-
Electrocatalytic carbon dioxide reduction microchanneled with nanostructured electrodes
Zheng-Yan Lei, Nguyen Van Toan, Masaya Toda, Ioana Voiculescu, Takahito Ono
Journal of Science: Advanced Materials and Devices 2025/09
DOI：
10.1016/j.jsamd.2025.100897
-
Characteristics of Schottky gated field-effect transistors utilizing cellulose nanoparticles
Mikio Fukuhara, Tomonori Yokotsuka, Tetsuo Samoto, Takahito Ono, Nobuhisa Fujima, Toshiyuki Hashida
AIP Advances 2025/07/01
DOI：
10.1063/5.0279007
-
Anisotropy breaking in high level piezoelectric energy harvesting
Peer-reviewed
Gaspard Taxil, Mickaël Lallart, Hung Hoang Nguyen, Benjamin Ducharne, Hiroki Kuwano, Takahito Ono, Gaël Sebald
Scripta Materialia 2025/05
DOI：
10.1016/j.scriptamat.2025.116629
-
Piezoresistivity of Epitaxial SiGe
Peer-reviewed
Y. Yamamoto, W.-C. Wen, N. Inomata, A. A. Corley-Wiciak, D. Ryzhak, C. Corley-Wiciack, Z. Zhijian, R. Sorge, B. Tillack, T. Ono
ECS Journal of Solid State Science and Technology 2025/04/01
DOI：
10.1149/2162-8777/adc488
-
Investigation towards nanomechanical sensor array for real-time detection of complex gases
Momin, M. A., Toda, M., Wang, Z., Yamazaki, M., Moorthi, K., Kawaguchi, Y., Ono, T.
Microsystems and Nanoengineering 11 (1) 53 2025/03
DOI：
10.1038/s41378-025-00899-2
-
Spin–current volume effect on iron gallium films
Peer-reviewed
Yin-Chen Huang, Yi-Te Huang, Hiroki Arisawa, Takashi Kikkawa, Eiji Saitoh, Ioana Voiculescu, Takahito Ono
Applied Physics Letters 2025/03/01
DOI：
10.1063/5.0239164
-
Noninvasive DC Current Monitoring for High-Sensitivity With Temperature Compensation
Yifan Fang, Takahito Ono, Dong F. Wang
IEEE Transactions on Industrial Electronics 2025
DOI：
10.1109/TIE.2025.3587115
-
Magnetic Sensor Using a Microfabricated Soft Magnet Resonator With Active Q-Factor Enhancement
Peer-reviewed
Zhijian Zhao, Masaya Toda, Takahito Ono
IEEE Sensors Journal 2024/12/01
DOI：
10.1109/JSEN.2024.3476499
-
Water Evaporation-induced Power Generation Using Porous AZO Films
Peer-reviewed
Ayumu Hinata, Takahito Ono, Masaya Toda
IEEJ Transactions on Sensors and Micromachines 144 (7) 176-180 2024/07/01
DOI：
10.1541/ieejsmas.144.176
ISSN：
1341-8939
eISSN：
1347-5525
-
A resonant magnetic microsensor based on magnetic torque with piezoresistive readout
Peer-reviewed
Zhijian Zhao, Masaya Toda, Takahito Ono
Applied Physics Letters 124 (25) 2024/06/17
DOI：
10.1063/5.0207431
ISSN：
0003-6951
-
Vibration Readout of Microstructure Based on Inverse-Magnetostriction With an Integrated Hall Sensor
Peer-reviewed
Takahito Ono, Taiga Ezura, Naoki Inomata
IEEE Sensors Journal 24 (7) 9604-9610 2024/04/01
DOI：
10.1109/JSEN.2024.3364129
ISSN：
1530-437X
eISSN：
1558-1748
-
Nanoengineered micro-supercapacitors based on graphene nanowalls for self-powered wireless sensing system
Peer-reviewed
Nguyen Van Toan, Hongtao Sui, Jinhua Li, Truong Thi Kim Tuoi, Takahito Ono
Journal of Energy Storage 81 2024/03/15
DOI：
10.1016/j.est.2024.110446
eISSN：
2352-152X
-
Actuation of microstructures with spin-current volume effect
Peer-reviewed
Yi-Te Huang, Kenta Suzuki, Hiroki Arisawa, Takashi Kikkawa, Eiji Saitoh, Takahito Ono
Communications Engineering 3 (1) 2024/03/07
Publisher:
Springer Science and Business Media LLC
DOI：
10.1038/s44172-024-00187-3
eISSN：
2731-3395
-
A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film
Peer-reviewed
Chuan-Hui Ou, Nguyen Van Toan, Yao-Chuan Tsai, Ioana Voiculescu, Masaya Toda, Takahito Ono
Journal of Microelectromechanical Systems 33 (1) 46-53 2024/02/01
DOI：
10.1109/JMEMS.2023.3337333
ISSN：
1057-7157
eISSN：
1941-0158
-
Nano-diamond on Si Cantilever based Multi-dimensional Stress Sensing under Static Magnetic Field
Peer-reviewed
Kanta Yamakawa, Yuta Ochiai, Takahito Ono, Masaya Toda
IEEJ Transactions on Sensors and Micromachines 144 (5) 89-93 2024
DOI：
10.1541/ieejsmas.144.89
ISSN：
1341-8939
eISSN：
1347-5525
-
An Electromagnetically Driven Micromirror with a Large Stroke
Peer-reviewed
Chuan Hui Ou, Nguyen Van Toan, Takahito Ono
Sensors and Materials 36 (6) 2237-2248 2024
DOI：
10.18494/SAM5027
ISSN：
0914-4935
-
Joule magnetostriction and volume magnetostriction of Iron Gallium thin films
Peer-reviewed
Yin Chen Huang, Ioana Voiculescu, Takahito Ono
Journal of Magnetism and Magnetic Materials 588 2023/12/15
DOI：
10.1016/j.jmmm.2023.171419
ISSN：
0304-8853
-
Stress and electric field induced phase transitions for ultra high energy conversion in ferroelectrics
Peer-reviewed
Gaspard Taxil, Gaël Sebald, Tung Thanh Nguyen, Benjamin Ducharne, Hung Hoang Nguyen, Takahito Ono, Hiroki Kuwano, Mickaël Lallart
Acta Materialia 261 2023/12/01
DOI：
10.1016/j.actamat.2023.119367
ISSN：
1359-6454
-
Magnetostriction and volume magnetostriction of sputtered Tb20Fe24Co56 film
Peer-reviewed
Yi-Te Huang, Takahito Ono
Materials Research Express 10 (10) 2023/10/01
DOI：
10.1088/2053-1591/acfd0d
eISSN：
2053-1591
-
Thermoelectric properties of Indium doped skutterudite thick film synthesized by a facile technique of electrochemical deposition
Peer-reviewed
Nuur Syahidah Sabran, Iman Aris Fadzallah, Mohd Faizul Mohd Sabri, Takahito Ono
Journal of Materiomics 9 (5) 899-909 2023/09
DOI：
10.1016/j.jmat.2023.02.013
ISSN：
2352-8478
eISSN：
2352-8486
-
Piezoelectric small scale generator: towards near-Joule output energy generation
Peer-reviewed
Gael Sebald, Nguyen Thanh Tung, Gaspard Taxil, Benjamin Ducharne, Jhordan Chavez, Takahito Ono, Hiroki Kuwano, Elie Lefeuvre, Mickaël Lallart
Smart Materials and Structures 32 (8) 2023/08
DOI：
10.1088/1361-665X/acdf31
ISSN：
0964-1726
eISSN：
1361-665X
-
Magnetostriction of electroplated TbFeCo thin films
Peer-reviewed
Yi-Te Huang, Takahito Ono
Journal of Magnetism and Magnetic Materials 577 2023/07/01
DOI：
10.1016/j.jmmm.2023.170799
ISSN：
0304-8853
-
Metal-Multilayered Nanomechanical Cantilever Sensor for Detection of Molecular Adsorption
Peer-reviewed
Masaya Toda, Takahito Ono, Jun Okubo
Biosensors 13 (6) 2023/06
DOI：
10.3390/bios13060573
eISSN：
2079-6374
-
Directional Energy Transfer in a Coupled Symmetrical Multifrequency Atomic Force Microscope Cantilever
Peer-reviewed
Haiteng Ma, Shaokang Chen, Dong F. Wang, Jin Wang, Takahito Ono
IEEE Transactions on Instrumentation and Measurement 72 2023
DOI：
10.1109/TIM.2023.3306841
ISSN：
0018-9456
eISSN：
1557-9662
-
A Large-Stroke Tip-Tilt-Piston Micromirror with Electromagnetic Actuators Based on Metallic Glass
Chuan Hui Ou, Nguyen V. Toan, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2023-January 1103-1106 2023
DOI：
10.1109/MEMS49605.2023.10052335
ISSN：
1084-6999
-
Measurement of cellular thermal properties and their temperature dependence based on frequency spectra via an on-chip-integrated microthermistor
Peer-reviewed
Naoki Inomata, Takumi Miyamoto, Kohki Okabe, Takahito Ono
Lab on a Chip 2023
Publisher:
Royal Society of Chemistry (RSC)
DOI：
10.1039/d2lc01185a
ISSN：
1473-0197
eISSN：
1473-0189
-
Quality factor control of mechanical resonators using variable phononic bandgap on periodic microstructures
Peer-reviewed
Naoki Inomata, Yuka Tonsho, Takahito Ono
Scientific Reports 12 (1) 2022/12
DOI：
10.1038/s41598-021-04459-2
eISSN：
2045-2322
-
Magnetically coupled oscillators applicable to high-sensitivity mass detection
Peer-reviewed
Cao Xia, Dong F. Wang, Takahito Ono, Toshihiro Itoh, Masayoshi Esashi
Microsystem Technologies 28 (11) 2443-2453 2022/11
DOI：
10.1007/s00542-022-05375-9
ISSN：
0946-7076
eISSN：
1432-1858
-
Ultra-flexible thermoelectric generator based on silicone rubber sheet and electrodeposited thermoelectric material for waste heat harvesting
Peer-reviewed
Nguyen Van Toan, Truong Thi Kim Tuoi, Hongtao Sui, Nguyen Huu Trung, Khairul Fadzli Samat, Takahito Ono
Energy Reports 8 5026-5037 2022/11
DOI：
10.1016/j.egyr.2022.03.121
eISSN：
2352-4847
-
Highly enhanced thermoelectric and mechanical properties of Bi<inf>2</inf>Te<inf>3</inf> hybrid nanocomposite with inclusion of Pt nanoparticles and SWCNTs
Peer-reviewed
Khairul Fadzli Samat, Yijie Li, Nguyen Van Toan, Mohd Asyadi Azam, Takahito Ono
Journal of Materials Research 37 (20) 3445-3458 2022/10/28
DOI：
10.1557/s43578-022-00694-z
ISSN：
0884-2914
eISSN：
2044-5326
-
Effects of temperature and doping concentration on the piezoresistive property of vanadium dioxide thin film
Peer-reviewed
Naoki Inomata, Takuto Usuda, Yuji Yamamoto, Marvin H. Zoellner, Ioan Costina, Takahito Ono
Sensors and Actuators A: Physical 346 2022/10/16
DOI：
10.1016/j.sna.2022.113823
ISSN：
0924-4247
-
Modeling of Olsen cycle for pyroelectric energy harvesting and assessment of abnormal electrocaloric effect in ferroelectric single crystals
Peer-reviewed
G. Taxil, M. Lallart, B. Ducharne, T. T. Nguyen, H. Kuwano, T. Ono, G. Sebald
Journal of Applied Physics 132 (14) 2022/10/14
DOI：
10.1063/5.0107429
ISSN：
0021-8979
eISSN：
1089-7550
-
Temperature depended resistive property of fermented soybeans (Japanese natto) as a temperature sensor material
Peer-reviewed
Naoki Inomata, Takahito Ono
Japanese Journal of Applied Physics 61 (10) 2022/10/01
DOI：
10.35848/1347-4065/ac8bbb
ISSN：
0021-4922
eISSN：
1347-4065
-
Widening frequency bandwidth with parametric coupling in a wings-inspired low frequency MEMS energy harvester
Peer-reviewed
Jie Song, Cao Xia, Guansong Shan, Zhuqing Wang, Takahito Ono, Dong F. Wang
Energy Conversion and Management 267 2022/09/01
DOI：
10.1016/j.enconman.2022.115924
ISSN：
0196-8904
-
Review of Magnetic Resonance Force Sensors Based on Nanomechanical Cantilever
Peer-reviewed
Masaya Toda, Gaopeng Xue, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 142 (9) 224-229 2022/09/01
Publisher:
Institute of Electrical Engineers of Japan (IEE Japan)
DOI：
10.1541/ieejsmas.142.224
ISSN：
1341-8939
eISSN：
1347-5525
-
Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro-thermoelectric generator
Peer-reviewed
Nguyen Van Toan, Keisuke Ito, Truong Thi Kim Tuoi, Masaya Toda, Po Hung Chen, Mohd Faizul Mohd Sabri, Jinhua Li, Takahito Ono
Energy Conversion and Management 267 2022/09/01
DOI：
10.1016/j.enconman.2022.115923
ISSN：
0196-8904
-
Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications
Peer-reviewed
Gaopeng Xue, Masaya Toda, Xinghui Li, Bing Li, Takahito Ono
Micromachines 13 (8) 2022/08
DOI：
10.3390/mi13081287
eISSN：
2072-666X
-
High-performance flexible thermoelectric generator for self-powered wireless BLE sensing systems
Peer-reviewed
Nguyen Van Toan, Truong Thi Kim Tuoi, Takahito Ono
Journal of Power Sources 536 2022/07/15
DOI：
10.1016/j.jpowsour.2022.231504
ISSN：
0378-7753
-
Nanoengineered nanochannels for thermally ionic nanofluidic energy harvesting
Peer-reviewed
Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Megat Muhammad Ikhsan Megat Hasnan, Masaya Toda, Ioana Voiculescu, Suhana Mohd Said, Takahito Ono
Energy Conversion and Management 264 2022/07/15
DOI：
10.1016/j.enconman.2022.115760
ISSN：
0196-8904
-
A mosquito-inspired self-adaptive energy harvester for multi-directional vibrations
Peer-reviewed
Minglei Han, Xu Yang, Dong F. Wang, Lei Jiang, Wei Song, Takahito Ono
Applied Energy 315 2022/06/01
DOI：
10.1016/j.apenergy.2022.119040
ISSN：
0306-2619
-
Density effects of vertical graphene nanowalls on supercapacitor performance
Peer-reviewed
Hongtao Sui, Nguyen Van Toan, Takahito Ono
Materials Advances 3 (13) 5406-5417 2022/05/18
DOI：
10.1039/d2ma00074a
eISSN：
2633-5409
-
Observation of spin-current striction in a magnet
Peer-reviewed
Hiroki Arisawa, Hang Shim, Shunsuke Daimon, Takashi Kikkawa, Yasuyuki Oikawa, Saburo Takahashi, Takahito Ono, Eiji Saitoh
Nature Communications 13 2440 2022/05
DOI：
10.1038/s41467-022-30115-y
-
800 nm band MEMS-tunable VCSEL for microfabricated atomic clock
Zhijan Zhao, Masaya Toda, Takahito Ono, Motoaki Hara, Satoshi Shinada, Hiroshi Nakagawa, Katsuya Kikuchi
Proceeding of Smart System Integration (SSI) Conference 2022 2022/04
DOI：
10.1109/SSI56489.2022.9901411
-
Self-powered wireless sensing system driven by daily ambient temperature energy harvesting
Peer-reviewed
Truong Thi Kim Tuoi, Nguyen Van Toan, Takahito Ono
APPLIED ENERGY 311 2022/04
DOI：
10.1016/j.apenergy.2022.118679
ISSN：
0306-2619
eISSN：
1872-9118
-
Synchronous identification and successive detection of multiple traces with tunable coupling oscillators
Peer-reviewed
Cao Xia, Dong F. Wang, Jie Song, Takahito Ono, Toshihiro Itoh, Ryutaro Maeda, Masayoshi Esashi
Mechanical Systems and Signal Processing 166 2022/03/01
DOI：
10.1016/j.ymssp.2021.108395
ISSN：
0888-3270
eISSN：
1096-1216
-
Autoparametric Internal Resonance in Coupled Oscillator: An Excitation Amplitude Insensitive Mass Sensing Scheme With a Roof Tilting
Peer-reviewed
Cao Xia, Dong F. Wang, Takahito Ono, Toshihiro Itoh, Ryutaro Maeda
IEEE Sensors Journal 22 (3) 1998-2005 2022/02/01
DOI：
10.1109/JSEN.2021.3134464
ISSN：
1530-437X
eISSN：
1558-1748
-
Assembled Comb-Drive XYZ-Microstage With Large Displacements and Low Crosstalk for Scanning Force Microscopy
Peer-reviewed
Gaopeng Xue, Masaya Toda, Xinghui Li, Xiaohao Wang, Takahito Ono
Journal of Microelectromechanical Systems 31 (1) 54-62 2022/02/01
DOI：
10.1109/JMEMS.2021.3123962
ISSN：
1057-7157
eISSN：
1941-0158
-
Development of Nanomechanical Multisensory Arrays for Detection of Hazardous Volatile Materials and Gases
Md. Abdul Momin, Zhuqing Wang, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Yasuaki Kawaguchi, Takahito Ono
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) 2022/01/09
Publisher:
IEEE
DOI：
10.1109/mems51670.2022.9699548
-
Micro Vapor Cells Sealed by Two-Step Bonding for Miniature Atomic Clocks
Hitoshi Nishino, Yasubumi Furuya, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2022-January 983-986 2022
DOI：
10.1109/MEMS51670.2022.9699590
ISSN：
1084-6999
-
FBAR Oscillator and MEMS Tunable VCSEL to Generate the Probe Lasers for Microfabricated Atomic Clock
Motoaki Hara, Satoshi Shinada, Yuichiro Yano, Tetsuya Ido, Zhijian Zhao, Masaya Toda, Takahito Ono, Horoyuki Ito
IEEE International Ultrasonics Symposium, IUS 2022-October 2022
DOI：
10.1109/IUS54386.2022.9958796
ISSN：
1948-5719
eISSN：
1948-5727
-
Micro-fabricated vapor cells with sealed Rb atoms by distillation at wafer level and two-step bonding for miniature atomic clocks
Hitoshi Nishino, Yasubumi Furuya, Takahito Ono
Optics Express 2021/12/20
DOI：
10.1364/OE.442859
-
Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices
Peer-reviewed
Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Masaya Toda, Takahito Ono
Scientific Reports 11 (1) 2021/12
DOI：
10.1038/s41598-020-80880-3
eISSN：
2045-2322
-
Internal resonance in coupled oscillators – Part II: A synchronous sensing scheme for both mass perturbation and driving force with duffing nonlinearity
Cao Xia, Dong F. Wang, Takahito Ono, Toshihiro Itoh, Masayoshi Esashi
Mechanical Systems and Signal Processing 160 2021/11/01
Publisher:
Academic Press
DOI：
10.1016/j.ymssp.2021.107887
ISSN：
1096-1216 0888-3270
-
Comprehensive study of magnetostriction-based MEMS magnetic sensor of a FeGa/PZT cantilever
Peer-reviewed
Mohammad Akita Indianto, Masaya Toda, Takahito Ono
Sensors and Actuators, A: Physical 331 2021/11/01
DOI：
10.1016/j.sna.2021.112985
ISSN：
0924-4247
-
Magnetic Resonance Force Microscopy With Vacuum-Packaged Magnetic Cantilever Towards Free Radical Detection
Peer-reviewed
Gaopeng Xue, Masaya Toda, Xinghui Li, Xiaohao Wang, Takahito Ono
IEEE Sensors Journal 2021/10/15
DOI：
10.1109/JSEN.2021.3106352
ISSN：
1530-437X
eISSN：
1558-1748
-
Internal resonance in coupled oscillators – Part I: A double amplification mass sensing scheme without Duffing nonlinearity
Cao Xia, Dong F. Wang, Takahito Ono, Toshihiro Itoh, Masayoshi Esashi
Mechanical Systems and Signal Processing 159 2021/10/01
Publisher:
Academic Press
DOI：
10.1016/j.ymssp.2021.107886
ISSN：
1096-1216 0888-3270
-
Thermoelectric generator with a high integration density for portable and wearable self-powered electronic devices
Peer-reviewed
Nguyen Van Toan, Truong Thi Kim Tuoi, Nguyen Van Hieu, Takahito Ono
Energy Conversion and Management 245 2021/10/01
DOI：
10.1016/j.enconman.2021.114571
ISSN：
0196-8904
-
Three-dimensional imaging of electron spin resonance-magnetic resonance force microscopy at room temperature
Peer-reviewed
Masaya Toda, Takahito Ono
Journal of Magnetic Resonance 330 2021/09
DOI：
10.1016/j.jmr.2021.107045
ISSN：
1090-7807
eISSN：
1096-0856
-
Vertically-oriented graphene electrodeposited with MnO<inf>2</inf> on native SiO<inf>2</inf>/Si for high-performance supercapacitor electrodes
Peer-reviewed
Hongtao Sui, Nguyen Van Toan, Takahito Ono
Journal of Electroanalytical Chemistry 895 2021/08/15
DOI：
10.1016/j.jelechem.2021.115507
ISSN：
1572-6657
eISSN：
1873-2569
-
Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures
Peer-reviewed
Masaya Toda, Hideki Hayashi, Nguyen van Toan, Naoki Inomata, Takahito Ono
Journal of Microelectromechanical Systems 30 (4) 560-568 2021/08
DOI：
10.1109/JMEMS.2021.3076791
ISSN：
1057-7157
eISSN：
1941-0158
-
Enhanced Thermoelectric Properties of Skutterudite Thick Film Polyvinyl Alcohol Assisted from the Post-Deposition Annealing Effect
Nuur Syahidah Sabran, Iman Aris Fadzallah, Mohd Faizul Mohd Sabri, Takahito Ono, Khairul Fadzli Samat, Siti Nor Farhana Yusuf, Rahman Saidur
Journal of the Electrochemical Society 168 (7) 2021/07/01
Publisher:
IOP Publishing Ltd
DOI：
10.1149/1945-7111/ac13d0
ISSN：
1945-7111 0013-4651
-
Integration of Magnetostrictive Microsensor with Hall Element for Microstructure Resonant Detection
Taiga Ezura, Naoki Inomata, Takahito Ono
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 418-422 2021/06/20
Publisher:
Institute of Electrical and Electronics Engineers Inc.
