN： 1942-9541

25 nm Single-Crystal Silicon Nanowires Fabricated by Anisotropic Wet Etching Peer-reviewed

Hoang Manh Chu, Minh Van Nguyen, Hung Ngoc Vu, Kazuhiro Hane

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY　17　(2)　1525-1529　2017/02

DOI： 10.1166/jnn.2017.12659 　

ISSN： 1533-4880

eISSN： 1533-4899

MEMS-based retinal-imaging system for visual health monitoring

Neelam Kaushik, Takashi Sasaki, Yoshiki Takahashi, Toru Nakazawa, Kazuhiro Hane

Proceedings of the International Display Workshops　2　1319-1321　2017

ISSN： 1883-2490

Transmissive metamaterial color filters

Yoshiaki Kanamori, Daisuke Ema, Kazuhiro Hane

Optics InfoBase Conference Papers　2017　2017

Transmissive plasmonic color filters with built-in Si photodiodes Peer-reviewed

Tomoki Shimizu, Hitoshi Sai, Yoshiaki Kanamori, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　137　(5)　134-139　2017

DOI： 10.1541/ieejsmas.137.134 　

ISSN： 1347-5525 1341-8939

Dynamic spectral control of fano resonance by MEMS actuated optical metamaterials Peer-reviewed

Yuto Moritake, Yoshiaki Kanamori, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　137　(11)　357-362　2017

DOI： 10.1541/ieejsmas.137.357 　

ISSN： 1347-5525 1341-8939

All-optical guided resonance tuning in hybrid GaN/Si microring induced by non-radiatively trapped injected hot electrons Peer-reviewed

Borriboon Thubthimthong, Kazuhiro Hane

OPTICS EXPRESS　24　(26)　29643-29659　2016/12

DOI： 10.1364/OE.24.029643 　

ISSN： 1094-4087

Optical characteristics of multiple layered InGaN quantum wells on GaN nanowalls grown on Si (111) substrate Peer-reviewed

Yosuke Tamura, Kazuhiro Hane

MATERIALS RESEARCH BULLETIN　83　563-567　2016/11

DOI： 10.1016/j.materresbull.2016.06.042 　

ISSN： 0025-5408

eISSN： 1873-4227

Emission wavelength tuning of fluorescence by fine structural control of optical metamaterials with Fano resonance Peer-reviewed

Y. Moritake, Y. Kanamori, K. Hane

SCIENTIFIC REPORTS　6　33208-1-33208-6　2016/09

DOI： 10.1038/srep33208 　

ISSN： 2045-2322

Spectral sensitivity control of Si photodiodes by subwavelength structures

Daisuke Ema, Yoshiaki Kanamori, Kazuhiro Hane

Abstracts: The 1st A3 Metamaterials Forum　71-72　2016/07/05

Movable transparent membranes designed for tunable metamaterials in the optical region

Ai Okubo, Yoshiaki Kanamori, Kazuhiro Hane

Abstracts: The 1st A3 Metamaterials Forum　75-76　2016/07/05

Metamaterial absorbers fabricated on silicon cantilevers

Yuta Ishii, Yoshiaki Kanamori, Kazuhiro Hane

Abstracts: The 1st A3 Metamaterials Forum　85-86　2016/07/05

Photovoltaic transmissive color filters based on Metal-Photodiode-Metal metamaterials

Tomoki Shimizu, Hitoshi Sai, Yoshiaki Kanamori, Kazuhiro Hane

Abstracts: The 1st A3 Metamaterials Forum　91-92　2016/07/05

THz帯におけるメタマテリアル・アブソーバの製作と吸収特性の評価 Peer-reviewed

石井雄大, 瀧田佑馬, 金森義明, 南出泰亜, 羽根一博

電気学会論文誌E（センサ・マイクロマシン部門誌）　136　(5)　172-179　2016/05

DOI： 10.1541/ieejsmas.136.172 　

Demonstration of sharp multiple Fano resonances in optical metamaterials Peer-reviewed

Yuto Moritake, Yoshiaki Kanamori, Kazuhiro Hane

OPTICS EXPRESS　24　(9)　9332-9339　2016/05

DOI： 10.1364/OE.24.009332 　

ISSN： 1094-4087

Experimental Demonstration of Wavelength-Selective Metamaterial Absorbers in the 1.5 THz Range Peer-reviewed

Yuta Ishii, Yoshiaki Kanamori, Kazuhiro Hane, Yuma Takida, Hiroaki Minamide

Proceedings of the 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)　B4L-E-1-1-B4L-E-1-2　2016/04/17

Wavelength-selective Transmission from Plasmonic Nanostructured Arrays in the Visible Region Peer-reviewed

Daisuke Ema, Yoshiaki Kanamori, Kazuhiro Hane

Proceedings of the 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)　B4L-E-5-1-B4L-E-5-2　2016/04/17

Fabrication of Ultrasonic Sensors Using Micro Cantilevers and Characteristic Measurement in Vacuum for Acoustic Emission Sensing Peer-reviewed

Kengo Takata, Takashi Sasaki, Mitsuyuki Tanaka, Hiroshi Saito, Daisuke Matsuura, Kazuhiro Hane

ELECTRONICS AND COMMUNICATIONS IN JAPAN　99　(4)　68-74　2016/04

DOI： 10.1002/ecj.11810 　

ISSN： 1942-9533

eISSN： 1942-9541

Resonant Varifocal Micromirror with Piezoresistive Focus Sensor Peer-reviewed

Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya, Kazuhiro Hane

MICROMACHINES　7　(4)　57-1-57-13　2016/04

DOI： 10.3390/mi7040057 　

ISSN： 2072-666X

Efficient red-emission InGaN/GaN multilayered structure on Si with surface-nitrified HfO2 film as buffer layer Peer-reviewed

Wei Zhang, Xuehua Zhang, Yongjin Wang, K. Hane, Fangren Hu

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING　122　(3)　2016/03

DOI： 10.1007/s00339-016-9746-y 　

ISSN： 0947-8396

eISSN： 1432-0630

Tunable Monocrystalline Silicon Grating on LSI Circuit Fabricated by Two-step Polymer Bonding Peer-reviewed

T. Sasaki, T. Suzuki, H. Matsuura, K. Hane

2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)　2016

ISSN： 2160-5033

Varifocal Mirror Integrated with Scanner Using Wafer Bonding Technology Peer-reviewed

Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya, Kazuhiro Hane

2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)　2016

ISSN： 2160-5033

Silicon photonic waveguide devices tunable by in-plane actuation Peer-reviewed

K. Hane, H. M. Chu, T. Sasaki

2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)　2016

ISSN： 2160-5033

Hybrid Si/GaN Microring Resonator Integrated with Si Electrodes for Electro-Optic Tuning Peer-reviewed

Borriboon Thubthimthong, Takashi Sasaki, Kazuhiro Hane

2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)　2016

ISSN： 2160-5033

Eyeglasses-type retinal imaging system using MEMS scanner Peer-reviewed

T. Sasaki, T. Nakazawa, K. Hane

2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)　923-924　2016

Fabrication of Optical Attenuators for Optical Communication Based on Integration of Metal-Nanophotonic Resonators and Silicon Waveguides Peer-reviewed

金森義明, 高橋大洋, 羽根一博

レーザ研究　44　(1)　42-46　2016/01

ISSN： 0387-0200

Acoustic emission sensors using silicon mechanical resonators Peer-reviewed

Kengo Takata, Takashi Sasaki, Mitsutomo Nishizawa, Hiroshi Saito, Shinsuke Yamazaki, Daisuke Matsuura, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　135　(12)　484-489　2015/12/01

DOI： 10.1541/ieejsmas.135.484 　

ISSN： 1347-5525 1341-8939

Suspended p-n Junction InGaN/GaN Multiple-Quantum-Well Device With Selectable Functionality Peer-reviewed

Xin Li, Gangyi Zhu, Xumin Gao, Dan Bai, Xiaoming Huang, Xun Cao, Hongbo Zhu, Kazuhiro Hane, Yongjin Wang

IEEE PHOTONICS JOURNAL　7　(6)　2701407-1-2701407-8　2015/12

DOI： 10.1109/JPHOT.2015.2499544 　

ISSN： 1943-0655

eISSN： 1943-0647

AlN Nanowall Structures Grown on Si (111) Substrate by Molecular Beam Epitaxy Peer-reviewed

Yosuke Tamura, Kazuhiro Hane

NANOSCALE RESEARCH LETTERS　10　460-1-460-5　2015/12

DOI： 10.1186/s11671-015-1178-7 　

ISSN： 1556-276X

Detailed characterization of fano resonance in asymmetric-double-bar metamaterials in the optical region Peer-reviewed

Yuto Moritake, Yoshiaki Kanamori, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　135　(11)　426-432　2015/11/01

DOI： 10.1541/ieejsmas.135.426 　

ISSN： 1347-5525 1341-8939

Enhanced quality factor of Fano resonance in optical metamaterials by manipulating configuration of unit cells Peer-reviewed

Yuto Moritake, Yoshiaki Kanamori, Kazuhiro Hane

APPLIED PHYSICS LETTERS　107　(21)　211108-1-211108-4　2015/11

DOI： 10.1063/1.4936385 　

ISSN： 0003-6951

eISSN： 1077-3118

Enhanced Fluorescence of Quantum Dots by Fano Resonance in Optical Metamaterials Composed of Asymmetric Double Bars Peer-reviewed

Y. Moritake, Y. Kanamori, K. Hane

Abstract: 9th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics - Metamaterials 2015　1133-1135　2015/09/07

A silicon microring resonator with a nanolatch mechanism Peer-reviewed

Syotaro Abe, Kazuhiro Hane

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS　21　(9)　2019-2024　2015/09

DOI： 10.1007/s00542-014-2283-8 　

ISSN： 0946-7076

eISSN： 1432-1858

Fabrication of single-crystal silicon nanowires based on surface wet adhesion Peer-reviewed

Hoang Manh Chu, Minh Van Nguyen, Hung Ngoc Vu, Kazuhiro Hane

MATERIALS LETTERS　152　94-97　2015/08

DOI： 10.1016/j.matlet.2015.03.108 　

ISSN： 0167-577X

eISSN： 1873-4979

Asymmetrically and Vertically Coupled Hybrid Si/GaN Microring Resonators for On-Chip Optical Interconnects Peer-reviewed

B. Thubthimthong, T. Sasaki, K. Hane

IEEE PHOTONICS JOURNAL　7　(4)　7801511-1-7801511-1-12　2015/08

DOI： 10.1109/JPHOT.2015.2464721 　

ISSN： 1943-0655

eISSN： 1943-0647

MEMS for Plasmon Control of Optical Metamaterials Invited Peer-reviewed

Yoshiaki Kanamori, Ryohei Hokari, Kazuhiro Hane

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS　21　(4)　2701410-1-2701410-8　2015/07

DOI： 10.1109/JSTQE.2014.2385957 　

ISSN： 1077-260X

eISSN： 1558-4542

Design, fabrication, and optical characteristics of freestanding GaN waveguides on silicon substrate Peer-reviewed

Takuji Sekiya, Takashi Sasaki, Kazuhiro Hane

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics　33　(3)　2015/05/01

DOI： 10.1116/1.4917487 　

ISSN： 2166-2754 2166-2746

High surface accuracy resonant varifocal mirror Peer-reviewed

Kenta Nakazawa, Takashi Sasaki, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　135　(5)　165-170　2015/05/01

DOI： 10.1541/ieejsmas.135.165 　

ISSN： 1347-5525 1341-8939

Group velocity enhancement for guided lightwave by band-pulling effect in single-mode silicon comb photonic crystal wires Peer-reviewed

Borriboon Thubthimthong, Kazuhiro Hane

JOURNAL OF OPTICS　17　(5)　055104-1-055104-9　2015/05

DOI： 10.1088/2040-8978/17/5/055104 　

ISSN： 2040-8978

eISSN： 2040-8986

Design, fabrication, and optical characteristics of freestanding GaN waveguides on silicon substrate Peer-reviewed

Takuji Sekiya, Takashi Sasaki, Kazuhiro Hane

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　33　(3)　031207-1-031207-8　2015/05

DOI： 10.1116/1.4917487 　

ISSN： 1071-1023

Characterizations of the hybrid Si/GaN microring resonator with asymmetric vertical coupling

Borriboon Thubthimthong, Takashi Sasaki, Kazuhiro Hane

Optics InfoBase Conference Papers　2019　2015

GAN FREESTANDING WAVEGUIDES ON SI SUBSTRATE FOR SI/GAN HYBRID PHOTONIC INTEGRATION Peer-reviewed

T. Sekiya, T. Sasaki, K. Hane

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)　2057-2060　2015

Fabrication and evaluation of tunable submicron-thick monocrystalline silicon grating for integration on LSI circuit Peer-reviewed

T. Sasaki, S. Chernroj, H. Matsuura, K. Hane

2015 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)　2015

ISSN： 2160-5033

Quality-factor enhancement of Fano resonance in asymmetric-double-bar metamaterials by alternately arranging inversed unit cells in the optical region Peer-reviewed

Yuto Moritake, Yoshiaki Kanamori, Kazuhiro Hane

Proceedings of SPIE - The International Society for Optical Engineering　9371　93710T-1-93710T-6　2015

DOI： 10.1117/12.2078784 　

ISSN： 1996-756X 0277-786X

Antireflection subwavelength gratings on optical fiber tips fabricated by a dedicated UV nano imprint lithography system Invited Peer-reviewed

Yoshiaki Kanamori, Masaaki Okochi, Kazuhiro Hane

Proceedings of SPIE - The International Society for Optical Engineering　9372　93720T-1-93720T-7　2015

DOI： 10.1117/12.2075791 　

ISSN： 1996-756X 0277-786X

Fabrication and evaluation of single-crystal-silicon tunable grating using polymer-based membrane transfer bonding process Peer-reviewed

Sawasdivorn Chernroj, Hisayuki Onuma, Tomohiro Suzuki, Takashi Sasaki, Hiroshi Matsuura, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　135　(9)　361-366　2015

DOI： 10.1541/ieejsmas.135.361 　

ISSN： 1347-5525 1341-8939

Fabrication of Electromagnetically Induced Transparency like Metamaterials in THz Region and Evaluation of the Transmittance Characteristics Peer-reviewed

Nakamura Kenta, Hokari Ryohei, Kanamori Yoshiaki, Hane Kazuhiro

IEEJ Transactions on Sensors and Micromachines　135　(11)　454-459　2015

DOI： 10.1541/ieejsmas.135.454 　

ISSN： 1341-8939

Fabrication and phase-shift analysis of EIT metamaterials operating at visible wavelengths

Ryohei Hokari, Yoshiaki Kanamori, Kazuhiro Hane

Abstract of the 4th Japan-Korea Metamaterials Forum　38-39　2014/12/22

Demonstration and characterization of Fano resonance in optical metamaterials composed of asymmetric double bar

Yuto Moritake, Yoshiaki Kanamori, Kazuhiro Hane

Abstract of the 4th Japan-Korea Metamaterials Forum　40-41　2014/12/22

Fabrication of ultrathin color filters for three primary colors using guided-mode resonance in silicon subwavelength gratings Peer-reviewed

Yoshiaki Kanamori, Toshikazu Ozaki, Kazuhiro Hane

Optical Review　21　(5)　723-727　2014/10/03

DOI： 10.1007/s10043-014-0118-6 　

ISSN： 1349-9432 1340-6000

Reflection color filters of the three primary colors with wide viewing angles using common-thickness silicon subwavelength gratings Peer-reviewed

Yoshiaki Kanamori, Toshikazu Ozaki, Kazuhiro Hane

OPTICS EXPRESS　22　(21)　25635-25644　2014/10

DOI： 10.1364/OE.22.025663 　

ISSN： 1094-4087

機械共振による変位拡大を利用した焦点可変ミラーの基礎特性 Peer-reviewed

佐々木 敬, 佐藤大紀, 中澤謙太, 羽根一博

電気学会論文誌Ｅ（センサマイクロマシン部門誌）　134　(8)　253-257　2014/08

DOI： 10.1541/ieejsmas.134.253 　

Time Response of a Microelectromechanical Silicon Photonic Waveguide Coupler Switch Peer-reviewed

Syotaro Abe, Manh Hoang Chu, Takashi Sasaki, Kazuhiro Hane

IEEE PHOTONICS TECHNOLOGY LETTERS　26　(15)　1553-1556　2014/08

DOI： 10.1109/LPT.2014.2329033 　

ISSN： 1041-1135

eISSN： 1941-0174

Experimental demonstration of sharp Fano resonance in optical metamaterials composed of asymmetric double bars Peer-reviewed

Yuto Moritake, Yoshiaki Kanamori, Kazuhiro Hane

OPTICS LETTERS　39　(13)　4057-4060　2014/07

DOI： 10.1364/OL.39.004057 　

ISSN： 0146-9592

eISSN： 1539-4794

A Wide-Tuning Silicon Ring-Resonator Composed of Coupled Freestanding Waveguides Peer-reviewed

Hoang Manh Chu, Kazuhiro Hane

IEEE PHOTONICS TECHNOLOGY LETTERS　26　(14)　1411-1413　2014/07

DOI： 10.1109/LPT.2014.2326405 　

ISSN： 1041-1135

eISSN： 1941-0174

Experimental Comparison of Electromagnetically Induced Transparency-like Characteristics between Silver and Aluminum Metamaterials at Visible Wavelengths Peer-reviewed

Ryohei Hokari, Yoshiaki Kanamori, Kazuhiro Hane

Book of Abstracts: The 5th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META'14)　69-71　2014/05/20

Demonstration of Fano Resonance in Metamaterials Composed of Asymmetric Double Bars in Optical Region Peer-reviewed

Yuto Moritake, Yoshiaki Kanamori, Kazuhiro Hane

Book of Abstracts: The 5th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META'14)　72-74　2014/05/20

Comparative study of Schottky diode type hydrogen sensors based on a honeycomb GaN nanonetwork and on a planar GaN film Peer-reviewed

Aihua Zhong, Takashi Sasaki, Kazuhiro Hane

INTERNATIONAL JOURNAL OF HYDROGEN ENERGY　39　(16)　8564-8575　2014/05

DOI： 10.1016/j.ijhydene.2014.03.120 　

ISSN： 0360-3199

eISSN： 1879-3487

Fabrication of planar metamaterials with sharp and strong electromagnetically induced transparency-like characteristics at wavelengths around 820 nm Peer-reviewed

Ryohei Hokari, Yoshiaki Kanamori, Kazuhiro Hane

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS　31　(5)　1000-1005　2014/05

DOI： 10.1364/JOSAB.31.001000 　

ISSN： 0740-3224

eISSN： 1520-8540

Vacuum Package Using Anodic Bonding Assisted by the Reflow of Low-Melting Temperature Metal Peer-reviewed

Hoang Manh Chao, Hung Vu Ngoc, Kazuhiro Hane

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING　15　(4)　695-701　2014/04

DOI： 10.1007/s12541-014-0389-7 　

ISSN： 2234-7593

eISSN： 2005-4602

Platinum/porous GaN nanonetwork metal-semiconductor Schottky diode for room temperature hydrogen sensor Peer-reviewed

Aihua Zhong, Takashi Sasaki, Kazuhiro Hane

SENSORS AND ACTUATORS A-PHYSICAL　209　52-56　2014/03

DOI： 10.1016/j.sna.2014.01.014 　

ISSN： 0924-4247

Fabrication of Ultrathin Color Filters for Three Primary Colors Using Silicon Subwavelength Gratings Peer-reviewed

Yoshiaki Kanamori, Toshikazu Ozaki, Kazuhiro Hane

Technical Digest: 9th International Conference on Optics-Photonics Design & Fabrication　49-50　2014/02/12

Detuning Effect of Quadrupole Resonators in Electromagnetically Induced Transparency-like Metamaterials at Near-Infrared Wavelengths Peer-reviewed

Ryohei Hokari, Yoshiaki Kanamori, Kazuhiro Hane

Technical Digest: 9th International Conference on Optics-Photonics Design & Fabrication　51-52　2014/02/12

Numerical Study on Optical Metamaterials with High Quality Factor Composed of Asymmetric Double Bars Peer-reviewed

Yuto Moritake, Yoshiaki Kanamori, Kazuhiro Hane

Technical Digest: 9th International Conference on Optics-Photonics Design & Fabrication　53-54　2014/02/12

Silicon Spherical Nano-particles having Magnetic Resonance Fabricated by Hydrogen Annealing Peer-reviewed

Yosuke Abe, Yoshiaki Kanamori, Kazuhiro Hane

Technical Digest: 9th International Conference on Optics-Photonics Design & Fabrication　371-372　2014/02/12

Wavelength-selective Optical Attenuators using Plasmonic Nano-resonator Array for Silicon waveguides Peer-reviewed

Taiyo Takahashi, Yoshiaki Kanamori, Kazuhiro Hane

Technical Digest: 9th International Conference on Optics-Photonics Design & Fabrication　383-384　2014/02/12

Comparison of electromagnetically induced transparency between silver, gold, and aluminum metamaterials at visible wavelengths Peer-reviewed

Ryohei Hokari, Yoshiaki Kanamori, Kazuhiro Hane

OPTICS EXPRESS　22　(3)　3526-3537　2014/02

DOI： 10.1364/OE.22.003526 　

ISSN： 1094-4087

lambda/8 PRECISION PARABOLIC RESONANT VARIFOCAL MIRROR Peer-reviewed

Kenta Nakazawa, Takashi Sasaki, Kazuhiro Hane

2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)　101-102　2014

ISSN： 2160-5033

50 mu M GAP 8x8 PIXELS DEFORMABLE MIRROR FABRICATED BY MEMB NE TRANSFER PROCESS Peer-reviewed

T. Wu, T. Sasaki, M. Akiyama, K. Hane

2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)　171-172　2014

ISSN： 2160-5033

PHOTONIC-CRYSTAL-WAVEGUIDE-ASSISTED DIRECTIONAL COUPLERS FOR HYBRID SI/GAN NANOPHOTONICS Peer-reviewed

Borriboon Thubthimthong, Takashi Sasaki, Kazuhiro Hane

2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)　201-202　2014

ISSN： 2160-5033

DYNAMIC RESPONSE OF SILICON PHOTONIC VARIABLE-GAP WAVGUIDE COUPLER SWITCH Peer-reviewed

S. Abe, M. H. Chu, T. Sasaki, K. Hane

2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)　79-80　2014

ISSN： 2160-5033

Simultaneous measurement of bend direction and degree of curvature using micromachined grating fibers Peer-reviewed

