-
Investigation towards nanomechanical sensor array for real-time detection of complex gases
Momin, M. A., Toda, M., Wang, Z., Yamazaki, M., Moorthi, K., Kawaguchi, Y., Ono, T.
Microsystems and Nanoengineering 11 (1) 53 2025/03
DOI：
10.1038/s41378-025-00899-2
-
Magnetic Sensor Using a Microfabricated Soft Magnet Resonator With Active Q-Factor Enhancement
Peer-reviewed
Zhijian Zhao, Masaya Toda, Takahito Ono
IEEE Sensors Journal 2024/12/01
DOI：
10.1109/JSEN.2024.3476499
-
Highly Reliable Diamond MEMS Dual Sensor for Magnetic Fields and Temperatures with Self-Recognition Algorithms
Zilong Zhang, Keyun Gu, Guo Chen, Liwen Sang, Tokuyuki Teraji, Yasuo Koide, Satoshi Koizumi, Masaya Toda, Meiyong Liao
Advanced Materials Technologies 9 (13) 2024/07/08
DOI：
10.1002/admt.202400153
eISSN：
2365-709X
-
Water Evaporation-induced Power Generation Using Porous AZO Films
Ayumu Hinata, Takahito Ono, Masaya Toda
IEEJ Transactions on Sensors and Micromachines 144 (7) 176-180 2024/07/01
DOI：
10.1541/ieejsmas.144.176
ISSN：
1341-8939
eISSN：
1347-5525
-
A resonant magnetic microsensor based on magnetic torque with piezoresistive readout
Zhijian Zhao, Masaya Toda, Takahito Ono
Applied Physics Letters 124 (25) 2024/06/17
DOI：
10.1063/5.0207431
ISSN：
0003-6951
-
High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures
Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Yasuo Koide, Zhaohui Huang, Meiyong Liao
2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 1-4 2024/05/02
Publisher:
IEEE
DOI：
10.1109/nems60219.2024.10639909
-
A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film
Chuan Hui Ou, Nguyen Van Toan, Yao Chuan Tsai, Ioana Voiculescu, Masaya Toda, Takahito Ono
Journal of Microelectromechanical Systems 33 (1) 46-53 2024/02/01
DOI：
10.1109/JMEMS.2023.3337333
ISSN：
1057-7157
eISSN：
1941-0158
-
Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products
Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Haitao Ye, Yasuo Koide, Zhaohui Huang, Meiyong Liao
Applied Physics Express 2024/02/01
DOI：
10.35848/1882-0786/ad2027
-
Touch-Driven Self-Powered Sensing System with High-Performance Thermoelectric Generator
Nguyen Van Toan, Truong Thi Kim Tuoi, Khairul Fadzli Samat, Masaya Toda, Nguyen Van Hieu, Takahito Ono
IEEJ Transactions on Electrical and Electronic Engineering 2024
DOI：
10.1002/tee.24117
ISSN：
1931-4973
eISSN：
1931-4981
-
Nano-diamond on Si Cantilever based Multi-dimensional Stress Sensing under Static Magnetic Field
Kanta Yamakawa, Yuta Ochiai, Takahito Ono, Masaya Toda
IEEJ Transactions on Sensors and Micromachines 144 (5) 89-93 2024
DOI：
10.1541/ieejsmas.144.89
ISSN：
1341-8939
eISSN：
1347-5525
-
Preface to the Special Issue on “World State-of-the-art Research on Sensors and Micromachines”
Koji Sugano, Masaya Toda
IEEJ Transactions on Sensors and Micromachines 144 (1) 1 2024
DOI：
10.1541/ieejsmas.144.1
ISSN：
1341-8939
eISSN：
1347-5525
-
Low Elastic Torsional Resonator Supported by a Thin Metallic Glass Beam
Masaya Toda
IEEJ Transactions on Sensors and Micromachines 144 (1) 23-24 2024
DOI：
10.1541/ieejsmas.144.23
ISSN：
1341-8939
eISSN：
1347-5525
-
On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film
Zilong Zhang, Wen Zhao, Guo Chen, Masaya Toda, Satoshi Koizumi, Yasuo Koide, Meiyong Liao
Advanced Functional Materials 33 (27) 2023/07/04
DOI：
10.1002/adfm.202300805
ISSN：
1616-301X
eISSN：
1616-3028
-
Metal-Multilayered Nanomechanical Cantilever Sensor for Detection of Molecular Adsorption
Masaya Toda, Takahito Ono, Jun Okubo
Biosensors 13 (6) 2023/06
DOI：
10.3390/bios13060573
eISSN：
2079-6374
-
Review of Magnetic Resonance Force Sensors Based on Nanomechanical Cantilever
Peer-reviewed
Masaya Toda, Gaopeng Xue, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 142 (9) 224-229 2022/09/01
Publisher:
Institute of Electrical Engineers of Japan (IEE Japan)
DOI：
10.1541/ieejsmas.142.224
ISSN：
1341-8939
eISSN：
1347-5525
-
Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro-thermoelectric generator
Peer-reviewed
Nguyen Van Toan, Keisuke Ito, Truong Thi Kim Tuoi, Masaya Toda, Po Hung Chen, Mohd Faizul Mohd Sabri, Jinhua Li, Takahito Ono
Energy Conversion and Management 267 2022/09/01
DOI：
10.1016/j.enconman.2022.115923
ISSN：
0196-8904
-
Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications
Peer-reviewed
Gaopeng Xue, Masaya Toda, Xinghui Li, Bing Li, Takahito Ono
Micromachines 13 (8) 2022/08
DOI：
10.3390/mi13081287
eISSN：
2072-666X
-
Nanoengineered nanochannels for thermally ionic nanofluidic energy harvesting
Peer-reviewed
Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Megat Muhammad Ikhsan Megat Hasnan, Masaya Toda, Ioana Voiculescu, Suhana Mohd Said, Takahito Ono
Energy Conversion and Management 264 2022/07/15
DOI：
10.1016/j.enconman.2022.115760
ISSN：
0196-8904
-
800 nm band MEMS-tunable VCSEL for microfabricated atomic clock
Peer-reviewed
Zhijan Zhao, Masaya Toda, Takahito Ono, Motoaki Hara, Satoshi Shinada, Hiroshi Nakagawa, Katsuya Kikuchi
Proceeding of Smart System Integration (SSI) Conference 2022 2022/04
DOI：
10.1109/SSI56489.2022.9901411
-
Assembled Comb-Drive XYZ-Microstage with Large Displacements and Low Crosstalk for Scanning Force Microscopy
Peer-reviewed
Gaopeng Xue, Masaya Toda, Xinghui Li, Xiaohao Wang, Takahito Ono
Journal of Microelectromechanical Systems 31 (1) 54-62 2022/02/01
DOI：
10.1109/JMEMS.2021.3123962
ISSN：
1057-7157
eISSN：
1941-0158
-
Development of Nanomechanical Multisensory Arrays for Detection of Hazardous Volatile Materials and Gases
Peer-reviewed
Md. Abdul Momin, Zhuqing Wang, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Yasuaki Kawaguchi, Takahito Ono
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) 2022/01/09
Publisher:
IEEE
DOI：
10.1109/mems51670.2022.9699548
-
FBAR Oscillator and MEMS Tunable VCSEL to Generate the Probe Lasers for Microfabricated Atomic Clock
Motoaki Hara, Satoshi Shinada, Yuichiro Yano, Tetsuya Ido, Zhijian Zhao, Masaya Toda, Takahito Ono, Horoyuki Ito
IEEE International Ultrasonics Symposium, IUS 2022-October 2022
DOI：
10.1109/IUS54386.2022.9958796
ISSN：
1948-5719
eISSN：
1948-5727
-
Comprehensive study of magnetostriction-based MEMS magnetic sensor of a FeGa/PZT cantilever
Peer-reviewed
Mohammad Akita Indianto, Masaya Toda, Takahito Ono
Sensors and Actuators, A: Physical 331 2021/11/01
DOI：
10.1016/j.sna.2021.112985
ISSN：
0924-4247
-
Three-dimensional imaging of electron spin resonance-magnetic resonance force microscopy at room temperature
Peer-reviewed
Masaya Toda, Takahito Ono
Journal of Magnetic Resonance 330 2021/09
DOI：
10.1016/j.jmr.2021.107045
ISSN：
1090-7807
eISSN：
1096-0856
-
Evaluation of New Solid Rubidium Source Using Atomic Clock Stabilization Loop
Peer-reviewed
Motoaki Hara, Yuichiro Yano, Masaya Toda, Takahito Ono, Tetsuya Ido
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) 2021/06/20
Publisher:
IEEE
DOI：
10.1109/transducers50396.2021.9495382
-
Reflection-type vapor cell for micro atomic clocks using local anodic bonding of 45° mirrors
Peer-reviewed
Hitoshi Nishino, Yuichiro Yano, Motoaki Hara, Masaya Toda, Masatoshi Kajita, Tetsuya Ido, Takahito Ono
Optics Letters 46 (10) 2272-2272 2021/05/15
Publisher:
The Optical Society
DOI：
10.1364/ol.424354
ISSN：
0146-9592
eISSN：
1539-4794
-
Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures
Peer-reviewed
Masaya Toda, Hideki Hayashi, Nguyen van Toan, Naoki Inomata, Takahito Ono
Journal of Microelectromechanical Systems 30 (4) 1-9 2021/05/14
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
DOI：
10.1109/jmems.2021.3076791
ISSN：
1057-7157
eISSN：
1941-0158
-
Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk
Peer-reviewed
Gaopeng Xue, Masaya Toda, Xinghui Li, Takahito Ono
Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021 43-46 2021/04
DOI：
10.1109/NEMS51815.2021.9451392
-
Electroplated FePt Films for Micromechanical Magnetic Sensors
Peer-reviewed
Masaya Toda, Hao Xu, Takahito Ono
physica status solidi (a) 218 (8) 2000547-2000547 2021/04
Publisher:
Wiley
DOI：
10.1002/pssa.202000547
ISSN：
1862-6300
eISSN：
1862-6319
-
Miniature piezoresistive sensor for detecting volatile organic components
Peer-reviewed
Masaya Toda, Krzysztof Moorthi, Takumi Hokama, Zhuqing Wang, Mai Yamazaki, Takahito Ono
Sensors and Actuators B: Chemical 333 129524-129524 2021/04
Publisher:
Elsevier BV
DOI：
10.1016/j.snb.2021.129524
ISSN：
0925-4005
-
Torsional resonator of Pd–Si–Cu metallic glass with a low rotational spring constant
International-journal
Peer-reviewed
Masaya Toda, Chunyang Li, Nguyen Van Toan, Yao-Chuan Tsai, Yu-Ching Lin, Takahito Ono
Microsystem Technologies 27 (3) 929-935 2021/03
Publisher:
Springer Science and Business Media LLC
DOI：
10.1007/s00542-020-04996-2
ISSN：
1862-6300
eISSN：
1862-6319
-
Magnetic Resonance Force Microscopy With Vacuum-Packaged Magnetic Cantilever Towards Free Radical Detection
Peer-reviewed
Gaopeng Xue, Masaya Toda, Xinghui Li, Xiaohao Wang, Takahito Ono
IEEE Sensors Journal 2021
DOI：
10.1109/JSEN.2021.3106352
ISSN：
1530-437X
eISSN：
1558-1748
-
Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices
Peer-reviewed
Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Masaya Toda, Takahito Ono
Scientific Reports 11 (1) 2021/01
Publisher:
Springer Science and Business Media LLC
DOI：
10.1038/s41598-020-80880-3
eISSN：
2045-2322
-
Effect of Deep-Defects Excitation on Mechanical Energy Dissipation of Single-Crystal Diamond
Peer-reviewed
Huanying Sun, Liwen Sang, Haihua Wu, Zilong Zhang, Tokuyuki Teraji, Tie-Fu Li, J. Q. You, Masaya Toda, Satoshi Koizumi, Meiyong Liao
Physical Review Letters 125 (20) 2020/11/12
Publisher:
American Physical Society (APS)
DOI：
10.1103/physrevlett.125.206802
ISSN：
0031-9007
eISSN：
1079-7114
-
Development of assembled microchannel resonator as an alternative fabrication method of a microchannel resonator for mass sensing in flowing liquid
Peer-reviewed
M. A. Indianto, M. Toda, T. Ono
Biomicrofluidics 14 (6) 064111-064111 2020/11
Publisher:
AIP Publishing
DOI：
10.1063/5.0032040
ISSN：
1932-1058
eISSN：
1932-1058
-
Magnetic Field Sensor Based on Hybrid of Magnetostrictive and Piezoelectric Materials
Peer-reviewed
Mohammad Akita Indianto, Masaya Toda, Takahito Ono
Proceedings of IEEE Sensors 2020-October MSS-19-047-1-MSS-19-047-4 2020/10/25
DOI：
10.1109/SENSORS47125.2020.9278725
ISSN：
1930-0395
eISSN：
2168-9229
-
Bridged resonator based on assembled Si thin wire
International-journal
Peer-reviewed
Masaya Toda, Taichi Nakamura, Naoki Inomata, Nguyen Van Toan, Takahito Ono
Journal of Micromechanics and Microengineering 30 (10) 105015-105015 2020/10/01
Publisher:
IOP Publishing
DOI：
10.1088/1361-6439/aba6cc
ISSN：
0960-1317
eISSN：
1361-6439
-
Vacancy Color Stress Sensing with Embedded Diamond Particles on Si Micro-cantilevers
International-journal
Peer-reviewed
Masaya Toda, Akhtar M Shahrukh, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 140 (9) 222-227 2020/09/01
Publisher:
Institute of Electrical Engineers of Japan (IEE Japan)
DOI：
10.1541/ieejsmas.140.222
ISSN：
1341-8939
eISSN：
1347-5525
-
Hermetically Packaged Microsensor for Quality Factor-Enhanced Photoacoustic Biosensing
International-journal
Peer-reviewed
Imran Latif, Masaya Toda, Takahito Ono
Photoacoustics 18 100189-100189 2020/06
Publisher:
Elsevier BV
DOI：
10.1016/j.pacs.2020.100189
ISSN：
2213-5979
-
Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures
International-journal
Peer-reviewed
Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Takahito Ono
Micromachines 11 (5) 523-523 2020/05/21
Publisher:
MDPI AG
DOI：
10.3390/mi11050523
eISSN：
2072-666X
-
Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures
Peer-reviewed
Zilong Zhang, Yuanzhao Wu, Liwen Sang, Haihua Wu, Jian Huang, Linjun Wang, Yukiko Takahashi, Runwei Li, Satoshi Koizumi, Masaya Toda, Indianto Mohammad Akita, Yasuo Koide, Meiyong Liao
MATERIALS RESEARCH LETTERS 8 (5) 180-186 2020/05
DOI：
10.1080/21663831.2020.1734680
ISSN：
2166-3831
-
Enhancing Delta E Effect at High Temperatures of Galfenol/Ti/Single-Crystal Diamond Resonators for Magnetic Sensing
International-journal
Peer-reviewed
Zilong Zhang, Haihua Wu, Liwen Sang, Yukiko Takahashi, Jian Huang, Linjun Wang, Masaya Toda, Indianto Mohammad Akita, Yasuo Koide, Satoshi Koizumi, Meiyong Liao
ACS APPLIED MATERIALS & INTERFACES 12 (20) 23155-23164 2020/05
DOI：
10.1021/acsami.0c06593
ISSN：
1944-8244
eISSN：
1944-8252
-
High Performance Micro-Thermoelectric Generator Based on Metal Doped Electrochemical Deposition
Nguyen Van Toan, Truong Thi Kim Tuoi, Khairul Fadzli Samat, Hongtao Sui, Naoki Inomata, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2020-January 570-573 2020/01
DOI：
10.1109/MEMS46641.2020.9056358
ISSN：
1084-6999
-
Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection
International-journal
Peer-reviewed
Imran Latif, Masaya Toda, Takahito Ono
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) 2020-January 834-837 2020/01
Publisher:
IEEE
DOI：
10.1109/mems46641.2020.9056209
ISSN：
1084-6999
-
Resonator with a low spring constant for polarization-degree of nuclear spins sensing
LI CHUNYANG, TODA Masaya, Nguyen Van Toan, Yao-Chuan Tsai, Yu-Ching Lin, ONO Takahito
電気学会研究会資料. 2019 MSS-19-051-1-MSS-19-051-4 2019/12/26
-
Magnetic field imaging using nano-diamond with NVC
Masaya Toda, Akhtar M Shahrukh, Takahito Ono
電気学会研究会資料. 2019 MSS-19-046-1-MSS-19-046-3 2019/12/26
-
Drift-free FBAR oscillator using an atomic-resonance-stabilization technique
International-journal
Peer-reviewed
Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Tetsuya Ido, Hiroyuki Ito, Masaya Toda, Takahito Ono
Proceedings of IEEE International Ultrasonics Symposium (IUS) 2019 2178-2181 2019/12/09
-
Electrochemical Deposited Tbxdy(1-X) Fey Thin Film Evaluated from Microactuator
Peer-reviewed
Shim Hang, Sakamoto Kei, Inomata Naoki, Toda Masaya, Van Toan Nguyen, Song Yunheub, Ono Takehito
Proceedings of Sensor Symposium on Sensors, Micromachines and Applied Systems 36 21pm1-PS3-11-1-21pm1-PS3-11-4 2019/11/19
-
Fabrication of Cantilever with FeGa/PZT Layers for Magnetic Field Sensor
Peer-reviewed
Indianto Mohammad Akita, Masaya Toda, Takahito Ono
Proceedings of Sensor Symposium on Sensors, Micromachines and Applied Systems 36 20am2-PS3-35-1-20am2-PS3-35-3 2019/11/19
-
Resonator with a low spring constant for polarization-degree of nuclear spins sensing
Peer-reviewed
李 春洋, 戸田 雅也, TOAN NGUYEN Van, 林 育菁, Tsai Yao-Chuan, 小野 崇人
Proceedings of Sensor Symposium on Sensors, Micromachines and Applied Systems 36 19pm3-T-5-1-19pm3-T-5-4 2019/11/19
-
Thermoelectric power battery using al<inf>2</inf>o<inf>3</inf> nanochannels of 10 nm diameter for energy harvesting of low-grade waste heat
International-journal
Peer-reviewed
Nguyen Van Toan, Megat Muhammad Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, Takahito Ono
Energy Conversion and Management 199 2019/11/01
DOI：
10.1016/j.enconman.2019.111979
ISSN：
0196-8904
-
Resonant magnetic sensor using concentration of magnetic field gradient by asymmetric permalloy plates
International-journal
Naoki Inomata, Wataru Suwa, Nguyen Van Toan, Masaya Toda, Takahito Ono
Microsystem Technologies 25 (10) 3983-3989 2019/10/01
DOI：
10.1007/s00542-018-4257-8
ISSN：
0946-7076
eISSN：
1432-1858
-
Electrostatically Driven Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition
International-journal
Peer-reviewed
Nguyen Van Toan, Dong Zhao, Naoki Inomata, Masaya Toda, Yunheub Song, Takahito Ono
Physica Status Solidi (A) Applications and Materials Science 216 (14) 2019/07/24
DOI：
10.1002/pssa.201800797
ISSN：
1862-6300
eISSN：
1862-6319
-
Study of fluorescence intensity using nano‐diamonds due to ion implantations
巻島創, 戸田雅也, 小野崇人
電気学会研究会資料 (MSS-19-011-028.030-034) 13‐15 2019/07/01
-
Silicon-based micro calorimeter with single thermocouple structure for thermal characterization
International-journal
Peer-reviewed
Zhuqing Wang, Mitsuteru Kimura, Masaya Toda, Takahito Ono
IEEE Electron Device Letters 40 (7) 1198-1200 2019/07
DOI：
10.1109/LED.2019.2918238
ISSN：
0741-3106
eISSN：
1558-0563
-
A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks
International-journal
Peer-reviewed
Hitoshi Nishino, Masaya Toda, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 1530-1532 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808772
-
Highly Sensitive Structure of Nanomechanical Gas Sensor Based on Stress Concentration Generated by Cantilever Lateral Deflection
International-journal
Peer-reviewed
Zhuqing Wang, Takumi Hokama, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 2107-2109 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808616
-