DOI：
10.1109/Transducers50396.2021.9495689
-
Carbon Black-Gelatin Composite Thin-Film Chemiresistor with Large Response to Chemical Vapors
Chun Huang, Zhuqing Wang, Yi Te Huang, Noriko Tsuruoka, Takahito Ono
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 880-883 2021/06/20
DOI：
10.1109/Transducers50396.2021.9495585
-
Heat Storage Thermoelectric Generator for Wireless IOT Sensing Systems
Truong Thi Kim Tuoi, Nguyen Van Toan, Takahito Ono
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 924-927 2021/06/20
DOI：
10.1109/Transducers50396.2021.9495686
-
Evaluation of New Solid Rubidium Source Using Atomic Clock Stabilization Loop
Motoaki Hara, Yuichiro Yano, Masaya Toda, Takahito Ono, Tetsuya Ido
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) 2021/06/20
Publisher:
IEEE
DOI：
10.1109/transducers50396.2021.9495382
-
Reflection-type vapor cell for micro atomic clocks using local anodic bonding of 45° mirrors
Peer-reviewed
Hitoshi Nishino, Yuichiro Yano, Motoaki Hara, Masaya Toda, Masatoshi Kajita, Tetsuya Ido, Takahito Ono
Optics Letters 46 (10) 2272-2275 2021/05/15
DOI：
10.1364/OL.424354
ISSN：
0146-9592
eISSN：
1539-4794
-
A high-frequency narrow-band filtering mechanism based on auto-parametric internal resonance
Rong Wang, Cao Xia, Dong F. Wang, Takahito Ono
Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021 670-675 2021/04/25
Publisher:
Institute of Electrical and Electronics Engineers Inc.
DOI：
10.1109/NEMS51815.2021.9451334
-
Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk
Gaopeng Xue, Masaya Toda, Xinghui Li, Takahito Ono
Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021 43-46 2021/04
DOI：
10.1109/NEMS51815.2021.9451392
-
Electroplated FePt Films for Micromechanical Magnetic Sensors
Peer-reviewed
Masaya Toda, Hao Xu, Takahito Ono
Physica Status Solidi (A) Applications and Materials Science 218 (8) 2021/04
DOI：
10.1002/pssa.202000547
ISSN：
1862-6300
eISSN：
1862-6319
-
Miniature piezoresistive sensor for detecting volatile organic components
Peer-reviewed
Masaya Toda, Krzysztof Moorthi, Takumi Hokama, Zhuqing Wang, Mai Yamazaki, Takahito Ono
Sensors and Actuators, B: Chemical 333 2021/04
DOI：
10.1016/j.snb.2021.129524
ISSN：
0925-4005
-
Torsional resonator of Pd–Si–Cu metallic glass with a low rotational spring constant
Peer-reviewed
Masaya Toda, Chunyang Li, Nguyen Van Toan, Yao Chuan Tsai, Yu Ching Lin, Takahito Ono
Microsystem Technologies 27 (3) 929-935 2021/03
DOI：
10.1007/s00542-020-04996-2
ISSN：
0946-7076
eISSN：
1432-1858
-
Morphological Analysis and Properties Evaluation of Electrodeposited Thick BiSbTe Films with Cooperative Interactions among Multiple Additives
Peer-reviewed
Wei Yu, Nguyen Van Toan, Yi Jie Li, Zhuqing Wang, Takahito Ono, Ruochen Wang
Journal of the Electrochemical Society 168 (2) 2021/02
DOI：
10.1149/1945-7111/abdd7b
ISSN：
0013-4651
eISSN：
1945-7111
-
Micromachined Multi-Ion Sources Integrated Micro-Fluidic Channels
Nguyen Van Chinh, Le Van Minh, Takahito Ono, Hiroki Kuwano
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2021-January 14-17 2021/01/25
DOI：
10.1109/MEMS51782.2021.9375217
ISSN：
1084-6999
-
Formation and Evaluation of Silicon Substrate with Highly-Doped Porous Si Layers Formed by Metal-Assisted Chemical Etching
Peer-reviewed
Yijie Li, Nguyen Van Toan, Zhuqing Wang, Khairul Fadzli Bin Samat, Takahito Ono
Nanoscale Research Letters 16 (1) 2021
DOI：
10.1186/s11671-021-03524-z
ISSN：
1931-7573
eISSN：
1556-276X
-
Heat storage thermoelectric generator as an electrical power source for wireless Iot sensing systems
Peer-reviewed
Truong Thi Kim Tuoi, Nguyen Van Toan, Takahito Ono
International Journal of Energy Research 45 (10) 15557-15568 2021
DOI：
10.1002/er.6774
ISSN：
0363-907X
eISSN：
1099-114X
-
An adjustable pre-stress based sensitivity enhancement scheme for cantilever-based resonant sensors
Peer-reviewed
Ziqi Zhao, Dong F. Wang, Xueqiao Lou, Takahito Ono, Toshihiro Itoh
Mechanical Systems and Signal Processing 146 2021/01/01
DOI：
10.1016/j.ymssp.2020.107002
ISSN：
0888-3270
eISSN：
1096-1216
-
Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane
Peer-reviewed
Nguyen Van Toan, Truong Thi Kim Tuoi, Yao Chuan Tsai, Yu Ching Lin, Takahito Ono
Scientific Reports 10 (1) 2020/12/01
DOI：
10.1038/s41598-020-67150-y
eISSN：
2045-2322
-
Thermoelectric generators for heat harvesting: From material synthesis to device fabrication
Peer-reviewed
Nguyen Van Toan, Truong Thi Kim Tuoi, Takahito Ono
Energy Conversion and Management 225 2020/12/01
DOI：
10.1016/j.enconman.2020.113442
ISSN：
0196-8904
-
Temperature-dependence of the electrical impedance properties of sodium hydroxide-contained polyethylene oxide as an ionic liquid
Peer-reviewed
Naoki Inomata, Nguyen van Toan, Takahito Ono
Sensors and Actuators, A: Physical 316 2020/12/01
DOI：
10.1016/j.sna.2020.112369
ISSN：
0924-4247
-
Thermoelectrical properties of silicon substrates with nanopores synthesized by metal-assisted chemical etching
Peer-reviewed
Yijie Li, Nguyen Van Toan, Zhuqing Wang, Khairul Fadzli Samat, Takahito Ono
Nanotechnology 31 (45) 2020/11/06
DOI：
10.1088/1361-6528/ab8fe1
ISSN：
0957-4484
eISSN：
1361-6528
-
Development of assembled microchannel resonator as an alternative fabrication method of a microchannel resonator for mass sensing in flowing liquid
Peer-reviewed
M. A. Indianto, M. Toda, T. Ono
Biomicrofluidics 14 (6) 2020/11/01
DOI：
10.1063/5.0032040
ISSN：
1932-1058
-
Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology
Peer-reviewed
Nguyen Van Toan, Truong Thi Kim Tuoi, Jinhua Li, Naoki Inomata, Takahito Ono
Materials Research Bulletin 131 2020/11
DOI：
10.1016/j.materresbull.2020.110977
ISSN：
0025-5408
-
A 115× Conversion-Ratio Thermoelectric Energy-Harvesting Battery Charger for the Internet of Things
Peer-reviewed
Ming Jie Chung, Tetsuya Hirose, Takahito Ono, Po Hung Chen
IEEE Transactions on Circuits and Systems I: Regular Papers 67 (11) 4110-4121 2020/11
DOI：
10.1109/TCSI.2020.3012599
ISSN：
1549-8328
eISSN：
1558-0806
-
Theoretical and experimental investigation of a thermoelectric generator (TEG) integrated with a phase change material (PCM) for harvesting energy from ambient temperature changes
Peer-reviewed
Truong Thi Kim Tuoi, Nguyen Van Toan, Takahito Ono
Energy Reports 6 2022-2029 2020/11
DOI：
10.1016/j.egyr.2020.07.023
eISSN：
2352-4847
-
Magnetic Field Sensor Based on Hybrid of Magnetostrictive and Piezoelectric Materials
Peer-reviewed
Mohammad Akita Indianto, Masaya Toda, Takahito Ono
Proceedings of IEEE Sensors 2020-October MSS-19-047-1-MSS-19-047-4 2020/10/25
DOI：
10.1109/SENSORS47125.2020.9278725
ISSN：
1930-0395
eISSN：
2168-9229
-
Compact Micro Thermal Sensor Based on Silicon Thermocouple Junction and Suspended Fluidic Channel
Peer-reviewed
Zhuqing Wang, Mitsuteru Kimura, Naoki Inomata, Jinhua Li, Takahito Ono
IEEE Sensors Journal 20 (19) 11122-11127 2020/10/01
DOI：
10.1109/JSEN.2020.2997926
ISSN：
1530-437X
eISSN：
1558-1748
-
Bridged resonator based on assembled Si thin wire
Peer-reviewed
Masaya Toda, Taichi Nakamura, Naoki Inomata, Nguyen Van Toan, Takahito Ono
Journal of Micromechanics and Microengineering 30 (10) 2020/10
DOI：
10.1088/1361-6439/aba6cc
ISSN：
0960-1317
eISSN：
1361-6439
-
Vacancy color stress sensing with embedded diamond particles on Si micro-cantilevers
Peer-reviewed
Masaya Toda, Akhtar M. Shahrukh, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 140 (9) 222-227 2020/09/01
DOI：
10.1541/ieejsmas.140.222
ISSN：
1341-8939
eISSN：
1347-5525
-
A mass multi-warning scheme based on one-to-three internal resonance
Peer-reviewed
Cao Xia, Dong F. Wang, Takahito Ono, Toshihiro Itoh, Ryutaro Maeda
Mechanical Systems and Signal Processing 142 2020/08
DOI：
10.1016/j.ymssp.2020.106784
ISSN：
0888-3270
eISSN：
1096-1216
-
Flexible porous carbon black-polymer composites with a high gauge factor
Peer-reviewed
Yi Te Huang, Naoki Inomata, Zhuqing Wang, Yu Ching Lin, Takahito Ono
Sensors and Materials 32 (7) 2527-2538 2020/07
DOI：
10.18494/SAM.2020.2853
ISSN：
0914-4935
-
Study and fabrication of a flexible Zr-based metallic glass thin film strain gauge
Peer-reviewed
Yen Chi Lu, Chun Yu Chiang, Yu Chieh Chen, Yu Ching Lin, Takahito Ono, Yao Chuan Tsai
Japanese Journal of Applied Physics 59 (SI) 2020/06/01
DOI：
10.35848/1347-4065/ab7f1b
ISSN：
0021-4922
eISSN：
1347-4065
-
Electrostatic metallic glass micro-mirror fabricated by the self-aligned structures
Peer-reviewed
Zhao Ying Wang, Yu Yen Chen, Yu Ching Lin, Takahito Ono, Ming Tzer Lin, Yao Chuan Tsai
Japanese Journal of Applied Physics 59 (SI) 2020/06/01
DOI：
10.35848/1347-4065/ab7477
ISSN：
0021-4922
eISSN：
1347-4065
-
Micropatterning and Integration of Electrospun PVDF Membrane into Microdevice
Peer-reviewed
Iman Aris Fadzallah, Nuur Syahidah Sabran, Nguyen Van Toan, Takahito Ono, Suhana Mohd Said, Mohd Faizul Mohd Sabri
Journal of Microelectromechanical Systems 29 (3) 438-445 2020/06
DOI：
10.1109/JMEMS.2020.2983717
ISSN：
1057-7157
eISSN：
1941-0158
-
Hermetically Packaged Microsensor for Quality Factor-Enhanced Photoacoustic Biosensing
Peer-reviewed
Imran Latif, Masaya Toda, Takahito Ono
Photoacoustics 18 2020/06
DOI：
10.1016/j.pacs.2020.100189
ISSN：
2213-5979
-
Magnetostrictive performance of electrodeposited Tb<inf>x</inf>Dy<inf>(1-x)</inf>Fe<inf>y</inf> thin film with microcantilever structures
Peer-reviewed
Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Takahito Ono
Micromachines 11 (5) 2020/05/01
DOI：
10.3390/mi11050523
eISSN：
2072-666X
-
Short-term temperature change detections and frequency signals in single cultured cells using a microfabricated thermistor
Peer-reviewed
Naoki Inomata, Ryohei Inaoka, Kohki Okabe, Takashi Funatsu, Takahito Ono
Sensing and Bio-Sensing Research 27 2020/02
DOI：
10.1016/j.sbsr.2019.100309
eISSN：
2214-1804
-
Logic gates based on electrically driven nanoelectromechanical switches
Peer-reviewed
Nguyen Van Toan, Dong Zhao, Naoki Inomata, Takahito Ono
IEEJ Transactions on Electrical and Electronic Engineering 14 (2) 335-336 2020/02
DOI：
10.1002/tee.22814
ISSN：
1931-4973
eISSN：
1931-4981
-
A black gauze cap-shaped bistable energy harvester with a movable design for broadening frequency bandwidth
Peer-reviewed
Jie Song, Dong F. Wang, Guansong Shan, Takahito Ono, Toshihiro Itoh, Isao Shimoyama, Ryutaro Maeda
Smart Materials and Structures 29 (2) 2020
DOI：
10.1088/1361-665X/ab6077
ISSN：
0964-1726
eISSN：
1361-665X
-
High Performance Micro-Thermoelectric Generator Based on Metal Doped Electrochemical Deposition
Nguyen Van Toan, Truong Thi Kim Tuoi, Khairul Fadzli Samat, Hongtao Sui, Naoki Inomata, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2020-January 570-573 2020/01
DOI：
10.1109/MEMS46641.2020.9056358
ISSN：
1084-6999
-
Metallic glass thin film integrated with flexible membrane for electromagnetic micropump application
Peer-reviewed
Yi Fang Huang, Chen Han Tsou, Chia Jui Hsu, Yu Ching Lin, Takahito Ono, Yao Chuan Tsai
Japanese Journal of Applied Physics 59 (SI) 2020
DOI：
10.35848/1347-4065/ab82a7
ISSN：
0021-4922
eISSN：
1347-4065
-
Carbon Black Nanoparticles Inclusion in Bismuth Telluride Film for Micro Thermoelectric Generator Application
Khairul Fadzli Samat, Yijie Li, Nguyen Van Toan, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2020-January 562-565 2020/01
DOI：
10.1109/MEMS46641.2020.9056323
ISSN：
1084-6999
-
Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection
Imran Latif, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2020-January 834-837 2020/01
DOI：
10.1109/MEMS46641.2020.9056209
ISSN：
1084-6999
-
Design and fabrication of on-chip micro-thermoelectric cooler based on electrodeposition process
Peer-reviewed
Jirath Enju, Nguyen Huu Trung, Samat Khairul Fadzli, Po Hung Chen, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 140 (1) 18-23 2020
DOI：
10.1541/ieejsmas.140.18
ISSN：
1341-8939
eISSN：
1347-5525
-
Magnetic field imaging using nano-diamond with NVC
Msaya Toda, Akhtar M Shahrukh, Takahito Ono
電気学会研究会資料. 2019 MSS-19-046-1-MSS-19-046-3 2019/12/26
-
Drift-free FBAR oscillator using an atomic-resonance-stabilization technique
Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Tetsuya Ido, Hiroyuki Ito, Masaya Toda, Takahito Ono
Proceedings of IEEE International Ultrasonics Symposium (IUS) 2019 2178-2181 2019/12/09
-
Spin Seebeck mechanical force
Peer-reviewed
Kazuya Harii, Yong Jun Seo, Yasumasa Tsutsumi, Hiroyuki Chudo, Koichi Oyanagi, Mamoru Matsuo, Yuki Shiomi, Takahito Ono, Sadamichi Maekawa, Eiji Saitoh
Nature Communications 10 (1) 2019/12/01
DOI：
10.1038/s41467-019-10625-y
eISSN：
2041-1723
-
Mechanically strengthened graphene-Cu composite with reduced thermal expansion towards interconnect applications
Peer-reviewed
Zhonglie An, Jinhua Li, Akio Kikuchi, Zhuqing Wang, Yonggang Jiang, Takahito Ono
Microsystems and Nanoengineering 5 (1) 2019/12/01
DOI：
10.1038/s41378-019-0059-0
eISSN：
2055-7434
-
Fabrication of Cantilever with FeGa/PZT Layers for Magnetic Field Sensor
Indianto Mohammad Akita, Masaya Toda, Takahito Ono
Proceedings of Sensor Symposium on Sensors, Micromachines and Applied Systems 36 20am2-PS3-35-1-20am2-PS3-35-3 2019/11/19
-
Resonator with a low spring constant for polarization-degree of nuclear spins sensing
李 春洋, 戸田 雅也, TOAN NGUYEN Van, 林 育菁, Tsai Yao-Chuan, 小野 崇人
Proceedings of Sensor Symposium on Sensors, Micromachines and Applied Systems 36 19pm3-T-5-1-19pm3-T-5-4 2019/11/19
-
Thermoelectric power battery using al<inf>2</inf>o<inf>3</inf> nanochannels of 10 nm diameter for energy harvesting of low-grade waste heat
Peer-reviewed
Nguyen Van Toan, Megat Muhammad Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, Takahito Ono
Energy Conversion and Management 199 2019/11/01
DOI：
10.1016/j.enconman.2019.111979
ISSN：
0196-8904
-
Resonant magnetic sensor using concentration of magnetic field gradient by asymmetric permalloy plates
Peer-reviewed
Naoki Inomata, Wataru Suwa, Nguyen Van Toan, Masaya Toda, Takahito Ono
Microsystem Technologies 25 (10) 3983-3989 2019/10/01
DOI：
10.1007/s00542-018-4257-8
ISSN：
0946-7076
eISSN：
1432-1858
-
Preparation and Characterization of Electrochemical Deposition Cobalt Triantimonide (CoSb<inf>3</inf>) Thick Film: Effects of Polyvinyl Alcohol (PVA) as an Additive
Peer-reviewed
Nuur Syahidah Sabran, Iman Aris Fadzallah, Takahito Ono, Suhana Mohd Said, Mohd Faizul Mohd Sabri
Journal of Electronic Materials 48 (8) 5003-5011 2019/08/15
DOI：
10.1007/s11664-019-07295-3
ISSN：
0361-5235
-
Enhancement in thermoelectric performance of electrochemically deposited platinum-bismuth telluride nanocomposite
Peer-reviewed
Khairul Fadzli Samat, Nguyen Huu Trung, Takahito Ono
Electrochimica Acta 312 62-71 2019/07/20
DOI：
10.1016/j.electacta.2019.04.139
ISSN：
0013-4686
-
Study of fluorescence intensity using nano‐diamonds due to ion implantations
巻島創, 戸田雅也, 小野崇人
電気学会研究会資料 (MSS-19-011-028.030-034) 13‐15 2019/07/01
-
Silicon-based micro calorimeter with single thermocouple structure for thermal characterization
Peer-reviewed
Zhuqing Wang, Mitsuteru Kimura, Masaya Toda, Takahito Ono
IEEE Electron Device Letters 40 (7) 1198-1200 2019/07
DOI：
10.1109/LED.2019.2918238
ISSN：
0741-3106
eISSN：
1558-0563
-
Magnetostrictive Performance of Electrodeposited TB<inf>X</inf>DY<inf>(1-X)</inf>FE<inf>Y</inf> Thin Filmevaluated from Microactuator
Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Yunheub Song, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 1698-1700 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808489
-
A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks
Hitoshi Nishino, Masaya Toda, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 1530-1532 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808772
-
Metal-Assisted Chemical Etching Method Subjected to Micro/Nano Device Fabrication
Nguyen Van Toan, Xiaoyue Wang, Naoki Inomata, Masaya Toda, Ioana Voiculescu, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 1639-1642 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808663
-
Highly Sensitive Structure of Nanomechanical Gas Sensor Based on Stress Concentration Generated by Cantilever Lateral Deflection
Zhuqing Wang, Takumi Hokama, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 2107-2109 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808616
-
Fabrication of on-chip vacuum pump using a silicon nanostructure by metal-assisted chemical etching
Peer-reviewed
Naoki Inomata, Kentaro Kamakura, Nguyen Van Toan, Takahito Ono
IEEJ Transactions on Electrical and Electronic Engineering 14 (6) 954-958 2019/06
DOI：
10.1002/tee.22887
ISSN：
1931-4973
eISSN：
1931-4981
-
A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels
Nguyen Van Chinh, Le Van Minh, Takahito Ono, Hiroki Kuwano
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 1674-1677 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808471
-
A Novel Photoacoustic Microsensor for Enhanced Quality Factor Detection of Low Concentration Analytes
Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 2065-2067 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808250
-
Temperature Sensor Using Two Thermoelectric Liquid Electrolytes in Microfluidic Channels
Naoki Inomata, Nguyen Van Toan, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 2166-2169 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808737
-
Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition
Nguyen Van Toan, Dong Zhao, Naoki Inomata, Masaya Toda, Yunheub Song, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 216 (14) 1709-1711 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808313
ISSN：
1862-6300
eISSN：
1862-6319
-
High-Gauge Factor Strain Sensor Based on Piezoelectric Aluminum Nitride Coupled to MOSFET
Peer-reviewed
Minjie Zhu, Naoki Inomata, Nobuyoshi Adachi, Atsushi Sakurai, Masanobu Nomura, Takahito Ono
IEEE Sensors Journal 19 (10) 3626-3632 2019/05/15
DOI：
10.1109/JSEN.2019.2895267
ISSN：
1530-437X
eISSN：
1558-1748
-
Liquid Thermocouple Using Thermoelectric Ionic Liquids
Peer-reviewed
Naoki Inomata, Nguyen Van Toan, Takahito Ono
IEEE Sensors Letters 3 (5) 1-4 2019/05
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
DOI：
10.1109/lsens.2019.2912418
eISSN：
2475-1472
-
Investigation of the Impact of External Stress on Memory Characteristics by Modifying the Backside of Substrate
Peer-reviewed
Young Taek Oh, Jae Min Sim, Nguyen Van Toan, Hisashi Kino, Takahito Ono, Tetsu Tanaka, Yun Heub Song
IEEE Transactions on Electron Devices 66 (4) 1741-1746 2019/04
DOI：
10.1109/TED.2019.2900155
ISSN：
0018-9383
-
Enzyme immobilization in completely packaged freestanding SU-8 microfluidic channel by electro click chemistry for compact thermal biosensor
Peer-reviewed
Zhuqing Wang, Lv Jinlong, Zhonglie An, Mitsuteru Kimura, Takahito Ono
Process Biochemistry 79 57-64 2019/04
DOI：
10.1016/j.procbio.2018.12.007
ISSN：
1359-5113
-
Metal-assisted-chemical-etching of silicon nanowires for templating 3D graphene growth towards energy storage in microsystems
Peer-reviewed
Jinhua Li, Nguyen Van Toan, Zhuqing Wang, Takahito Ono
Journal of Micromechanics and Microengineering 29 (5) 2019/03/29
DOI：
10.1088/1361-6439/ab0b2f
ISSN：
0960-1317
eISSN：
1361-6439
-
Piezoresistive strain sensor based on monolayer molybdenum disulfide continuous film deposited by chemical vapor deposition