Hironori Kumazaki, Munehiro Hiramatsu, Hisakazu Oguri, Seiki Inaba, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　134　(3)　41-46　2014

DOI： 10.1541/ieejsmas.134.41 　

ISSN： 1341-8939 1347-5525

Fabrication of ultrasonic sensors using micro cantilevers and characteristic measurement in vacuum for acoustic emission sensing Peer-reviewed

Kengo Takata, Takashi Sasaki, Mitsuyuki Tanaka, Hiroshi Saito, Daisuke Matsuura, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　134　(7)　2-217　2014

DOI： 10.1541/ieejsmas.134.212 　

ISSN： 1347-5525 1341-8939

Large-scale membrane transfer process: its application to single-crystal-silicon continuous membrane deformable mirror Peer-reviewed

Tong Wu, Takashi Sasaki, Masayuki Akiyama, Kazuhiro Hane

JOURNAL OF MICROMECHANICS AND MICROENGINEERING　23　(12)　125003-1-125003-11　2013/12

DOI： 10.1088/0960-1317/23/12/125003 　

ISSN： 0960-1317

eISSN： 1361-6439

Numerical study on resonant wavelength control of split ring resonators with inductance variable structures in the optical wavelength region Peer-reviewed

Ryohei Hokari, Yoshiaki Kanamori, Kazuhiro Hane

Transactions of the Materials Research Society of Japan　38　(4)　615-618　2013/12

DOI： 10.14723/tmrsj.38.615 　

ISSN： 1382-3469

Comparison of electromagnetically induced transparency between silver and gold metamaterials at wavelengths around 800 nm Peer-reviewed

R. Hokari, Y. Kanamori, K. Hane

Digest of 26th International Microprocesses and Nanotechnology Conference (MNC 2013)　7P-7-123L-1-7P-7-123L-2　2013/11/05

A tunable notch filter using microelectromechanical microring with gap-variable busline coupler Peer-reviewed

Taro Ikeda, Kazuhiro Hane

OPTICS EXPRESS　21　(19)　22034-22042　2013/09

DOI： 10.1364/OE.21.022034 　

ISSN： 1094-4087

A 20nm Free-Spectral Range Optical Filter Based on NEM-Tunable Silicon Photonic Waveguide Micro-Ring Resonator

Hoang Manh Chu, Takashi Sasaki, Yoshiaki Kanamori, Kazuhiro Hane

Abstract: The 4th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS2013)　2013/08/22

Characterization of GaN Nanowall Network and Optical Property of InGaN/GaN Quantum Wells by Molecular Beam Epitaxy Peer-reviewed

Aihua Zhong, Kazuhiro Hane

JAPANESE JOURNAL OF APPLIED PHYSICS　52　(8)　08JE13-1-08JE13-4　2013/08

DOI： 10.7567/JJAP.52.08JE13 　

ISSN： 0021-4922

eISSN： 1347-4065

Fabrication of electromagnetically-induced-transparency-like metamaterials in the near-infrared region

Ryohei Hokari, Yoshiaki Kanamori, Kazuhiro Hane

Abstract of 3rd Korea-Japan Metamaterials Forum　76-77　2013/06/26

Nonlinear spring effect of tense thin-film torsion bar combined with electrostatic driving Peer-reviewed

Subrata Kumar Kundu, Shouhei Ogawa, Shinya Kumagai, Masayuki Fujishima, Kazuhiro Hane, Minoru Sasaki

SENSORS AND ACTUATORS A-PHYSICAL　195　83-89　2013/06

DOI： 10.1016/j.sna.2013.03.009 　

ISSN： 0924-4247

A Compact 1 x 3 Silicon Photonic Waveguide Switch Based on Precise Investigation of Coupling Characteristics of Variable-Gap Coupler Peer-reviewed

Yasushi Munemasay, Kazuhiro Hane

JAPANESE JOURNAL OF APPLIED PHYSICS　52　(6)　06GL15-1-06GL15-6　2013/06

DOI： 10.7567/JJAP.52.06GL15 　

ISSN： 0021-4922

A microelectromechanically tunable microring resonator composed of freestanding silicon photonic waveguide couplers Peer-reviewed

Taro Ikeda, Kazuhiro Hane

APPLIED PHYSICS LETTERS　102　(22)　221113-1-221113-4　2013/06

DOI： 10.1063/1.4809733 　

ISSN： 0003-6951

Fabrication of Silicon Microdisk Resonators with Movable Waveguides for Control of Power Coupling Ratio Peer-reviewed

Yoshiaki Kanamori, Yuichi Sato, Kazuhiro Hane

JAPANESE JOURNAL OF APPLIED PHYSICS　52　(6)　06GL19-1-06GL19-5　2013/06

DOI： 10.7567/JJAP.52.06GL19 　

ISSN： 0021-4922

An analytical coupling coefficient for MEMS tunable silicon nanowire waveguide coupler devices Peer-reviewed

Y. Akihama, K. Hane

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS　19　(4)　583-589　2013/04

DOI： 10.1007/s00542-012-1661-3 　

ISSN： 0946-7076

eISSN： 1432-1858

Electric feed-through for vacuum package using double-side anodic bonding of silicon-on-insulator wafer Peer-reviewed

Hoang Manh Chu, Hung Ngoc Vu, Kazuhiro Hane

JOURNAL OF ELECTROSTATICS　71　(2)　130-133　2013/04

DOI： 10.1016/j.elstat.2012.12.028 　

ISSN： 0304-3886

Micromirrors connected in series for low voltage operation in vacuum Peer-reviewed

Seibou Kotani, Hoang Manh Chu, Takashi Sasaki, Kazuhiro Hane

Journal of Vacuum Science and Technology B　31　(4)　42001-1-42001-6　2013/04

DOI： 10.1116/1.4807847 　

Variable-Gap Silicon Photonic Waveguide Coupler Switch With a Nanolatch Mechanism Peer-reviewed

Syotaro Abe, Kazuhiro Hane

IEEE PHOTONICS TECHNOLOGY LETTERS　25　(7)　675-677　2013/04

DOI： 10.1109/LPT.2013.2248354 　

ISSN： 1041-1135

Fast guided mode of a photonic crystal waveguide Peer-reviewed

Borriboon Thubthimthong, Kazuhiro Hane

International Conference on Optical MEMS and Nanophotonics　133-134　2013

DOI： 10.1109/OMN.2013.6659095 　

ISSN： 2160-5033 2160-5041

Displacement-amplified dynamic varifocal mirror using mechanical resonance Peer-reviewed

Takashi Sasaki, Daiki Sato, Kazuhiro Hane

International Conference on Optical MEMS and Nanophotonics　161-162　2013

DOI： 10.1109/OMN.2013.6659109 　

ISSN： 2160-5033 2160-5041

Monolithic displacement encoder sensor integrating GaN LED and Si photodiodes Peer-reviewed

S. Nagai, T. Sasaki, H. Kawaguchi, A. Iwabuchi, K. Hane

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013　972-975　2013

DOI： 10.1109/Transducers.2013.6626931 　

A confocal laser scanning endoscope using a varifocal scanning mirror Peer-reviewed

T. Sasaki, K. Hane

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013　1412-1415　2013

DOI： 10.1109/Transducers.2013.6627043 　

15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror Peer-reviewed

T. Wu, T. Sasaki, M. Akiyama, K. Hane

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013　2501-2504　2013

DOI： 10.1109/Transducers.2013.6627314 　

The effect of fabrication errors in gold nanostructures of optical metamaterials Peer-reviewed

Hokari Ryohei, Kanamori Yoshiaki, Hane Kazuhiro

Proceedings of JIEP Annual Meeting　27　(0)　379-381　2013

DOI： 10.11486/ejisso.27.0_379 　

A continuous single-crystal-silicon membrane deformable mirror using bimorph spring Peer-reviewed

Tong Wu, Takashi Sasaki, Masayuki Akiyama, Kazuhiro Hane

MEMS ADAPTIVE OPTICS VII　8617　2013

DOI： 10.1117/12.2002785 　

ISSN： 0277-786X

Ultra-low power Si-photonic variable-gap coupler switch with nano-latch mechanism Peer-reviewed

S. Abe, Y. Munemasa, Y. Kanamori, K. Hane

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013　904-907　2013

DOI： 10.1109/Transducers.2013.6626914 　

Transmission width (Q-factor) tunable silicon-photonic micro-ring resonators Peer-reviewed

Mustafa Ordu, Yoshiaki Kanamori, Kazuhiro Hane

International Conference on Optical MEMS and Nanophotonics　87-88　2013

DOI： 10.1109/OMN.2013.6659072 　

ISSN： 2160-5033 2160-5041

Fabrication of antireflection subwavelength gratings at the tips of optical fibers using UV nanoimprint lithography Peer-reviewed

Yoshiaki Kanamori, Masaaki Okochi, Kazuhiro Hane

OPTICS EXPRESS　21　(1)　322-328　2013/01

DOI： 10.1364/OE.21.000322 　

ISSN： 1094-4087

Wavelength characteristics of gap-variable silicon nanowire waveguide coupler switch using micro actuator Peer-reviewed

Yasushi Munemasa, Yuta Akihama, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　133　(3)　5-89　2013

DOI： 10.1541/ieejsms.133.85 　

ISSN： 1341-8939 1347-5525

Transmission-width-tunable silicon-photonic microelectromechanical ring resonator Peer-reviewed

Mustafa Ordu, Kazuhiro Hane

IEEE Photonics Technology Letters　25　(22)　2236-2238　2013

DOI： 10.1109/LPT.2013.2285130 　

ISSN： 1041-1135

Growth of GaN nanowall network on Si (111) substrate by molecular beam epitaxy Peer-reviewed

Aihua Zhong, Kazuhiro Hane

NANOSCALE RESEARCH LETTERS　7　(12)　686-1-686-7　2012/12

DOI： 10.1186/1556-276X-7-686 　

ISSN： 1931-7573

Low Voltage Operation Electrostatic Comb Drive Micro-Mirror for Laser Scanning Display Peer-reviewed

Hoang Manh Chu, Hung Vu Ngoc, Kazuhiro Hane

Vietnam Journal of Mechanics　34　(4)　1-10　2012/11

Fabrication of Silicon Microdisk Resonators with Monolithically Integrated Comb-Drive Microactuators Peer-reviewed

Yuichi SATO, Yoshiaki KANAMORI, Kazuhiro HANE

Digest of 25th International Microprocesses and Nanotechnology Conference (MNC 2012)　1P-7-96　2012/10/30

Coupling properties of freestanding silicon nanowire waveguide couplers with a gap-variable mechanism Peer-reviewed

Y. Akihama, Y. Munemasa, Y. Kanamori, K. Hane

Digest of 25th International Microprocesses and Nanotechnology Conference (MNC 2012)　2B-8-2　2012/10/30

A Study of MEMS Tunable Metamaterial at Optical Frequencies by Numerical Calculations Peer-reviewed

R. Hokari, Y. Kanamori, K. Hane

Abstracts: IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)　B-9-O24-018　2012/09/21

Deformation of varifocal mirror with narrow frame by SOI wafer residual stress Peer-reviewed

Takashi Sasaki, Kazuhiro Hane

ELECTRONICS AND COMMUNICATIONS IN JAPAN　95　(8)　26-33　2012/08

DOI： 10.1002/ecj.11381 　

ISSN： 1942-9533

Varifocal Micromirror Integrated With Comb-Drive Scanner on Silicon-on-Insulator Wafer Peer-reviewed

Takashi Sasaki, Kazuhiro Hane

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS　21　(4)　971-980　2012/08

DOI： 10.1109/JMEMS.2012.2189936 　

ISSN： 1057-7157

Numerical study on optical characteristics of tunable metamaterials at optical frequencies with variable capacitance

Ryohei Hokari, Yoshiaki Kanamori, Kazuhiro Hane

Abstract: The 2nd Japan-Korea Metamaterials Forum　78-79　2012/06/28

Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers Peer-reviewed

Yuta Akihama, Kazuhiro Hane

LIGHT-SCIENCE & APPLICATIONS　1　e16-1-e16-8　2012/06

DOI： 10.1038/lsa.2012.16 　

ISSN： 2047-7538

Fabrication of Antireflective Subwavelength-Grating Structures on Optical Fiber End Faces Using UV Nanoimprinting Technique Peer-reviewed

金森義明, 大河内昌章, 羽根一博

日本機械学会論文集（C編）　78　(790)　2322-2330　2012/06

Micro-mirror laser scanner combined with a varifocal mirror Peer-reviewed

R. Hokari, K. Hane

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS　18　(4)　475-480　2012/04

DOI： 10.1007/s00542-011-1416-6 　

ISSN： 0946-7076

Fabrication of freestanding membrane GaN light-emitting diode on Si substrate for MEMS applications Peer-reviewed

T. Tanae, H. Kawaguchi, A. Iwabuchi, K. Hane

International Conference on Optical MEMS and Nanophotonics　31-32　2012

DOI： 10.1109/OMEMS.2012.6318787 　

ISSN： 2160-5033 2160-5041

Compound switch consisting of gap-variable silicon nanowire waveguide couplers Peer-reviewed

Y. Akihama, Y. Munemasa, Y. Kanamori, K. Hane

Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012　875-876　2012

DOI： 10.1109/OECC.2012.6276674 　

Design and fabrication of GaN crystal ultra-small lateral comb-drive actuators Peer-reviewed

Takuma Tanae, Hidehisa Sameshima, Kazuhiro Hane

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics　30　(1)　2012

DOI： 10.1116/1.3668114 　

ISSN： 2166-2754 2166-2746

InGaN/GaN quantum wells grown on freestanding HfO2 photonic crystals Peer-reviewed

Yongjin Wang, Tong Wu, Fangren Hu, Hongbo Zhu, Kazuhiro Hane

PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 3-4　9　(3-4)　601-604　2012

DOI： 10.1002/pssc.201100320 　

ISSN： 1862-6351

Analysis of Hard Spring Effect of Tense Poly-Si Torsion Bar of Micromirror Peer-reviewed

Subrata Kumar Kundu, Shouhei Ogawa, Shinya Kumagai, Masayuki Fujishima, Kazuhiro Hane, Minoru Sasaki

2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)　162-+　2012

III-nitride grown on freestanding GaN nanostructures Peer-reviewed

Yongjin Wang, Fangren Hu, Hongbo Zhu, Kazuhiro Hane

PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 3-4　9　(3-4)　554-557　2012

DOI： 10.1002/pssc.201100265 　

ISSN： 1862-6351

Si photonic nano-wire tunble micro-ring resonator composed of triply-liked variable couplers Peer-reviewed

Taro Ikeda, Yoshiaki Kanamori, Kazuhiro Hane

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　660-663　2012

DOI： 10.1109/MEMSYS.2012.6170273 　

ISSN： 1084-6999

An improved gap-variable silicon nano-wire waveguide coupler switch

Yasushi Munemasa, Yuta Akihama, Yoshiaki Kanamori, Kazuhiro Hane

International Conference on Optical MEMS and Nanophotonics　111-112　2012

DOI： 10.1109/OMEMS.2012.6318827 　

ISSN： 2160-5033 2160-5041

Single layer silicon photonic crystal slab Peer-reviewed

Yongjin Wang, Yoshiaki Kanamori, Hongbo Zhu, Kazuhiro Hane

PHOTONICS AND NANOSTRUCTURES-FUNDAMENTALS AND APPLICATIONS　10　(1)　146-152　2012/01

DOI： 10.1016/j.photonics.2011.10.002 　

ISSN： 1569-4410

eISSN： 1569-4429

Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer Peer-reviewed

P. Li, T. Sasaki, L. F. Pan, K. Hane

OPTICS EXPRESS　20　(1)　627-634　2012/01

DOI： 10.1364/OE.20.000627 　

ISSN： 1094-4087

Design and fabrication of GaN crystal ultra-small lateral comb-drive actuators Peer-reviewed

Takuma Tanae, Hidehisa Sameshima, Kazuhiro Hane

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　30　(1)　012001-1-012001-8　2012/01

DOI： 10.1116/1.3668114 　

ISSN： 1071-1023

Micro fluorescent analysis system integrating GaN-light-emitting-diode on a silicon platform Peer-reviewed

Hiroto Nakazato, Hiroko Kawaguchi, Akio Iwabuchi, Kazuhiro Hane

LAB ON A CHIP　12　(18)　3419-3425　2012

DOI： 10.1039/c2lc40178a 　

ISSN： 1473-0197

Initial deflection of silicon-on-insulator thin membrane micro-mirror and fabrication of varifocal mirror Peer-reviewed

Takashi Sasaki, Kazuhiro Hane

SENSORS AND ACTUATORS A-PHYSICAL　172　(2)　516-522　2011/12

DOI： 10.1016/j.sna.2011.09.042 　

ISSN： 0924-4247

Ultra-small silicon waveguide coupler switch using gap-variable mechanism Peer-reviewed

Yuta Akihama, Yoshiaki Kanamori, Kazuhiro Hane

OPTICS EXPRESS　19　(24)　23658-23663　2011/11

DOI： 10.1364/OE.19.023658 　

ISSN： 1094-4087

MEMS Tunable Silicon Nano-Wire Air-Gap Coupling for Coupler Switch and Interferometer

Y. Akihama, T. Ikeda, Y. Kanamori, K. Hane

Proceedings of 17th Microoptics Conference (MOC'11)　H-14　2011/10/30

The resonant III-nitride grating reflector Peer-reviewed

Yongjin Wang, Tong Wu, Takuma Tanae, Hongbo Zhu, Kazuhiro Hane

JOURNAL OF MICROMECHANICS AND MICROENGINEERING　21　(10)　105025-1-105025-6　2011/10

DOI： 10.1088/0960-1317/21/10/105025 　

ISSN： 0960-1317

eISSN： 1361-6439

Fabrication of a high-precision spherical micromirror by bending a silicon plate with a metal pad Peer-reviewed

Tong Wu, Kazuhiro Hane

APPLIED OPTICS　50　(27)　5321-5328　2011/09

DOI： 10.1364/AO.50.005321 　

ISSN： 1559-128X

eISSN： 2155-3165

Ill-Nitride grating grown on freestanding HfO2 gratings Peer-reviewed

Yongjin Wang, Tong Wu, Fangren Hu, Yoshiaki Kanamori, Hongbo Zhu, Kazuhiro Hane

NANOSCALE RESEARCH LETTERS　6　497-1-497-5　2011/08

DOI： 10.1186/1556-276X-6-497 　

ISSN： 1931-7573

Integration of MEMS Actuators with Nanophotonics: Silicon Submicron-wide Waveguide Switches for Optical-path changes Invited

Kazuhiro Hane, Yoshiaki Kanamori

Conference Program on The 16th Opto-Electronics and Communications Conference　494-495　2011/07/04

Compact slanted comb two-axis micro-mirror scanner fabricated by silicon-on-insulator micromachining Peer-reviewed

Hoang Manh Chu, Jun Mizuno, Kazuhiro Hane, Toshiyuki Takagi

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　29　(4)　042001-1-042001-7　2011/07

DOI： 10.1116/1.3605301 　

ISSN： 1071-1023

Silicon submicron waveguide and MEMS tunable optical telecommunication devices Invited

Kazuhiro Hane, Yoshiaki Kanamori

Proceedings of International Conference on Micro/Nano Optical Engineering　13-14　2011/06/12

Spherical silicon micromirrors bent by anodic bonding Peer-reviewed

Tong Wu, Takahiro Yamasaki, Ryohei Hokari, Kazuhiro Hane

OPTICS EXPRESS　19　(12)　11897-11905　2011/06

DOI： 10.1364/OE.19.011897 　

ISSN： 1094-4087

Lateral epitaxial overgrowth of GaN on a patterned GaN-on-silicon substrate by molecular beam epitaxy Peer-reviewed

Yongjin Wang, Fangren Hu, Kazuhiro Hane

SEMICONDUCTOR SCIENCE AND TECHNOLOGY　26　(4)　045015-045015(6pp)　2011/04

DOI： 10.1088/0268-1242/26/4/045015 　

ISSN： 0268-1242

eISSN： 1361-6641

Freestanding HfO2 grating fabricated by fast atom beam etching Peer-reviewed

Yongjin Wang, Tong Wu, Yoshiaki Kanamori, Kazuhiro Hane

NANOSCALE RESEARCH LETTERS　6　367-1-367-5　2011/04

DOI： 10.1186/1556-276X-6-367 　

ISSN： 1556-276X

Investigation of strain sensing effect in modified single-defect photonic crystal nanocavity Peer-reviewed

Bui Thanh Tung, Dzung Viet Dao, Taro Ikeda, Yoshiaki Kanamori, Kazuhiro Hane, Susumu Sugiyama