Metal-Assisted Chemical Etching Method Subjected to Micro/Nano Device Fabrication
International-journal
International-coauthorship
Peer-reviewed
Nguyen Van Toan, Xiaoyue Wang, Naoki Inomata, Masaya Toda, Ioana Voiculescu, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 1639-1642 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808663
-
Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition
International-journal
Peer-reviewed
Nguyen Van Toan, Dong Zhao, Naoki Inomata, Masaya Toda, Yunheub Song, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 1709-1711 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808313
-
A Novel Photoacoustic Microsensor for Enhanced Quality Factor Detection of Low Concentration Analytes
International-journal
Peer-reviewed
Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 2065-2067 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808250
-
Magnetostrictive Performance of Electrodeposited TB<inf>X</inf>DY<inf>(1-X)</inf>FE<inf>Y</inf> Thin Filmevaluated from Microactuator
International-journal
International-coauthorship
Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Yunheub Song, Takahito Ono
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 1698-1700 2019/06
DOI：
10.1109/TRANSDUCERS.2019.8808489
-
Piezoresistive strain sensor based on monolayer molybdenum disulfide continuous film deposited by chemical vapor deposition
International-journal
Peer-reviewed
Minjie Zhu, Kei Sakamoto, Jinhua Li, Naoki Inomata, Masaya Toda, Takahito Ono
Journal of Micromechanics and Microengineering 29 (5) 2019/03/15
DOI：
10.1088/1361-6439/ab0726
ISSN：
0960-1317
eISSN：
1361-6439
-
磁歪材料の電解めっき成膜とそのひずみセンサ応用
江面大河, 猪股直生, 戸田雅也, 古屋泰文, 小野崇人
電気学会全国大会講演論文集(CD-ROM) 2019 ROMBUNNO.3‐172 2019/03/01
-
Piezoresistive Nanomechanical Humidity Sensors Using Internal Stress In-Plane of Si-Polymer Composite Membranes
International-journal
International-coauthorship
Peer-reviewed
Md. Mahabub Hossain, Masaya Toda, Takumi Hokama, Mai Yamazaki, Krzysztof Moorthi, Takahito Ono
IEEE Sensors Letters 3 (2) 2500404-1-2500404-4 2019/01/16
-
Vanadium-doped molybdenum disulfide film-based strain sensors with high gauge factor
International-journal
Peer-reviewed
Minjie Zhu, Jinhua Li, Naoki Inomata, Masaya Toda, Takahito Ono
Applied Physics Express 12 (1) 015003-015003 2019/01/01
DOI：
10.7567/1882-0786/aaf5c4
ISSN：
1882-0778
eISSN：
1882-0786
-
A reflection-type vapor cell using anisotropic etching of silicon for micro atomic clocks
International-journal
Peer-reviewed
Hitoshi Nishino, Motoaki Hara, Yuichiro Yano, Masaya Toda, Yoshiaki Kanamori, Masatoshi Kajita, Tetsuya Ido, Takahito Ono
Applied Physics Express 12 (7) 072012 2019
DOI：
10.7567/1882-0786/ab2a3c
ISSN：
1882-0778
eISSN：
1882-0786
-
Low Cost and High-Aspect Ratio Micro/Nano Device Fabrication by Using Innovative Metal-Assisted Chemical Etching Method
International-journal
Peer-reviewed
Nguyen Van Toan, Xiaoyue Wang, Naoki Inomata, Masaya Toda, Ioana Voiculescu, Takahito Ono
Advanced Engineering Materials 21 (8) 1900490 2019
DOI：
10.1002/adem.201900490
ISSN：
1438-1656
eISSN：
1527-2648
-
A Reflection-Type Vapor Cell for Micro Atomic Clock
International-journal
Peer-reviewed
Hitoshi Nishino, Masaya Toda, Yoshiaki Kanamori, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2019-January 915-918 2019/01
DOI：
10.1109/MEMSYS.2019.8870878
ISSN：
1084-6999
-
Electrolyte Based Thermal to Electric Energy Conversion Utilising 10 nm Diameter AL2O3 Nanochannels
International-journal
Peer-reviewed
Nguyen van Toan, Megat Muhammad Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, Takahito Ono
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) 507-510 2019/01
DOI：
10.1109/memsys.2019.8870755
ISSN：
1084-6999
-
High Gauge Factor Strain Sensors Based on Vanadium Doped Molybedenum Disulfide 2D Films
International-journal
Peer-reviewed
Minjie Zhu, Naoki Inomata, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2019-January 335-338 2019/01
DOI：
10.1109/MEMSYS.2019.8870660
ISSN：
1084-6999
-
Stress sensing using nitrogen-vacancy-centers with the embedded nanodiamonds
Masaya Toda, Akhtar M Shahrukh, Takahito Ono
電気学会研究会資料. 2018 (204-224) 27-29 2018/12/20
-
Constructing in-chip micro-supercapacitors of 3D graphene nanowall/ruthenium oxides electrode through silicon-based microfabrication technique
International-journal
Peer-reviewed
Jinhua Li, Minjie Zhu, Zhonglie An, Zhuqing Wang, Masaya Toda, Takahito Ono
Journal of Power Sources 401 204-212 2018/10/15
DOI：
10.1016/j.jpowsour.2018.08.099
ISSN：
0378-7753
-
FBAR oscillator stabilized by Rb atomic resonator for SHF/EHF band wireless devices
International-journal
Peer-reviewed
Motoaki Hara, Yuichiro Yano, Hiroyuki Ito, Masaya Toda, Takahito Ono, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Tetsuya Ido
the 2018 IEEE International Ultrasonics Symposium 2018-January 2018/10
DOI：
10.1109/ULTSYM.2018.8579685
ISSN：
1948-5727
-
3.5 GHz band CMOS oscillator using thin film bulk acoustic resonator for atomic clock systems
Peer-reviewed
Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Hitoshi Nishino, Masaya Toda, Shinsuke Hara, Akifumi Kasamatsu, Hiroyuki Ito, Takahito Ono, Tetsuya Ido
「センサ・マイクロマシンと応用システム」シンポジウム論文集 2018 01am2-A-3-1-01am2-A-3-4 2018/10
-
A Reflection-Type Vapor Cell for Micro Atomic Clock
Peer-reviewed
Hitoshi Nishino, Masaya Toda, Yoshiaki Kanamori, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 2018 30pm4-PS-16-1-30pm4-PS-16-6 2018/10
-
Photoacoustic signal generation in condensed media and detection using vacuum packaged resonator
Peer-reviewed
Latif Imran, An Zhonglie, Masaya Toda, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 2018 01pm1-PS-190-1-01pm1-PS-190-6 2018/10
-
Piezoresistive gas sensor based on polymer volume change with stress concentration generated by a cantilever lateral deflection
Peer-reviewed
Takumi Hokama, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 2018 01pm1-PS-190-1--01pm1-PS-190-6 2018/10
-
Microwave oscillator using piezoelectric thin-film resonator aiming for ultraminiaturization of atomic clock
International-journal
Peer-reviewed
M. Hara, Y. Yano, M. Kajita, H. Nishino, Y. Ibata, M. Toda, S. Hara, A. Kasamatsu, H. Ito, T. Ono, T. Ido
Review of Scientific Instruments 89 (10) 2018/10/01
DOI：
10.1063/1.5048633
ISSN：
0034-6748
eISSN：
1089-7623
-
Reducing intrinsic energy dissipation in diamond-on-diamond mechanical resonators toward one million quality factor
International-journal
International-coauthorship
Peer-reviewed
Haihua Wu, Liwen Sang, Yumeng Li, Tokuyuki Teraji, Tiefu Li, Masataka Imura, Jianqiang You, Yasuo Koide, Masaya Toda, Meiyong Liao
PHYSICAL REVIEW MATERIALS 2 (9) 2018/09
DOI：
10.1103/PhysRevMaterials.2.090601
ISSN：
2475-9953
-
Young's modulus of plasma-polymerized allylamine films using micromechanical cantilever sensor and laser-based surface acoustic wave techniques
International-journal
International-coauthorship
Peer-reviewed
Masaya Toda, Koji Miyake, Li Qiang Chu, Marjan Zakerin, Renate Förch, Rüdiger Berger, Akiko N. Itakura
Plasma Processes and Polymers 15 (9) 2018/09/01
DOI：
10.1002/ppap.201800083
ISSN：
1612-8850
-
Highly Sensitive Hermetically Packaged Microsensor for Photoacoustic Detection
Peer-reviewed
Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono
E部門総合研究会研究会資料 2018 (1-6) 27-30 2018/07
-
Capacitive Silicon Nanomechanical Resonator Capable of Selective Vibration of High-Order Mode
Peer-reviewed
Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Masaya Toda, Takahito Ono
Proceedings of the 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 14-1-14-2 2018/06
-
Hermetically Packaged Resonant Microsensor for Photoacoustic Detection
Peer-reviewed
Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono
Proceedings of the 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 67-1-67-2 2018/06
-
Nanomechanical Piezoresistive Sensor with Polymer-Si Membrane for Gas Detection
Peer-reviewed
Takumi Hokama, Md. Mahabub Hossain, Masaya Toda, Krzysztof Moorthi, Mai Yamazaki, Takahito Ono
Proceedings of the 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 80-1-80-2 2018/06
-
Thermal resistance change of liquid carbon dioxide based on narrow space effect in micro chamber
Peer-reviewed
Masaya Toda, Tomoyuki Yamagami, Naoki Inomata, Takashi Fujii, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2018-January 1296-1299 2018/04
