TOHOKU UNIVERSITY Researchers

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I Ko

Section

Graduate School of Engineering

Job title

Professor

Degree

博士（工学）（東北大学）

researchmap

https://researchmap.jp/read0184455

J-GLOBAL ID

200901053507837284

Research History 7

2022/04 - Present

High Energy Accelerator Research Organization (KEK)　Visiting Professor
2016/12 - Present

Chongqing University　Visiting Professor
2007/04 - Present

Tohoku University　Graduate School of Engineering　Professor
1998/04 - 2007/03

Tohoku University　Faculty of Engineering　Associate Professor
1998/02 - 1998/12

University of North Carolina at Charlotte　Center for Precision Metrology　Research Professor
1996/07 - 1998/03

Tohoku University　Faculty of Engineering　Lecturer
1994/04 - 1996/06

Tohoku University　Faculty of Engineering　Research Associate

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Professional Memberships 6

International Institution for Production Engineering Research (CIRP)
International Society for Nanomanufacturing
国際光学学会(SPIE)
日本機械学会
米国精密工学会(The American Society for Precision Engineering)
精密工学会

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Research Interests 5

Applied Optical Metrology
Precision Nanometrology
Precision metrology
Precision Positioning
Precision measurement of surface profile and error motion

Research Areas 3

Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Manufacturing and production engineering / Nano-machining
Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Machine elements and tribology / Precision Measurement
Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Design engineering / Precision Measurement

Awards 29

精密工学会沼田記念論文賞

2021/03　公益社団法人精密工学会
文部科学大臣表彰科学技術賞（研究部門）

2019/04　文部科学省　自律的校正法に基づく精密ナノ計測学の構築と応用の研究
精密工学会沼田記念論文賞

2019/03　公益社団法人精密工学会　Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale grating
Paper Award

2018/06　An optical lever by using a mode-locked laser for angle measurement
An optical lever by using a mode-locked laser for angle measurement

2018/03
優秀講演論文表彰

2017/11　（一社）日本機械学会生産加工・工作機械部門　Ultra-precision angle sensor with a mode-locked laser source
Best Paper Award

2017/09　第１３回計測技術と知的測定機に関する国際会議（ISMTII）組織委員会　Non-contact detection of surface defects by using a micro thermal sensor
Spindle Error Motion Measurement of Concentricity Gage by Using Laser Scan Micrometer

2016/08　第５回国際ナノ加工に関する国際会議（nanoMan）組織委員会
Excellent Paper Award

2015/11　The Editional and Review Committee of the 11st CJUMP
Excellent Paper Award

2015/11　The Editional and Review Committee of the 11st CJUMP　Excellent Paper Award
工作機械技術振興賞(論文賞)

2015/06　公益社団法人工作機械技術振興財団
Exellent paper award

2014/09/04　IMEKO　Design of an optical system for evaluation of edge contour of a diamond cutting tool
優秀講演論文表彰

2013/11/07　日本機械学会　Constrction of a surface profile measurement system by using a nanopipette ball probe with shear-force detection
優秀講演論文表彰

2012/10/27　日本機械学会　接触型熱検知センサによる平滑面欠陥検出の実験的原理検討
精密工学会沼田記念論文賞

2011/03/15　（社）精密工学会　Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness
精密工学会論文賞

2010/03/17　精密工学会　マイクロ切削工具切れ刃形状の三次元測定装置に関する研究ー測定装置の構築と切れ刃形状測定実験ー
Best Paper Award

2009/12/11　ASPEN2009　Development of a highly sensitive angle sensor by using single-cell photodiodes
Contribution Award

2007/11/01　International Journal of Precision Engineering and Manufacturing
ファナックFAロボット財団論文賞

2005/03/04　（財）ファナックロボット財団　サーフェスエンコーダのための大面積２次元正弦波格子形状の精密ナノ創成と評価
精密工学会賞

2004/03/17　（社）精密工学会　Precision Nano-fabrication and evaluation of a large sinusoidal grid surface for a surface encoder
日本機械学会東北支部技術研究賞

2004/03/13　日本機械学会東北支部　マルチプローブ型円筒形状測定機の開発
Best Paper in Materials Processing,

2003/05/23　The 4th International Conference on Intelligent Processing and Manufacturing of Materials　Ductile Machining Phenomena of Nominally Brittle Materials at the Nanoscale, The 4th International Conference on Intelligent Processing and Manufacturing of Materials
精密工学会沼田記念論文賞

2003/03/27　（社）精密工学会　マルチスポット光源を用いたサーフェスエンコーダの研究
精密工学会学術講演会ベストオーガナイザー賞

2001/03　精密工学会
1999年度精密工学会秋季大会学術講演会ベストプレゼンテーション賞

1999/09/29　精密工学会　「多点法におけるゼロ点調整について」
精密工学会高城賞

1998/09/24　精密工学会　ソフトウエアデータムを利用したオンマシン形状測定に関する研究
精密工学会賞

1998/03/19　精密工学会　論文：幾何量センサのその場自律校正法の研究、精密工学会誌、63, 10(1997)
1996年度日本機械学会奨励賞（研究）(JSME Awards for Young Engineers)

1997/04/01　日本機械学会(JSME)　オンマシン形状測定(On-machine Profile Measurement)
1995年度トーキン科学技術財団研究奨励賞(Award for Young Engineers)

1996/03/12　トーキン科学技術財団(Tokin Scientific Foundation)　混合法による真直度と真円度の超精密測定(Measurement of Straightness and Roundness by Using the Mixed Method)

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Papers 514

An absolute surface encoder employing a mode-locked femtosecond laser

Ryo Sato, Hiraku Matsukuma, Wei Gao

Holography, Diffractive Optics, and Applications XIV　47-47　2024/11/23
Publisher: SPIE
DOI： 10.1117/12.3035032 　
Improvement of angle measurement sensitivity using second harmonic wave interference

Jiahui Lin, Hiraku Matsukuma, Kuangyi Li, Ryo Sato, Wei Gao

Optics Express　32　(23)　40915-40915　2024/10/25
Publisher: Optica Publishing Group
DOI： 10.1364/oe.537872 　

eISSN： 1094-4087

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This paper presents the angular displacement measurement based on second harmonic generation (SHG). In our previous study, the angular resolution of sub-arcsecond was achieved. In this paper, three kinds of sensors based on SHG are reported. In these three sensors, the angular displacement is determined from the intensity of the SHG signal since the SHG is sensitive to the angle of the incident light. Two of these sensors in this study utilize the interference of SHG to improve the sensitivity performance. Comparing with the sensors which have been studied before, interference type sensors in this study allow the femtosecond laser to pass through the nonlinear optical crystal twice, which leads to a significant sensitivity improvement. The principles were verified by both simulation and experiment. In the simulation part, the sensitivities of these three kinds of sensors are compared. In the experiment, the sensitivities were confirmed to be consistent with the simulation. Additionally, the resolution of the presented systems is evaluated and sub-0.1-arcsecond is achieved.
Design and testing of a two-axis surface encoder with a single Littrow configuration of a first-order diffraction beam

Yifan Hong, Ryo Sato, Hiraku Matsukuma, Wei Gao

Precision Engineering　2024/10
Publisher: Elsevier BV
DOI： 10.1016/j.precisioneng.2024.10.019 　

ISSN： 0141-6359
A dual-detection chromatic confocal probe employing a mode-locked femtosecond laser

Ryo Sato, Chen Li, Hiraku Matsukuma, Wei Gao

Optical Manufacturing and Testing 2024　1-1　2024/09/30
Publisher: SPIE
DOI： 10.1117/12.3026365 　
Advanced Sensing and Machine Learning Technologies for Intelligent Measurement in Smart and Precision Manufacturing

Ryo Sato, Kuangyi Li, Masaki Michihata, Satoru Takahashi, Wei Gao

International Journal of Automation Technology　18　(4)　545-580　2024/07/05
Publisher: Fuji Technology Press Ltd.
DOI： 10.20965/ijat.2024.p0545 　

ISSN： 1881-7629

eISSN： 1883-8022

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This paper provides an overview of state-of-the-art sensing and machine learning technologies for intelligent measurement in smart and precision manufacturing. Length, angle, and force are identified as the fundamental quantities for production quality management based on process monitoring as well as geometrical metrology in optical lithography and mechanical machining. Advancements in length-based measurement technologies such as laser interferometers and optical encoders, as well as advancements regarding depth and thickness measurements, are presented. Various types of optical microscopes, such as evanescent field microscopes, structured illumination microscopes, and confocal microscopes, are also described. For angle-based measurement technologies, in addition to the conventional continuous-wave laser autocollimators, the newly developed Fabry–Pérot angle sensor and nonlinear optics angle sensor using an ultrashort pulse laser are presented. Finally, on-machine and in-process force sensing and machining learning techniques for dimensional and machining process monitoring are reviewed.
An Improved Data Processing Algorithm for Spectrally Resolved Interferometry Using a Femtosecond Laser

Tao Liu, Hiraku Matsukuma, Amane Suzuki, Ryo Sato, Wei Gao

Sensors　24　(9)　2869-2869　2024/04/30
Publisher: MDPI AG
DOI： 10.3390/s24092869 　

eISSN： 1424-8220

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Spectrally resolved interferometry utilizing a femtosecond laser is widely employed for absolute distance measurement. However, deviations in the output time pulse of the conventional algorithm through inverse Fourier transform are inevitable. Herein, an improved data processing algorithm employing a time-shifting parameter is proposed to improve the accuracy of spectrally resolved interferometry. The principle of the proposed time-shifting algorithm is analyzed theoretically after clarifying the deviation source of the conventional algorithm. Simulation and experimental work were conducted to indicate the improvement in the accuracy of the output absolute distance. The results demonstrated that the proposed algorithm could reduce the deviation of output distances towards the reference values, reaching 0.58 μm by half compared to the conventional algorithm. Furthermore, the measurement uncertainty was evaluated using the Guide to the Expression of Uncertainty in Measurement (GUM), resulting in an expanded uncertainty of 0.71 μm with a 95% confidence.
Design of an Optical Head with Two Phase-Shifted Interference Signals for Direction Detection of Small Displacement in an Absolute Surface Encoder

Ryo Sato, Tao Liu, Satoru Maehara, Ryota Okimura, Hiraku Matsukuma, Wei Gao

International Journal of Automation Technology　18　(2)　249-256　2024/03

DOI： 10.20965/ijat.2024.p0249 　

ISSN： 1881-7629

eISSN： 1883-8022
Enhanced Data-Processing Algorithms for Dispersive Interferometry Using a Femtosecond Laser

Tao Liu, Hiraku Matsukuma, Amane Suzuki, Ryo Sato, Wei Gao

Sensors　24　(2)　370-370　2024/01/08
Publisher: MDPI AG
DOI： 10.3390/s24020370 　

eISSN： 1424-8220

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Dispersive interferometry based on a femtosecond laser is extensively utilized for achieving absolute distance measurements with high accuracy. However, this method cannot measure arbitrary distances without encountering a dead zone, and deviations in its output results are inevitable due to inherent theory limitations. Therefore, two enhanced data-processing algorithms are proposed to improve the accuracy and reduce the dead zone of dispersive interferometry. The principles of the two proposed algorithms, namely the truncated-spectrum algorithm and the high-order-angle algorithm, are proposed after explaining the limitations of conventional methods. A series of simulations were conducted on these algorithms to show the improved accuracy of measurement results and the elimination of the dead zone. Furthermore, an experimental setup based on a dispersive interferometer was established for the application of these proposed algorithms to the experimental interference spectral signals. The results demonstrated that compared with the conventional algorithm, the proposed truncated-spectrum algorithm could reduce the output distance deviations derived from direct inverse Fourier transforming by eight times to reach as low as 1.3 μm. Moreover, the unmeasurable dead zone close to the zero position of the conventional algorithm, i.e., the minimum working distance of a dispersive interferometer, could be shortened to 22 μm with the implementation of the proposed high-order-angle algorithm.
Repetition Frequency Control of a Mid-Infrared Ultrashort Pulse Laser

Hiraku Matsukuma, Masashi Nagaoka, Hisashi Hirose, Ryo Sato, Yuki Shimizu, Wei Gao

International Journal of Automation Technology　18　(1)　84-91　2024/01/05
Publisher: Fuji Technology Press Ltd.
DOI： 10.20965/ijat.2024.p0084 　

ISSN： 1881-7629

eISSN： 1883-8022

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In this study, a method for controlling the repetition frequency of a mid-infrared ultrashort pulse laser with a central wavelength of 2.8 µm is developed. A ring cavity that is insensitive to the polarization state of the laser light emitted from the fiber end was constructed to stabilize the oscillation of the mid-infrared ultrashort pulse laser. More oscillation conditions for the ultrashort pulse laser based on nonlinear polarization rotation are found than the conventional method. To confirm that the pulse oscillation is mode-locked, ultrashort pulse oscillation was confirmed by an autocorrelator. The pulse repetition frequency of this robust ultrashort pulse laser was controlled. The control method was based on the phase-locked loop (PLL) control. A wedge window was inserted into the cavity and mounted on a linear stage driven by a piezoelectric transducer. By driving the piezoelectric transducer, the position of the wedge window changed, and the resulting optical path length also changed. The repetition frequency was controlled based on this principle. Optical path length control by the wedge window and temperature control provides an Allan deviation of approximately 1 mHz.
On-Machine Calibration of Pitch Deviations of a Linear Scale Grating by Using a Differential Angle Sensor

Jiucheng Wu, Yifang Hong, Dong Wook Shin, Ryo Sato, Lue Quan, Hiraku Matsukuma, Wei Gao

International Journal of Automation Technology　18　(1)　4-10　2024/01

DOI： 10.20965/ijat.2024.p0004 　

ISSN： 1881-7629

eISSN： 1883-8022
Angle Measurement Based on Second Harmonic Generation Using Artificial Neural Network

Kuangyi Li, Zhiyang Zhang, Jiahui Lin, Ryo Sato, Hiraku Matsukuma, Wei Gao

Nanomanufacturing and Metrology　6　(1)　2023/12

DOI： 10.1007/s41871-023-00206-5 　

ISSN： 2520-811X
Improved peak- to- peak method for cavity length measurement of a Fabry- Perot etalon using a mode-locked femtosecond laser

Dong Wook Shin, Hiraku Matsukuma, Ryo Sato, Eberhard Manske, Wei Gao

OPTICS EXPRESS　31　(16)　25797-25814　2023/07

DOI： 10.1364/OE.493507 　

ISSN： 1094-4087
Signal Processing and Artificial Intelligence for Dual-Detection Confocal Probes

Ryo Sato, Xinghui Li, Andreas Fischer, Liang-Chia Chen, Chong Chen, Rintaro Shimomura, Wei Gao

International Journal of Precision Engineering and Manufacturing　2023/06/27
Publisher: Springer Science and Business Media LLC
DOI： 10.1007/s12541-023-00842-3 　

ISSN： 2234-7593

eISSN： 2005-4602
Improved Algorithms of Data Processing for Dispersive Interferometry Using a Femtosecond Laser

Tao Liu, Jiucheng Wu, Amane Suzuki, Ryo Sato, Hiraku Matsukuma, Wei Gao

SENSORS　23　(10)　2023/05

DOI： 10.3390/s23104953 　

eISSN： 1424-8220
Machine tool calibration: Measurement, modeling, and compensation of machine tool errors

Wei Gao, Soichi Ibaraki, M. Alkan Donmez, Daisuke Kono, J.R.R. Mayer, Yuan-Liu Chen, Károly Szipka, Andreas Archenti, Jean-Marc Linares, Norikazu Suzuki

International Journal of Machine Tools and Manufacture　187　104017-104017　2023/04
Publisher: Elsevier BV
DOI： 10.1016/j.ijmachtools.2023.104017 　

ISSN： 0890-6955
Confocal probe based on the second harmonic generation for measurement of linear and angular displacements

Ryo Sato, Yuki Shimizu, Hiroki Shimizu, Hiraku Matsukuma, Wei Gao

OPTICS EXPRESS　31　(7)　11982-11993　2023/03

DOI： 10.1364/OE.486421 　

ISSN： 1094-4087
Autocollimation employing optical frequency comb

H. Matsukuma, K. Ikeda, R. Sato, W. Gao

Proceedings of SPIE - The International Society for Optical Engineering　12607　2023

DOI： 10.1117/12.3005523 　

ISSN： 0277-786X

eISSN： 1996-756X
Investigation of Angle Measurement Based on Direct Third Harmonic Generation in Centrosymmetric Crystals

Kuangyi Li, Jiahui Lin, Zhiyang Zhang, Ryo Sato, Hiroki Shimizu, Hiraku Matsukuma, Wei Gao

APPLIED SCIENCES-BASEL　13　(2)　2023/01

DOI： 10.3390/app13020996 　

eISSN： 2076-3417
Fabry-Pérot angle sensor using a mode-locked femtosecond laser source

Dong Wook Shin, Hiraku Matsukuma, Ryo Sato, Wei Gao

Optics Express　30　(26)　46366-46382　2022/12/19

DOI： 10.1364/OE.477435 　

eISSN： 1094-4087
Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer

Xin Xiong, Chenguang Yin, Lue Quan, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Hideaki Tamiya, Wei Gao

Sensors　22　(23)　2022/12

DOI： 10.3390/s22239348 　

ISSN： 1424-8220
Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range

Yifan Hong, Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Hiroki Shimizu, Wei Gao

Sensors　22　(23)　2022/12

DOI： 10.3390/s22239563 　

ISSN： 1424-8220
Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction

Lue Quan, Yuki Shimizu, Ryo Sato, Dong Wook Shin, Hiraku Matsukuma, Andreas Archenti, Wei Gao

International Journal of Automation Technology　16　(5)　572-581　2022/09/05
Publisher: Fuji Technology Press Ltd.
DOI： 10.20965/ijat.2022.p0572 　

ISSN： 1881-7629

eISSN： 1883-8022

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The design and testing of different optical heads were performed to evaluate the pitch deviation of a diffraction scale grating with a small diffraction angle. Based on the proposed pitch deviation evaluation method employing optical angle sensors based on laser autocollimation, a modified optical head with position-sensitive detectors (PSDs) is first designed and constructed by following the conventional optical configuration. Owing to the small angle of diffraction of the first-order diffracted beams, the modified optical head has a large working distance, resulting in poor sensor stability. Therefore, a novel and compact optical head employing a pair of small prisms is designed and developed to shorten the working distance of the optical head. An additional modification was also made to the developed compact optical head in such a way that collimator objectives (COs) in the laser autocollimation units are removed to improve the sensor sensitivity. Experimental comparisons were conducted using the three types of optical heads to verify the feasibility of the developed optical angle sensor with PSDs.
A Second Harmonic Wave Angle Sensor with a Collimated Beam of Femtosecond Laser

Wijayanti Dwi Astuti, Kuangyi Li, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao

APPLIED SCIENCES-BASEL　12　(10)　2022/05

DOI： 10.3390/app12105211 　

eISSN： 2076-3417
Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser

Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao

APPLIED SCIENCES-BASEL　12　(9)　2022/05

DOI： 10.3390/app12094736 　

eISSN： 2076-3417
A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range

Yifan Hong, Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao

SENSORS　22　(8)　2022/04

DOI： 10.3390/s22083010 　

eISSN： 1424-8220
Theoretical Investigation for Angle Measurement Based on Femtosecond Maker Fringe

Kuangyi Li, Wijayanti Dwi Astuti, Ryo Sato, Hiraku Matsukuma, Wei Gao

APPLIED SCIENCES-BASEL　12　(7)　2022/04

DOI： 10.3390/app12073702 　

eISSN： 2076-3417
Theoretical investigation of angle measurement based on third-harmonic generation (THG) with a femtosecond laser

Kuangyi Li, Jiahui Lin, Wijayanti Dwi Astuti, Ryo Sato, Hiraku Matsukuma, Wei Gao

nanoMan 2022 and AETS 2022 - 2022 8th International Conference on Nanomanufacturing and 4th AET Symposium on ACSM and Digital Manufacturing　2022

DOI： 10.1109/Nanoman-AETS56035.2022.10119491 　
Theoretical Analysis on Gauge Block Length Measurement by Excess Fraction method

Tao Liu, Jiucheng Wu, Ryo Sato, Hiraku Matsukuma, Wei Gao

nanoMan 2022 and AETS 2022 - 2022 8th International Conference on Nanomanufacturing and 4th AET Symposium on ACSM and Digital Manufacturing　2022

DOI： 10.1109/Nanoman-AETS56035.2022.10119521 　
Correction: Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors (Nanomanufacturing and Metrology, (2021), 4, 1, (53-66), 10.1007/s41871-020-00091-2)

Hiraku Matsukuma, Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki

Nanomanufacturing and Metrology　5　(4)　439　2022

DOI： 10.1007/s41871-022-00164-4 　

ISSN： 2520-811X
Mid-infrared autocollimation for linear motion error measurement

Hiraku Matsukuma, Kaede Matayoshi, Masashi Nagaoka, Yuki Shimizu, Wei Gao

Measurement: Sensors　18　2021/12

DOI： 10.1016/j.measen.2021.100265 　

eISSN： 2665-9174
Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation

Yuki Shimizu, Lue Quan, Dong Wook Shin, Hiraku Matsukuma, Wei Gao

Measurement: Sensors　18　2021/12

DOI： 10.1016/j.measen.2021.100135 　

eISSN： 2665-9174
An application of the edge reversal method for accurate reconstruction of the three-dimensional profile of a single-point diamond tool obtained by an atomic force microscope

Kai Zhang, Yuki Shimizu, Hiraku Matsukuma, Yindi Cai, Wei Gao

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY　117　(9-10)　2883-2893　2021/12

DOI： 10.1007/s00170-021-07879-6 　

ISSN： 0268-3768

eISSN： 1433-3015
A Comparison of the Probes with a Cantilever Beam and a Double-Sided Beam in the Tool Edge Profiler for On-Machine Measurement of a Precision Cutting Tool

Bo Wen, Sho Sekine, Shinichi Osawa, Yuki Shimizu, Hiraku Matsukuma, Andreas Archenti, Wei Gao

MACHINES　9　(11)　2021/11

DOI： 10.3390/machines9110271 　

eISSN： 2075-1702
A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

Xin Xiong, Yuki Shimizu, Hiraku Matsukuma, Wei Gao

SENSORS　21　(21)　2021/11

DOI： 10.3390/s21217412 　

eISSN： 1424-8220
On-machine diameter measurement of a cylindrical workpiece with a reference artefact

Yuki Shimizu, Qiaolin Li, Masami Kogure, Kimitaka Nishimura, Yuki Sato, Hiraku Matsukuma, Wei Gao

MEASUREMENT SCIENCE AND TECHNOLOGY　32　(10)　2021/10

DOI： 10.1088/1361-6501/ac0ace 　

ISSN： 0957-0233

eISSN： 1361-6501
In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser

Dong Wook Shin, Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Yindi Cai, Eberhard Manske, Wei Gao

APPLIED SCIENCES-BASEL　11　(17)　2021/09

DOI： 10.3390/app11178028 　

eISSN： 2076-3417
Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source

Hiraku Matsukuma, Ryo Sato, Yuki Shimizu, Wei Gao

INTERNATIONAL JOURNAL OF AUTOMATION TECHNOLOGY　15　(4)　529-536　2021/07

DOI： 10.20965/ijat.2021.p0529 　

ISSN： 1881-7629

eISSN： 1883-8022
Self-calibration of a variable-line-spacing grating for an absolute optical encoder with a Fizeau interferometer

Xin Xiong, Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Wei Gao

Measurement Science and Technology　32　(6)　2021/06

DOI： 10.1088/1361-6501/abe9de 　

ISSN： 0957-0233

eISSN： 1361-6501
A technique for measurement of a prism apex angle by optical angle sensors with a reference artefact

Yuki Shimizu, Xu Ma, Hiraku Matsukuma, Wei Gao

Measurement Science and Technology　32　(5)　2021/05

DOI： 10.1088/1361-6501/abd8a6 　

ISSN： 0957-0233

eISSN： 1361-6501
Improvement of a Stitching Operation in the Stitching Linear-Scan Method for Measurement of Cylinders in a Small Dimension

Qiaolin Li, Yuki Shimizu, Toshiki Saito, Hiraku Matsukuma, Yindi Cai, Wei Gao

APPLIED SCIENCES-BASEL　11　(10)　2021/05

DOI： 10.3390/app11104705 　

eISSN： 2076-3417
Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors

Hiraku Matsukuma, Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki

Nanomanufacturing and Metrology　4　(1)　53-66　2021/03

DOI： 10.1007/s41871-020-00091-2 　

ISSN： 2520-811X
An optical frequency domain angle measurement method based on second harmonic generation

Wijayanti Dwi Astuti, Hiraku Matsukuma, Masaru Nakao, Kuangyi Li, Yuki Shimizu, Wei Gao

Sensors (Switzerland)　21　(2)　1-14　2021/01/02

DOI： 10.3390/s21020670 　

ISSN： 1424-8220
Measurement of the apex angle of a small prism by an oblique-incidence mode-locked femtosecond laser autocollimator

Yuki Shimizu, Yuri Kanda, Xu Ma, Kakeru Ikeda, Hiraku Matsukuma, Yasunari Nagaike, Masaki Hojo, Keita Tomita, Wei Gao

Precision Engineering　67　339-349　2021/01

DOI： 10.1016/j.precisioneng.2020.10.013 　

ISSN： 0141-6359
An absolute surface encoder with a planar scale grating of variable periods

Yuki Shimizu, Ryo Ishizuka, Kazuki Mano, Yuri Kanda, Hiraku Matsukuma, Wei Gao

Precision Engineering　67　36-47　2021/01

DOI： 10.1016/j.precisioneng.2020.09.007 　

ISSN： 0141-6359
A new method for evaluation of the pitch deviation of a linear scale grating by an optical angle sensor

Lue Quan, Yuki Shimizu, Xin Xiong, Hiraku Matsukuma, Wei Gao

Precision Engineering　67　1-13　2021/01

DOI： 10.1016/j.precisioneng.2020.09.008 　

ISSN： 0141-6359
An autocollimator with a mid-infrared laser for angular measurement of rough surfaces

Hiraku Matsukuma, Yun Asumi, Masashi Nagaoka, Yuki Shimizu, Wei Gao

Precision Engineering　67　89-99　2021/01

DOI： 10.1016/j.precisioneng.2020.09.022 　

ISSN： 0141-6359
Design and Construction of a Low-Force Stylus Probe for On-machine Tool Cutting Edge Measurement

Hiraku Matsukuma, Bo Wen, Shinichi Osawa, Sho Sekine, Yuki Shimizu, Wei Gao

Nanomanufacturing and Metrology　3　(4)　282-291　2020/12

DOI： 10.1007/s41871-020-00084-1 　

ISSN： 2520-811X
An off-axis differential method for improvement of a femtosecond laser differential chromatic confocal probe

Chong Chen, Yuki Shimizu, Ryo Sato, Hiraku Matsukuma, Wei Gao

Applied Sciences (Switzerland)　10　(20)　1-15　2020/10/02

DOI： 10.3390/app10207235 　

eISSN： 2076-3417
On-machine profile measurement of a micro cutting edge by using a contact-type compact probe unit

Bo Wen, Yuki Shimizu, Yu Watanabe, Hiraku Matsukuma, Wei Gao

Precision Engineering　65　230-239　2020/09

DOI： 10.1016/j.precisioneng.2020.03.014 　

ISSN： 0141-6359
A new signal processing method for a differential chromatic confocal probe with a mode-locked femtosecond laser

Ryo Sato, Chong Chen, Hiraku Matsukuma, Yuki Shimizu, Wei Gao

Measurement Science and Technology　31　(9)　2020/09

DOI： 10.1088/1361-6501/ab8905 　

ISSN： 0957-0233

eISSN： 1361-6501
Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer

Xin Xiong, Hiraku Matsukuma, Yuki Shimizu, Wei Gao

Measurement Science and Technology　31　(9)　2020/09

DOI： 10.1088/1361-6501/ab8b83 　

ISSN： 0957-0233

eISSN： 1361-6501
High-precision cutting edge radius measurement of single point diamond tools using an atomic force microscope and a reverse cutting edge artifact

Kai Zhang, Yindi Cai, Yuki Shimizu, Hiraku Matsukuma, Wei Gao

Applied Sciences (Switzerland)　10　(14)　2020/07

DOI： 10.3390/app10144799 　

eISSN： 2076-3417
Measurement uncertainty analysis of a stitching linear-scan method for the evaluation of roundness of small cylinders

Qiaolin Li, Yuki Shimizu, Toshiki Saito, Hiraku Matsukuma, Wei Gao

Applied Sciences (Switzerland)　10　(14)　2020/07

DOI： 10.3390/app10144750 　

eISSN： 2076-3417
A differential strategy for measurement of a static force in a single-point diamond cutting by a force-controlled fast tool servo Peer-reviewed

Bo Wen, Yuki Shimizu, Hiraku Matsukuma, Keisuke Tohyama, Haruki Kurita, Yuan Liu Chen, Wei Gao

Measurement Science and Technology　31　(7)　2020/07

DOI： 10.1088/1361-6501/ab7d6f 　

ISSN： 0957-0233

eISSN： 1361-6501
Development of an optical angle sensor with a mode-locked femtosecond laser source for surface profile measurement

Yuki Shimizu, Shota Takazono, Yuri Kanda, Hiraku Matsukuma, Wei Gao, Hajime Inaba

JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020　2020

DOI： 10.1115/LEMP2020-8501 　
Fabrication of a two-dimensional diffraction grating with isolated photoresist pattern structures

Hiraku Matsukuma, Masanori Matsunaga, Kai Zhang, Yuki Shimizu, Wei Gao

International Journal of Automation Technology　14　(4)　546-551　2020

DOI： 10.20965/ijat.2020.p0546 　

ISSN： 1881-7629

eISSN： 1883-8022
On-machine angle measurement of a precision V-groove on a ceramic workpiece

Yuki Shimizu, Wei Gao, Hiraku Matsukuma, Károly Szipka, Andreas Archenti

CIRP Annals　69　(1)　469-472　2020

DOI： 10.1016/j.cirp.2020.03.011 　

ISSN： 0007-8506

eISSN： 1726-0604
Profile measurement by using a femtosecond laser chromatic confocal probe

Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao

JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020　2020

DOI： 10.1115/LEMP2020-8626 　
A New Optical Angle Measurement Method Based on Second Harmonic Generation with a Mode-Locked Femtosecond Laser

Hiraku Matsukuma, Shuhei Madokoro, Wijayanti Dwi Astuti, Yuki Shimizu, Wei Gao

Nanomanufacturing and Metrology　2　(4)　187-198　2019/12/01

DOI： 10.1007/s41871-019-00052-4 　

ISSN： 2520-811X
Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings Peer-reviewed

Yuki Shimizu, Kazuki Mano, Hiroki Murakami, Shunsuke Hirota, Hiraku Matsukuma, Wei Gao

Precision Engineering　60　280-290　2019/11

DOI： 10.1016/j.precisioneng.2019.07.022 　

ISSN： 0141-6359
Investigation and improvement of thermal stability of a chromatic confocal probe with a mode-locked femtosecond laser source Peer-reviewed

Ryo Sato, Yuki Shimizu, Chong Chen, Hiraku Matsukuma, Wei Gao

Applied Sciences (Switzerland)　9　(19)　2019/10/01

DOI： 10.3390/app9194084 　

eISSN： 2076-3417
Integration of a Cr–N Thin-Film Displacement Sensor into an XY Micro-stage for Closed-Loop Nano-positioning

Keisuke Adachi, Hiraku Matsukuma, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki

Nanomanufacturing and Metrology　2　(3)　131-139　2019/09/01

DOI： 10.1007/s41871-019-00040-8 　

ISSN： 2520-811X
Accurate polarization control in nonorthogonal two-axis Lloyd's mirror interferometer for fabrication of two-dimensional scale gratings Peer-reviewed

Yuki Shimizu, Kazuki Mano, Kai Zhang, Hiraku Matsukuma, Wei Gao

Optical Engineering　58　(9)　2019/09/01

DOI： 10.1117/1.OE.58.9.092611 　

ISSN： 0091-3286

eISSN： 1560-2303
A Design Study of a Heat Flow-Type Reading Head for a Linear Encoder Based on a Micro Thermal Sensor

Yuki Shimizu, Ayaka Ishida, Yuki Matsuno, Hiraku Matsukuma, Wei Gao

Nanomanufacturing and Metrology　2　(2)　100-110　2019/06/01

DOI： 10.1007/s41871-019-00037-3 　

ISSN： 2520-811X
Reduction in Cross-Talk Errors in a Six-Degree-of-Freedom Surface Encoder Peer-reviewed

Hiraku Matsukuma, Ryo Ishizuka, Masaya Furuta, Xinghui Li, Yuki Shimizu, Wei Gao

Nanomanufacturing and Metrology　2　(2)　111-123　2019/06/01
Publisher: Springer Nature
DOI： 10.1007/s41871-019-00039-1 　

ISSN： 2520-811X
Flexible Electronics toward Wearable Sensing

Wei Gao, Hiroki Ota, Daisuke Kiriya, Kuniharu Takei, Ali Javey

Accounts of Chemical Research　52　(3)　523-533　2019/03/19

DOI： 10.1021/acs.accounts.8b00500 　

ISSN： 0001-4842

eISSN： 1520-4898
A method for expansion of Z-directional measurement range in a mode-locked femtosecond laser chromatic confocal probe Peer-reviewed

Chong Chen, Ryo Sato, Yuki Shimizu, Taku Nakamura, Hiraku Matsukuma, Wei Gao

Applied Sciences (Switzerland)　9　(3)　2019/01/29

DOI： 10.3390/app9030454 　

eISSN： 2076-3417
Theoretical investigation on measurement range of a femtosecond laser chromatic confocal probe by utilizing side-lobe of axial response Peer-reviewed

Chong Chen, Hiraku Matsukuma, Ryo Sato, Xiuguo Chen, Yuki Shimizu, Wei Gao

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018　362-364　2019/01/16

DOI： 10.1109/AMCON.2018.8615064 　
Development of a fiber-laser-based frequency comb for precision dimensional metrology Peer-reviewed

Yuri Kanda, Hiraku Matsukuma, Shaoqing Yang, Yuki Shimizu, Hajime Inaba, Wei Gao

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018　18-19　2019/01/16

DOI： 10.1109/AMCON.2018.8614857 　
Measurement and uncertainty analysis of a precision V-shaped ceramic part Peer-reviewed

Masami Kogure, Hiraku Matsukuma, Ryo Kobayashi, Yuki Shimizu, Wei Gao

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018　30-31　2019/01/16

DOI： 10.1109/AMCON.2018.8614901 　
Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique Peer-reviewed

Xin Xiong, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu, Wei Gao

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018　220-222　2019/01/16

DOI： 10.1109/AMCON.2018.8615000 　
An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings Peer-reviewed

Lue Quan, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu, Wei Gao

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018　47-48　2019/01/16

DOI： 10.1109/AMCON.2018.8614962 　
A compact two-axis Lloyd's mirror interferometer for scale grating fabrication Peer-reviewed

Masanori Matsunaga, Kazuki Mano, Hiraku Matsukuma, Yuki Shimizu, Wei Gao

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018　28-29　2019/01/16

DOI： 10.1109/AMCON.2018.8614804 　
Angle measurement using a diffraction of optical frequency comb Peer-reviewed

Kazuki Nakamura, Hiraku Matsukuma, Yuki Shimizu, Wei Gao

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018　26-27　2019/01/16

DOI： 10.1109/AMCON.2018.8614810 　
Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage Peer-reviewed

Ryo Ishizuka, Hiraku Matsukuma, Yuki Shimizu, Wei Gao

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018　36-39　2019/01/16

DOI： 10.1109/AMCON.2018.8614803 　
An optical frequency comb operating in the mid-infrared region for wide-range and high-precision optical sensor Peer-reviewed

Yun Asumi, Hiraku Matsukuma, Yuki Shimizu, Wei Gao

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018　32-35　2019/01/16

DOI： 10.1109/AMCON.2018.8614919 　
Theoretical calculation of the reading output from a micro thermal sensors for precision positioning Peer-reviewed

Yuki Shimizu, Ayaka Ishida, Hiraku Matsukuma, Wei Gao

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018　24-25　2019/01/16

DOI： 10.1109/AMCON.2018.8614751 　
Theoretical investigation on measurement range expansion of a femtosecond laser chromatic confocal probe

Chong Chen, Hiraku MATSUKUMA, Ryo SATO, Yuki SHIMIZU, Wei GAO

The Proceedings of Conference of Tohoku Branch　2019.54　146-146　2019
Publisher: Japan Society of Mechanical Engineers
DOI： 10.1299/jsmeth.2019.54.146 　

eISSN： 2424-2713
Measurement Technologies for Manufacturing

Yuki Shimizu, So Ito, Jungchul Lee, Shigeaki Goto, Hiraku Matsukuma, Wei Gao

Handbook of Manufacturing　541-568　2019/01/01

DOI： 10.1142/9789813271029_0010 　
On-machine and in-process surface metrology for precision manufacturing

W. Gao, H. Haitjema, F. Z. Fang, R. K. Leach, C. F. Cheung, E. Savio, J. M. Linares

CIRP Annals　68　(2)　843-866　2019

DOI： 10.1016/j.cirp.2019.05.005 　

ISSN： 0007-8506

eISSN： 1726-0604
An optical angle sensor based on second harmonic generation of a modelocked laser Peer-reviewed

Hiraku Matsukuma, Shuhei Madokoro, Masaru Nakao, Yuki Shimizu, Wei Gao

Proceedings of SPIE - The International Society for Optical Engineering　11142　2019

ISSN： 0277-786X

eISSN： 1996-756X
Uncertainty evaluation for measurements of pitch deviation and out-of-flatness of planar scale gratings by a Fizeau interferometer in Littrow configuration Peer-reviewed

Xin Xiong, Yuki Shimizu, Xiuguo Chen, Hiraku Matsukuma, Wei Gao

Applied Sciences (Switzerland)　8　(12)　2539　2018/12/07
Publisher: MDPI} {AG
DOI： 10.3390/app8122539 　

eISSN： 2076-3417
High Resolution Clinometers for Measurement of Roll Error Motion of a Precision Linear Slide Peer-reviewed

Yuki Shimizu, Satoshi Kataoka, Wei Gao

Chinese Journal of Mechanical Engineering (English Edition)　31　(1)　1-9　2018/12/01

DOI： 10.1186/s10033-018-0294-6 　

ISSN： 1000-9345

eISSN： 2192-8258
Laser autocollimation based on an optical frequency comb for absolute angular position measurement Peer-reviewed

Yuan Liu Chen, Yuki Shimizu, Jun Tamada, Kazuki Nakamura, Hiraku Matsukuma, Xiuguo Chen, Wei Gao

Precision Engineering　54　284-293　2018/10

DOI： 10.1016/j.precisioneng.2018.06.005 　

ISSN： 0141-6359
Molecular dynamics simulation of elastic–plastic deformation associated with tool–workpiece contact in force sensor–integrated fast tool servo Peer-reviewed

Yindi Cai, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture　232　(11)　1893-1902　2018/09/01

DOI： 10.1177/0954405416673116 　

ISSN： 0954-4054

eISSN： 2041-2975
A chromatic confocal probe with a mode-locked femtosecond laser source Peer-reviewed

Xiuguo Chen, Taku Nakamura, Yuki Shimizu, Chong Chen, Yuan Liu Chen, Hiraku Matsukuma, Wei Gao

Optics and Laser Technology　103　359-366　2018/07

DOI： 10.1016/j.optlastec.2018.01.051 　

ISSN： 0030-3992
A PD-edge method associated with the laser autocollimation for measurement of a focused laser beam diameter Peer-reviewed

Yuki Shimizu, Taiji Maruyama, Shota Nakagawa, Yuan Liu Chen, Hiraku Matsukuma, Wei Gao

Measurement Science and Technology　29　(7)　1-12　2018/05/24

DOI： 10.1088/1361-6501/aac0a6 　

ISSN： 0957-0233

eISSN： 1361-6501
High quality-factor quartz tuning fork glass probe used in tapping mode atomic force microscopy for surface profile measurement Peer-reviewed

Yuan Liu Chen, Yanhao Xu, Yuki Shimizu, Hiraku Matsukuma, Wei Gao

Measurement Science and Technology　29　(6)　065014　2018/05/15
Publisher: {IOP} Publishing
DOI： 10.1088/1361-6501/aab998 　

ISSN： 0957-0233

eISSN： 1361-6501
Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings Peer-reviewed

Yuki Shimizu, Ryo Aihara, Kazuki Mano, Chong Chen, Yuan Liu Chen, Xiuguo Chen, Wei Gao

Precision Engineering　52　138-151　2018/04
Publisher: Elsevier Inc.
DOI： 10.1016/j.precisioneng.2017.12.004 　

ISSN： 0141-6359
An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges Peer-reviewed

Yindi Cai, Yuan Liu Chen, Malu Xu, Yuki Shimizu, So Ito, Hiraku Matsukuma, Wei Gao

Measurement Science and Technology　29　(5)　1-12　2018/03/23

DOI： 10.1088/1361-6501/aaa913 　

ISSN： 0957-0233

eISSN： 1361-6501
Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings Peer-reviewed

Xiuguo Chen, Yuki Shimizu, Chong Chen, Yuan Liu Chen, Wei Gao

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics　36　(2)　2018/03/01
Publisher: AVS Science and Technology Society
DOI： 10.1116/1.5016505 　

ISSN： 2166-2746

eISSN： 2166-2754
Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface Peer-reviewed

Yuki Shimizu, Yuki Matsuno, Yuan Liu Chen, Hiraku Matsukuma, Wei Gao

Nanomanufacturing and Metrology　1　(1)　45-57　2018/03/01

DOI： 10.1007/s41871-018-0007-x 　

ISSN： 2520-811X
A liquid-surface-based three-axis inclination sensor for measurement of stage tilt motions Peer-reviewed

Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao

Sensors (Switzerland)　18　(2)　2018/02

DOI： 10.3390/s18020398 　

ISSN： 1424-8220
Angle measurement by using optical frequency comb

Wei Gao

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　84　(8)　696-700　2018

DOI： 10.2493/jjspe.84.696 　

ISSN： 0912-0289
Uncertainty analysis of a six-degree-of-freedom surface encoder for a planar motion stage Peer-reviewed

Yuki Shimizu, Masaya Furuta, Yuan Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao

Procedia CIRP　75　355-360　2018
Publisher: Elsevier {BV}
DOI： 10.1016/j.procir.2018.04.041 　

ISSN： 2212-8271
A stitching linear-scan method for roundness measurement of small cylinders Peer-reviewed

Yuan Liu Chen, Yuki Machida, Yuki Shimizu, Hiraku Matsukuma, Wei Gao

CIRP Annals　67　(1)　535-538　2018/01/01

DOI： 10.1016/j.cirp.2018.04.009 　

ISSN： 0007-8506

eISSN： 1726-0604
Modelling and traceability for computationally-intensive precision engineering and metrology Peer-reviewed

J. M. Linares, G. Goch, A. Forbes, J. M. Sprauel, A. Clément, F. Haertig, W. Gao

CIRP Annals　67　(2)　815-838　2018/01/01

DOI： 10.1016/j.cirp.2018.05.003 　

ISSN： 0007-8506

eISSN： 1726-0604
Error separation method for precision measurement of the Run-Out of a microdrill bit by using a laser scan micrometer measurement system Peer-reviewed

Zengyuan Niu, Yuan-Liu Chen, Yuki Shimizu, Hiraku Matsukuma, Wei Gao

Journal of Manufacturing and Materials Processing　2　(4)　2018

DOI： 10.3390/jmmp2010004 　

eISSN： 2504-4494
An optical angle sensor based on chromatic dispersion with a mode-locked laser source Peer-reviewed

Yuki Shimizu, Shuhei Madokoro, Hiraku Matsukuma, Wei Gao

Journal of Advanced Mechanical Design, Systems and Manufacturing　12　(5)　2018

DOI： 10.1299/jamdsm.2018jamdsm0096 　

eISSN： 1881-3054
Evaluation of the grating period based on laser diffraction by using a mode-locked femtosecond laser beam Peer-reviewed

Yuki Shimizu, Kentaro Uehara, Hiraku Matsukuma, Wei Gao

Journal of Advanced Mechanical Design, Systems and Manufacturing　12　(5)　2018

DOI： 10.1299/jamdsm.2018jamdsm0097 　

eISSN： 1881-3054
Joint Machine Learning and Game Theory for Rate Control in High Efficiency Video Coding Peer-reviewed

Wei Gao, Sam Kwong, Yuheng Jia

IEEE TRANSACTIONS ON IMAGE PROCESSING　26　(12)　6074-6089　2017/12

DOI： 10.1109/TIP.2017.2745099 　

ISSN： 1057-7149

eISSN： 1941-0042
Design and verification of an XYZ three-axis micro stage

Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Yuan Liu Chen, Wei Gao, Eiji Niwa, Yoshihiro Sasaki

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017　2017/11/13
Polarization ray-tracing model for orthogonal two-axis Lloyd's mirror interference lithography

Xiuguo Chen, Zongwei Ren, Yuanliu Chen, Yuki Shimizu, Wei Gao

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017　2017/11/13

DOI： 10.1299/jsmelem.2017.9.113 　
Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer

Kazuki Mano, Ryo Aihara, Yuki Shimizu, Yuan Liu Chen, Wei Gao

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017　2017/11/13
Surface form measurement of a small roll workpiece

Toshiki Saito, Yuki Machida, Yuki Shimizu, Yuan Liu Chen, Wei Gao

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017　2017/11/13
Evaluation of grating periods by using pulsed laser source

Kentaro Uehara, Yuki Shimizu, Yuan Liu Chen, Wei Gao

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017　2017/11/13
A confocal microscope with a mode-locked laser source

Yuki Shimizu, Taku Nakamura, Yuan Liu Chen, Wei Gao

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017　2017/11/13
Evaluation of relative vertical error motions of a bench center by using an optical micrometer

Zengyuan Niu, Yuan Liu Chen, Yuki Shimizu, Wei Gao

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017　2017/11/13
Ultra-precision angle sensor with a mode-locked laser source

Shuhei Madokoro, Yuki Shimizu, Yuan Liu Chen, Wei Gao

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017　2017/11/13
Equivalent homogeneous model of D31-mode longitudinal piezoelectric transducers Peer-reviewed

Yangkun Zhang, Tien Fu Lu, Wei Gao

Journal of Intelligent Material Systems and Structures　28　(19)　2651-2658　2017/11/01

DOI： 10.1177/1045389X17692054 　

ISSN： 1045-389X

eISSN： 1530-8138
An edge reversal method for precision measurement of cutting edge radius of single point diamond tools Peer-reviewed

Yuan Liu Chen, Yindi Cai, Malu Xu, Yuki Shimizu, So Ito, Wei Gao

Precision Engineering　50　380-387　2017/10

DOI： 10.1016/j.precisioneng.2017.06.012 　

ISSN： 0141-6359

eISSN： 1873-2372
Optimal polarization modulation for orthogonal two-axis Lloyd’s mirror interference lithography Peer-reviewed

Xiuguo Chen, Zongwei Ren, Yuki Shimizu, Yuan Liu Chen, Wei Gao

Optics Express　25　(19)　22237-22252　2017/09/18

DOI： 10.1364/OE.25.022237 　

ISSN： 1094-4087

eISSN： 1094-4087
Implementation and verification of a four-probe motion error measurement system for a large-scale roll lathe used in hybrid manufacturing Peer-reviewed

Yuan Liu Chen, Zengyuan Niu, Daiki Matsuura, Jung Chul Lee, Yuki Shimizu, Wei Gao, Jeong Seok Oh, Chun Hong Park

Measurement Science and Technology　28　(10)　1-16　2017/09/07

DOI： 10.1088/1361-6501/aa7d33 　

ISSN： 0957-0233

eISSN： 1361-6501
Self-calibration of Fizeau interferometer and planar scale gratings in Littrow setup Peer-reviewed

Xiuguo Chen, Yuki Shimizu, Xin Xiong, Yuan Liu Chen, Wei Gao

Optics Express　25　(18)　21567-21582　2017/09/04

DOI： 10.1364/OE.25.021567 　

eISSN： 1094-4087
Optical frequency domain angle measurement in a femtosecond laser autocollimator Peer-reviewed

Yuan Liu Chen, Yuki Shimizu, Jun Tamada, Yukitoshi Kudo, Shuhei Madokoro, Kazuki Nakamura, Wei Gao

Optics Express　25　(14)　16725-16738　2017/07/10

DOI： 10.1364/OE.25.016725 　

ISSN： 1094-4087

eISSN： 1094-4087
Extreme learning machine with multi-scale local receptive fields for texture classification Peer-reviewed

Jinghong Huang, Zhu Liang Yu, Zhaoquan Cai, Zhenghui Gu, Zhiyin Cai, Wei Gao, Shengfeng Yu, Qianyun Du

MULTIDIMENSIONAL SYSTEMS AND SIGNAL PROCESSING　28　(3)　995-1011　2017/07

DOI： 10.1007/s11045-016-0414-3 　

ISSN： 0923-6082

eISSN： 1573-0824
Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo Peer-reviewed

Yuan Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao

Precision Engineering　49　253-261　2017/07

DOI： 10.1016/j.precisioneng.2017.02.014 　

ISSN： 0141-6359

eISSN： 1873-2372
Precision measurement of Z-slide vertical error motion of an ultra-precision lathe by using three-probe method Peer-reviewed

Zengyuan Niu, Yuan Liu Chen, Daiki Matsuura, Jung Chul Lee, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao, Jeong Seok Oh, Chun Hong Park

International Journal of Precision Engineering and Manufacturing　18　(5)　651-660　2017/05/01

DOI： 10.1007/s12541-017-0078-4 　

ISSN： 2234-7593

eISSN： 2005-4602
4.62 kW excellent beam quality laser output with a low-loss Yb/Ce co-doped fiber fabricated by chelate gas phase deposition technique Peer-reviewed

Jinkun Zheng, Wei Zhao, Baoyin Zhao, Chaoqi Hou, Zhe Li, Gang Li, Qi Gao, Pei Ju, Wei Gao, Shengfei She, Peng Wu, Weinan Li

OPTICAL MATERIALS EXPRESS　7　(4)　1259-1266　2017/04

DOI： 10.1364/OME.7.001259 　

ISSN： 2159-3930
An optical lever by using a mode-locked laser for angle measurement Peer-reviewed

Yuki Shimizu, Yukitoshi Kudo, Yuan Liu Chen, So Ito, Wei Gao

Precision Engineering　47　72-80　2017/01/01

DOI： 10.1016/j.precisioneng.2016.07.006 　

ISSN： 0141-6359

eISSN： 1873-2372
Design and testing of a micro thermal sensor for non-contact surface defect detection Peer-reviewed

Yuki Shimizu, Yuki Matsuno, Yuan Liu Chen, Wei Gao

International Journal of Automation Technology　11　(5)　781-786　2017
Publisher: Fuji Technology Press
DOI： 10.20965/ijat.2017.p0781 　

ISSN： 1881-7629

eISSN： 1883-8022
Nanomanufacturing—Perspective and applications Peer-reviewed

F. Z. Fang, X. D. Zhang, W. Gao, Y. B. Guo, G. Byrne, H. N. Hansen

CIRP Annals - Manufacturing Technology　66　(2)　683-705　2017

DOI： 10.1016/j.cirp.2017.05.004 　

ISSN： 0007-8506

eISSN： 1726-0604
Design and testing of an optical configuration for multi-dimensional measurement of a diamond cutting tool Peer-reviewed

Yuki Shimizu, Sung Ho Jang, Wei Gao

Measurement: Journal of the International Measurement Confederation　94　934-941　2016/12/01

DOI： 10.1016/j.measurement.2015.11.040 　

ISSN： 0263-2241

eISSN： 1873-412X
Molecular dynamics simulation of form measurement process of soft materials using atomic force microscope Peer-reviewed

Yindi Cai, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao

2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016　156-159　2016/11/28

DOI： 10.1109/NEMS.2016.7758221 　
Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer Peer-reviewed

Yuki Shimizu, Ryo Aihara, Zongwei Ren, Yuan Liu Chen, So Ito, Wei Gao

Optics Express　24　(24)　27521-27535　2016/11/28

DOI： 10.1364/OE.24.027521 　

ISSN： 1094-4087

eISSN： 1094-4087
Nanometrology of an ultraprecision machined surface by using optical sensors Peer-reviewed

Zengyuan Niu, Ryo Kobayashi, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao

16th International Conference on Nanotechnology - IEEE NANO 2016　984-985　2016/11/21

DOI： 10.1109/NANO.2016.7751479 　
Analysis of a Lloyd's mirror interferometer for fabrication of gratings Peer-reviewed

Zongwei Ren, Ryo Aihara, Yuki Shimizu, So Ito, Yuan Liu Chen, Wei Gao

16th International Conference on Nanotechnology - IEEE NANO 2016　982-983　2016/11/21

DOI： 10.1109/NANO.2016.7751443 　
Micro thermal sensor for nanometric surface defect inspection Peer-reviewed

Yuki Shimizu, Yuki Matsuno, Yuta Ohba, Wei Gao

16th International Conference on Nanotechnology - IEEE NANO 2016　978-979　2016/11/21

DOI： 10.1109/NANO.2016.7751308 　
Wind speed and direction measurement based on arc ultrasonic sensor array signal processing algorithm Peer-reviewed

Xinbo Li, Haixin Sun, Wei Gao, Yaowu Shi, Guojun Liu, Yue Wu

ISA TRANSACTIONS　65　437-444　2016/11

DOI： 10.1016/j.isatra.2016.07.010 　

ISSN： 0019-0578

eISSN： 1879-2022
General thermal texturization process of MoS<inf>2</inf> for efficient electrocatalytic hydrogen evolution reaction Peer-reviewed

Daisuke Kiriya, Peter Lobaccaro, Hnin Yin Yin Nyein, Peyman Taheri, Mark Hettick, Hiroshi Shiraki, Carolin M. Sutter-Fella, Peida Zhao, Wei Gao, Roya Maboudian, Joel W. Ager, Ali Javey

Nano Letters　16　(7)　4047-4053　2016/07/13

DOI： 10.1021/acs.nanolett.6b00569 　

ISSN： 1530-6984

eISSN： 1530-6992
Mode-locked laser autocollimator with an expanded measurement range Peer-reviewed

Yuan Liu Chen, Yuki Shimizu, Yukitoshi Kudo, So Ito, Wei Gao

Optics Express　24　(14)　15554-15569　2016/07/11

DOI： 10.1364/OE.24.015554 　

ISSN： 1094-4087

eISSN： 1094-4087
Wearable Microsensor Array for Multiplexed Heavy Metal Monitoring of Body Fluids Peer-reviewed

Wei Gao, Hnin Y. Y. Nyein, Ziba Shahpar, Hossain M. Fahad, Kevin Chen, Sam Emaminejad, Yuji Gao, Li-Chia Tai, Hiroki Ota, Eric Wu, James Bullock, Yuping Zeng, Der-Hsien Lien, Ali Javey

ACS SENSORS　1　(7)　866-874　2016/07

DOI： 10.1021/acssensors.6b00287 　

ISSN： 2379-3694
On-line qualification of a micro probing system for precision length measurement of micro-features on precision parts Peer-reviewed

Yuan Liu Chen, So Ito, Hirotaka Kikuchi, Ryo Kobayashi, Yuki Shimizu, Wei Gao

Measurement Science and Technology　27　(7)　1-13　2016/05/31

DOI： 10.1088/0957-0233/27/7/074008 　

ISSN： 0957-0233

eISSN： 1361-6501
Application of 3D Printing for Smart Objects with Embedded Electronic Sensors and Systems Peer-reviewed

Hiroki Ota, Sam Emaminejad, Yuji Gao, Allan Zhao, Eric Wu, Samyuktha Challa, Kevin Chen, Hossain M. Fahad, Amit K. Jha, Daisuke Kiriya, Wei Gao, Hiroshi Shiraki, Kazuhito Morioka, Adam R. Ferguson, Kevin E. Healy, Ronald W. Davis, Ali Javey

ADVANCED MATERIALS TECHNOLOGIES　1　(1)　2016/04

DOI： 10.1002/admt.201600013 　

ISSN： 2365-709X
Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions Peer-reviewed

Yuki Shimizu, Siew Leng Tan, Dai Murata, Taiji Maruyama, So Ito, Yuan Liu Chen, Wei Gao

Optics Express　24　(3)　2788-2805　2016/02/08

DOI： 10.1364/OE.24.002788 　

ISSN： 1094-4087

eISSN： 1094-4087
Fully integrated wearable sensor arrays for multiplexed in situ perspiration analysis

Wei Gao, Sam Emaminejad, Hnin Yin Yin Nyein, Samyuktha Challa, Kevin Chen, Austin Peck, Hossain M. Fahad, Hiroki Ota, Hiroshi Shiraki, Daisuke Kiriya, Der Hsien Lien, George A. Brooks, Ronald W. Davis, Ali Javey

Nature　529　(7587)　509-514　2016/01/27

DOI： 10.1038/nature16521 　

ISSN： 0028-0836

eISSN： 1476-4687
New Encoder Technologies

GAO Wei

Journal of the Japan Society for Precision Engineering　82　(9)　773-777　2016
Publisher: The Japan Society for Precision Engineering
DOI： 10.2493/jjspe.82.773 　
Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system Peer-reviewed

So Ito, Yuan Liu Chen, Yuki Shimizu, Hirotaka Kikuchi, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi

Precision Engineering　43　525-529　2016/01

DOI： 10.1016/j.precisioneng.2015.09.016 　

ISSN： 0141-6359

eISSN： 1873-2372
On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact Peer-reviewed

Yuan Liu Chen, Yindi Cai, Yuki Shimizu, So Ito, Wei Gao, Bing Feng Ju

Precision Engineering　43　462-467　2016/01

DOI： 10.1016/j.precisioneng.2015.09.011 　

ISSN： 0141-6359

eISSN： 1873-2372
Molecular dynamics simulation of subnanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting Peer-reviewed

Yindi Cai, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao, Liangchi Zhang

Applied Surface Science　369　354-365　2016

DOI： 10.1016/j.apsusc.2016.02.046 　

ISSN： 0169-4332

eISSN： 1873-5584
A micro-coordinate measurement machine (CMM) for large-scale dimensional measurement of micro-slits Peer-reviewed

So Ito, Hirotaka Kikuchi, Yuanliu Chen, Yuki Shimizu, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi

Applied Sciences (Switzerland)　6　(5)　156　2016

DOI： 10.3390/app6050156 　

ISSN： 2076-3417

eISSN： 2076-3417
Determination of the zero-position for an optical angle sensor Peer-reviewed

Jun Tamada, Yukitoshi Kudo, Yuan Liu Chen, Yuki Shimizu, Wei Gao

Journal of Advanced Mechanical Design, Systems and Manufacturing　10　(5)　16-00128　2016

DOI： 10.1299/jamdsm.2016jamdsm0072 　

ISSN： 1881-3054

eISSN： 1881-3054
Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer Peer-reviewed

Yindi Cai, Xinghui Li, Ryo Aihara, Ren Zongwei, Yuki Shimizu, So Ito, Wei Gao

Journal of Advanced Mechanical Design, Systems and Manufacturing　10　(5)　16-00127　2016

DOI： 10.1299/jamdsm.2016jamdsm0080 　

ISSN： 1881-3054

eISSN： 1881-3054
A highly stable noncontact SPM for surface profile measurement and its application to insulating samples Peer-reviewed

Shigeaki Goto, Minglei Li, So Ito, Yuki Shimizu, Wei Gao

Journal of Advanced Mechanical Design, Systems and Manufacturing　10　(5)　16-00134　2016

DOI： 10.1299/jamdsm.2016jamdsm0081 　

ISSN： 1881-3054

eISSN： 1881-3054
Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool Peer-reviewed