OPTICS EXPRESS　19　(9)　8821-8829　2011/04

DOI： 10.1364/OE.19.008821 　

ISSN： 1094-4087

Comb-drive GaN micro-mirror on a GaN-on-silicon platform Peer-reviewed

Yongjin Wang, Takashi Sasaki, Tong Wu, Fangren Hu, Kazuhiro Hane

JOURNAL OF MICROMECHANICS AND MICROENGINEERING　21　(3)　035012-1-035012-5　2011/03

DOI： 10.1088/0960-1317/21/3/035012 　

ISSN： 0960-1317

A GaN Electromechanical Tunable Grating on Si Substrate Peer-reviewed

Hidehisa Sameshima, Takuma Tanae, Kazuhiro Hane

IEEE PHOTONICS TECHNOLOGY LETTERS　23　(5)　281-283　2011/03

DOI： 10.1109/LPT.2010.2102346 　

ISSN： 1041-1135

Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner Peer-reviewed

Hoang Manh Chu, Kazuhiro Hane

SENSORS AND ACTUATORS A-PHYSICAL　165　(2)　422-430　2011/02

DOI： 10.1016/j.sna.2010.11.004 　

ISSN： 0924-4247

Varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer Peer-reviewed

T. Sasaki, K. Hane

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11　570-573　2011

DOI： 10.1109/TRANSDUCERS.2011.5969716 　

Design, fabrication, and vacuum package process for high performance of 2D scanning MEMS micromirror Peer-reviewed

H. M. Chu, T. Sasaki, K. Hane

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11　558-561　2011

DOI： 10.1109/TRANSDUCERS.2011.5969713 　

Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining Peer-reviewed

P. Li, T. Sasaki, L. F. Pan, K. Hane

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11　1546-1549　2011

DOI： 10.1109/TRANSDUCERS.2011.5969734 　

Continuous membrane deformable mirror for adaptive optics using bimorph spring Peer-reviewed

T. Wu, M. Akiyama, K. Hane

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11　598-601　2011

DOI： 10.1109/TRANSDUCERS.2011.5969726 　

Comb-drive III-nitride micro mirror fabricated by fast atom beam etching Peer-reviewed

Y. J. Wang, T. Sasaki, T. Wu, F. R. Hu, K. Hane

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11　1324-1327　2011

DOI： 10.1109/TRANSDUCERS.2011.5969494 　

Compact slanted comb two-axis micro-mirror scanner fabricated by silicon-on-insulator micromachining Peer-reviewed

Hoang Manh Chu, Jun Mizuno, Kazuhiro Hane, Toshiyuki Takagi

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics　29　(4)　2011

DOI： 10.1116/1.3605301 　

ISSN： 2166-2754 2166-2746

Mechanical stress sensors using micromachined grating fibers Peer-reviewed

Hironori Kumazaki, Munehiro Hiramatsu, Hisakazu Oguri, Seiki Inaba, Kazuhiro Hane

21ST INTERNATIONAL CONFERENCE ON OPTICAL FIBER SENSORS　7753　2011

DOI： 10.1117/12.882857 　

ISSN： 0277-786X

Antireflective Subwavelength Gratings on the End Faces of Optical Fibers Fabricated by UV Nanoimprint Lithography Peer-reviewed

Yoshiaki Kanamori, Masaaki Okochi, Kazuhiro Hane

OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS　65-66　2011

Longitudinal strain sensitive effect in a photonic crystal cavity Peer-reviewed

Bui Thanh Tung, Dzung Viet Dao, Taro Ikeda, Yoshiaki Kanamori, Kazuhiro Hane, Susumu Sugiyama

EUROSENSORS XXV　25　2011

DOI： 10.1016/j.proeng.2011.12.335 　

ISSN： 1877-7058

Silicon subwavelength gratings for reflective color filters with wide viewing angle Peer-reviewed

Toshikazu Ozaki, Yoshiaki Kanamori, Kazuhiro Hane

International Conference on Optical MEMS and Nanophotonics　93-94　2011

DOI： 10.1109/OMEMS.2011.6031094 　

ISSN： 2160-5033 2160-5041

Patterned growth of InGaN/GaN quantum wells on freestanding GaN grating by molecular beam epitaxy Peer-reviewed

Yongjin Wang, Fangren Hu, Kazuhiro Hane

NANOSCALE RESEARCH LETTERS　6　(1)　117-1-117-7　2011

DOI： 10.1186/1556-276X-6-117 　

ISSN： 1556-276X

Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications Peer-reviewed

M. Wakui, H. Sameshima, F. -R. Hu, K. Hane

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS　17　(1)　109-114　2011/01

DOI： 10.1007/s00542-010-1151-4 　

ISSN： 0946-7076

Deformation of varifocal mirror with narrow frame by SOI wafer residual stress Peer-reviewed

Takashi Sasaki, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　131　(8)　310-315　2011

DOI： 10.1541/ieejsmas.131.310 　

ISSN： 1341-8939 1347-5525

Fabrication of high-quality diffractive-lens mold having submicron patterns Peer-reviewed

Do-Kyun Woo, Kazuhiro Hane, Sun-Kyu Lee

Transactions of the Korean Society of Mechanical Engineers, A　34　(11)　1637-1642　2010/11

DOI： 10.3795/KSME-A.2010.34.11.1637 　

ISSN： 1226-4873

Enhancement of light extraction from freestanding GaN nanocolumn slab with bottom subwavelength nanostructures Peer-reviewed

Y. Wang, F. Hu, Y. Kanamori, T. Wu, K. Hane

Applied Physics B: Lasers and Optics　101　(3)　575-581　2010/11

DOI： 10.1007/s00340-010-4131-6 　

ISSN： 0946-2171

Fabrication of antireflective subwavelength gratings on the end faces of single mode optical fibers using UV nanoimprint lithography

Masaaki Okochi, Yoshiaki Kanamori, Kazuhiro Hane

Digest of Papers: 2010 International Microprocesses and Nanotechnology Conference (MNC2010)　12D-11-92　2010/10/26

Compact Low-Voltage Operation Micromirror Based on High-Vacuum Seal Technology Using Metal Can Peer-reviewed

Hoang Manh Chu, Takayuki Tokuda, Masafumi Kimata, Kazuhiro Hane

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS　19　(4)　927-935　2010/08

DOI： 10.1109/JMEMS.2010.2055545 　

ISSN： 1057-7157

Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode Peer-reviewed

R. Ito, M. Wakui, H. Sameshima, F. -R. Hu, K. Hane

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS　16　(6)　1015-1020　2010/06

DOI： 10.1007/s00542-010-1079-8 　

ISSN： 0946-7076

eISSN： 1432-1858

Buckled Bridges Using Film Stress for Three-Dimensional Structures: Effects of Lateral Designs on Vertical Profiles and Dynamic Characteristics Peer-reviewed

Minoru Sasaki, Kazuhiro Hane, Danick Briand, Wilfried Noel, Nicolaas F. de Rooij

IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING　5　(2)　131-136　2010/03

DOI： 10.1002/tee.20507 　

ISSN： 1931-4973

eISSN： 1931-4981

Growth of GaN LED Structure on Si Substrate by MBE and Monolithic Fabrication of GaN LED Cooling System Peer-reviewed

Masashi Wakui, Fang-Ren Hu, Hidehisa Sameshima, Kazuhiro Hane

IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING　5　(2)　171-174　2010/03

DOI： 10.1002/tee.20513 　

ISSN： 1931-4973

eISSN： 1931-4981

近赤外光用サブ波長反射防止構造の光学設計および自己組織化ナノ微粒子を用いた製作 Peer-reviewed

金森義明, 灰田周平, 羽根一博

電気学会論文誌E　130　(3)　92-96　2010/03

DOI： 10.1541/ieejsmas.130.92 　

Large area, freestanding GaN nanocolumn membrane with bottom subwavelength nanostructure Peer-reviewed

Yongjin Wang, Fangren Hu, Yoshiaki Kanamori, Tong Wu, Kazuhiro Hane

OPTICS EXPRESS　18　(6)　5504-5511　2010/03

DOI： 10.1364/OE.18.005504 　

ISSN： 1094-4087

Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator Peer-reviewed

Taro Ikeda, Kazunori Takahashi, Yoshiaki Kanamori, Kazuhiro Hane

OPTICS EXPRESS　18　(7)　7031-7037　2010/03

DOI： 10.1364/OE.18.007031 　

ISSN： 1094-4087

Freestanding GaN slab fabricated on patterned silicon on an insulator substrate Peer-reviewed

Yongjin Wang, Fangren Hu, Kazuhiro Hane

JOURNAL OF MICROMECHANICS AND MICROENGINEERING　20　(2)　027001-1-027001-5　2010/02

DOI： 10.1088/0960-1317/20/2/027001 　

ISSN： 0960-1317

eISSN： 1361-6439

Fabrication and characterization of subwavelength nanostructures on freestanding GaN slab Peer-reviewed

Yongjin Wang, Fangren Hu, Yoshiaki Kanamori, Hidehisa Sameshima, Kazuhiro Hane

OPTICS EXPRESS　18　(3)　2940-2945　2010/02

DOI： 10.1364/OE.18.002940 　

ISSN： 1094-4087

Fast atom beam-based fabrication of high-efficienct blazed grating using slanting angle control of a substrate Peer-reviewed

ChaBum Lee, Kazuhiro Hane, Sun-Kyu Lee

2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010　149-150　2010

DOI： 10.1109/OMEMS.2010.5672141 　

GaN pitch-variable grating fabricated on Si substrate Peer-reviewed

H. Sameshima, T. Tanae, F. Hu, K. Hane

2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010　79-80　2010

DOI： 10.1109/OMEMS.2010.5672174 　

Nanoscale epitaxial growth of GaN on freestanding circular GaN grating Peer-reviewed

Yongjin Wang, Fangren Hu, Kazuhiro Hane

2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010　163-164　2010

DOI： 10.1109/OMEMS.2010.5672132 　

Vacuum operation characteristics of two-dimensional micro-mirror Peer-reviewed

Hoang Manh Chu, Kazuhiro Hane

2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010　113-114　2010

DOI： 10.1109/OMEMS.2010.5672159 　

Piezoresistive Rotation Angle Sensor in Micromirror for Feedback Control Peer-reviewed

Takuro Aonuma, Shinya Kumagai, Minoru Sasaki, Motoki Tabata, Kazuhiro Hane

SERVICE ROBOTICS AND MECHATRONICS　299-+　2010

Submicron silicon waveguide Mach-Zehnder interferometer using micro electro-mechanical phase-shifter

T. Ikeda, Y. Kanamori, K. Hane

2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010　97-98　2010

DOI： 10.1109/OMEMS.2010.5672167 　

Narrow-bandwidth tunable bandstop filters with circularly cylindrical self-suspended silicon gratings Peer-reviewed

Jia-Sheng Ye, Yoshiaki Kanamori, Fang-Ren Hu, Kazuhiro Hane

OPTIK　121　(15)　1389-1394　2010

DOI： 10.1016/j.ijleo.2009.01.026 　

ISSN： 0030-4026

Fabrication and characterization of freestanding circular GaN gratings Peer-reviewed

Yongjin Wang, Fangren Hu, Hidehisa Sameshima, Kazuhiro Hane

OPTICS EXPRESS　18　(2)　773-779　2010/01

DOI： 10.1364/OE.18.000773 　

ISSN： 1094-4087

Fabrication of antireflective subwavelength-grating structures on optical fiber end faces using nanoimprinting technique Peer-reviewed

Yoshiaki Kanamori, Masaaki Okouchi, Kazuhiro Hane

Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C　76　(771)　2854-2860　2010

DOI： 10.1299/kikaic.76.2854 　

ISSN： 0387-5024

Fabrication of variable-reflection photonic crystal MEMS filters using subwavelength-grating-embedded substrates

Y. Kanamori, S. Haida, K. Hane

Digest of Papers: 2009 International Microprocesses and Nanotechnology Conference (MNC2009)　116-117　2009/11/16

Freestanding circular GaN grating fabricated by fast-atom beam etching Invited Peer-reviewed

Yongjin Wang, Fangren Hu, Masashi Wakui, Kazuhiro Hane

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING　97　(1)　39-43　2009/10

DOI： 10.1007/s00339-009-5376-y 　

ISSN： 0947-8396

Vacuum operation of comb-drive micro display mirrors Peer-reviewed

Chu Hoang Manh, Kazuhiro Hane

JOURNAL OF MICROMECHANICS AND MICROENGINEERING　19　(10)　105018(8pp)-105018(8pp)　2009/10

DOI： 10.1088/0960-1317/19/10/105018 　

ISSN： 0960-1317

eISSN： 1361-6439

An ultrasmall wavelength-selective channel drop switch using a nanomechanical photonic crystal nanocavity Peer-reviewed

Yoshiaki Kanamori, Kazunori Takahashi, Kazuhiro Hane

APPLIED PHYSICS LETTERS　95　(17)　171911-1-171911-3　2009/10

DOI： 10.1063/1.3254247 　

ISSN： 0003-6951

A Varifocal Convex Micromirror Driven by a Bending Moment Peer-reviewed

Ryohei Hokari, Kazuhiro Hane

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS　15　(5)　1310-1316　2009/09

DOI： 10.1109/JSTQE.2009.2017034 　

ISSN： 1077-260X

eISSN： 1558-4542

A Freestanding GaN/HfO2 Membrane Grown by Molecular Beam Epitaxy for GaN-Si Hybrid MEMS Peer-reviewed

Hidehisa Sameshima, Masashi Wakui, Fang-Ren Hu, Kazuhiro Hane

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS　15　(5)　1332-1337　2009/09

DOI： 10.1109/JSTQE.2009.2017031 　

ISSN： 1077-260X

Simultaneous Realization of Stabilized Temperature Characteristics and Low-Voltage Driving of a Micromirror Using the Thin-Film Torsion Bar of Tensile Poly-Si Peer-reviewed

Minoru Sasaki, Masayuki Fujishima, Kazuhiro Hane, Hideo Miura

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS　15　(5)　1455-1462　2009/09

DOI： 10.1109/JSTQE.2009.2022281 　

ISSN： 1077-260X

Freestanding GaN Resonant Gratings at Telecommunication Range Peer-reviewed

Yongjin Wang, Fangren Hu, Masashi Wakui, Kazuhiro Hane

IEEE PHOTONICS TECHNOLOGY LETTERS　21　(17)　1184-1186　2009/09

DOI： 10.1109/LPT.2009.2024221 　

ISSN： 1041-1135

Design and Fabrication of Structural Color Filters with Polymer-Based Guided-Mode Resonant Gratings by Nanoimprint Lithography Peer-reviewed

Yoshiaki Kanamori, Hiroki Katsube, Tomonobu Furuta, Shoji Hasegawa, Kazuhiro Hane

JAPANESE JOURNAL OF APPLIED PHYSICS　48　(6)　06FH04-1-06FH04-4　2009/06

DOI： 10.1143/JJAP.48.06FH04 　

ISSN： 0021-4922

GaN-based nitride semiconductor films deposited on nitrified HfO2/Si substrate by molecular beam epitaxy Peer-reviewed

F. R. Hu, H. Sameshima, M. Wakui, R. Ito, K. Hane

JOURNAL OF CRYSTAL GROWTH　311　(10)　2996-2999　2009/05

DOI： 10.1016/j.jcrysgro.2009.01.133 　

ISSN： 0022-0248

Tunable optical filters with nanostructured suspended gratings Peer-reviewed

Jia-Sheng Ye, Takashi Kobayashi, Yoshiaki Kanamori, Fang-Ren Hu, Kazuhiro Hane

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　27　(3)　1035-1038　2009/05

DOI： 10.1116/1.3114465 　

ISSN： 1071-1023

Development of an integral optics system for a slim optical mouse in a slim portable electric device Peer-reviewed

Do-Kyun Woo, Kazuhiro Hane, Seong-Cheon Cho, Sun-Kyu Lee

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　27　(3)　1422-1427　2009/05

DOI： 10.1116/1.3046151 　

ISSN： 1071-1023

Submicrometer Comb-Drive Actuators Fabricated on Thin Single Crystalline Silicon Layer Peer-reviewed

Kazunori Takahashi, Erdal Bulgan, Yoshiaki Kanamori, Kazuhiro Hane

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS　56　(4)　991-995　2009/04

DOI： 10.1109/TIE.2008.2006934 　

ISSN： 0278-0046

Characteristics and Improved Design of Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device Peer-reviewed

Takuro Aonuma, Shinya Kumagai, Minoru Sasaki, Motoki Tabata, Kazuhiro Hane

JAPANESE JOURNAL OF APPLIED PHYSICS　48　(4)　04C191-1-04C191-6　2009/04

DOI： 10.1143/JJAP.48.04C191 　

ISSN： 0021-4922

Improved first Rayleigh-Sommerfeld method applied to metallic cylindrical focusing micro mirrors Peer-reviewed

Jia-Sheng Ye, Yan Zhang, Kazuhiro Hane

OPTICS EXPRESS　17　(9)　7348-7360　2009/04

DOI： 10.1364/OE.17.007348 　

ISSN： 1094-4087

Pitch-variable blazed grating consisting of freestanding silicon beams Peer-reviewed

Yongjin Wang, Yoshiaki Kanamori, Kazuhiro Hane

OPTICS EXPRESS　17　(6)　4419-4426　2009/03

DOI： 10.1364/OE.17.004419 　

ISSN： 1094-4087

Fabrication and characterization of nanoscale resonant gratings on thin silicon membrane Peer-reviewed

Yongjin Wang, Yoshiaki Kanamori, Jiasheng Ye, Hidehisa Sameshima, Kazuhiro Hane

OPTICS EXPRESS　17　(7)　4938-4943　2009/03

DOI： 10.1364/OE.17.004938 　

ISSN： 1094-4087

Design and fabrication of freestanding pitch-variable blazed gratings on a silicon-on-insulator wafer Peer-reviewed

Yongjin Wang, Yoshiaki Kanamori, Takashi Sasaki, Kazuhiro Hane

JOURNAL OF MICROMECHANICS AND MICROENGINEERING　19　(2)　025019-1-025019-7　2009/02

DOI： 10.1088/0960-1317/19/2/025019 　

ISSN： 0960-1317

Development of an integral optics system for a slim optical mouse in a slim portable electric device Peer-reviewed

Do-Kyun Woo, Kazuhiro Hane, Seong-Cheon Cho, Sun-Kyu Lee

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics　27　(3)　1422-1427　2009

DOI： 10.1116/1.3046151 　

ISSN： 2166-2754 2166-2746

Wireless driving of micromirror using electromagnetic induction Peer-reviewed

Minoru Sasaki, Narimune Ohnishi, Shinya Kumagai, Kazuhiro Hane

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009　11-12　2009

DOI： 10.1109/OMEMS.2009.5338629 　

Air friction loss of comb drive resonant micro mirrors for laser scanning display Peer-reviewed

Chu Hoang Manh, Kazuhiro Hane

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009　125-126　2009

DOI： 10.1109/OMEMS.2009.5338561 　

GaN-LED grown on SI substrate by MBE/MOCVD and monolithic fabrication of a light distribution variable device Peer-reviewed

M. Wakui, R. Ito, H. Sameshima, F. R. Hu, K. Hane

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems　1349-1352　2009

DOI： 10.1109/SENSOR.2009.5285851 　

Connection characteristics of silicon nanowire waveguides and fabrication of physical contact switches

E. Bulgan, Y. Kanamori, K. Hane

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems　505-508　2009

DOI： 10.1109/SENSOR.2009.5285372 　

Pitch-variable MEMS grating with 4-level blazed surface

Y. Wang, Y. Kanamori, K. Hane

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems　1345-1348　2009

DOI： 10.1109/SENSOR.2009.5285850 　

MBE fabrication of GaN-based light emitting diode on MOCVD grown GaN-on-Si template and application for optical MEMS Peer-reviewed

Masashi Wakui, Ryousuke Ito, Fang-Ren Hu, Hidehisa Sameshima, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　129　(3)　77-80　2009

DOI： 10.1541/ieejsmas.129.77 　

ISSN： 1341-8939 1347-5525

Fabrication of subwavelength gratings on silicon micro lenses for MEMS scanners at optical communication wavelengths Peer-reviewed

Yoshiaki Kanamori, Mao Miura, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　129　(4)　120-124　2009

DOI： 10.1541/ieejsmas.129.120 　

ISSN： 1341-8939 1347-5525

Stress control of silicon membrane for optical scanner with deformable mirror Peer-reviewed

Takashi Sasaki, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　129　(5)　138-141　2009

DOI： 10.1541/ieejsmas.129.138 　

ISSN： 1341-8939 1347-5525

Fabrication of a diffraction grating on end face of a light guide plate using imprint lithography Peer-reviewed

Yoshiaki Kanamori, Chika Hishinuma, Kazuhiro Hane

Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C　75　(759)　2853-2858　2009

DOI： 10.1299/kikaic.75.2853 　

ISSN： 0387-5024

High order diffraction grating using v-shaped groove with refractive and reflective surfaces Peer-reviewed

Do-Kyun Woo, Kazuhiro Hane, Sun-Kyu Lee

OPTICS EXPRESS　16　(25)　21004-21011　2008/12

DOI： 10.1364/OE.16.021004 　

ISSN： 1094-4087

Surface transformation of silicon nanostructures using a developed hydrogen annealing machine and its application to silicon subwavelength gratings

S. Fujihira, Y. Kanamori, K. Hane

Digest of Papers: 2008 International Microprocesses and Nanotechnology Conference (MNC2008)　234-235　2008/10/27

Silicon substrates with antireflection subwavelength gratings for optical communication devices fabricated with nano-particle masks

S. Haida, Y. Kanamori, K. Hane

Digest of Papers: 2008 International Microprocesses and Nanotechnology Conference (MNC2008)　236-237　2008/10/27

Fabrication of variable drop filters with resonant cavities in photonic crystals using thin comb-drive actuators

Y. Kanamori, K. Takahashi, K. Hane

Digest of Papers: 2008 International Microprocesses and Nanotechnology Conference (MNC2008)　520-521　2008/10/27

A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator Peer-reviewed

Kazunori Takahashi, Yoshiaki Kanamori, Yasuo Kokubun, Kazuhiro Hane

OPTICS EXPRESS　16　(19)　14421-14428　2008/09

DOI： 10.1364/OE.16.014421 　

ISSN： 1094-4087

Photolithography for three-dimensional wiring and MEMS devices (2) patterning Peer-reviewed

Minoru Sasaki, Kazuhiro Hane

Journal of Japan Institute of Electronics Packaging　11　(4)　307-310　2008/07

DOI： 10.5104/jiep.11.307 　

ISSN： 1343-9677

Resonant-wavelength tuning of a pitch-variable 1-D photonic crystal filter at telecom frequencies Peer-reviewed