Peer-reviewed
Minjie Zhu, Kei Sakamoto, Jinhua Li, Naoki Inomata, Masaya Toda, Takahito Ono
Journal of Micromechanics and Microengineering 29 (5) 2019/03/15
DOI：
10.1088/1361-6439/ab0726
ISSN：
0960-1317
eISSN：
1361-6439
-
磁歪材料の電解めっき成膜とそのひずみセンサ応用
江面大河, 猪股直生, 戸田雅也, 古屋泰文, 小野崇人
電気学会全国大会講演論文集(CD-ROM) 2019 ROMBUNNO.3‐172 2019/03/01
-
The effect of increasing interfacial strength in micro fluidic system for heat detection with micro-sandglass shaped interlocks
Peer-reviewed
Zhuqing Wang, Mitsuteru Kimura, Takahito Ono
Microsystem Technologies 25 (2) 633-640 2019/02/04
DOI：
10.1007/s00542-018-3990-3
ISSN：
0946-7076
-
Piezoresistive Nanomechanical Humidity Sensors Using Internal Stress In-Plane of Si-Polymer Composite Membranes
Peer-reviewed
Md. Mahabub Hossain, Masaya Toda, Takumi Hokama, Mai Yamazaki, Krzysztof Moorthi, Takahito Ono
IEEE Sensors Letters 3 (2) 2500404-1-2500404-4 2019/02
DOI：
10.1109/LSENS.2019.2893298
-
A reflection-type vapor cell using anisotropic etching of silicon for micro atomic clocks
Peer-reviewed
Hitoshi Nishino, Motoaki Hara, Yuichiro Yano, Masaya Toda, Yoshiaki Kanamori, Masatoshi Kajita, Tetsuya Ido, Takahito Ono
Applied Physics Express 12 (7) 2019
DOI：
10.7567/1882-0786/ab2a3c
ISSN：
1882-0778
eISSN：
1882-0786
-
A Reflection-Type Vapor Cell for Micro Atomic Clock
Hitoshi Nishino, Masaya Toda, Yoshiaki Kanamori, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2019-January 915-918 2019/01
DOI：
10.1109/MEMSYS.2019.8870878
ISSN：
1084-6999
-
Electrolyte Based Thermal to Electric Energy Conversion Utilising 10 nm Diameter AL<inf>2</inf>O<inf>3</inf> Nanochannels
Nguyen Van Toan, Megat Muhammad Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2019-January 507-510 2019/01
DOI：
10.1109/MEMSYS.2019.8870755
ISSN：
1084-6999
-
Low Cost and High-Aspect Ratio Micro/Nano Device Fabrication by Using Innovative Metal-Assisted Chemical Etching Method
Peer-reviewed
Nguyen Van Toan, Xiaoyue Wang, Naoki Inomata, Masaya Toda, Ioana Voiculescu, Takahito Ono
Advanced Engineering Materials 21 (8) 2019
DOI：
10.1002/adem.201900490
ISSN：
1438-1656
eISSN：
1527-2648
-
Two-dimensional MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator
Peer-reviewed
Chuan Hui Ou, Yu Ching Lin, Yoshiteru Keikoin, Takahito Ono, Masayoshi Esashi, Yao Chuan Tsai
Japanese Journal of Applied Physics 58 (SD) 2019
DOI：
10.7567/1347-4065/ab0493
ISSN：
0021-4922
eISSN：
1347-4065
-
Vanadium-doped molybdenum disulfide film-based strain sensors with high gauge factor
Peer-reviewed
Minjie Zhu, Jinhua Li, Naoki Inomata, Masaya Toda, Takahito Ono
Applied Physics Express 12 (1) 2019/01/01
DOI：
10.7567/1882-0786/aaf5c4
ISSN：
1882-0778
eISSN：
1882-0786
-
Nanoengineered thermoelectric energy devices for IoT sensing applications
Peer-reviewed
Takahito Ono, Trung Huu Nguyen, Khairul Fadzli Samat, Jinhua Li, Nguyen Van Toan
ECS Transactions 92 (4) 163-168 2019
DOI：
10.1149/09204.0163ecst
ISSN：
1938-6737
eISSN：
1938-5862
-
Mechanical resonant magnetic sensor utilizing magnetically induced compressive load from magnetostrictive material
Peer-reviewed
Naoki Inomata, Taiga Ezura, Nguyen Van Toan, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 139 (1) 21-26 2019
DOI：
10.1541/ieejsmas.139.21
ISSN：
1341-8939
eISSN：
1347-5525
-
High Gauge Factor Strain Sensors Based on Vanadium Doped Molybedenum Disulfide 2D Films
Minjie Zhu, Naoki Inomata, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2019-January 335-338 2019/01
DOI：
10.1109/MEMSYS.2019.8870660
ISSN：
1084-6999
-
Enhancement of thermoelectric properties of bismuth telluride composite with gold nano-particles inclusions using electrochemical co-deposition
Peer-reviewed
Trung Huu Nguyen, Jirath Enju, Takahito Ono
Journal of the Electrochemical Society 166 (12) D508-D513 2019
DOI：
10.1149/2.1011912jes
ISSN：
0013-4651
eISSN：
1945-7111
-
Stress sensing using nitrogen-vacancy-centers with the embedded nanodiamonds
saya Toda, Akhtar M Shahrukh, Takahito Ono
電気学会研究会資料. 2018 (204-224) 27-29 2018/12/20
-
Constructing in-chip micro-supercapacitors of 3D graphene nanowall/ruthenium oxides electrode through silicon-based microfabrication technique
Peer-reviewed
Jinhua Li, Minjie Zhu, Zhonglie An, Zhuqing Wang, Masaya Toda, Takahito Ono
Journal of Power Sources 401 204-212 2018/10/15
DOI：
10.1016/j.jpowsour.2018.08.099
ISSN：
0378-7753
-
Manufacturing and characterization of simple cantilever thermal biosensor with Si-Metal thermocouple structure for enzymatic reaction detection
Peer-reviewed
Zhuqing Wang, Mitsuteru Kimura, Takahito Ono
Thermochimica Acta 668 110-115 2018/10/10
DOI：
10.1016/j.tca.2018.08.020
ISSN：
0040-6031
-
FBAR oscillator stabilized by Rb atomic resonator for SHF/EHF band wireless devices
M. Hara, Y. Yano, M. Kajita, S. Hara, A. Kasamatsu, M. Toda, H. Ito, T. Ono, T. Ido
the 2018 IEEE International Ultrasonics Symposium 2018-January 2018/10
DOI：
10.1109/ULTSYM.2018.8579685
ISSN：
1948-5727
eISSN：
1948-5727
-
3.5 GHz band CMOS oscillator using thin film bulk acoustic resonator for atomic clock systems
Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Hitoshi Nishino, Masaya Toda, Shinsuke Hara, Akifumi Kasamatsu, Hiroyuki Ito, Takahito Ono, Tetsuya Ido
「センサ・マイクロマシンと応用システム」シンポジウム論文集 2018 01am2-A-3-1-01am2-A-3-4 2018/10
-
Photoacoustic signal generation in condensed media and detection using vacuum packaged resonator
Latif Imran, An Zhonglie, Masaya Toda, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 2018 01pm1-PS-190-1-01pm1-PS-190-6 2018/10
-
Piezoresistive gas sensor based on polymer volume change with stress concentration generated by a cantilever lateral deflection
Takumi Hokama, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 2018 01pm1-PS-190-1--01pm1-PS-190-6 2018/10
-
Microwave oscillator using piezoelectric thin-film resonator aiming for ultraminiaturization of atomic clock
Peer-reviewed
M. Hara, Y. Yano, M. Kajita, H. Nishino, Y. Ibata, M. Toda, S. Hara, A. Kasamatsu, H. Ito, T. Ono, T. Ido
Review of Scientific Instruments 89 (10) 2018/10/01
DOI：
10.1063/1.5048633
ISSN：
0034-6748
eISSN：
1089-7623
-
Impact of etch angles on cell characteristics in 3D NAND flash memory
Peer-reviewed
Young Taek Oh, Kyu Beom Kim, Sang Hoon Shin, Hahng Sim, Nguyen Van Toan, Takahito Ono, Yun Heub Song
Microelectronics Journal 79 1-6 2018/09
DOI：
10.1016/j.mejo.2018.06.009
ISSN：
0026-2692
-
Electrical Breakdown-Induced Tunable Piezoresistivity in Graphene/Polyimide Nanocomposites for Flexible Force Sensor Applications
Peer-reviewed
Yonggang Jiang, Mengyang Liu, Xing Yan, Takahito Ono, Lin Feng, Jun Cai, Deyuan Zhang
Advanced Materials Technologies 3 (8) 2018/08
DOI：
10.1002/admt.201800113
eISSN：
2365-709X
-
Highly Sensitive Hermetically Packaged Microsensor for Photoacoustic Detection
Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono
E部門総合研究会研究会資料 2018 (1-6) 27-30 2018/07
-
Capacitive Silicon Nanomechanical Resonator Capable of Selective Vibration of High-Order Mode
Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Masaya Toda, Takahito Ono
Proceedings of the 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 14-1-14-2 2018/06
-
Nanomechanical Piezoresistive Sensor with Polymer-Si Membrane for Gas Detection
Takumi Hokama, Md. Mahabub Hossain, Masaya Toda, Krzysztof Moorthi, Mai Yamazaki, Takahito Ono
Proceedings of the 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 80-1-80-2 2018/06
-
0 3 FBAR-Based 3.4 GHz Oscillator Without Frequency Multiplications Aiming for an Integrated Atomic Clock Chip
Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Masaya Toda, Hiroyuki Ito, Takahito Ono, Tetsuya Ido
Proceedings of the 2018 European Frequency and Time Seminar 2018/04
-
Thermal resistance change of liquid carbon dioxide based on narrow space effect in micro chamber
Masaya Toda, Tomoyuki Yamagami, Naoki Inomata, Takashi Fujii, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2018-January 1296-1299 2018/04
DOI：
10.1109/MEMSYS.2018.8346803
ISSN：
1084-6999
-
Fabrication and evaluation of assembled micro-tube resonator for mass measurement in flowing liquid
Mohammad Akita Indianto, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2018-January 1261-1264 2018/04
DOI：
10.1109/MEMSYS.2018.8346793
ISSN：
1084-6999
-
Electrically driven ion transport in nanopores fabricated by metal assisted chemical etching method
Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2018-January 1253-1256 2018/04
DOI：
10.1109/MEMSYS.2018.8346791
ISSN：
1084-6999
-
Evaluation of piezoresistive property of vanadium oxide thin film
Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2018-January 1044-1047 2018/04
DOI：
10.1109/MEMSYS.2018.8346738
ISSN：
1084-6999
-
Preparation of graphene-enhanced nickel-phosphorus composite films by ultrasonic-assisted electroless plating
Peer-reviewed
Qian Yu, Tianfeng Zhou, Yonggang Jiang, Xing Yan, Zhonglie An, Xibin Wang, Deyuan Zhang, Takahito Ono
Applied Surface Science 435 617-625 2018/03/30
DOI：
10.1016/j.apsusc.2017.11.169
ISSN：
0169-4332
-
Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method
Peer-reviewed
Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono
Nanotechnology 29 (19) 2018/03/16
DOI：
10.1088/1361-6528/aab1d3
ISSN：
0957-4484
eISSN：
1361-6528
-
Evaluation of Piezoresistive Property of Vanadium Oxide Thin Film Deposited by Sputtering
Peer-reviewed
Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono
IEEE Sensors Letters 2 (1) 2500204 2018/03
DOI：
10.1109/LSENS.2018.2791530
-
Knudsen pump produced via silicon deep RIE, thermal oxidation, and anodic bonding processes for on-chip vacuum pumping
Peer-reviewed
Nguyen Van Toan, Naoki Inomata, Nguyen Huu Trung, Takahito Ono
Journal of Micromechanics and Microengineering 28 (5) 2018/02/23
DOI：
10.1088/1361-6439/aaae26
ISSN：
0960-1317
eISSN：
1361-6439
-
Knudsen pump based on silicon etching and thermal oxidation process for on-chip vacuum pumping
Nguyen Van Toan, Naoki Inomata, Nguyen Huu Trung, Takahito Ono
Proceedings of the International Conference on Power Electronics and Drive Systems 2017-December 550-552 2018/02/09
DOI：
10.1109/PEDS.2017.8289155
ISSN：
2164-5256
eISSN：
2164-5264
-
Flexible thermoelectric power generator with Y-type structure using electrochemical deposition process
Peer-reviewed
Trung Nguyen Huu, Toan Nguyen Van, Ono Takahito
Applied Energy 210 467-476 2018/01/15
DOI：
10.1016/j.apenergy.2017.05.005
ISSN：
0306-2619
-
Freestanding multifunctional micro fluidic system for highly sensitive thermal detection
Zhuqing Wang, Mitsuteru Kimura, Takahito Ono
22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 1 555-558 2018
Publisher:
Chemical and Biological Microsystems Society
-
Small volume freestanding micro fluidic system for calorimetry biosensor
Zhuqing Wang, Mitsuteru Kimura, Takahito Ono
22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 2 1221-1224 2018
Publisher:
Chemical and Biological Microsystems Society
-
MICRO ATOMIC FREQUENCY STANDARDS EMPLOYING AN INTEGRATED FBAR-VCO OSCILLATING ON THE 87RB CLOCK FREQUENCY WI
M. Hara, Y. Yano, M. Kajita, H. Nishino, Y. Ibata, M. Toda, S. Hara, A. Kasamatsu, H. Ito, T. Ono, T. Ido
The 31st IEEE International Conference on Micro Electro Mechanical Systems 2018-January 715-718 2018/01
DOI：
10.1109/MEMSYS.2018.8346655
ISSN：
2160-1968
-
Microfabricated temperature-sensing devices using a microfluidic chip for biological applications
Peer-reviewed
Naoki Inomata, Masaya Toda, Takahito Ono
International Journal of Automation Technology 12 (1) 15-23 2018
DOI：
10.20965/ijat.2018.p0015
ISSN：
1881-7629
eISSN：
1883-8022
-
High-aspect-ratio aluminum-doped zinc oxide nanomechanical resonator
Peer-reviewed
Nguyen Van Toan, Naoki Inomata, Takahito Ono
IEEJ Transactions on Electrical and Electronic Engineering 12 S141-S142 2017/12
DOI：
10.1002/tee.22561
ISSN：
1931-4973
eISSN：
1931-4981
-
Piezoresistive property of an aluminum-doped zinc oxide thin film deposited via atomic-layer deposition for microelectromechanical system/nanoelectromenchanical system applications
Peer-reviewed
Naoki Inomata, Nguyen Van Toan, Takahito Ono
IEEJ Transactions on Electrical and Electronic Engineering 12 S120-S124 2017/12
DOI：
10.1002/tee.22570
ISSN：
1931-4973
eISSN：
1931-4981
-
New Approach to Increase CNT Contents in Electrodeposited Ni-CNT Composite Thin Films by Modified Current Conditions
Peer-reviewed
Akhtar Muhammad Shahrukh, Zhonglie An, Masaya Toda, Takahito Ono
IEEE Transactions on Nanotechnology 16 (6) 931-938 2017/11
DOI：
10.1109/TNANO.2017.2726183
ISSN：
1536-125X
-
Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Takumi Hokama, Takahito Ono
Advanced Engineering Materials 19 (11) 2017/11
DOI：
10.1002/adem.201700203
ISSN：
1438-1656
eISSN：
1527-2648
-
Progress in performance enhancement methods for capacitive silicon resonators
Peer-reviewed
Nguyen Van Toan, Takahito Ono
Japanese Journal of Applied Physics 56 (11) 2017/11
DOI：
10.7567/JJAP.56.110101
ISSN：
0021-4922
eISSN：
1347-4065
-
Microfabrication of a scanning probe with NV centers in a selectively grown diamond thin film through a xenon difluoride etching process
Peer-reviewed
Minjie Zhu, Jinhua Li, Masaya Toda, Takahito Ono
Journal of Micromechanics and Microengineering 27 (12) 2017/10/30
DOI：
10.1088/1361-6439/aa8f12
ISSN：
0960-1317
eISSN：
1361-6439
-
Fabrication of π-type flexible thermoelectric generators using an electrochemical deposition method for thermal energy harvesting applications at room temperature
Peer-reviewed
Nguyen Huu Trung, Nguyen Van Toan, Takahito Ono
Journal of Micromechanics and Microengineering 27 (12) 2017/10/30
DOI：
10.1088/1361-6439/aa8f16
ISSN：
0960-1317
eISSN：
1361-6439
-
Composite films of highly ordered Si nanowires embedded in SiGe<inf>0.3</inf> for thermoelectric applications
Peer-reviewed
Akiou Kikuchi, Akifumi Yao, Isamu Mori, Takahito Ono, Seiji Samukawa
Journal of Applied Physics 122 (16) 2017/10/28
DOI：
10.1063/1.4986355
ISSN：
0021-8979
eISSN：
1089-7550
-
パーマロイコンセントレータによる磁場勾配を用いた共振型磁気センサ
諏訪亘, 猪股直生, 戸田雅也, 小野崇人
センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 34 01pm4-PS-146-1-01pm4-PS-146-2 2017/10/24
-
Ir/YSZ/Si上に成膜したダイヤモンドを用いた振動子の作製と評価
持丸裕矢, 戸田雅也, 小野崇人
センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 34 01pm4-PLN-11-1-01pm4-PLN-11-2 2017/10/24
-
原子時計チップ開発に向けた卓上原子時計テストベンチによるMEMSガスセルおよびFBAR-VCOの評価
Motokai Hara, Yuichiro Yano, Masatoshi Kajita, Hitoshi Nishino, Yasuhiro Ibata, Minjie Zhu, Latif Imran, Masaya Toda, Takahito Ono, Tetsuya Ido
Proceedings of Sensor Symposium on Sensors, Micromachines and Applied Systems 34 31am3-PS-17-1-31am3-PS-17-4 2017/10/24
Publisher:
Institute of Electrical Engineers of Japan
-
Design and fabrication of capacitive silicon nanomechanical resonators with selective vibration of a high-order mode
Peer-reviewed
Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Yunheub Song, Takahito Ono
Micromachines 8 (10) 2017/10/20
DOI：
10.3390/mi8100312
eISSN：
2072-666X
-
Assembled Micro-Tube Resonator for Mass Detection of Flowing Liquid
Mohammad Akita Indianto, Masaya Toda, Takahito Ono
8 31am3-PN-33-1-31am3-PN-33-2 2017/10
-
Fabrication of PMUT using silicon on nothing process for fingerprint sensor
Shim Hang, Nguyen Van Toan, Masaya Toda, Naoki Inomata, Takahito Ono, Yoshiaki Kanamori, Song Yunheub, Oh Youngtaek
「センサ・マイクロマシンと応用システム」シンポジウム論文集 31 31am3-PS-19-1-31am3-PS-19-2 2017/10
-
Geometry dependence of temperature coefficient of resonant frequency in highly sensitive resonant thermal sensors
Peer-reviewed
Naoki Inomata, Takahito Ono
Japanese Journal of Applied Physics 56 (8) 2017/08
DOI：
10.7567/JJAP.56.087201
ISSN：
0021-4922
eISSN：
1347-4065
-
Fabrication and evaluation of capacitive silicon resonators with piezoresistive heat engines
Peer-reviewed
Nguyen Van Toan, Nguyen Van Nha, Yunheub Song, Takahito Ono
Sensors and Actuators, A: Physical 262 99-107 2017/08/01
DOI：
10.1016/j.sna.2017.05.031
ISSN：
0924-4247
-
High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing
Naoki Inomata, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems 970-973 2017/07/26
DOI：
10.1109/TRANSDUCERS.2017.7994212
-
Resonant magnetic sensor using magnetic gradient field formed by permalloy concentrator
Wataru Suwa, Naoki Inomata, Masaya Toda, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems 822-825 2017/07/26
DOI：
10.1109/TRANSDUCERS.2017.7994175
-
Pico-thermogravimetric material properties analysis using diamond cantilever beam
Ioana Voiculescu, Masaya Toda, Meiyong Liao, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems 271 2223-2226 2017/07/26
DOI：
10.1109/TRANSDUCERS.2017.7994519
ISSN：
0924-4247
-
Capacitive silicon resonators with piezoresistive heat engines
Nguyen Van Toan, Nguyen Van Nha, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems 456-459 2017/07/26
DOI：
10.1109/TRANSDUCERS.2017.7994085
-
Vacuum packaged cantilever sensor mounted with a magnetic particle for magnetic force detection
Gaopeng Xue, Masaya Toda, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems 1096-1099 2017/07/26
DOI：
10.1109/TRANSDUCERS.2017.7994243
-
High Aspect Ratio Silicon Structures Produced via Metal-Assisted Chemical Etching and Assembly Technology for Cantilever Fabrication
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Takahito Ono
IEEE Transactions on Nanotechnology 16 (4) 567-573 2017/07
DOI：
10.1109/TNANO.2016.2645781
ISSN：
1536-125X
-
Fabrication of an Assembled Scanning Probe with Nitrogen Vacancy Centers in Diamond Particle
Peer-reviewed
Minjie Zhu, Masaya Toda, Takahito Ono
IEEE Transactions on Nanotechnology 16 (4) 545-550 2017/07
DOI：
10.1109/TNANO.2016.2640191
ISSN：
1536-125X
-
Vanadium oxide thermal microsensor integrated in a microfluidic chip for detecting cholesterol and glucose concentrations
Peer-reviewed
Naoki Inomata, Libao Pan, Zhuqing Wang, Mitsuteru Kimura, Takahito Ono
Microsystem Technologies 23 (7) 2873-2879 2017/07/01
DOI：
10.1007/s00542-016-3090-1
ISSN：
0946-7076
-
Q factor enhancement of Si resonator by nonlinear damping
Peer-reviewed
Naoki Inomata, Kazuya Saito, Takahito Ono
Microsystem Technologies 23 (5) 1201-1205 2017/05/01
DOI：
10.1007/s00542-016-2827-1
ISSN：
0946-7076
-
Fabrication of a SiO<inf>2</inf> optical window for controlling light transmission
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Tetsuro Saito, Naoki Inomata, Takahito Ono
Microsystem Technologies 23 (4) 919-927 2017/04
DOI：
10.1007/s00542-016-2826-2
ISSN：
0946-7076
-
Fabrication and magnetic control of Y<inf>3</inf>Fe<inf>5</inf>O<inf>12</inf> cantilevers
Peer-reviewed
Yong Jun Seo, Kazuya Harii, Ryo Takahashi, Hiroyuki Chudo, Koichi Oyanagi, Zhiyong Qiu, Takahito Ono, Yuki Shiomi, Eiji Saitoh
Applied Physics Letters 110 (13) 132409 2017/03/27
DOI：
10.1063/1.4979553
ISSN：
0003-6951
-
パーマロイ磁気コンセントレータによる磁場勾配を用いた共振型磁気センサ
諏訪亘, 猪股直生, 戸田雅也, 小野崇人
電気学会全国大会講演論文集(CD-ROM) 2017 ROMBUNNO.3‐132 2017/03/05
-
Cantilever beam temperature sensors for biological applications
Peer-reviewed
Masaya Toda, Naoki Inomata, Takahito Ono, Ioana Voiculescu
IEEJ Transactions on Electrical and Electronic Engineering 12 (2) 153-160 2017/03/01
DOI：
10.1002/tee.22360
ISSN：
1931-4973
eISSN：
1931-4981
-
Extremely low thermal conductivity of high density and ordered 10 nm-diameter silicon nanowires array