Yuan Liu Chen, Yindi Cai, Yuki Shimizu, So Ito, Wei Gao, Bing Feng Ju

Journal of Micromechanics and Microengineering　26　(2)　2015/12/18

DOI： 10.1088/0960-1317/26/2/025002 　

ISSN： 0960-1317

eISSN： 1361-6439
Investigation of factors influencing microscopic interactions between the diamond indenter and material surfaces in nano-indentation Peer-reviewed

Qilong Wei, Xiaoyuan Li, Qiang Yang, Wei Gao

APPLIED SURFACE SCIENCE　355　761-765　2015/11

DOI： 10.1016/j.apsusc.2015.07.137 　

ISSN： 0169-4332

eISSN： 1873-5584
Precision measurement of vertical straightness of a roll workpiece on an ultra-precision lathe

Zengyuan Niu, Yuanliu Chen, Daiki Matsuura, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao, Jeongseok Oh, Chunhong Park

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015　2015/10/18
Noncontact electrostatic force microscopy for surface profile measurement of insulating materials

Shigeaki Goto, Minglei Li, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015　2015/10/18
Molecular dynamics simulation of nano-contact between a diamond cutting tool and a copper surface

Yindi Cai, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao, Ying Chen

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015　2015/10/18
Laser interference lithography with a modified two-axis Lloyd's mirror interferometer for fabrication of two-dimensional micro patterns

Yindi Cai, Xinghui Li, Ryo Aihara, Yuki Shimizu, So Ito, Wei Gao

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015　2015/10/18
Ductile cutting of a microstructure array on silicon surface by using a diamond tool with a negative rake angle

Yuan Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015　2015/10/18
Determination of the origin position for an angle sensor with a femtosecond laser

Jun Tamada, Yukitoshi Kudo, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015　2015/10/18
Micro-probing system for slit width measurement by using a shear-force detection

So Ito, Kikuchi Hirotaka, Yuan Liu Chen, Yuki Shimizu, Wei Gao

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015　2015/10/18
Measurement of angular error motions of a precision linear stage by using a high resolution clinometer

Satoshi Kataoka, Tatsuya Ishikawa, Yuki Shimizu, So Ito, Wei Gao

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015　2015/10/18
Profile Measurement of micro-optics with steep sidewalls by using a long stroke atomic force microscope

Minglei Li, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015　2015/10/18
Optimal Parameter Design of Coarse Alignment for Fiber Optic Gyro Inertial Navigation System Peer-reviewed

Baofeng Lu, Qiuying Wang, Chunmei Yu, Wei Gao

SENSORS　15　(7)　15006-15032　2015/07

DOI： 10.3390/s150715006 　

ISSN： 1424-8220
Multi-Frequency Polarimetric SAR Classification Based on Riemannian Manifold and Simultaneous Sparse Representation Peer-reviewed

Fan Yang, Wei Gao, Bin Xu, Jian Yang

REMOTE SENSING　7　(7)　8469-8488　2015/07

DOI： 10.3390/rs70708469 　

ISSN： 2072-4292
Optical heterodyne micro-vibration measurement based on all-fiber acousto-optic frequency shifter Peer-reviewed

Wending Zhang, Wei Gao, Ligang Huang, Dong Mao, Biqiang Jiang, Feng Gao, Dexing Yang, Guoquan Zhang, Jingjun Xu, Jianlin Zhao

OPTICS EXPRESS　23　(13)　17576-17583　2015/06

DOI： 10.1364/OE.23.017576 　

ISSN： 1094-4087
Self-evaluation of the cutting edge contour of a microdiamond tool with a force sensor integrated fast tool servo on an ultra-precision lathe Peer-reviewed

Yuan Liu Chen, Yuki Shimizu, Yindi Cai, Shu Wang, So Ito, Bing Feng Ju, Wei Gao

International Journal of Advanced Manufacturing Technology　77　(9-12)　2257-2267　2015/04

DOI： 10.1007/s00170-014-6580-2 　

ISSN： 0268-3768

eISSN： 1433-3015
Design of a laser autocollimator-based optical sensor with a rangefinder for error correction of precision slide guideways Peer-reviewed

Siew Leng Tan, Yuki Shimizu, Takayuki Meguro, So Ito, Wei Gao

International Journal of Precision Engineering and Manufacturing　16　(3)　423-431　2015/03

DOI： 10.1007/s12541-015-0058-5 　

ISSN： 2234-7593

eISSN： 2005-4602
On-machine measurement of a diamond tool edge contour with a force sensor integrated fast tool servo

Wang Shu, Chen Yuan-Liu, Ito So, Shimizu Yuki, Wei Gao

Proceedings of JSPE Semestrial Meeting　2015　295-296　2015
Publisher: The Japan Society for Precision Engineering
DOI： 10.11522/pscjspe.2015A.0_295 　

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A self-evaluation method for the cutting edge contour of a micro diamond tool is developed without any accurate reference artifacts or additional measuring instruments by using a force sensor-integrated fast tool servo (FS-FTS) At first, a series of micro grooves are machined with overlaps on the side wall of a roller mounted on the lathe spindle alone Z-direction by using a cutting tool of the FS-FTS, which is mounted on the X-slide of the lathe to form a group of sharp line structures. The cutting tool is then induced to scan across the line structures as a contact probe based on the force feedback control function of the FS-FTS so that the scanning path of the tool can be transferred to the tool edge contour to be measured. In this paper, a principle of the proposed method, a development of the experimental setup and some experimental results are reported.
Molecular dynamics simulation on nanoindentation response of a copper workpiece

Cai Yindi, Chen Yuanliu, Shimizu Yuki, Ito So, Gao Wei

Proceedings of JSPE Semestrial Meeting　2015　231-232　2015
Publisher: The Japan Society for Precision Engineering
DOI： 10.11522/pscjspe.2015A.0_231 　

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Contact detection process of ultra-precision surfaces fabrication and form measurement by using a force sensor-integrated fast tool servo will cause the surface damages of a copper workpiece. Based on the study of contact deformation, nanoindentation test is carried out by MD simulation in this paper to theoretically investigate the surface damages due to the contact detection process. Mechanical behaviors of the molecules on the copper workpiece surface during nanoindentation process are observed. In addition, the physical properties of the workpiece are also analyzed in this paper.
Detection and repair of micro defects in the process of diamond cutting of a microstructure array

Chen Yuanliu, Shimizu Yuki, Ito So, Gao Wei

Proceedings of JSPE Semestrial Meeting　2015　237-238　2015
Publisher: The Japan Society for Precision Engineering
DOI： 10.11522/pscjspe.2015A.0_237 　

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This paper presents an in-process measurement technique, which is capable of conducting position identification and dimension characterization of defects, for repair of micro defects by using a fast tool servo with a force sensor. A thrust force map is in-process produced to indicate the cutting status with respect to the positions of the machine slide and the machine spindle measured by linear encoder and rotary encoder, respectively. The position of the defect is detected by observing the thrust force map to determine the location of the abnormal variation in the monitored thrust force. Confirmation and characterization of the defects are conducted by employing the force-controlled tool to measure the sectional profile of the defective microstructures. The identified position and the characterized dimension are fed back to carry out repair which can be thus with exact tool setting position and accurate repair path. Experiments were carried out on a nikel cylindrical workpiece with a diameter of 55 mm fabricated by using a micro diamond tool. Defects, with dimension on the order of 1 μm among a cut microstructure array over the outer surface of the cylindrical workpiece, were in-process detected and repaired to confirm the feasibility of the proposed method.
Influence of metallic target surface roughness on THz scattering characteristics Peer-reviewed

Xin Huang, Wei Gao, Kejia Wang, Feidi Xiang, Jinsong Liu, Yingyi You

2015 40TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ)　2015

ISSN： 2162-2027
Energy-Efficient Computation Offloading in Cellular Networks Peer-reviewed

Yeli Geng, Wenjie Hu, Yi Yang, Wei Gao, Guohong Cao

2015 IEEE 23RD INTERNATIONAL CONFERENCE ON NETWORK PROTOCOLS (ICNP)　145-155　2015

DOI： 10.1109/ICNP.2015.20 　

ISSN： 1092-1648
Moving base alignment of a fiber optic gyro inertial navigation system for autonomous underwater vehicle using Doppler velocity log Peer-reviewed

Qiu Ying Wang, Yi Bing Li, Ming Diao, Wei Gao, Fei Yu

OPTIK　126　(23)　3631-3637　2015

DOI： 10.1016/j.ijleo.2015.08.226 　

ISSN： 0030-4026
Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography Peer-reviewed

Xinghui Li, Yindi Cai, Ryo Aihara, Yuki Shimizu, So Ito, Wei Gao

Proceedings of SPIE - The International Society for Optical Engineering　9524　2015

DOI： 10.1117/12.2184829 　

ISSN： 0277-786X

eISSN： 1996-756X
An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor Peer-reviewed

Yuan-Liu Chen, Shu Wang, Yuki Shimizu, So Ito, Wei Gao, Bing-Feng Ju

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY　39　134-142　2015/01

DOI： 10.1016/j.precisioneng.2014.08.001 　

ISSN： 0141-6359

eISSN： 1873-2372
Pitch deviation measurement of an involute spur gear by a rotary profiling system Peer-reviewed

Bin Xu, Yuki Shimizu, So Ito, Wei Gao

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY　39　152-160　2015/01

DOI： 10.1016/j.precisioneng.2014.08.003 　

ISSN： 0141-6359

eISSN： 1873-2372
Pitch deviation measurement of an involute spur gear by a rotary profiling system Peer-reviewed

Bin Xu, Yuki Shimizu, So Ito, Wei Gao

Precision Engineering　39　152-160　2015/01/01

DOI： 10.1016/j.precisioneng.2014.08.003 　

ISSN： 0141-6359

eISSN： 1873-2372
An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor Peer-reviewed

Yuan Liu Chen, Shu Wang, Yuki Shimizu, So Ito, Wei Gao, Bing Feng Ju

Precision Engineering　39　134-142　2015/01/01

DOI： 10.1016/j.precisioneng.2014.08.001 　

ISSN： 0141-6359

eISSN： 1873-2372
Investigation on sensitivity of a contact-type thermal sensor for surface defect inspections Peer-reviewed

Yuki Shimizu, Yuta Ohba, Wei Gao

International Journal of Automation Technology　9　(3)　291-296　2015

DOI： 10.20965/ijat.2015.p0291 　

ISSN： 1881-7629

eISSN： 1883-8022
Measurement technologies for precision positioning Peer-reviewed

W. Gao, S. W. Kim, H. Bosse, H. Haitjema, Y. L. Chen, X. D. Lu, W. Knapp, A. Weckenmann, W. T. Estler, H. Kunzmann

CIRP Annals - Manufacturing Technology　64　(2)　773-796　2015

DOI： 10.1016/j.cirp.2015.05.009 　

ISSN： 0007-8506

eISSN： 1726-0604
Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder Peer-reviewed

Xinghui Li, Yuki Shimizu, Takeshi Ito, Yindi Cai, So Ito, Wei Gao

Optical Engineering　53　(12)　122405　2014/12

DOI： 10.1117/1.OE.53.12.122405 　

ISSN： 0091-3286

eISSN： 1560-2303
An ultra-precision Electronic Clinometer for Measurement of Small Inclination Angles Peer-reviewed

Siew-Leng Tan, Satoshi Kataoka, Tatsuya Ishikawa, So Ito, Yuki Shimizu, Yuanliu Chen, Wei Gao, Satoshi Nakagawa

Journal of the Korean Society of Manufacturing Technology Engineers　23　(6)　539-545　2014/12
Precision evaluation of surface form error of a large-scale roll workpiece on a drum roll lathe Peer-reviewed

Jung Chul Lee, Yuki Shimizu, Wei Gao, Jeongseok Oh, Chun Hong Park

Precision Engineering　38　(4)　839-848　2014/10

DOI： 10.1016/j.precisioneng.2014.05.001 　

ISSN： 0141-6359

eISSN： 1873-2372
ASPEN 2013 (Taipei)

Kuang Chao Fan, Wei Gao

Measurement Science and Technology　25　(9)　2014/09/01

DOI： 10.1088/0957-0233/25//090301 　

ISSN： 0957-0233

eISSN： 1361-6501
Design and testing of a four-probe optical sensor head for three-axis surface encoder with a mosaic scale grating Peer-reviewed

Yuki Shimizu, Takeshi Ito, Xinghui Li, Woojae Kim, Wei Gao

Measurement Science and Technology　25　(9)　094002　2014/09/01

DOI： 10.1088/0957-0233/25/9/094002 　

ISSN： 0957-0233

eISSN： 1361-6501
Drift reduction in a scanning electrostatic force microscope for surface profile measurement Peer-reviewed

Zhigang Jia, So Ito, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Wei Gao

Measurement Science and Technology　25　(9)　094001　2014/09/01

DOI： 10.1088/0957-0233/25/9/094001 　

ISSN： 0957-0233

eISSN： 1361-6501
Optical metrology for precision engineering

Wei Gao, Bernd Bodermann

Advanced Optical Technologies　3　(4)　373-374　2014/08/01

DOI： 10.1515/aot-2014-0042 　

ISSN： 2192-8576

eISSN： 2192-8584
Three-axis vibration measurement by using a grating-interferometric vibrometer Peer-reviewed

So Ito, Ryo Aihara, Woo Jae Kim, Yuki Shimizu, Wei Gao

Advanced Optical Technologies　3　(4)　435-440　2014/08/01

DOI： 10.1515/aot-2014-0028 　

ISSN： 2192-8576

eISSN： 2192-8584
Development of a probing system for a micro-coordinate measuring machine by utilizing shear-force detection Peer-reviewed

So Ito, Issei Kodama, Wei Gao

Measurement Science and Technology　25　(6)　064011　2014/06

DOI： 10.1088/0957-0233/25/6/064011 　

ISSN： 0957-0233

eISSN： 1361-6501
A measurement method of cutting tool position for relay fabrication of microstructured surface Peer-reviewed

Yuan Liu Chen, Wei Gao, Bing Feng Ju, Yuki Shimizu, So Ito

Measurement Science and Technology　25　(6)　06400181　2014/06

DOI： 10.1088/0957-0233/25/6/064018 　

ISSN： 0957-0233

eISSN： 1361-6501
Feasibility study on the concept of thermal contact sensor for nanometre-level defect inspections on smooth surfaces Peer-reviewed

Yuki Shimizu, Wenjian Lu, Yuta Ohba, Wei Gao

Measurement Science and Technology　25　(6)　064006　2014/06

DOI： 10.1088/0957-0233/25/6/064006 　

ISSN： 0957-0233

eISSN： 1361-6501
Feasibility study on the concept of thermal contact sensor for nanometre-level defect inspections on smooth surfaces Peer-reviewed

Yuki Shimizu, Wenjian Lu, Yuta Ohba, Wei Gao

MEASUREMENT SCIENCE AND TECHNOLOGY　25　(6)　064006　2014/06

DOI： 10.1088/0957-0233/25/6/064006 　

ISSN： 0957-0233

eISSN： 1361-6501
A measurement method of cutting tool position for relay fabrication of microstructured surface Peer-reviewed

Yuan-Liu Chen, Wei Gao, Bing-Feng Ju, Yuki Shimizu, So Ito

MEASUREMENT SCIENCE AND TECHNOLOGY　25　(6)　064018　2014/06

DOI： 10.1088/0957-0233/25/6/064018 　

ISSN： 0957-0233

eISSN： 1361-6501
A Cr-N thin film displacement sensor for precision positioning of a micro-stage Peer-reviewed

Yuxin Peng, So Ito, Yuki Shimizu, Toyohiro Azuma, Wei Gao, Eiji Niwa

Sensors and Actuators, A: Physical　211　89-97　2014/05/01

DOI： 10.1016/j.sna.2014.02.032 　

ISSN： 0924-4247
A micro optical probe for edge contour evaluation of diamond cutting tools Peer-reviewed

S. H. Jang, Y. Shimizu, S. Ito, W. Gao

Journal of Sensors and Sensor Systems　3　(1)　69-76　2014/03/28

DOI： 10.5194/jsss-3-69-2014 　

ISSN： 2194-8771

eISSN： 2194-878X
Experiment of polarization forces in scanning electrostatic force microscopy for measuring surface profile of dielectric Peer-reviewed

Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao

Open Electrical and Electronic Engineering Journal　8　(1)　342-347　2014
Publisher: Bentham Science Publishers B.V.
DOI： 10.2174/1874129001408010342 　

ISSN： 1874-1290

eISSN： 1874-1290
Design of fabrication process of a thermal contact sensor for surface defect inspection Peer-reviewed

Yuki Shimizu, Yuta Ohba, Wei Gao

Journal of Advanced Mechanical Design, Systems and Manufacturing　8　(4)　2014

DOI： 10.1299/jamdsm.2014jamdsm0052 　

ISSN： 1881-3054

eISSN： 1881-3054
Measurement of Cutting Edge Width of a Rotary Cutting Tool by Using a Laser Displacement Sensor Peer-reviewed

So Ito, Sho Sekine, Yuki Shimizu, WeiGao, Tsutomu Fukuda, AkiraKato, Kouji Kubota

International Journal of Automation Technology　8　(1)　28-33　2014

DOI： 10.20965/ijat.2014.p0028 　
A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings Peer-reviewed

Xinghui Li, Wei Gao, Yuki Shimizu, So Ito

CIRP Annals - Manufacturing Technology　63　(1)　461-464　2014

DOI： 10.1016/j.cirp.2014.02.001 　

ISSN： 0007-8506

eISSN： 1726-0604
A micro optical probe for edge contour evaluation of diamond cutting tools Peer-reviewed

S. H. Jang, Y. Shimizu, S. Ito, W. Gao

Journal of Sensors and Sensor Systems　3　69-76　2014
An improved scan mode in an electrostatic force microscope for surface profile measurement of micro-optics Peer-reviewed

Zhigang Jia, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao

JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING　8　(4)　00101　2014

DOI： 10.1299/jamdsm.2014jamdsm0051 　

ISSN： 1881-3054
Self-calibration and compensation of setting errors for surface profile measurement of a microstructured roll workpiece Peer-reviewed

Wei Gao, Bin Xu, Toshiki Takeishi, Yuki Shimizu, So Ito

Chinese Journal of Mechanical Engineering (English Edition)　27　(1)　14-22　2014/01

DOI： 10.3901/CJME.2014.01.014 　

ISSN： 1000-9345

eISSN： 2192-8258
Role of surfaces and interfaces in solar cell manufacturing Peer-reviewed

Abhijit Chandra, Grant Anderson, Shreyes Melkote, Wei Gao, Han Haitjema, Konrad Wegener

CIRP Annals - Manufacturing Technology　63　(2)　797-819　2014

DOI： 10.1016/j.cirp.2014.05.008 　

ISSN： 0007-8506

eISSN： 1726-0604
On-machine form measurement of high precision ceramics parts by using a laser displacement sensor Peer-reviewed

So Ito, Daiki Matsuura, Takayuki Meguro, Shigeaki Goto, Yuki Shimizu, Wei Gao, Shigeru Adachi, Kyohei Omiya

Journal of Advanced Mechanical Design, Systems and Manufacturing　8　(4)　0048　2014

DOI： 10.1299/jamdsm.2014jamdsm0048 　

ISSN： 1881-3054

eISSN： 1881-3054
Development of an optical probe for evaluation of tool edge geometry Peer-reviewed

Sung Ho Jang, Yuki Shimizu, So Ito, Wei Gao

Journal of Advanced Mechanical Design, Systems and Manufacturing　8　(4)　0063　2014

DOI： 10.1299/jamdsm.2014jamdsm0063 　

ISSN： 1881-3054

eISSN： 1881-3054
An improved scan mode in an electrostatic force microscope for surface profile measurement of micro-optics Peer-reviewed

Zhigang Jia, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao

Journal of Advanced Mechanical Design, Systems and Manufacturing　8　(4)　0051　2014

DOI： 10.1299/jamdsm.2014jamdsm0051 　

ISSN： 1881-3054

eISSN： 1881-3054
Measurement of contact potential difference and material distribution by using an SEFM Peer-reviewed

Keiichiro Hosobuchi, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao

Journal of Advanced Mechanical Design, Systems and Manufacturing　8　(4)　50　2014

DOI： 10.1299/jamdsm.2014jamdsm0050 　

ISSN： 1881-3054

eISSN： 1881-3054
An electrostatic force probe for surface profile measurement in noncontact condition Peer-reviewed

So Ito, Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Gaofa He, Wei Gao

International Journal of Automation Technology　7　(6)　714-719　2013/11
Publisher: Fuji Technology Press
DOI： 10.20965/ijat.2013.p0714 　

ISSN： 1881-7629

eISSN： 1883-8022
Development of a micro-sized thermal contact sensor for inspection of surface defects Peer-reviewed

Yuki Shimizu, Wenjian Lu, Yuta Ohba, Wei Gao

International Journal of Automation Technology　7　(6)　708-713　2013/11
Publisher: Fuji Technology Press
DOI： 10.20965/ijat.2013.p0708 　

ISSN： 1881-7629

eISSN： 1883-8022
Fabrication of scale gratings for surface encoders by using laser interference lithography with 405 nm laser diodes Peer-reviewed

Xinghui Li, Yuki Shimizu, So Ito, Wei Gao

International Journal of Precision Engineering and Manufacturing　14　(11)　1979-1988　2013/11

DOI： 10.1007/s12541-013-0269-6 　

ISSN： 2234-7593

eISSN： 2005-4602
Characterization of electrostatic force for scanning electrostatic force microscopy of micro-structured surface Peer-reviewed

Zhigang Jia, So Ito, Keiichiro Hosobuchi, Shigeaki Goto, Yuki Shimizu, Gaofa He, Wei Gao

International Journal of Precision Engineering and Manufacturing　14　(9)　1543-1549　2013/09

DOI： 10.1007/s12541-013-0208-6 　

ISSN： 2234-7593

eISSN： 2005-4602
Surface profile measurement of internal micro-structures Peer-reviewed

Bin Xu, Yuki Shimizu, So Ito, Wei Gao

International Journal of Precision Engineering and Manufacturing　14　(9)　1535-1541　2013/09

DOI： 10.1007/s12541-013-0207-7 　

ISSN： 2234-7593

eISSN： 2005-4602
Construction and verification of a linear-rotary microstage with a millimeter-scale range Peer-reviewed

Yuxin Peng, So Ito, Yasumasa Sakurai, Yuki Shimizu, Wei Gao

International Journal of Precision Engineering and Manufacturing　14　(9)　1623-1628　2013/09

DOI： 10.1007/s12541-013-0219-3 　

ISSN： 2234-7593

eISSN： 2005-4602
In-process micro/nano measurement for micro cutting Peer-reviewed

Wei Gao, Kang Won Lee, Young Jin Noh, Yoshikazu Arai, Yuki Shimizu

Micro-Cutting: Fundamentals and Applications　315-344　2013/08/09
Publisher: wiley
DOI： 10.1002/9781118536605.ch11 　
A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage Peer-reviewed

Xinghui Li, Wei Gao, Hiroshi Muto, Yuki Shimizu, So Ito, Songyi Dian

Precision Engineering　37　(3)　771-781　2013/07

DOI： 10.1016/j.precisioneng.2013.03.005 　

ISSN： 0141-6359
Fabrication of large-size SiC mirror with precision aspheric profile for artificial satellite Peer-reviewed

Yuki Shimizu, Shigeaki Goto, Jungchul Lee, So Ito, Wei Gao, Shigeru Adachi, Kyohei Omiya, Hiroki Sato, Tetsuya Hisada, Yoshifumi Saito, Hiroaki Kubota

Precision Engineering　37　(3)　640-649　2013/07

DOI： 10.1016/j.precisioneng.2013.01.009 　

ISSN： 0141-6359
A micro-ball tapping probe for form measurement of micro-structured surface Peer-reviewed

Bin Xu, Yuki Shimizu, So Ito, Wei Gao

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao　34　(1)　73-80　2013/02

ISSN： 0257-9731
Development of a Nanopipette Probe with Micro Sphere for Profile Measurement:Improvement of the sensitivity for the contact detection by utilizing a method of frequency modulation

Ito So, Kodama Issei, Gao Wei

Proceedings of JSPE Semestrial Meeting　2013　357-358　2013
Publisher: The Japan Society for Precision Engineering
DOI： 10.11522/pscjspe.2013A.0.357.0 　
Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection

S. Ito, I. Kodama, W. Gao

Proceedings of SPIE - The International Society for Optical Engineering　8916　2013

DOI： 10.1117/12.2035942 　

ISSN： 0277-786X

eISSN： 1996-756X
Fabrication of diffraction gratings for surface encoders by using a Lloyd's mirror interferometer with a 405 nm laser diode Peer-reviewed

Xinghui Li, Yuki Shimizu, So Ito, Wei Gao, Lijiang Zeng

Proceedings of SPIE - The International Society for Optical Engineering　8759　2013

DOI： 10.1117/12.2014467 　

ISSN： 0277-786X
Surface form metrology of micro-optics Peer-reviewed

Bin Xu, Zhigang Jia, Xinghui Li, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao

Proceedings of SPIE - The International Society for Optical Engineering　8769　2013

DOI： 10.1117/12.2019243 　

ISSN： 0277-786X

eISSN： 1996-756X
Modeling and analysis of a scanning electrostatic force microscope for surface profile measurement Peer-reviewed

Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao

Proceedings of SPIE - The International Society for Optical Engineering　8759　2013

DOI： 10.1117/12.2014460 　

ISSN： 0277-786X

eISSN： 1996-756X
The Shape optimization study of The Rolling Wheel of CNC Crushing Machine Peer-reviewed

Dexin Zhang, Wenliang Yang, Yangjie Ou, Lijuan Zhang, Shaowei Liu, Wei Gao

ADVANCED DESIGN AND MANUFACTURING TECHNOLOGY III, PTS 1-4　397-400　114-+　2013

DOI： 10.4028/www.scientific.net/AMM.397-400.114 　

ISSN： 1660-9336
Analysis of the forces in electrostatic force microscopy for profile measurement of micro-structured surface of dielectric Peer-reviewed

Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao

Proceedings of SPIE - The International Society for Optical Engineering　8916　2013

DOI： 10.1117/12.2035716 　

ISSN： 0277-786X

eISSN： 1996-756X
FBG Multiplex Distance Based on FMCW Technology Peer-reviewed

Li Shou-duo, Xiong Yan-ling, Shen Tao, Li Qiao-yi, Wang Li, Yang Wen-long, Gao Wei

PROCEEDINGS OF 2013 2ND INTERNATIONAL CONFERENCE ON MEASUREMENT, INFORMATION AND CONTROL (ICMIC 2013), VOLS 1 & 2　288-291　2013

ISSN： 2376-6158
Precision tool setting for fabrication of a microstructure array Peer-reviewed

Wei Gao, Yuan Liu Chen, Kang Won Lee, Young Jin Noh, Yuki Shimizu, So Ito

CIRP Annals - Manufacturing Technology　62　(1)　523-526　2013

DOI： 10.1016/j.cirp.2013.03.013 　

ISSN： 0007-8506

eISSN： 1726-0604
Design and construction of the motion mechanism of an XY micro-stage for precision positioning Peer-reviewed

Yuki Shimizu, Yuxin Peng, Junji Kaneko, Toyohiro Azuma, So Ito, Wei Gao, Tien Fu Lu

Sensors and Actuators, A: Physical　201　395-406　2013

DOI： 10.1016/j.sna.2013.08.012 　

ISSN： 0924-4247
Measurement of cutting edgewidth of a rotary cutting tool by using a laser displacement sensor Peer-reviewed

So Ito, Sho Sekine, Yuki Shimizu, Wei Gao, Tsutomu Fukuda, Akira Kato, Kouji Kubota

International Journal of Automation Technology　8　(1)　28-33　2013

DOI： 10.20965/ijat.2014.p0028 　

ISSN： 1881-7629

eISSN： 1883-8022
A radio frequency signal driver for quadrupole used in desktop orthogonal-injection time-of-flight mass spectrometer Peer-reviewed

Changjuan Guo, Zhongyao Jiang, Chunguang Xie, Hui Zhu, Wei Gao, Zhengxu Huang, Ping Cheng, Zhong Fu, Zhen Zhou

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT　694　255-262　2012/12

DOI： 10.1016/j.nima.2012.07.048 　

ISSN： 0168-9002
A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement Peer-reviewed

Akihide Kimura, Wei Gao, Woojae Kim, Koji Hosono, Yuki Shimizu, Lei Shi, Lijiang Zeng

Precision Engineering　36　(4)　576-585　2012/10

DOI： 10.1016/j.precisioneng.2012.04.005 　

ISSN： 0141-6359

eISSN： 1873-2372
Fast evaluation of period deviation and flatness of a linear scale by using a fizeau interferometer Peer-reviewed

Woo Jae Kim, Yuki Shimizu, Akihide Kimura, Wei Gao

International Journal of Precision Engineering and Manufacturing　13　(9)　1517-1524　2012/09

DOI： 10.1007/s12541-012-0200-6 　

ISSN： 2234-7593

eISSN： 2005-4602
On-machine profile measurement of large mirror for satellite (1st report) - Construction of the measurement system and development of the alignment methods Peer-reviewed

Shigeaki Goto, Yuki Shimizu, Jung Chul Lee, So Ito, Wei Gao, Shigeru Adachi, Kyohei Omiya, Hiroki Sato, Tetsuya Hisada, Yoshifumi Saito, Hiroaki Kubota

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　78　(7)　631-635　2012/07

DOI： 10.2493/jjspe.78.631 　

ISSN： 0912-0289
Spindle error motion measurement of a large precision roll lathe Peer-reviewed

Jungchul Lee, Wei Gao, Yuki Shimizu, Jooho Hwang, Jeong Seok Oh, Chun Hong Park

International Journal of Precision Engineering and Manufacturing　13　(6)　861-867　2012/06

DOI： 10.1007/s12541-012-0112-5 　

ISSN： 1229-8557
Spindle error motion measurement of a large precision roll lathe Peer-reviewed

JungChul Lee, Wei Gao, Yuki Shimizu, Jooho Hwang, Jeong Seok Oh, Chun Hong Park

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING　13　(6)　861-867　2012/06

DOI： 10.1007/s12541-012-0112-5 　

ISSN： 2234-7593
Precision measurement of carriage slide motion error of a drum roll lathe Peer-reviewed