Yoshiaki Kanamori, Naoki Matsuyama, Kazuhiro Hane

IEEE PHOTONICS TECHNOLOGY LETTERS　20　(13-16)　1136-1138　2008/07

DOI： 10.1109/LPT.2008.924655 　

ISSN： 1041-1135

Fabrication of analog- and digital-modulated pitch-variable gratings using silicon-on-insulator substrates Peer-reviewed

Yoshiaki Kanamori, Takashi Kobayashi, Kazuhiro Hane

JAPANESE JOURNAL OF APPLIED PHYSICS　47　(6)　5274-5277　2008/06

DOI： 10.1143/JJAP.47.5274 　

ISSN： 0021-4922

Design of retrodiffraction gratings for polarization-insensitive and polarization-sensitive characteristics by using the Taguchi method Peer-reviewed

ChaBum Lee, Kazuhiro Hane, WanSoo Kim, Sun-Kyu Lee

APPLIED OPTICS　47　(18)　3246-3253　2008/06

DOI： 10.1364/AO.47.003246 　

ISSN： 1559-128X

eISSN： 2155-3165

Photolithography for three-dimensional wiring and MEMS devices (1) spray coating of resist film Peer-reviewed

Minoru Sasaki, Kazuhiro Hane, Seiji Aoyagi

Journal of Japan Institute of Electronics Packaging　11　(3)　239-241　2008/05

DOI： 10.5104/jiep.11.239 　

ISSN： 1343-9677

Development of a compact vacuum- and hydrogen-annealing machine for surface transformation of silicon and its applications to micro-optical devices Peer-reviewed

Yoshiaki Kanamori, Kenichi Douzono, Shinya Fujihira, Kazuhiro Hane

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A　26　(3)　365-369　2008/05

DOI： 10.1116/1.2897317 　

ISSN： 0734-2101

High-sensitivity mid-ultraviolet Pt/Mg0.59Zn0.41O schottky photodiode on a ZnO single crystal substrate Peer-reviewed

Haruyuki Endo, Michiko Kikuchi, Masahumi Ashioi, Yasuhiro Kashiwaba, Kazuhiro Hane, Yasube Kashiwaba

APPLIED PHYSICS EXPRESS　1　(5)　051201-1-051201-3　2008/05

DOI： 10.1143/APEX.1.051201 　

ISSN： 1882-0778

eISSN： 1882-0786

Silicon suspended resonant grating filters fabricated from a silicon-on-insulator wafer Peer-reviewed

Jia-Sheng Ye, Naoki Matsuyama, Yoshiaki Kanamori, Kazuhiro Hane

IEEE PHOTONICS TECHNOLOGY LETTERS　20　(9-12)　851-853　2008/05

DOI： 10.1109/LPT.2008.921840 　

ISSN： 1041-1135

Fabrication of a multi-level lens using independent-exposure lithography and FAB plasma etching Peer-reviewed

Do Kyun Woo, Kazuhiro Hane, Sun-Kyu Lee

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS　10　(4)　2008/04

DOI： 10.1088/1464-4258/10/4/044001 　

ISSN： 1464-4258

An optically flat micromirror using a stretched membrane with crystallization-induced stress Peer-reviewed

Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS　10　(4)　2008/04

DOI： 10.1088/1464-4258/10/4/044004 　

ISSN： 1464-4258

The optimization of sawtooth gratings using RCWA and its fabrication on a slanted silicon substrate by fast atom beam etching Peer-reviewed

ChaBum Lee, Kazuhiro Hane, SunKyu Lee

JOURNAL OF MICROMECHANICS AND MICROENGINEERING　18　(4)　045014-1-045014-8　2008/04

DOI： 10.1088/0960-1317/18/4/045014 　

ISSN： 0960-1317

Large-displacement Micro-XY-stage with paired moving plates Peer-reviewed

Minoru Sasaki, Fuminori Bono, Kazuhiro Hane

JAPANESE JOURNAL OF APPLIED PHYSICS　47　(4)　3226-3231　2008/04

DOI： 10.1143/JJAP.47.3226 　

ISSN： 0021-4922

MEMS structures for assisting assembly Peer-reviewed

Minora Sasaki, Kazuhiro Hane

Journal of Japan Institute of Electronics Packaging　11　(2)　164-167　2008/03

DOI： 10.5104/jiep.11.164 　

ISSN： 1343-9677

Submicron silicon waveguide optical switch driven by microelectromechanical actuator Peer-reviewed

Erdal Bulgan, Yoshiaki Kanamori, Kazuhiro Hane

APPLIED PHYSICS LETTERS　92　(10)　101110-1-101110-3　2008/03

DOI： 10.1063/1.2892677 　

ISSN： 0003-6951

1-1 Imaging Spectroscopy Using Guided-mode Resonant Grating Filter

SATO Hiroaki, KAWAKAMI Tohru, KATAGIRI Baku, UCHIDA Tatsuo, KANAMORI Yoshiaki, HANE Kazuhiro

PROCEEDINGS OF THE ITE WINTER ANNUAL CONVENTION　2008　_1-1-1_　2008

DOI： 10.11485/itewac.2008.0__1-1-1_ 　

ISSN： 1343-4357

Trials for matching the fabrication of MEMS devices and assembly Peer-reviewed

Minoru Sasaki, Kazuhiro Hane

Journal of Japan Institute of Electronics Packaging　11　(1)　100-103　2008/01

DOI： 10.5104/jiep.11.100 　

ISSN： 1343-9677

GaN-Si-MEMS structure fabricated from nano-column GaN quantum well crystal grown on Si substrate Peer-reviewed

F. R. Hu, R. Ito, Y. Zhao, K. Hane

Physica Status Solidi (C) Current Topics in Solid State Physics　5　(6)　1941-1943　2008

DOI： 10.1002/pssc.200778497 　

ISSN： 1862-6351 1610-1642

Nonlinear rotational spring with tension for stabilizing electrostatically driven micromirror Peer-reviewed

Minoru Sasaki, Shinya Kumagai, Kazuhiro Hane

2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008　225-230　2008

DOI： 10.1109/MHS.2008.4752454 　

Stabilization of Temperature Characteristics of Micromirror for Low-Voltage Driving Using Thin Film Torsion Bar of Tensile Poly-Si Peer-reviewed

Minoru Sasaki, Masayuki Fujishima, Kazuhiro Hane, Hideo Miura

2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS　120-+　2008

Optical scanner with deformable mirror fabricated from SOI wafer Peer-reviewed

Takashi Sasaki, Kazuhiro Hane

2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS　96-97　2008

Formation of a nitrified hafnium oxide buffer layer on silicon substrate and GaN quantum well crystal growth for GaN-Si hybrid optical MEMS Peer-reviewed

H. Sameshima, M. Wakui, R. Ito, F. R. Hu, K. Hane

2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS　188-189　2008

Silicon microring resonator connected with submicorn comb actuator Peer-reviewed

K. Takahashi, Y. Kanamori, K. Hane

2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS　23-24　2008

Silicon self-suspended resonant grating filters at telecommunication wavelength

Jia-Sheng Ye, Naoki Matsuyama, Yoshiaki Kanamori, Kazuhiro Hane

2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS　2008

DOI： 10.1109/CLEO.2008.4551736 　

A Varifocal Micromirror with Pure Parabolic Surface using Bending Moment Drive Peer-reviewed

Ryohei Hokari, Kazuhiro Hane

2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS　92-93　2008

DOI： 10.1109/OMEMS.2008.4607844 　

A 100 nm thick InGaN/GaN multiple quantum-well column-crystallized thin film deposited on Si(111) substrate and its micromachining Peer-reviewed

F. R. Hu, Y. Kanamori, K. Ochi, Y. Zhao, M. Wakui, K. Hane

NANOTECHNOLOGY　19　(3)　035305-1-035305-6　2008/01

DOI： 10.1088/0957-4484/19/03/035305 　

ISSN： 0957-4484

Theoretical analysis of mechanical-contact-based submicron-Si-waveguide optical microswitch at telecommunication wavelengths Peer-reviewed

Erdal Bulgan, Yoshiaki Kanamori, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　128　(3)　80-84　2008

DOI： 10.1541/ieejsmas.128.80 　

ISSN： 1341-8939 1347-5525

Development of MEMS capacitive sensor using a MOSFET structure Peer-reviewed

Hayato Izumi, Yohei Matsumoto, Seiji Aoyagi, Yusaku Harada, Shoso Shingubara, Minoru Sasaki, Kazuhiro Hane, Hiroshi Tokunaga

IEEJ Transactions on Sensors and Micromachines　128　(3)　102-107　2008

DOI： 10.1541/ieejsmas.128.102 　

ISSN： 1341-8939 1347-5525

GaN-Si-MEMS structure fabricated from nano-column GaN quantum well crystal grown on Si substrate Peer-reviewed

F. R. Hu, R. Ito, Y. Zhao, K. Hane

PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 6　5　(6)　1941-1943　2008

DOI： 10.1002/pssc.200778497 　

ISSN： 1610-1634

Fabrication and characteristics of a Pt/MgxZn1-xO Schottky photodiode on a ZnO single crystal Peer-reviewed

H. Endo, M. Sugibuchi, K. Takahashi, S. Goto, K. Hane, Y. Kashiwaba

PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 9　5　(9)　3119-3121　2008

DOI： 10.1002/pssc.200779179 　

ISSN： 1862-6351

Parametric optimization of narrow bandstop optical filters using the self-suspended subwavelength grating for TE polarization Peer-reviewed

Jia-Sheng Ye, Yoshiaki Kanamori, Fang-Ren Hu, Kazuhiro Hane

JOURNAL OF MODERN OPTICS　55　(10)　1519-1528　2008

DOI： 10.1080/09500340701721876 　

ISSN： 0950-0340

Compact triangulation sensor realized by bending Si wafer with optical elements at metal hinges Peer-reviewed

Minora Sasaki, Satoshi Endou, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　128　(6)　3-276　2008

DOI： 10.1541/ieejsmas.128.271 　

ISSN： 1341-8939 1347-5525

Subwavelength gratings combined with MEMS Invited

K. Hane, J.-S. Ye, Y. Kanamori

Proceedings of The 14th International Display Workshops　2　1383-1385　2007/12/06

A micro-displacement encoder using a thin-film resonant photodetector with directional sensitivity Peer-reviewed

Bong-Seok Choi, Yoshiaki Kanamori, Kazuhiro Hane

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS　9　(11)　1087-1094　2007/11

DOI： 10.1088/1464-4258/9/11/020 　

ISSN： 1464-4258

Micromachined surface emitting dye laser with a self-suspended guided mode resonant grating Peer-reviewed

Naoki Matsuyama, Yoshiaki Kanamori, Jia-Sheng Ye, Kazuhiro Hane

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS　9　(10)　940-944　2007/10

DOI： 10.1088/1464-4258/9/10/026 　

ISSN： 1464-4258

Angled exposure method for pattering on three-dimensional structures Peer-reviewed

Vijay Kumar Singh, Minoru Sasaki, Kazuhiro Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　46　(9B)　6449-6453　2007/09

DOI： 10.1143/JJAP.46.6449 　

ISSN： 0021-4922

Displacement sensor based on grating imaging with a cylindrical lens array and a phase grating Peer-reviewed

Toru Oka, Yoichi Ohmura, Hajime Nakajima, Toshiro Nakashima, Wei Gao, Kazuhiro Hane, Satoshi Kiyono

OPTICAL ENGINEERING　46　(7)　073603-1-073603-8　2007/07

DOI： 10.1117/1.2753185 　

ISSN： 0091-3286

Phase sensitive photodiode based on guided resonant absorption Peer-reviewed

Bong-Seok Choi, Yoshiaki Kanamori, Kazuhiro Hane

APPLIED PHYSICS LETTERS　90　(24)　241114-1-241114-3　2007/06

DOI： 10.1063/1.2749180 　

ISSN： 0003-6951

Nanocolumn InGaN/GaN quantum-well crystals on flat anf pillared Si substrates with nitrified Ga as a buffer layer Peer-reviewed

F.R. Hu, K. Ochi, Y. Zhao, K. Hane

Nanotechnology　18　275605-1-275605-6　2007/06

Out-of-plane motion of 260-mn thick guided-mode resonant grating filter controlled by four micro-thermal actuators Peer-reviewed

Yoshiaki Kanamori, Takashi Kitani, Kazuhiro Hane

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS　13　(8-10)　867-872　2007/05

DOI： 10.1007/s00542-006-0286-9 　

ISSN： 0946-7076

Polymer microstructure generated by laser stereo-lithography and its transfer to silicon substrate using reactive ion etching Peer-reviewed

Yoshiaki Kanamori, Junya Sato, Takeshi Shimano, Shigeo Nakamura, Kazuhiro Hane

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS　13　(8-10)　1411-1416　2007/05

DOI： 10.1007/s00542-007-0380-7 　

ISSN： 0946-7076

Geometric characteristics of silicon cavities etched in EDP Peer-reviewed

Hui Ju, Takayuki Ohta, Masafumi Ito, Minoru Sasaki, Kazuhiro Hane, Masaru Hori

JOURNAL OF MICROMECHANICS AND MICROENGINEERING　17　(5)　1012-1016　2007/05

DOI： 10.1088/0960-1317/17/5/022 　

ISSN： 0960-1317

eISSN： 1361-6439

Schottky ultraviolet photodiode using a ZnO hydrothermally grown single crystal substrate Peer-reviewed

Haruyuki Endo, Mayo Sugibuchi, Kousuke Takahashi, Shunsuke Goto, Shigeaki Sugimura, Kazuhiro Hane, Yasube Kashiwaba

APPLIED PHYSICS LETTERS　90　(12)　121906-1-121906-3　2007/03

DOI： 10.1063/1.2715100 　

ISSN： 0003-6951

Fabrication of MOSFET Capacitive Sensor using Spray Coating Method Peer-reviewed

S. Aoyagi, Y. Matsui, K. Makihira, H. Tokunaga, M. Sasaki, K. Hane

電気学会論文誌Ｅ　127　(3)　153-159　2007/03

DOI： 10.1541/ieejsmas.127.153 　

ISSN： 1341-8939

Performance of tense thin-film torsion bar for large rotation and low-voltage driving of micromirror Peer-reviewed

Minoru Sasaki, Shinya Yuki, Kazuhiro Hane

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS　13　(2)　290-296　2007/03

DOI： 10.1109/JSTQE.2007.892078 　

ISSN： 1077-260X

Fabrication and Characterization of a Schottky Barrier Diode-Type Ultraviolet Sensor using a ZnO Single Crystal Peer-reviewed

Haruyuki Endo, Mayo Sugibuchi, Kohsuke Takahashi, Shunsuke Goto, Tatsuo Hasegawa, Eriko Ohshima, Kazuyuki Meguro, Kazuhiro Hane, Yasube Kashiwaba

電気学会論文誌E　127　(3)　131-135　2007/03

DOI： 10.1541/ieejsmas.127.131 　

ISSN： 1341-8939

Rigorous reflectance performance analysis of Si3N4 self-suspended subwavelength gratings Peer-reviewed

Jia-Sheng Ye, Yoshiaki Kanamori, Fang-Ren Hu, Kazuhiro Hane

OPTICS COMMUNICATIONS　270　(2)　233-237　2007/02

DOI： 10.1016/j.optcom.2006.09.028 　

ISSN： 0030-4018

Design and Fabrication of a Thin-Film Silicon Photodetector with Angular Sensitivity for Optical Micro-Encoder

Choi Bongseok, Kanamori Yoshiaki, Hane Kazuhiro

The Journal of the Institute of Electrical Engineers of Japan　127　(6)　309-313　2007

DOI： 10.1541/ieejsmas.127.309 　

ISSN： 1341-8939

Development of laser dresser for resin bonded diamond wheel Peer-reviewed

Hiroshi Matsuura, Kazuhiro Hane, Yasuhiro Kunieda, Nobuhito Yoshihara, Jiwang Yan, Tsunemoto Kuriyagawa

Key Engineering Materials　329　169-174　2007

DOI： 10.4028/0-87849-416-2.169 　

ISSN： 1013-9826

Driving of micromirror and simultaneous detection of rotation angle using integrated piezoresistive sensor Peer-reviewed

Minoru Sasaki, Motoki Tabata, Kazuhiro Hane

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2　2007

Monolithic fabrication of GaN/Si structure for optical MEMS Peer-reviewed

R. Ito, F. R. Hu, M. Wakui, K. Hane

IDW '07: PROCEEDINGS OF THE 14TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3　1375-1377　2007

Optically flat micromirror designs using stretched membrane with crystallization-induced stress Peer-reviewed

Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura

2007 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2　709-+　2007

ISSN： 1092-8081

Flower-structured InGaN/GaN quantum-well nanodisk crystals on micromachined Si pillars Peer-reviewed

R. Ito, F. R. Hu, K. Ochi, Y. Zbao, K. Hane

2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS　183-184　2007

Passivated piezoresistive rotation angle sensor integrated in micromirror Peer-reviewed

Minoru Sasaki, Motoki Tabat, Kazuhiro Hane

2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS　193-+　2007

A displacement sensor based on directional resonant photodetector

B. S. Choi, Y. Kanamori, K. Hane

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems　2　2357-2360　2007

DOI： 10.1109/SENSOR.2007.4300643 　

Mechanical-contact-based submicron-si-waveguide optical microswitch at telecommunication wavelengths

E. Bulgan, Y. Kanamori, K. Hane

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS　93-94　2007

DOI： 10.1109/OMEMS.2007.4373856 　

Self-supported pitch-variable guided-mode resonant grating filters at telecom wavelengths

Y. Kanamori, N. Matsuyama, J. S. Ye, K. Hane

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS　99-100　2007

DOI： 10.1109/OMEMS.2007.4373859 　

Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators

Y. Kanamori, T. Kobayashi, K. Hane

Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC　380-381　2007

DOI： 10.1109/IMNC.2007.4456263 　

Tunable vertical comb for driving micromirror realized by bending device wafer Peer-reviewed

Minoru Sasaki, Masahiro Ishimori, JongHyeong Song, Kazuhiro Hane

IEICE TRANSACTIONS ON ELECTRONICS　E90C　(1)　147-148　2007/01

DOI： 10.1093/ietele/e90-c.1.147 　

ISSN： 0916-8524

eISSN： 1745-1353

Micromirror with two parallel rotation axes for external cavity diode laser Peer-reviewed

Masahiro Ishimori, Minoru Sasaki, Kazuhiro Hane

IEICE TRANSACTIONS ON ELECTRONICS　E90C　(1)　72-77　2007/01

DOI： 10.1093/ietele/e90-c.1.72 　

ISSN： 0916-8524

eISSN： 1745-1353

Control of guided resonance in a photonic crystal slab using microelectromechanical actuators Peer-reviewed

Yoshiaki Kanamori, Takashi Kitani, Kazuhiro Hane

APPLIED PHYSICS LETTERS　90　(3)　031911-1-3　2007/01

DOI： 10.1063/1.2431452 　

ISSN： 0003-6951

Photonic crystal waveguide switches with movable slabs Invited Peer-reviewed

Kazuhiro Hane, Ken-ichi Umemori, Yoshiaki Kanamori

IEICE TRANSACTIONS ON ELECTRONICS　E90C　(1)　51-58　2007/01

DOI： 10.1093/ietele/e90-c.1.51 　

ISSN： 0916-8524

eISSN： 1745-1353

Narrow-band tunable optical filters using the self-suspended subwavelength grating Peer-reviewed

Jia-Sheng Ye, Yoshiaki Kanamori, Fang-Ren Hu, Kazuhiro Hane

JOURNAL OF MODERN OPTICS　54　(6)　827-832　2007

DOI： 10.1080/09500340601066042 　

ISSN： 0950-0340

InGaN/GaN quantum-well nanocolumn crystals on pillared Si substrate with InN as interlayer Peer-reviewed

F. R. Hu, K. Ochi, Y. Zhao, K. Hane

PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 4 NO 7 2007　4　(7)　2338-+　2007

DOI： 10.1002/pssc.200674734 　

ISSN： 1862-6351

Fabrication of a multi-level lens using independent-exposure lithography and FAB plasma etching Peer-reviewed

Do Kyun Woo, Kazuhiro Hane, Cha Bum Lee, Sun Kyu Lee

2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS　10　(044001)　151-+　2007

DOI： 10.1088/1464-4258/10/4/044001 　

Optically flat micromirror using stretched membrane with crystallization-induced stress Peer-reviewed

Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura

2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS　10　(044004)　27-+　2007

DOI： 10.1088/1464-4258/10/4/044004 　

Tunable Optical Filters by Using the Self-Suspended Subwavelength Gratings

Jia-Sheng Ye, Yoshiaki Kanamori, Fang-Ren Hu, Kazuhiro Hane

Technical Digest of 5th International Conference of Optics-photonics Design & Fabrication (ODF'06, Nara)　57-58　2006/12/06

Photonic structure and materials combined with micro/nano-electro-mechanical systems

Kazuhiro Hane, Fang-Ren Hu, Yoshiaki Kanamori

Proceedings of the 1st international workshop on functional materials - 3rd international workshop on nanophysics and nanotechnology conference　575-576　2006/12/06

High-efficiency light-emitting column-crystallized InGaN/GaN quantum-well flower structure on micropillared Si substrate Peer-reviewed

F. R. Hu, K. Ochi, Y. Zhao, K. Hane

APPLIED PHYSICS LETTERS　89　(17)　171903-1-171903-3　2006/10

DOI： 10.1063/1.2365839 　

ISSN： 0003-6951

Molecular beam epitaxial growth of GaN thin film on Si substrate with InN as interlayer Peer-reviewed