Peer-reviewed
Akiou Kikuchi, Akifumi Yao, Isamu Mori, Takahito Ono, Seiji Samukawa
Applied Physics Letters 110 (9) 091908 2017/02/27
DOI：
10.1063/1.4977778
ISSN：
0003-6951
-
Fabrication of high aspect aluminum doped zinc oxide nanomechanical structures by deep RIE and ALD
Nguyen Van Toan, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 652-655 2017/02/23
DOI：
10.1109/MEMSYS.2017.7863492
ISSN：
1084-6999
-
Reversible low voltage electrowetting with SiO<inf>2</inf> capillary window for optical imaging
Nguyen Van Toan, Suguru Sangu, Yoshisuke Ansai, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 1347-1350 2017/02/23
DOI：
10.1109/MEMSYS.2017.7863670
ISSN：
1084-6999
-
Preparing 3D graphene nanowall-nickel hybrid electrode on quartz glass for on-chip micro-supercapacitors
Jinhua Li, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 0 861-864 2017/02/23
DOI：
10.1109/MEMSYS.2017.7863544
ISSN：
1084-6999
-
Patterning high aspect silicon pillars on cantilever by metal assisted chemical etching for humidity sensing
Nguyen Van Toan, Masaya Toda, Takumi Hokama, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 0 1232-1235 2017/02/23
DOI：
10.1109/MEMSYS.2017.7863639
ISSN：
1084-6999
-
Fabrication of nanomechanical resonator with non-local spin valve structure for spin detection and control
Yong Jun Seo, Kazuya Harii, Ryo Takahashi, Hiroyuki Chudo, Koichi Oyanagi, Takahito Ono, Yuki Shiomi, Eiji Saitoh
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 1177-1180 2017/02/23
DOI：
10.1109/MEMSYS.2017.7863625
ISSN：
1084-6999
-
Flexible thermoelectric power generators based on electrochemical deposition process of BI<inf>2</inf>TE<inf>3</inf> and SB<inf>2</inf>TE<inf>3</inf>
Nguyen Huu Trung, Nguyen Van Toan, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 805-808 2017/02/23
DOI：
10.1109/MEMSYS.2017.7863530
ISSN：
1084-6999
-
Humidity sensor based on the mechanical response of a cantilever with nanostructures on the surface
HOKAMA Takumi, KIKUCHI Akio, TOAN Nguyen Van, TODA Masaya, ONO Takahito
The Proceedings of Conference of Tohoku Branch 2017 (0) 2017
Publisher:
一般社団法人 日本機械学会
-
Synthesis and evaluation of thick films of electrochemically deposited Bi<inf>2</inf>Te<inf>3</inf> and Sb<inf>2</inf>Te<inf>3</inf> thermoelectric materials
Peer-reviewed
Nguyen Huu Trung, Kei Sakamoto, Nguyen Van Toan, Takahito Ono
Materials 10 (2) 2017
DOI：
10.3390/ma10020154
eISSN：
1996-1944
-
Microchanneled calorimetric concentration sensor for picoliter liquid samples of cytochrome c
Peer-reviewed
Masaya Toda, Ning Xia, Naoki Inomata, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 137 (1) 28-31 2017
DOI：
10.1541/ieejsmas.137.28
ISSN：
1341-8939
eISSN：
1347-5525
-
Preface to the special issue on "selected papers in the technical meetings on sensors and micromachines 2016"
Peer-reviewed
Takahito Ono, Ryuji Yokokawa
IEEJ Transactions on Sensors and Micromachines 137 (5) 123 2017
DOI：
10.1541/ieejsmas.137.123
ISSN：
1341-8939
eISSN：
1347-5525
-
Vacuum packaged micro-cantilever with a magnetic particle
Peer-reviewed
Nurasyikin Mohd, Gaopeng Xue, Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 137 (8) 245-246 2017
DOI：
10.1541/ieejsmas.137.245
ISSN：
1341-8939
eISSN：
1347-5525
-
Comb-Drive XYZ-microstage with Large Displacements Based on Chip-Level Microassembly
Peer-reviewed
Gaopeng Xue, Masaya Toda, Takahito Ono
Journal of Microelectromechanical Systems 25 (6) 989-998 2016/12
DOI：
10.1109/JMEMS.2016.2607233
ISSN：
1057-7157
-
Impact of thermal contact resistances on micro-gap heat losses for microthermionic power generators
Peer-reviewed
Remi Yacine Belbachir, Zhonglie An, Takahito Ono
Microsystem Technologies 22 (12) 2811-2820 2016/12/01
DOI：
10.1007/s00542-015-2591-7
ISSN：
0946-7076
-
Glass capillaries based on a glass reflow into nano-trench for controlling light transmission
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Naoki Inomata, Takahito Ono
Microsystem Technologies 22 (12) 2835-2840 2016/12/01
DOI：
10.1007/s00542-015-2607-3
ISSN：
0946-7076
-
Glass reflow process and its applications
Nguyen Van Toan, Suguru Sangu, Takahito Ono
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 260-264 2016/11/28
DOI：
10.1109/NEMS.2016.7758246
-
A freestanding microfluidic-based thermocouple biosensor for enzyme-catalyzed reaction analysis
Zhuqing Wang, Mitsuteru Kimura, Naoki Inomata, Takahito Ono
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 58-61 2016/11/28
DOI：
10.1109/NEMS.2016.7758200
-
Scanning probe with nitrogen vacancy centers in diamond particle for magnetic resonance imaging
Minjie Zhu, Masaya Toda, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 210-213 2016/11/21
DOI：
10.1109/NANO.2016.7751404
-
Flexible thermoelectric power generator based on electrochemical deposition process
Nguyen Huu Trung, Nguyen Van Toan, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 423-425 2016/11/21
DOI：
10.1109/NANO.2016.7751434
-
Thermal conductivity of 10 nm-diameter silicon nanowires array fabricated by bio-template and neutral beam etching
Akiou Kikuchi, Akifumi Yao, Isamu Mori, Ichiro Yamashita, Takahito Ono, Seiji Samukawa
16th International Conference on Nanotechnology - IEEE NANO 2016 505-507 2016/11/21
DOI：
10.1109/NANO.2016.7751300
-
Deposition and micromachining of graphene nanowall towards high-performance microsystems
Jinhua Li, Zhuqing Wang, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 624-626 2016/11/21
DOI：
10.1109/NANO.2016.7751525
-
Fabrication and evaluation of CVD diamond resonators
Yuya Mochimaru, Masaya Toda, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 676-677 2016/11/21
DOI：
10.1109/NANO.2016.7751555
-
Protein addressing in packaged multi-channel by electro-click chemistry for calorimetry biosensor
Zhuqing Wang, Jinhua Li, Mitsuteru Kimura, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 681-682 2016/11/21
DOI：
10.1109/NANO.2016.7751536
-
Electrodeposition and characterization of nickel-carbon nanotube composite thin films with high carbon nanotube content
Muhammad Shahrukh Akhtar, Zhonglie An, Masaya Toda, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 904-906 2016/11/21
DOI：
10.1109/NANO.2016.7751464
-
Resonant acoustic microsensor for photoacoustic detection
Imran Latif, Zhonglie An, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 925-927 2016/11/21
DOI：
10.1109/NANO.2016.7751482
-
Assembled comb-drive XYZ-microstage with DPPH sample for the 3D scanning of magnetic resonance force microscope
Gaopeng Xue, Masaya Toda, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 32 980-981 2016/11/21
Publisher:
Institute of Electrical Engineers of Japan
DOI：
10.1109/NANO.2016.7751422
-
Magnetic field sensor based on vacuum packaged cantilever with a mounted magnet
Gaopeng Xue, Masaya Toda, Nurasyikin Mohd, Zhonglie An, Nguyen Van Toan, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 33 25pm4-PS-060-1-25pm4-PS-060-4 2016/10/24
-
Glass reflow process for microsystem applications
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Takahito Ono
Journal of Micromechanics and Microengineering 26 (11) 115018 2016/10/14
DOI：
10.1088/0960-1317/26/11/115018
ISSN：
0960-1317
eISSN：
1361-6439
-
Engineering micro-supercapacitors of graphene nanowalls/Ni heterostructure based on microfabrication technology
Peer-reviewed
Jinhua Li, Minjie Zhu, Zhuqing Wang, Takahito Ono
Applied Physics Letters 109 (15) 153901 2016/10/10
DOI：
10.1063/1.4964787
ISSN：
0003-6951
-
Single and mechanically coupled capacitive silicon nanomechanical resonators
Peer-reviewed
Nguyen Van Toan, Tsuyoshi Shimazaki, Takahito Ono
Micro and Nano Letters 11 (10) 591-594 2016/10/01
DOI：
10.1049/mnl.2016.0265
eISSN：
1750-0443
-
Level repulsion of GHz phononic surface waves in quartz substrate with finite-depth holes
Peer-reviewed
Sih Ling Yeh, Yu Ching Lin, Yao Chuan Tsai, Takahito Ono, Tsung Tsong Wu
Ultrasonics 71 106-110 2016/09/01
DOI：
10.1016/j.ultras.2016.05.017
ISSN：
0041-624X
-
Fabrication of high aspect ratio SiO<inf>2</inf> and tempax glass pillar structures and its application for optical modulator device
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Takahito Ono
Journal of Microelectromechanical Systems 25 (4) 668-674 2016/08
DOI：
10.1109/JMEMS.2016.2581184
ISSN：
1057-7157
-
Packaging Technique of Micro Cantilever for Magnetic Force Sensing
Nurasyikin Mohd, Naoki Inomata, Nguyen Van Toan, Takahito Ono, Masaya Toda
Proceedings of the International Workshop on Nanomechanical Sensors 12 150-151 2016/06/22
-
Design and fabrication of a large area freestanding compressive stress SiO<inf>2</inf> optical window
Peer-reviewed
Nguyen Van Toan, Suguru Sangu, Takahito Ono
Journal of Micromechanics and Microengineering 26 (7) 075016 2016/06/21
DOI：
10.1088/0960-1317/26/7/075016
ISSN：
0960-1317
eISSN：
1361-6439
-
Comparative investigation into surface charged multi-walled carbon nanotubes reinforced Cu nanocomposites for interconnect applications
Peer-reviewed
Zhonglie An, Masaya Toda, Takahito Ono
Composites Part B: Engineering 95 137-143 2016/06/15
DOI：
10.1016/j.compositesb.2016.03.086
ISSN：
1359-8368
-
An investigation of processes for glass micromachining
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Takahito Ono
Micromachines 7 (3) 2016/03/22
DOI：
10.3390/mi7030051
eISSN：
2072-666X
-
CVDダイヤモンド振動子の作製と評価
持丸 裕矢, 戸田 雅也, 小野 崇人
日本機械学会東北支部第51期総会・講演会講演論文集 2016 (1) 75-76 2016/03/11
-
Mechanical properties of Carbon nanotubes-nickel composite thin films synthesized with high carbon nanotube content
Akhtar M Shahrukh, Zhonglie An, Toda Masaya, Takahito Ono
日本機械学会東北支部第51期総会・講演会講演論文集 2016 (1) 77-78 2016/03/11
Publisher:
The Japan Society of Mechanical Engineers
-
Temperature-depended mechanical properties of microfabricated vanadium oxide mechanical resonators for thermal sensing
Peer-reviewed
Naoki Inomata, Libao Pan, Masaya Toda, Takahito Ono
Japanese Journal of Applied Physics 55 (3) 037201 2016/03
DOI：
10.7567/JJAP.55.037201
ISSN：
0021-4922
eISSN：
1347-4065
-
Electrodeposition of carbon nanotubes-Cu composite for microelectrical elements applications
Peer-reviewed
Zhonglie An, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2016-February 528-531 2016/02/26
DOI：
10.1109/MEMSYS.2016.7421678
ISSN：
1084-6999
-
Preparation of graphene-nickel nanocomposite for durable micromirror application
Peer-reviewed
Jinhua Li, Zhonglie An, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2016-February 554-557 2016/02/26
DOI：
10.1109/MEMSYS.2016.7421685
ISSN：
1084-6999
-
Microfabricated vanadium oxide resonant thermal sensor with a high temperature coefficient of resonant frequency
Peer-reviewed
Naoki Inomata, Libao Pan, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2016-February 1042-1045 2016/02/26
DOI：
10.1109/MEMSYS.2016.7421812
ISSN：
1084-6999
-
Pulse-Reverse Electrodeposition and Micromachining of Graphene-Nickel Composite: An Efficient Strategy toward High-Performance Microsystem Application
Peer-reviewed
Jinhua Li, Zhonglie An, Zhuqing Wang, Masaya Toda, Takahito Ono
ACS Applied Materials and Interfaces 8 (6) 3969-3976 2016/02/24
DOI：
10.1021/acsami.5b11164
ISSN：
1944-8244
eISSN：
1944-8252
-
Sensitive thermal microsensor with pn junction for heat measurement of a single cell
Peer-reviewed
Taito Yamada, Naoki Inomata, Takahito Ono
Japanese Journal of Applied Physics 55 (2) 027001 2016/02
DOI：
10.7567/JJAP.55.027001
ISSN：
0021-4922
eISSN：
1347-4065
-
Highly sensitive thermometer using a vacuum-packed Si resonator in a microfluidic chip for the thermal measurement of single cells
Peer-reviewed
Naoki Inomata, Masaya Toda, Takahito Ono
Lab on a Chip 16 (18) 3597-3603 2016
DOI：
10.1039/c6lc00949b
ISSN：
1473-0197
eISSN：
1473-0189
-
Parametrically actuated resonant micromirror using stiffness tunable torsional springs
Peer-reviewed
Yusuke Kawai, Jin Hyeok Kim, Naoki Inomata, Takahito Ono
Sensors and Materials 28 (2) 131-139 2016
DOI：
10.18494/SAM.2016.1163
ISSN：
0914-4935
-
Fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer arrays using glass reflow process
Peer-reviewed
Nguyen Van Toan, Shim Hahng, Yunheub Song, Takahito Ono
Micromachines 7 (5) 76 2016
DOI：
10.3390/mi7050076
eISSN：
2072-666X
-
Photoacoustic Microsensor for Glucose Monitoring in Human Blood
Imran Latif, Masaya Toda, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 32 28pm1-B-5-1-28pm1-B-5-6 2015/10/28
Publisher:
Institute of Electrical Engineers of Japan
-
酸化バナジウムを用いた共振型マイクロ熱量センサ
猪股 直生, 潘 立葆, 戸田 雅也, 小野 崇人
「センサ・マイクロマシンと応用システム」シンポジウム論文集 32 30am2-PS-66-1-30am2-PS-66-4 2015/10/28
Publisher:
Institute of Electrical Engineers of Japan
-
磁気共鳴イメージングためのNVセンターを有するダイヤモンドプローブ
朱 敏杰, 戸田 雅也, 小野 崇人
「センサ・マイクロマシンと応用システム」シンポジウム論文集 32 30am2-PS-076-1-30am2-PS-076-4 2015/10/28
Publisher:
Institute of Electrical Engineers of Japan
-
Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of low temperature measurement systems
Gaopeng Xue, Masaya Toda, Takahito Ono
Japan-China-Korea Joint Conference on MEMS/NEMS 2015 (JCK MEMS/NEMS 2015) 6 73-74 2015/09/23
-
Probe with Nitrogen Vacancy in Diamond Thin Film for Magnetic Resonance Imaging
Minjie Zhu, Masaya Toda, Takahito Ono
Japan-China-Korea Joint Conference on MEMS/NEMS 2015 (JCK MEMS/NEMS 2015) 6 85-86 2015/09/23
-
非線形減衰を用いたSi振動子のQ値向上
猪股 直生, 斎藤 和也, 戸田 雅也, 小野 崇人
日本機械学会2015年度年次大会講演論文集 15 (1) J2210303-1-J2210303-2 2015/09/13
-
Metallic Glass as a Mechanical Material for Microscanners
Peer-reviewed
Yu Ching Lin, Yao Chuan Tsai, Takahito Ono, Pan Liu, Masayoshi Esashi, Thomas Gessner, Mingwei Chen
Advanced Functional Materials 25 (35) 5677-5682 2015/09/01
DOI：
10.1002/adfm.201502456
ISSN：
1616-301X
eISSN：
1616-3028
-
Low-voltage electrostatically driven nanoelectromechanical-switches
Hiro Iizuka, Takahito Ono
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 7 560-563 2015/08/05
DOI：
10.1109/TRANSDUCERS.2015.7180985
-
Comb-drive XYZ-microstage based on assembling technology for low temperature measurement systems
Gaopeng Xue, Masaya Toda, Takahito Ono
ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference 83-88 2015/05/20
DOI：
10.1109/ICEP-IAAC.2015.7111006
-
Microstructuring of carbon nanotubes-nickel nanocomposite
Peer-reviewed
Zhonglie An, Liang He, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono
Nanotechnology 26 (19) UNSP 195601 2015/05/15
DOI：
10.1088/0957-4484/26/19/195601
ISSN：
0957-4484
eISSN：
1361-6528
-
Si nanowire probe with Nd-Fe-B magnet for attonewton-scale force detection
Peer-reviewed
Yong Jun Seo, Masaya Toda, Takahito Ono
Journal of Micromechanics and Microengineering 25 (4) 045015 2015/04
DOI：
10.1088/0960-1317/25/4/045015
ISSN：
0960-1317
eISSN：
1361-6439
-
超薄型カンチレバーを用いた高感度バイオセンシング
倉田慎, 小野崇人, 戸田雅也
日本機械学会東北支部第50期総会・講演会講演論文集 2015 (1) 255-256 2015/03/13
-
Electrochemical Biosensor for Single Cell Impedance Spectroscopy
Sena Nur Arslan, Masaya Toda, Takahito Ono
日本機械学会東北支部第50期総会・講演会講演論文集 2015 (1) 249-250 2015/03/13
-
Fabrication of nano-gap structures based on plastic deformation of strained Si springs by stiction effects
Peer-reviewed
Masaya Toda, Atsushi Yokoyama, Nguyen Van Toan, Naoki Inomata, Takahito Ono
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 21 (3) 649-654 2015/03
DOI：
10.1007/s00542-014-2182-z
ISSN：
0946-7076
eISSN：
1432-1858
-
Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems
Peer-reviewed
Gaopeng Xue, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2015-February (February) 14-17 2015/02/26
DOI：
10.1109/MEMSYS.2015.7050874
ISSN：
1084-6999
-
Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum
Peer-reviewed
Hideki Hayashi, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2015-February (February) 344-347 2015/02/26
DOI：
10.1109/MEMSYS.2015.7050959
ISSN：
1084-6999
-
Synthesis of carbon nanotubes-Ni composite for micromechanical elements application
Peer-reviewed
Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2015-February (February) 401-404 2015/02/26
DOI：
10.1109/MEMSYS.2015.7050974
ISSN：
1084-6999
-
Fabrication and Characterization of Microstacked PZT Actuator for MEMS Applications
Peer-reviewed
Mohd Faizul Mohd Sabri, Takahito Ono, Suhana Mohd Said, Yusuke Kawai, Masayoshi Esashi
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 24 (1) 80-90 2015/02
DOI：
10.1109/JMEMS.2014.2317495
ISSN：
1057-7157
eISSN：
1941-0158
-
Fabrication and characterization of microstacked PZT actuator for MEMS applications
Peer-reviewed
Mohd Faizul Mohd Sabri, Takahito Ono, Suhana Mohd Said, Yusuke Kawai, Masayoshi Esashi
Journal of Microelectromechanical Systems 24 (1) 80-90 2015/02/01
DOI：
10.1109/JMEMS.2014.2317495
ISSN：
1057-7157
-
High Aspect Ratio SiO2 Capillary Based On Silicon Etching and Thermal Oxidation Process for Optical Modulator
Peer-reviewed
N. V. Toan, S. Sangu, T. Saitoh, N. Inomata, T. Ono
International Journal of Chemical, Nuclear, Materials and Metallurgical Engineering 9 (5) 666-671 2015
-
J2210303 Quality factor enhancement of Si resonators by nonlinear damping
INOMATA Naoki, SAITO Kazuya, TODA Masaya, ONO Takahito
The Proceedings of Mechanical Engineering Congress, Japan 2015 (0) _J2210303--_J2210303- 2015
Publisher:
一般社団法人 日本機械学会
-
J2220306 Probe with Nitrogen Vacancy in Diamond Particle for Magnetic Resonance Imaging
ZHU Minjie, TODA Masaya, ONO Takahito
The Proceedings of Mechanical Engineering Congress, Japan 2015 (0) _J2220306--_J2220306- 2015
Publisher:
一般社団法人 日本機械学会
-
Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range
Peer-reviewed
Ting Wei Liu, Yao Chuan Tsai, Yu Ching Lin, Takahito Ono, Shuji Tanaka, Tsung Tsong Wu
AIP Advances 4 (12) 124201-1-124201-12 2014/12/01
DOI：
10.1063/1.4902018
eISSN：
2158-3226
-
Fabrication and characterization of silicon micromirror with carbon nanotubes-nickel nanocomposite beams
Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono
Proceedings of the IEEE Conference on Nanotechnology 14 888-892 2014/11/26
DOI：
10.1109/NANO.2014.6968008
eISSN：
1944-9399
-
Highly Sensitive Thermal Micro Sensor with PN Junction for Thermal Measurements of a Single Cell
Taito Yamada, Nanoki Inomata, Takahito Ono
International Microprocesses and Nanotechnology Conference 27 6C-6-4 2014/11/04
-
Assembled comb-drive XYZ-microstage integrated with capacitive displacement sensor for low temperature measurement systems
Gaopeng Xue, Masaya Toda, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 31 1-6 2014/10/20
Publisher:
Institute of Electrical Engineers of Japan
-
真空中細胞観察のための薄膜Si窓を有する マイクロチャネル型チャンバー
林秀樹, 戸田雅也, 小野 崇人
「センサ・マイクロマシンと応用システム」シンポジウム論文集 31 1-5 2014/10/20
Publisher:
Institute of Electrical Engineers of Japan
-
熱機械駆動スイッチを組み合わせた強誘電体熱電変換素子
齋藤 卓弥, 川合 祐輔, 小野 崇人
「センサ・マイクロマシンと応用システム」シンポジウム 2014/10/05
-
バイナリ―振動を示す非線形結合シリコン振動子
三井 陽介, 小野 崇人
「センサ・マイクロマシンと応用システム」シンポジウム 2014/10/05
-
c‐BN薄膜を用いたゲート電極付き電界放出電子源アレイ
小林正典, 宮下英俊, 猪股直生, 小野崇人
「センサ・マイクロマシンと応用システム」シンポジウム 2014/10/05
-
Carbon nanotube-Cu Composite Formation based on Supercritical Fluid Process
Zhonglie An, Masaya Toda, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム 2014/10/05
-
An electrostatically driven microstage with capacitive displacement sensor for low temperature operation
Gaopeng Xue, Masaya Toda, Liang He, Yusuke Kawai, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム 2014/10/05