Jung Chul Lee, Wei Gao, Yuki Shimizu, Jooho Hwang, Jeong Seok Oh, Chun Hong Park

Precision Engineering　36　(2)　244-251　2012/04

DOI： 10.1016/j.precisioneng.2011.10.005 　

ISSN： 0141-6359
Development of a Nanopipette Probe with Micro Sphere for Profile Measurement:Design and Evaluation of the Measuring Instrument

Ito So, Kodama Issei, Gao Wei

Proceedings of JSPE Semestrial Meeting　2012　969-970　2012
Publisher: The Japan Society for Precision Engineering
DOI： 10.11522/pscjspe.2012A.0.969.0 　
An air-bearing displacement sensor for nanometrology of surface forms Peer-reviewed

Kang Won Lee, So Ito, Yuki Shimizu, Wei Gao, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai

2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings　2469-2471　2012

DOI： 10.1109/I2MTC.2012.6229158 　

ISSN： 1091-5281
A scanning-light method for inspection of tool cutting edge Peer-reviewed

Yuki Shimizu, Sungho Jang, Takemi Asai, So Ito, Wei Gao

2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings　2395-2397　2012

DOI： 10.1109/I2MTC.2012.6229215 　

ISSN： 1091-5281
New measurement concept of nanometer-level defects on Si wafer surface by using micro contact sensor Peer-reviewed

Wenjian Lu, Shimizu Yuki, Gao Wei

Advanced Materials Research　497　137-141　2012

DOI： 10.4028/www.scientific.net/AMR.497.137 　

ISSN： 1022-6680
A noncontact scanning electrostatic force microscope for surface profile measurement Peer-reviewed

Wei Gao, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu

CIRP Annals - Manufacturing Technology　61　(1)　471-474　2012

DOI： 10.1016/j.cirp.2012.03.097 　

ISSN： 0007-8506

eISSN： 1726-0604
Establishment of a measuring station on a diamond turning machine for in-process cutting edge inspection of single point diamond micro-tools Peer-reviewed

Sung Ho Jang, Takemi Asai, Yuki Shimizu, Wei Gao

International Journal of Nanomanufacturing　8　(1-2)　106-122　2012/01

DOI： 10.1504/IJNM.2012.044659 　

ISSN： 1746-9392

eISSN： 1746-9406
Fabrication of micro-ball styluses for scanning-type surface form metrology Peer-reviewed

Shimizu Yuki, Xu Bin, Gao Wei

International Journal of Nanomanufacturing　8　(1-2)　87-105　2012/01

DOI： 10.1504/IJNM.2012.044657 　

ISSN： 1746-9392

eISSN： 1746-9406
Improvement of an air-bearing displacement sensor with nanometric resolution Peer-reviewed

So Ito, Kang Won Lee, Yuki Shimizu, Wei Gao

Key Engineering Materials　523-524　945-950　2012

DOI： 10.4028/www.scientific.net/KEM.523-524.945 　

ISSN： 1013-9826

eISSN： 1662-9795
Surface form measurement and analysis of a cylindrical workpiece with microstructures Peer-reviewed

Bin Xu, Yuki Shimizu, Toshiki Takeishi, So Ito, Wei Gao

Journal of Advanced Mechanical Design, Systems and Manufacturing　6　(6)　936-948　2012

DOI： 10.1299/jamdsm.6.936 　

ISSN： 1881-3054

eISSN： 1881-3054
Cutting edge height measurement of a rotary cutting tool by a laser displacement sensor Peer-reviewed

Shinichi Osawa, So Ito, Yuki Shimizu, Sungho Jang, Wei Gao, Tsutomu Fukuda, Akira Kato, Kouji Kubota

Journal of Advanced Mechanical Design, Systems and Manufacturing　6　(6)　815-828　2012

DOI： 10.1299/jamdsm.6.815 　

ISSN： 1881-3054

eISSN： 1881-3054
Cr-N strain-gauge-type precision displacement sensor for measuring positions of micro stage Peer-reviewed

Toyohiro Azuma, Eiji Niwa, Yuxin Peng, Junji Kaneko, Yuki Shimizu, So Ito, Wei Gao

Key Engineering Materials　523-524　939-944　2012

DOI： 10.4028/www.scientific.net/KEM.523-524.939 　

ISSN： 1013-9826

eISSN： 1662-9795
Edge contour measurement of single point diamond cutting tools by an optical probe Peer-reviewed

Sung Ho Jang, Yuki Shimizu, Takemi Asai, So Ito, Wei Gao

Key Engineering Materials　523-524　925-931　2012

DOI： 10.4028/www.scientific.net/KEM.523-524.925 　

ISSN： 1013-9826

eISSN： 1662-9795
Design and test of a three-axis mosaic surface encoder Peer-reviewed

Woo Jae Kim, Yuki Shimizu, Koji Hosono, Ito So, Wei Gao

Key Engineering Materials　523-524　919-924　2012

DOI： 10.4028/www.scientific.net/KEM.523-524.919 　

ISSN： 1013-9826

eISSN： 1662-9795
Design of a three-axis surface encoder with a blue-ray laser diode Peer-reviewed

Xinghui Li, Yuki Shimizu, Hiroshi Muto, So Ito, Wei Gao

Key Engineering Materials　523-524　913-918　2012

DOI： 10.4028/www.scientific.net/KEM.523-524.913 　

ISSN： 1013-9826

eISSN： 1662-9795
Form error characterization of reflective-type gratings Peer-reviewed

Yuki Shimizu, Woo Jae Kim, So Ito, Wei Gao

Key Engineering Materials　523-524　859-864　2012

DOI： 10.4028/www.scientific.net/KEM.523-524.859 　

ISSN： 1013-9826

eISSN： 1662-9795
Eccentric error compensation for pitch deviation measurement of gears Peer-reviewed

Bin Xu, So Ito, Yuki Shimizu, Wei Gao

Key Engineering Materials　523-524　853-858　2012

DOI： 10.4028/www.scientific.net/KEM.523-524.853 　

ISSN： 1013-9826

eISSN： 1662-9795
Analysis and measurement of the dynamic motions of a large-scale rotating roll workpiece Peer-reviewed

Jung Chul Lee, Wei Gao, Yuki Shimizu, So Ito, Jooho Hwang, Jeong Seok Oh, Chun Hong Park

Key Engineering Materials　523-524　847-852　2012

DOI： 10.4028/www.scientific.net/KEM.523-524.847 　

ISSN： 1013-9826

eISSN： 1662-9795
Dynamic response of an air-bearing displacement sensor for on-machine surface form measurement Peer-reviewed

Kang Won Lee, So Ito, Yuki Shimizu, Wei Gao, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai

Key Engineering Materials　523-524　836-841　2012

DOI： 10.4028/www.scientific.net/KEM.523-524.836 　

ISSN： 1013-9826

eISSN： 1662-9795
Design and experiment of thermal contact sensor detecting defects on Si wafer surface Peer-reviewed

Wenjian Lu, Yuki Shimizu, So Ito, Wei Gao

Key Engineering Materials　523-524　826-831　2012

DOI： 10.4028/www.scientific.net/KEM.523-524.826 　

ISSN： 1013-9826

eISSN： 1662-9795
A micro-stage for linear-rotary positioning Peer-reviewed

Yuxin Peng, So Ito, Yuki Shimizu, Wei Gao

Key Engineering Materials　523-524　650-655　2012

DOI： 10.4028/www.scientific.net/KEM.523-524.650 　

ISSN： 1013-9826

eISSN： 1662-9795
Effects of scanning speed on measurement results for high-speed and large-area measurement AFM Peer-reviewed

Yu Guo Cui, Gao Fa He, Yoshikazu Arai, Wei Gao

Guangxue Jingmi Gongcheng/Optics and Precision Engineering　19　(11)　2636-2643　2011/11

DOI： 10.3788/OPE.20111911.2636 　

ISSN： 1004-924X
Multi-axis grating encoders for stage motion measurement Peer-reviewed

Woo Jae Kim, Akihide Kimura, Koji Hosono, Yuki Shimizu, Wei Gao

International Journal of Nanomanufacturing　7　(5-6)　409-426　2011/11

DOI： 10.1504/IJNM.2011.043684 　

ISSN： 1746-9392

eISSN： 1746-9406
Optical analysis of an optical probe for three-dimensional position detection of micro-objects Peer-reviewed

Sung Ho Jang, Takemi Asai, Yuki Shimizu, Wei Gao

International Journal of Automation Technology　5　(6)　862-865　2011/11
Publisher: Fuji Technology Press
DOI： 10.20965/ijat.2011.p0862 　

ISSN： 1881-7629

eISSN： 1883-8022
Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures Peer-reviewed

Kang Won Lee, Young Jin Noh, Wei Gao, Yoshikazu Arai, Yuki Shimizu, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai

International Journal of Precision Engineering and Manufacturing　12　(4)　671-678　2011/08

DOI： 10.1007/s12541-011-0087-7 　

ISSN： 1229-8557
Experimental Investigation of an Air-bearing Displacement Sensor for On-machine Surface Form Measurement of Micro-structures Peer-reviewed

Kang-Won Lee, Young-Jin Noh, Wei Gao, Yoshikazu Arai, Yuki Shimizu, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING　12　(4)　671-678　2011/08

DOI： 10.1007/s12541-011-0087-7 　

ISSN： 2234-7593

eISSN： 2005-4602
An ultra-precision scanning tunneling microscope Z-scanner for surface profile measurement of large amplitude micro-structures Peer-reviewed

Shigeaki Goto, Keiichiro Hosobuchi, Wei Gao

Measurement Science and Technology　22　(8)　2011/08

DOI： 10.1088/0957-0233/22/8/085101 　

ISSN： 0957-0233

eISSN： 1361-6501
A two-degree-of-freedom linear encoder with a mosaic scale grating Peer-reviewed

Akihide Kimura, Koji Hosono, Woo Jae Kim, Yuki Shimizu, Wei Gao, Lijiang Zeng

International Journal of Nanomanufacturing　7　(1)　73-91　2011/05

DOI： 10.1504/IJNM.2011.039964 　

ISSN： 1746-9392

eISSN： 1746-9406
A linear micro-stage with a long stroke for precision positioning of micro-objects Peer-reviewed

Yu Xin Peng, Wei Gao, Jun Kaneko, Yoshikazu Arai, Yuki Shimizu, Koichi Okamoto, Miho Chiba, Shuji Aisawa

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering　9　(3)　221-227　2011/05

ISSN： 1672-6030
Surface encoders for a mosaic scale grating Peer-reviewed

Koji Hosono, Woo Jae Kim, Akihide Kimura, Yuki Shimizu, Wei Gao

International Journal of Automation Technology　5　(2)　91-96　2011/03
Publisher: Fuji Technology Press
DOI： 10.20965/ijat.2011.p0091 　

ISSN： 1881-7629

eISSN： 1883-8022
Spindle error motion measurement of a large-scale ultra-precision lathe

Lee JungChul, Shimizu Yuki, Gao Wei, Park ChunHong, Hwang Jooho, Oh JeongSeok

Proceedings of JSPE Semestrial Meeting　2011　876-877　2011
Publisher: The Japan Society for Precision Engineering
DOI： 10.11522/pscjspe.2011A.0.876.0 　

More details Close

This paper presents a spindle error measurement system to evaluate the performance of a spindle of a large-scale ultra-precision lathe, which is under development for fabrication of large roll dies with micro-structured surfaces. Measurement of the spindle error motion is an important issue for the ultra-precision lathe because the fabrication accuracy is influenced by the motion error. In order to measure the spindle error motion of the large-scale ultra-precision lathe, reversal technique is employed. In this research, large-scale roll workpiece is used as the measurement artifact instead of other master ball or cylinders. This paper reports the spindle error motion measurement with refined reversal operation method for the reversal of the large-scale roll workpiece. Spindle error motion was evaluated over the entire fabrication length (1.7 m) of the large-scale ultra-precision lathe.
International Conference Report

Journal of the Japan Society for Precision Engineering　77　(11)　1081-1081　2011
Publisher: The Japan Society for Precision Engineering
DOI： 10.2493/jjspe.77.1081 　

ISSN： 0912-0289
Questionnaire survey on ultra-precision positioning

T. Oiwa, M. Katsuki, M. Karita, W. Gao, S. Makinouchi, K. Sato, Y. Oohashi

Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011　2　463-466　2011
Height measurement of cutting edge by a laser displacement sensor

Shinichi Osawa, Yuki Shimizu, Wei Gao, Tsutomu Fukuda, Akira Kato, Kouji Kubota

Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011　2011
Wavelet analysis for precision measurement of a micro-part

Toshiki Takeishi, Xu Bin, Yuki Shimizu, Wei Gao

Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011　2011
An angle sensor with a laser rangefinder

Takayuki Meguro, Yuki Shimizu, Wei Gao

Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011　2011
Surface characterization of a diamond turned XY sinusoidal grating Peer-reviewed

Y. Shimizu, S. Osawa, T. Meguro, W. Lu, W. Gao

Procedia Engineering　19　337-342　2011
Publisher: Elsevier Ltd
DOI： 10.1016/j.proeng.2011.11.122 　

ISSN： 1877-7058
High-aspect-ratio and self-sensing probe for AMF based on micro-fabrication Peer-reviewed

Gaofa He, Wei Gao

Advanced Materials Research　317-319　1645-1648　2011

DOI： 10.4028/www.scientific.net/AMR.317-319.1645 　

ISSN： 1022-6680
Design of a linear-rotary micro-stage Peer-reviewed

Yuxin Peng, Yasumasa Sakurai, Yoshikazu Arai, Yuki Shimizu, Wei Gao

Proceedings of SPIE - The International Society for Optical Engineering　8321　2011

DOI： 10.1117/12.904884 　

ISSN： 0277-786X
A glass tube micro-stylus probe for surface form metrology Peer-reviewed

Bin Xu, Yuki Shimizu, Wei Gao

Proceedings of SPIE - The International Society for Optical Engineering　8321　2011

DOI： 10.1117/12.904875 　

ISSN： 0277-786X
A three-axis autocollimator for detection of angular error motions of a precision stage Peer-reviewed

W. Gao, Y. Saito, H. Muto, Y. Arai, Y. Shimizu

CIRP Annals - Manufacturing Technology　60　(1)　515-518　2011

DOI： 10.1016/j.cirp.2011.03.052 　

ISSN： 0007-8506

eISSN： 1726-0604
A force sensor integrated fast tool control system - System design and in-process measurement of thrust force Peer-reviewed

Young Jin Noh, Kang Won Lee, Yoshikazu Arai, Wei Gao

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　77　(1)　85-89　2011/01

DOI： 10.2493/jjspe.77.85 　

ISSN： 0912-0289
A novel sensorless control of a two-axis planar motion stage for precision positioning Peer-reviewed

Song Yi Dian, Hang Dong, Wei Gao

Advanced Materials Research　189-193　4121-4125　2011

DOI： 10.4028/www.scientific.net/AMR.189-193.4121 　

ISSN： 1022-6680
Precision measurement of micro-lens profile by using a force-controlled diamond cutting tool on an ultra-precision lathe Peer-reviewed

K. W. Lee, Y. J. Noh, Y. Arai, Y. Shimizu, W. Gao

International Journal of Precision Technology　2　211-225　2011
A linear-rotary stage for precision positioning Peer-reviewed

Wei Gao, Shinji Sato, Yoshikazu Arai

Precision Engineering　34　(2)　301-306　2010/04

DOI： 10.1016/j.precisioneng.2009.07.003 　

ISSN： 0141-6359
Measurement of slide error of an ultra-precision diamond turning machine by using a rotating cylinder workpiece Peer-reviewed

Wei Gao, Jung Chul Lee, Yoshikazu Arai, Young Jin Noh, Joo Ho Hwang, Chun Hong Park

International Journal of Machine Tools and Manufacture　50　(4)　404-410　2010/04

DOI： 10.1016/j.ijmachtools.2009.10.011 　

ISSN： 0890-6955
Editorial: Advances in measurement technology and intelligent instruments for manufacturing engineering Peer-reviewed

Yongsheng Gao, Wei Gao, Yasuhiro Takaya, Michael Krystek

International Journal of Advanced Manufacturing Technology　46　(9-12)　843-844　2010/02

DOI： 10.1007/s00170-009-2498-5 　

ISSN： 0268-3768

eISSN： 1433-3015
A spiral scanning probe system for micro-aspheric surface profile measurement Peer-reviewed

A. Shibuya, Y. Arai, Y. Yoshikawa, W. Gao, Y. Nagaike, Y. Nakamura

International Journal of Advanced Manufacturing Technology　46　(9-12)　845-862　2010/02

DOI： 10.1007/s00170-008-1812-y 　

ISSN： 0268-3768

eISSN： 1433-3015
Dynamic compensation of modeling uncertainties and disturbances of a precision planar motion stage based on sliding mode observer Peer-reviewed

Songyi Dian, Yoshikazu Arai, Wei Gao

International Journal of Advanced Manufacturing Technology　46　(9-12)　899-912　2010/02

DOI： 10.1007/s00170-009-2009-8 　

ISSN： 0268-3768

eISSN： 1433-3015
Micro and nano measurement instruments

W. Gao

Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010　2　235-238　2010
A multi-probe surface encoder for mosaic XY grating

Koji Hosono, Akihide Kimura, Woo Jae Kim, Wei Gao, Lijiang Zeng

10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010　282-285　2010
An optical sensor for measurement of angular motions of a planar motion stage

Hiroshi Muto, Tetsuo Sugeno, Yusuke Saito, Yoshikazu Arai, Wei Gao

10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010　37-40　2010
Ultra-precision scanning tunneling microscope for measurement of high-aspect ratio structures

Shigeaki Goto, Wei Gao

10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010　489-492　2010
Input compliance variation of a particular one DOF compliant mechanism caused by fitting in Piezo stack actuator Peer-reviewed

Tien Fu Lu, Wei Gao

2010 IEEE International Conference on Mechatronics and Automation, ICMA 2010　1908-1912　2010

DOI： 10.1109/ICMA.2010.5588941 　
Effects of centering error of probe tip in spiral scanning AFM for large-area measurement on measuring results Peer-reviewed

Yuguo Cui, Gaofa He, Yoshikazu Arai, Wei Gao

2010 International Conference on Mechanic Automation and Control Engineering, MACE2010　3024-3027　2010

DOI： 10.1109/MACE.2010.5536040 　
An AFM system with multi-mode scanning for large-area measurement Peer-reviewed

Yuguo Cui, Gaofa He, Yoshikazu Araic, Wei Gao

Proceedings of SPIE - The International Society for Optical Engineering　7657　2010

DOI： 10.1117/12.865476 　

ISSN： 0277-786X
Edge profile measurement of micro-cutting tools on a diamond turning machine Peer-reviewed

T. Asai, S. H. Jang, Y. Arai, W. Gao

Proceedings of SPIE - The International Society for Optical Engineering　7544　2010

DOI： 10.1117/12.885660 　

ISSN： 0277-786X
Slide error measurement of a large-scale ultra-precision lathe Peer-reviewed

Jung Chul Lee, Wei Gao, Young Jin Noh, Joo Ho Hwang, Jeoung Seok Oh, Chun Hong Park

Proceedings of SPIE - The International Society for Optical Engineering　7544　2010

DOI： 10.1117/12.885661 　

ISSN： 0277-786X
Surface analysis of electrical arc residues in fire investigation Peer-reviewed

Ying Wu, Wei Gao, Man Di, Changzhang Zhao

MECHANICAL ENGINEERING AND GREEN MANUFACTURING, PTS 1 AND 2　172-+　2010

DOI： 10.4028/www.scientific.net/AMM.34-35.172 　
Effects of Spindle Speed on Surface Qualities in WPC Sawing Peer-reviewed

Guo Xiaolei, Liu Huinan, Gao Wei, Cao Pingxiang, Guo Yong

ADVANCES IN FUNCTIONAL MANUFACTURING TECHNOLOGIES　33　487-491　2010

DOI： 10.4028/www.scientific.net/AMM.33.487 　

ISSN： 1660-9336
A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating Peer-reviewed

W. Gao, A. Kimura

CIRP Annals - Manufacturing Technology　59　(1)　505-508　2010

DOI： 10.1016/j.cirp.2010.03.035 　

ISSN： 0007-8506

eISSN： 1726-0604
Position and out-of-straightness measurement of a precision linear air-bearing stage by using a two-degree-of-freedom linear encoder Peer-reviewed

Akihide Kimura, Wei Gao, Zeng Lijiang

Measurement Science and Technology　21　(5)　2010

DOI： 10.1088/0957-0233/21/5/054005 　

ISSN： 0957-0233

eISSN： 1361-6501
Investigation of an optical sensor for small tilt angle detection of a precision linear stage Peer-reviewed

Yusuke Saito, Yoshikazu Arai, Wei Gao

Measurement Science and Technology　21　(5)　2010

DOI： 10.1088/0957-0233/21/5/054006 　

ISSN： 0957-0233

eISSN： 1361-6501
A high speed and compact system for profile measurement of scroll compressors Peer-reviewed

Yoshikazu Arai, Akinori Inada, Jianhong Yang, Wei Gao

International Journal of Precision Engineering and Manufacturing　10　(5)　27-32　2009/12

DOI： 10.1007/s12541-009-0089-x 　

ISSN： 1229-8557
A precision instrument for 3D edge profile measurement of single point diamond micro-cutting tools Peer-reviewed

Takemi Asai, Yoshikazu Aral, Wei Gao

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　75　(7)　892-896　2009/07

DOI： 10.2493/jjspe.75.892 　

ISSN： 0912-0289
An Improved Three-Probe Method for Precision Measurement of Straightness Invited Peer-reviewed

Wei Gao, Jung Chul Lee, Yoshikazu Arai, Chun Hong Park

Technisches Messen　76　(5)　259-265　2009/05

DOI： 10.1524/teme.2009.0966 　

ISSN： 0171-8096
Detection of three-axis angles by an optical sensor Invited Peer-reviewed

Yusuke Saito, Yoshikazu Arai, Wei Gao

Sensors and Actuators, A: Physical　150　(2)　175-183　2009/03/25

DOI： 10.1016/j.sna.2008.12.019 　

ISSN： 0924-4247
SPECIAL ISSUE: ADVANCES IN INTELLIGENT NANO-MEASUREMENT TECHNOLOGY Peer-reviewed

Wei Gao, Kiyoshi Takamasu, Yasuhiro Takaya, Satoru Takahashi

INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING　3　(3)　157-159　2009

ISSN： 1749-785X
S1303-2-3 Investigation of micro linear stage

KANEKO Junji, ARAI Yoshikazu, GAO Wei

The proceedings of the JSME annual meeting　2009　283-284　2009
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/jsmemecjo.2009.4.0_283 　

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In the field of mobile phone, the demand of the image stabilizer due to the development of the vest pocket camera for the mobile phone in increasing and it is needed to develop the stage where the image sensor on it can quickly move. This paper presents a micro linear stage which has a high speed, a long stroke and can perform precision positioning. This stage which is based on the principle of friction drive has a long stroke and a high resolution of up to 6 nm. In this research, by using small and strong magnets as friction elements, the change in the frictional force with respect to changes in posture can be controlled, and this provides an advantage of stable drive in free postures. The characteristic of the stage is also presented.
S1303-2-5 A stylus for measurement of 3D micro-surfaces

ENDO Takuo, SHIBUYA Atsushi, ARAI Yoshikazu, GAO Wei

The proceedings of the JSME annual meeting　2009　287-288　2009
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/jsmemecjo.2009.4.0_287 　

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Three-dimensional micro-structured surface including a micro gear and aspheric lens is used for industrial robots, medical devices, and optical as well as printing equipments and so on. To measure such surface profile, micro-stylus whose tip ball is less than several micrometers in diameter is necessary. This paper describes the development of a micro-stylus with tip balls of 30μm in diameter. The tip ball is silica spheres with feature of high accuracy and affordable price. Additionally, to reduce the effect of stick-slip oscillation caused by friction, which is crucial problem, we developed a micro-tapping stylus using PZT actuator. Using the micro-tapping stylus, surface profile measurement of a micro gear is carried out.
S1303-2-4 Development of a high sensitive angle sensor by using a single cell photodiode

SUZUKI Tatsuro, SAITO Yusuke, ARAI Yoshikazu, GAO Wei

The proceedings of the JSME annual meeting　2009　285-286　2009
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/jsmemecjo.2009.4.0_285 　

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This paper describes a highly sensitive two-axis angle sensor by using a single cell photodiode for measurement of surface profiles and error motions. The sensor, which is based on the principle of the laser autocollimation, employs a laser diode as the light source. The reflected beam from the target surface is received by an autocollimation unit consisting of an objective lens and a light spot position-sensing detector located at the focal position of the lens. It is confirmed that the sensor sensitivity depends on the spot size on the focal position and a single cell photodiode is employed as the light spot position-sensing detector to sense the position of the light spot at the focal position. A prototype two-axis angle sensor with a dimensional of 65 mm (W) × 70 mm (L) × 40 mm (H) is designed and constructed. Experimental results have shown that the sensor has a sensitivity of ±3 %/arc-seconds and a resolution of ±0.03 arc-seconds.
S1303-1-5 PRECISION MEASUREMENT OF DIAMOND CUTTING TOOL : Simulation on positioning of cutting tool edge with the optical probe

YANG Yi, SAYEDA Ferdous, ASAI Takemi, ARAI Yoshikazu, GAO Wei

The proceedings of the JSME annual meeting　2009　275-276　2009
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/jsmemecjo.2009.4.0_275 　

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This paper describes simulation results of positioning the tool edge top in 3-directions by using an optical sensor. In the optical sensor, a laser beam from a laser diode is focused to generate a small beam spot with a micrometer-order diameter at the beam waist and then received by a photo-detector. When the tool edge is brought into the light, the light intensity detected by the photodiode will be changed depending on the position of the tool edge in the light. Computer simulations were carried out to confirm the relationship between the photodiode output and the position of the tool edge top.
S1303-1-2 Precision measurement error motions of an ultra-precision diamond turning machine

LEE Jung Chul, NOH Young Jin, ARAI Yoshikazu, GAO Wei

The proceedings of the JSME annual meeting　2009　269-270　2009
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/jsmemecjo.2009.4.0_269 　

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Ultra-precision diamond turning machine has the slide motion error which consists of the straightness error and the parallelism error. However, measurement of the parallelism error between the slide axis and the spindle axis of a diamond turning machine is difficult by the conventional reversal method. In order to measure not only the straightness error but also parallelism error, the rotating reversal method is proposed. Two capacitive sensors are employed to scan the cylinder workpiece which was installed on the spindle. The evaluate straightness error of the Z-slide of the ultra-precision diamond turning machine was to be about 100 nm and parallelism error was measured to be approximately 1 arc-second of the Z-slide by the rotating reversal method over a measurement range of 126 mm
Parallelism measurement of the slide axis with respect to the spindle axis of a diamond turning machine

Jungchul Lee, Youngjin Noh, Yoshikazu Arai, Wei Gao, Jooho Hwang, Chunhong Park

Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009　2009
Profile measurement of micro-structured surfaces by using SPMs

Shigeaki Goto, Takemi Asai, Yoshikazu Arai, Wei Gao

Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009　2009
Evaluation of machining errors of scroll profiles

Jianhong Yang, Y. Arai, W. Gao

Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009　2009
Compensation of motion error in a high accuracy AFM Peer-reviewed

Yuguo Cui, Yoshikazu Arai, Gaofa He, Takemi Asai, Wei Gao

Proceedings of SPIE - The International Society for Optical Engineering　7133　2009

DOI： 10.1117/12.810123 　

ISSN： 0277-786X
Nanometric edge profile measurement of cutting tools on a diamond turning machine Peer-reviewed

Takemi Asai, Yoshikazu Arai, Yuguo Cui, Wei Gao

Proceedings of SPIE - The International Society for Optical Engineering　7133　2009

DOI： 10.1117/12.807623 　

ISSN： 0277-786X
Precision measurement of scroll profiles Peer-reviewed

Y. Arai, A. Inada, W. Gao

Proceedings of SPIE - The International Society for Optical Engineering　7133　2009

DOI： 10.1117/12.807678 　

ISSN： 0277-786X
Measurement of high-NA axisymmetric aspherical surface with continuous interference method Peer-reviewed

Y. Nagaike, T. Kuriyagawa, W. Gao, J. Yan, N. Yoshihara

Key Engineering Materials　389-390　102-107　2009

DOI： 10.4028/0-87849-364-6.102 　

ISSN： 1013-9826

eISSN： 1662-9795
3D profile measurement of nanometer cutting edges of single-point diamond tools for ultra-precision machining Invited Peer-reviewed

Y. Arai, T. Asai, S. Ferdous, W. Gao

Advanced Materials Research　69-70　(70)　138-142　2009

DOI： 10.4028/www.scientific.net/AMR.69-70.138 　

ISSN： 1022-6680
Fast Positioning of Cutting Tool by a Voice Coil Actuator for Micro-Lens Fabrication Invited Peer-reviewed

Young Jin Noh, Masayuki Nagashima, Yoshikazu Arai, Wei Gao

International Journal of Automation Technology　3　(3)　257-262　2009
Improvement of a Fast Tool Control unit for cutting force measurement in diamond turning of micro-lens array Invited Peer-reviewed

Jin Young, Yoshikazu Arai, Wei Gao

International Journal of Surface Science and Engineering　3　(3)　227-241　2009

DOI： 10.1504/IJSURFSE.2009.026611 　

ISSN： 1749-785X

eISSN： 1749-7868
Precision positioning control of a Sawyer motor-based two-axis planar motion stage Invited Peer-reviewed

Songyi Dian, Yoshikazu Arai, Wei Gao

International Journal of Surface Science and Engineering　3　(3)　253-271　2009

DOI： 10.1504/IJSURFSE.2009.026613 　

ISSN： 1749-785X

eISSN： 1749-7868
Rapid Measurement of Involute Profiles for Scroll Compressors Peer-reviewed