F. R. Hu, K. Ochi, Y. Zhao, B. S. Choi, K. Hane

JOURNAL OF CRYSTAL GROWTH　294　(2)　197-201　2006/09

DOI： 10.1016/j.jcrysgro.2006.07.009 　

ISSN： 0022-0248

Self-supported subwavelength gratings with a broad band of high reflectance analysed by the rigorous coupled-wave method Peer-reviewed

J-S. Ye, Y. Kanamori, F-R. Hu, K. Hane

JOURNAL OF MODERN OPTICS　53　(14)　1995-2004　2006/09

DOI： 10.1080/09500340600761635 　

ISSN： 0950-0340

Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates Peer-reviewed

Yoshiaki Kanamori, Masaya Shimono, Kazuhiro Hane

IEEE PHOTONICS TECHNOLOGY LETTERS　18　(17-20)　2126-2128　2006/09

DOI： 10.1109/LPT.2006.883208 　

ISSN： 1041-1135

Growth of GaN quantum well film on Si substrate and its application to a GaN-Si hybrid lightning device

F .R .Hu, R. Ito, Y. Zhao, Y. Kanamori, K. Hane

Proceedings of 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications (Optical MEMS 2006)　27-28　2006/08/21

Movable Guided-Mode Resonant Grating Filters by Four Bimorph Actuators for Wavelength Selective Dynamic Reflection Control

Y. Kanamori, T. Kitani, K. Hane

Proceedings of 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications (Optical MEMS 2006)　68-69　2006/08/21

A photonic crystal waveguide switch with a movable bridge slab

K. Umemori, Y. Kanamori, K. Hane

Proceedings of 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications (Optical MEMS 2006)　72-73　2006/08/21

Photonic crystal waveguide switch with a microelectromechanical actuator Peer-reviewed

Ken-ichi Umemori, Yoshiaki Kanamori, Kazuhiro Hane

APPLIED PHYSICS LETTERS　89　(2)　021102-1-3　2006/07

DOI： 10.1063/1.2219996 　

ISSN： 0003-6951

Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar Peer-reviewed

Minoru Sasaki, Shinya Yuki, Kazuhiro Hane

IEEE PHOTONICS TECHNOLOGY LETTERS　18　(13-16)　1573-1575　2006/07

DOI： 10.1109/LPT.2006.879587 　

ISSN： 1041-1135

Wavelength selective variable reflection filter driven by micro-thermal actuators

Yoshiaki Kanamori, Takashi Kitani, Kazuhiro Hane

Program and Extended Abstracts: 2006 Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006)　S15_03　2006/06/21

Fabrication of micro-lenses using stereo-lithography and reactive ion etching

Junya Sato, Yoshiaki Kanamori, Takeshi Shimano, Shigeo Nakamura, Kazuhiro Hane

Program and Extended Abstracts: 2006 Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006)　S25_01　2006/06/21

位相シフトマスクを利用した立体サンプルの露光法 Peer-reviewed

佐々木実, 陳俊中エドウィン, 羽根一博

電気学会論文誌E　126　(6)　241-242　2006/06

DOI： 10.1541/ieejsmas.126.241 　

Piezoresistive rotation angle sensor integrated in micromirror Peer-reviewed

M Sasaki, M Tabata, T Haga, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　45　(4B)　3789-3793　2006/04

DOI： 10.1143/JJAP.45.3789 　

ISSN： 0021-4922

Variable optical reflectance of a self-supported Si grating Peer-reviewed

K Hane, T Kobayashi, FR Hu, Y Kanamori

APPLIED PHYSICS LETTERS　88　(14)　141109-1-3　2006/04

DOI： 10.1063/1.2193989 　

ISSN： 0003-6951

分割した櫛歯電極型静電駆動アクチュエータ Peer-reviewed

佐々木実, 坊野史典, 羽根一博

電気学会論文誌E　126　(4)　168-169　2006/04

DOI： 10.1541/ieejsmas.126.168 　

Guided-mode resonant grating filter fabricated on silicon-on-insulator substrate Peer-reviewed

Y Kanamori, T Kitani, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　45　(3A)　1883-1885　2006/03

DOI： 10.1143/JJAP.45.1883 　

ISSN： 0021-4922

Imaging with a rectangular phase grating applied to displacement metrology Peer-reviewed

Y Ohmura, T Oka, T Nakashima, K Hane

APPLIED OPTICS　45　(8)　1713-1720　2006/03

DOI： 10.1364/AO.45.001713 　

ISSN： 1559-128X

eISSN： 2155-3165

Micromirror with thin film torsion bar and vertical comb using tensile poly-si

Masayuki Fujishima, Minoru Sasaki, Kazuhiro Hane

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006　108-109　2006

DOI： 10.1109/omems.2006.1708288 　

Micromirror integrated with piezoresistive rotation angle sensor for measuring small signal

Motoki Tabata, Minoru Sasaki, Kazuhiro Hane

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006　62-63　2006

XY-stage for scanning media for optical data storage

Minoru Sasaki, Fuminori Bono, Kazuhiro Hane

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006　36-37　2006

DOI： 10.1109/omems.2006.1708252 　

W2 Progress in optical MEMS development and the necessity of material strength evaluation

Hane Kazuhiro

Proceedings of the 1992 Annual Meeting of JSME/MMD　2006　495-496　2006

DOI： 10.1299/jsmezairiki.2006.0_495 　

Tunable guided mode resonant gratings for passive and active devices: Si subwavelength MEMS structures and the combination with GaN film Peer-reviewed

FR Hu, T Kobayashi, K Ochi, BS Choi, Y Zhao, Y Kanamori, K Hane

ICO20: MEM, MOEMS, AND NEMS　6032　2006

DOI： 10.1117/12.667847 　

ISSN： 0277-786X

Compact triangulation sensor realized by bending wafer with metal hinge - art. no. 618606 Peer-reviewed

Minoru Sasaki, Satoshi Endou, Masayuki Fujishima, Kazuhiro Hane

MEMS, MOEMS, and Micromachining II　6186　18606-18606　2006

DOI： 10.1117/12.662466 　

ISSN： 0277-786X

A microtranslation table with scratch-drive actuators fabricated from silicon-on-insulator wafer Peer-reviewed

Y Kanamori, H Yahagi, K Hane

SENSORS AND ACTUATORS A-PHYSICAL　125　(2)　451-457　2006/01

DOI： 10.1016/j.sna.2005.06.017 　

ISSN： 0924-4247

Design of a thin film photodetector with. angular sensitivity for optical micro-encoder Peer-reviewed

Bongseok Choi, Yoshiald Kanamori, Kazuhiro Hane

2006 IEEE SENSORS, VOLS 1-3　127　(6)　279-+　2006

DOI： 10.1541/ieejsmas.127.309 　

ISSN： 1930-0395

Deposition of thin and uniform photoresist on three-dimensional structures using fast flow in spray coating Peer-reviewed

VK Singh, M Sasaki, K Hane, Y Watanabe, H Takamatsu, M Kawakita, H Hayashi

JOURNAL OF MICROMECHANICS AND MICROENGINEERING　15　(12)　2339-2345　2005/12

DOI： 10.1088/0960-1317/15/12/016 　

ISSN： 0960-1317

eISSN： 1361-6439

Micro/Nano Opt-Mechanical Systems Using Silicon Micromachining Technology

K. Hane, M. Sasaki, Y. Kanamori, F. R. Hu

Proceedings of Nanoengineering Symposium 2005　118-122　2005/10/26

Surface laser emission from solid polymer dye in a guided mode resonant grating filter structure Peer-reviewed

T Kobayashi, Y Kanamori, K Hane

APPLIED PHYSICS LETTERS　87　(15)　151106　2005/10

DOI： 10.1063/1.2081116 　

ISSN： 0003-6951

eISSN： 1077-3118

Modified photo-sensors for grating-image type micro-encoder Peer-reviewed

Y Kanamori, R Kamata, M Mitamura, Y Ito, K Hane

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS　11　(8-10)　980-986　2005/08

DOI： 10.1007/s00542-005-0503-y 　

ISSN： 0946-7076

GaN film growth on Si substrate for monolithic optical MEMS

F.-R. Hu, K. Ochi, B.-S. Choi, Y. Kanamori, K. Hane

Proceedings of ASME InterPACK'05　2005/07/17

Subwavelength structure for anti-reflection in solar cell applications

H. Sai, K. Tsuji, K. Arafune, Y. Ohshita, Y. Kanamori, K. Hane, H. Yugami, M. Yamaguchi

Proceedings of 20th European Photovoltaic Solar Energy Conference　148-151　2005/06/06

ファイバ型光制御デバイスのための三次元的微細加工 Peer-reviewed

熊崎裕教, 稲葉成基, 羽根一博, 那須祐治

電気学会論文誌E　125-E　(5)　211-215　2005/05

DOI： 10.1541/ieejsmas.125.211 　

Technique for preparing defect-free spray coated resist film on three-dimensional micro-electromechanical systems Peer-reviewed

VK Singh, M Sasaki, JH Song, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　44　(4A)　2016-2020　2005/04

DOI： 10.1143/JJAP.44.2016 　

ISSN： 0021-4922

Compact triangulation sensor array constructed by wafer bending Peer-reviewed

S Endou, M Ishimori, M Sasaki, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　44　(4B)　2874-2878　2005/04

DOI： 10.1143/JJAP.44.2874 　

ISSN： 0021-4922

Studies of integrated variable optical devices fabricated by micro- and nano-machining

Yoshiaki Kanamori, Minoru Sasaki, Kazuhiro Hane

Proceedings: The 3rd International Symposium on Nanotechnology: JAPAN NANO 2005　82-83　2005/02/21

Displacement metrology based on grating imaging with a cylindrical lens array and a phase grating Peer-reviewed

Toru Oka, Yoichi Ohmura, Toshiro Nakashima, Wei Gao, Kazuhiro Hane, Satoshi Kiyono

Proceedings of SPIE - The International Society for Optical Engineering　5858　1-8　2005

DOI： 10.1117/12.612088 　

ISSN： 0277-786X

Photolithography on three-dimrnsional structures using spray coated negative and positive photoresists Peer-reviewed

V. K. Singh, M. Sasaki, K. Hane, Y. Watanabe, M. Kawakita, H. Hayashi

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05　2　1445-1448　2005

DOI： 10.1109/SENSOR.2005.1497354 　

Real-time spectroscopy of charge-transfer excitation in phthalocyanine tin dichloride Peer-reviewed

M Hirasawa, Y Sakazaki, H Hane, T Kobayashi

ULTRAFAST PHENOMENA XIV　79　471-473　2005

ISSN： 0172-6218

Mirror with two parallel rotation axes for external cavity laser Peer-reviewed

M Ishimori, M Sasaki, K Hane

IEEE/LEOS OPTICAL MEMS 2005: INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND THEIR APPLICATIONS　93-94　2005

Amplitude spectra of molecular vibration modes in phthalocyanine: comparison with Raman excitation profile Peer-reviewed

T Kobayashi, M Hirasawa, Y Sakazaki, H Hane

ULTRAFAST PHENOMENA XIV　79　371-373　2005

ISSN： 0172-6218

Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar Peer-reviewed

S Yuuki, M Sasaki, K Hane

Transducers '05, Digest of Technical Papers, Vols 1 and 2　1163-1166　2005

GaN film growth on Si substrate for sub-wavelength optical MEMS

F. R. Hu, K. Ochi, B. S. Choi, Y. Kanamori, K. Hane

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05　1　1043-1046　2005

DOI： 10.1109/SENSOR.2005.1496634 　

Resonance in a self-supported vacuum grating for tunable optical filters: Theoretical approach

Y. Kanamori, T. Kobayashi, K. Hane

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest　2005　1289-1290　2005

DOI： 10.1109/CLEOPR.2005.1569725 　

A Surface emitting solid polymer dye laser using a guided mode resonant grating for bio-optical detections

T. Kobayashi, Y. Kanamori, K. Hane

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications　101-102　2005

DOI： 10.1109/OMEMS.2005.1540097 　

Fiber-optical switch using cam-micromotor driven by scratch drive actuators Peer-reviewed

Y Kanamori, Y Aoki, M Sasaki, H Hosoya, A Wada, K Hane

JOURNAL OF MICROMECHANICS AND MICROENGINEERING　15　(1)　118-123　2005/01

DOI： 10.1088/0960-1317/15/1/018 　

ISSN： 0960-1317

eISSN： 1361-6439

Micro-encoder using image obtained by ball lens assembled inside wafer Peer-reviewed

M Sasaki, F Nakai, K Hane, K Yokomizo, K Hori

IEEE/LEOS Optical MEMs 2005: International Conference on Optical MEMs and Their Applications　8　125-126　2005

DOI： 10.1088/1464-4258/8/7/S16 　

Vibrational amplitude profile of molecular vibrational modes for vibrational mode assignment Peer-reviewed

T Kobayashi, M Hirasawa, Y Sakazaki, H Hane

CHEMICAL PHYSICS LETTERS　400　(4-6)　301-307　2004/12

DOI： 10.1016/j.cplett.2004.10.125 　

ISSN： 0009-2614

細胞の力学特性計測のためのレーザ顕微鏡組込み型原子間力顕微鏡 (AFM)システムの開発 Peer-reviewed

長山和亮, 佐々木実, 羽根一博, 松本健郎, 佐藤正明

日本機械学会論文集C編　70　736-742　2004/09

DOI： 10.1299/kikaic.70.736 　

Pitch-variable Subwavelength Gratings Driven by Comb Actuators

T. Kobayashi, Y. Kanamori, K. Hane

Proceedings of IEEE/LEOS International Conference on Optical MEMS and Their Applications (Optical MEMS 2004)　198-199　2004/08/22

Wavelength Selective Variable Reflection Filters Using Movable Guided Mode Resonance Gratings

Y. Kanamori, T. Kitani, K. Hane

Proceedings of IEEE/LEOS International Conference on Optical MEMS and Their Applications (Optical MEMS 2004)　204-205　2004/08/22

Direct observation of vibrational dynamics in tin phthalocyanine Peer-reviewed

M Hirasawa, Y Sakazaki, H Hane, T Kobayashi

CHEMICAL PHYSICS LETTERS　392　(4-6)　390-395　2004/07

DOI： 10.1016/j.cplett.2004.03.154 　

ISSN： 0009-2614

Thermophotovoltaic generation with microstructured tungsten selective emitters

Hitoshi Sai, Takahiro Kamikawa, Yoshiaki Kanamori, Kazuhiro Hane, Hiroo Yugami, Masafumi Yamaguchi

AIP Conference Proceedings: Sixth Conference on Thermophotovoltaic Generation of Electricity (TPV6)　738　206-214　2004/06/14

DOI： 10.1063/1.1841896 　

ISSN： 0094-243x

A new method for fabrication nano-porous aluminum grating array Peer-reviewed

Y Li, Y Kanamori, K Hane

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS　10　(4)　272-274　2004/05

DOI： 10.1007/s00542-003-0303-1 　

ISSN： 0946-7076

eISSN： 1432-1858

Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator Peer-reviewed

M Sasaki, D Briand, W Noell, NF de Rooij, K Hane

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS　10　(3)　455-461　2004/05

DOI： 10.1109/JSTQE.2004.830616 　

ISSN： 1077-260X

eISSN： 1558-4542

Flow condition in resist spray coating and patterning performance for three-dimensional photolithography over deep structures Peer-reviewed

VK Singh, M Sasaki, K Hane, M Esashi

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　43　(4B)　2387-2391　2004/04

DOI： 10.1143/JJAP.43.2387 　

ISSN： 0021-4922

Resonant cavity thin film photodiode for compact displacement sensor Peer-reviewed

M Sasaki, F Nakai, XY Mi, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　43　(4B)　2381-2386　2004/04

DOI： 10.1143/JJAP.43.2381 　

ISSN： 0021-4922

Micro-optical components based on silicon mold technology Peer-reviewed

Yigui Li, Sasaki Minoru, Hane Kazuhiro

Optics and Lasers in Engineering　41　(3)　545-552　2004/03

DOI： 10.1016/S0143-8166(03)00026-5 　

ISSN： 0143-8166

Mitigation of accumulated electric charge by deposited fluorocarbon film during SiO2 etching Peer-reviewed

Tadashi Shimmura, Yuya Suzuki, Sinnosuke Soda, Seiji Samukawa, Mitsumasa Koyanagi, Kazuhiro Hane

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films　22　(2)　433-436　2004/03

DOI： 10.1116/1.1649347 　

ISSN： 0734-2101

Effects of fluorocarbon gas species on electrical conductivity and chemical structure of deposited polymer in SiO2 etchings processes Peer-reviewed

Tadashi Shimmura, Shinnosuke Soda, Mitsumasa Koyanagi, Kazuhiro Hane, Seiji Samukawa

Journal of Vacuum Science and Technology B　22　(2)　533-538　2004/03

DOI： 10.1116/1.1651115 　

光MEMS用マイクロアクチュエータ(情報機器と光関連技術,W17 情報・知能・精密機器部門)

羽根 一博, 佐々木 実, 金森 義明

年次大会講演資料集　2004　466-467　2004

DOI： 10.1299/jsmemecjsm.2004.8.0_466 　

Compact triangulation distance sensor realized by wafer bending technique Peer-reviewed

M Sasaki, S Endou, K Hane

MEMS, MOEMS, AND MICROMACHINING　5455　19-26　2004

DOI： 10.1117/12.545267 　

ISSN： 0277-786X

Subwavelength Gratings and Optical MEMS

K. Hane, Y. Kanamori

Proceedings of The Second Japan-Taiwan Workshop on Mechanical and Aerospace Engineering　85-91　2003/10/17

Control of thermal radiation spectrum by means of surface nano-scale gratings

Hitoshi Sai, Yoshiaki Kanamori, Kazuhiro Hane, Hiroo Yugami

Proceedings of The Second Japan-Taiwan Workshop on Mechanical and Aerospace Engineering　104-111　2003/10/17

Surface Micro-Fabrication and Integration for Optical MEMS

HANE Kazuhiro, SASAKI Minoru, KANAMORI Yoshiaki

Jitsumu Hyomen Gijutsu　54　(10)　640-643　2003/10/01

DOI： 10.4139/sfj.54.640 　

ISSN： 0915-1869

Solar selective absorbers based on two-dimensional W surface gratings with submicron periods for high-temperature photothermal conversion Peer-reviewed

Hitoshi Sai, Hiroo Yugami, Yoshiaki Kanamori, Kazuhiro Hane

Solar Energy Materials and Solar Cells　79　(1)　35-49　2003/08/01

DOI： 10.1016/S0927-0248(02)00364-1 　

ISSN： 0927-0248

Development of grating-image type micro-encoder by Si Micromachining: improvement of integration and zero-point detection

Y. Kanamori, R. Kamata, M. Mitamura, Y. Ito, K. Hane

Proceedings of the 2003 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment　(03-208)　257-258　2003/06/16

Nano/micro-technologies for high density data-storage and optical applications

Kazuhiro Hane, Minoru Sasaki, Yoshiaki Kanamori

Proceedings of the 2003 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment　(03-208)　W-24-W-28　2003/06/16

Fabrication of high-accuracy microtranslation table for near-field optical data storage actuated by inverted scratch-drive actuators Peer-reviewed

Yoshiaki Kanamori, Hiroto Yahagi, Takahito Ono, Minoru Sasaki, Kazuhiro Hane

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers　42　(6 B)　4074-4078　2003/06

DOI： 10.1143/jjap.42.4074 　

ISSN： 0021-4922

Si-wafer bending technique for a three-dimensional microoptical bench Peer-reviewed

M Ishimori, J Song, M Sasaki, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　42　(6B)　4063-4066　2003/06

DOI： 10.1143/JJAP.42.4063 　

ISSN： 0021-4922

Heating effect on photoresist in spray coating technique for three-dimensional lithography Peer-reviewed

VK Singh, M Sasaki, JH Song, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　42　(6B)　4027-4030　2003/06

DOI： 10.1143/JJAP.42.4027 　

ISSN： 0021-4922

Subwavelength antireflection gratings for GaSb in visible and near-infrared wavelengths Peer-reviewed

Y Kanamori, K Kobayashi, H Yugami, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　42　(6B)　4020-4023　2003/06

DOI： 10.1143/JJAP.42.4020 　

ISSN： 0021-4922

Optical MEMS technology for high-density optical storage

K. Hane, M. Sasaki, Y. Kanamori

Proceedings of OSA Optical Data Storage　256-258　2003/05/11

Precision optical displacement sensor based on ultra-thin film photodiode type optical interferometers Peer-reviewed

YG Li, XY Mi, M Sasaki, K Hane

MEASUREMENT SCIENCE AND TECHNOLOGY　14　(4)　479-483　2003/04

ISSN： 0957-0233

eISSN： 1361-6501

MEMS device for controlling evanescent field on side-polished optical fiber Peer-reviewed

JH Song, Y Taguchi, M Sasaki, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　42　(4B)　2335-2338　2003/04

DOI： 10.1143/JJAP.42.2335 　

ISSN： 0021-4922

Optical scanner on a three-dimensional microoptical bench Peer-reviewed

M Sasaki, T Yamaguchi, JH Song, K Hane, M Hara, K Hori

JOURNAL OF LIGHTWAVE TECHNOLOGY　21　(3)　602-608　2003/03

DOI： 10.1109/JLT.2003.811793 　

ISSN： 0733-8724

Expansion of Near-field Science into Engineering(<Special Issue>For the Application of Near-field Science to the Engineering)

HANE Kazuhiro

Journal of the Japan Society of Precision Engineering　69　(2)　151-153　2003/02/05

DOI： 10.2493/jjspe.69.151 　

ISSN： 0912-0289

Technique for preparing defect-free spray coated resist film Peer-reviewed

V. Kumar Singh, M. Sasaki, Jong Hyeong Song, K. Hane

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers　1　817-820　2003

DOI： 10.1109/SENSOR.2003.1215599 　

Optical scanner prepared by wafer bending technique Peer-reviewed

M Ishimori, JH Song, M Sasaki, K Hane

2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS　159-160　2003

Silicon optical MEMS: Three dimentional micromachining and integration Peer-reviewed