-
Micro thermionic power generator with low operation temperature
Remi Yacine Belbachir, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム 2014/10/05
-
A long bar type silicon resonator with a high quality factor
Nguyen Van Toan, Masaya Toda, Yusuke Kawai, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム 2014/10/05
-
A Si nanowire probe with a Nd-Fe-B magnet for force detection
Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム 2014/10/05
-
Optical windows with liquid penetration for controlling light transmittance
Nguyen Van Toan, Suguru Sangu, Tetsuro Saito, Naoki Inomata, Hirobumi Watanabe, Takahito Ono
IEEE Conference on Reliability Science for Advanced Materials and Device 2014/09/07
-
Focusing and waveguiding of Lamb waves in micro-fabricated piezoelectric phononic plates
Peer-reviewed
Meng-Jhen Chiou, Yu-Ching Lin, Takahito Ono, Masayoshi Esashi, Sih-Ling Yeh, Tsung-Tsong Wu
ULTRASONICS 54 (7) 1984-1990 2014/09
DOI：
10.1016/j.ultras.2014.05.007
ISSN：
0041-624X
eISSN：
1874-9968
-
Focusing and waveguiding of Lamb waves in micro-fabricated piezoelectric phononic plates
Peer-reviewed
Meng Jhen Chiou, Yu Ching Lin, Takahito Ono, Masayoshi Esashi, Sih Ling Yeh, Tsung Tsong Wu
Ultrasonics 54 (7) 1984-1990 2014/09
DOI：
10.1016/j.ultras.2014.05.007
ISSN：
0041-624X
-
Improved thermal interface property of carbon nanotube-Cu composite based on supercritical fluid deposition
Peer-reviewed
Zhonglie An, Masaya Toda, Takahito Ono
Carbon 75 281-288 2014/08
DOI：
10.1016/j.carbon.2014.04.003
ISSN：
0008-6223
-
Thermal investigation of a micro-gap thermionic power generator
Peer-reviewed
Remi Yacine Belbachir, Zhonglie An, Takahito Ono
JOURNAL OF MICROMECHANICS AND MICROENGINEERING 24 (8) 085009 2014/08
DOI：
10.1088/0960-1317/24/8/085009
ISSN：
0960-1317
eISSN：
1361-6439
-
Mechanical quality factor enhancement in a silicon micromechanical resonator by low-damage process using neutral beam etching technology
Peer-reviewed
Nguyen Van Toan, Tomohiro Kubota, Halubai Sekhar, Seiji Samukawa, Takahito Ono
Journal of Micromechanics and Microengineering 24 (8) 085005 2014/08/01
DOI：
10.1088/0960-1317/24/8/085005
ISSN：
0960-1317
eISSN：
1361-6439
-
Resonant Silicon Micromirror with Electrophated Carbon Nanotubes-Nickel Composite Beams for MEMS Application
Ahonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono
The IEEE International Nanoelectonics Conference 6 173 2014/07/28
-
New trends in NEMS/MEMS device using neutral beam etching technology
Sekhar Halubai, Toan Nguyen Van, Tomohiro Kubota, Takahito Ono, Seiji Samukawa
The 6th IEEE International Nanoelectronics Conference 2014 2014/07
-
Micro/Nano-mechanical Resonators for Ultimate Sensing
Invited
Takahito Ono, Naoki Inomata, Masaya Toda
The Asia-Pacific Conference on Transducers and Micro/Nano Technologies 7 1 2014/06/29
-
MICROSTAGE DRIVEN BY COMB-DRIVE ACTUATORS FOR LOW TEMPERATURE MEASUREMENT SYSTEMS
Gaopeng Xue, Masaya Toda, Takahito Ono
The Asia-Pacific Conference on Transducers and Micro/Nano Technologies 7 7-1 2014/06/29
-
Micro Thermionic Power Generator with Low Operation Temperature
R. Y. Belbachir, T. Ono
The Asia-Pacific Conference on Transducers and Micro/Nano Technologies 7 13-1 2014/06/29
-
Shytheisis and Characterization of Carbon Nanotube-Nickel Composite with High Content of Carbon Nanotubes
Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono
The Asia-Pacific Conference on Transducers and Micro/Nano Technologies 7 14-5 2014/06/29
-
Temperature changes in brown adipocytes detected with a bimaterial microcantilever
Peer-reviewed
Masaaki K. Sato, Masaya Toda, Naoki Inomata, Hisataka Maruyama, Yuko Okamatsu-Ogura, Fumihito Arai, Takahito Ono, Akihiko Ishijima, Yuichi Inoue
Biophysical Journal 106 (11) 2458-2464 2014/06/03
DOI：
10.1016/j.bpj.2014.04.044
ISSN：
0006-3495
eISSN：
1542-0086
-
Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer
Peer-reviewed
Ting Wei Liu, Yu Ching Lin, Yao Chuan Tsai, Takahito Ono, Shuji Tanaka, Tsung Tsong Wu
Applied Physics Letters 104 (18) 181905 2014/05/05
DOI：
10.1063/1.4875981
ISSN：
0003-6951
-
Fabrication of silicon nanowire probe with magnet for magnetic resonance force microscopy
Peer-reviewed
Yong-Jun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 134 166 2014/05/01
DOI：
10.1541/ieejsmas.134.166
-
熱機械駆動スイッチと強誘電体を組み合わせた熱‐電気変換素子，電気学会Ｅ部門誌
Peer-reviewed
斎藤卓弥, 川合祐輔, 小野崇人
電気学会Ｅ部門誌 134 154 2014/05/01
DOI：
10.1541/ieejsmas.134.154
-
Calibration study of bimaterial cantilever beam nanocalorimeter used in liquid applications
Masaya Toda, Ioana Voiculescu, Fei Liu, Takahito Ono
International Workshop on Nanomechanical Sesing 2014/04/30
-
Synthesis of cubic boron nitride films on Si tips via chemical vapor deposition and the field emission properties
Peer-reviewed
Masanori Kobayashi, Hidetoshi Miyashita, Naoki Inomata, Takahito Ono
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 32 (2) 2014/03
DOI：
10.1116/1.4843075
ISSN：
1071-1023
-
Synthesis of cubic boron nitride films on Si tips via chemical vapor deposition and the field emission properties
Peer-reviewed
Masanori Kobayashi, Hidetoshi Miyashita, Naoki Inomata, Takahito Ono
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics 32 (2) 02B102 2014/03/01
DOI：
10.1116/1.4843075
ISSN：
2166-2746
eISSN：
2166-2754
-
Synthesis and Characterization of Carbon Nanotube-Cu Composite using Supercritical Fluid Deposition
Peer-reviewed
Zhongle An, Masaya Toda, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 134 38 2014/03/01
DOI：
10.1541/ieejsmas.134.38
-
Synchronized micromechanical resonators with a nonlinear coupling element
Peer-reviewed
Takahito Ono, Keitaro Tanno, Yusuke Kawai
JOURNAL OF MICROMECHANICS AND MICROENGINEERING 24 (2) 2014/02
DOI：
10.1088/0960-1317/24/2/025012
ISSN：
0960-1317
eISSN：
1361-6439
-
Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis
Peer-reviewed
Liang He, Masaya Toda, Yusuke Kawai, Hidetoshi Miyashita, Mamoru Omori, Toshiyuki Hashida, Ruediger Berger, Takahito Ono
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 20 (2) 201-208 2014/02
DOI：
10.1007/s00542-013-1771-6
ISSN：
0946-7076
eISSN：
1432-1858
-
Synchronized micromechanical resonators with a nonlinear coupling element
Peer-reviewed
Takahito Ono, Keitaro Tanno, Yusuke Kawai
Journal of Micromechanics and Microengineering 24 (2) 025012 2014/02
DOI：
10.1088/0960-1317/24/2/025012
ISSN：
0960-1317
eISSN：
1361-6439
-
A capacitive silicon resonator with a movable electrode structure for gap width reduction
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Yusuke Kawai, Takahito Ono
Journal of Micromechanics and Microengineering 24 (2) 025006 2014/02
DOI：
10.1088/0960-1317/24/2/025006
ISSN：
0960-1317
eISSN：
1361-6439
-
J2230201 Miniature Fourier transform infrared spectrometer for analyzing of body components using attenuated total reflection method
SATO Yuki, TANAHASHI Tatsuyuki, TODA Masaya, INOMATA Naoki, ONO Takahito
The Proceedings of Mechanical Engineering Congress, Japan 2014 (0) _J2230201--_J2230201- 2014
Publisher:
一般社団法人 日本機械学会
-
Ultrasensitive Si nanowire probe for magnetic resonance detection
Yong Jun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 151-154 2014
DOI：
10.1109/MEMSYS.2014.6765596
ISSN：
1084-6999
-
Capacitive silicon resonator structure with movable electrodes to reduce capacitive gap widths based on electrostatic parallel plate actuation
Nguyen Van Toan, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 1245-1248 2014
DOI：
10.1109/MEMSYS.2014.6765874
ISSN：
1084-6999
-
A long bar type silicon resonator with a high quality factor
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Yusuke Kawai, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 134 (2) 26-31 2014
DOI：
10.1541/ieejsmas.134.26
ISSN：
1341-8939
eISSN：
1347-5525
-
FABRICATION AND EVALUATION OF SILICON MICROMECHANICAL RESONATOR USING NEUTRAL BEAM ETCHING TECHNOLOGY
Nguyen Van Toan, Tomohiro Kubota, Halubai Sekhar, Seiji Samukawa, Takahito Ono
2014 9TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) 9 1-5 2014
DOI：
10.1109/NEMS.2014.6908747
-
Fabrication of nano-gap structures based on plastic deformation of strained Si springs by stiction effects
Peer-reviewed
Masaya Toda, Atsushi Yokoyama, Nguyen Van Toan, Naoki Inomata, Takahito Ono
Microsystem Technologies 21 (3) 649-654 2014
DOI：
10.1007/s00542-014-2182-z
ISSN：
0946-7076
eISSN：
1432-1858
-
Resonant Sensors for Bio-nano Sensing
Invited
Takahito Ono
IEEE Nanotechnology Materials and Devices Conference 2013/10/08
-
Thermal sensor probe with a Si resonator in a cavity for thermal insulator
Peer-reviewed
Naoki Inomata, Takahito Ono
Japanese Journal of Applied Physics 52 117201-1-117201-5 2013/10/01
DOI：
10.7567/JJAP.52.117201
-
Silicon Nanowire Probe with Nd-Fe-B magnet for Magnetic Resonance Force Microscopy
Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
International Conference on Micro and Nano Engineering 39 208 2013/09/16
-
Synthesis of Carbon Nanotubes-Cu Composite Film using Supercritical Fluid Deposition for Thermal Interface
Zhonglie An, Masaya Toda, Takahito Ono
International Conference on Micro and Nano Engineering 39 483 2013/09
-
狭ギャップマイクロ熱電子発電の基礎実験
Peer-reviewed
宮下英俊, 陳帥, 小野崇人
電気学会論文誌E 133 267-271 2013/09/01
DOI：
10.1541/ieejsmas.133.267
-
Fabrication of an hermetically packaged silicon resonator on LTCC substrate
Peer-reviewed
Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 19 (8) 1165-1175 2013/08
DOI：
10.1007/s00542-012-1716-5
ISSN：
0946-7076
-
Fabrication of an hermetically packaged silicon resonator on LTCC substrate
Peer-reviewed
Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
Microsystem Technologies 19 (8) 1165-1175 2013/08
DOI：
10.1007/s00542-012-1716-5
ISSN：
0946-7076
-
Suspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquid
Peer-reviewed
Masaya Toda, Tomoyuki Otake, Hidetoshi Miyashita, Yusuke Kawai, Takahito Ono
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 19 (7) 1049-1054 2013/07
DOI：
10.1007/s00542-012-1698-3
ISSN：
0946-7076
-
Energy-loss mechanism of single-crystal silicon microcantilever due to surface defects generated during plasma processing
Peer-reviewed
Akira Wada, Yuuki Yanagisawa, Batnasan Altansukh, Tomohiro Kubota, Takahito Ono, Satoshi Yamasaki, Seiji Samukawa
Journal of Micromechanics and Microengineering 23 (6) 65020 2013/06
DOI：
10.1088/0960-1317/23/6/065020
ISSN：
0960-1317
eISSN：
1361-6439
-
CANTILEVERS FOR NANOSENSING: CALORIMETRY FOR A LIVING CELL
Invited
Masaya Toda, Naoki Inomata, Masaaki Sato, Akihiko Ishijima, Takahito Ono
Proceedings of 2013 Nanomechanical Sensing 35-36 2013/05/02
-
Array of optically switchable emitter array with carbon nanotube grown on Si tip for multi electron beam lithography, Nanotechnolory
Peer-reviewed
Yujiro Tanaka, Hidetoshi Miyashita, Masayoshi Esashi, Takahito Ono
Nanotechnolory 24 015203-1-015203-6 2013/04/25
DOI：
10.1088/0957-4484/24/1/015203
-
An optically switchable emitter array with carbon nanotubes grown on a Si tip for multielectron beam lithography
Peer-reviewed
Yujiro Tanaka, Hidetoshi Miyashita, Masayoshi Esashi, Takahito Ono
Nanotechnology 24 (1) 2013/01/11
DOI：
10.1088/0957-4484/24/1/015203
ISSN：
0957-4484
eISSN：
1361-6528
-
J026032 Resonant thermal sensor isolated in vacuum for biological samples
INOMATA Naoki, TODA Masaya, ONO Takahito
The Proceedings of Mechanical Engineering Congress, Japan 2013 (0) _J026032-1-_J026032-3 2013
Publisher:
一般社団法人 日本機械学会
-
166 Microchanneled calorimeter for picoliter liquid sample
Xia Ning, Toda Masaya, Inomata Naoki, Ono Takahito
The Proceedings of Conference of Tohoku Branch 2013 (0) 134-135 2013
Publisher:
一般社団法人 日本機械学会
-
An optically switchable emitter array with carbon nanotubes grown on a Si tip for multielectron beam lithography
Peer-reviewed
Yujiro Tanaka, Hidetoshi Miyashita, Masayoshi Esashi, Takahito Ono
NANOTECHNOLOGY 24 (1) 015203-1-015203-6 2013/01
DOI：
10.1088/0957-4484/24/1/015203
ISSN：
0957-4484
-
Fundamental experiment of micro thermionic power generator with narrow gap
Peer-reviewed
Hidetoshi Miyashita, Chen Shuai, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 133 (9) 267-271 2013
DOI：
10.1541/ieejsmas.133.267
ISSN：
1341-8939
eISSN：
1347-5525
-
Fabrication and packaging process of silicon resonators capable of the integration of LSI for application of timing device
Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 377-380 2013
DOI：
10.1109/MEMSYS.2013.6474257
ISSN：
1084-6999
-
Optically controllable Si photocathode array
Yujiro Tanaka, Hidetoshi Miyashita, Masayoshi Esashi, Takahito Ono
The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2013) 504.-507 2013/01
DOI：
10.1109/MEMSYS.2013.6474289
-
PARAMETRICALLY DRIVEN RESONANT MICRO-MIRROR SCANNER WITH TUNABLE SPRINGS
Jinhyeok Kim, Yusuke Kawai, Naoki Inomata, Takahito Ono
26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013) 580-583 2013
DOI：
10.1109/MEMSYS.2013.6474308
ISSN：
1084-6999
-
Miniature Fourier transform infrared spectrometer for multi gas detection
Peer-reviewed
Tatsuyuki Tanahashi, Takahito Ono
Smart Systems Integration 2013, SSI 2013 2013
-
SILICON NANOWIRE PROBE FOR MAGNETIC RESONANCE FORCE MICROSCOPY
Peer-reviewed
YongJun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
Proceedings of 2013 Nanomechanical Sen 59-60 2013/01
-
Thermoelectric power generator based on a ferroelectric material combined with a bimetal thermostat
Takuya Saito, Yusuke Kawai, Takahito Ono
The International Conference on Solid State Sensors, Actuators and Microsystems 2280-2283 2013/01
DOI：
10.1109/Transducers.2013.6627260
-
Miniature Fourier transform infrared spectrometer for middle infrared wavelength range
Tatsuyuki Tanahashi, Masaya Toda, Hidetoshi Miyashita, Takahito Ono
The International Conference on Solid State Sensors, Actuators and Microsystems 2509-2512 2013/01
DOI：
10.1109/Transducers.2013.6627316
-
Synchronization of stochastic resonance using coupled nonlinear silicon resonators
Yosuke Mitsui, Yusuke Kawai, Takahito Ono
The International Conference on Solid State Sensors, Actuators and Microsystems 2013-2016 2013/01
DOI：
10.1109/Transducers.2013.6627192
-
Supercritical Fluid Deposition and Characterization of CarbonNanotubes-Cu Composite
Zhonglie An, Masaya Toda, Takahito Ono
The 4th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013) O-06-O-06 2013/01
-
Flexible Thermoelectric Power Generator Combined with CuThermal Guides Array
Sihuang Zhao, Yusuke Kawai, Takahito Ono
The 4th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013) O-15-O-15 2013/01
-
Tuner integrated resonant micro mirror scanner for compensation of non-liner spring effect
Yusuke Kawai, Takahito Ono
The 4th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013) O-16-O-16 2013/01
-
Pico-calorimeter using a resonant thermal sensor
Naoki Inomata, Takahito Ono
The 4th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013) P-01-P-01 2013/01
-
Si Nanowire Probe with a magnet for Magnetic ResonanceDetection
Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
The 4th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013) P-02-P-02 2013/01
-
CANTILEVERS FOR NANOSENSING: CALORIMETRY FOR A LIVING CELL
Peer-reviewed
Masaya Toda, Naoki Inomata, Masaaki Sato, Akihiko Ishijima, Takahito Ono
Proceedings of 2013 Nanomechanical Sensing 35-36 2013/01
-
Piezoresistive silicon microresonator for measurements of hydrogen adsorption in carbon nanotubes
Peer-reviewed
Zhonglie An, Masayoshi Esashi, Takahito Ono
Japanese Journal of Applied Physics 51 (11) 116601-116604 2012/11
DOI：
10.1143/JJAP.51.116601
ISSN：
0021-4922
eISSN：
1347-4065
-
High sensitive Si cantilevers for magnetic resonance force microscopy
Masaya Toda, Yong Jun Seo, Yusuke Kawai, Hidetoshi Miyashita, Takahito Ono
Proceedings of the International Microprocesses & Nanotechnology Conference 25 1P-7-61-1-1P-7-61-2 2012/10/30
-
Pico calorimeter for detection of heat produced in an individual brown fat cell
Peer-reviewed
Naoki Inomata, Masaya Toda, Masaaki Sato, Akihiko Ishijima, Takahito Ono
Applied Physics Letters 100 (15) 154104-1-154104-4 2012/04
DOI：
10.1063/1.3701720
ISSN：
0003-6951
-
3PS013 Quantitative analysis of heat production of brown adipocytes using bimetal cantilever(The 50th Annual Meeting of the Biophysical Society of Japan)
Sato Masaaki, Toda Masaya, Inomata Naoki, Inoue Yuichi, Ono Takahito, Ishijima Akihiko
Seibutsu Butsuri 52 S148 2012
Publisher:
The Biophysical Society of Japan General Incorporated Association
DOI：
10.2142/biophys.52.S148_1
-
Resonant thermal sensor for a living cell in liquid
Naoki Inomata, Masaya Toda, Masaaki Sato, Akihiko Ishijima, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 30 108-111 2012
DOI：
10.1109/MEMSYS.2012.6170105
ISSN：
1084-6999
-
Experimental and modeling analysis on entrainment condition of submicrometer thick Si micro mechanical resonators with nonlinear coupling element
Keitaro Tanno, Yusuke Kawai, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 30 563-566 2012
DOI：
10.1109/MEMSYS.2012.6170238
ISSN：
1084-6999
-
Fabrication of a Si-PZT hybrid XY-microstage with CNT-carbon hinges
Peer-reviewed
Liang He, Masaya Toda, Yusuke Kawai, Mohd Faizul Sarbi, Mamoru Omori, Toshiyuki Hashida, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 132 (11) 425-426 2012
DOI：
10.1541/ieejsmas.132.425
ISSN：
1341-8939
eISSN：
1347-5525
-
SILICON PN JUNCTION INTEGRATED CARBON NANOTUBE FIELD EMITTER ARRAY
Peer-reviewed
Yujiro Tanaka, Hidetoshi Miyashita, Masayoshi Esashi, Takahito Ono
Proceeding of The Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2012) 65-65 2012/01
-
FABRICATION OF HERMETICALLY-PACKAGED CAPACITIVE RESONATOR ON LTCC SUBSTRATE
N. V. Toan, H. Miyashita, M. Toda, Y. Kawai, T. Ono
Proceeding of The Asia-Pacific Conference on Transducers and Micro/Nano Technologies 268-268 2012/01
-
FABRICATION AND ASSEMBLING OF MICRO CORNER CUBE MIRROR WITH LIGHT-WEIGHT AND SMALL-SIZE FOR IR SPECTROMETER
Tatsuyuki Tanahashi, Young-min Lee, Takahito Ono
Proceeding of The Asia-Pacific Conference on Transducers and Micro/Nano Technologies 119-119 2012/01
-
Young’s modulus of MWCNT-Carbon cantilevered microstructure
Liang He, Masaya Toda, Yusuke Kawai, Mamoru Omori, Toshiyuki Hashida, Takahito Ono
Proceeding of international Conference on Micro and Nano Engineering 173-173 2012/01
-
Design and fabrication of capacitive silicon resonator on LTCC substrate,
Toan Nguyen Van, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
Proceeding of international Conference on Micro and Nano Engineering (MNE) 286-286 2012/01
-
マイクロアセンブリにより作製した小型Siフーリエ変換赤外分光計
棚橋辰之, 戸田雅也, 宮下英俊, 小野崇人
「センサ・マイクロマシンと応用システム」シンポジウム 417-422 2012/01
-
狭ギャップマイクロ熱電子発電の基礎実験
陳 帥, 宮下英俊, 小野崇人
「センサ・マイクロマシンと応用システム」シンポジウム 566-570 2012/01
-
Parametrically-Amplified Resonant Micro-mirror with Tunable Springs
Jinhyeok Kim, Yusuke Kawai, Naoki Inomata, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム 427-430 2012/01
-
Microsystems based on Additive Micro/Nanofabrication Processes
Invited
Peer-reviewed
Takahito Ono
VLSIs & Semiconductor Related Technologies 2012/01
-
Redox active polymers with phenothiazine moieties for nanoscale patterning via conductive scanning force microscopy
Peer-reviewed