Jianhong Yang, Y. Arai, W. Gao

Measurement Science Review　9　(3)　67-70　2009/01/01

DOI： 10.2478/v10048-009-0009-3 　

ISSN： 1335-8871
Precision measurement of cylinder surface profile on an ultra-precision machine tool Peer-reviewed

J. Lee, Y. Noh, Y. Arai, W. Gao, C. Park

Measurement Science Review　9　(2)　49-52　2009/01/01

DOI： 10.2478/v10048-009-0008-4 　

ISSN： 1335-8871
Precision and fast measurement of 3D cutting edge profiles of single point diamond micro-tools Peer-reviewed

W. Gao, T. Asai, Y. Arai

CIRP Annals - Manufacturing Technology　58　(1)　451-454　2009

DOI： 10.1016/j.cirp.2009.03.009 　

ISSN： 0007-8506

eISSN： 1726-0604
On-Machine Measurement of Tool Cutting Edge Profiles Peer-reviewed

Takemi Asai, Sayeda Ferdous, Yoshikazu Arai, Yi Yang, Wei Gao

International Journal of Automation Technology　3　(4)　408-414　2009
Fabrication of large-area micro-lens arrays with fast tool control Invited Peer-reviewed

Young Jin Noh, Yoshikazu Arai, Makoto Tano, Wei Gao

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING　9　(4)　32-38　2008/10

ISSN： 1229-8557
Coolant effects on tool wear in machining single-crystal silicon with diamond tools Peer-reviewed

Y. Nagaike, T. Kuriyagawa, W. Gao, J. Yan, N. Yoshihara

Key Engineering Materials　389-390　102-107　2008/09
Development of a three-axis angle sensor - Proposal of the measurement principle and identification experiments Invited Peer-reviewed

Yusuke Saito, Yoshikazu Arai, Wei Gao

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　74　(9)　997-1001　2008/09

DOI： 10.2493/jjspe.74.997 　

ISSN： 0912-0289
A three-axis displacement sensor based on interference of diffracted beams Invited Peer-reviewed

Akihide Kimura, Yoshikazu Arai, Wei Gao

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　74　(9)　976-980　2008/09

DOI： 10.2493/jjspe.74.976 　

ISSN： 0912-0289
Advances in measurement technology and intelligent instruments for production engineering Peer-reviewed

Wei Gao, Yasuhiro Takaya, Yongsheng Gao, Michael Krystek

Measurement Science and Technology　19　(8)　2008/08/01
Publisher: Institute of Physics Publishing
DOI： 10.1088/0957-0233/19/8/080101 　

ISSN： 0957-0233

eISSN： 1361-6501
A high-speed atomic force microscope for precision measurement of microstructured surfaces Invited Peer-reviewed

Yuguo Cui, Yoshikazu Arai, Takemi Asai, Bin Feng Ju, Wei Gao

International Journal of Precision Engineering and Manufacturing　9　(3)　27-32　2008/07

ISSN： 1229-8557
A spiral scanning-type AFM for high-speed and large-area measurement

Yuguo Cui, Gaofa He, Yoshikazu Arai, Takemi Asai, Wei Gao

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008　2　384-388　2008
An Instrument for three-dimensional edge profile measurement of micro-cutting tools

T. Asai, Y. Arai, Y. Cui, W. Gao

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008　1　310-314　2008
Multi-axis angle sensor based on laser autocollimation

Yusuke Saito, Yoshikazu Arai, Wei Gao

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008　1　333-337　2008
Profile measurement of micro-aspheric surface by a small-scale measuring instrument

Atsushi Shibuya, Yoshikazu Arai, Yasuo Yoshikawa, Wei Gao

Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE　2008
Detection of micro tool wear in diamond turning of large area micro-lens array by in-process cutting force measurement

Young Jin Noh, Yoshikazu Arai, Wei Gao

Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE　2008
Development of a sensitive 3-axis angle sensor based on laser autocollimation

Yusuke Saito, Yoshikazu Arai, Wei Gao

Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE　2008
An XYθ<inf>Z</inf> planar motion stage system driven by a surface motor for precision positioning Peer-reviewed

Wei Gao

Smart Devices and Machines for Advanced Manufacturing　257-281　2008
Publisher: Springer London
DOI： 10.1007/978-1-84800-147-3_11 　
Researching and manufacturing of endless diamond wire saws and the cutting experiment Peer-reviewed

Wei Gao, Bojiang Ma, Tongkun Cao, Zhenchang Liu

ADVANCES IN GRINDING AND ABRASIVE TECHNOLOGY XIV　359-360　445-+　2008

ISSN： 1013-9826
Inversion of rough surface parameters based on travel-time statistics of backscattered pulses Peer-reviewed

Gao Wei, Wang Ning

CHINESE JOURNAL OF GEOPHYSICS-CHINESE EDITION　51　(1)　260-265　2008/01

ISSN： 0001-5733
Low-cost High-efficiency 4 Channel Pluggable Parallel Optical Transceiver Using Optoelectronic MCM Packaging Technologies Peer-reviewed

Baoxia Li, Lixi Wan, Chengyue Yang, Wei Gao, Yao Lv, Zhihua Li, Xu Zhang

2008 INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY & HIGH DENSITY PACKAGING, VOLS 1 AND 2　50-53　2008
Online measurement of micro-aspheric surface profile with profile with compensation of scanning error Invited Peer-reviewed

Y. Arai, A. Shibuya, Y. Yoshikawa, W. Gao

Key Engineering Materials　381-382　(382)　175-178　2008

ISSN： 1013-9826

eISSN： 1662-9795
A novel control method using nonlinear observer for a XYθ<inf>z</inf> planar actuator Invited Peer-reviewed

Y. Arai, S. Y. Dian, W. Gao

Key Engineering Materials　381-382　(382)　195-198　2008

ISSN： 1013-9826

eISSN： 1662-9795
AFM with the slope compensation technique for high-speed precision measurement of micro-structured surfaces Invited Peer-reviewed

Y. G. Cui, B. F. Ju, J. Aoki, Y. Arai, W. Gao

Key Engineering Materials　381-382　(382)　35-38　2008

DOI： 10.4028/www.scientific.net/kem.381-382.35 　

ISSN： 1013-9826

eISSN： 1662-9795
A two-degree-of-freedom linear encoder for measurement of position and straightness Peer-reviewed

Akihide Kimura, Yoshikazu Arai, Wei Gao

Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE　34　(1)　145-155　2008

DOI： 10.1016/j.precisioneng.2009.05.008 　

ISSN： 0141-6359

eISSN： 1873-2372
Displacement sensor based on grating imaging with a cylindrical lens array and a phase grating Peer-reviewed

Toru Oka, Yoichi Ohmura, Hajime Nakajima, Toshiro Nakashima, Wei Gao, Kazuhiro Hane, Satoshi Kiyono

Optical Engineering　46　(7)　073603(8pp)　2007/07

DOI： 10.1117/1.2753185 　

ISSN： 0091-3286

eISSN： 1560-2303
Measurement and compensation of error motions of a diamond turning machine Invited Peer-reviewed

Wei Gao, Makoto Tano, Takeshi Araki, Satoshi Kiyono, Chun Hong Park

Precision Engineering　31　(3)　310-316　2007/07

DOI： 10.1016/j.precisioneng.2006.06.003 　

ISSN： 0141-6359
Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine Invited Peer-reviewed

Wei Gao, Jun Aoki, Bing Feng Ju, Satoshi Kiyono

Precision Engineering　31　(3)　304-309　2007/07

DOI： 10.1016/j.precisioneng.2007.01.003 　

ISSN： 0141-6359
Precision fabrication of a large-area sinusoidal surface using a fast-tool-servo technique - Improvement of local fabrication accuracy - Peer-reviewed

Wei Gao, Makoto Tano, Takeshi Araki, Satoshi Kiyono

JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing　49　(4)　1203-1208　2007/06/15

DOI： 10.1299/jsmec.49.1203 　

ISSN： 1344-7653

eISSN： 1347-538X
Experimental investigation of surface flashover in vacuum using nanosecond pulses Peer-reviewed

Ping Yan, Tao Shao, Jue Wang, Wei Gao, Weiqun Yuan, Ruzheng Pan, Shichang Zhang, Guangsheng Sun

IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION　14　(3)　634-642　2007/06

ISSN： 1070-9878
A three-probe system for measuring the parallelism and straightness of a pair of rails for ultra-precision guideways Invited Peer-reviewed

Jooho Hwang, Chun Hong Park, Wei Gao, Seung Woo Kim

International Journal of Machine Tools and Manufacture　47　(7-8)　1053-1058　2007/06

DOI： 10.1016/j.ijmachtools.2006.10.003 　

ISSN： 0890-6955
Hot embossing of a sine-grid for a surface encoder Invited Peer-reviewed

Ryutaro Hirabayashi, Young Jin Noh, Yoshikazu Arai, Wei Gao

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering　5　(2)　102-106　2007/06

ISSN： 1672-6030
A single lens micro-angle sensor Invited Peer-reviewed

Yusuke Saito, Wei Gao, Satoshi Kiyono

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING　8　(2)　14-19　2007/04

ISSN： 1229-8557
Profile measurements of micro-aspheric surfaces using an air-bearing stylus with a microprobe Invited Peer-reviewed

Atsushi Shibuya, Wei Gao, Yasuo Yoshikawa, Bing-Feng Ju, Satoshi Kiyono

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING　8　(2)　26-31　2007/04

ISSN： 1229-8557
Design and construction of a surface encoder with dual sine-grids Invited Peer-reviewed

Akihide Kimurai, Wei Gao, Satoshi Kiyono

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING　8　(2)　20-25　2007/04

ISSN： 1229-8557
An AFM-based edge profile measuring instrument for diamond cutting tools Invited Peer-reviewed

Takemi Asai, Takenori Motoki, Wei Gao, Bing-Feng Ju, Satoshi Kiyono

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING　8　(2)　54-58　2007/04

ISSN： 1229-8557
A high-speed profile measurement system for scroll compressors

Akinori Inada, Wei Gao

LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings　2007
Natural frequency and mode shape analysis of structures with uncertainty Peer-reviewed

Wei Gao

MECHANICAL SYSTEMS AND SIGNAL PROCESSING　21　(1)　24-39　2007/01

DOI： 10.1016/j.ymssp.2006.05.007 　

ISSN： 0888-3270
Wire sweep improvement study for fine pitch device Peer-reviewed

J. M. Liu, J. Z. Yao, Gao Wei, Y. S. Lu

2007 9TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE, VOLS 1 AND 2　61-+　2007
An air-bearing displacement sensor with a micro-ball stylus for profile measurement of 3D micro-structured surfaces Peer-reviewed

Y. Yoshikawa, A. Shibuya, W. Gao

Proceedings of the 35th International MATADOR 2007 Conference　249-252　2007

DOI： 10.1007/978-1-84628-988-0_56 　
Practical velocity-updating algorithm of strapdown inertial navigation system with ring laser gyro Peer-reviewed

Wei Gao, Guofu Zhai, Yueyang Ben, Qi Nie

2007 IEEE INTERNATIONAL CONFERENCE ON CONTROL AND AUTOMATION, VOLS 1-7　2119-+　2007

ISSN： 1948-3449
A Three-axis Displacement Sensor with Nanometric Resolution Invited Peer-reviewed

W. Gao, A. Kimura

CIRP Annals - Manufacturing Technology　56　(1)　529-532　2007

DOI： 10.1016/j.cirp.2007.05.126 　

ISSN： 0007-8506

eISSN： 1726-0604
Development of a high-speed and high-accuracy measurement system for micro edge radius of long precision tool Invited Peer-reviewed

Takenori Motoki, Wei Gao, Masaru Furukawa, Satoshi Kiyono

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　73　(7)　823-827　2007

DOI： 10.2493/jjspe.73.823 　

ISSN： 0912-0289
A double pass surface encoder for measurement of planar motion Invited Peer-reviewed

Yoji Watanabe, Wei Gao, Satoshi Kiyono

International Journal of Surface Science and Engineering　1　(1)　80-99　2007

DOI： 10.1504/IJSURFSE.2007.013622 　

ISSN： 1749-785X

eISSN： 1749-7868
Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor Invited Peer-reviewed

Wei Gao, Takenori Motoki, Satoshi Kiyono

Precision Engineering　30　(4)　396-405　2006/10

DOI： 10.1016/j.precisioneng.2005.11.008 　

ISSN： 0141-6359
Integration of a force sensor into a fast-tool-control unit for fabrication of large area microlens array Invited Peer-reviewed

M. Tano, W. Gao, A. Kimura, T. Sanuki, Y. J. Noh, S. Kiyono

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao　27　(5)　555-560　2006/10

ISSN： 0257-9731
Precision measurement and decoupled control of a planar motion stage Invited Peer-reviewed

Song Yi Dian, Wei Gao, Katsutoshi Horie, Satoshi Kiyono

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao　27　(5)　567-574　2006/10

ISSN： 0257-9731
Compact AFM system for rapid and large area surface topography measurement Invited Peer-reviewed

Bing Feng Ju, Wei Gao, Jim Aoki, Takemi Asai, Satoshi Kiyono

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao　27　(5)　525-530　2006/10

ISSN： 0257-9731
Ultra-precision on-machine measurement system for aspheric optical elements Invited Peer-reviewed

Y. Nagaike, Y. Nakamura, Y. Ito, W. Gao, T. Kuriyagawa

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao　27　(5)　535-540　2006/10

ISSN： 0257-9731
Improvement in a surface motor-driven planar motion stage Invited Peer-reviewed

Wei Gao, Katsutoshi Horie, Songyi Dian, Kei Katakura, Satoshi Kiyono

Journal of Robotics and Mechatronics　18　(6)　808-815　2006/10/01
Construction of a measurement and control system for a sawyer motor-driven planar motion stage Invited Peer-reviewed

M. Tano, Wei Gao, S. Y. Dian, S. Kiyono, Y. Tomita, K. Makino, H. Motita

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering　4　(3)　182-189　2006/09

ISSN： 1672-6030
Dynamic response analysis of fuzzy stochastic truss structures under fuzzy stochastic excitation Peer-reviewed

J Ma, JJ Chen, W Gao

COMPUTATIONAL MECHANICS　38　(3)　283-292　2006/08

DOI： 10.1007/s00466-006-0052-y 　

ISSN： 0178-7675
On-machine measurement of a cylindrical surface with sinusoidal micro-structures by an optical slope sensor Invited Peer-reviewed

Wei Gao, Makoto Tano, Shinji Sato, Satoshi Kiyono

Precision Engineering　30　(3)　274-279　2006/07

DOI： 10.1016/j.precisioneng.2005.09.003 　

ISSN： 0141-6359
A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces Invited Peer-reviewed

T. Motoki, W. Gao, S. Kiyono, T. Ono

Measurement Science and Technology　17　(3)　495-499　2006/03/01

DOI： 10.1088/0957-0233/17/3/S06 　

ISSN： 0957-0233

eISSN： 1361-6501
Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage Invited Peer-reviewed

Wei Gao, Yoshikazu Arai, Atsushi Shibuya, Satoshi Kiyono, Chun Hong Park

Precision Engineering　30　(1)　96-103　2006/01

DOI： 10.1016/j.precisioneng.2005.06.003 　

ISSN： 0141-6359
Dual正弦波格子型サーフェスエンコーダに関する研究ー測定原理の提案と検証実験ー Invited Peer-reviewed

高偉, 鶴見直也, 渡辺陽司, 木村彰秀, 清野慧

精密工学会誌　72　(3)　382-386　2006
Publisher: The Japan Society for Precision Engineering
DOI： 10.2493/jspe.72.382 　

ISSN： 1348-8724

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This paper describes a new type of surface encoder for planar position measurement, which consists of a sinusoidal grid (target sine-grid) and an optical sensor unit. The optical sensor employs a transparent sine-grid instead of a grid pattern film used in a conventional surface encoder. The transparent sine-grid is generated on a glass plate with the same amplitude and wavelength as the target sine-grid. Simulation results have shown that planar displacement between the two sine-grids can be obtained from the output of the sensor unit. Compared with conventional surface encoder, the new type surface encoder is expected to have higher S/N ratio. Experimental results are also presented.
高感度2軸マイクロ角度センサの開発 Invited Peer-reviewed

高偉, 齋藤悠佑, 佐藤隼人, 清野慧, 清水浩貴, 広瀬純

精密工学会誌　72　(9)　1174-1178　2006
Publisher: The Japan Society for Precision Engineering
DOI： 10.2493/jspe.72.1174 　

ISSN： 1348-8724

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This paper presents a two-axis micro-angle sensor for measurement of surface profiles and error motions. The sensor, which is based on the principle of laser autocollimation, employs a laser diode as the light source. The reflected beam from the target surface is received by an autocollimation unit consisting of an objective lens and a quadrant photodiode (QPD) located at the focal position of the lens. It is verified that the sensor sensitivity does not depend on the focal length of the objective lens, which is important for reduction of the sensor size. It is also confirmed that applying an offset to the QPD position along the optical axis is effective for avoiding the influence of the gaps between the PD cells. A prototype micro-angle sensor with a dimensional of 26mm (W)×22mm (L)×12mm (H) is designed and constructed. Experimental results have shown that the sensor has a resolution of 0.05 arc-seconds.
Design of a precision linear-rotary positioning actuator Invited Peer-reviewed

Wei Gao, Shinji Sato, Yasumasa Sakurai, Satoshi Kiyono

Journal of Robotics and Mechatronics　18　(6)　803-807　2006

DOI： 10.20965/jrm.2006.p0803 　
Separation of scanning error motions for surface profile measurement of aspheric micro lens Invited Peer-reviewed

Wei Gao, Atsushi Shibuya, Yasuo Yoshikawa, Satoshi Kiyono, C. H. Park

International Journal of Manufacturing Research　1　(3)　267-282　2006

DOI： 10.1504/IJMR.2006.011958 　

ISSN： 1750-0591

eISSN： 1750-0605
High-accuracy fabrication of a sinusoidal grid surface over a large area by fast tool servo (improvement of fabrication accuracy in local areas of the grid surface)

Makoto Tano, Wei Gao, Takeshi Araki, Satoshi Kiyono

Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C　71　(12)　3602-3607　2005/12

DOI： 10.1299/kikaic.71.3602 　

ISSN： 0387-5024
Precision positioning of a five degree-of-freedom planar motion stage Peer-reviewed

Shuichi Dejima, Wei Gao, Hiroki Shimizu, Satoshi Kiyono, Yoshiyuki Tomita

Mechatronics　15　(8)　969-987　2005/10

DOI： 10.1016/j.mechatronics.2005.03.002 　

ISSN： 0957-4158
Ductile regime nanpmachining of single-crystal silicon carbide Invited Peer-reviewed

John Patten, Wei Gao, Kudo Yasuto

Journal of Manufacturing Science and Engineering, Transactions of the ASME　127　(3)　522-532　2005/08

DOI： 10.1115/1.1949614 　

ISSN： 1087-1357
光干渉型サーフェスエンコーダに関する研究 Peer-reviewed

渡辺陽司, 高偉, 清水浩貴, 清野慧

精密工学会誌　71　(8)　1051-1055　2005/08/01
Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning Invited Peer-reviewed

Shuichi Dejima, Wei Gao, Kei Katakura, Satoshi Kiyono, Yoshiyuki Tomita

Precision Engineering　29　(3)　263-271　2005/07

DOI： 10.1016/j.precisioneng.2004.11.005 　

ISSN： 0141-6359
A dual-mode surface encoder for position measurement Invited Peer-reviewed

Wei Gao, Shuichi Dejima, Satoshi Kiyono

Sensors and Actuators, A: Physical　117　(1)　95-102　2005/01/03

DOI： 10.1016/j.sna.2004.06.004 　

ISSN： 0924-4247
Measurement of an aspherical surface profile on a precision grinding machine

A. Shibuya, Y. Arai, W. Gao, H. Shimizu, S. Kiyono

EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology　161-164　2005
An extended auto-collimation method combined with a deflect optical system for non-contact profile measurement

Hiroki Shimizu, Yoji Watanabe, Wei Gao, Satoshi Kiyono

EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology　249-252　2005
Design and construct of a long-stroke fast-tool-servo equipped with a force sensor

Toshinobu Sanuki, Makoto Tano, Wei Gao, Satoshi Kiyono

LEM 2005 - 3rd International Conference on Leading Edge Manufacturing in 21st Century　357-360　2005
Testing of a probe for profile measurement of aspherical surface

Atsushi Shibuya, Yoshikazu Arai, Wei Gao, Satoshi Kiyono

LEM 2005 - 3rd International Conference on Leading Edge Manufacturing in 21st Century　331-334　2005
A three-probe method for measuring parallelism and straightness of a pair of rails for ultra precision machine tools

Jooho Hwang, Chun Hong Park, Wei Gao, Seung Woo Kim

Proceedings of the 20th Annual ASPE Meeting, ASPE 2005　2005
High-speed measurement of large area micro-structured surfaces

Jun Aoki, Wei Gao, Satoshi Kiyono

LEM 2005 - 3rd International Conference on Leading Edge Manufacturing in 21st Century　381-384　2005
Replication of a sinusoidal grid surface by hot embossing and UV-casting Peer-reviewed

Naoya Tsurumi, Wei Gao, Akihide Kimura, Satoshi Kiyono

Proceedings of SPIE - The International Society for Optical Engineering　6052　2005

DOI： 10.1117/12.648300 　

ISSN： 0277-786X
A micro-angle sensor based on laser autocollimation Peer-reviewed

Yusuke Saito, Wei Gao, Satoshi Kiyono

Proceedings of SPIE - The International Society for Optical Engineering　6052　2005

DOI： 10.1117/12.647981 　

ISSN： 0277-786X
Optical design of a double pass surface encoder Peer-reviewed

Yoji Watanabe, Wei Gao, Hiroki Shimizu, Satoshi Kiyono

Proceedings of SPIE - The International Society for Optical Engineering　6052　2005

DOI： 10.1117/12.642027 　

ISSN： 0277-786X
Design of a precision rotary-linear dual-axis positioning system with a surface encoder Peer-reviewed

Shinji Sato, Wei Gao, Satoshi Kiyono

Proceedings of SPIE - The International Society for Optical Engineering　6052　2005

DOI： 10.1117/12.647931 　

ISSN： 0277-786X
High-speed positioning of a surface motor-driven planar stage Peer-reviewed

Katsutoshi Horie, Wei Gao, Kei Katakura, Satoshi Kiyono

Proceedings of SPIE - The International Society for Optical Engineering　6052　2005

DOI： 10.1117/12.648339 　

ISSN： 0277-786X
Displacement metrology based on grating imaging with a cylindrical lens array and a phase grating Peer-reviewed

Toru Oka, Yoichi Ohmura, Toshiro Nakashima, Wei Gao, Kazuhiro Hane, Satoshi Kiyono

Proceedings of SPIE - The International Society for Optical Engineering　5858　1-8　2005

DOI： 10.1117/12.612088 　

ISSN： 0277-786X
Dynamic response analysis of closed loop control system for intelligent fuzzy truss under fuzzy excitation Peer-reviewed

J Ma, JJ Chen, W Gao

2005 IEEE Networking, Sensing and Control Proceedings　401-406　2005
Precision positioning of a Sawyer motor-driven stage by a surface encoder Peer-reviewed

M. Tano, W. Gao, S. Kiyono, Y. Tomita, K. Makino, H. Morita

Journal of Physics: Conference Series　13　(1)　90-93　2005/01/01

DOI： 10.1088/1742-6596/13/1/021 　

ISSN： 1742-6588

eISSN： 1742-6596
Sawyerモータの精密位置決めに関する研究 Peer-reviewed

高偉, 田野誠, 清野慧, 富田良幸, 佐々木卓也

精密工学会誌　74　(1)　523-527　2005/01/01
Publisher: The Japan Society for Precision Engineering
DOI： 10.2493/jspe.71.523 　

ISSN： 1348-8724

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This paper describes a precision positioning system for a planar motion stage driven by a Sawyer motor, which is composed of a platen and forcers moving on the platen. Position measurement of the stage moving part (forcers) is conducted by a surface encoder consisting of a thin angle grid film stuck on the platen and an angle sensor mounted on the moving part. The angle grid surface is a superposition of periodic sine waves in the X- and Y-directions with amplitudes of 100nm and wavelengths of 100μm. The two-dimensional (2D) angle sensor is used to read the sine waves, which are used as scales for measurement of X- and Y-positions. The thickness of the angle grid film is 100μm so that the driving performance of the Sawyer motor is not affected. Experimental results have confirmed that sub-micrometer positioning can be realized by closed-loop control.
Design and construct of a high-precision and long-stoke AFM probe-unit integrated with a linear encoder Peer-reviewed

J. Aoki, W. Gao, S. Kiyono, T. Ochi, T. Sugimoto

Nanotechnology and Precision Engineering　3　(1)　1-7　2005/01/01
A high precision AFM for nanometrology of large area micro-structured surfaces Peer-reviewed

J. Aoki, W. Gao, S. Kiyono, T. Ono

Key Engineering Materials　295-296　65-70　2005

DOI： 10.4028/0-87849-977-6.65 　

ISSN： 1013-9826

eISSN： 1662-9795
A biological sensor for detecting foreign bodies using a balloon probe Peer-reviewed

H. Shimizu, S. Kiyono, W. Gao, H. Shoji

Key Engineering Materials　295-296　133-138　2005

DOI： 10.4028/0-87849-977-6.133 　

ISSN： 1013-9826

eISSN： 1662-9795
A scanning multi-probe straightness measurement system for alignment of linear collider accelerator Invited Peer-reviewed

W. Gao, J. Yokoyama, S. Kiyono, N. Hitomi

Key Engineering Materials　295-296　253-258　2005

DOI： 10.4028/0-87849-977-6.253 　

ISSN： 1013-9826

eISSN： 1662-9795
Measurement of the straightness of a leadscrew-driven precision stage Peer-reviewed

Y. Arai, W. Gao, S. Kiyono, T. Kuriyagawa

Key Engineering Materials　295-296　259-264　2005

DOI： 10.4028/0-87849-977-6.259 　

ISSN： 1013-9826

eISSN： 1662-9795
Three-dimensional slit width measurement for long precision slot dies Peer-reviewed

M. Furukawa, W. Gao, H. Shimizu, S. Kiyono, M. Yasutake, K. Takahashi

Key Engineering Materials　295-296　343-348　2005

DOI： 10.4028/0-87849-977-6.343 　

ISSN： 1013-9826

eISSN： 1662-9795
On-machine Measurement of Aspherical Surface Profile Peer-reviewed

Yoshikazu Arai, Wei Gao, Hiroki Shimizu, Satoshi Kiyono, Tsunemoto Kuriyagawa

Nanotechnology and Precision Engineering　2　(3)　210-216　2004/10/01
A surface motor-driven planar motion stage integrated with an XYθ<inf>Z</inf> surface encoder for precision positioning Peer-reviewed

Wei Gao, Shuichi Dejima, Hiroaki Yanai, Kei Katakura, Satoshi Kiyono, Yoshiyuki Tomita

Precision Engineering　28　(3)　329-337　2004/07

DOI： 10.1016/j.precisioneng.2003.12.003 　

ISSN： 0141-6359
Cutting error measurement of flexspline gears of harmonic speed reducers using laser probes Peer-reviewed

Wei Gao, Masaru Furukawa, Satoshi Kiyono, Hiroshi Yamazaki

Precision Engineering　28　(3)　358-363　2004/07

DOI： 10.1016/j.precisioneng.2003.12.001 　

ISSN： 0141-6359
An instrument for nanomachining and nanometrology of free-form surface profiles with a diamond turning Machine Peer-reviewed

Wei Gao, Yasuto Kudo, Satoshi Kiyono, John Patten

Journal of Chinese Society of Mechanical Engineers　25　(5)　449-456　2004/05/01
An electrical pen for signature verification using a two-dimensional optical angle sensor Peer-reviewed

Hiroki Shimizu, Satoshi Kiyono, Takenori Motoki, Wei Gao

Sensors and Actuators, A: Physical　111　(2-3)　216-221　2004/03/15

DOI： 10.1016/j.sna.2003.11.014 　

ISSN： 0924-4247
Straightness Error Measurement of an Ultra-precision Aspheric Grinding Machine (2nd report) : On-machine Experiments

ARAI Yoshikazu, GAO Wei, SHIMIZU Hiroki, KIYONO Satoshi, KURIYAGAWA Tsunemoto

The proceedings of the JSME annual meeting　2004　315-316　2004
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/jsmemecjo.2004.4.0_315 　

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A capacitance probe-based system is developed for measurement of carriage Straightness and roll error motions. The system, which is added to a conventional laser interferometer, consists of a probe-unit and an auxiliary flat surface. The profile error of the flat surface, which is moved by the carriage, is first measured with the X-probes accurately through separating the carriage lateral Straightness error (Z-error). The auxiliary flat surface is then used as an accurate reference for carriage lateral Straightness error measurement. The roll error of the carriage can be measured by dividing the difference of the Y-probes by the probe distance between the Y-probes. The developed system has been applied to the measurement of an ultra-precision aspheric grinding machine. The Straightness error and roll error were measured to be 120nm and 2.4arcsec over a stroke of 80mm, respectively.
Machining Evaluation of an Instrument for Nanomachining and Nanometrology

GAO Wei, KUDO Yasuto, KIYONO Satoshi

The proceedings of the JSME annual meeting　2004　317-318　2004
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/jsmemecjo.2004.4.0_317 　

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This paper presents a nanomachining instrument with nanometrology function for precision nanofabrication of large areamicro-structured surfaces. A single crystal diamond tool for diamond turning is mounted on one end of a hollow-typepiezoelectric (PZT) ring actuator. The other end of the PZT is attached to a compact piezoelectric force sensor. The diamondtool is actuated by the PZT for nanomachining of micro-structures over a large area surface through employing thefast-tool-servo technique. The same instrument can also be used for nanometrology of the machined surface through utilizingthe force sensor output. To measure the surface profile, the diamond tool is scanned along the surface and the contact force isdetected by the force sensor. During the scanning, the diamond tool is servo controlled by the PZT so that the tool tip is keptcontact with the surface with a constant contact force based on the force sensor output. The displacement of the PZT, whichcorresponds to the profile height of the machined surface, can thus be obtained from the capacitance sensor inside the PZT.
A five degree-of-freedom surface encoder Peer-reviewed