DOI：
10.1109/MEMSYS.2018.8346803
ISSN：
1084-6999
-
Fabrication and evaluation of assembled micro-tube resonator for mass measurement in flowing liquid
Peer-reviewed
Mohammad Akita Indianto, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2018-January 1261-1264 2018/04
DOI：
10.1109/MEMSYS.2018.8346793
ISSN：
1084-6999
-
Electrically driven ion transport in nanopores fabricated by metal assisted chemical etching method
Peer-reviewed
Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2018-January 1253-1256 2018/04
DOI：
10.1109/MEMSYS.2018.8346791
ISSN：
1084-6999
-
Evaluation of piezoresistive property of vanadium oxide thin film
Peer-reviewed
Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2018-January 1044-1047 2018/04
DOI：
10.1109/MEMSYS.2018.8346738
ISSN：
1084-6999
-
0 3 FBAR-Based 3.4 GHz Oscillator Without Frequency Multiplications Aiming for an Integrated Atomic Clock Chip
Peer-reviewed
Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Masaya Toda, Hiroyuki Ito, Takahito Ono, Tetsuya Ido
Proceedings of the 2018 European Frequency and Time Seminar 2018/04
-
Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method
Peer-reviewed
Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono
Nanotechnology 29 (19) 195301-1-195301-7 2018/03/16
DOI：
10.1088/1361-6528/aab1d3
ISSN：
0957-4484
eISSN：
1361-6528
-
Pico-thermogravimetric material properties analysis using diamond cantilever beam
International-journal
International-coauthorship
Peer-reviewed
Ioana Voiculescu, Meiyong Liao, Marjan Zakerin, Rüdiger Berger, Takahito Ono, Masaya Toda
Sensors and Actuators, A: Physical 271 356-363 2018/03/01
DOI：
10.1016/j.sna.2018.01.004
ISSN：
0924-4247
-
MICRO ATOMIC FREQUENCY STANDARDS EMPLOYING AN INTEGRATED FBAR-VCO OSCILLATING ON THE 87RB CLOCK FREQUENCY WI
Peer-reviewed
Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Hitoshi Nishino, Yasuhiro Ibata, Masaya Toda, Shinsuke Hara, Akifumi Kasamatsu, Hiroyuki Ito, Takahito Ono, Tetsuya Ido
The 31st IEEE International Conference on Micro Electro Mechanical Systems 2018-January 715-718 2018/01
DOI：
10.1109/MEMSYS.2018.8346655
ISSN：
2160-1968
-
Evaluation of Piezoresistive Property of Vanadium Oxide Thin Film Deposited by Sputtering
Peer-reviewed
Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono
IEEE Sensors Letters 2 (1) 2500204 2018
-
Nano and microsensors for mammalian cell studies
International-journal
International-coauthorship
Peer-reviewed
Ioana Voiculescu, Masaya Toda, Naoki Inomata, Takahito Ono, Fang Li
Micromachines 9 (9) 2018
DOI：
10.3390/mi9090439
eISSN：
2072-666X
-
Microfabricated temperature-sensing devices using a microfluidic chip for biological applications
Peer-reviewed
Naoki Inomata, Masaya Toda, Takahito Ono
International Journal of Automation Technology 12 (1) 15-23 2018
DOI：
10.20965/ijat.2018.p0015
ISSN：
1881-7629
eISSN：
1883-8022
-
New Approach to Increase CNT Contents in Electrodeposited Ni-CNT Composite Thin Films by Modified Current Conditions
Peer-reviewed
Akhtar Muhammad Shahrukh, Zhonglie An, Masaya Toda, Takahito Ono
IEEE Transactions on Nanotechnology 16 (6) 931-938 2017/11
DOI：
10.1109/TNANO.2017.2726183
ISSN：
1536-125X
-
Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Takumi Hokama, Takahito Ono
Advanced Engineering Materials 19 (11) 1700203-1-1700203-5 2017/11
DOI：
10.1002/adem.201700203
ISSN：
1438-1656
eISSN：
1527-2648
-
Microfabrication of a scanning probe with NV centers in a selectively grown diamond thin film through a xenon difluoride etching process
Peer-reviewed
Minjie Zhu, Jinhua Li, Masaya Toda, Takahito Ono
Journal of Micromechanics and Microengineering 27 (12) 125007-1-125007-7 2017/10/30
DOI：
10.1088/1361-6439/aa8f12
ISSN：
0960-1317
eISSN：
1361-6439
-
Ir/YSZ/Si上に成膜したダイヤモンドを用いた振動子の作製と評価
Peer-reviewed
持丸裕矢, 戸田雅也, 小野崇人
センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 34 01pm4-PLN-11-1-01pm4-PLN-11-2 2017/10/24
-
パーマロイコンセントレータによる磁場勾配を用いた共振型磁気センサ
Peer-reviewed
諏訪亘, 猪股直生, 戸田雅也, 小野崇人
センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 34 01pm4-PS-146-1-01pm4-PS-146-2 2017/10/24
-
原子時計チップ開発に向けた卓上原子時計テストベンチによるMEMSガスセルおよびFBAR-VCOの評価
Peer-reviewed
Motokai Hara, Yuichiro Yano, Masatoshi Kajita, Hitoshi Nishino, Yasuhiro Ibata, Minjie Zhu, Latif Imran, Masaya Toda, Takahito Ono, Tetsuya Ido
Proceedings of Sensor Symposium on Sensors, Micromachines and Applied Systems 34 31am3-PS-17-1-31am3-PS-17-4 2017/10/24
Publisher:
Institute of Electrical Engineers of Japan
-
Assembled Micro-Tube Resonator for Mass Detection of Flowing Liquid
Peer-reviewed
Mohammad Akita Indianto, Masaya Toda, Takahito Ono
8 31am3-PN-33-1-31am3-PN-33-2 2017/10
-
Fabrication of PMUT using silicon on nothing process for fingerprint sensor
Peer-reviewed
Shim Hang, Nguyen Van Toan, Masaya Toda, Naoki Inomata, Takahito Ono, Yoshiaki Kanamori, Song Yunheub, Oh Youngtaek
「センサ・マイクロマシンと応用システム」シンポジウム論文集 31 31am3-PS-19-1-31am3-PS-19-2 2017/10
-
Vacuum packaged cantilever sensor mounted with a magnetic particle for magnetic force detection
Peer-reviewed
Gaopeng Xue, Masaya Toda, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems 2017 (7994243) 1096-1099 2017/07/26
DOI：
10.1109/TRANSDUCERS.2017.7994243
-
Pico-thermogravimetric material properties analysis using diamond cantilever beam
Peer-reviewed
Ioana Voiculescu, Masaya Toda, Meiyong Liao, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems 19 (7994519) 2223-2226 2017/07/26
DOI：
10.1109/TRANSDUCERS.2017.7994519
-
Resonant magnetic sensor using magnetic gradient field formed by permalloy concentrator
Peer-reviewed
Wataru Suwa, Naoki Inomata, Masaya Toda, Takahito Ono
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems 19 (7994175) 822-825 2017/07/26
DOI：
10.1109/TRANSDUCERS.2017.7994175
-
Fabrication of an Assembled Scanning Probe with Nitrogen Vacancy Centers in Diamond Particle
Peer-reviewed
Minjie Zhu, Masaya Toda, Takahito Ono
IEEE Transactions on Nanotechnology 16 (4) 545-550 2017/07
DOI：
10.1109/TNANO.2016.2640191
ISSN：
1536-125X
-
High Aspect Ratio Silicon Structures Produced via Metal-Assisted Chemical Etching and Assembly Technology for Cantilever Fabrication
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Takahito Ono
IEEE Transactions on Nanotechnology 16 (4) 567-573 2017/07
DOI：
10.1109/TNANO.2016.2645781
ISSN：
1536-125X
-
Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy
Peer-reviewed
Marjan Zakerin, Antonin Novak, Masaya Toda, Yves Emery, Filipe Natalio, Hans-Juergen Butt, Ruediger Berger
SENSORS 17 (6) 1191-1-1191-11 2017/06
DOI：
10.3390/s17061191
ISSN：
1424-8220
-
パーマロイ磁気コンセントレータによる磁場勾配を用いた共振型磁気センサ
諏訪亘, 猪股直生, 戸田雅也, 小野崇人
電気学会全国大会講演論文集(CD-ROM) 2017 ROMBUNNO.3‐132 2017/03/05
-
Cantilever beam temperature sensors for biological applications
Peer-reviewed
Masaya Toda, Naoki Inomata, Takahito Ono, Ioana Voiculescu
IEEJ Transactions on Electrical and Electronic Engineering 12 (2) 153-160 2017/03/01
DOI：
10.1002/tee.22360
ISSN：
1931-4973
eISSN：
1931-4981
-
Patterning high aspect silicon pillars on cantilever by metal assisted chemical etching for humidity sensing
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Takumi Hokama, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 0 (7863639) 1232-1235 2017/02/23
DOI：
10.1109/MEMSYS.2017.7863639
ISSN：
1084-6999
-
Improvement of the quality factor of single crystal diamond mechanical resonators
Peer-reviewed
Meiyong Liao, Masaya Toda, Liwen Sang, Tokuyuki Teraji, Masataka Imura, Yasuo Koide
JAPANESE JOURNAL OF APPLIED PHYSICS 56 (2) 024101-1-024101-5 2017/02
DOI：
10.7567/JJAP.56.024101
ISSN：
0021-4922
eISSN：
1347-4065
-
Vacuum packaged micro-cantilever with a magnetic particle
Peer-reviewed
Nurasyikin Mohd, Gaopeng Xue, Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 137 (8) 245-246 2017
DOI：
10.1541/ieejsmas.137.245
ISSN：
1341-8939
eISSN：
1347-5525
-
Microchanneled calorimetric concentration sensor for picoliter liquid samples of cytochrome c
International-journal
Peer-reviewed
Masaya Toda, Ning Xia, Naoki Inomata, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 137 (1) 28-31 2017/01
DOI：
10.1541/ieejsmas.137.28
ISSN：
1341-8939
eISSN：
1347-5525
-
Humidity sensor based on the mechanical response of a cantilever with nanostructures on the surface