Ali A. Golriz, Tassilo Kaule, Jeannine Heller, Maria B. Untch, Philipp Schattling, Patrick Theato, Masaya Toda, Shinya Yoshida, Takahito Ono, Hans Jürgen Butt, Jochen Stefan Gutmann, Rüdiger Berger
Nanoscale 3 (12) 5049-5058 2011/12
DOI：
10.1039/c1nr10917k
ISSN：
2040-3364
eISSN：
2040-3372
-
Fabrication of einzel lens array with one-mask reactive ion etching process for electron micro-optics
Peer-reviewed
Hidetoshi Miyashita, Eiichi Tomono, Yusuke Kawai, Masaya Toda, Masayoshi Esashi, Takahito Ono
Japanese Journal of Applied Physics 50 (10 PART 1) 106503-1-106503-5 2011/10
DOI：
10.1143/JJAP.50.106503
ISSN：
0021-4922
eISSN：
1347-4065
-
Three-Dimensional Micro-Coil Oscillator Fabricated with Monolithic Process on LSI
Peer-reviewed
YABE Tomotaka, MIMURA Yasuhiro, TAKAHASHI Hirokazu, ONOE Atsushi, MUROGA Sho, YAMAGUCHI Masahiro, ONO Takahito, ESASHI Masayoshi
IEEJ Transactions on Sensors and Micromachines 131 (10) 363-368 2011/10/01
Publisher:
The Institute of Electrical Engineers of Japan
DOI：
10.1541/ieejsmas.131.363
ISSN：
1341-8939
-
Vacuum-packaged Resonant Thermal Sensor for Biological Cell in liquid
Naoki Inomata, Masaya Toda, Takahito Ono
Microprocess and Nanotechnology Conference 27B10-3 2011/10
-
Coupled mechanical Si resonators and its entrainment condition
Keitaro Tanno, Takahito Ono
Microprocess and Nanotechnology Conference 27P-11-98 2011/10
-
Microchanneled resonant heat sonsor for a living cell
Masaya Toda, Tomoyuki Otake, Naoki Inomata, Takahito Ono
Microprocess and Nanotechnology Conference 27P-11-95. 2011/10
-
High Aspect Ratio Carbon Nanotube-Carbon Composite Microstructures Fabricated by Silicon Molding Technique
Liang He, Masaya Toda, Yusuke Kawai, Mamoru Omori, Toshiyuki Hashida, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 28 371-374 2011/09/26
-
結合機械的Si 振動子とその同期条件
Keitaro Tanno, Takahito Ono
センサ・マイクロマシンと応用システムシンポジウム 28 579-584 2011/09
-
液中における細胞熱計測のための真空封止マイクロカンチレバー型熱量センサ
Naoki Inomata, Masaya Toda, Takahito Ono
センサ・マイクロマシンと応用システムシンポジウム 28 617-622 2011/09
-
並列電子線描画システムのための光スイッチング電子源アレイ
田中 雄次郎, 友納 栄一, 宮下 英俊, 江刺 正喜, 小野 崇人
センサ・マイクロマシンと応用システムシンポジウム 28 134-137 2011/09
-
High Aspect Ratio Carbon Nanotube-Carbon Composite Microstructures
Liang He, Masaya Toda, Yusuke Kawai, Mamoru Omori, Toshiyuki Hashida, Takahito Ono
センサ・マイクロマシンと応用システムシンポジウム 28 134-137 2011/09
-
Measurements of the phase transition and the average length of the density fluctuation under supercritical fluid using micromechanical resonators
Peer-reviewed
Masaya Toda, Takashi Fujii, Atsushi Yoshida, Toshiyuki Hashida, Takahito Ono
Applied Physics Letters 99 (7) 074101-1-074101-3 2011/08/15
DOI：
10.1063/1.3610942
ISSN：
0003-6951
-
Local electrical modification of a conductivity-switching polymide film formed by molecular layer deposition
Peer-reviewed
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
Nanotechnology 22 (335302) 2011/08
DOI：
10.1088/0957-4484/22/33/335302
-
Micro probes and coils for microscopic magnetic resonance imaging
Peer-reviewed
M.Esashi, T.Ono
Black Forest Focus on Soft Matter 6, Magnetic Resonance Microsystems (16) 2011/07/26
-
Micro wishbone interferometer for Fourier transform infrared spectrometry
Peer-reviewed
Young-Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono
JOURNAL OF MICROMECHANICS AND MICROENGINEERING 21 (6) 9-9 2011/06
DOI：
10.1088/0960-1317/21/6/065039
ISSN：
0960-1317
eISSN：
1361-6439
-
FABRICATION OF HIGH ASPECT RATIO CARBON NANOTUBE-CARBON COMPOSITE MICROSTRUCTURES BASED ON SILICON MOLDING TECHNIQUE
Liang He, Masaya Toda, Yusuke Kawai, Hidetoshi Miyashita, Chuanyu Shao, Mamoru Omori, Toshiyuki Hashida, Takahito Ono
The 16th International Conference on Solid-State Sensors, Actuators and Microsystems 16 2331-2334 2011/06
DOI：
10.1109/TRANSDUCERS.2011.5969549
-
Advanced Materials for MEMS
M. Esashi, T. Ono
5th International Conference on New Diamond and Nano Carbons 2011 2011/05/16
-
Integration technology of heterogenous components for microsystem
Peer-reviewed
Takahito Ono
2011 VLSI-DAT 226-227 2011/04/25
DOI：
10.1109/VDAT.2011.5783616
-
Bimorph cantilevers actuated by focused laser from the side
Peer-reviewed
Masaya Toda, Naoki Inomata, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 131 (9) 327-331 2011
DOI：
10.1541/ieejsmas.131.327
ISSN：
1341-8939
eISSN：
1347-5525
-
ASSEMBLING TECHNIQUE OF THREE DIMENSIONAL MICROSTRUCTURES USING CLIP MECHANISM OF MICROSPRING
Kyosuke Kotani, Yusuke Kawai, Chuan-Yu Shao, Takahito Ono
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) 209-212 2011
DOI：
10.1109/MEMSYS.2011.5734398
ISSN：
1084-6999
-
PARALLEL ARRAY OF NOISE-ACTIVATED NONLINEAR MICRO-RESONATORS WITH INTEGRATED ACTUATORS
Yusuke Yo, Yusuke Kawai, Takahito Ono
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) 613-616 2011
DOI：
10.1109/MEMSYS.2011.5734499
ISSN：
1084-6999
-
MINIATURE WISHBONE INTERFEROMETER USING ROTARY COMB DRIVE ACTUATOR FOR ENVIRONMENT GAS MONITORING
Young-min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) 716-719 2011
DOI：
10.1109/MEMSYS.2011.5734525
ISSN：
1084-6999
-
Modeling and experimental analysis on the nonlinearity of single crystal silicon cantilevered microstructures
Peer-reviewed
Yonggang Jiang, Masayoshi Esashi, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 131 (5) 195-196 2011
DOI：
10.1541/ieejsmas.131.195
ISSN：
1341-8939
eISSN：
1347-5525
-
Design issues for piezoresistive nanocantilever sensors with non-uniform nanoscale doping profiles
Peer-reviewed
Yonggang Jiang, Masayoshi Esashi, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 131 (7) 270-271 2011
DOI：
10.1541/ieejsmas.131.270
ISSN：
1341-8939
eISSN：
1347-5525
-
Optically controllable emitter array with pn-junction integrated Si tip
Yujiro Tanaka, Hidetoshi Miyashita, Eiichi Tomono, Masayoshi Esashi, Takahito Ono
2011 24TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC) 24 57-+ 2011
-
Mechanically coupled synchronized resonators for resonant sensing applications
Peer-reviewed
Jinyang Feng, Xiongying Ye, Masayoshi Esashi, Takahito Ono
Journal of Micromechanics and Microengineering 20 (11) 115001-1-115001-5 2010/11
DOI：
10.1088/0960-1317/20/11/115001
ISSN：
0960-1317
eISSN：
1361-6439
-
Quartz-crystal scanning probe microcantilevers with a silicon tip based on direct bonding of silicon and quartz
Peer-reviewed
Akihiro Takahashi, Masayoshi Esashi, Takahito Ono
Nanotechnology 21 (40) 405502-1-405502-5 2010/10/08
DOI：
10.1088/0957-4484/21/40/405502
ISSN：
0957-4484
eISSN：
1361-6528
-
Quartz-crystal scanning probe microcantilevers with a silicon tip based on direct bonding of silicon and quartz
Peer-reviewed
Akihiro Takahashi, Masayoshi Esashi, Takahito Ono
NANOTECHNOLOGY 21 (40) 2B2-1-1-2B2-1-4 2010/10
DOI：
10.1088/0957-4484/21/40/405502
ISSN：
0957-4484
-
Deposition of conductivity-switching polyimide film by molecular layer deposition and electrical modification using scanning probe microscope
Peer-reviewed
S. Yoshida, T. Ono, M. Esashi
Micro and Nano Letters 5 (5) 321-323 2010/10
DOI：
10.1049/mnl.2010.0128
eISSN：
1750-0443
-
A Development of automated multilayered sol-gel deposition machine for micro actuator with PZT thick film
Yusuke Kawai, Nobuyoshi Moriwaki, Masayoshi Esashi, Takahito Ono
第27回センサ・マイクロマシンと応用システムシンポジウム論文集 27 84-87 2010/10
-
Ultra-high sensitive bimorph cantilever for heat sensing
Masaya Toda, Naoki Inomata, Takahito Ono
第27回センサ・マイクロマシンと応用システムシンポジウム論文集 27 371-374 2010/10
-
Deposition of a conductivity-switching polymind film by molecular layer deposition and electrical modification using scanning probe microscope
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
36th International Conference on Micro & Nano Engineering (MNE2010) 36 O-LITH-23 2010/09/20
-
Optically Controlled Emitters for Multi Electron Beam Lithography
Hidetoshi Miyashita, Eiichi Tomono, Takahito Ono, Masayoshi Esashi
18th International Vacuum Congress 18 ea3087ba-9 2010/08/26
-
Electrostatic actuator probe with curved electrodes for time-of-flight scanning force microscopy
Peer-reviewed
Chuan Yu Shao, Yusuke Kawai, Masayoshi Esashi, Takahito Ono
Review of Scientific Instruments 81 (8) 083702-1-083702-6 2010/08
DOI：
10.1063/1.3469796
ISSN：
0034-6748
eISSN：
1089-7623
-
Nonlinear Micromechanical Bistable Resonator Capable of Vibration Switching by Thermomechanical Noise at Room Temperature
Yusuke Yoshida, Takahito Ono
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology 5 50-50 2010/07
-
Optically-Controlled Multi Electron Source
Eiichi Tomono, Hidetoshi Miyashita, Takahito Ono, Masayoshi Esashi
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology 5 78-78 2010/07
-
Degradation of Mechanical Characteristics of Silicon Microcantilever due to Plasma Induced Defects
M. Tomura, Y. Yoshida, T. Ono, C. H. Huang, S. Samukawa
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology 5 186-186 2010/07
-
Integratin of Nanomaterials into Microsystem
Invited
Takahito Ono, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, He Liang, Masayoshi Esashi
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology 5 46-46 2010/07
-
Evaluation of bimaterial cantilever beam for heat sensing at atmospheric pressure
Peer-reviewed
Masaya Toda, Takahito Ono, Fei Liu, Ioana Voiculescu
Review of Scientific Instruments 81 (5) 055104-1-055104-6 2010/05
DOI：
10.1063/1.3397320
ISSN：
0034-6748
-
Plasma-induced deterioration of mechanical characteristics of microcantilever
Peer-reviewed
Maju Tomura, Chi Hsien Huang, Yusuke Yoshida, Takahito Ono, Satoshi Yamasaki, Seiji Samukawa
Japanese Journal of Applied Physics 49 (4 PART 2) 04DL20-1-04DL20-4 2010/04
DOI：
10.1143/JJAP.49.04DL20
ISSN：
0021-4922
eISSN：
1347-4065
-
ムービングマグネット式2軸駆動MEMSミラー
青柳勳, 島岡敬一, 加藤覚, 牧志渉, 川合祐輔, 田中秀治, 小野崇人, 江刺正喜
平成22年電気学会全国大会 3 186-187 2010/03
-
Controlled Formation and Mechanical Characterization of Metallic Glassy Nanowires
Peer-reviewed
Koji S. Nakayama, Yoshihiko Yokoyama, Takahito Ono, Ming Wei Chen, Kotone Akiyama, Toshio Sakurai, Akihisa Inoue
ADVANCED MATERIALS 22 (8) 872-+ 2010/02
DOI：
10.1002/adma.200902295
ISSN：
0935-9648
-
High power density microactuator for MEMS applications
Mohd Faizul Sabri, Takahito Ono, Suhana Mohd Said, Masayoshi Esashi
Conference on Mechanical and Aerospece Technology 329-1-239-7 2010/02
-
MICROMECHANICALLY-COUPLED RESONATED SYSTEM FOR SYNCHRONIZED OSCILLATION WITH IMPROVED PHASE NOISE
Dong F. Wang, Jinyang Feng, Takahito Ono, Masayoshi Esashi, Xiongying Ye
MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST 703-706 2010
DOI：
10.1109/MEMSYS.2010.5442309
ISSN：
1084-6999
-
Position-controlled vertical growths of individual carbon nanotubes using a cage-shaped protein
Peer-reviewed
Shinya Kumagai, Takahito Ono, Shigeo Yoshii, Ayako Kadotani, Rikako Tsukamoto, Kazuaki Nishio, Mitsuhiro Okuda, Ichiro Yamashita
Applied Physics Express 3 (1) 15101-1-15101-3 2010/01
DOI：
10.1143/APEX.3.015101
ISSN：
1882-0778
eISSN：
1882-0786
-
Electrostatically switchable microprobe for mass-analysis scanning force microscopy
Peer-reviewed
Chuan Yu Shao, Yusuke Kawai, Masayoshi Esashi, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 130 (2) 59-60 2010
DOI：
10.1541/ieejsmas.130.59
ISSN：
1341-8939
eISSN：
1347-5525
-
Design and Fabrication of a Scanning Near-Field Microscopy Probe with Integrated Zinc Oxide Photoconductive Antennas for Local Terahertz Spectroscopy
Peer-reviewed
Kentaro Iwami, Takahito Ono, Masayoshi Esashi
SENSORS AND MATERIALS 22 (3) 135-142 2010
ISSN：
0914-4935
-
Micro Wishbone interferometer for miniature FTIR spectrometer
Peer-reviewed
Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 130 (7) 333-334 2010
DOI：
10.1541/ieejsmas.130.333
ISSN：
1341-8939
eISSN：
1347-5525
-
Miniature Interferometer with Corner Cube Mirrors
Young-min Lee, Masaya Toda, Takahito Ono, Masayoshi Esashi
2010 IEEE SENSORS 65-70 2010
DOI：
10.1109/ICSENS.2010.5690828
ISSN：
1930-0395
-
A Development of Automated Chemical-Solution-Deposition Machine for Micro Actuator with Multilayered PZT Thick Film
Yusuke Kawai, Nobuyoshi Moriwaki, Takahito Ono, Masayoshi Esashi
2010 IEEE SENSORS 2247-2250 2010
DOI：
10.1109/ICSENS.2010.5690701
ISSN：
1930-0395
-
Mechanism of Mechanical Deterioration in Silicon Microcantilever Induced by Plasma Process
Maju Tomura, Chi-Hsein Huang, Seiji Samukawa, Yusuke Yoshida, Takahito Ono, Satoshi Yamasaki
2010 IEEE SENSORS 2534-2537 2010
DOI：
10.1109/ICSENS.2010.5690474
ISSN：
1930-0395
-
Microassembly of PZT actuators into silicon microstrcutures
Peer-reviewed
Mohd Faizul Mohd Sabri, Takahito Ono, Masayoshi Esashi
電気学会E部門誌 12 (12) 471-472 2009/12
DOI：
10.1541/ieejsmas.129.471
ISSN：
1341-8939
eISSN：
1347-5525
-
Characterization of two beam-shaped cantilevers coupled with a micromechanical element
Peer-reviewed
Dong F Wang, Jinyang Feng, Takahito Ono, Masayoshi Esashi
Microprocesses and Nanotechnology 2009 754-755 2009/11
-
Electrostatically actuated chemical scanning force microscopy probe with tunable spring
Chuan-Yu Shao, Yusuke Kawai, Masayoshi Esashi, Takahito Ono
Microprocesses and Nanotechnology 2009 140-141 2009/11
-
Microsystems for Nanoscale Processing
Invited
T. Ono, H. Miyashita, Y. Kawai, M. Toda, M. Esashi
Proceeding of IWNA 83-86 2009/11
-
Fabrication of Electrostatic Actuated Totary for Micro Interferometer
Young Min Lee, Masaya Toda, Takahito Ono, Masayoshi Esashi
Abstracts of the 2009 International Conference on Solid State Devices and Materials 681-682 2009/10
-
Deterioration of mechanical characteristics of micro-cantilevers by plasma induced damage
Maju Tomura, Yusuke Yoshida, Takahito Ono, Chi-Hsien Huang, Seiji Samukawa
Abstracts of the 2009 International Conference on Solid State Devices and Materials 932-933 2009/10
-
Fabrication technique of Einzel lens array with RIE process
Eiichi Tomono, Hidetoshi Miyashita, Takahito Ono, Masayoshi Esashi
Abstracts of the 2009 International Conference on Solid State Devices and Materials 1324-1325 2009/10
-
Noise-enhanced sensing using micromechanical nonlinear resonator
Yusuke Yoshida, Takahito Ono
Abstracts of the 2009 International Conference on Solid State Devices and Materials 976-977 2009/10
-
Fabrication of rotary comb drive actuator for micro wishbone interferometer
Young-Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono
第26回センサ・マイクロマシンと応用システム 618-621 2009/10
-
Modeling and experimental validation of the performance of a silicon XY-microstage driven by PZT actuators
Peer-reviewed
Mohd Faizul Mohd Sabri, Takahito Ono, Masayoshi Esashi
JOURNAL OF MICROMECHANICS AND MICROENGINEERING 19 (9) 95004-1-95004-9 2009/09
DOI：
10.1088/0960-1317/19/9/095004
ISSN：
0960-1317
eISSN：
1361-6439
-
Integration process of carbon nanotube piezoresistive elements into microstructure
Peer-reviewed
Naoki Oda, Takahito Ono, Masayoshi Esashi
Trends in Nanotechnology 2009/09
-
The fablication of metallic tip with silicon cantilever for probe-based ferroelectric data storage and their durability experiments, Journal of Micromechanics and Microengineering
Peer-reviewed
Hirokazu Takahashi, Yasuhiro Mimura, Shuntaro Mori, Masahiro Ishimori, Atsushi Onoe, Takahito Ono, Masayoshi Esashi
Nanotechnology 20 (36) 365201-1-365201-6 2009/08
DOI：
10.1088/0957-4484/20/36/365201
ISSN：
0957-4484
eISSN：
1361-6528
-
Temperature-dependent mechanical and electrical properties of boron-doped piezoresistive nanocantilevers
Peer-reviewed
Yonggang Jiang, Takahito Ono, Masayoshi Esashi
JOURNAL OF MICROMECHANICS AND MICROENGINEERING 19 (6) 65030 2009/06
DOI：
10.1088/0960-1317/19/6/065030
ISSN：
0960-1317
eISSN：
1361-6439
-
Fabrication of Einzel lens array with one-mask RIE process for electron micro-optics
Eiichi Tomono, Hidetoshi Miyashita, Takahito Ono, Masayoshi Esashi
Proceeding of International Conference on Solid-State Sensors, Actuators and Microsystems 15 853-856 2009/06
DOI：
10.1109/SENSOR.2009.5285809
-
Development of 100-nm-thick self-sensing nanocantilever and characterization of the temperature dependence of the piezoresistivity and conductivity
Yonggang Jiang, Takahito Ono, Masayoshi Esashi
Proceeding of International Conference on Solid-State Sensors, Actuators and Microsystems 15 1309-1312 2009/06
DOI：
10.1109/SENSOR.2009.5285871
-
A large displacement piexodriven silicon XY-microstage
Mohd Faizul Mohd Sabri, Takahito Ono, Masayoshi Esashi
Proceeding of International Conference on Solid-State Sensors, Actuators and Microsystems 15 2405-2408 2009/06
DOI：
10.1109/SENSOR.2009.5285429
-
非線形ナノ・マイクロ振動子を用いたノイズ励起によるセンシング
Peer-reviewed
小野崇人, 吉田祐介, 蒋 永剛, 江刺正喜
豊田研究報告 62 (62) 131-137 2009/05
Publisher:
ISSN：
0372-039X
-
Heat sensing with self-excited microcantilever in water
Masaya Toda, Takahito Ono, Wongje Cho, Masayoshi Esashi
International Workshop on Nanomechanical Cantilever Sensors L.4.4 2009/05
-
Micromechanical nonlinear bistable resonators for robust sensing
Yusuke Yoshida, Takahito Ono, Masayoshi Esashi
International Workshop on Nanomechanical Cantilever Sensors P.10 2009/05
-
MASS-analysis scanning force microscopy with electrostatic switching mechanism
C. Y. Shao, Y. Kawai, T. Ono, M. Esashi
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 1031-1034 2009
DOI：
10.1109/MEMSYS.2009.4805562
ISSN：
1084-6999
-
Thermal imaging with tapping mode using a bimetal oscillator formed at the end of a cantilever
Peer-reviewed
Sang Jin Kim, Takahito Ono, Masayoshi Esashi
Review of Scientific Instruments 80 (3) 33703-1-33703-6 2009
DOI：
10.1063/1.3095680
ISSN：
0034-6748
-
Noise-enhanced sensing of light and magnetic force based on a nonlinear silicon microresonator
Peer-reviewed
Takahito Ono, Yusuke Yoshida, Yong Gang Jiang, Masayoshi Esashi
Applied Physics Express 1 (12) 1230011-1230013 2008/12
DOI：
10.1143/APEX.1.123001
ISSN：
1882-0778
eISSN：
1882-0786
-
Conductive polymer patterned media fabricated by diblock copolymer lithography for scanning multiprobe data storage
Peer-reviewed
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
Nanotechnology 19 (47) 475302-1-475302-9 2008/11/26
DOI：
10.1088/0957-4484/19/47/475302
ISSN：
0957-4484
eISSN：
1361-6528
-
A New Approach to Terahertz Local Spectroscopy Using Microfabricated Scanning Near-Field Probe
Peer-reviewed
Kentaro Iwami, Takahito Ono, Masayoshi Esashi
JAPANESE JOURNAL OF APPLIED PHYSICS 47 (10) 8095-8097 2008/10
DOI：
10.1143/JJAP.47.8095
ISSN：
0021-4922
-
Synchronized micromechanical elements for resonant sensing
Jinyang Feng, Takahito Ono, Masayoshi Esashi
Proceeding of The IEEE Nanotechnology Materials and Devices Conference 119 2008/10
-
Microprobe with electrostatic microactuator for TOF-MA combined SFM
Chuan-Yu Shao, Yusuke Kawai, Takahito Ono, Masayoshi Esashi
Proceeding of The IEEE Nanotechnology Materials and Devices Conference 178 2008/10
-
Experimental investigation on nonlinearity of single crystal silicon nanocantilevers
Yonggang Jiang, Takahito Ono, Jinyang Feng, Masayoshi Esashi
Proceeding of The IEEE Nanotechnology Materials and Devices Conference 180 2008/10
-
Fabrication and integration of a Si-PZT hybrid XY-microstage
Peer-reviewed
Mohd Faizul Bin Mohd Sabri, Takahito Ono, Masayoshi Esashi
Microprocesses and Nanotechnology 62-63 2008/10
-
Photolithographic fabrication of gated self-aligned parallel electron beam emitters with a single-stranded carbon nanotube
Peer-reviewed