S Dejima, W Gao, S Kiyono

PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 1　606-610　2004
A hybrid nano-probe for precision nanofabrication of complex surfaces Peer-reviewed

W. Gao, S. Genda, Y. Kudo, S. Kiyono, J. Patten

2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV)　1　173-177　2004

ISSN： 2474-2953
Measurement of a high aspect ratio micro-structured surface by an AFM Peer-reviewed

J. Aoki, W. Gao, S. Kiyono

VDI Berichte　1860　(1860)　561-567　2004

ISSN： 0083-5560
Analysis of a Surface Encoder in Wave Optics Peer-reviewed

Y. Watanabe, W. Gao, H. Shimizu, S. Kiyono

Key Engineering Materials　257-258　219-224　2004

DOI： 10.4028/www.scientific.net/kem.257-258.219 　

ISSN： 1013-9826

eISSN： 1662-9795
A precision angle sensor using a multi-cell photodiode array Peer-reviewed

W. Gao, T. Ohnuma, H. Satoh, H. Shimizu, S. Kiyono, H. Makino

CIRP Annals - Manufacturing Technology　53　(1)　425-428　2004

DOI： 10.1016/S0007-8506(07)60731-8 　

ISSN： 0007-8506
A new multi-probe arrangement for surface profile measurement of cylinders Peer-reviewed

Katsuyuki Endo, Wei Gao, Satoshi Kiyono

JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing　46　(4)　1531-1537　2003/12

DOI： 10.1299/jsmec.46.1531 　

ISSN： 1344-7653
Self-calibration of lateral non-linearities of an interference microscope Peer-reviewed

Wei Gao, Xue Feng Qiang, Satoshi Kiyono

Measurement: Journal of the International Measurement Confederation　34　(3)　245-253　2003/10

DOI： 10.1016/S0263-2241(03)00049-6 　

ISSN： 0263-2241
Precision nanometrology of a large area microstructured metrology surface Invited Peer-reviewed

Wei Gao, Takeshi Araki, Satoshi Kiyono

Optics and Precision Engineering　11　(3)　223-226　2003/10/01
Slit width measurement of a long precision slot die Peer-reviewed

Masaru Furukawa, Wei Gao, Hiroki Shimizu, Satoshi Kiyono, Mutsumi Yasutake, Kazuhiko Takahashi

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　69　(7)　1013-1017　2003/07

DOI： 10.2493/jjspe.69.1013 　

ISSN： 0912-0289
Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder Peer-reviewed

Wei Gao, Takeshi Araki, Satoshi Kiyono, Yuichi Okazaki, Masashi Yamanaka

Precision Engineering　27　(3)　289-298　2003/07

DOI： 10.1016/S0141-6359(03)00028-X 　

ISSN： 0141-6359
Development of a cylindrical figure measuring instrument based on a new multi-probe method Peer-reviewed

Katsuyuki Endo, Wei Gao, Satoshi Kiyono

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　69　(4)　507-511　2003/04

DOI： 10.2493/jjspe.69.507 　

ISSN： 0912-0289
Precision positioning of a surface motor-driven multi-axis stage using a surface encoder (2nd report) - Experiment of dynamic micro-positioning Peer-reviewed

Shuichi Dejima, Wei Gao, Hiroaki Yanai, Satoshi Kiyono

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　69　(3)　433-437　2003/03

DOI： 10.2493/jjspe.69.433 　

ISSN： 0912-0289
Proceedings of SPIE - The International Society for Optical Engineering: Introduction

James R. Slusser, Jay R. Herman, Wei Gao

Proceedings of SPIE - The International Society for Optical Engineering　5156　2003

ISSN： 0277-786X
Precision nanometrology of large silicon wafer flatness Peer-reviewed

W. Gao, T. Yamada, M. Furukawa, T. Nakamura, H. Shimizu, S. Kiyono

Journal of Nanotechnology and Precision Engineering　1　(1)　71-78　2003/01/01
Precision measurement of two-axis positions and tilt motions using a surface encoder Peer-reviewed

W. Gao, S. Dejima, Y. Shimizu, S. Kiyono

CIRP Annals - Manufacturing Technology　52　(1)　435-438　2003

DOI： 10.1016/S0007-8506(07)60619-2 　

ISSN： 0007-8506
A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers Peer-reviewed

Wei Gao, Peisen S. Huang, Tomohiko Yamada, Satoshi Kiyono

Precision Engineering　26　(4)　396-404　2002/10

DOI： 10.1016/S0141-6359(02)00121-6 　

ISSN： 0141-6359
A data conversion technique for accurate interferometric testing of spherical surfaces Peer-reviewed

XF Qiang, W Gao, S Kiyono

JSME INTERNATIONAL JOURNAL SERIES C-MECHANICAL SYSTEMS MACHINE ELEMENTS AND MANUFACTURING　45　(3)　697-702　2002/09

ISSN： 1344-7653
Roundness and spindle error measurement by angular three-probe method (1st report) Peer-reviewed

Wei Gao, Eijiro Sato, Takamasa Ohnuma, Satoshi Kiyono

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　68　(9)　1195-1199　2002/09

DOI： 10.2493/jjspe.68.1195 　

ISSN： 0912-0289
A data conversion technique for accurate interferometric testing of spherical surfaces Peer-reviewed

Xue Feng Qiang, Wei Gao, Satoshi Kiyono

JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing　45　(3)　697-702　2002/09

DOI： 10.1299/jsmec.45.697 　

ISSN： 1344-7653
Precision measurement of cylinder straightness using a scanning multi-probe system Peer-reviewed

Wei Gao, Jun Yokoyama, Hidetoshi Kojima, Satoshi Kiyono

Precision Engineering　26　(3)　279-288　2002/07

DOI： 10.1016/S0141-6359(02)00106-X 　

ISSN： 0141-6359
A Sensor detecting xenobiotics in soft tissue

NAKASHIMA Shinichi, SHIMIZU Hiroki, GAO Wei, KIYONO Satoshi

The proceedings of the JSME annual meeting　2002　243-244　2002
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/jsmemecjo.2002.1.0_243 　

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A small sensor for detecting xenobiotics in soft tissues was developed in the research. The sensor consists of a rubber balloon probe and a CCD camera. Dot patterns are printed on the inside surface of the balloon probe. When the probe is pressed to the sample. The dot patterns will deform corresponding to the hardness distribution of the sample. Xenobiotics in the sample can then be detected through observing the dot pattern deformation by the CCD camera. Experiments of testing the developed probe were carried out. Principle and design of the probe together with the experimental results are presented.
Study on high precision angle sensor

OHNUMA Takamasa, GAO Wei, KIYONO Satoshi

The proceedings of the JSME annual meeting　2002　293-294　2002
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/jsmemecjo.2002.5.0_293 　

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At present, compact and high precision angle sensors, which are suitable for scanning probe measurement of large surface profiles, are not commercially available. In this paper, a high precision 2-dimensional angle sensor, which can simultaneously detect two dimensional components of the surface local slope, was designed and built. The sensor was evaluated by comparing with a commercially available autocollimator. Resolution of this angle sensor was confirmed to be better than 0.01arcsec.
On-machine measurement of aspherical profile (2nd report) : Calibration for profile error of contact probe sphere

ARAI Yoshikazu, GAO Wei, SHIMIZU Hiroki, KIYONO Satoshi, KURIYAGAWA Tsunemoto

The proceedings of the JSME annual meeting　2002　279-280　2002
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/jsmemecjo.2002.5.0_279 　

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A technique for calibrating the profile error of the probe sphere of a contact-type displacement probe for on-machine measurement of aspherical profiles in nanometer accuracy was proposed. A sphere workpiece with unknown profile error is used as the sample for calibration. The workpiece, which is mounted on the machine spindle and is rotated by the spindle, is measured by the displacement probe. At each position of the probe, the profile of the workpiece over one rotation are sampled by the probe. An average of the data removes the influences of the workpiece profile error and the spindle error, resulting in on accurate measurement of the profile error of the probe sphere. Calibration of the whole probe sphere can be realized through moving the probe over the workpiece. Experiments of on-machine profile measurement of an aspherical lens were carried out after calibration of the probe sphere.
3-D calibration of an interference microscope Peer-reviewed

Xue Feng Qiang, Wei Gao, Satoshi Kiyono

Proceedings of the Second International Symposium on Instrumentation Science and Technology　2　243-246　2002
Development of cylindrical-figure measuring instrument with multi-probe method Peer-reviewed

Katsuyuki Endo, Wei Gao, Satoshi Kiyono

Proceedings of the Second International Symposium on Instrumentation Science and Technology　1　99-103　2002
A surface encoder with a multi-spot light source Peer-reviewed

Wei Gao, Tadashi Hoshino, Yuki Shimizu, Satoshi Kiyono

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　68　(1)　70-74　2002/01

DOI： 10.2493/jjspe.68.70 　

ISSN： 0912-0289
Precision measurement of multi-degree-of-freedom spindle errors using two-dimensional slope sensors Peer-reviewed

W. Gao, S. Kiyono, E. Satoh, T. Sata

CIRP Annals - Manufacturing Technology　51　(1)　447-450　2002

DOI： 10.1016/S0007-8506(07)61557-1 　

ISSN： 0007-8506
Precision positioning of a surface motor-driven multi-axis stage using a surface encoder Peer-reviewed

Wei Gao, Tomonori Nakada, Shuichi Dejima, Satoshi Kiyono

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　67　(12)　1981-1985　2001/12

DOI： 10.2493/jjspe.67.1981 　

ISSN： 0912-0289
STRAIGHTNESS MEASUREMENT OF MACHINE TOOL CARRIAGE USING AN ERROR SEPARATION TECHNIQUE

Yoshikazu Arai, Wei Gao, Satoshi Kiyono, Tsunemoto Kuriyagwa

Proceedinds of 5th International Symposium on Measurement Technology and Intelligent Instruments　29-33　2001/09/25
Accurate profile measurement of spherical surfaces using an interferometer Peer-reviewed

X. F. Qiang, W. Gao, S. Kiyono

JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing　44　(3)　650-655　2001/09

DOI： 10.1299/jsmec.44.650 　

ISSN： 1344-7653
Extreme negative rake angle technique for single point diamond nano-cutting of silicon Peer-reviewed

John A. Patten, Wei Gao

Precision Engineering　25　(2)　165-167　2001/04

DOI： 10.1016/S0141-6359(00)00072-6 　

ISSN： 0141-6359

eISSN： 1873-2372
An electrical pen of sensing 3D writing forces for signature identification Peer-reviewed

H Shimizu, S Kiyono, W Gao, T Motoki

ISMTII'2001: PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS　301-305　2001
Profile measurement of silicon wafer by laser autocollimation Peer-reviewed

W Gao, T Yamada, S Kiyono, PS Huang

ISMTII'2001: PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS　125-129　2001
Precision positioning of a surface motor-driven XY Theta(z) stage using a surface encoder Peer-reviewed

W Gao, T Nakada, S Kiyono

INITIATIVES OF PRECISION ENGINEERING AT THE BEGINNING OF A MILLENNIUM　569-573　2001
A new method of position detection using an optical scanning angle sensor Peer-reviewed

Satoshi Kiyono, Wei Gao, Masaya Kanai, Tadashi Hoshino, Yuki Shimizu

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　67　(3)　493-497　2001

DOI： 10.2493/jjspe.67.493 　

ISSN： 0912-0289
Force measurement in a nanomachining instrument Peer-reviewed

Wei Gao, Robert J. Hocken, John A. Patten, John Lovingood

Review of Scientific Instruments　71　(11)　4325-4329　2000/11

DOI： 10.1063/1.1319976 　

ISSN： 0034-6748
Self-calibration of a scanning white light interference microscope Peer-reviewed

Satoshi Kiyono, Wei Gao, Shizhou Zhang, Toru Aramaki

Optical Engineering　39　(10)　2720-2725　2000/10

DOI： 10.1117/1.1290471 　

ISSN： 0091-3286
Construction and testing of a nanomachining instrument Peer-reviewed

Wei Gao, Robert J. Hocken, John A. Patten, John Lovingood, Don A. Lucca

Precision Engineering　24　(4)　320-328　2000/10
Publisher: Elsevier Science Inc
DOI： 10.1016/S0141-6359(00)00042-8 　

ISSN： 0141-6359
Development of a Machining System for Generating 2D Angular Grid

GAO Wei, SUDOH Masasyu, KIYONO Satoshi

The proceedings of the JSME annual meeting　2000　519-520　2000
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/jsmemecjo.2000.3.0_519 　

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This paper presents a machining system for generating two-dimensional angular grids, which are used in a newly developed multi-degree-of-freedom position detection method. This position detection method basically consists of a two-dimensional angle sensor and an angular grid, on which two-dimensional sinusoidal micro-patterns are generated. The wavelength and amplitude of the sinusoidal micro-pattern are typically 300μm and 200nm, respectively, A fast-tool-servo (FTS) based precision diamond turning system was constructed to generate the angular grid. Since the accuracy of position detection is greatly affected by that of the profile error of the angular grid, the angular grid needs to be generated accurately. In this paper, techniques of improving the accuracy of generating the angular grid are described.
Analysis on the calibration of angle function in angle grid based 2D-position measurement system

Ping Cai, Satoshi Kiyono, Wei Gao, Liangming Lin

Proceedings of SPIE-The International Society for Optical Engineering　4222　378-382　2000

DOI： 10.1117/12.403914 　

ISSN： 0277-786X
Development of 2D angle probe for flatness metrology of large silicon wafer Peer-reviewed

W Gao, ET Kanai, PS Huang, S Kiyono

PROCEEDINGS OF THE FIFTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING　35-38　2000
Roundness measurement using angle probes Peer-reviewed

Wei Gao, Eijiro Sato, Satoshi Kiyono

Proceedings of SPIE - The International Society for Optical Engineering　4222　408-411　2000

DOI： 10.1117/12.403856 　

ISSN： 0277-786X
Accurate profile measurement by an interferometer Peer-reviewed

XF Qiang, W Gao, S Kiyono

PROCEEDINGS OF THE FIFTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING　447-450　2000
In-process force monitoring in diamond turning of micro-patterns Peer-reviewed

Wei Gao, Satoshi Genda, Satoshi Kiyono

Proceedings of SPIE - The International Society for Optical Engineering　4222　412-416　2000

DOI： 10.1117/12.403857 　

ISSN： 0277-786X
Experiments using a nano-machining instrument for nano-cutting brittle materials Peer-reviewed

Wei Gao, Robert J. Hocken, John A. Patten, John Lovingood

CIRP Annals - Manufacturing Technology　49　(1)　439-442　2000

DOI： 10.1016/S0007-8506(07)62984-9 　

ISSN： 0007-8506
A new method for improving the accuracy of SPM and its application to AFM in liquids Peer-reviewed

Wei Gao, Michinao Nomura, Hyun Kyu Kweon, Toru Oka, Qinggang Liu, Satoshi Kiyono

JSME International Journal. Series C: Mechanical Systems, Machine Elements and Manufacturing　42　(4)　877-883　1999/12
Publisher: Japan Society of Mechanical Engineers
DOI： 10.1299/jsmec.42.877 　

ISSN： 1344-7653
A new method for improving the accuracy of SPM and its application to AFM in liquids Peer-reviewed

W Gao, M Nomura, HK Kweon, T Oka, QG Liu, S Kiyono

JSME INTERNATIONAL JOURNAL SERIES C-MECHANICAL SYSTEMS MACHINE ELEMENTS AND MANUFACTURING　42　(4)　877-883　1999/12

DOI： 10.1299/jsmec.42.877 　

ISSN： 1340-8062
A Study on Zero-adjustment of Probes in Multi-probe Method

GAO Wei, KIYONO Satoshi

Journal of the Japan Society of Precision Engineering　65　(9)　1317-1318　1999/09/05
Publisher: The Japan Society for Precision Engineering
DOI： 10.2493/jjspe.65.1317 　

ISSN： 0912-0289
Development of an AFM-Based system for in-process measurement of micro-defects on machined surfaces Peer-reviewed

Hyun Kyu Kweon, Wei Gao, Tsunemoto Kuriyagawa, Satoshi Kiyono

JSME International Journal, Series C: Dynamics, Control, Robotics, Design and Manufacturing　42　(1)　49-53　1999/03

DOI： 10.1299/jsmec.42.49 　

ISSN： 1340-8062
An angle-based position detection method for precision machines Peer-reviewed

Satoshi Kiyono, Ping Cai, Wei Gao

JSME International Journal, Series C: Dynamics, Control, Robotics, Design and Manufacturing　42　(1)　44-48　1999/03

DOI： 10.1299/jsmec.42.44 　

ISSN： 1340-8062
Comparison of optical position detectors in a force controlled displacement probe Peer-reviewed

Wei Gao, Shuichi Dejima, Yoritaka Hosoda, Satoshi Kiyono

International Journal of the Japan Society for Precision Engineering　33　(1)　55-56　1999/03

ISSN： 0916-782X
In-situ absolute calibration of interference microscopes Peer-reviewed

S Zhang, M Kanai, T Aramaki, W Gao, S Kiyono

PROCEEDINGS OF THE FOURTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING　448-451　1999
Ultra-precision measurement and control of rolling of stage Peer-reviewed

Shizhou Zhang, Wei Gao, Junshan Ma, Sunao Oyama, Yutaka Uda, Satoshi Kiyono

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　65　(1)　100-105　1999/01

DOI： 10.2493/jjspe.65.100 　

ISSN： 0912-0289
A new method for improving the accuracy of SPM and its application to AFM in liquid

Wei Gao, Michinao Nomura, Hyun-kyu Kweon, Toru Oka, Qinggang Liu, Satohi Kiyono

Transcations of the JSME　64　(622)　2061-2066　1998/06
Publisher: The Japan Society of Mechanical Engineers
DOI： 10.1299/kikaic.64.2061 　

ISSN： 0387-5024

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This paper presents an accurate AFM used in liquid that is free from the Z-directional disrortion of the servo actuator. Two correcting methods are employed in this AFM. One is the external- monitoring method, and the other is the in situ self-calibration method. The external-monitoring method is based on the fact that PZT actuators from the same class show similar hysteresis patterns. The same voltage signal used to control the servo actuator is applied to another PZT actuator which is called as the reference actuator. The displacement of the reference actuator is measured by a displacement sensor. As a result, the distortion of the AFM image can be corrected satisfactorily. In the in situ self-calibration method, the derivative of the calibration curve function of the PZT actuator is calculated from the profile measurement data sets which are obtained by repetition of measurement after small Z-directional shift. Input displacement at every sampling point is approxi- mately estimated first by using a straight calibration line. The derivative is integrated with referring the approximate input to get the approximate calibration curve. Then the approximation of input value of every sampling point is improved with the obtained calibration curve. Next the integral of derivative is improved with the newly estimated input values. Repeating these improving process the calibration curve converges to the correct one, and the distortion of the AFM image can be corrected. Principles and experimental results of the two methods are presented.
In situ self-calibration of atomic force microscopy Peer-reviewed

Hyun Kyu Kweon, Wei Gao, Satoshi Kiyono

Nanotechnology　9　(2)　72-76　1998/06

DOI： 10.1088/0957-4484/9/2/006 　

ISSN： 0957-4484
On-machine measurement of angular motion of a spindle Peer-reviewed

W Gao, T Takahara, S Kiyono

PROCEEDINGS OF THE THIRTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING　355-358　1998
Basic study on a self-positioning technique

Wei Gao, Shuichi Dejima, Satosi Kiyono

Proceedings of the IEEE International Conference on Intelligent Processing Systems, ICIPS　1　64-69　1998
Measurement and control of rolling of a precision moving table

Wei Gao, Sunao Oyama, Sizhou Zhang, Satoshi Kiyono, Yutaka Uda

Proceedings of the IEEE International Conference on Intelligent Processing Systems, ICIPS　1　70-74　1998
Design of a Micro-machining Probe to Realize Micro-Mecha nical Machining and In-process Profile Measurement Peer-reviewed

H. K. Kweon, W. Gao, T. Kuriyagawa, S. Kiyono

Journal of JSDE　33　(1)　29-34　1998/01
Publisher:
ISSN： 0919-2948
In situ self-calibration of profile height measurement of interferometric microscope Peer-reviewed

Satoshi Kiyono, Wei Gao, Masaya Kanai

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　64　(2)　241-245　1998

DOI： 10.2493/jjspe.64.241 　

ISSN： 0912-0289
Absolute flatness measurement of plane and self-calibration of an interferometer: 2 Surfaces and 4 positions by lateral shifts Peer-reviewed

Sathoshi Kiyono, Ping Sun, Wei Gao

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　64　(8)　1137-1142　1998

DOI： 10.2493/jjspe.64.1137 　

ISSN： 0912-0289
Development of an optical probe for profile measurement of mirror surfaces Peer-reviewed

Wei Gao, Satoshi Kiyono

Optical Engineering　36　(12)　3360-3366　1997/12

DOI： 10.1117/1.601563 　

ISSN： 0091-3286
Basic Study on Measurement of 2-D Surface Profile (2nd Report : Measurement Error Analysis) Peer-reviewed

Zongtao Ge, Wei Gao, Satoshi Kiyono

JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing　40　(3)　439-446　1997/09
Publisher: Japan Society of Mechanical Engineers
DOI： 10.1299/jsmec.40.439 　

ISSN： 1344-7653
In Situ Self-calibration of Atomic Force Microscopy

H. K. Kweon, W. Gao, S. Kiyono

Proc. of the 5th Biennial Nanotechnology Symposium　9-10　1997/09

DOI： 10.1088/0957-4484/9/2/006 　
On-machine roundness measurement of cylindrical work pieces by the combined three-point method Peer-reviewed

Wei Gao, Satoshi Kiyono

Measurement: Journal of the International Measurement Confederation　21　(4)　147-156　1997/08
Publisher: Elsevier
DOI： 10.1016/S0263-2241(97)00060-2 　

ISSN： 0263-2241
Improving the accuracy of the atomic force microscopes in liquid

Wei Gao, Michinao Nomura, Satoshi Kiyono

Proc.of MIPE'97　1997/07
In-process measurement of defects on the machined surface

Hyun-Kyu Kweon, Wei Gao, Satoshi Kiyono

Proc.of MIPE'97　1997/07
On-machine profile measurement of machined surface using the combined three-point method Peer-reviewed

Wei Gao, Satoshi Kiyono

JSME International Journal, Series C: Dynamics, Control, Robotics, Design and Manufacturing　40　(2)　253-259　1997/06

DOI： 10.1299/jsmec.40.253 　

ISSN： 1340-8062
Development of an interferometer using position sensitive detectors and its self-calibration

Wei Gao, Satoshi Kiyono

Proc. of XIV IMEKO World Conference　6-11　1997/05
In situ self-calibration of metrological sensors

Satoshi Kiyono, Wei Gao, Ichiro Ogura, Hideaki Seino

Proc. of XIV IMEKO World Conference　8　118-118　1997/05
Absolute measurement of an ultra-precision mirror with 2-D software datum Peer-reviewed

Zongtao Ge, Wei Gao, Kazuhiro Takeuchi, Satoshi Kiyono

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　63　(7)　967-971　1997

DOI： 10.2493/jjspe.63.967 　

ISSN： 0912-0289
An in-process measurement probe for profile generation with using no datum Peer-reviewed

Ichiro Ogura, Wei Gao, Hideki Koiwa, Satoshi Kiyono

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　63　(9)　1285-1289　1997

DOI： 10.2493/jjspe.63.1285 　

ISSN： 0912-0289
In situ self-calibration of an individual displacement sensor Peer-reviewed

Satoshi Kiyono, Wei Gao, Ichiro Ogura

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　63　(10)　1417-1421　1997

DOI： 10.2493/jjspe.63.1417 　

ISSN： 0912-0289
A new error separation method for measuring angular motion of a spindle

W Gao, S Kiyono

PROCEEDINGS OF THE TWELFTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING　57-60　1997
Self-calibration of interference microscopes

M Kanai, W Gao, Ogura, I, S Kiyono

PROCEEDINGS OF THE TWELFTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING　414-417　1997
High-accuracy roundness measurement by a new error separation method Peer-reviewed

Wei Gao, Satoshi Kiyono, Takamitu Sugawara

Precision Engineering　21　(2-3)　123-133　1997

DOI： 10.1016/s0141-6359(97)00081-0 　

ISSN： 0141-6359
Nano-metrology of roundness and spindle error

Wei Gao, Satoshi Kiyono

Proc. of 11th ASPE　163-166　1996/11
Highly accurate technique for SPM measurement

Satoshi Kiyono, Makoto Satoh, Toshiyasu Nanjyo, Wei Gao

Proc. of 11th ASPE　186-189　1996/11
High accuracy profile measurement of a machined surface by the combined method Peer-reviewed

Wei Gao, Satoshi Kiyono

Measurement: Journal of the International Measurement Confederation　19　(1)　55-64　1996/09

DOI： 10.1016/S0263-2241(96)00066-8 　

ISSN： 0263-2241
Basic study on profile generation with using no datum

I .Ogura, W. Gao, S. Kiyono, H. Koiwa

Proc. of ICPE'96　349-352　1996/09
Profile measurement by the combined 3-point method

Wei Gao, Satoshi Kiyono

Proceedings of ISMTII'96　177-179　1996/09
A new multiprobe method of roundness measurements Peer-reviewed

Wei Gao, Satoshi Kiyono, Tadatoshi Nomura

Precision Engineering　19　(1)　37-45　1996/07

DOI： 10.1016/0141-6359(96)00006-2 　

ISSN： 0141-6359
A self-calibration method for two dimensional displacement sensor Peer-reviewed

Yuchi Lin, Wei Gao, Satoshi Kiyono

J. of the Japan Society for Precision Engineering　62　(6)　845-849　1996/06

DOI： 10.2493/jjspe.62.845 　
On-machine measurement of roundness by the combined method

W Gao, S Kiyono

4TH INTERNATIONAL IMEKO SYMPOSIUM ON LASER METROLOGY FOR PRECISION MEASUREMENT AND INSPECTION IN INDUSTRY, PROCEEDINGS　1-10　1996
Development of an optical probe for profile inspection of mirror surfaces

Wei Gao, Satoshi Kiyono

Proceedings of SPIE - The International Society for Optical Engineering　2899　12-21　1996

ISSN： 0277-786X
Self-zero-adjustment of probes in the methods constructing software datum for large profile measurement Peer-reviewed

G. A.O. Wei, Ichiro Ogura, Eiki Okuyama, Satoshi Kiyono

International Journal of the Japan Society for Precision Engineering　30　(4)　337-342　1996

ISSN： 0916-782X
Basic study on profile generation without using any datum Peer-reviewed

Satoshi Kiyono, Ichiro Ogura, Wei Gao, Yorimasa Funahashi

International state-of-art in abrative technology　123-128　1995/11
On-machine measurement of roundness by a new multi-probe method

Wei GAO, Satoshi KIYONO

Proc, of ICPE'95　453-456　1995/11
Improving the acuracy of the combined method for on-machine profile measurement

Wei Gao, Satoshi Kiyono

Proceedings of 5th International Symposium on Dimensional Metrology　414　414-422　1995/10
A simple and effective error separation method for roundness measurement Peer-reviewed

W Gao, S Kiyono

INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING　29　(3)　245-246　1995/09

ISSN： 0916-782X
Roundness measurement by the orthogonal mixed method Peer-reviewed

Wei GAO, Satoshi KIYONO

Transaction of the JSME　61　(589)　3775-3780　1995/09

DOI： 10.1299/kikaic.61.3775 　
Roundness measurement by software datum method (2nd report) Peer-reviewed

Wei Gao, Tadatoshi Nomura, Satoshi Kiyono

Journal of the Japan Society for Precision Engineering　61　(3)　425-429　1995

DOI： 10.2493/jjspe.61.425 　

ISSN： 0912-0289
Profile measurement of machined surface with a new differential method Peer-reviewed

Satoshi Kiyono, Wei Gao

Precision Engineering　16　(3)　212-218　1994/07

DOI： 10.1016/0141-6359(94)90127-9 　

ISSN： 0141-6359
Self-calibration method for two dimensional displacement sensor

Yuchi Lin, Wei Gao, Satoshi Kiyono

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering　62　(6)　845-849　1994/06

DOI： 10.2493/jjspe.62.845 　

ISSN： 0912-0289
ON-MACHINE MEASUREMENT OF LARGE MIRROR PROFILE BY MIXED METHOD Peer-reviewed

S KIYONO, W GAO

JSME INTERNATIONAL JOURNAL SERIES C-DYNAMICS CONTROL ROBOTICS DESIGN AND MANUFACTURING　37　(2)　300-306　1994/06

DOI： 10.1299/jsmec1993.37.300 　

ISSN： 1340-8062
Absolute Profile-Measurement

Satoshi Kiyono, Wei Gao, Eiki Okuyama

UME3　3-6　1994/05
A New Method for Measurement of Roundness

Wei Gao, Satoshi Kiyono

UME3　318　318-321　1994/05
A new method for measuremet of roundness

Wei Gao, Satoshi Kiyono

Proceedings of the 3rd International Conference on Ultra-Precision in Manufacturing Engineering　318-321　1994/05
Profile measurement by the combined method (optimal and automatic selection of the standard area) Peer-reviewed

Wei Gao, Satoshi Kiyono, Zongtao Ge

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C　62　(597)　2025-2030　1994/05

DOI： 10.1299/kikaic.62.2025 　

ISSN： 0387-5024
Roundness Measurement with Software Datum Method —Comparison between Mixed Method and 3-point Method by Computer Simulations— Peer-reviewed

Wei Gao, Tadatoshi Nomura, Satoshi Kiyono

Journal of the Japan Society for Precision Engineering　60　(1)　106-110　1994

DOI： 10.2493/jjspe.60.106 　

ISSN： 0912-0289
Absolute Profile-Measurement Using Software Datum Peer-reviewed

Wei Gao, Satoshi Kiyono, Eiki Okuyama

Journal of the Japan Society for Precision Engineering　60　(4)　554-558　1994

DOI： 10.2493/jjspe.60.554 　

ISSN： 0912-0289
Roundness measurement by the mixed method

Wei Gao, Satoshi Kiyono, Tadatoshi Nomura

Proceedings of the SICE Annual Conference　937-940　1994
PROFILE MEASURMENT OF MACHINED SURFACE WITH A NEW DIFFERENTIAL METHOD