K Hane, M Sasaki, Y Kanamori

MAGNETIC MATERIALS, PROCESSES, AND DEVICES VII AND ELECTRODEPOSITION OF ALLOYS, PROCEEDINGS　2002　(27)　229-237　2003

Complementary masking approach for proximity electron lithography Peer-reviewed

S Omori, K Iwase, K Amai, T Sasaki, H Hane, K Koike, S Nohama, Ashida, I, T Kitagawa, S Moriya

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　21　(1)　57-60　2003/01

ISSN： 1071-1023

Mitigation of Accumulated Electric Charge by Deposited Fluorocarbon Film during SiO2 Etching Peer-reviewed

Yuya Suzuki, Tadashi Shimmura, Mitsumasa Koyanagi, Kazuhiro Hane, Seiji Samukawa

International Symposium on Dry Prosess　265-270　2003

In-Situ On-Wafer Monitoring for Charge Build-up Voltage during Plasma Process Peer-reviewed

Tadashi Shimmura, Shinnosuke Soda, Mitsumasa Koyanagi, Kazuhiro Hane, Seiji Samukawa

American Vacuum Society 50th International Symposium　2003

Optical components and actuators for integrated near-field optical data storage

K. Hane, Y. Kanamori, M. Sasaki, J. H. Song

Proceedings of SPIE - The International Society for Optical Engineering　5116　197-204　2003

DOI： 10.1117/12.498885 　

ISSN： 0277-786X

Photonic crystal switch by inserting nano-crystal defects using MEMS actuator

Y. Kanamori, K. Inoue, K. Horie, K. Hane

2003 IEEE/LEOS International Conference on Optical MEMS　107-108　2003

DOI： 10.1109/OMEMS.2003.1233489 　

Driving of optical fiber by surface-micromachined cam-micromotor for the applications to variable optical attenuator

Y. Kanamori, Y. Aoki, M. Sasaki, H. Hosoya, A. Wada, K. Hane

2003 IEEE/LEOS International Conference on Optical MEMS　119-120　2003

DOI： 10.1109/OMEMS.2003.1233495 　

Anisotropic Si etching condition for preparing optically smooth surfaces Peer-reviewed

M Sasaki, T Fujii, K Hane

SENSORS AND MATERIALS　15　(2)　83-92　2003

ISSN： 0914-4935

Bach fabrication of microlens at the end of optical fiber using self-photolithgraphy and etching techniques Peer-reviewed

Phan Ngoc Minh, Takahito Ono, Yoichi Haga, Kazumi Inoue, Minoru Sasaki, Kazuhiro Hane, Masayoshi Esashi

Optical Review　10　(3)　150-154　2003

DOI： 10.1007/s10043-003-0150-4 　

ISSN： 1340-6000

SPECTRALLY SELECTIVE THREMAL RADIATORS AND ABSORBERS WITH PERIODIC MICROSTRUCTUREED SURFACE FOR HIGH-TEMPERATURE APPLICATIONS Peer-reviewed

Hitoshi Sai, Hiroo Yugami, Yoshiaki Kanamori, Kazuhiro Hane

Microscale Thermophysical Engineering　7　101-115　2003/01

Pitch-variable transmission-type bulk gratings driven by shape memory alloy actuator Peer-reviewed

Yigui Li, Shuhai Jia, Hongkun Wang, Di Chen, Kazuhiro Hane

Optics and Laser Technology　34　(8)　649-653　2002/11

DOI： 10.1016/S0030-3992(02)00089-0 　

ISSN： 0030-3992

Electrical conductivity of sidewall-deposited fluorocarbon polymer in SiO2 etching processes Peer-reviewed

T. Shimmura, S. Soda, S. Samukawa, M. Koyanagi, K. Hane

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures　20　(6)　2346-2350　2002/11

DOI： 10.1116/1.1520551 　

ISSN： 0734-211X

Subwavelength antireflection structure for optical detector fabricated by fast atom beam etching

Yoshiaki Kanamori, Masahiro Ishimori, Kazuhiro Hane

Proceedings of SPIE -MEMS/MOEMS Technologies and Applications　4928　27-34　2002/10/17

Micro-translation-table for near-field data storage using inverted-scratch-drive-actuators

Yoshiaki Kanamori, Hiroto Yahagi, Minoru Sasaki, Takahito Ono, Kazuhiro Hane

Proceedings of SPIE -MEMS/MOEMS Technologies and Applications　4928　35-42　2002/10/17

A broadband antireflection for GaSb by means of subwavelength grating (SWG) structures

Hiroo Yugami, Ken-ichi Kobayashi, Hitoshi Sai, Yoshiaki Kanamori, Kazuhiro Hane

AIP Conference Proceedings: Fifth Conference on Thermophotovoltaic Generation of Electricity　653　482-487　2002/09/16

High efficient light-emitting diodes with antireflection subwavelength gratings Peer-reviewed

Y Kanamori, M Ishimori, K Hane

IEEE PHOTONICS TECHNOLOGY LETTERS　14　(8)　1064-1066　2002/08

DOI： 10.1109/LPT.2002.1021970 　

ISSN： 1041-1135

Tunable wavelength filter through bending control of asymmetric single-mode grating fiber Peer-reviewed

H Kumazaki, K Nakashima, S Inaba, K Hane

OPTICS EXPRESS　10　(11)　469-474　2002/06

DOI： 10.1364/OE.10.000469 　

ISSN： 1094-4087

Direct photolithography on optical fiber end Peer-reviewed

M Sasaki, T Ando, S Nogawa, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS　41　(6B)　4350-4355　2002/06

DOI： 10.1143/JJAP.41.4350 　

ISSN： 0021-4922

Subwavelength antireflection gratings for light emitting diodes and photodiodes fabricated by fast atom beam etching Peer-reviewed

M Ishimori, Y Kanamori, M Sasaki, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　41　(6B)　4346-4349　2002/06

DOI： 10.1143/JJAP.41.4346 　

ISSN： 0021-4922

Tunable fiber Bragg grating combined with microactuator Peer-reviewed

M Sasaki, K Miura, K Hane, K Minami

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　41　(6B)　4356-4361　2002/06

DOI： 10.1143/JJAP.41.4356 　

ISSN： 0021-4922

Spectrally selective radiators and absorbers with periodic microstructured surface for high temperature applications

Hitoshi Sai, Hiroo Yugami, Yoshiaki Kanamori, Kazuhiro Hane

Abstracts: International Symposium on Micro/Nanoscale Energy Conversion and Transport　55-57　2002/04/14

Integration of grating-image-type encoder using Si micromachining Peer-reviewed

K. Hane, T. Endo, M. Ishimori, Y. Ito, M. Sasaki

Sensors and Actuators, A: Physical　97-98　139-146　2002/04/01

DOI： 10.1016/S0924-4247(01)00800-7 　

ISSN： 0924-4247

立体的マイクロマシニングのためのレジストスプレーコーティング Peer-reviewed

佐々木実, 能川真一郎, 羽根一博

電気学会論文誌E　121-E　235-243　2002/03

Si wafer bending technology for a three dimensional micro optical bench Peer-reviewed

M. Ishimori, J. H. Song, M. Sasaki, K. Hane

2002 International Microprocesses and Nanotechnology Conference, MNC 2002　328-329　2002

DOI： 10.1109/IMNC.2002.1178676 　

Spray coated photoresist over anisotropically etched deep Si cavities Peer-reviewed

V. K. Singh, M. Sasaki, Jong Hyeong Song, K. Hane

2002 International Microprocesses and Nanotechnology Conference, MNC 2002　188-189　2002

DOI： 10.1109/IMNC.2002.1178607 　

Thin film photodiode with resonant cavity for increasing signal of standing wave detection type interferometer Peer-reviewed

M Sasaki, F Nakai, Mi, X, K Hane

2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST　25-26　2002

On-Wafer Monitoring for Conductivity of Sidewall in SiO2 Contact Holes Peer-reviewed

Tadashi Shimmura, Shinnosuke Soda, Mitsumasa Koyanagi, Kazuhiro Hane, Seiji Samukawa

2nd International Symposium on Dry Process　2002

Electrical conductivity of sidewall deposited fluorocarbon in SiO2 contact holes Peer-reviewed

T.Shimmura, S.Soda, S.Samukawa, M.Koyanagi, K.Hane

American Vacuum Society 49th International Symposium　2002

Broadband antireflection subwavelength gratings for polymethyl methacrylate fabricated with molding technique Peer-reviewed

Yoshiaki Kanamori, Kazuhiro Hane

Optical Review　9　(5)　183-185　2002

DOI： 10.1007/s10043-002-0183-0 　

ISSN： 1340-6000

Fabrication of high accuracy micro-translation-table for near-field optical data storage actuated by inverted-scratch-drive-actuators Peer-reviewed

Y. Kanamori, H. Yahagi, T. Ono, M. Sasaki, K. Hane

2002 International Microprocesses and Nanotechnology Conference, MNC 2002　42　306-307　2002

DOI： 10.1109/IMNC.2002.1178665 　

Basic studies of fiber-optic MEMS for telecommunication using three dimensional micromachining Invited Peer-reviewed

K Hane, M Sasaki, JH Song, Y Taguchi, K Miura

IEICE TRANSACTIONS ON ELECTRONICS　E84C　(12)　1785-1791　2001/12

ISSN： 0916-8524

eISSN： 1745-1353

Tunable wavelength filter using a Bragg grating fiber thinned by plasma etching Peer-reviewed

Hironori Kumazaki, Yoshihisa Yamada, Hidetoshi Nakamura, Seiki Inaba, Kazuhiro Hane

IEEE Photonics Technology Letters　13　(11)　1206-1208　2001/11

DOI： 10.1109/68.959365 　

ISSN： 1041-1135

Spectral control of thermal emission by periodic microstructured surfaces in the near-infrared region Peer-reviewed

H Sai, H Yugami, Y Akiyama, Y Kanamori, K Hane

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION　18　(7)　1471-1476　2001/07

ISSN： 0740-3232

Chlorine molecular ions measured in time-modulated inductively coupled plasma by the laser-induced fluorescence technique Peer-reviewed

S. Kumagai, M. Sasaki, M. Koyanagi, K. Hane

Plasma Sources Science and Technology　10　(2)　205-210　2001/05

DOI： 10.1088/0963-0252/10/2/310 　

ISSN： 0963-0252

A compact optical encoder with micromachined photodetector Peer-reviewed

K. Hane, T. Endo, Y. Ito, M. Sasaki

Journal of Optics A: Pure and Applied Optics　3　(3)　191-195　2001/05

DOI： 10.1088/1464-4258/3/3/307 　

ISSN： 1464-4258

Fabrication and testing of solid polymer dye microcavity lasers based on PMMA micromolding Peer-reviewed

Yigui Li, Minoru Sasaki, Kazuhiro Hane

Journal of Micromechanics and Microengineering　11　(3)　234-238　2001/05

DOI： 10.1088/0960-1317/11/3/312 　

ISSN： 0960-1317

Interferometer based on standing wave detection using thin film photodetectors Peer-reviewed

Xiaoyu Mi, Minoru Sasaki, Takayuki Hirano, Kazuhiro Hane

電気学会論文誌E　121-E　(9)　489-495　2001/05

DOI： 10.1541/ieejsmas.121.489 　

ISSN： 1341-8939

変調型フォトダイオ-ドアレイを用いた絶対位置検出光エンコ-ダ Peer-reviewed

家城淳, 羽根一博, 横山将史, 松井圭司, 梨木政行, 佐々木実

日本機械学会論文誌C　67　(654)　364-369　2001/02

DOI： 10.1299/kikaic.67.364 　

Tunable fiber Bragg grating combined with twisting microactuator Peer-reviewed

M. Sasaki, K. Miura, K. Hane

2001 International Microprocesses and Nanotechnology Conference, MNC 2001　58-59　2001

DOI： 10.1109/IMNC.2001.984067 　

Spectral control of thermal emission by periodic microstructured surfaces in the near-infrared region Peer-reviewed

Hitoshi Sai, Hiroo Yugami, Yasuhiro Akiyama, Yoshiaki Kanamori, Kazuhiro Hane

Journal of the Optical Society of America A: Optics and Image Science, and Vision　18　(7)　1471-1476　2001

DOI： 10.1364/JOSAA.18.001471 　

ISSN： 1520-8532 1084-7529

Sub-wavelength stucture for anti-reflection fabricated by fast atom beam etching Peer-reviewed

K Hane, Y Kanamori

CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST　186-187　2001

Si-micromachining for optics: optical components and sensors Peer-reviewed

K Hane, M Sasaki, JH Song

DEVICE AND PROCESS TECHNOLOGIES FOR MEMS AND MICROELECTRONICS II　4592　283-291　2001

ISSN： 0277-786X

Anisotropic Si etching technique for optically smooth surfaces Peer-reviewed

M Sasaki, T Fujii, Y Li, K Hane

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2　604-607　2001

Si micromachined optical encoder based on grating imaging Peer-reviewed

K Hane, T Endo, Y Ito, M Sasaki

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2　552-555　2001

Transmission-type optical sensors fabricated by Si micromachining Peer-reviewed

K Hane, M Sasaki

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2　524-527　2001

Subwavelength antireflection gratings for light emitting diodes and photodiodes fabricated by fast atom beam etching

M. Ishimori, Y. Kanamori, M. Sasaki, K. Hane

2001 International Microprocesses and Nanotechnology Conference, MNC 2001　198-199　2001

DOI： 10.1109/IMNC.2001.984158 　

100 nm period silicon antireflection structures fabricated using a porous alumina membrane mask Peer-reviewed

Y Kanamori, K Hane, H Sai, H Yugami

APPLIED PHYSICS LETTERS　78　(2)　142-143　2001/01

DOI： 10.1063/1.1339845 　

ISSN： 0003-6951

Ultra-thin film photodiodes for use in position sensors Peer-reviewed

XY Mi, M Sasaki, K Hane

JOURNAL OF MODERN OPTICS　48　(1)　55-66　2001/01

DOI： 10.1080/09500340150202775 　

ISSN： 0950-0340

Fabrication of grating couplers using submicron silicon mold Peer-reviewed

Yigui Li, Minoru Sasaki, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　121　(6)　320-324　2001

DOI： 10.1541/ieejsmas.121.320 　

ISSN： 1347-5525 1341-8939

Dominance of Cl-2(+) or Cl+ ions in time-modulated inductively coupled Cl-2 plasma investigated with laser-induced fluorescence technique and probe measurements Peer-reviewed

S Kumagai, M Sasaki, M Koyanagi, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　39　(12B)　6980-6984　2000/12

DOI： 10.1143/JJAP.39.6980 　

ISSN： 0021-4922

Anisotropically etched Si mold for solid polymer dye microcavity laser Peer-reviewed

H Sasaki, YG Li, Y Akatu, T Fujii, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　39　(12B)　7145-7149　2000/12

DOI： 10.1143/JJAP.39.7145 　

ISSN： 0021-4922

Cantilever probe integrated with light-emitting diode, waveguide, aperture, and photodiode for scanning near-field optical microscope Peer-reviewed

M Sasaki, K Tanaka, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　39　(12B)　7150-7153　2000/12

DOI： 10.1143/JJAP.39.7150 　

ISSN： 0021-4922

Micromachining of optical fiber using reactive ion etching and its application Peer-reviewed

H Kumazaki, Y Yamada, T Oshima, S Inaba, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　39　(12B)　7142-7144　2000/12

DOI： 10.1143/JJAP.39.7142 　

ISSN： 0021-4922

A Simple Si Pitch-variable Grating With Shape Memory Alloy Actuator Peer-reviewed

Yigui Li, Minoru Sasaki, Kazuhiro Hane

電気学会論文誌　120-E　(11)　503-508　2000/11

DOI： 10.1541/ieejsmas.120.503 　

ISSN： 1341-8939

Short-range displacement detection from speckle interference using transparent thin-film photodiode Peer-reviewed

M Sasaki, T Hirano, Mi, X, K Hane

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS　2　(6)　534-537　2000/11

DOI： 10.1088/1464-4258/2/6/306 　

ISSN： 1464-4258

Micromachining of Optical Fiber by Reactive Ion Etching

KUMAZAKI Hironori, YAMADA Yoshihisa, INABA Seiki, HANE Kazuhiro

Journal of the Vacuum Society of Japan　43　(10)　992-995　2000/10/20

DOI： 10.3131/jvsj.43.992 　

ISSN： 0559-8516

Laser-induced fluorescence measurement of metastable chlorine ion temperature in time-modulated inductively coupled plasma Peer-reviewed

S Kumagai, M Sasaki, M Koyanagi, K Hane

JOURNAL OF THE ELECTROCHEMICAL SOCIETY　147　(8)　3070-3073　2000/08

DOI： 10.1149/1.1393856 　

ISSN： 0013-4651

Broadband antireflection gratings for glass substrates fabricated by fast atom beam etching Peer-reviewed

Y Kanamori, H Kikuta, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS　39　(7B)　L735-L737　2000/07

DOI： 10.1143/jjap.39.L735 　

ISSN： 0021-4922

A novel doping technology for ultra-shallow junction fabrication: boron diffusion from boron-adsorbed layer by rapid thermal annealing Peer-reviewed

KS Kim, YH Song, KT Park, H Kurino, T Matsuura, K Hane, M Koyanagi

THIN SOLID FILMS　369　(1-2)　207-212　2000/07

DOI： 10.1016/S0040-6090(00)00808-7 　

ISSN： 0040-6090

変調周期の回折格子を用いた光学式エンコーダ（第３報）－高次ひずみ信号成分の除去 Peer-reviewed

家城 淳, 松井圭司, 梨木政行, 羽根一博

精密工学会誌　66　(7)　1087-1091　2000/07

DOI： 10.2493/jjspe.66.1087 　

ISSN： 0912-0289

Relative domination between Cl+ and Cl-2(+) ions in time-modulated inductively coupled Cl-2 plasma investigated with laser-induced fluorescence technique Peer-reviewed

S Kumagai, M Sasaki, M Koyanagi, K Hane

MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS　202-203　2000

Micromachining of optical fiber using reactive ion etching and its application Peer-reviewed

H Kumazaki, Y Yamada, T Oshima, S Inaba, K Hane

MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS　154-155　2000

Scanning near-field optical microscope using cantilever integrated with light emitting diode, waveguide, aperture, and photodiode Peer-reviewed

M Sasaki, K Tanaka, K Hane

2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS　129-130　2000

Highly integrated cantilever with light emitting diode, channel waveguide, aperture, and photodiode for scanning near-field optical microscope Peer-reviewed

M Sasaki, K Tanaka, K Hane

MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS　146-147　2000

Direct photolithography on optical fiber Peer-reviewed

M Sasaki, S Nogawa, K Hane

2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS　149-150　2000

Anisotropically etched Si molds for fabricating fine optical components Peer-reviewed

Y Li, T Fujii, M Sasaki, K Hane

MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VI　4174　77-84　2000

ISSN： 0277-786X

Density and temperature of metastable Cl+ ions in time-modulated ICP measured by time-resolved LIF Peer-reviewed

S Kumagai, M Sasaki, M Koyanagi, K Hane

PLASMA ETCHING PROCESSES FOR SUB-QUARTER MICRON DEVICES, PROCEEDINGS　99　(30)　105-111　2000

Surface microstructured selective emitters for TPV systems

Hitoshi Sai, Hiroo Yuqami, Yasuhiro Akiyama, Yoshiaki Kanamori, Kazuhiro Hane

Conference Record of the IEEE Photovoltaic Specialists Conference　2000-　1016-1019　2000

DOI： 10.1109/PVSC.2000.916058 　

ISSN： 0160-8371

Local mechanical properties measured by atomic force microscopy for cultured bovine endothelial cells exposed to shear stress Peer-reviewed

M Sato, K Nagayama, N Kataoka, M Sasaki, K Hane

JOURNAL OF BIOMECHANICS　33　(1)　127-135　2000/01

DOI： 10.1016/S0021-9290(99)00178-5 　

ISSN： 0021-9290

Full-fiber-type sensing system for physical quantities using a photothermally vibrated quartz-core cantilever Peer-reviewed

Hironori Kumazaki, Seiki Inaba, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　120　(3)　105-110　2000

DOI： 10.1541/ieejsmas.120.105 　

ISSN： 1347-5525 1341-8939

Pitch-modulated phase grating and its application to displacement encoder Peer-reviewed

A. Ieki, K. Matsui, M. Nashiki, K. Hane

Journal of Modern Optics　47　(7)　1213-1225　2000

DOI： 10.1080/09500340008232168 　

ISSN： 1362-3044 0950-0340

Transmission-type position sensor for the straightness measurement of a large structure Peer-reviewed

M Sasaki, H Takebe, K Hane

JOURNAL OF MICROMECHANICS AND MICROENGINEERING　9　(4)　429-433　1999/12

DOI： 10.1088/0960-1317/9/4/321 　

ISSN： 0960-1317

Two-dimensional control of shape-memory-alloy actuators for aligning a Si micromachined pinhole of spatial filter Peer-reviewed

M Sasaki, W Kamada, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　38　(12B)　7190-7193　1999/12

DOI： 10.1143/JJAP.38.7190 　

ISSN： 0021-4922

Detection of metastable chlorine ions in time-modulated plasma by time resolved laser-induced fluorescence Peer-reviewed

S Kumagai, M Sasaki, M Koyanagi, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　38　(12B)　7126-7130　1999/12

DOI： 10.1143/JJAP.38.7126 　

ISSN： 0021-4922

Standing wave detection and interferometer application using a photodiode thinner than optical wavelength Peer-reviewed

M Sasaki, XY Mi, K Hane

APPLIED PHYSICS LETTERS　75　(14)　2008-2010　1999/10

DOI： 10.1063/1.124898 　

ISSN： 0003-6951

Broadband antireflection gratings fabricated upon silicon substrates Peer-reviewed