Justin Ho, Takahito Ono, Ching Hsiang Tsai, Masayoshi Esashi
Nanotechnology 19 (36) 365601-1-365601-5 2008/09/10
DOI：
10.1088/0957-4484/19/36/365601
ISSN：
0957-4484
eISSN：
1361-6528
-
Formation of a flat conductive polymer film using Template-Stripped Gold (TSG) surface and surface-graft polymerization for scanning multiprobe data storage
Peer-reviewed
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
e-Journal of Surface Science and Nanotechnology 6 202-208 2008/09/02
DOI：
10.1380/ejssnt.2008.202
eISSN：
1348-0391
-
Multiprobe systems for data storage and other applications
Invited
Masayoshi Esashi, Takahito Ono, Shinya Yoshida
Proceedings of 5th International Symposium on Instrumentation Science and Technology (ISIST’ 2008) 258-259 2008/09
DOI：
10.1109/ICSENS.2005.1597685
-
Process for the fabrication of hollow core solenoidal microcoils in borosilicate glass
Peer-reviewed
Mona J.K. Klein, Takahito Ono, Masayoshi Esashi, Jan G. Korvink
Journal of Micromechanics and Microengineering 18 (7) 075002-1-075002-6 2008/08/01
DOI：
10.1088/0960-1317/18/7/075002
ISSN：
0960-1317
eISSN：
1361-6439
-
Bonding of a Si microstructure using field-assisted glass melting
Peer-reviewed
Hironori Seki, Takahito Ono, Yusuke Kawai, Masayoshi Esashi
Journal of Micromechanics and Microengineering 18 (8) 085003-1-085003-5 2008/08/01
DOI：
10.1088/0960-1317/18/8/085003
ISSN：
0960-1317
eISSN：
1361-6439
-
Fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection
Peer-reviewed
Y. G. Jiang, T. Ono, M. Esashi
Measurement Science and Technology 19 (8) 084011-1-084011-5 2008/08/01
DOI：
10.1088/0957-0233/19/8/084011
ISSN：
0957-0233
eISSN：
1361-6501
-
A Si-PZT Hybrid XY-Microstage Utilizing an Actuator Amplification Mechanism
Mohd Faizul Bin Mohd Sabri, Takahito Ono, Yusuke Kawai, Masayoshi Esashi
Proceeding of International Conference on New Actuators 11 75-78 2008/06
-
Carbon nanotube emitters with narrow gap for thermoelectric generation
Hiroaki Kurahashi, Takahito Ono, Masayoshi Esashi
Proceeding of The Asia Pacific Conference on Transducers and Micro/Nano Technologies 4 3B1-2-1-3B1-2-4 2008/06
-
Vertically-aligned carbon nanotube composite actuator
Naoki Oda, Takahito Ono, Masayoshi Esashi
Proceeding of The Asia Pacific Conference on Transducers and Micro/Nano Technologies 4 2D1-4-1-2D1-4-4 2008/06
-
Conductive polymer patterned media fabricated using diblock copolymer lithography for scanning multiprobe data storage
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
Proceeding of The Asia Pacific Conference on Transducers and Micro/Nano Technologies 4 2S01-1-2S01-4 2008/06
DOI：
10.1088/0957-4484/19/47/475302
-
Piezoresistive nanocantilevers with an ultra-shallow boron doped layer using spin-on diffusion method for MRFM application
Y. G. Jiang, T. Ono, Z. L. An, M. Esashi
Proceeding of The Asia Pacific Conference on Transducers and Micro/Nano Technologies 4 3B-16-1-3B-16-4 2008/06
-
Piezoresistive silicon microresonator with carbon nanotubes for mass detection
Zhonglie An, Takahito Ono, Masayoshi Esashi
Proceeding of The Asia Pacific Conference on Transducers and Micro/Nano Technologies 4 2B1-4-1-2B1-4-4 2008/06
-
Time-of-flight mass analyzer scanning force microscope probe with electrostatic actuator
C. Y. Shao, Y. Kawai, T. Ono, M. Esashi
Proceeding of The Asia Pacific Conference on Transducers and Micro/Nano Technologies 4 1A2-5-1-1A2-5-1 2008/06
-
High-Sensitive Thermomechanical Transducers Based on a Silicon Microresonator
Peer-reviewed
小野崇人
Reports of Toyoda Physical and Chemical Research Institute 61 (61) 143-148 2008/05
Publisher:
ISSN：
0372-039X
-
Conductive polymer recording media for scanning multiprobe data storage system
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
Proceeding of International Workshop on Nanomechanical Cantilever Sensors 127-128 2008/05
-
Fabrication of nano mechanical probe for thermal sensing
Masaya Toda, Takahito Ono, Wongje Cho, Sang-Jin Kim, Masayoshi Esashi
Proceeding of International Workshop on Nanomechanical Cantilever Sensors 211-212 2008/05
-
Micro/Nano Resonating Oscillators for Versatile Applications
Invited
Takahito Ono
Proceeding of International Workshop on Nanomechanical Cantilever Sensors 28-29 2008/05
-
Micromachined Si cantilever arrays for parallel AFM operation
Peer-reviewed
Yoomin Ahn, Takahito Ono, Masayoshi Esashi
Journal of Mechanical Science and Technology 22 (2) 308-311 2008/02
DOI：
10.1007/s12206-007-1029-2
ISSN：
1738-494X
-
A Si-PZT Hybrid XY-Microstage Utilizing an Actuator Amplification Mechanism
Mohd Faizul Bin Mohd Sabri, Takahito Ono, Yusuke Kawai, Masayoshi Esashi
ACTUATOR 08, CONFERENCE PROCEEDINGS 75-+ 2008
-
Parallel electron beam micro-column with self-aligned carbon nanotube emitters
C. H. Tsai, J. Y. Ho, T. Ono, M. Esashi
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 21 355-358 2008
DOI：
10.1109/MEMSYS.2008.4443666
ISSN：
1084-6999
-
Conductive polymer patterned media for scanning multiprobe data storage
Peer-reviewed
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
Nanotechnology 18 (50) 1-5 2007/12/19
DOI：
10.1088/0957-4484/18/50/505302
ISSN：
0957-4484
eISSN：
1361-6528
-
Design and Development of Si-PZT Hybrid XY-Microstage
Mohd Faizul Mohd Sabri, Takahito Ono, Masayoshi Esashi
PROCEEDINGS OF THE SENSOR SYMPOSIUM 24 173-178 2007/10
-
Fabrication of Carbon Nanotube Tunneling Emitters for Thermoelectric Generation
Hiroaki KURAHASHI, Takahito ONO, Masayoshi ESASHI
PROCEEDINGS OF THE SENSOR SYMPOSIUM 24 317-320 2007/10
-
Scanning Near-field Optical Microscopy Probe Integrated with Photoconductive Antenna for Terahertz Time-domain Spectroscopy
Kentaro IWAMI, Takahito ONO, Masayoshi ESASHI
PROCEEDINGS OF THE SENSOR SYMPOSIUM 24 495-498 2007/10
-
Aligned growth of carbon nanotube using protein supramolecule
S. Kumagai, T. Ono, R. Tsukamoto, S. Yoshii, I. Yamashita
AVS 55th International Symposium 2007/10
-
A Single-Strand Self-Aligned Carbon Nanotube Emitter Array
Justin Ho, Takahito Ono, Masayoshi Esashi
International Conference on Micro- and Nano-Engineering 33 105-106 2007/09
-
Thermal Detection using Dual Resonance Mode of Probe
Sang-Jin Kim, Takahito Ono, Masayoshi Esashi, Akio Ishijima
Proceedings of The international Symposium on Measurement Technology and Intelligent Instruments 8 355-358 2007/09
-
Development of Piezoresistive Nanocantilevers for Ultra-sensitive Force Detection
Y. G. Jiang, T. Ono, M. Esashi
Proceedings of The international Symposium on Measurement Technology and Intelligent Instruments 8 417-420 2007/09
-
Characterization of catalytic chemical vapour deposited SiCN thin film coatings
Peer-reviewed
Suresh Neethirajana, Takahito Ono, Esashi Masayoshi, Digvir Jayas
Trends in NanoTechnology 7 88-1-88-7 2007/07
-
CONDUCTIVE POLYMER PATTERND MEDIA FOR SCANNING MULTIPROBE DATA STORAGE
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
Proceeding of International Conference on Solid-State Sensors, Actuators and Microsystems 14 1645-1648 2007/06
DOI：
10.1109/SENSOR.2007.4300465
-
Fabrication of diamond Schottky emitter array by using electrophoresis pre-treatment and hot-filament chemical vapor deposition
Peer-reviewed
Ching Hsiang Tsai, Takahito Ono, Masayoshi Esashi
Diamond and Related Materials 16 (4-7 SPEC. ISS.) 1398-1402 2007/04
DOI：
10.1016/j.diamond.2006.11.032
ISSN：
0925-9635
-
Zinc oxide photoconductive antenna for terahertz near-field microscopy
Kentaro Iwami, Takahito Ono, Masayoshi Esashi
Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007 2007
-
Imaging of acoustic pressure radiation from vibrating microstructure in atmosphere using thermal microprobe
Peer-reviewed
Takahito Ono, Sang Jin Kim, Masayoshi Esashi
Applied Physics Letters 90 (21) 211911-1-211911-3 2007
DOI：
10.1063/1.2742908
ISSN：
0003-6951
-
Silicon on insulator for symmetry-converted growth
Peer-reviewed
Y. Fujikawa, Y. Yamada-Takamura, G. Yoshikawa, T. Ono, M. Esashi, P. P. Zhang, M. G. Lagally, T. Sakurai
Applied Physics Letters 90 (24) 243107-1-243107-3 2007
DOI：
10.1063/1.2748099
ISSN：
0003-6951
-
Optical amplification of the resonance of a bimetal silicon cantilever
Peer-reviewed
Takahito Ono, Shinya Yoshida, Yusuke Kawai, Masayoshi Esashi
Applied Physics Letters 90 (24) 243112-1-243112-3 2007
DOI：
10.1063/1.2748848
ISSN：
0003-6951
-
Bimetallic thermal radiation microsensor with integrated dipole antenna
Yongfang Li, Takahito Ono, Masayoshi Esashi
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 14 1939-1942 2007
DOI：
10.1109/SENSOR.2007.4300539
-
Micro proximity electron source with apertured, electron window for nanolithography in atmosphere
Wonje Cho, Takahito Ono, Masayoshi Esashi
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 14 1581-1584 2007
DOI：
10.1109/SENSOR.2007.4300449
-
Multi-probe with metallic tips for ferroelectric recording probe storage
Hirokazu Takahashi, Yasuhiro Mimura, Shuntaro Mori, Masahiro Ishimori, Atsushi Onoe
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 14 2509-2512 2007
DOI：
10.1109/SENSOR.2007.4300681
-
Self-sensing quartz-crystal cantilever for nanometric sensing
Yu-Ching Lin, Takahito Ono, Masayoshi Esashi
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 14 2513-2516 2007
DOI：
10.1109/SENSOR.2007.4300682
-
Microprobe integrated with single-electron transistor for magnetic resonance force microscopy
Suk-Ho Song, Takahito Ono, Masayoshi Esashi
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 14 1749-1752 2007
DOI：
10.1109/SENSOR.2007.4300491
-
Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy
Peer-reviewed
Yusuke Kawai, Takahito Ono, Masayoshi Esashi, Ernst Meyer, Christoph Gerber
Review of Scientific Instruments 78 (6) 063709-1-063709-4 2007
DOI：
10.1063/1.2748394
ISSN：
0034-6748
-
Proximity electron lithography using permeable electron windows
Peer-reviewed
Wonje Cho, Takahito Ono, Masayoshi Esashi
Applied Physics Letters 91 (4) 044104-1-044104-3 2007
DOI：
10.1063/1.2762281
ISSN：
0003-6951
-
Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique
Peer-reviewed
Sang Jin Kim, Takahito Ono, Masayoshi Esashi
Review of Scientific Instruments 78 (8) 085103-1-085103-6 2007
DOI：
10.1063/1.2766840
ISSN：
0034-6748
-
Study on the noise of silicon capacitive resonant mass sensors in ambient atmosphere
Peer-reviewed
Sang Jin Kim, Takahito Ono, Masayoshi Esashi
Journal of Applied Physics 102 (10) 104304-1-104304-6 2007
DOI：
10.1063/1.2811911
ISSN：
0021-8979
-
Sputter deposited zinc oxide photoconductive antenna on silicon substrate for sub-terahertz time-domain spectroscopy
Peer-reviewed
Kentaro Iwami, Takahit O. Ono, Masayoshi Esashi
IEEJ Transactions on Sensors and Micromachines 127 (11) 508-509 2007
DOI：
10.1541/ieejsmas.127.508
ISSN：
1341-8939
eISSN：
1347-5525
-
Application oriented micro-nano electro mechanical systems
Invited
Masayoshi Esashi, Takahito Ono
MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS 20 480-481 2007
DOI：
10.1109/IMNC.2007.4456313
-
Precise motion control of a nanopositioning PZT microstage using integrated capacitive displacement sensors
Peer-reviewed
H. G. Xu, T. Ono, M. Esashi
Journal of Micromechanics and Microengineering 16 (12) 2747-2754 2006/12/01
DOI：
10.1088/0960-1317/16/12/031
ISSN：
0960-1317
eISSN：
1361-6439
-
Optical near-field probe integrated with self-aligned bow-tie antenna and electrostatic actuator for local field enhancement
Peer-reviewed
Kentaro Iwami, Takahito Ono, Masayoshi Esashi
Journal of Microelectromechanical Systems 15 (5) 1201-1208 2006/10
DOI：
10.1109/JMEMS.2006.879694
ISSN：
1057-7157
-
Fabrication and characterizations of a monolithic PZT microstage
Peer-reviewed
Hegen Xu, Takahito Ono, De Yuan Zhang, Masayoshi Esashi
Microsystem Technologies 12 (9) 883-890 2006/08
DOI：
10.1007/s00542-006-0206-z
ISSN：
0946-7076
-
A diamond-tip probe with silicon-based piezoresistive strain gauge for high-density data storage using scanning nonlinear dielectric microscopy
Peer-reviewed
Hirokazu Takahashi, Takahito Ono, Atsushi Onoe, Yasuo Cho, Masayoshi Esashi
Journal of Micromechanics and Microengineering 16 (8) 1620-1624 2006/08/01
DOI：
10.1088/0960-1317/16/8/025
ISSN：
0960-1317
eISSN：
1361-6439
-
High aspect ratio spiral microcoils fabricated by a silicon lost molding technique
Peer-reviewed
Y. G. Jiang, T. Ono, M. Esashi
Journal of Micromechanics and Microengineering 16 (5) 1057-1061 2006/05/01
DOI：
10.1088/0960-1317/16/5/025
ISSN：
0960-1317
eISSN：
1361-6439
-
A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces
Peer-reviewed
T. Motoki, W. Gao, S. Kiyono, T. Ono
Measurement Science and Technology 17 (3) 495-499 2006/03/01
DOI：
10.1088/0957-0233/17/3/S06
ISSN：
0957-0233
eISSN：
1361-6501
-
High-density ferroelectric recording using diamond probe by scanning nonlinear dielectric microscopy
Peer-reviewed
H Takahashi, A Onoe, T Ono, Y Cho, M Esashi
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 45 (3A) 1530-1533 2006/03
DOI：
10.1143/JJAP.45.1530
ISSN：
0021-4922
-
Piezoelectric actuator integrated cantilever with tunable spring constant for TOF-SFM
Peer-reviewed
Yusuke Kawai, Takahito Ono, Ernst Meyer, Christoph Gerber, Masayoshi Esashi
FUTURE MEDICAL ENGINEERING BASED ON BIONANOTECHNOLOGY, PROCEEDINGS 377-+ 2006
-
Monolithic PZT microstage with multi-degrees of freedom for the application of nanopositioning
Peer-reviewed
Hegen Xu, Takahito Ono, Masayosht Esashi
FUTURE MEDICAL ENGINEERING BASED ON BIONANOTECHNOLOGY, PROCEEDINGS 601-+ 2006
-
A Schottky emitter using boron-doped diamond
Peer-reviewed
Joon Hyung Bae, Phan Ngoc Minh, Takahito Ono, Masayoshi Esashi
FUTURE MEDICAL ENGINEERING BASED ON BIONANOTECHNOLOGY, PROCEEDINGS 22 (3) 295-+ 2006
-
Capacitive resonant mass sensor with frequency demodulation detection based on resonant circuit
Peer-reviewed
SJ Kim, T Ono, M Esashi
APPLIED PHYSICS LETTERS 88 (5) 053116-1-053116-3 2006/01
DOI：
10.1063/1.2171650
ISSN：
0003-6951
-
Parametrically amplified thermal resonant sensor with pseudo-cooling effect
Peer-reviewed
Takahito Ono, Hirotaka Wakamatsu, Masayoshi Esashi
Journal of Micromechanics and Microengineering 15 (12) 2282-2288 2005/12/01
DOI：
10.1088/0960-1317/15/12/010
ISSN：
0960-1317
eISSN：
1361-6439
-
Fabrication and characterization of micromachined quartz-crystal cantilever for force sensing
Peer-reviewed
Yu Ching Lin, Takahito Ono, Masayoshi Esashi
Journal of Micromechanics and Microengineering 15 (12) 2426-2432 2005/12/01
DOI：
10.1088/0960-1317/15/12/026
ISSN：
0960-1317
eISSN：
1361-6439
-
Hydrogen termination for the growth of carbon nanotubes on silicon
Peer-reviewed
Le Thi Trong Tuyen, Phan Ngoc Minh, Emil Roduner, Pham Thi Duong Chi, Takahito Ono, Hidetoshi Miyashita, Phan Hong Khoi, Masayoshi Esashi
Chemical Physics Letters 415 (4-6) 333-336 2005/11/11
DOI：
10.1016/j.cplett.2005.09.014
ISSN：
0009-2614
-
Small crack behavior and fracture of nickel-based superalloy under ultrasonic fatigue
Peer-reviewed
Q. Chen, N. Kawagoishi, Q. Y. Wang, N. Yan, T. Ono, G. Hashiguchi
International Journal of Fatigue 27 (10-12) 1227-1232 2005/10
DOI：
10.1016/j.ijfatigue.2005.07.022
ISSN：
0142-1123
-
Reversible electrical modification on conductive polymer for proximity probe data storage
Peer-reviewed
Shinya Yoshida, Takahito Ono, Shuichi Oi, Masayoshi Esashi
Journal of Micromechanics and Microengineering 15 2282-2288 2005/09
-
Stress-induced mass detection with a micromechanical/nanomechanical silicon resonator
Peer-reviewed
Takahito Ono, Masayoshi Esashi
Review of Scientific Instruments 76 (9) 093107-1-093107-5 2005/09
DOI：
10.1063/1.2041591
ISSN：
0034-6748
-
Piezoactuator-integrated monolithic microstage with six degrees of freedom
Peer-reviewed
De Yuan Zhang, Takahito Ono, Masayoshi Esashi
Sensors and Actuators, A: Physical 122 (2) 301-306 2005/08/26
DOI：
10.1016/j.sna.2005.03.076
ISSN：
0924-4247
-
Scanning probe microscopy with quartz crystal cantilever
Peer-reviewed
Takahito Ono, Yu Ching Lin, Masayoshi Esashi
Applied Physics Letters 87 (7) 074102-1-074102-2 2005/08/15
DOI：
10.1063/1.2031937
ISSN：
0003-6951
-
Effect of ion attachment on mechanical dissipation of a resonator
Peer-reviewed
Takahito Ono, Masayoshi Esashi
Applied Physics Letters 87 (4) 044105-1-044105-3 2005/07/25
DOI：
10.1063/1.1993771
ISSN：
0003-6951
-
From MEMS to nanomachine
Peer-reviewed
Masayoshi Esashi, Takahito Ono
Journal of Physics D: Applied Physics 38 (13) R223-R230 2005/07/07
DOI：
10.1088/0022-3727/38/13/R01
ISSN：
0022-3727
-
Si multiprobes integrated with lateral actuators for independent scanning probe applications
Peer-reviewed
Yoomin Ahn, Takahito Ono, Masayoshi Esashi
Journal of Micromechanics and Microengineering 15 (6) 1224-1229 2005/06/01
DOI：
10.1088/0960-1317/15/6/012
ISSN：
0960-1317
-
Magnetic mesa structures fabricated by reactive ion etching with CO/NH <inf>3</inf>/Xe plasma chemistry for an all-silicon quantum computer
Peer-reviewed
Dong F. Wang, Atsushi Takahashi, Yoshinori Matsumoto, Kohei M. Itoh, Yoshihisa Yamamoto, Takahito Ono, Masayoshi Esashi
Nanotechnology 16 (6) 990-994 2005/06/01
DOI：
10.1088/0957-4484/16/6/062
ISSN：
0957-4484
-
Evanescent light enhancement in a nanometer aperture surrounded by corrugated metal thin film for a terabyte optical disk head
Peer-reviewed
Kenya Goto, Takahito Ono, Yong Joo Kim
IEEE Transactions on Magnetics 41 (2) 1037-1041 2005/02
DOI：
10.1109/TMAG.2004.842031
ISSN：
0018-9464
-
Micro-Nano Electromechanical Systems
Invited
Peer-reviewed
Masayoshi ESASHI, Takahito ONO, Shuji TANAKA
Thermal Science and Engineering 13 (1) 3-6 2005/01
Publisher:
ISSN：
0918-9963
-
Micro instrumentation for characterizing thermoelectric properties of nanomaterials
Peer-reviewed
Takahito Ono, Chia Cheng Fan, Masayoshi Esashi
Journal of Micromechanics and Microengineering 15 (1) 1-5 2005/01
DOI：
10.1088/0960-1317/15/1/001
ISSN：
0960-1317
-
Micromachined optical near-field bow-tie antenna probe with integrated electrostatic actuator
Peer-reviewed
Takahito Ono, Kentaro Iwami, Masayoshi Esashi
Japanese Journal of Applied Physics, Part 2: Letters 44 (12-15) L445-L448 2005
DOI：
10.1143/JJAP.44.L445
ISSN：
0021-4922
-
A high precision AFM for nanometrology of large area micro-structured surfaces
Peer-reviewed
J Aoki, W Gao, S Kiyono, T Ono
MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI 295-296 65-70 2005
ISSN：
1013-9826
-
Thermal treatments and gas adsorption influences on nanomechanics of ultra-thin silicon resonators for ultimate sensing
Peer-reviewed
Dong F. Wang, Takahito Ono, Masayoshi Esashi
Nanotechnology 15 (12) 1851-1854 2004/12
DOI：
10.1088/0957-4484/15/12/028
ISSN：
0957-4484
-
Nano/Micromechanical Tools for Nanoscale Engineering
Peer-reviewed
Takahito Ono, Hidetoshi Miyashita, Kentaro Iwami, Sang-Jin Kim, Yu-Ching Lin, Phan Ngoc Minh, Masayoshi Esashi
Advances in Natural Sciences 5 (4) 343-355 2004/12
-
Mass sensing with resonating ultra-thin silicon beams detected by a double-beam laser Doppler vibrometer
Peer-reviewed
Takahito Ono, Masayoshi Esashi
Measurement Science and Technology 15 (10) 1977-1981 2004/10
DOI：
10.1088/0957-0233/15/10/005
ISSN：
0957-0233
-
Micro industry equipments
Peer-reviewed
Masayoshi Esashi, Takahito Ono, Shuji Tanaka
JSME International Journal, Series B: Fluids and Thermal Engineering 47 (3) 429-438 2004/08