HOKAMA Takumi, KIKUCHI Akio, TOAN Nguyen Van, TODA Masaya, ONO Takahito
The Proceedings of Conference of Tohoku Branch 2017 (0) 2017
Publisher:
一般社団法人 日本機械学会
-
Comb-Drive XYZ-microstage with Large Displacements Based on Chip-Level Microassembly
Peer-reviewed
Gaopeng Xue, Masaya Toda, Takahito Ono
Journal of Microelectromechanical Systems 25 (6) 989-998 2016/12
DOI：
10.1109/JMEMS.2016.2607233
ISSN：
1057-7157
-
Scanning probe with nitrogen vacancy centers in diamond particle for magnetic resonance imaging
Peer-reviewed
Minjie Zhu, Masaya Toda, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 16 210-213 2016/11/21
DOI：
10.1109/NANO.2016.7751404
-
Fabrication and evaluation of CVD diamond resonators
Peer-reviewed
Yuya Mochimaru, Masaya Toda, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 16 676-677 2016/11/21
DOI：
10.1109/NANO.2016.7751555
-
High aspect silicon structures using metal assisted chemical etching
Peer-reviewed
N. V. Toan, M. Toda, T. Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 16 720-723 2016/11/21
DOI：
10.1109/NANO.2016.7751348
-
Electrodeposition and characterization of nickel-carbon nanotube composite thin films with high carbon nanotube content
Peer-reviewed
Muhammad Shahrukh Akhtar, Zhonglie An, Masaya Toda, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 16 904-906 2016/11/21
DOI：
10.1109/NANO.2016.7751464
-
Assembled comb-drive XYZ-microstage with DPPH sample for the 3D scanning of magnetic resonance force microscope
Peer-reviewed
Gaopeng Xue, Masaya Toda, Takahito Ono
16th International Conference on Nanotechnology - IEEE NANO 2016 16 980-981 2016/11/21
DOI：
10.1109/NANO.2016.7751422
-
Magnetic field sensor based on vacuum packaged cantilever with a mounted magnet
Gaopeng Xue, Masaya Toda, Nurasyikin Mohd, Zhonglie An, Nguyen Van Toan, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 33 25pm4-PS-060-1-25pm4-PS-060-4 2016/10/24
-
Packaging Technique of Micro Cantilever for Magnetic Force Sensing
Peer-reviewed
Nurasyikin Mohd, Naoki Inomata, Nguyen Van Toan, Takahito Ono, Masaya Toda
Proceedings of the International Workshop on Nanomechanical Sensors 12 150-151 2016/06/22
-
Comparative investigation into surface charged multi-walled carbon nanotubes reinforced Cu nanocomposites for interconnect applications
Peer-reviewed
Zhonglie An, Masaya Toda, Takahito Ono
Composites Part B: Engineering 95 (15) 137-143 2016/06/15
DOI：
10.1016/j.compositesb.2016.03.086
ISSN：
1359-8368
-
Investigation of bimaterial cantilever beam for heat sensing in liquid
International-journal
International-coauthorship
Peer-reviewed
I. Voiculescu, F. Liu, T. Ono, M. Toda
Sensors and Actuators, A: Physical 242 58-66 2016/05/01
DOI：
10.1016/j.sna.2015.11.030
ISSN：
0924-4247
-
An investigation of processes for glass micromachining
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Takahito Ono
Micromachines 7 (3) 1-12 2016/03/22
DOI：
10.3390/mi7030051
ISSN：
2072-666X
eISSN：
2072-666X
-
CVDダイヤモンド振動子の作製と評価
持丸 裕矢, 戸田 雅也, 小野 崇人
日本機械学会東北支部第51期総会・講演会講演論文集 2016 (1) 75-76 2016/03/11
-
Mechanical properties of Carbon nanotubes-nickel composite thin films synthesized with high carbon nanotube content
Akhtar M Shahrukh, Zhonglie An, Toda Masaya, Takahito Ono
日本機械学会東北支部第51期総会・講演会講演論文集 2016 (1) 77-78 2016/03/11
Publisher:
The Japan Society of Mechanical Engineers
-
Temperature-depended mechanical properties of microfabricated vanadium oxide mechanical resonators for thermal sensing
Peer-reviewed
Naoki Inomata, Libao Pan, Masaya Toda, Takahito Ono
Japanese Journal of Applied Physics 55 (3) 037201-1-037201-5 2016/03
DOI：
10.7567/JJAP.55.037201
ISSN：
0021-4922
eISSN：
1347-4065
-
Electrodeposition of carbon nanotubes-Cu composite for microelectrical elements applications
Peer-reviewed
Zhonglie An, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2016-February 528-531 2016/02/26
DOI：
10.1109/MEMSYS.2016.7421678
ISSN：
1084-6999
-
Microfabricated vanadium oxide resonant thermal sensor with a high temperature coefficient of resonant frequency
Peer-reviewed
Naoki Inomata, Libao Pan, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2016-February 1042-1045 2016/02/26
DOI：
10.1109/MEMSYS.2016.7421812
ISSN：
1084-6999
-
Pulse-Reverse Electrodeposition and Micromachining of Graphene-Nickel Composite: An Efficient Strategy toward High-Performance Microsystem Application
Peer-reviewed
Jinhua Li, Zhonglie An, Zhuqing Wang, Masaya Toda, Takahito Ono
ACS Applied Materials and Interfaces 8 (6) 3969-3976 2016/02/24
DOI：
10.1021/acsami.5b11164
ISSN：
1944-8244
eISSN：
1944-8252
-
Bimaterial nanocantilever beam calorimeter for atmospheric pressure and liquid applications
Ioana Voiculescu, Masaya Toda, Takahito Ono, Fei Liu
Nanocantilever Beams: Modeling, Fabrication and Applications 411-429 2016/01/12
DOI：
10.4032/9789814613248
-
Highly sensitive thermometer using a vacuum-packed Si resonator in a microfluidic chip for the thermal measurement of single cells
Peer-reviewed
Naoki Inomata, Masaya Toda, Takahito Ono
Lab on a Chip 16 (18) 3597-3603 2016
DOI：
10.1039/c6lc00949b
ISSN：
1473-0197
eISSN：
1473-0189
-
139 Fabrication and evaluation of CVD diamond resonators
MOCHIMARU Yuya, TODA Masaya, ONO Takahito
The Proceedings of Conference of Tohoku Branch 2016 (0) 75-76 2016
Publisher:
一般社団法人 日本機械学会
-
Photoacoustic Microsensor for Glucose Monitoring in Human Blood
Imran Latif, Masaya Toda, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 32 28pm1-B-5-1-28pm1-B-5-6 2015/10/28
Publisher:
Institute of Electrical Engineers of Japan
-
Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of magnetic resonance force microscopy
Gaopeng Xue, Masaya Toda, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 32 29pm3-PS-47-1-29pm3-PS-47-4 2015/10/28
Publisher:
Institute of Electrical Engineers of Japan
-
酸化バナジウムを用いた共振型マイクロ熱量センサ
猪股 直生, 潘 立葆, 戸田 雅也, 小野 崇人
「センサ・マイクロマシンと応用システム」シンポジウム論文集 32 30am2-PS-66-1-30am2-PS-66-4 2015/10/28
Publisher:
Institute of Electrical Engineers of Japan
-
磁気共鳴イメージングためのNVセンターを有するダイヤモンドプローブ
朱 敏杰, 戸田 雅也, 小野 崇人
「センサ・マイクロマシンと応用システム」シンポジウム論文集 32 30am2-PS-076-1-30am2-PS-076-4 2015/10/28
Publisher:
Institute of Electrical Engineers of Japan
-
Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of low temperature measurement systems
Gaopeng Xue, Masaya Toda, Takahito Ono
Japan-China-Korea Joint Conference on MEMS/NEMS 2015 (JCK MEMS/NEMS 2015) 6 73-74 2015/09/23
-
Probe with Nitrogen Vacancy in Diamond Thin Film for Magnetic Resonance Imaging
Minjie Zhu, Masaya Toda, Takahito Ono
Japan-China-Korea Joint Conference on MEMS/NEMS 2015 (JCK MEMS/NEMS 2015) 6 85-86 2015/09/23
-
磁気共鳴イメージングためのNVセンターを 有するダイヤモンドプローブ
朱 敏杰, 戸田 雅也, 小野 崇人
日本機械学会2015年度年次大会講演論文集 15 (1) J2220306-1-J2220306-4 2015/09/13
Publisher:
The Japan Society of Mechanical Engineers
-
非線形減衰を用いたSi振動子のQ値向上
猪股 直生, 斎藤 和也, 戸田 雅也, 小野 崇人
日本機械学会2015年度年次大会講演論文集 15 (1) J2210303-1-J2210303-2 2015/09/13
-
Chip-level microassembly of XYZ-microstage with large displacements
Peer-reviewed
Gaopeng Xue, Masaya Toda, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 135 (6) 236-237 2015/06/01
DOI：
10.1541/ieejsmas.135.236
ISSN：
1341-8939
eISSN：
1347-5525
-
Comb-drive XYZ-microstage based on assembling technology for low temperature measurement systems
International-journal
Peer-reviewed
Gaopeng Xue, Masaya Toda, Takahito Ono
ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (7111006) 83-88 2015/05/20
DOI：
10.1109/ICEP-IAAC.2015.7111006
-
Microstructuring of carbon nanotubes-nickel nanocomposite
International-journal
Peer-reviewed
Zhonglie An, Liang He, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono
Nanotechnology 26 (19) 195601-1-195601-8 2015/05/15
DOI：
10.1088/0957-4484/26/19/195601
ISSN：
0957-4484
eISSN：
1361-6528
-
Si nanowire probe with Nd-Fe-B magnet for attonewton-scale force detection
International-journal
Peer-reviewed
Yong Jun Seo, Masaya Toda, Takahito Ono
Journal of Micromechanics and Microengineering 25 (4) 045015-1-045015-5 2015/04
DOI：
10.1088/0960-1317/25/4/045015
ISSN：
0960-1317
eISSN：
1361-6439
-
超薄型カンチレバーを用いた高感度バイオセンシング
倉田慎, 小野崇人, 戸田雅也
日本機械学会東北支部第50期総会・講演会講演論文集 2015 (1) 255-256 2015/03/13
-
Electrochemical Biosensor for Single Cell Impedance Spectroscopy
Sena Nur Arslan, Masaya Toda, Takahito Ono
日本機械学会東北支部第50期総会・講演会講演論文集 2015 (1) 249-250 2015/03/13
-
Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems
International-journal
Peer-reviewed
Gaopeng Xue, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2015-February (February) 14-17 2015/02/26
DOI：
10.1109/MEMSYS.2015.7050874
ISSN：
1084-6999
-
Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum
Peer-reviewed
Hideki Hayashi, Masaya Toda, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2015-February (February) 344-347 2015/02/26
DOI：
10.1109/MEMSYS.2015.7050959
ISSN：
1084-6999
-
Synthesis of carbon nanotubes-Ni composite for micromechanical elements application
Peer-reviewed
Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2015-February (February) 401-404 2015/02/26
DOI：
10.1109/MEMSYS.2015.7050974
ISSN：
1084-6999
-
Sub-nanowatt thermal detection device based on a Si double-supported resonator for single cells
Naoki Inomata, Masaya Toda, Takahito Ono
MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences 69-71 2015
-
Si-based micro-nanomechanics for ultimate sensing
Peer-reviewed
Takahito Ono, Masaya Toda, Yong Jun Seo, Naoki Inomata
ECS Transactions 66 (5) 123-129 2015
DOI：
10.1149/06605.0123ecst
ISSN：
1938-5862
eISSN：
1938-6737
-
J2210303 Quality factor enhancement of Si resonators by nonlinear damping
INOMATA Naoki, SAITO Kazuya, TODA Masaya, ONO Takahito
The Proceedings of Mechanical Engineering Congress, Japan 2015 (0) _J2210303--_J2210303- 2015
Publisher:
一般社団法人 日本機械学会
-
J2220306 Probe with Nitrogen Vacancy in Diamond Particle for Magnetic Resonance Imaging
ZHU Minjie, TODA Masaya, ONO Takahito
The Proceedings of Mechanical Engineering Congress, Japan 2015 (0) _J2220306--_J2220306- 2015
Publisher:
一般社団法人 日本機械学会
-
Energy dissipation in micron- and submicron-thick single crystal diamond mechanical resonators
Peer-reviewed
Meiyong Liao, Masaya Toda, Liwen Sang, Shunichi Hishita, Shuji Tanaka, Yasuo Koide
APPLIED PHYSICS LETTERS 105 (25) 251904-1-251904-5 2014/12
DOI：
10.1063/1.4904990
ISSN：
0003-6951
eISSN：
1077-3118
-
Fabrication and characterization of silicon micromirror with carbon nanotubes-nickel nanocomposite beams
Peer-reviewed
Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono
Proceedings of the IEEE Conference on Nanotechnology 14 888-892 2014/11/26
DOI：
10.1109/NANO.2014.6968008
eISSN：
1944-9399
-
Assembled comb-drive XYZ-microstage integrated with capacitive displacement sensor for low temperature measurement systems
Peer-reviewed
Gaopeng Xue, Masaya Toda, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 31 1-6 2014/10/20
Publisher:
Institute of Electrical Engineers of Japan
-
真空中細胞観察のための薄膜Si窓を有する マイクロチャネル型チャンバー
Peer-reviewed
林秀樹, 戸田雅也, 小野 崇人
「センサ・マイクロマシンと応用システム」シンポジウム論文集 31 1-5 2014/10/20
Publisher:
Institute of Electrical Engineers of Japan
-
Improved thermal interface property of carbon nanotube-Cu composite based on supercritical fluid deposition
Peer-reviewed
Zhonglie An, Masaya Toda, Takahito Ono
Carbon 75 281-288 2014/08
DOI：
10.1016/j.carbon.2014.04.003
ISSN：
0008-6223
-
Resonant Silicon Micromirror with Electrophated Carbon Nanotubes-Nickel Composite Beams for MEMS Application
Ahonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono
The IEEE International Nanoelectonics Conference 6 173 2014/07/28
-
Micro/Nano-mechanical Resonators for Ultimate Sensing
Invited
Peer-reviewed
Takahito Ono, Naoki Inomata, Masaya Toda
The Asia-Pacific Conference on Transducers and Micro/Nano Technologies 7 1 2014/06/29
-
SYNTHESIS AND CHARACTERIZATION OF CARBON NANOTUBES-NICKEL COMPOSITE WITH HIGH CONTENT OF CARBON NANOTUBES
Peer-reviewed
Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono
The Asia-Pacific Conference on Transducers and Micro/Nano Technologies 7 14-5 2014/06/29
-
MICROSTAGE DRIVEN BY COMB-DRIVE ACTUATORS FOR LOW TEMPERATURE MEASUREMENT SYSTEMS
Peer-reviewed
Gaopeng Xue, Masaya Toda, Takahito Ono
The Asia-Pacific Conference on Transducers and Micro/Nano Technologies 7 7-1 2014/06/29
-
Temperature changes in brown adipocytes detected with a bimaterial microcantilever
Peer-reviewed
Masaaki K. Sato, Masaya Toda, Naoki Inomata, Hisataka Maruyama, Yuko Okamatsu-Ogura, Fumihito Arai, Takahito Ono, Akihiko Ishijima, Yuichi Inoue
Biophysical Journal 106 (11) 2458-2464 2014/06/03
DOI：
10.1016/j.bpj.2014.04.044
ISSN：
0006-3495
eISSN：
1542-0086
-
Fabrication of nano-gap structures based on plastic deformation of strained Si springs by stiction effects
International-journal
Peer-reviewed
Masaya Toda, Atsushi Yokoyama, Nguyen Van Toan, Naoki Inomata, Takahito Ono
Microsystem Technologies 21 (3) 649-654 2014/05/01
DOI：
10.1007/s00542-014-2182-z
ISSN：
0946-7076
eISSN：
1432-1858
-
Calibration study of bimaterial cantilever beam nanocalorimeter used in liquid applications
Peer-reviewed
Masaya Toda, Ioana Voiculescu, Fei Liu, Takahito Ono
Proceedings of the International Workshop on Nanomechanical Sensors 11 112-113 2014/04/30
-
Thin Polyelectrolyte Multilayers Made by Inkjet Printing and Their Characterization by Nanomechanical Cantilever Sensors
International-journal
International-coauthorship
Peer-reviewed
Masaya Toda, Yun Chen, Sebastian K. Nett, Akiko N. Itakura, Jochen Gutmann, Ruediger Berger
JOURNAL OF PHYSICAL CHEMISTRY C 118 (15) 8071-8078 2014/04
DOI：
10.1021/jp501464j
ISSN：
1932-7447
-
Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis
Peer-reviewed
Liang He, Masaya Toda, Yusuke Kawai, Hidetoshi Miyashita, Mamoru Omori, Toshiyuki Hashida, Rüdiger Berger, Takahito Ono
Microsystem Technologies 20 (2) 201-208 2014/02
DOI：
10.1007/s00542-013-1771-6
ISSN：
0946-7076
-
A capacitive silicon resonator with a movable electrode structure for gap width reduction
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Yusuke Kawai, Takahito Ono
Journal of Micromechanics and Microengineering 24 (2) 025006-1-025006-11 2014/02
DOI：
10.1088/0960-1317/24/2/025006
ISSN：
0960-1317
eISSN：
1361-6439
-
Ultrasensitive Si nanowire probe for magnetic resonance detection
Peer-reviewed
Yong Jun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 151-154 2014
DOI：
10.1109/MEMSYS.2014.6765596
ISSN：
1084-6999
-
A long bar type silicon resonator with a high quality factor
Peer-reviewed
Nguyen Van Toan, Masaya Toda, Yusuke Kawai, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 134 (2) 26-31+2 2014
DOI：
10.1541/ieejsmas.134.26
ISSN：
1341-8939
eISSN：
1347-5525
-
Synthesis and characterization of carbon nanotube-Cu composite using supercritical fluid deposition
Peer-reviewed
Zhonglie An, Masaya Toda, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 134 (2) 38-39 2014
DOI：
10.1541/ieejsmas.134.38
ISSN：
1341-8939
eISSN：
1347-5525
-
Fabrication of silicon nanowire probe with magnet for magnetic resonance force microscopy
Peer-reviewed
Yong Jun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 134 (6) 166-167 2014
DOI：
10.1541/ieejsmas.134.166
ISSN：
1341-8939
eISSN：
1347-5525
-
J2230201 Miniature Fourier transform infrared spectrometer for analyzing of body components using attenuated total reflection method
SATO Yuki, TANAHASHI Tatsuyuki, TODA Masaya, INOMATA Naoki, ONO Takahito
The Proceedings of Mechanical Engineering Congress, Japan 2014 (0) _J2230201--_J2230201- 2014
Publisher:
一般社団法人 日本機械学会
-
Carbon nanotube-Cu Composite Formation based on Supercritical Fluid Process
Peer-reviewed
Zhonglie An, Masaya Toda, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 30 6AM2-A-1-1-6AM2-A-1-5 2013/11/05
Publisher:
Institute of Electrical Engineers of Japan
-
A Si Nanowire Probe with a Nd-Fb-B magnet for Force Detection
Peer-reviewed
Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 30 6PM1-A-2-1-6PM1-A-2-5 2013/11/05
Publisher:
Institute of Electrical Engineers of Japan
-
An electrostatically driven microstage with capacitive displacement sensor for low temperature operation
Peer-reviewed
Gaopeng Xue, Masaya Toda, Liang He, Yusuke Kawai, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 30 6PM3-PSS-22-1-6PM3-PSS-22-4 2013/11/05
Publisher:
Institute of Electrical Engineers of Japan
-
Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors
Peer-reviewed
Akiko N. Itakura, Masaya Toda, Koji Miyake, Renate Foerch, Ruediger Berger
JAPANESE JOURNAL OF APPLIED PHYSICS 52 (11) 110111-1-110111-5 2013/11
DOI：
10.7567/JJAP.52.110111
ISSN：
0021-4922
eISSN：
1347-4065
-
Silicon Nanowire Probe with Nd-Fe-B magnet for Magnetic Resonance Force Microscopy
Peer-reviewed
Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
International Conference on Micro and Nano Engineering 39 208 2013/09/16
-
Synthesis of Carbon Nanotubes-Cu Composite Film using Supercritical Fluid Deposition for Thermal Interface
Peer-reviewed
Zhonglie An, Masaya Toda, Takahito Ono
International Conference on Micro and Nano Engineering 39 483 2013/09
-
Si Nanowire Probe with a magnet for Magnetic ResonanceDetection
Peer-reviewed
Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013) 4 P-02 2013/08/22
-
Supercritical Fluid Deposition and Characterization of Carbon Nanotubes-Cu composite
Peer-reviewed
Zhonglie An, Masaya Toda, Takahito Ono
Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013) 4 O-06 2013/08/22
-
Pico-calorimeter using a resonant thermal sensor
Peer-reviewed
Naoki Inomata, Masaya Toda, Takahito Ono
Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013) 4 P-01 2013/08/22
-
Fabrication of an hermetically packaged silicon resonator on LTCC substrate
Peer-reviewed
Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
Microsystem Technologies 19 (8) 1165-1175 2013/08
DOI：
10.1007/s00542-012-1716-5
ISSN：
0946-7076
-
Suspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquid
International-journal
Peer-reviewed
Masaya Toda, Tomoyuki Otake, Hidetoshi Miyashita, Yusuke Kawai, Takahito Ono
Microsystem Technologies 19 (7) 1049-1054 2013/07
DOI：
10.1007/s00542-012-1698-3
ISSN：
0946-7076
-
SILICON NANOWIRE PROBE FOR MAGNETIC RESONANCE FORCE MICROSCOPY
Peer-reviewed
YongJun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
Proceedings of the International Workshop on Nanomechanical Sensing 10 59-60 2013/05/01
-
POLYELECTROLYTE MULTILAYERS ON MCS MADE BY INKJET PRINTING
Peer-reviewed
Masaya Toda, Yun Chen, Sebastian Nett, Jochen Gutmann, Ruediger Berger
Proceedings of the International Workshop on Nanomechanical Sensing 10 105-106 2013/05/01
-
CANTILEVERS FOR NANOSENSING: CALORIMETRY FOR A LIVING CELL
Peer-reviewed
Masaya Toda, Naoki Inomata, Masaaki Sato, Akihiko Ishijima, Takahito Ono
Proceedings of the International Workshop on Nanomechanical Sensors 17 35-36 2013/05/01
-
Fabrication and packaging process of silicon resonators capable of the integration of LSI for application of timing device
Peer-reviewed
Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 26 377-380 2013
DOI：
10.1109/MEMSYS.2013.6474257
ISSN：
1084-6999
-
Miniature Fourier transform infrared spectrometer for middle infrared wavelength range
Peer-reviewed
Tatsuyuki Tanahashi, Masaya Toda, Hidetoshi Miyashita, Takahito Ono
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 17 2509-2512 2013
DOI：
10.1109/Transducers.2013.6627316
-
J026032 Resonant thermal sensor isolated in vacuum for biological samples
INOMATA Naoki, TODA Masaya, ONO Takahito
The Proceedings of Mechanical Engineering Congress, Japan 2013 (0) _J026032-1-_J026032-3 2013
Publisher:
一般社団法人 日本機械学会
-
166 Microchanneled calorimeter for picoliter liquid sample
Xia Ning, Toda Masaya, Inomata Naoki, Ono Takahito
The Proceedings of Conference of Tohoku Branch 2013 (0) 134-135 2013
Publisher:
一般社団法人 日本機械学会
-
High sensitive Si cantilevers for magnetic resonance force microscopy
Peer-reviewed
Masaya Toda, Yong Jun Seo, Yusuke Kawai, Hidetoshi Miyashita, Takahito Ono
Proceedings of the International Microprocesses & Nanotechnology Conference 25 1P-7-61-1-1P-7-61-2 2012/10/30
-
マイクロアセンブリにより作製した小型 Si フーリエ変換赤外分光計
Peer-reviewed
棚橋辰之, 戸田雅也, 宮下英俊, 小野崇人
「センサ・マイクロマシンと応用システム」シンポジウム論文集 29 417-422 2012/10/22
-
Young’s Modulus of MWCNT-Carbon Cantilevered Microstructures
Peer-reviewed
Liang He, Masaya Toda, Yusuke Kawai, Mamoru Omori, Toshiyuki Hashida, Takahito Ono
International Conference on Micro and Nano Engineering 38 P173-208 2012/09/16
-
Design and Fabrication of Capacitive Silicon Resonator on LTCC substrate
Peer-reviewed
Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
International Conference on Micro and Nano Engineering 38 P286-131 2012/09/16
-
FABRICATION OF HERMETICALLY-PACKAGED CAPACITIVE RESONATOR ON LTCC SUBSTRATE
Peer-reviewed
Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
Proceedings of the Asia-Pacific Conference on Transducers and Micro/Nano Technologies 6 ac12000268-1-ac12000268-2 2012/07/07
-
Pico calorimeter for detection of heat produced in an individual brown fat cell
Peer-reviewed
Naoki Inomata, Masaya Toda, Masaaki Sato, Akihiko Ishijima, Takahito Ono
Applied Physics Letters 100 (15) 154104-1-154104-4 2012/04
DOI：
10.1063/1.3701720
ISSN：
0003-6951
-
Acoustic spin pumping: Direct generation of spin currents from sound waves in Pt/Y <inf>3</inf>Fe <inf>5</inf>O <inf>12</inf> hybrid structures
Peer-reviewed
K. Uchida, H. Adachi, T. An, H. Nakayama, M. Toda, B. Hillebrands, S. Maekawa, E. Saitoh
Journal of Applied Physics 111 (5) 053903-1-053903-8 2012/03/01
DOI：
10.1063/1.3688332
ISSN：
0021-8979
-
3PS013 Quantitative analysis of heat production of brown adipocytes using bimetal cantilever(The 50th Annual Meeting of the Biophysical Society of Japan)
Sato Masaaki, Toda Masaya, Inomata Naoki, Inoue Yuichi, Ono Takahito, Ishijima Akihiko
Seibutsu Butsuri 52 S148 2012
Publisher:
The Biophysical Society of Japan General Incorporated Association
DOI：
10.2142/biophys.52.S148_1
-
Resonant thermal sensor for a living cell in liquid
Peer-reviewed
Naoki Inomata, Masaya Toda, Masaaki Sato, Akihiko Ishijima, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 25 108-111 2012
DOI：
10.1109/MEMSYS.2012.6170105
ISSN：
1084-6999
-
Fabrication of a Si-PZT hybrid XY-microstage with CNT-carbon hinges
Peer-reviewed
Liang He, Masaya Toda, Yusuke Kawai, Mohd Faizul Sarbi, Mamoru Omori, Toshiyuki Hashida, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 132 (11) 425-426 2012
DOI：
10.1541/ieejsmas.132.425
ISSN：
1341-8939
eISSN：
1347-5525
-
Redox active polymers with phenothiazine moieties for nanoscale patterning via conductive scanning force microscopy
Peer-reviewed
Ali A. Golriz, Tassilo Kaule, Jeannine Heller, Maria B. Untch, Philipp Schattling, Patrick Theato, Masaya Toda, Shinya Yoshida, Takahito Ono, Hans Jürgen Butt, Jochen Stefan Gutmann, Rüdiger Berger
Nanoscale 3 (12) 5049-5058 2011/12
DOI：
10.1039/c1nr10917k
ISSN：
2040-3364
eISSN：
2040-3372
-
Surface-acoustic-wave-driven spin pumping in Y<inf>3</inf>Fe <inf>5</inf>O<inf>12</inf>/Pt hybrid structure
Peer-reviewed
Ken Ichi Uchida, Toshu An, Yosuke Kajiwara, Masaya Toda, Eiji Saitoh
Applied Physics Letters 99 (21) 212501-1-212501-3 2011/11/21
DOI：
10.1063/1.3662032
ISSN：
0003-6951
-
Vacuum-packaged Resonant Thermal Sensor for Biological Cell in Liquid
Peer-reviewed
Naoki Inomata, Masaya Toda, Takahito Ono
International Microprocesses & Nanotechnology Conference 24 27B-10-3-1-27B-10-3-2 2011/10/24
-
Microchanneled resonant heat sensor for a living cell
Peer-reviewed
Masaya Toda, Tomoyuki Otake, Naoki Inomata, Takahito Ono
International Microprocesses & Nanotechnology Conference 24 27P-11-95-1-27P-11-95-2 2011/10/24
-
Long-range spin Seebeck effect and acoustic spin pumping
Peer-reviewed
K. Uchida, H. Adachi, T. An, T. Ota, M. Toda, B. Hillebrands, S. Maekawa, E. Saitoh
Nature Materials 10 (10) 737-741 2011/10
DOI：
10.1038/nmat3099
ISSN：
1476-1122
eISSN：
1476-4660
-
Fabrication of einzel lens array with one-mask reactive ion etching process for electron micro-optics
Peer-reviewed
Hidetoshi Miyashita, Eiichi Tomono, Yusuke Kawai, Masaya Toda, Masayoshi Esashi, Takahito Ono
Japanese Journal of Applied Physics 50 (10 PART 1) 106503-1-106503-5 2011/10
DOI：
10.1143/JJAP.50.106503
ISSN：
0021-4922
eISSN：
1347-4065
-
液中における細胞熱計測のための 真空封止マイクロカンチレバー型熱量センサ
Peer-reviewed
猪股直生, 戸田雅也, 小野崇人
「センサ・マイクロマシンと応用システム」シンポジウム論文集 28 617-622 2011/09/26
-
High Aspect Ratio Carbon Nanotube-Carbon Composite Microstructures Fabricated by Silicon Molding Technique
Peer-reviewed
Liang He, Masaya Toda, Yusuke Kawai, Mamoru Omori, Toshiyuki Hashida, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 28 371-374 2011/09/26
-
Measurements of the phase transition and the average length of the density fluctuation under supercritical fluid using micromechanical resonators
International-journal
Peer-reviewed
Masaya Toda, Takashi Fujii, Atsushi Yoshida, Toshiyuki Hashida, Takahito Ono
Applied Physics Letters 99 (7) 074101-1-074101-3 2011/08/15
DOI：
10.1063/1.3610942
ISSN：