Y Kanamori, M Sasaki, K Hane

OPTICS LETTERS　24　(20)　1422-1424　1999/10

DOI： 10.1364/OL.24.001422 　

ISSN： 0146-9592

High aspect-ratio two-dimensional silicon subwavelength gratings fabricated by fast atom beam etching

Yoshiaki Kanamori, Minoru Sasaki, Kazuhiro Hane

Proceedings of SPIE -Micromachining and Microfabrication Process Technology V　3874　345-354　1999/09/20

Antireflection structures for visible and infrared wavelengths fabricated on silicon substrates by fast atom beam etching

Yoshiaki Kanamori, Minoru Sasaki, Kazuhiro Hane

Proceedings of SPIE -Optical Engineering for Sensing and Nanotechnology (ICOSN'99)　3740　484-487　1999/06/16

Detection of metastable Cl+ ions in time-modulated ICP by time resolved LIF Peer-reviewed

S. Kumagai, M. Sasaki, M. Koyanagi, K. Hane

1999 International Microprocesses and Nanotechnology Conference　150-151　1999

DOI： 10.1109/IMNC.1999.797521 　

Two dimensional automatic alignment of pinhole integrated with photodiode Peer-reviewed

M. Sasaki, W. Kamada, K. Hane

1999 International Microprocesses and Nanotechnology Conference　194-195　1999

DOI： 10.1109/IMNC.1999.797543 　

Photodiodes Fabricated by Micromachining for Mechatronics Peer-reviewed

Kazuhiro Hane, Mimoru Sasaki

IEEJ Transactions on Sensors and Micromachines　119　(42591)　401-404　1999

DOI： 10.1541/ieejsmas.119.401 　

ISSN： 1347-5525 1341-8939

Laser interferometer using thin film photodetector Peer-reviewed

M Sasaki, XY Mi, K Hane

OPTOELETRONIC INTEGRATED CIRCUITS AND PACKAGING III　3631　173-180　1999

ISSN： 0277-786X

Ultra-thin Si photodetector for an integrated optical interferometer Peer-reviewed

XY Mi, M Sasaki, K Hane

MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MEMS　3878　337-347　1999

ISSN： 0277-786X

Compact optical encoder using modulated pitch phase grating: Suppression of harmonic noise and contrast change Peer-reviewed

A Ieki, K Matsui, M Nashiki, K Hane

OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN'99)　3740　132-135　1999

ISSN： 0277-786X

Shear Stress Induced Changes in Endothelial Cell Stiffness Measured by Atomic Force Microscopy Peer-reviewed

Masaaki SATO, Kazuaki NAGAYAMA, Noriyuki KATAOKA, Minoru SASAKI, Kazuhiro HANE

Proceedings of the 1999 Summer Bioengineering Conference　343-344　1999

Tapping Mode Capacitance Microscopy of a Mitride-Oxide-Silicon Recording Medium Peer-reviewed

Kazuya Goto, Kazuhiro Hane

Advanced Information Storage System　10　301-311　1999

Three-dimensional Pattern Projection Using Computer-generated Fresnel Hologram Peer-reviewed

Kazuhiro Hane, Takashi Hagihara, Mitsunobu Yoshida, Minoru Sasaki

J. of the Japan Society for Precision Engineering　65　(1)　141-144　1999/01

DOI： 10.2493/jjspe.65.141 　

ISSN： 0912-0289

Optical encoder using a slit-width-modulated grating Peer-reviewed

A Ieki, K Hane, T Yoshizawa, K Matsui, M Nashiki

JOURNAL OF MODERN OPTICS　46　(1)　1-14　1999/01

DOI： 10.1080/095003499149999 　

ISSN： 0950-0340

Optical Encoder Having Pitch-Modulated Photodiode Array Peer-reviewed

Toshiro Ohashi, Takayuki Hirano, Minoru Sasaki, Kazuhiro Hane, Atsushi Ieki, Keiji Matsui, Masayuki Nashiki

IEEJ Transactions on Sensors and Micromachines　119　(2)　86-93　1999

DOI： 10.1541/ieejsmas.119.86 　

ISSN： 1347-5525 1341-8939

Theoretical Analysis of Optically Addressed Spatial Light Modulator with Electromagnetic Driven Micromirror for Optical Information Processing Peer-reviewed

Toshiro Ohashi, Mitsunobu Yoshida, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　119　(42591)　424-429　1999

DOI： 10.1541/ieejsmas.119.424 　

ISSN： 1347-5525 1341-8939

Improved automatic alignment of pinhole integrated with photodiode Peer-reviewed

M Sasaki, Y Arai, W Kamada, K Hane

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　37　(12B)　7120-7123　1998/12

DOI： 10.1143/JJAP.37.7120 　

ISSN： 0021-4922

Optical Encoder Using Metallic Surface Grating Peer-reviewed

Kazuhiro Hane, Kenichi Okuyama, Minoru Sasaki

J. of the Japan Society for Precision Engineering　64　(10)　1532-1536　1998/10

DOI： 10.2493/jjspe.64.1532 　

ISSN： 0912-0289

Tip-sample capacitance in capacitance microscopy of dielectric films Peer-reviewed

K Goto, K Hane

JOURNAL OF APPLIED PHYSICS　84　(8)　4043-4048　1998/10

DOI： 10.1063/1.368617 　

ISSN： 0021-8979

Application of a semiconductor tip to capacitance microscopy Peer-reviewed

K Goto, K Hane

APPLIED PHYSICS LETTERS　73　(4)　544-546　1998/07

DOI： 10.1063/1.121927 　

ISSN： 0003-6951

eISSN： 1077-3118

Micromachined structure for Si transmission optical components Peer-reviewed

M Sasaki, Y Arai, H Takebe, W Kamada, K Hane

MICROELECTRONIC STRUCTURES AND MEMS FOR OPTICAL PROCESSING IV　3513　89-94　1998

ISSN： 0277-786X

Si micromachined pinhole and surrounding photodiode for incident beam position sensing and automatic alignment Peer-reviewed

Minoru Sasaki, Yuji Arai, Kazuhiro Hane

Optical Review　5　(2)　115-118　1998

DOI： 10.1007/s10043-998-0115-8 　

ISSN： 1340-6000

Transmission type position sensor made on thin Si film Peer-reviewed

Sasaki Minoru, Takebe Hitoshi, Hane Kazuhiro

IEEJ Transactions on Sensors and Micromachines　118　(11)　538-539　1998

DOI： 10.1541/ieejsmas.118.538 　

ISSN： 1347-5525 1341-8939

Bistability of a self-standing film caused by photothermal displacement Peer-reviewed

Kazuhiro Hane, Kentaro Suzuki

Applied Optics　36　(21)　5006-5009　1997/07/20

DOI： 10.1364/AO.36.005006 　

ISSN： 2155-3165 1559-128X

Development of stroboscopic microscope using fringe scanning interferometry technique (FSIT) Peer-reviewed

Ken Nakano, Kazuhiro Hane, Shigeru Okuma, Tadashi Eguchi

Transaction of the Society of Instrument and Control Engineers　33　(7)　570-575　1997/07

DOI： 10.9746/sicetr1965.33.570 　

ISSN： 0453-4654

Bistability of a self-standing film caused by photothermal displacement Peer-reviewed

K Hane, M Suzuki

APPLIED OPTICS　36　(21)　5006-5009　1997/07

ISSN： 0003-6935

Shape detection by scanning object with coaxial laser be Peer-reviewed

K.Hane, M.Yoshida

Japan Society for Precision Engineering　63　(5)　674-678　1997/05

DOI： 10.2493/jjspe.63.674 　

ISSN： 0912-0289

Micro-objective manipulated with optical tweezers Peer-reviewed

M Sasaki, T Kurosawa, K Hane

APPLIED PHYSICS LETTERS　70　(6)　785-787　1997/02

DOI： 10.1063/1.118260 　

ISSN： 0003-6951

Tapping mode scanning capacitance microscopy: Feasibility of quantitative capacitance measurement Peer-reviewed

Kazuya Goto, Kazuhiro Hane

Proceedings of SPIE - The International Society for Optical Engineering　3009　84-91　1997

DOI： 10.1117/12.271216 　

ISSN： 0277-786X

Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry Peer-reviewed

K Nakano, A Torii, K Hane, S Okuma

MICROLITHOGRAPHY AND METROLOGY IN MICROMACHINING III　3225　44-54　1997

Tapping mode capacitance microscopy Peer-reviewed

K Goto, K Hane

REVIEW OF SCIENTIFIC INSTRUMENTS　68　(1)　120-123　1997/01

DOI： 10.1063/1.1147749 　

ISSN： 0034-6748

Effect of cantilever size of laser-driven fiber core for deposition thickness measurement Peer-reviewed

Hironori Kumazaki, Seiki Inaba, Kazuhiro Hane

Shinku/Journal of the Vacuum Society of Japan　40　(3)　303-305　1997

DOI： 10.3131/jvsj.40.303 　

ISSN： 0559-8516

Deposition Thickness Sensor for Ion Sputtering Apparatus Peer-reviewed

Hironori Kumazaki, Seiki lnaba, Kazuhiro Hane

IEEJ Transactions on Sensors and Micromachines　117　(2)　105-108　1997

DOI： 10.1541/ieejsmas.117.105 　

ISSN： 1347-5525 1341-8939

Visualization of 50 MHz surface acoustic wave propagation using stroboscopic phase-shift interferometry Peer-reviewed

Ken Nakano, Kazuhiro Hane, Shigeru Okuma, Tadashi Eguchi

Optical Review　4　(2)　265-269　1997

DOI： 10.1007/s10043-997-0265-0 　

ISSN： 1340-6000

Automatic alignment of optical system using shape memory alloy Peer-reviewed

Minoru Sasaki, Yuji Arai, Kazuhiro Hane

Optical Review　4　(5)　584-587　1997

DOI： 10.1007/s10043-997-0584-1 　

ISSN： 1340-6000

Ultrasonically facilitated two-dimensional crystallization of colloid particles Peer-reviewed

Minoru Sasaki, Kazuhiro Hane

Journal of Applied Physics　80　(9)　5427-5431　1996/09

DOI： 10.1063/1.362730 　

ISSN： 0021-8979

Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber Peer-reviewed

H Kumazaki, S Inaba, K Hane

VACUUM　47　(6-8)　475-477　1996/06

DOI： 10.1016/0042-207X(96)00146-7 　

ISSN： 0042-207X

Scanning tunneling microscopy study of monolayer pit formation on the HOPG surface using oxygen plasma and thermal oxidation Peer-reviewed

T Abe, K Hane, S Okuma

INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING　30　(2)　118-121　1996/06

ISSN： 0916-782X

Vibration Measurement of Ultrasonic Motor Using Strobosc Peer-reviewed

中野健, 西澤五郎, 大熊繁, 羽根一博, 江口正

Journal of the Japan Society of Mechanical Engineers　62　2237-2243　1996/06

DOI： 10.1299/kikaic.62.2237 　

Optical transfer function analysis of Lau-type grating atom interferometer Peer-reviewed

K Hane, H Takahashi

OPTICAL REVIEW　3　(3)　207-210　1996/05

DOI： 10.1007/BF02931721 　

ISSN： 1340-6000

Pit and mound formation on arc-evaporated carbon thin film using scanning tunneling microscopy Peer-reviewed

T Abe, K Hane, S Okuma

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　35　(3)　1850-1856　1996/03

DOI： 10.1143/JJAP.35.1850 　

ISSN： 0021-4922

Micromachining with a force microscope tip assisted by electrostatic force Peer-reviewed

K Goto, K Hane

REVIEW OF SCIENTIFIC INSTRUMENTS　67　(2)　397-400　1996/02

DOI： 10.1063/1.1146603 　

ISSN： 0034-6748

A method for determining the spring constant of cantilevers for atomic force microscopy Peer-reviewed

A Torii, M Sasaki, K Hane, S Okuma

MEASUREMENT SCIENCE AND TECHNOLOGY　7　(2)　179-184　1996/02

DOI： 10.1088/0957-0233/7/2/010 　

ISSN： 0957-0233

eISSN： 1361-6501

Modulated pitch phase gratings used in displacement encoder Peer-reviewed

K Hane, P Posada, A Ieki, K Matsui, M Nashiki

17TH CONGRESS OF THE INTERNATIONAL COMMISSION FOR OPTICS: OPTICS FOR SCIENCE AND NEW TECHNOLOGY, PTS 1 AND 2　2778　1124-1125　1996

Photothermal displacement in an interference fringe Peer-reviewed

K Hane, K Suzuki

17TH CONGRESS OF THE INTERNATIONAL COMMISSION FOR OPTICS: OPTICS FOR SCIENCE AND NEW TECHNOLOGY, PTS 1 AND 2　2778　1122-1123　1996

Transfer function analysis of grating atom interferometer Peer-reviewed

Kazuhiro Hane, Hitomi Takahashi

journal of Japan Society for Precision Engineering　62　(7)　943-947　1996

DOI： 10.2493/jjspe.62.943 　

ISSN： 0912-0289

Temperature characteristics of vibrating type sensor using micromachined optical fiber-tip Peer-reviewed

Hironori Kumazaki, Seiki Inaba, Kazuhiro Hane

Optical Review　3　(2)　135-138　1996

DOI： 10.1007/s10043-996-0135-1 　

ISSN： 1340-6000

Optical encoder using modulated pitch grating (2nd repor Peer-reviewed

A.Ieki, K.Matsui, M.Nashiki, K.Hane

Jouranl of the Japan Society for Precision Engineering　61　1619-1623　1995/11

DOI： 10.2493/jjspe.61.1619 　

Optical encoder using modulated pitch grating (1st repor Peer-reviewed

A.Ieki, K.Matsui, M.Nashiki, K.Hane

Journal of the Japan Society for Precision Engineering　61　1312-1316　1995/09

DOI： 10.2493/jjspe.61.1312 　

CHARACTERISTICS OF DC-VOLTAGE SURFACE MODIFICATION OF GRAPHITE USING SCANNING TUNNELING MICROSCOPE Peer-reviewed

T ABE, K HANE, S OKUMA

INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING　29　(2)　123-127　1995/06

ISSN： 0916-782X

A DOUBLE-FOCUS LENS INTERFEROMETER FOR SCANNING FORCE MICROSCOPY Peer-reviewed

K GOTO, M SASAKI, S OKUMA, K HANE

REVIEW OF SCIENTIFIC INSTRUMENTS　66　(5)　3182-3185　1995/05

DOI： 10.1063/1.1145548 　

ISSN： 0034-6748

Fringe scanning interferometric imaging of small bivrati Peer-reviewed

K.Nakano, H.Yoshida, K.Hane, S.Okuma, T.Eguchi

Transaction of the Society of Instrument and Control Engineers　31　454-460　1995/04

DOI： 10.9746/sicetr1965.31.454 　

PHOTOTHERMAL VIBRATION OF FIBER CORE FOR VIBRATION-TYPE SENSOR Peer-reviewed

S INABA, H KUMAZAKI, K HANE

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　34　(4A)　2018-2021　1995/04

DOI： 10.1143/JJAP.34.2018 　

ISSN： 0021-4922

SCANNING FORCE MICROSCOPE TECHNIQUE FOR ADHESION DISTRIBUTION MEASUREMENT Peer-reviewed

M SASAKI, K HANE, S OKUMA, A TORII

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　13　(2)　350-354　1995/03

DOI： 10.1116/1.587944 　

ISSN： 0734-211X

ULTRASONIC ATOMIZATION OF THE DNA SOLUTION FOR ATOMIC-FORCE MICROSCOPY Peer-reviewed

M SASAKI, S OKUMA, K MIYATA, K HANE, Y TAKEDA

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　13　(2)　355-360　1995/03

DOI： 10.1116/1.587945 　

ISSN： 0734-211X

Pressure Sensor Using Photothermal Vibration of Optical Fiber Core Peer-reviewed

Hironori Kumazaki, Seiki Inaba, Kazuhiro Hane

Shinku　38　(3)　176-178　1995

DOI： 10.3131/jvsj.38.176 　

ISSN： 0559-8516

Self-excited vibration of a self-supporting thin film caused by laser irradiation Peer-reviewed

K. Hane, K. Suzuki

Sensors and Actuators: A. Physical　51　(2-3)　179-182　1995

DOI： 10.1016/0924-4247(95)01218-4 　

ISSN： 0924-4247

IMPROVED DIFFERENTIAL HETERODYNE INTERFEROMETER FOR ATOMIC-FORCE MICROSCOPY Peer-reviewed

M SASAKI, K HANE, S OKUMA, M HINO, Y BESSHO

REVIEW OF SCIENTIFIC INSTRUMENTS　65　(12)　3697-3701　1994/12

DOI： 10.1063/1.1144494 　

ISSN： 0034-6748

TEMPERATURE-DEPENDENCE OF RESONANCE FREQUENCY OF SHAPE-MEMORY ALLOY VIBRATED PHOTOTHERMALLY Peer-reviewed

S INABA, H KUMAZAKI, M HORIBE, K HANE

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　33　(9A)　5064-5066　1994/09

DOI： 10.1143/JJAP.33.5064 　

ISSN： 0021-4922

ADHESIVE FORCE DISTRIBUTION ON MICROSTRUCTURES INVESTIGATED BY AN ATOMIC-FORCE MICROSCOPE Peer-reviewed

A TORII, M SASAKI, K HANE, S OKUMA

SENSORS AND ACTUATORS A-PHYSICAL　44　(2)　153-158　1994/08

DOI： 10.1016/0924-4247(94)00798-5 　

ISSN： 0924-4247

SHAPE OF THE CANTILEVER DEFLECTION FOR THE ATOMIC-FORCE MICROSCOPE IN FORCE CURVE MEASUREMENTS Peer-reviewed

M SASAKI, K HANE, S OKUMA, Y BESSHO

REVIEW OF SCIENTIFIC INSTRUMENTS　65　(6)　1930-1934　1994/06

DOI： 10.1063/1.1144844 　

ISSN： 0034-6748

2-DIRECTIONAL DYNAMIC-MODE FORCE MICROSCOPY - DETECTION OF DIRECTIONAL FORCE GRADIENT Peer-reviewed

S WATANABE, K HANE, M ITO, T GOTO

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　12　(3)　1577-1580　1994/05

DOI： 10.1116/1.587290 　

ISSN： 1071-1023

ADHESION OF MICROSTRUCTURES INVESTIGATED BY ATOMIC-FORCE MICROSCOPY Peer-reviewed

A TORII, M SASAKI, K HANE, S OKUMA

SENSORS AND ACTUATORS A-PHYSICAL　40　(1)　71-76　1994/01

DOI： 10.1016/0924-4247(94)85032-1 　

ISSN： 0924-4247

NANOMETER-SCALE PIT FORMATION BY SCANNING-TUNNELING-MICROSCOPY ON GRAPHITE SURFACE AND TIP CURRENT MEASUREMENTS Peer-reviewed

T ABE, K HANE, S OKUMA

JOURNAL OF APPLIED PHYSICS　75　(2)　1228-1230　1994/01

DOI： 10.1063/1.356462 　

ISSN： 0021-8979

Vaccum Photothermal Displacement of the Shape-Memory Alloy for the Development of an Optical Actuator Peer-reviewed

Seiki Inaba, Masaomi Hioki, Hironori Kumazaki, Kazuhiro Hane

Shinku　37　(3)　282-284　1994

DOI： 10.3131/jvsj.37.282 　

ISSN： 0559-8516

THE FEASIBILITY OF A PRECISE LINEAR DISPLACEMENT ENCODER USING MULTIPLE PROBE FORCE MICROSCOPE Peer-reviewed

A TORII, M SASAKI, K HANE, S OKUMA

INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING　27　(4)　367-372　1993/12

ISSN： 0916-782X

DYNAMIC-MODE FORCE MICROSCOPY FOR THE DETECTION OF LATERAL AND VERTICAL ELECTROSTATIC FORCES Peer-reviewed

S WATANABE, K HANE, M ITO, T GOTO

APPLIED PHYSICS LETTERS　63　(18)　2573-2575　1993/11

DOI： 10.1063/1.110437 　

ISSN： 0003-6951

Scanning Force Microscope Using a Common-path Optical Heterodyne Interferometer Peer-reviewed

日野元人, 佐々木実, 藤田一彦, 別所芳則, 羽根一博, 大熊繁

Journal of the Japan Society of Precision Engineering　59　(11)　1853-1858　1993/11

DOI： 10.2493/jjspe.59.1853 　

ISSN： 0912-0289

ELECTROSTATIC FORCE MICROSCOPE IMAGING ANALYZED BY THE SURFACE-CHARGE METHOD Peer-reviewed

S WATANABE, K HANE, T OHYE, M ITO, T GOTO

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　11　(5)　1774-1781　1993/09

DOI： 10.1116/1.586477 　

ISSN： 1071-1023

MINIATURE ACTUATOR DRIVEN PHOTOTHERMALLY USING A SHAPE-MEMORY ALLOY Peer-reviewed

S INABA, K HANE

REVIEW OF SCIENTIFIC INSTRUMENTS　64　(6)　1633-1635　1993/06

DOI： 10.1063/1.1144038 　

ISSN： 0034-6748

PHOTOTHERMAL VIBRATION FOR A CANTILEVER PLACED NEAR A PLANAR WALL IN LOW-VACUUM REGION Peer-reviewed

S INABA, K AKAISHI, T MORI, K HANE

VACUUM　44　(5-7)　599-601　1993/05

DOI： 10.1016/0042-207X(93)90105-J 　

ISSN： 0042-207X

ANALYSIS OF THE RESONANCE CHARACTERISTICS OF A CANTILEVER VIBRATED PHOTOTHERMALLY IN A LIQUID Peer-reviewed

S INABA, K AKAISHI, T MORI, K HANE

JOURNAL OF APPLIED PHYSICS　73　(6)　2654-2658　1993/03

DOI： 10.1063/1.353060 　

ISSN： 0021-8979

DEPENDENCE OF RESONANCE FREQUENCY OF A MEMBRANE VIBRATED PHOTOTHERMALLY ON PRESSURE AND GEOMETRY IN A LOW-VACUUM REGION Peer-reviewed