DOI：
10.1299/jsmeb.47.429
ISSN：
1340-8054
-
Interlayer magnetic coupling in Fe/Cr multilayers
Peer-reviewed
E. Saitoh, A. Kaneko, T. Ono, H. Miyajima
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS 272 E1395-E1396 2004/05
DOI：
10.1016/j.jmmm.2003.12.1087
ISSN：
0304-8853
-
Microelectron field emitter array with focus lenses for multielectron beam lithography based on silicon on insulator wafer
Peer-reviewed
Phan Ngoc Minh, Takahito Ono, Nobuyuki Sato, Hidenori Mimura, Masayoshi Esashi
Journal of Vacuum Science of Technology B 22 (3) 1273-1276 2004/03
-
Nanotnechanical structure with integrated carbon nanotube
Peer-reviewed
T Ono, H Miyashita, M Esashi
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 43 (2) 855-859 2004/02
DOI：
10.1143/JJAP.43.855
ISSN：
0021-4922
-
Boron-doped diamond scanning probe for thermo-mechanical nanolithography
Peer-reviewed
JH Bae, T Ono, M Esashi
DIAMOND AND RELATED MATERIALS 12 (12) 2128-2135 2003/12
DOI：
10.1016/S0925-9635(03)00252-8
ISSN：
0925-9635
-
Magnetic force and optical force sensing with ultrathin silicon resonator
Peer-reviewed
Takahito Ono, Masayoshi Esashi
Review of Scientific Instruments 74 (12) 5141-5146 2003/12
DOI：
10.1063/1.1623627
ISSN：
0034-6748
-
A piezodriven XY-microstage for multiprobe nanorecording
Peer-reviewed
Deyuan Zhang, Chienliu Chang, Takahito Ono, Masayoshi Esashi
Sensors and Actuators, A: Physical 108 (1-3) 230-233 2003/11/15
DOI：
10.1016/S0924-4247(03)00373-X
ISSN：
0924-4247
-
Crystallographic influence on nanomechanics of (100)-oriented silicon resonators
Peer-reviewed
Dong F. Wang, Takahito Ono, Masayoshi Esashi
Applied Physics Letters 83 (15) 3189-3191 2003/10/13
DOI：
10.1063/1.1616652
ISSN：
0003-6951
-
Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus
Peer-reviewed
Xinxin Li, Takahito Ono, Yuelin Wang, Masayoshi Esashi
Applied Physics Letters 83 (15) 3081-3083 2003/10/13
DOI：
10.1063/1.1618369
ISSN：
0003-6951
-
Silicon Microfabricated Devices for Nanoscale Applications
Peer-reviewed
Phan Ngoc Minh, Takahito Ono, Masayoshi Esashi
Advances in Natural Sciences 4 (2) 127-141 2003/10
-
Electrical modification of a conductive polymer using a scanning probe microscope
Peer-reviewed
Takahito Ono, Shinya Yoshida, Masayoshi Esashi
Nanotechnology 14 (9) 1051-1054 2003/09
DOI：
10.1088/0957-4484/14/9/321
ISSN：
0957-4484
-
Time dependence of energy dissipation in resonating silicon cantilevers in ultrahigh vacuumtters
Peer-reviewed
Takahito Ono, Dong F. Wang, Masayoshi Esashi
Applied Physics Letters 83 (10) 1950-1952 2003/09
DOI：
10.1063/1.1608485
-
Selective growth of carbon nanotubes on Si microfabricated tips and application for electron field emitters
Peer-reviewed
PN Minh, LTT Tuyen, T Ono, H Miyashita, Y Suzuki, H Mimura, M Esashi
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 21 (4) 1705-1709 2003/07
DOI：
10.1116/1.1580115
ISSN：
1071-1023
-
Mechanical energy dissipation of multiwalled carbon nanotube in ultrahigh vacuum
Peer-reviewed
Takahito Ono, Shinya Sugimoto, Hidetoshi Miyashita, Masayoshi Esashi
Japanese Journal of Applied Physics, Part 2: Letters 42 (6 B) L683-L684 2003/06/15
DOI：
10.1143/jjap.42.L683
ISSN：
0021-4922
-
Fabrication of high-accuracy microtranslation table for near-field optical data storage actuated by inverted scratch-drive actuators
Peer-reviewed
Yoshiaki Kanamori, Hiroto Yahagi, Takahito Ono, Minoru Sasaki, Kazuhiro Hane
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 42 (6 B) 4074-4078 2003/06
DOI：
10.1143/jjap.42.4074
ISSN：
0021-4922
-
Pattern transfer of self-ordered structure with diamond mold
Peer-reviewed
Takahito Ono, Chihiro Konoma, Hidetoshi Miyashita, Yoshiaki Kanamori, Masayoshi Esashi
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 42 (6 B) 3867-3870 2003/06
DOI：
10.1143/JJAP.42.3867
ISSN：
0021-4922
-
Mass sensing of adsorbed molecules in sub-picogram sample with ultrathin silicon resonator
Peer-reviewed
Takahito Ono, Xinxin Li, Hidetoshi Miyashita, Masayoshi Esashi
Review of Scientific Instruments 74 (3 I) 1240-1243 2003/03
DOI：
10.1063/1.1536262
ISSN：
0034-6748
-
Batch fabrication of microlens at the end of optical fiber using self-photolithography and etching techniques
Peer-reviewed
Phan Ngoc Minh, Takahito Ono, Yoichi Haga, Kazumi, Inoue, Minoru Sasaki, Kazuhiro Hane, Masayoshi Esashi
Optical Review 10 (3) 150-154 2003/03
DOI：
10.1007/s10043-003-0150-4
-
Scanning probe with an integrated diamond heater element for nanolithography
Peer-reviewed
Joon Hyung Bae, Takahito Ono, Masayoshi Esashi
Applied Physics Letters 82 (5) 814-816 2003/02/03
DOI：
10.1063/1.1541949
ISSN：
0003-6951
-
Resonance enhancement of micromachined resonators with strong mechanical-coupling between two degrees of freedom
Peer-reviewed
XX Li, T Ono, RM Lin, M Esashi
MICROELECTRONIC ENGINEERING 65 (1-2) 1-12 2003/01
DOI：
10.1016/S0167-9317(02)00595-6
ISSN：
0167-9317
-
Field-assisted assembly and alignment of carbon-nanofibres
Peer-reviewed
T Ono, E Oesterschulze, G Georgiev, A Georgieva, R Kassing
NANOTECHNOLOGY 14 (1) 37-41 2003/01
DOI：
10.1088/0957-4484/14/1/309
ISSN：
0957-4484
-
Energy dissipation in submicrometer thick single-crystal silicon cantilevers
Peer-reviewed
Jinling Yang, Takahito Ono, Masayoshi Esashi
Journal of Microelectromechanical Systems 11 (6) 775-783 2002/12
DOI：
10.1109/JMEMS.2002.805208
ISSN：
1057-7157
-
Carbon nanotube on a Si tip for electron field emitter
Phan Ngoc Minh, Le T.T. Tuyen, Takahito Ono, Hidenori Mimura, Kuniyoshi Yokoo, Masayoshi Esashi
Japanese Journal of Applied Physics, Part 2: Letters 41 (12 A) L1409-L1411 2002/12/01
DOI：
10.1143/JJAP.41.L1409
ISSN：
0021-4922
-
Electrical and thermal recording techniques using a heater integrated microprobe
Peer-reviewed
Dong Weon Lee, Takahito Ono, Masayoshi Esashi
Journal of Micromechanics and Microengineering 12 (6) 841-848 2002/11
DOI：
10.1088/0960-1317/12/6/315
ISSN：
0960-1317
-
Microprobe array with electrical interconnection for thermal imaging and data storage
Peer-reviewed
Dong Weon Lee, Takahito Ono, Takashi Abe, Masayoshi Esashi
Journal of Microelectromechanical Systems 11 (3) 215-221 2002/06
DOI：
10.1109/JMEMS.2002.1007400
ISSN：
1057-7157
-
Micro-nano electromechanical system by bulk silicon micromachining
Peer-reviewed
Masayoshi Esashi, Takahito Ono
Optics and Precision Engineering 10 (6) 608-613 2002/06
-
Fabrication of thermal microprobes with a sub-100 nm metal-to-metal junction
Peer-reviewed
D. W. Lee, Takahito Ono, Masayoshi Esashi
Nanotechnology 13 (1) 29-32 2002/02
DOI：
10.1088/0957-4484/13/1/306
ISSN：
0957-4484
-
Electric-field-enhanced growth of carbon nanotubes for scanning probe microscopy
Peer-reviewed
Takahito Ono, Hidetoshi Miyashita, Masayoshi Esashi
Nanotechnology 13 (1) 62-64 2002/02
DOI：
10.1088/0957-4484/13/1/314
ISSN：
0957-4484
-
Electric field enhanced growth of Carbon nanotube and its application to SPM
Miyashita Hidetoshi, Ono Takahito, Esashi Masayoshi
The proceedings of the JSME annual meeting 2002 295-296 2002
Publisher:
The Japan Society of Mechanical Engineers
DOI：
10.1299/jsmemecjo.2002.5.0_295
-
Micro-translation-table for near-field data storage using inverted-scratch-drive-actuators
Peer-reviewed
Y Kanamori, H Yahagi, M Sasaki, T Ono, K Hane
MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS 4928 35-42 2002
ISSN：
0277-786X
-
Hybrid optical fiber-apertured cantilever near-field probe
Peer-reviewed
Phan Ngoc Minh, Takahito Ono, Hisashi Watanabe, Seung Soup Lee, Yoichi Haga, Masayoshi Esashi
Applied Physics Letters 79 (19) 3020-3023 2001/10
DOI：
10.1063/1.1416475
-
Development of inkjet head for DNA chip
Peer-reviewed
Dongyoun Sim, Takahito Ono, Masayoshi Esashi
電気学会論文誌E 120 (9) 501-506 2001/09
Publisher:
The Institute of Electrical Engineers of Japan
DOI：
10.1541/ieejsmas.121.501
ISSN：
1341-8939
-
Near-field optical apertured tip and modified structures for local field enhancement
Peer-reviewed
PN Minh, T Ono, S Tanaka, M Esashi
APPLIED OPTICS 40 (15) 2479-2484 2001/05
DOI：
10.1364/AO.40.002479
ISSN：
1559-128X
eISSN：
2155-3165
-
Investigating surface stress: Surface loss in ultrathin single-crystal silicon cantilevers
Peer-reviewed
Jinling Yang, Ono Takahito, Masavoshi Esashi
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 19 (2) 551-556 2001/03
DOI：
10.1116/1.1347040
ISSN：
1071-1023
-
Near-field optical apertured tip and modifid structures for local field enhancement
Peer-reviewed
Phan Ngoc Minh, Takahito Ono, Shuji Tanaka, Kenya Goto, Masayoshi Esashi
Applied Optics 121 (3) 113-118 2001/03
DOI：
10.1364/AO.40.002479
-
Future Technology of Optical Disk Using for High Speed and Ultra High Density Applied Vertical Cavity Surface Emitting Laser Array
Peer-reviewed
Goto Kenya, Kurihara Kazuma, Suzuki Kazuhiro, Mitsugi Satoshi, Sato Keiichi, Yamaguchi Toru, Murakami Toshiaki, Kim Young-Joo, Ono Takahito
rle 29 S9-S10 2001
Publisher:
The Laser Society of Japan
DOI：
10.2184/lsj.29.Supplement_S9
ISSN：
0387-0200
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Nanometric sensing and processing with micromachined functional probe
T Ono, XX Li, DW Lee, H Miyashita, M Esashi
TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 1062-1065 2001
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Silicon Micromachined Tunable Infrared Polarizer
Peer-reviewed
Takahito Ono, Akinori Wada, Masayoshi Esashi
IEEJ Transactions on Sensors and Micromachines 121 (3) 119-123 2001
DOI：
10.1541/ieejsmas.121.119
ISSN：
1341-8939
eISSN：
1347-5525
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Spatial distribution and polarization dependence of the optical near-field in a silicon microfabricated probe
Peer-reviewed
P. N. Minh, T. Ono, S. Tanaka, M. Esashi
Journal of Microscopy 202 (1) 28-33 2001
DOI：
10.1046/j.1365-2818.2001.00818.x
ISSN：
0022-2720
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Magnetically actuated cantilever with small resonator for scanning probe microscopy
Peer-reviewed
Dong Weon Lee, Takahito Ono, Masayoshi Esashi
IEEJ Transactions on Sensors and Micromachines 121 (3) 113-118 2001
DOI：
10.1541/ieejsmas.121.113
ISSN：
1341-8939
eISSN：
1347-5525
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光記録用マイクロマシン
Peer-reviewed
小野崇人, 江刺正喜
O plus E 23 192-198 2001
-
Surface effects and high quality factors in ultrathin single-crystal silicon cantilevers
Peer-reviewed
Jinling Yang, Takahito Ono, Masayoshi Esashi
Applied Physics Letters 77 (23) 3860-3862 2000/12/04
DOI：
10.1063/1.1330225
ISSN：
0003-6951
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RF-plasma-assisted fast atom beam etching
Peer-reviewed
Takahito Ono, Norimune Orimoto, Seungseoup Lee, Toshiki Simizu, Masayoshi Esashi
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 39 (12 B) 6976-6979 2000/12
DOI：
10.1143/JJAP.39.6976
ISSN：
0021-4922
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High-speed imaging by electro-magnetically actuated probe with dual spring
Peer-reviewed
Dong Weon Lee, Takahito Ono, Masayoshi Esashi
Journal of Microelectromechanical Systems 9 (4) 419-424 2000/12
DOI：
10.1109/84.896762
ISSN：
1057-7157
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Microsystem and Its Application for Bioengineering
Peer-reviewed
T.Ono, Y.Haga, K.Takahashi, M.Esashi
Protein Nucleic acid and Enzyme 45 (15) 2542-2549 2000/11
Publisher:
ISSN：
0039-9450
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Micro-discharge and electric breakdown in a micro-gap
Peer-reviewed
Takahito Ono, Dong Youn Sim, Masayoshi Esashi
Journal of Micromechanics and Microengineering 10 (3) 445-451 2000/09
DOI：
10.1088/0960-1317/10/3/321
ISSN：
0960-1317
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High throughput aperture near-field scanning optical microscopy
Peer-reviewed
Phan Ngoc Minh, Takahito Ono, Masayoshi Esashi
Review of Scientific Instruments 71 (8) 3111-3117 2000/08
DOI：
10.1063/1.1304867
ISSN：
0034-6748
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Cantilever with integrated resonator for application of scanning probe microscope
Peer-reviewed
D. W. Lee, Takahito Ono, Masayoshi Esashi
Sensors and Actuators, A: Physical 83 (1) 11-16 2000/05/22
DOI：
10.1016/S0924-4247(99)00378-7
ISSN：
0924-4247
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Mechanical behavior of ultrathin microcantilever
Peer-reviewed
Jinling Yang, Takahito Ono, Masayoshi Esashi
Sensors and Actuators, A: Physical 82 (1) 102-107 2000/05/15
DOI：
10.1016/S0924-4247(99)00319-2
ISSN：
0924-4247
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Microfabrication of miniature aperture at the apex of SiO2 tip on silicon cantilever for near-field scanning optical microscopy
Peer-reviewed
PN Minh, T Ono, M Esashi
SENSORS AND ACTUATORS A-PHYSICAL 80 (2) 163-169 2000/03
DOI：
10.1016/S0924-4247(99)00262-9
ISSN：
0924-4247
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RF-plasma assisted fast atom beam etching
Takahito Ono, Toshiki Simizu, Norimune Orimoto, Seungseoup Lee, Esashi Masayoshi
Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000 200-201 2000
DOI：
10.1109/IMNC.2000.872708
-
Electrostatic servo controlled uncooled infrared sensor with tunneling transducer
Peer-reviewed
Seung Seoup Lee, Takahito Ono, Kazuhiro Nakamura, Masayoshi Esashi
Sensors and Materials 12 (5) 301-314 2000
ISSN：
0914-4935
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ナノマシニングによる高感度センシングデバイス
Peer-reviewed
小野崇人
Interlab 20 34-36 2000
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ナノエンジニアリングを目指すマイクロプロ-ブ
Peer-reviewed
小野崇人, 江刺正喜
溶接学会誌 69 12-14 2000
-
シリコンエッチング技術のアプリケ-ション
Peer-reviewed
江刺正喜, 小野崇人, 田中秀治
表面技術 51 2-7 2000
-
Nonuniform silicon oxidation and application for the fabrication of aperture for near-field scanning optical microscopy
Peer-reviewed
Phan Ngoc Minh, Takahito Ono, Masayoshi Esashi
Applied Physics Letters 75 (26) 4076-4078 1999
DOI：
10.1063/1.125541
ISSN：
0003-6951
-
走査型プロ-ブ顕微鏡とナノメ-トル加工への応用
Peer-reviewed
小野崇人, 江刺正喜
計測と制御 38 (12) 763-768 1999
Publisher:
The Society of Instrument and Control Engineers
DOI：
10.11499/sicejl1962.38.763
ISSN：
0453-4662
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ナノメカノプティックス
Peer-reviewed
小野崇人, 江刺正喜
OPTRONICS 7 144-148 1999
-
Precise Micro-Nanomachining of Silicon
Peer-reviewed
Masayoshi Esashi, Risaku Toda, Kazuyuki Minami, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 119 (10) 489-497 1999
DOI：
10.1541/ieejsmas.119.489
ISSN：
1341-8939
eISSN：
1347-5525
-
Key technologies for terabit/second WDM systems with high spectral efficiency of over 1 bit/s/Hz
Peer-reviewed
T Ono, Y Yano
IEEE JOURNAL OF QUANTUM ELECTRONICS 34 (11) 2080-2088 1998/11
ISSN：
0018-9197
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Subwavelength pattern transfer by near-field photolithography
Peer-reviewed
Takahito Ono, Masayoshi Esashi
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 37 (12 B) 6745-6749 1998
ISSN：
0021-4922
-
Subwavelength pattern transfer by near-field photolithography
Peer-reviewed
Takahito Ono, Masayoshi Esashi
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 37 (12 B) 3745-3749 1998
ISSN：
0021-4922
-
Silicon Bulk Micromachining and Nanomachining
Peer-reviewed
Masayoshi Esashi, Kazuyuki Minami, Takahito Ono
Condensed Matter News 6 31-44 1998
-
Sub-wavelength pattern transfer by near field photo-lithography
Ono Takahito, Ohtomo Mika, Masayoshi Esashi
Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference 1998-July (12 B) 283-284 1998
DOI：
10.1109/IMNC.1998.730083
ISSN：
0021-4922
-
Capacitive AFM Probe for High Speed Imaging
Peer-reviewed
Yuji Shiba, Takahito Ono, Kazuyuki Minami, Masayoshi Esashi
IEEJ Transactions on Sensors and Micromachines 118 (12) 647-651 1998
DOI：
10.1541/ieejsmas.118.647
ISSN：
1341-8939
eISSN：
1347-5525
-
Subwavelength Pattern Transfer by Near-Field Photolithography
Peer-reviewed
T.Ono, M.Esashi
Jpn.J.Appl.Phys, 37 1644-1648 1998
DOI：
10.1143/JJAP.37.6745
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ナノメ-トル加工の応用 -ナノメカニックスへの応用-
Peer-reviewed
小野崇人, 江刺正喜
応用物理 67 (12) 1395-1399 1998
Publisher:
The Japan Society of Applied Physics
DOI：
10.11470/oubutsu1932.67.1395
ISSN：
0369-8009
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Evanescent-field-controlled nano-pattern transfer and micro-manipulation
Takahito Ono, Masayoshi Esashi
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) 488-493 1998
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Patterning of Langmuir-Blodgett film with ultrahigh vacuum-scanning tunneling microscope/atomic force microscope
Peer-reviewed
H. Hamanaka, T. Ono, M. Esashi
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 15 (4) 1414-1418 1997/07
DOI：
10.1116/1.589463
ISSN：
1071-1023
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Fabrication of a Si scanning probe microscopy tip with an ultrahigh vacuum-scanning tunneling microscope/atomic force microscope
Peer-reviewed
Takahito Ono, Hiroaki Saitoh, Masayoshi Esashi
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 15 (4) 1531-1534 1997/07
DOI：
10.1116/1.589489
ISSN：
1071-1023
-
Si nano-wire growth with UHV-STM
Peer-reviewed
T.Ono, H. Saitoh, M. Esashi
Appl. Phys. Lett. 70 1852 1997
-
Si nano-wire SPM probe grown by field evaporation with UHV STM
Peer-reviewed
Takahito Ono, Hiroaki Saitoh, Masayoshi Esashi
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) 10 159-164 1997
-
Fabrication of self-supported Si nano-structure with STM
H Hamanaka, T Ono, M Esashi
MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS 153-158 1997
ISSN：
1084-6999
-
(Scanning probe Microscope and Micromachining)
Peer-reviewed
小野崇人, 浜中均, 江刺正喜
表面科学 18 (4) 2-9 1997
-
Precise micro-nanomachining for advanced sensors
Peer-reviewed
M Esashi, T Ono, K Minami
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III 3223 44-55 1997
DOI：
10.1117/12.284499
ISSN：
0277-786X
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Nanoscale Al patterning on STM manipulated Si surface
T.Ono, H.Hamanaka, T.Kurabayashi, K.Minami, M.Esashi
Abstract, 13th Int. Vacuum Congress, 9th Int. Conf. on Solid Surfaces 281-282 (1-2) 362-643 1995/09
DOI：
10.1016/0040-6090(96)08705-6
ISSN：
0040-6090
-
MAGNETIC PHASE-TRANSITIONS IN DYMN2GE2 STUDIED BY NEUTRON-DIFFRACTION
Peer-reviewed
H KOBAYASHI, M OHASHI, H ONODERA, T ONO, Y YAMAGUCHI
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS 140 905-906 1995/02
ISSN：
0304-8853
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DY-161 MOSSBAUER SPECTROSCOPIC STUDY ON MAGNETIC-PROPERTIES OF PSEUDO-TERNARY DYMN2(SI1-XGEX)2 (0-LESS-THAN-X-LESS-THAN-1) COMPOUNDS
Peer-reviewed
H ONODERA, T ONO, M OHASHI, Y YAMAGUCHI, H KOBAYASHI
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS 124 (1-2) 96-104 1993/06
ISSN：
0304-8853
-
MAGNETIC-PROPERTIES OF TERNARY DYMN2X2 COMPOUNDS (X = SI AND GE)
Peer-reviewed
H ONODERA, H KOBAYASHI, T ONO, M OHASHI, H YAMAUCHI, Y YAMAGUCHI
SCIENCE REPORTS OF THE RESEARCH INSTITUTES TOHOKU UNIVERSITY SERIES A-PHYSICS CHEMISTRY AND METALLURGY 38 (2) 171-178 1993/06
ISSN：
0040-8808
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Magnetic properties in intermetallic DyMn2(Si1-xGex)2 compounds
Peer-reviewed
T.Ono, HOnodera, M.Ohashi, H.Yamauchi, Y.Yamaguchii, H.Kobayashi
J. Mag Mag. Mater 1233 133 1993