Satoshi Kiyono, Wei Gao

Proc. of The first China-Japan Int. Conf. on Progess of Cutt ing and Grinding　137-142　1992/12
Profile Measurement by the Combined method

Satoshi Kiyono, Wei Gao

Proc. of the ICPCG　127-132　1992/12
ON-MACHINE MEASUREMENT OF LARGE MIRROR PROFILE

Wei Gao, Satoshi Kiyono

Proc. of The 7th Anuual Meeting of American Society for Prec esion Engineering　293-296　1992/10
On-Machine Measurement of Large Mirror Profile

Satoshi Kiyono, Wei Gao

Pro. of the APSE 7th Conference　293-296　1992/10
Design of differential probes for on-machine measurement Peer-reviewed

清野慧, 高偉

Journal of JSDE　27　(8)　362-367　1992/08
On-machine measurement of mirror profile Peer-reviewed

Satoshi KIYONO, Wei GAO, Osamu KAMADA

Journal of Advanced Automation Technology　4　(3)　145-150　1992/08
多点法によるソフトウェアデ-タムとその誤差評価 Peer-reviewed

清野慧, 高偉

日本機械学会論文集　58　(5)　2262-2267　1992/05

DOI： 10.1299/kikaic.58.2262 　
On-machine Measurement of Mirror Profile-Measurement Principle and Basic Performance of the Developed Sensor- Peer-reviewed

Satoshi Kiyono, Wei Gao, Osamu Kamada

Journal of the Japan Society for Precision Engineering　58　(2)　247-252　1992

DOI： 10.2493/jjspe.58.247 　

ISSN： 0912-0289
On-Machine Measurement of Large Mirror Profile by Mixed Method Peer-reviewed

Satoshi Kiyono, Wei Gao

Transactions of the Japan Society of Mechanical Engineers Series C　58　(550)　1987-1992　1992

DOI： 10.1299/kikaic.58.1987 　

ISSN： 0387-5024

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Misc. 195

Signal Processing and Artificial Intelligence for Dual-Detection Confocal Probes

Ryo Sato, Xinghui Li, Andreas Fischer, Liang Chia Chen, Chong Chen, Rintaro Shimomura, Wei Gao

International Journal of Precision Engineering and Manufacturing　2023

DOI： 10.1007/s12541-023-00842-3 　

ISSN： 2234-7593

eISSN： 2005-4602
Optical metrology for precision engineering

Wei Gao, Yuki Shimizu

Optical Metrology for Precision Engineering　1-644　2021/11/22

DOI： 10.1515/9783110542363 　
Optical angle sensor technology based on the optical frequency comb laser

Yuki Shimizu, Hiraku Matsukuma, Wei Gao

Applied Sciences (Switzerland)　10　(11)　2020/06/01

DOI： 10.3390/app10114047 　

eISSN： 2076-3417
モード同期レーザーを用いた共焦点プローブ

佐藤遼, 清水裕樹, 仲村拓, 松隈啓, 高偉

光アライアンス　31　(2)　2020

ISSN： 0917-026X
中赤外線レーザの開発とレーザオートコリメーション法への適用

松隈啓, 阿隅結夢, 長岡将史, 清水裕樹, 高偉

精密工学会大会学術講演会講演論文集　2020　2020
Feasibility study on an encoder system employing a micro thermal sensor head

清水裕樹, 高園翔太, 神田悠利, 松隈啓, 稲場肇, GAO Wei

精密工学会大会学術講演会講演論文集　2020　2020
精密位置決め技術の最新動向と要素技術を活かした設計への展開 PART1 最新の位置決め技術解説1 精密位置決めのための多軸センサ活用

清水裕樹, 松隈啓, 高偉

機械設計　64　(9)　2020

ISSN： 0387-1045
Feasibility study on an encoder system employing a micro thermal sensor head

清水裕樹, 高園翔太, 神田悠利, 松隈啓, 稲場肇, GAO Wei

精密工学会大会学術講演会講演論文集　2020　2020
Optical sensors for multi-axis angle and displacement measurement using grating reflectors

Yuki Shimizu, Hiraku Matsukuma, Wei Gao

Sensors (Switzerland)　19　(23)　2019/12/01

DOI： 10.3390/s19235289 　

ISSN： 1424-8220
微細光学表面計測用プローブ顕微鏡技術

松隈啓, 清水裕樹, GAO Wei

光技術コンタクト　57　(8)　2019

ISSN： 0913-7289
高強度レーザパルスによる非線形効果を用いた角度計測法に関する研究第2報:光線追跡による第2高調波の角度特性の解明

松隈啓, 間所周平, 清水裕樹, 高偉

精密工学会大会学術講演会講演論文集　2019　2019
非直交型2軸ロイドミラー干渉計による2軸スケール回折格子パターニング-偏光制御ユニット改良によるパターン高精度化-

清水裕樹, 真野和樹, 松永雅教, 村上佑記, 松隈啓, GAO Wei

精密工学会大会学術講演会講演論文集　2019　2019
高強度レーザパルスによる非線形効果を用いた角度計測法に関する研究

松隈啓, 間所周平, 清水裕樹, 高偉

精密工学会大会学術講演会講演論文集　2019　2019
フェムト秒レーザ光源を用いた角度センサに関する研究-シングルモードファイバの適用-

清水裕樹, 高園翔太, 中村一貴, 松隈啓, GAO Wei

精密工学会大会学術講演会講演論文集　2019　2019
光周波数コムを用いた角度センサの研究

中村一貴, 松隈啓, 清水裕樹, GAO Wei

日本機械学会東北支部総会・講演会講演論文集(Web)　54th　2019

ISSN： 2424-2713
2軸微細格子製作のための小型露光装置の開発

松永雅教, 真野和樹, 松隈啓, 清水裕樹, GAO Wei

日本機械学会東北支部総会・講演会講演論文集(Web)　54th　2019

ISSN： 2424-2713
精密測定のためのファイバ型光周波数コムの開発

神田悠利, 松隈啓, 清水裕樹, 稲場肇, GAO Wei

日本機械学会東北支部総会・講演会講演論文集(Web)　54th　2019

ISSN： 2424-2713
高精度走査プローブ顕微鏡技術

清水裕樹, 松隈啓, 高偉

先端加工技術　(104)　2018

ISSN： 0914-8698
精密位置決め技術の最新動向と有効活用のポイント PART1 精密位置決めの最新技術とその適用解説4 精密位置決めのためのセンサ活用

清水裕樹, 松隈啓, 伊東聡, 高偉

機械設計　62　(9)　2018

ISSN： 0387-1045
マイクロ熱検知センサを利用したエンコーダに関する研究

清水裕樹, 松野優紀, 石田彩華, 松隈啓, GAO Wei

精密工学会大会学術講演会講演論文集　2018　2018
光周波数コムを用いた角度計測について

松隈啓, 清水裕樹, 高偉

精密工学会大会学術講演会講演論文集　2018　2018
微空間での熱収支を利用した平滑面欠陥検出に関する研究-熱検知センサプローブの構築と基礎特性評価-

清水裕樹, 松野優紀, CHEN Yuan-Liu, 松隈啓, GAO Wei

精密工学会大会学術講演会講演論文集　2018　2018
微空間での熱収支を利用した平滑面欠陥検出に関する研究-生成熱収支場による欠陥検出可能性の実験的検討-

清水裕樹, 松野優紀, CHEN Yuan-Liu, GAO Wei

精密工学会大会学術講演会講演論文集　2017　2017
ダイヤモンド切削工具形状の超精密測定に関する研究切削工具切れ刃稜丸み径測定手法の検討

清水裕樹, 中川翔太, CHEN Yuan-Liu, GAO Wei

精密工学会大会学術講演会講演論文集　2017　2017
マイクロプローブのその場校正法を用いたマイクロスリット溝幅の精密測定

伊東聡, CHEN YuanLiu, 菊池浩貴, 小林遼, 清水祐樹, GAO Wei

砥粒加工学会学術講演会講演論文集(CD-ROM)　2017　2017
Carbon Nanotubes: Printed Carbon Nanotube Electronics and Sensor Systems (Adv. Mater. 22/2016)

Kevin Chen, Wei Gao, Sam Emaminejad, Daisuke Kiriya, Hiroki Ota, Hnin Yin Yin Nyein, Kuniharu Takei, Ali Javey

Advanced Materials　28　(22)　4396　2016/06/08

DOI： 10.1002/adma.201670151 　

ISSN： 0935-9648

eISSN： 1521-4095
Printed Carbon Nanotube Electronics and Sensor Systems

Kevin Chen, Wei Gao, Sam Emaminejad, Daisuke Kiriya, Hiroki Ota, Hnin Yin Yin Nyein, Kuniharu Takei, Ali Javey

Advanced Materials　28　(22)　4397-4414　2016/06/08

DOI： 10.1002/adma.201504958 　

ISSN： 0935-9648

eISSN： 1521-4095
高精度加工と計測技術-計測・測定機器・システムの最適活用のポイント〔解説〕超精密形状計測加工システム-ダイヤモンド切削工具の機上ナノ計測-

清水裕樹, CHEN Yuan-Liu, JANG SungHo, 伊東聡, GAO Wei

機械技術　64　(7)　2016

ISSN： 0451-9396
高度化する精密位置決め技術の最新動向と設計への応用 PART1 超精密位置決め技術の最新動向と設計のポイント解説5 精密位置決めにおける多軸センサの活用

伊東聡, 清水裕樹, 高偉

機械設計　60　(11)　2016

ISSN： 0387-1045
長ストロークステージ向けの精密姿勢角センサの開発

清水裕樹, 石川龍弥, 片岡智史, CHEN Yuan-Liu, 伊東聡, GAO Wei

機械の研究　68　(10)　2016

ISSN： 0368-5713
微空間での熱収支を利用した平滑面欠陥検出に関する研究-非接触欠陥検出の原理検討-

清水裕樹, 松野優紀, 大場裕太, GAO Wei

精密工学会大会学術講演会講演論文集　2016　2016
スロットダイコーターの精密計測に関する研究-第2報マイクロプローブによる溝幅分布測定システムの構築-

菊地浩貴, 伊東聡, 陳遠流, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦

精密工学会大会学術講演会講演論文集　2016　2016
スロットダイコーターの精密計測に関する研究-第3報マイクロプローブ先端球のその場校正の不確かさ評価-

伊東聡, 菊地浩貴, 小林遼, CHEN Yuan-Liu, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦

精密工学会大会学術講演会講演論文集　2016　2016
マイクロプローブを用いたスロットダイコーターの精密溝幅計測に関する研究

伊東聡, CHEN Yuanliu, 菊地浩貴, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦

日本機械学会年次大会講演論文集(CD-ROM)　2016　2016

ISSN： 2424-2667
XYZマイクロステージに関する研究-ステージ基礎特性の評価-

清水裕樹, 菅原拓馬, 安達圭祐, 伊東聡, GAO Wei, 丹羽英二, 佐々木祥弘

日本機械学会年次大会講演論文集(CD-ROM)　2016　2016

ISSN： 2424-2667
A virtual-surface contact algorithm for the interaction between FE and spherical DE

Wei Gao, Yuanqiang Tan, Shengqiang Jiang, Gaofeng Zhang, Mengyan Zang

FINITE ELEMENTS IN ANALYSIS AND DESIGN　108　32-40　2016/01

DOI： 10.1016/j.finel.2015.09.001 　

ISSN： 0168-874X

eISSN： 1872-6925
高機能高速工具サーボによる3次元微細形状加工技術のイノベーション

清水裕樹, 陳遠流, 蘆泳辰, 伊東聡,高偉

機械技術　64　(4)　36-40　2016

ISSN： 0451-9396
精密位置決めセンサの基礎と最新技術

伊東聡,高偉

Inter Lab　114　20-25　2015/03/15
光学式3軸角度センサの小型化に関する研究

丸山泰司, 清水裕樹, 伊東聡, GAO Wei, TAN Siew Leng

精密工学会大会学術講演会講演論文集　2015　2015
長尺AFMプローブによるマイクロ光学素子の表面形状測定に関する研究

伊東聡, JIA Zhigang, LI Minglei, 清水裕樹, GAO Wei

精密工学会大会学術講演会講演論文集　2015　2015
水平走査プローブによる小型円筒ワークの精密形状測定に関する研究

町田裕貴, 清水裕樹, 伊東聡, GAO Wei, 山崎宏, 柴本裕輔, 花岡浩毅

精密工学会大会学術講演会講演論文集　2015　2015
超高感度角度センサに関する研究

丸山泰司, 清水裕樹, 伊東聡, GAO Wei

精密工学会大会学術講演会講演論文集　2015　2015
3ビームロイドミラー干渉計による2軸回折格子加工に関する研究

相原涼, LI Xinghui, CAI Yindi, 伊東聡, 清水裕樹, GAO Wei

精密工学会大会学術講演会講演論文集　2015　2015
光周波数コムを用いた角度スケールコムに関する研究

清水裕樹, 玉田純, 工藤幸利, CHEN Yuan-Liu, 伊東聡, GAO Wei

精密工学会大会学術講演会講演論文集　2015　2015
液面基準3軸姿勢角センサに関する研究

伊東聡, 石川龍弥, 片岡智史, CHEN Yuan-Liu, 清水裕樹, GAO Wei

精密工学会大会学術講演会講演論文集　2015　2015
ダイヤモンド切削工具切れ刃の光学式形状測定に関する研究-切削工具切れ刃輪郭形状の測定-

中川翔太, JANG SungHo, 清水裕樹, 伊東聡, GAO Wei

精密工学会大会学術講演会講演論文集　2015　2015
2次元格子とフィゾー干渉計の一括自律校正に関する研究-自律校正法の提案-

大野敦子, KIM WooJae, CAI Yindi, CHEN Yuan-Liu, 清水裕樹, 伊東聡, GAO Wei

精密工学会大会学術講演会講演論文集　2015　2015
高精度セラミックス部品の加工機上形状測定に関する研究

小林遼, 清水裕樹, 伊東聡, GAO Wei, 足立茂, 大宮恭平, 佐藤友樹

精密工学会大会学術講演会講演論文集　2015　2015
微空間での熱収支を利用した平滑面欠陥検出に関する研究-10nm級サイズ欠陥との接触検知シミュレーション実験-

松野優紀, 大場裕太, 清水裕樹, GAO Wei

精密工学会大会学術講演会講演論文集　2015　2015
XYZマイクロステージに関する研究-ステージの設計と製作-

菅原拓馬, 清水裕樹, 伊東聡, GAO Wei, 丹羽英二, 佐々木祥弘

精密工学会大会学術講演会講演論文集　2015　2015
ステージロール運動誤差計測用高分解能クリノメータに関する研究

片岡智史, 石川龍弥, CHEN Yuan-Liu, 清水裕樹, 伊東聡, GAO Wei

精密工学会大会学術講演会講演論文集　2015　2015
平面ステージ精密制御用多自由度光センサに関する研究

古田雅也, LI Xinghui, CAI Yindi, 清水裕樹, 伊東聡, GAO Wei

精密工学会大会学術講演会講演論文集　2015　2015
フォトニクスが拓く次世代ものづくり技術精密測定機・加工機向け光学式エンコーダー技術

LI Xinghui, LI Xinghui, 清水裕樹, GAO Wei

光学　44　(9)　2015

ISSN： 0389-6625
ロール金型の加工機上測定に関する研究

清水裕樹, NIU ZengYuan, 松浦大貴, 小林遼, 伊東聡, GAO Wei

日本機械学会年次大会講演論文集(CD-ROM)　2015　2015

ISSN： 2424-2667
低測定力変位プローブによる工具刃先形状測定に関する研究

伊東聡, 関根匠, 清水裕樹, GAO Wei, 高橋和彦, 荒川訓明, 山本泰河, 久保田晃史

日本機械学会年次大会講演論文集(CD-ROM)　2015　2015

ISSN： 2424-2667
光学式超精密多軸位置決めセンサ

高偉, 清水裕樹, 伊東聡, 陳遠流

自動化推進　44　(4)　2-5　2015
知的なはかり方とは？精度を左右する計測アルゴリズム

清水裕樹, 高偉

日本機械学会誌　118　(1164)　668-671　2015

ISSN： 0021-4728
精密位置決めのための角度センサ活用

清水裕樹, 伊東聡, 高偉

機械設計　58　(8)　46-52　2014/08
Publisher: 日刊工業新聞社
ISSN： 0387-1045
174 Compensation of frequency drifts in a scanning electrostatic force microscope for surface profile measurement

JIA Zhigang, HOSOBUCHI Keiichiro, ITO So, SHIMIZU Yuki, GAO Wei

2014　(49)　145-146　2014
Publisher: The Japan Society of Mechanical Engineers
微細形状測定のための非接触静電気力顕微鏡に関する研究-形状測定の高速・高精度化のための走査方式の検討-

細渕啓一郎, JIA Zhigang, 伊東聡, 清水裕樹, GAO Wei

精密工学会大会学術講演会講演論文集　2014　2014
超高感度角度センサに関する研究-測定レーザビーム径拡大に伴うレンズ収差の影響-

村田大, 清水裕樹, 伊東聡, GAO Wei

精密工学会大会学術講演会講演論文集　2014　2014
ダイヤモンド切削工具切れ刃の光学式形状測定に関する研究

清水裕樹, JANG SungHo, GAO Wei

精密工学会大会学術講演会講演論文集　2014　2014
精密ステージ位置検出用モザイク格子サーフェスエンコーダに関する研究

清水裕樹, 伊藤武志, LI Xinghui, KIM WooJae, GAO Wei

砥粒加工学会学術講演会講演論文集(CD-ROM)　2014　2014
接触型マイクロ熱検知センサによるナノ平滑面微欠陥検出に関する研究-素子プロファイル改善と接触検知感度の検討-

清水裕樹, 大場裕太, GAO Wei

精密工学会大会学術講演会講演論文集　2014　2014
2軸ロイドミラー干渉計によるスケール格子の製作に関する研究

LI Xinghui, 清水裕樹, 伊東聡, GAO Wei

日本機械学会東北支部総会・講演会講演論文集(CD-ROM)　49th　2014
光学システムを用いたダイヤモンド切削工具切れ刃輪郭形状の3次元測定に関する研究

JANG SungHo, 清水裕樹, GAO Wei

日本機械学会東北支部総会・講演会講演論文集(CD-ROM)　49th　2014
C017 Design and Testing of a Four-Probe Sensor Head For a Mosaic Grating Surface Encoder

Ito Takeshi, Shimizu Yuki, Kim WooJae, Hosono Koji, Ito So, Gao Wei

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　381-384　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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A surface encoder, which can measure the XYZ-directional displacements, has been developed. The XY-directional measurement range depends on the size of the XY-axis scale grating. A mosaic XY-axis scale grating, which consists of multiple XY-axis grating, has been proposed to expand the XY-directional measurement range of the three-axis surface encoder. And multi-probe surface encoder, which has two-probe, for the mosaic scale grating has been proposed. In this paper, an optical sensor head, which has four-probe for the mosaic XY-axis scale grating, was developed and basic experiment was carried out to confirm the feasibility of the proposed method.
C016 An ultra-sensitive angle sensor based on laser autocollimation for stage motion measurement

MURATA Dai, TAN Siew-Leng, SHIMIZU Yuki, ITO So, GAO Wei

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　377-380　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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This paper proposes a method of improving the sensitivity of the angle sensor for angular motion errors of precision linear stages. The sensitivity of the angle sensor based on laser autocollimation depends on the diameter of the incident beam on the objective lens. The relationship between the sensitivity of the sensor and the beam diameter is investigated by expanding the diameter and using a single-cell photodiode as the position-sensing detector corresponding to a small light spot. From the experimental result, the sensitivity is improved by expanding the diameter and the sensor can detect angular motion of about 0.001".
D031 Self-Evaluation of Tool Edge Contour of a Single Point Diamond Tool on a Force-Controlled Fast Tool Servo

CHEN Yuan-Liu, SHIMIZU Yuki, ITO So, GAO Wei, JU Bing-Feng

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　590-593　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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A method is proposed for self-evaluation of edge contours of single point diamond tools on a force-controlled fast tool servo equipped on a precision lathe. A sharp point referred as reference point is generated by using the diamond tool to cut two round-shaped grooves with overlapping boundary. The diamond tool is then scanned by the reference point through servo control of the contact force, in which the edge contour is obtained by reversing the scanning trace of the tool. Experiments of evaluations of tool edge contour and out-of-roundness are carried out to demonstrate the feasibility of the proposed method.
C020 Precision Positioning of a Long-stroke Scanning Electrostatic Force Probe for Profile Measurement of Large Amplitude Micro-structured Surface

JIA Zhigang, HE Gaofa, GOTO Shigeaki, HOSOBUCHI Keiichiro, ITO So, SHIMIZU Yuki, GAO Wei

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　397-402　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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A long-stroke scanning electrostatic force probe (SEFP) is presented in this paper. The long range electrostatic force keeps large probe-to-sample distance when SEFP scans the profile. The probe is driven by an ultra-high precision Z scanner, which has a long effective measurement range of 50 μm with non-linearity error less than 10 nm as well as least significant bit resolution of 0.5 nm. The profile of a prism sheet with large amplitude of 25 μm is measured by the SEFP. The experiment result is analyzed and the effectiveness of the proposed SEFP for profile measurement of large amplitude micro-structured surface is demonstrated.
C021 Development of Cr-N strain-gauge-type displacement sensor for positioning of micro-XY stage

Peng Yuxin, Azuma Toyohiro, Niwa Eiji, Kaneko Junji, Shimizu Yuki, Ito So, Gao Wei

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　403-406　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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A strain-gauge-type precision displacement sensor, which is developed for positioning of a micro-XY stage, is described in this paper. The designed patterns of Cr-N strain gauges are directly sputtered on zirconia plates, which would be used as leaf springs in the micro-XY stage, by using photolithography processes to form a Wheatstone bridge circuit. The patterns of the strain gauges on the leaf spring are optimized to be sensitive area so that the displacement of the stage can be measured with a higher sensitivity. The experimental results confirmed that the designed sensor is applicable for sub-micrometre-scale positioning of the micro-XY stage.
D030 A micro optical probe for evaluation of tool edge geometry

JANG SungHo, SHIMIZU Yuki, ITO So, GAO Wei

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　586-589　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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This paper proposes a non-contact and on-machine measurement method for evaluating tool edge geometry. A focused laser beam having a diameter of several micrometres traces over the tool edge, while the both of signals are monitored. By utilizing a light intensity of the laser beam passed around the tool, the perpendicular distance between the optical axis and the tool edge is obtained. Measurements have been carried out with a scanning speed of 16.7 μm/s on the ultra-precision machine lathe. The measurement resolution of 30 nm of the method can be developed to greater than the diffraction limit.
C019 Investigation and reduction of crosstalk errors in a six-degree-of-freedom surface encoder for a planar motion stage

Li Xinghui, Ito So, Muto Hiroshi, Shimizu Yuki, Gao Wei, Dian Songyi

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　391-396　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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A six-degree-of-freedom (six-DOF) optical sensor has been developed for the precision positioning of a surface motor stage. The sensor consists of a two-dimensional (2D) planar grating and a reading head. This sensor has been designed in such a way that three-axis translational motions and three-axis angular rotations of the stage can be measured simultaneously through sharing a same laser source and a same measurement point on the scale grating. To improve the accuracies of the multi-DOF (MDOF) measurement system, crosstalk errors were investigated and described, and the methods to reduce the errors were proposed in this paper.
B012 Design of fabrication process of thermal contact sensor for surface defect inspections

OHBA Yuta, SHIMIZU Yuki, LU Wenjian, GAO Wei

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　204-207　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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A fabrication process of a thermal element, which would be used as a contact sensor in the concept of defect detection on smooth surfaces, has been designed. The thermal element, which consists of thin-film resistance, would be used to capture small amount of frictional heat generated at the contact with nanometer-order defects. Therefore, feasibility of the designed process has been verified by developing a first prototype of the thermal element, while considering its thermal sensitivity. Experimental results revealed that the fabricated thermal element is functional for detecting small amount of heat on the order of several-ten microwatts.
B002 Construction of a surface profile measurement system by using a nanopipette ball probe with shear-force detection

Kodama Issei, Ito So, Gao Wei

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　159-164　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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The nanopipette ball probe is introduced for measuring three dimensional forms of micrometric structures. The shaft of the probe is made of glass pipette which has low Young's modulus in order not to damage the measurement object, and a micro glass ball is fixed to the tip of the shaft to measure in all directions. In addition, shear-force detection has been applied to detect approach of measurement object with low measuring force. In this paper, the basic property of the probe is evaluated, and dimensional form measurement is demonstrated by using the probe.
B003 Design of a stylus displacement sensor with a low measuring force

SEKINE Sho, OSAWA Shinichi, SHIMIZU Yuki, ITO So, GAO Wei, KUBOTA Kouji, KATO Akira, ARAKAWA Kuniaki, YASUTAKE Mutsumi

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　165-168　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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This paper presents a new measurement system for on-machine form measurement of surface edges. The system is composed of a laser displacement sensor and a cantilever, on which a mechanical stylus probe would be mounted. The displacement of the cantilever probe is measured by a laser displacement sensor. Tip radius of the stylus probe is smaller than the diameter of the laser spot and the cantilever is fabricated with a material with a low spring constant. The proposed system satisfies both the large measurement range and low measurement force, while it can be applied to on-machine measurements.
B011 Experiment of Polarization Forces in Scanning Electrostatic Force Microscopy for Measuring Surface Profile of Dielectric

HE Gaofa, JIA Zhigang, ITO So, SHIMIZU Yuki, GAO Wei

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　200-203　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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For measuring the surface profile of many micro-optical components with complicated shapes, which are made of non-conductive material, the electrostatic force microscopy (EFM) was recommended. The relationship between the polarization force and the tip-to-sample distance was analyzed based on dielectric polarization theory. The prototype of the scanning electrostatic force microscopy was built. The force curves of different samples with different materials and surface shapes were detected by the EFM prototype. Both theoretical analysis and the experimental results demonstrated that the EFM system can be used to measure the surface profile of non-conductor.
B010 Measurement of contact potential difference and material distribution by using an SEFM

HOSOBUCHI Keiichiro, JIA Zhigang, ITO So, SHIMIZU Yuki, GAO Wei

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　197-199　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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This paper presents a novel method for the measurement of the contact potential difference (CPD) and material distribution over the sample surface using scanning electrostatic force microscope (SEFM). Since the intensity of electrostatic force generated between the probe and the sample surface is relied on the differences of the CPD, the CPD can be calculated by using the frequency shifts of the probe oscillation when two different bias voltages are applied between tip and the sample. The detection sensitivity corresponding to the experimental conditions has been confirmed by simulation. In addition, the basic characteristic of the CPD measurement system has been evaluated.
B001 On-machine form measurement system of high precision ceramics parts by using a laser displacement sensor

Matsuura Daiki, Ito So, Meguro Takayuki, Shimizu Yuki, Gao Wei, Adachi Shigeru, Omiya Kyohei

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　153-158　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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This research describes an on-machine form measurement system of high precision ceramics parts. This system consists of a grinding machine and a laser displacement sensor. By using two horizontal axes of the grinding machine with sub-micrometric motion accuracy and the high precision laser displacement sensor which is mounted on the grinding machine, three-dimensional continuous form measurement with sub-micrometric accuracy can be realized in non-contact condition. In order to evaluate the stability and motion accuracy which influence the measurement accuracy of the system, the experiments to estimate stability and motion accuracy were conducted. And the form measurements were conducted.
B004 Investigation of a femtosecond laser for measurement of angular displacement

kudo Yukitoshi, Tan Siew-Leng, Shimizu Yuki, Ito So, Gao Wei

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21　2013　(7)　169-172　2013/11/06
Publisher: The Japan Society of Mechanical Engineers

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This paper describes a laser angle sensor with a femtosecond laser based on the laser autocollimation method. Instead of a semiconductor laser in the conventional laser autocollimation sensor, a femtosecond mode-locked laser is employed as the light source. The collimated beam from the femtosecond laser is projected on a target reflector. The reflected beam is received by an autocollimation unit, which is optimized for femtosecond mode-locked laser. Since the carrier frequency of the femtosecond laser is stabilized by an external rubidium frequency standard, the sensor sensitivity can be improved. The prototype sensor has been designed and fabricated, and the results of the evaluation experiments are presented.
3次元微細加工用高速高機能工具サーボ制御装置の開発

伊東聡, 陳遠流, 盧泳辰, 清水裕樹, 高偉

3次元微細加工用高速高機能工具サーボ制御装置の開発　58　(7)　35-43　2013/07
Publisher: ケミカルエンジニヤリング
ISSN： 0387-1037
161 Fabrication of thin-film thermal contact sensor for detection of surface defects

LU Wenjian, OHBA Yuta, SHIMIZU Yuki, GAO Wei

2013　(48)　124-125　2013/03/15
Publisher: The Japan Society of Mechanical Engineers
超高感度角度センサに関する研究

村田大, 清水裕樹, 伊東聡, GAO Wei

精密工学会大会学術講演会講演論文集　2013　2013
接触型マイクロ熱検知センサによるナノ平滑面微欠陥検出に関する研究-試作素子による熱検知感度の実験的検討-

清水裕樹, 大場裕太, LU Wenjian, GAO Wei

精密工学会大会学術講演会講演論文集　2013　2013
高精度セラミックス部品の形状測定に関する研究

目黒孝幸, 松浦大貴, 清水裕樹, 伊東聡, GAO Wei, 足立茂, 大宮恭平

日本機械学会東北支部総会・講演会講演論文集　48th　2013
極低測定力触針式変位センサの開発-センサの設計と性能評価-

大澤慎一, 関根匠, 伊東聡, 清水裕樹, GAO Wei, 久保田晃史, 加藤明, 荒川訓明, 安竹睦実

日本機械学会東北支部総会・講演会講演論文集　48th　2013
三次元微細形状測定のための静電気力顕微鏡に関する研究

細渕啓一郎, JIA Zhigang, 伊東聡, 清水裕樹, HE Gaofa, GAO Wei

日本機械学会東北支部総会・講演会講演論文集　48th　2013
D14 On-machine surface form evaluation of a large-scale roll workpiece