S INABA, K HANE

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　32　(2)　1001-1004　1993/02

ISSN： 0021-4922

ADHESIVE FORCE OF THE MICROSTRUCTURES MEASURED BY THE ATOMIC FORCE MICROSCOPE Peer-reviewed

A TORII, M SASAKI, K HANE, S OKUMA

MICRO ELECTRO MECHANICAL SYSTEMS, PROCEEDINGS　111-116　1993

光熱振動における共振の鋭さQの圧力依存性 Peer-reviewed

稲葉成基, 赤石憲也, 森 貴叙, 羽根一博

真空　36　316-318　1993

DOI： 10.3131/jvsj.36.316 　

EXCITATION OF A PROGRESSIVE PLATE WAVE BY THE PHOTOTHERMAL EFFECT Peer-reviewed

T IWATSUKI, K HANE, S OKUMA

SENSORS AND ACTUATORS A-PHYSICAL　35　(2)　87-91　1992/12

DOI： 10.1016/0924-4247(92)80145-S 　

ISSN： 0924-4247

An Elasticity Evaluation Method for Micro Mechanical Structure by Using Load-Deflection Curve of Force Microscope Peer-reviewed

鳥井昭宏, 佐々木実, 羽根一博, 大熊繁

The Transactions of the Institute of Electrical Engineers of Japan A　112　979-986　1992/12

DOI： 10.1541/ieejfms1990.112.12_979 　

APPLICATION OF PHOTOTHERMAL VIBRATION TO A DIAPHRAGM MANOMETER IN A MEDIUM-VACUUM REGION Peer-reviewed

S INABA, K HANE

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　31　(8)　2644-2645　1992/08

ISSN： 0021-4922

A COMPACT INTERFEROMETER USING MOIRE EFFECT FOR THE PHASE COMPENSATION Peer-reviewed

S WATANABE, K HANE, T GOTO

REVIEW OF SCIENTIFIC INSTRUMENTS　63　(8)　3856-3861　1992/08

DOI： 10.1063/1.1143283 　

ISSN： 0034-6748

FREQUENCY-SHIFT ON A MICROMACHINED RESONATOR EXCITED PHOTOTHERMALLY IN VACUUM Peer-reviewed

K HANE, T IWATUKI, S INABA, S OKUMA

REVIEW OF SCIENTIFIC INSTRUMENTS　63　(7)　3781-3782　1992/07

DOI： 10.1063/1.1143271 　

ISSN： 0034-6748

OPTICAL SENSING FOR PRESSURE IN A MEDIUM VACUUM REGION BY USING THE DRUM EFFECT Peer-reviewed

S INABA, K HANE

APPLIED OPTICS　31　(16)　2969-2970　1992/06

ISSN： 0003-6935

ディジタル信号処理FMヘテロダイン干渉法による近距離検出 Peer-reviewed

伊藤昌文, 羽根一博, 松田文夫, 後藤俊夫

精密工学会誌　58　(6)　1005-1010　1992/06

DOI： 10.2493/jjspe.58.1005 　

ISSN： 0912-0289

LIQUID DENSITY SENSING BY USING A PHOTOTHERMAL VIBRATION Peer-reviewed

S INABA, Y OKUHARA, K HANE

SENSORS AND ACTUATORS A-PHYSICAL　33　(3)　163-166　1992/06

DOI： 10.1016/0924-4247(92)80162-V 　

ISSN： 0924-4247

PRESSURE-DEPENDENCE OF THE RESONANCE FREQUENCY FOR A PHOTOTHERMAL VIBRATION OF A THIN CIRCULAR GLASS PLATE IN VACUUM Peer-reviewed

S INABA, K HANE

VACUUM　43　(4)　291-292　1992/04

DOI： 10.1016/0042-207X(92)90157-R 　

ISSN： 0042-207X

PHOTOTHERMAL VIBRATION FOR A MEMBRANE IN WATER Peer-reviewed

S INABA, K HANE

JOURNAL OF APPLIED PHYSICS　71　(7)　3631-3632　1992/04

DOI： 10.1063/1.350924 　

ISSN： 0021-8979

Optical sensing for pressure in a medium vacuum region by using the drum effect Peer-reviewed

Seiki Inaba, Kazuhiro Hane

Applied Optics　31　(16)　2969-2970　1992

DOI： 10.1364/AO.31.002969 　

ISSN： 2155-3165 1559-128X

フォトサ-マル効果を用いた近接距離検出法 Peer-reviewed

伊藤昌文, 羽根一博, 松田文夫, 後藤俊夫

精密工学会誌　58　(1)　139-144　1992

DOI： 10.2493/jjspe.58.139 　

ISSN： 0912-0289

光熱弾性法によるはんだ接合部評価法の研究 Peer-reviewed

斉藤雄之, 羽根一博

精密工学会誌　58　(2)　343-348　1992

DOI： 10.2493/jjspe.58.343 　

ISSN： 0912-0289

光熱振動を用いた光学式隔膜真空計の開発 Peer-reviewed

稲葉成基, 羽根一博

真空　35　140-142　1992

DOI： 10.3131/jvsj.35.140 　

Electrostatic Force Images of the Fine Electrodes Obtained with Scanning Attractive Force Microscope Peer-reviewed

S. Watanabe, M. Ito, K. Hane, T. Goto

Supplement to Vol.3 of the Int. J. of Appl. Electromagnetics in Materials　197-200　1992

Development of atomic force microscope using heterodyne interferometry Peer-reviewed

M. Sasaki, M. Hino, K. Fujita, Y. Bessho, K. Hane, S. Okuma

Supplement to Vol.3 of the Int. J. of Appl. Electromagnetics in Materials　437-440　1992

FORCE MICROSCOPE USING A TWIN-PATH INTERFEROMETER Peer-reviewed

S WATANABE, K HANE, T GOTO

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　10　(1)　1-5　1992/01

DOI： 10.1116/1.586301 　

ISSN： 1071-1023

RESONANCE FREQUENCY OF A PHOTOTHERMAL VIBRATION FOR A POLYETHYLENE THIN PLATE IN MEDIUM VACUUM REGION Peer-reviewed

S INABA, K HANE

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS　9　(6)　3173-3174　1991/11

DOI： 10.1116/1.577140 　

ISSN： 0734-2101

リソグラフィ・マークのレーザー回折光を用いた位置姿勢の検出法 Peer-reviewed

伊藤昌文, 河口寿夫, 羽根一博, 松田文夫, 後藤俊夫

計測自動制御学会論文集　27　1188-1190　1991/10

DOI： 10.9746/sicetr1965.27.1188 　

RESONANCE FREQUENCY-SHIFTS OF A PHOTOTHERMAL VIBRATION IN VACUUM Peer-reviewed

S INABA, K HANE

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS　9　(4)　2138-2139　1991/07

DOI： 10.1116/1.577239 　

ISSN： 0734-2101

十字回折ビームを用いた基準点の方向検出法 Peer-reviewed

伊藤昌文, 羽根一博, 松田文夫, 内川嘉樹, 服部秀三

計測自動制御学会論文集　27　(3)　368-370　1991/03

DOI： 10.9746/sicetr1965.27.368 　

ISSN： 0453-4654

円形回折格子のレーザ回折光を用いた基準位置検出法 Peer-reviewed

伊藤昌文, 河口寿夫, 羽根一博, 松田文夫, 後藤俊夫

精密工学会誌　57　(2)　280-285　1991/02

DOI： 10.2493/jjspe.57.280 　

ISSN： 0912-0289

Photothermoelastic evaluation for small mechanical structures Peer-reviewed

Kazuhiro Hane, Takashi Naito, Shuzo Hattori

Applied Optics　30　(1)　72-77　1991

DOI： 10.1364/AO.30.000072 　

ISSN： 2155-3165 1559-128X

レ-ザ真空計のためのリソグラフィ加工した薄板の真空中フォトサ-マル振動 Peer-reviewed

羽根一博, 稲葉成基

真空　34　378-380　1991

DOI： 10.3131/jvsj.34.378 　

真空中におけるホトサ-マル振動周波数の励振入力依存 Peer-reviewed

稲葉成基, 羽根一博

真空　34　381-383　1991

DOI： 10.3131/jvsj.34.381 　

周波数計測による低真空領域の光学式圧力センシング Peer-reviewed

稲葉成基, 羽根一博

真空　34　894-898　1991

DOI： 10.3131/jvsj.34.894 　

PHOTOTHERMOELASTIC EVALUATION FOR SMALL MECHANICAL STRUCTURES Peer-reviewed

K HANE, T NAITO, S HATTORI

APPLIED OPTICS　30　(1)　72-78　1991/01

DOI： 10.1364/AO.30.000072 　

ISSN： 0003-6935

MOIRE SIGNALS BY THE PHOTOACOUSTIC EFFECT Peer-reviewed

K HANE, S WATANABE, S HATTORI, T GOTO

OPTICS LETTERS　15　(22)　1318-1320　1990/11

DOI： 10.1364/OL.15.001318 　

ISSN： 0146-9592

A REMOTE PRESSURE SENSING TECHNIQUE BY USING THE PHOTOTHERMAL BENDING EFFECT Peer-reviewed

K HANE, Y INAHARA, T GOTO

REVIEW OF SCIENTIFIC INSTRUMENTS　61　(10)　2692-2695　1990/10

DOI： 10.1063/1.1141861 　

ISSN： 0034-6748

Photothermal bending of a layered sample in plate form Peer-reviewed

Kazuhiro Hane, Shuzo Hattori

Applied Optics　29　(1)　145-150　1990

DOI： 10.1364/AO.29.000145 　

ISSN： 2155-3165 1559-128X

MOIRE DISPLACEMENT DETECTION BY THE PHOTOACOUSTIC TECHNIQUE Peer-reviewed

K HANE, S WATANABE, T GOTO

OPTICAL TESTING AND METROLOGY III : RECENT ADVANCES IN INDUSTRIAL OPTICAL INSPECTION, PTS 1 AND 2　1332　577-583　1990

MOIRE SIGNALS OF CIRCULAR GRATINGS AND ITS APPLICATION TO PRECISE ALIGNMENT Peer-reviewed

K HANE, T GOTO, S HATTORI

OPTICS IN COMPLEX SYSTEMS　1319　335-336　1990

ホトサ-マル効果によって振動するガラス板の周波数の圧力依存性 Peer-reviewed

稲葉成基, 羽根一博

真空　33　686-688　1990

DOI： 10.3131/jvsj.33.686 　

PHOTOTHERMAL BENDING OF A LAYERED SAMPLE IN PLATE FORM Peer-reviewed

K HANE, S HATTORI

APPLIED OPTICS　29　(1)　145-150　1990/01

DOI： 10.1364/AO.29.000145 　

ISSN： 0003-6935

Reflection Lau imaging and its application to displacement sensing Peer-reviewed

K. Hane, S. Hattori, C. P. Grover

Proceedings of SPIE - The International Society for Optical Engineering　954　160-165　1989/01/16

DOI： 10.1117/12.947585 　

ISSN： 1996-756X 0277-786X

Application of photothermoelastic effect to noncontact inspection of soldered connections Peer-reviewed

K. Hane, S. Hattori

Proceedings of SPIE - The International Society for Optical Engineering　954　593-598　1989/01/16

DOI： 10.1117/12.947638 　

ISSN： 1996-756X 0277-786X

Photothermoelastic inspection of soldered connections Peer-reviewed

Kazuhiro Hane, Shuzo Hattori

Applied Optics　27　(19)　3965-3967　1988/10/01

DOI： 10.1364/AO.27.003965 　

ISSN： 2155-3165 1559-128X

PHOTOTHERMOELASTIC INSPECTION OF SOLDERED CONNECTIONS Peer-reviewed

K HANE, S HATTORI

APPLIED OPTICS　27　(19)　3965-3967　1988/10

ISSN： 0003-6935

インコヒーレント照明におけるグレーティングイメージングを用いた精密変位測定 Peer-reviewed

羽根一博, 伊藤 孝, 服部秀三

日本機械学会論文集（Ｃ編）　54　(506)　2487-2490　1988/10

DOI： 10.1299/kikaic.54.2487 　

ISSN： 0387-5024

PHOTOTHERMOELASTIC IMAGING AT A FLEXURAL RESONANCE FREQUENCY OF A CLAMPED PLATE SAMPLE Peer-reviewed

K HANE, T KANIE, S HATTORI

JOURNAL OF APPLIED PHYSICS　64　(4)　2229-2232　1988/08

DOI： 10.1063/1.341691 　

ISSN： 0021-8979

NONCONTACT TENSION SENSING BY THE PHOTOTHERMOELASTIC EFFECT Peer-reviewed

K HANE, S HATTORI

OPTICS LETTERS　13　(7)　550-552　1988/07

ISSN： 0146-9592

PHOTO-THERMOELASTIC MECHANICAL BEAM CHOPPER AT A LOW-FREQUENCY Peer-reviewed

K HANE, T KANIE, S HATTORI

REVIEW OF SCIENTIFIC INSTRUMENTS　59　(4)　655-655　1988/04

DOI： 10.1063/1.1139854 　

ISSN： 0034-6748

PHOTOTHERMOELASTIC PROBING FOR A CLAMPED PLATE SAMPLE Peer-reviewed

K HANE, T KANIE, S HATTORI

APPLIED OPTICS　27　(2)　386-392　1988/01

ISSN： 0003-6935

LAU EFFECT IN REFLECTION Peer-reviewed

K HANE, S HATTORI, CP GROVER

JOURNAL OF MODERN OPTICS　34　(11)　1481-1490　1987/11

DOI： 10.1080/09500348714551381 　

ISSN： 0950-0340

MAGNIFIED GRATING IMAGES USED IN DISPLACEMENT SENSING Peer-reviewed

K HANE, CP GROVER

APPLIED OPTICS　26　(12)　2355-2359　1987/06

ISSN： 0003-6935

IMAGING WITH RECTANGULAR TRANSMISSION GRATINGS Peer-reviewed

K HANE, CP GROVER

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION　4　(4)　706-711　1987/04

ISSN： 0740-3232

電子線真空リソグラフィ装置による回転角エンコ-ダの加工 Peer-reviewed

内田悦行, 松井圭司, 佐合祐稔, 羽根一博, 森田慎三, 服部秀三

真空　30　391-394　1987

DOI： 10.3131/jvsj.30.391 　

Automatic alignment technique for x-ray lithography using moiré signals in reflection Peer-reviewed

Yoshiyuki Uchida, Masato Furukawa, Kazuhiro Hane, Shuzo Hattori

Proceedings of SPIE - The International Society for Optical Engineering　661　95-101　1986/11/25

DOI： 10.1117/12.938597 　

ISSN： 1996-756X 0277-786X

Development of double twin path laser interferometer for thin film thickness measurement Peer-reviewed

Yoshiyuki Uchida, Motomu Asano, Masatoshi Kuwata, Masaaki Yamaguchi, Kazuhiro Hane, Shuzo Hattori

Proceedings of SPIE - The International Society for Optical Engineering　661　102-109　1986/11/25

DOI： 10.1117/12.938598 　

ISSN： 1996-756X 0277-786X

MEASUREMENTS OF VERY LOW GAS-FLOW VELOCITIES BY PHOTOTHERMAL DEFLECTION SPECTROSCOPY Peer-reviewed

YX NIE, K HANE, R GUPTA

APPLIED OPTICS　25　(18)　3247-3252　1986/09

ISSN： 0003-6935

DOUBLE TWIN PATH INTERFEROMETER FOR THIN-FILM THICKNESS MEASUREMENT Peer-reviewed

VT CHITNIS, Y UCHIDA, K HANE, K YONEDA, S HATTORI

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS　25　(7)　1078-1083　1986/07

ISSN： 0021-4922

DIRECT EXCITATION CROSS-SECTIONS OF ZN-II STATES EXCITED BY ELECTRON ZN-ATOM COLLISIONS Peer-reviewed

S INABA, K HANE, T GOTO

JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS　19　(9)　1371-1376　1986/05

DOI： 10.1088/0022-3700/19/9/017 　

ISSN： 0953-4075

EXCITATION-FUNCTIONS OF CD-III 4D85S2 (BEUTLER) STATES BY ELECTRON-IMPACT ON CD ATOMS Peer-reviewed

S INABA, K HANE, T GOTO

PHYSICS LETTERS A　114　(4)　201-202　1986/02

DOI： 10.1016/0375-9601(86)90206-9 　

ISSN： 0375-9601

Direct excitation cross sections of Zn II states excited by electron-Zn-atom collisions Peer-reviewed

S. Inaba, K. Hane, T. Goto

Journal of Physics B: Atomic and Molecular Physics　19　(9)　1371-1376　1986

DOI： 10.1088/0022-3700/19/9/017 　

ISSN： 0022-3700

MOIRE DISPLACEMENT MEASUREMENT TECHNIQUE FOR A LINEAR ENCODER Peer-reviewed

K HANE, Y UCHIDA, S HATTORI

OPTICS AND LASER TECHNOLOGY　17　(2)　89-95　1985

DOI： 10.1016/0030-3992(85)90007-6 　

ISSN： 0030-3992

MOIRE SIGNALS IN REFLECTION Peer-reviewed

VT CHITNIS, Y UCHIDA, K HANE, S HATTORI

OPTICS COMMUNICATIONS　54　(4)　207-211　1985

DOI： 10.1016/0030-4018(85)90292-5 　

ISSN： 0030-4018

TILT-INSENSITIVE FILM THICKNESS MEASUREMENT USING A DOUBLE TWIN-PATH INTERFEROMETER Peer-reviewed

K HANE, K YONEDA, S HATTORI

OPTICS AND LASER TECHNOLOGY　17　(4)　208-212　1985

DOI： 10.1016/0030-3992(85)90090-8 　

ISSN： 0030-3992

EMISSION CROSS-SECTIONS FOR SPECTRAL-LINES TRANSITING FROM THE CD(II)4D95S5P STATES AND HIGH-LYING 4D10NL STATES EXCITED BY SINGLE-ELECTRON IMPACT ON CD ATOMS Peer-reviewed

T GOTO, K HANE, S HATTORI

PHYSICAL REVIEW A　29　(1)　111-115　1984

DOI： 10.1103/PhysRevA.29.111 　

ISSN： 1050-2947

EMISSION CROSS-SECTIONS FOR THE LASER LINES OF I+ BY ELECTRON I-2-MOLECULE COLLISIONS Peer-reviewed

K HANE, T GOTO, S HATTORI

PHYSICS LETTERS A　104　(3)　146-148　1984

DOI： 10.1016/0375-9601(84)90363-3 　

ISSN： 0375-9601

DIRECT OBSERVATION OF DOUBLE DIFFRACTION PATTERNS Peer-reviewed

K HANE, S HATTORI

OPTICS AND LASER TECHNOLOGY　16　(6)　307-310　1984

DOI： 10.1016/0030-3992(84)90128-2 　

ISSN： 0030-3992

Emission cross sections of the Cd II spectral lines in e-Cd+-ion collisions Peer-reviewed

K. Hane, T. Goto, S. Hattori

Journal of Physics B: Atomic and Molecular Physics　16　(4)　629-637　1983

DOI： 10.1088/0022-3700/16/4/016 　

ISSN： 0022-3700

EXCITATION CROSS-SECTIONS OF CD+ IONS FOR THE UPPER AND LOWER STATES OF THE CD II 441.6-NM LASER LINE BY ELECTRON-IMPACT Peer-reviewed

K HANE, T GOTO, S HATTORI

PHYSICAL REVIEW A　27　(1)　124-131　1983

DOI： 10.1103/PhysRevA.27.124 　

ISSN： 1050-2947

EMISSION CROSS-SECTIONS OF THE CD-II SPECTRAL-LINES IN E-CD+-ION COLLISIONS Peer-reviewed

K HANE, T GOTO, S HATTORI

JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS　16　(4)　629-637　1983

DOI： 10.1088/0022-3700/16/4/016 　

ISSN： 0953-4075

DIRECT-EXCITATION CROSS-SECTIONS FOR CD II LOW-LYING EXCITED-STATES BY SINGLE-ELECTRON IMPACT ON CD ATOMS Peer-reviewed

T GOTO, K HANE, M OKUDA, S HATTORI

PHYSICAL REVIEW A　27　(4)　1844-1850　1983

DOI： 10.1103/PhysRevA.27.1844 　

ISSN： 1050-2947

RATIO OF EXCITATION CROSS-SECTIONS FOR THE CD(II)5S22D5/2 AND 5P2P3-2 STATES IN CD-+ ION ELECTRON COLLISIONS Peer-reviewed

K HANE, T GOTO, S HATTORI

JOURNAL OF PHYSICS D-APPLIED PHYSICS　15　(6)　L47-L49　1982

DOI： 10.1088/0022-3727/15/6/001 　

ISSN： 0022-3727

COMPETITION BETWEEN DIFFERENT EXCITATION PROCESSES OF THE CD(II) 5S2 2D5-2 STATE AT LOW DISCHARGE CURRENTS IN THE POSITIVE-COLUMN HE-CD+ LASER DISCHARGE Peer-reviewed

T GOTO, K HANE, S HATTORI

JOURNAL OF PHYSICS D-APPLIED PHYSICS　14　(4)　587-592　1981

DOI： 10.1088/0022-3727/14/4/012 　

ISSN： 0022-3727

EXCITATION MECHANISM OF THE CD(II) 5S2 2D5/2 STATE IN THE POSITIVE-COLUMN NE-CD+ LASER DISCHARGE - AN INTERPRETATION OF THE DIFFERENCE OF 441.6 NM LASER OUTPUT POWERS IN NE-CD AND HE-CD DISCHARGES Peer-reviewed

K HANE, T GOTO, S HATTORI

JOURNAL OF PHYSICS D-APPLIED PHYSICS　14　(9)　1603-1611　1981

DOI： 10.1088/0022-3727/14/9/008 　

ISSN： 0022-3727