0003-6951
-
Micro wishbone interferometer for Fourier transform infrared spectrometry
Peer-reviewed
Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono
Journal of Micromechanics and Microengineering 21 (6) 065039-1-065039-1 2011/06
DOI：
10.1088/0960-1317/21/6/065039
ISSN：
0960-1317
eISSN：
1361-6439
-
Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring
Peer-reviewed
Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 24 716-719 2011
DOI：
10.1109/MEMSYS.2011.5734525
ISSN：
1084-6999
-
Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique
Peer-reviewed
Liang He, Masaya Toda, Yusuke Kawai, Hidetoshi Miyashita, Chuanyu Shao, Mamoru Omori, Toshiyuki Hashida, Takahito Ono
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 16 2331-2334 2011
DOI：
10.1109/TRANSDUCERS.2011.5969549
-
Bimorph cantilevers actuated by focused laser from the side
Peer-reviewed
Masaya Toda, Naoki Inomata, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 131 (9) 327-331 2011
DOI：
10.1541/ieejsmas.131.327
ISSN：
1341-8939
eISSN：
1347-5525
-
Ultra-high sensitive bimorph cantilever for heat sensing
Peer-reviewed
Masaya Toda, Naoki Inomata, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 27 371-374 2010/10/14
-
Integratin of Nanomaterials into Microsystem
Invited
Takahito Ono, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, He Liang, Masayoshi Esashi
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology 5 46-46 2010/07
-
Evaluation of bimaterial cantilever beam for heat sensing at atmospheric pressure
International-journal
International-coauthorship
Peer-reviewed
Masaya Toda, Takahito Ono, Fei Liu, Ioana Voiculescu
Review of Scientific Instruments 81 (5) 055104-1-055104-6 2010/05
DOI：
10.1063/1.3397320
ISSN：
0034-6748
-
Swelling of Composite Films at Interfaces
International-journal
International-coauthorship
Peer-reviewed
Masaya Toda, Yvonne Joseph, Ruediger Berger
JOURNAL OF PHYSICAL CHEMISTRY C 114 (5) 2012-2017 2010/02
DOI：
10.1021/jp9087578
ISSN：
1932-7447
-
Micro Wishbone interferometer for miniature FTIR spectrometer
Peer-reviewed
Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono
IEEJ Transactions on Sensors and Micromachines 130 (7) 333-334 2010
DOI：
10.1541/ieejsmas.130.333
ISSN：
1341-8939
eISSN：
1347-5525
-
Miniature interferometer with corner cube mirrors
Peer-reviewed
Young Min Lee, Masaya Toda, Takahito Ono, Masayoshi Esashi
Proceedings of IEEE Sensors 9 65-70 2010
DOI：
10.1109/ICSENS.2010.5690828
ISSN：
1930-0395
-
Microsystems for Nanoscale Processing
Invited
Takahito Ono, Hidetoshi Miyashita, Yusuke Kawai, Masaya Toda, Masayoshi Esashi
Proceeding of the International Workshop on Nanotechnology and Application 83-86 2009/11
-
Fabrication of Electrostatic Actuated Totary for Micro Interferometer
Young Min Lee, Masaya Toda, Takahito Ono, Masayoshi Esashi
Abstracts of the 2009 International Conference on Solid State Devices and Materials 681-682 2009/10
-
Heat Sensing with Self-excited Microcantilever in Water
Peer-reviewed
Masaya Toda, Takahito Ono, Wonje Cho, Masayoshi Esashi
Proceedings of the International Workshop on Nanomechanical Sensors 6 L4.4-1-L4.4-3 2009/05/20
-
Fabrication of Rotary Comb Drive Actuator for Micro Wishbone Interferometer
Peer-reviewed
Young-Min LEE, Masaya Toda, Masayoshi Esashi, Takahito Ono
「センサ・マイクロマシンと応用システム」シンポジウム論文集 26 618-621 2009
-
Polyelectrolyte Multilayers coated by Nano-Plotting
Peer-reviewed
Masaya Toda, Sebastian Nett, Jochen Gutmann, Ruediger Berger
Proceedings of the European Conference on Surface Science 25 437-438 2008/06/28
-
Nano-Plotting of Polyelectrolyte Multilayers
Peer-reviewed
Masaya Toda, Sebastian Nett, Jochen Stefan Gutmann, Ruediger Berger
Proceedings of the International Workshop on Nanomechanical Sensors 5 67-68 2008/05/19
-
Fabrication of nano mechanical probe for thermal sensing
Peer-reviewed
Masaya Toda, Takahito Ono, Wonje Cho, Sang-Jin Kim, Masayoshi Esashi
Proceedings of the International Workshop on Nanomechanical Sensors 5 211-212 2008/05/19
-
Transduction of swelling of Au-nanoparticle films into a nanomechanical motion
Peer-reviewed
Masaya Toda, Hans-Juergen Butt, Ruediger Berger, Yvonne Joseph, Tobias Vossmeyer, Akio Yasuda
Proceedings of the International Workshop on Nanomechanical Sensors 5 213-214 2008/05/19
-
Young's modulus measurement of plasma-polymerized allylamine films using micro cantilever sonsors
Peer-reviewed
Akiko Nakamura Itakura, Andrey Grinevich, Masaya Toda, Renate Foerch, Ruediger Berger
Proceedings of the European Conference on Surface Science 25 378-379 2008/05/19
-
Surface stress, thickness, and mass of the first few layers of polyelectrolyte
International-journal
International-coauthorship
Peer-reviewed
Masaya Toda, Akiko N. Itakura, Shinichi Igarashi, Karsten Buescher, Jochen S. Gutmann, Karlheinz Graf, Ruediger Berger
LANGMUIR 24 (7) 3191-3198 2008/04
DOI：
10.1021/la7028214
ISSN：
0743-7463
-
Young's modulus of thin films
Itakura Akiko, Grinevich Angrey, Toda Masaya, Berger Ruediger
Abstract of annual meeting of the Surface Science of Japan 27 (0) 123-123 2007
Publisher:
公益社団法人 日本表面科学会
-
Swelling signals of polymer films measured by a combination of micromechanical cantilever sensor and surface plasmon resonance spectroscopy
Peer-reviewed
Shinichi Igarashi, Akiko N. Itakura, Masaya Toda, Masahiro Kitajima, Liqiang Chu, Anye N. Chifene, Renate Foerch, Ruediger Berger
SENSORS AND ACTUATORS B-CHEMICAL 117 (1) 43-49 2006/09
DOI：
10.1016/j.snb.2005.11.001
ISSN：
0925-4005
-
SURFACE STRESS OF POLYELECTROLYTE ADSORPTION
Peer-reviewed
Masaya Toda, Akiko Nakamura Itakura, Junichi Yanagisawa, Shinichi Igarashi, Karsten Buescher, Karlheinz Graf, Ruediger Berger
Proceedings of the International Workshop on Nanomechanical Sensors 3 33-34 2006/05/07
-
SWELLING OF PLASMA-POLYMERIZED FILM
Peer-reviewed
Shinichi Igarashi, Akiko Nakamura Itakura, Masaya Toda, Masahiro Kitajima, Daisuke Fujita, Chu, L, Renate Foerch, Ruediger Berger
Proceedings of the International Workshop on Nanomechanical Sensors 3 90-91 2006/05/07
-
LOCAL STRESS ARRANGEMENT BY UV IRRADIATION ON PLASMA
Peer-reviewed
Akiko Nakamura Itakura, Shinichi Igarashi, Masaya Toda, Masahiro Kitajima, Renate Foerch, Ruediger Berger
Proceedings of the International Workshop on Nanomechanical Sensors 3 96-97 2006/05/07
-
Surface stress of polyelectrolyte adsorption measured by micromechanical cantilever sensors
International-journal
International-coauthorship
Peer-reviewed
Masaya Toda, Akiko Nakamura Itakura, Karsten Büscher, Karlheinz Graf, Rüdiger Berger
e-Journal of Surface Science and Nanotechnology 4 96-99 2006/01/19
DOI：
10.1380/ejssnt.2006.96
ISSN：
1348-0391
-
YOUNG’S MODULUS OF PLASMA-POLYMERIZED ALLYLAMINE FILMS
Peer-reviewed
Shinichi Igarashi, Akiko Nakamura Itakura, Masaya Toda, Renate Foerch, Ruediger Berger, Koji Miyake, Kenji Sakurai, Masahiro Kitajima, Daisuke Fujita
Proceedings of the European Conference on Surface Science 24 211 2006
-
Formation of GaN layer on SiN surface using low-energy Ga ion implantation
International-journal
Peer-reviewed
J Yanagisawa, M Toda, T Kitamura, H Matsumoto, Y Akasaka
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 23 (6) 3205-3208 2005/11
DOI：
10.1116/1.2134722
ISSN：
1071-1023
-
Surface stress and film growth of organic films
Itakura Akiko, Igarashi Shinichi, Toda Masaya, Berger Ruediger, Kitajima Masahiro
Abstract of annual meeting of the Surface Science of Japan 25 (0) 50-50 2005
Publisher:
公益社団法人 日本表面科学会
-
Stress control on Si surface with ultraviolet light irradiation to plasma polymerized film
Igarashi Shinichi, Itakura Akiko N, Toda Masaya, Kitajima Masahiro, Chu Liqiang, Chifen Anye N, Foerch Renate, Berger Ruediger
Abstract of annual meeting of the Surface Science of Japan 25 (0) 57-57 2005
Publisher:
公益社団法人 日本表面科学会
-
Formation of GaN films by Ga ion direct deposition under nitrogen radical atmosphere
International-journal
Peer-reviewed
M Toda, J Yanagisawa, K Gamo, Y Akasaka
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 22 (6) 3012-3015 2004/11
DOI：
10.1116/1.1808733
ISSN：
1071-1023
-
The stress and thickness of Alkanethiol film
Itakura Akiko, Igarashi Shin-ichi, Toda Masaya, Kitajima Masahiro, Berger Ruediger
Abstract of annual meeting of the Surface Science of Japan 24 (0) 80-80 2004
Publisher:
公益社団法人 日本表面科学会