Lee Jung Chul, Shimizu Yuki, Ito So, Gao Wei, Chun Hong Park, Jooho Hwang, Jeoung Seok Oh

The ... Manufacturing & Machine Tool Conference　2012　(9)　215-216　2012/10/27
Publisher: The Japan Society of Mechanical Engineers

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This paper presents the on-machine surface form evaluation of a large-scale roll workpiece on a drum roll lathe. In this research, the surface form of a large-scale roll workpiece, which is composed of the out-of-straightness, the out-of-roundness and the differences of the diameter along the axial direction of a large-scale roll workpiece, is measured by using two capacitive type displacement probes placed on the two sides of a large-scale roll workpiece
D17 Experimental study of thermal contact sensor for the detection of surface defects

LU Wenjian, SHIMIZU Yuki, OHBA Yuta, GAO Wei

The ... Manufacturing & Machine Tool Conference　2012　(9)　221-222　2012/10/27
Publisher: The Japan Society of Mechanical Engineers

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Experimental study on a thermal contact sensor for the detection of defects on smooth surfaces is described. As a prototype of the thermal contact sensor, a several-ten-micrometer-sized thin-film element was fabricated by photolithography processes. By using the fabricated element, both laser exposure tests and friction tests were carried out to investigate the feasibility of the element on detecting small amount of frictional heats. Three types of sensors with the element of different sizes are employed to compare the temperature rises due to the heating. Results of theoretical calculations are also compared with the experimental results to confirm the feasibility of the contact sensor.
大型加工物の高精度化を保証するインプロセス/オンマシン計測技術の最新動向

清水裕樹, 高偉, 伊東聡

機械技術　60　(7)　30-37　2012/07
Publisher: 日刊工業出版
ISSN： 0451-9396
193 Fast calibration of XY gratings

Kim WooJae, Shimizu Yuki, Ito So, Gao Wei

2012　(47)　192-193　2012/03/13
Publisher: The Japan Society of Mechanical Engineers
194 Analysis and measurement of the behavior of a rotating cylinder

LEE JungChul, SHIMIZU Yuki, ITO So, GAO Wei, HWANG Jooho, OH JeongSeok, PARK ChunHong

2012　(47)　194-195　2012/03/13
Publisher: The Japan Society of Mechanical Engineers
196 Investigation of the dynamics of a high-precision air-bearing displacement sensor

Lee Kang-Won, Ito So, Shimizu Yuki, Gao Wei

2012　(47)　198-199　2012/03/13
Publisher: The Japan Society of Mechanical Engineers
195 Design and experimental validation of an XY micro-stage

Peng Yuxin, Shimizu Yuki, Ito So, Gao Wei

2012　(47)　196-197　2012/03/13
Publisher: The Japan Society of Mechanical Engineers
197 Compensation of eccentric error in gear metrology

XU Bin, TAKEISHI Toshiki, ITO So, SHIMIZU Yuki, GAO Wei, YAMAZAKI Hiroshi, NAKAZAWA Yoshiji

2012　(47)　200-201　2012/03/13
Publisher: The Japan Society of Mechanical Engineers
198 Laser interference lithography of gratings for a surface encoder

Li Xinghui, Zeng Lijiang, Shimizu Yuki, Ito So, Gao Wei

2012　(47)　202-203　2012/03/13
Publisher: The Japan Society of Mechanical Engineers
モザイク格子サーフェスエンコーダに関する研究-マルチプローブセンサヘッドの開発-

細野幸治, KIM Woojae, 清水裕樹, 伊東聡, GAO Wei

精密工学会大会学術講演会講演論文集　2012　2012
ウエハ表面のナノレベル欠陥検出向け接触型マイクロ熱検知センサの原理検討

清水裕樹, LU Wenjian, 東豊大, GAO Wei

精密工学会大会学術講演会講演論文集　2012　2012
微細形状測定のための非接触静電気力走査型プローブ顕微鏡に関する研究

後藤成晶, 細渕啓一郎, 伊東聡, 清水裕樹, GAO Wei

精密工学会大会学術講演会講演論文集　2012　2012
衛星用大型ミラーの加工機上高精度形状測定に関する研究-補正加工の実施と不確かさの評価-

武藤啓志, 後藤成晶, 細野幸治, 清水裕樹, GAO Wei, 足立茂, 大宮恭平, 佐藤広規, 久田哲弥, 齋藤佳史, 久保田浩明

精密工学会大会学術講演会講演論文集　2012　2012
歯車形状測定の高精度化に関する研究-歯車と変位センサの設置誤差補正-

武石俊希, BIN Xu, 伊東聡, 清水裕樹, GAO Wei, 山崎宏, 中沢芳司

精密工学会大会学術講演会講演論文集　2012　2012
マイクロステージ用変位センサに関する研究

東豊大, 丹羽英二, PENG Yuxin, 金子純史, 清水裕樹, 伊東聡, GAO Wei

日本機械学会東北支部総会・講演会講演論文集　47th　2012
ダイヤモンド切削工具切れ刃輪郭形状測定のための光学式センサに関する研究

JANG SungHo, 清水裕樹, 伊東聡, GAO Wei

日本機械学会東北支部総会・講演会講演論文集　47th　2012
Questionnaire survey on ultra-precision positioning

Takaaki Oiwa, Masahide Katsuki, Mitsuji Karita, Wei Gao, Susumu Makinouchi, Kaiji Sato, Yasuji Oohashi

International Journal of Automation Technology　5　(6)　766-772　2011/11
Publisher: Fuji Technology Press
DOI： 10.20965/ijat.2011.p0766 　

ISSN： 1881-7629

eISSN： 1883-8022
134 On-machine measurement of micro-structured surface by an air-bearing displacement sensor

LEE Kang-Won, GAO Wei

2011　(46)　72-73　2011/03/15
Publisher: The Japan Society of Mechanical Engineers
137 Calibration of a two-degree-of-freedom linear encoder

KIM WooJae, GAO Wei

2011　(46)　78-79　2011/03/15
Publisher: The Japan Society of Mechanical Engineers
138 A laser probe for positioning of micro-objects

JANG SungHo, ASAI Takemi, GAO Wei

2011　(46)　80-81　2011/03/15
Publisher: The Japan Society of Mechanical Engineers
衛星用大型ミラーの加工機上高精度形状測定に関する研究-形状測定システムの構築とアライメント手法の開発-

後藤成晶, LEE Jung Chul, 清水裕樹, GAO Wei, 足立茂, 大宮恭平, 佐藤広規, 久田哲弥, 齋藤佳史, 久保田浩明

精密工学会大会学術講演会講演論文集　2011　2011
回折光干渉型多軸サーフェスエンコーダ =サブナノメートル多軸変位測定のための新しい光センサ技術=

木村彰秀, 細野幸治, 金于載, 荒井義和, 高偉

光アライアンス　22　(3)　49-52　2011
Publisher: 日本工業出版
ISSN： 0917-026X
189 A surface encoder for mosaic XY grating : Proposal of a multi-probe optical system and experiments for principle confirmation

HOSONO Koji, KIMURA Akihide, GAO Wei

2010　(45)　178-179　2010/03/12
Publisher: The Japan Society of Mechanical Engineers
187 Ultra-High Precision Scanning Probe Microscope : Construction of the instrument and experiment of profile measurement

GOTO Shigeaki, GAO Wei

2010　(45)　174-175　2010/03/12
Publisher: The Japan Society of Mechanical Engineers
186 Evaluation of a FS-FTC unit for measurement of surface profile on a precision diamond turning machine

LEE Kang Won, NOH YoungJin, GAO Wei

2010　(45)　172-173　2010/03/12
Publisher: The Japan Society of Mechanical Engineers
多軸サーフェスエンコーダの基礎

木村彰秀, 高偉

機械設計　76　(7)　759-762　2010
Publisher: The Japan Society for Precision Engineering
DOI： 10.2493/jjspe.76.759 　

ISSN： 0912-0289
超精密位置決めのための変位センサ (特集機械設計者のための精密位置決め機構設計--最新事例で学ぶ高精度化,高速化,低コスト化の実現)

木村彰秀, 高偉

機械設計　53　(12)　47-54　2009/09
Publisher: 日刊工業新聞社
ISSN： 0387-1045
155 Precision measurement of error motions of an ultra-precision machine tool

LEE JungChul, NHO YongJin, ARAI Yoshikazu, GAO Wei

2009　(44)　108-109　2009/03/13
Publisher: The Japan Society of Mechanical Engineers
178 Fast Tool Control by a Voice Coil Actuator

NAGASHIMA Masayuki, NOH Young Jin, ARAI Yoshikazu, GAO Wei

2009　(44)　152-153　2009/03/13
Publisher: The Japan Society of Mechanical Engineers
精密位置決めのための変位センサ

木村彰秀, 高偉

機械設計　53　(12)　47-54　2009
Key Engineering Materials: Preface

Wei Gao

Key Engineering Materials　381-382　2008

ISSN： 1013-9826

eISSN： 1662-9795
ナノメートル３Ｄエッジ形状の高速高精度計測

荒井義和, 浅井岳見, 崔玉国, 高偉

月刊トライボロジー　246　(2)　16-19　2008
Publisher: 新樹社
ISSN： 0914-6121
マイクロ非球面の精密ナノ計測

荒井義和, 澁谷篤史, 高偉

砥粒加工学会誌　52　(6)　310-313　2008
精密３次元マイクロ形状の知的計測

高偉, 荒井義和

計測と制御　47　(9)　707-712　2008
高感度高速に計測する光学式角度センサ (特集革新的センシング技術)

高偉, 佐藤隼人, 齋藤悠佑

ケミカルエンジニヤリング　52　(9)　706-711　2007/09
Publisher: 化学工業社
ISSN： 0387-1037
精密ナノ計測フロンティア

高偉

機械の研究　59　(10)　1019-1025　2007
Publisher: 養賢堂
ISSN： 0368-5713
高感度高速に計測する光学式角度センサ

高偉, 佐藤隼人, 齋藤悠佑, 荒井義和

ケミカルエンジニヤリング　52　(9)　42-47　2007
大型加工物形状の超精密インプロセス／オンマシン計測技術

高偉

機械技術　55　(6)　22-26　2007
Publisher: 日刊工業新聞社
ISSN： 0451-9396
313 Development of ultra-precision on-machine measurement system with low contact force

NAGAIKE Yasunari, NAKAMURA Yasushi, ITO Yoshiaki, GAO Wei, KURIYAGAWA Tsunemoto

The ... Manufacturing & Machine Tool Conference　2006　(6)　125-126　2006/11/24
Publisher: The Japan Society of Mechanical Engineers

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This paper describes an instrument called nanoshape for measuring surface forms of aspheric optical elements on the processing machine. The effectiveness of the on-machine measurement system is confirmed by the result of compensation processing based on the measurement data. The instrument employs a contact-type scanning stylus. An original inclined self-weight method is designed to control the contact force. In this method, the contact force is generated by inclining the air slider of the instrument, on which the stylus is attached, from the horizontal plane only a little below the stylus. As a result, an extremely steady low contact force (measuring force) can be easily achieved. This method has a peculiar error that occurs by inclining. This error tends to increase as the angle of inclining grows. The evaluated radius variation can be reduced enough by setting the measuring force to tens of milligrams.
312 Probe for Surface Profile Measurement of Aspheric Micro-lens : Fabrication of Micro-stylus by using silica ball

YOSHIKAWA Yasuo, Shibuya ATSUSHI, Gao WEI, KIYONO Satoshi

The ... Manufacturing & Machine Tool Conference　2006　(6)　123-124　2006/11/24
Publisher: The Japan Society of Mechanical Engineers

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Necessity of small and accurate aspheric lens is increasing in medical service and optical communication. To measure such lens, micro-stylus whose tip ball is less than several of micrometers in diameter is necessary. This paper describes the development of a micro stylus with tip balls of 10μm and 50μm in diameter, respectively. The tip balls are silica spheres which feature of high accuracy and affordable price. The silica sphere is glued to the end of the stylus made of stainless steel, which serves as the probe of an air-bearing displacement sensor. Surface profile measurement of an aspheric lens is carried out by the micro-probe.
State-of-the-art laser-based systems for precision mechanical measurements

Wei Gao

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao　27　(5)　493-500　2006/10

ISSN： 0257-9731
スパイラル走査型AFMによる大面積3次元微細形状の高精度測定に関する研究

高偉, 青木純, 清野慧

豊田研究報告　(59)　109-114　2006/05
Publisher: 豊田理化学研究所
ISSN： 0372-039X
光を使ってサブナノメートルの変位を測る

高偉

光アライアンス　17　(8)　54-58　2006
Publisher: 日本工業出版
ISSN： 0917-026X
非接触式変位センサによる精密ナノ計測制御

高偉

精密工学会秋季大会. シンポジウム資料　2005　65-70　2005/09/01
大面積3次元微細形状の高精度加工計測システム

高偉

精密工学会秋季大会. シンポジウム資料　2005　27-32　2005/09/01
原子間力顕微鏡による大面積3次元微細形状測定に関する研究

高偉, 青木純, 清野慧

豊田研究報告　(58)　117-121　2005/05
Publisher: 豊田理化学研究所
ISSN： 0372-039X
Precision nanometrology and its applications to precision nanosystems

Wei Gao

International Journal of Precision Engineering and Manufacturing　6　(4)　14-20　2005/04/01
402 Measurement of an Aspherical Surface Profile : Self-Calibration Method for Profile Error of Probe Sphere

SHIBUYA Atsushi, ARAI Yoshikazu, GAO Wei, SHIMIZU Hiroki, KIYONO Satoshi

2005　(40)　140-141　2005/03/15
Publisher: The Japan Society of Mechanical Engineers
403 Precision measurement of a scroll compressor : Construction of measurement system

TAKESHIMA Masayuki, FURUKAWA Masaru, GAO Wei, SHIMIZU Hiroki, KIYONO Satoshi

2005　(40)　142-143　2005/03/15
Publisher: The Japan Society of Mechanical Engineers
Development of a compact angle sensor

Sato Hayato, GAO Wei, Shimizu HIROKI, KIYONO Satoshi

The ... Manufacturing & Machine Tool Conference　2004　(5)　55-56　2004/11/19
Publisher: The Japan Society of Mechanical Engineers

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This paper presents a compact and high-sensitive angle sensor suitable for measurement of stage angular motions, such as pitching and yawing. The compact angle sensor is based on laser autocollimation for angle detection. To maintain the high sensitivity while miniaturizing the sensor size, the relationship between the spot size on the focal plane of the objective lens and the output of the photodetector with separate elements (bi-cell PD and quadrant PD) is analyzed with wave optics. A compact sensor is also developed based on the analysis result. Experiments have shown that the compact sensor has a resolution of 0.01 arc-seconds.
Development of a controller for a surface motor stage

KATAKURA Kei, DEJIMA Shuichi, GAO Wei, KIYONO Yoshiyuki, TOMITA Yoshiyuki

The ... Manufacturing & Machine Tool Conference　2004　(5)　59-60　2004/11/19
Publisher: The Japan Society of Mechanical Engineers

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Three degree-of-freedom (D.O.F.) planar motion stages for precision positioning have a problem that the motion in one-direction will interfere with those in other directions as a disturbance because of the free stage structure. A conventional PID controller does not have the function of compensateing for the disturbance of interference. A disturbance observer is thus employed in the PID controller so that the planar motion stage system becomes more.robustness to the interference disturbance. A feed forward function is also adopted in the controller for improvement of the tracking capability. The detail of the controller design is decribed in the paper. Experiments are also carried out for confirming the feasibility of the developed controller.
ナノスケールの知的計測の確立を目指して

三好隆志, 高増潔, 高偉

精密工学会誌　70　(8)　1028-1029　2004/08/01
High Precision Measurement of Rotational Accuracy

Wei Gao, Chun Hong Park

Journal of Korea Society of Precision Engineering　21　(8)　7-13　2004/08/01
ナノ計測戦略（ソフトウェア）－精密ナノ計測フロンティア

高偉

砥粒加工学会誌　48　(5)　245-248　2004/05/01
Publisher: 砥粒加工学会
ISSN： 0914-2703
312 High-Precision measurement of Large Area Three-Dimensional Micro-Structured Surfaces Using an AFM

AOKI Jun, GAO Wei, KIYONO Satoshi

2004　(39)　114-115　2004/03/13
Publisher: The Japan Society of Mechanical Engineers
516 An On-machine Measurement System for Large-Area Micro-structured Cylindrical Surface

Sato Shinji, Gao Wei, Tano Makoto, Shimizu Hiroki, Kiyono Satoshi

2004　(39)　200-201　2004/03/13
Publisher: The Japan Society of Mechanical Engineers
311 A nanomachining probe with nanometrology function

GAO Wei, KUDO Yasuto, KIYONO Satoshi, Patten John A

2004　(39)　112-113　2004/03/13
Publisher: The Japan Society of Mechanical Engineers
310 Straightness error measurement of an ultra-precision aspheric grinding machine : Straightness and rolling error measurement of slide table

ARAI Yoshikazu, GAO Wei, SHIMIZU Hiroki, KIYONO Satoshi, KURIYAGAWA Tsunemoto

2004　(39)　110-111　2004/03/13
Publisher: The Japan Society of Mechanical Engineers
Optimal probe arrangement of multi-probe cylindrical figure measuring instrument

ENDO Katsuyuki, GAO Wei, KIYONO Satoshi

2003　(39)　285-286　2003/09/05
Publisher: The Japan Society of Mechanical Engineers
A High-Precision Scanning-Probe Microscope Using a Carbon Nano Tube

AOKI Jun, GAO Wei, KIYONO Satoshi

2003　(38)　144-145　2003/03/15
Publisher: The Japan Society of Mechanical Engineers
Study on five degree-of-freedom detection by a surface encoder : Reduction of detection errors

DEJIMA Shuichi, GAO Wei, KIYONO Satoshi

2003　(38)　136-137　2003/03/15
Publisher: The Japan Society of Mechanical Engineers
Ototoxicity of norvancomycin: An experimental study in guinea pigs.

W Gao, S Zhang

TOXICOLOGICAL SCIENCES　72　50-51　2003/03

ISSN： 1096-6080
Development of a Miniaturized Fast Tool Servo

TANO Makoto, GAO Wei, MITO Masami, KIYONO Satoshi

The ... Manufacturing & Machine Tool Conference　2002　(4)　149-150　2002/11/19
Publisher: The Japan Society of Mechanical Engineers

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This paper presents a miniaturized fast tool servo, which consists of a piezoelectric actuator and a displacement sensor, for generating three-dimensional micro-patterns on cylindrical surfaces. A small hollow-type piezoelectric ring actuator with an internally pre-stressed stainless casing was employed to actuate the diamond tool. The commercially-available ring actuator has the advantages of high stiffness, high frequency response and high resolution. A compact capacitance-type displacement sensor for monitoring the displacement of the actuator was mounted inside the ring actuator so that the fast tool servo has almost same size with the ring actuator, which was approximately φ35mm×L40mm. Fabrication experiments of a sinusoidal micro-structured metrology surface on a cylinder were carried out after investigating the basic performance of the miniaturized fast tool servo
大面積3次元マイクロストラクチャの高精度創成と評価

荒木武, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2002　(2)　141-141　2002/10/01
高精度長尺工具の精密測定に関する研究 : CDDカメラを用いたスリット幅測定

古川勝, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2002　(2)　588-588　2002/10/01
マルチプローブ型円筒形状測定機の開発(第3報) : 多断面法による測定

遠藤勝幸, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2002　(2)　587-587　2002/10/01
座標測定機の自律校正法の研究 : 第3報不等間隔プロービングによる自律校正

清水浩貴, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2002　(2)　590-590　2002/10/01
Fast inspection of internal defects of valve sleeves

GOMI Takashi, MITO Masami, GAO Wei, KIYONO Satoshi

2002　(37)　200-201　2002/03/16
Publisher: The Japan Society of Mechanical Engineers
座標測定機の自律校正法の研究:第2報座標測定機への適用

清水浩貴, 清野慧, 高偉

精密工学会大会学術講演会講演論文集　2002　(1)　703-703　2002/03/01
マルチプローブ型円筒形状測定機の開発(第2報):測定結果の誤差評価

遠藤勝幸, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2002　(1)　714-714　2002/03/01
生体軟組織の硬度分布測定に関する研究:硬度分布測定センサの提案と基礎的実験

庄司拓功, 清水浩貴, 清野慧, 高偉

精密工学会大会学術講演会講演論文集　2002　(1)　644-644　2002/03/01
波動歯車装置の精密形状測定に関する研究:歯切り量偏差の機上測定装置

古川勝, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2002　(1)　726-726　2002/03/01
サーフェスエンコーダを組込んだ多自由度サーフェスモータステージの研究:多自由度ステージシステムの構築

高偉, 清野慧, 出島秀一, 冨田良幸

精密工学会大会学術講演会講演論文集　2002　(1)　122-122　2002/03/01
角度センサによる大型超精密加工面形状のナノ計測

高偉

精密工学会誌　68　(3)　367-37　2002/03/01

DOI： 10.2493/jjspe.68.367 　
角度センサによる大型超精密加工面形状のナノ計測

高偉

精密工学会誌　68　(3)　371-371　2002
サーフェスエンコーダによる5自由度位置・姿勢の同時計測

清水裕樹, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2002　2002
407 3-D Calibration of Interferometric Microscopes

QIANG Xuefeng, GAO Wei, KIYONO Satoshi

The ... Manufacturing & Machine Tool Conference　2001　(3)　111-112　2001/11/20
Publisher: The Japan Society of Mechanical Engineers

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Accuracy of conventional interferometric methods for three-dimensional surface profiling is limited by errors of intrinsic metrics inside interferometric microscopes. A simple technique of XY axes calibration is proposed to measure those intrinsic errors resulted from CCD pixel arrays and objective lens distortion. In this self-calibration technique, a inclined plane is used as the specimen. Two sets of profile measurement data before and after a small shift of the specimen in the X (Y) axis direction are used to obtain the calibration curve concerning the intrinsic errors. Test results based on computer simulation are reported.
Harmonic Drive Gearsの精密形状測定に関する研究 : レーザー変位計による歯底形状測定

古川勝, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2001　(2)　655-655　2001/09/01
サーフェスモータ駆動型多自由度ステージの位置決めの研究 : 第2報微小位置決め制御につてい

出島秀一, 矢内宏明, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2001　(2)　536-536　2001/09/01
マルチプローブ型円筒形状測定機の開発(第1報) : 観測方程式と実験装置

遠藤勝幸, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2001　(2)　637-637　2001/09/01
多点法による長尺円筒の精密計測に関する研究 : ゼロ点誤差のリアルタイム補正

高偉, 清野慧, 児島秀俊

精密工学会大会学術講演会講演論文集　2001　(2)　642-642　2001/09/01
2次元角度センサのその場自律校正 : 真円度および回転運動測定システムにおける校正

大沼孝真, 佐藤栄二郎, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2001　(2)　641-641　2001/09/01
形状誤差と運動誤差の分離による回転運動誤差のナノ計測

高偉

精密工学会誌　67　(7)　1067-1071　2001/07/01
Publisher: The Japan Society for Precision Engineering
DOI： 10.2493/jjspe.67.1067 　

ISSN： 0912-0289
509 Improvement of the accuracy for Generating 2D Angular Grid

ARAKI Takeshi, GAO Wei, KIYONO Satoshi

11　186-187　2001
Publisher: The Japan Society of Mechanical Engineers
基準を作りながらの知的精密計測

高偉

日本機械学会誌　104　(991)　18-19　2001/01/01
In-process force monitoring in diamond turning of micro-patterns

Gao Wei, Genda Satoshi, Kiyono Satoshi

The ... Manufacturing & Machine Tool Conference　2000　(2)　197-198　2000/11/20
Publisher: The Japan Society of Mechanical Engineers

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A machining system of diamond turning based on the fast tool servo technique has been constructed for generating micro-patterns. To accurately generate the micro-pattern and understand the nano-cutting phenomenon, it is desired to monitor the machining force in the machining process. In this paper, an instrument was designed and fabricated to moni-tor the machining forces during diamond turning of the micro-pattern. Instrument design and measurement results are presented.
署名識別システムに関する研究 : 筆圧3分力検出用電子ペンの試作

清水浩貴, 清野慧, 高偉, 尾股定夫, 森俊二, 伊藤敏夫

精密工学会大会学術講演会講演論文集　2000　(2)　86-86　2000/09/01
角度情報を用いた真円度測定に関する研究(第2報) : 角度3点法と変位3点法との比較

佐藤栄二郎, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　2000　(2)　95-95　2000/09/01
長尺円筒の真直度測定に関する研究 : 異なる測定法による比較実験

高偉, 清野慧, 横山潤

精密工学会大会学術講演会講演論文集　2000　(2)　96-96　2000/09/01
Position Detection by an Optical Scanning Angular Sensor

Kiyono Satoshi, Hoshino Tadashi, Gao Wei

Conference on Information, Intelligence and Precision Equipment : IIP　2000　143-144　2000/03/24
Publisher: The Japan Society of Mechanical Engineers

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A new position sensing system, which is composed of a 2-D angle gril and a 2-D angular sensor, is proposed. The angle grid has a 2-D angular information pattern on the surface. The relative displacements between the angle grid and the angular sensor in the X and Y directions can be detected from the output of the angular sensor. Furthermore, use of an optical scanning angular sensor, which can scan a beam spot on the angle grid, can reduce the effect of the form error of the angle grid. Using constant speed scanning, the scale of the angle grid can be interpolated from time scale. In this paper, a signal processing system utilizing high-speed pulse generation and count circuits is designed to achieve high speed position detection. The experimental result of this position detection is reported.
418 Accurate Measurement of Spherical Profiles by an Interferometer

QIANG Xuefeng, GAO Wei, KIYONO Satoshi

2000　(35)　152-153　2000/03/11
Publisher: The Japan Society of Mechanical Engineers

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It is necessary to remove the form error of the reference flat from the interferometer datum for improving the accuracy of the spherical profile measurement using interferometers. For this purpose, a new method called the 2 position- 4 point method was proposed. In this method, form error of the reference flat along a closed circle can be removed. Data points along the circle are necessary for the data processing of this method. However, phase-measuring devices in most interferometers are square-grid detectors, and the data need to be conversed to polar grid array. In this paper, a method is presented to improve the accuracy of the data conversion.
417 Development of a Machining System for 2D Angular Grid

KIYONO Satoshi, SUDOH Masasyu, GAO Wei

2000　(35)　150-151　2000/03/11
Publisher: The Japan Society of Mechanical Engineers
ソフトアウェアデータムによる半径と真円度の同時計測に関する研究

高偉, 清野慧

精密工学会大会学術講演会講演論文集　2000　(1)　582-582　2000/03/01
角度情報をベースとする多自由度位置・姿勢検出法の研究マルチスポット光源の採用による位置検出精度向上

清野慧, 清水裕樹, 星野唯, 高偉

精密工学会大会学術講演会講演論文集　2000　2000
多点法におけるゼロ点誤差補正について

高偉, 清野慧

精密工学会大会学術講演会講演論文集　1999　(2)　455-455　1999/09/01
フィゾー干渉形状測定機の自律校正

清野慧, 孫洋, 強学鋒, 高偉

精密工学会大会学術講演会講演論文集　1999　(2)　457-457　1999/09/01
長尺円筒の中心線直線形状の超精密測定について(第2報) ゼロ点調整の精度向上

横山潤, 高偉, 清野慧, 人見宣輝

精密工学会大会学術講演会講演論文集　1999　(2)　456-456　1999/09/01
干歩計による球面形状の精密測定法-円周方向測定のための2方位4点法-

強学鋒, 張世宙, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　1999　(2)　400-400　1999/09/01
Development of an AFM-Based System for In-Process Measurement of Micro-Defects on Machined Surfaces

KWEON Hyun-Kyu, GAO Wei, KURIYAGAWA Tsunemoto, KIYONO Satoshi

JSME International Journal Ser. C Mechanical Systems, Machine Elements and Manufacturing　42　(1)　49-53　1999/03
Publisher: The Japan Society of Mechanical Engineers
ISSN： 1344-7653

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This paper examines a new in-process measurement system for the measurement of micro-defects on the surfaces of brittle materials by using the AFM(Atomic Force Microscopy).A new AFM scanning stage that can also perform nano-scale bending of the sample was developed by adding a bending unit to a commercially available AFM scanner.The bending unit consists of a PZT actuator and sample holder, and can perform static and cyclic three-point bending.The true bending displacement of the bending unit is approximately 1.8μm when 80 volts are applied to the PZT actuator.The frequency response of the bending unit and the stress on the sample were also analyzed, both theoretically and experimentally.Potential surface defects of the sample were successfully detected by this measurement system.It was confirmed that the number of micro-defects on a scratched surface increases when the surface is subjected to a cyclic bending load.
AFMによるインプロセス計測とナノ加工

權賢圭, 高偉, 清野慧

精密工学会大会学術講演会講演論文集　1998　(2)　424-424　1998/09/01
長尺円筒の中心線真直形状の超精密測定に関する研究

横山潤, 高偉, 清野慧, 人見宣輝

精密工学会大会学術講演会講演論文集　1998　(2)　78-78　1998/09/01
SPMの高精度化手法の提案とその液中作動型AFMへの適用

高偉, 野村進直, 權賢圭, 清野慧

精密工学会大会学術講演会講演論文集　1997　(2)　559-559　1997/10/01
干渉顕微鏡のその場自律校正法

清野慧, 高偉, 金井雅也

精密工学会大会学術講演会講演論文集　1997　(2)　453-453　1997/10/01
自律的位置検出に関する基礎的研究

出島秀一, 高偉, 清野慧

社団法人日本設計工学会研究発表講演会講演論文集　1997　(2)　31-34　1997/10/01
精密移動体のローリング計測・制御

小山直, 高偉, 張世宙, 清野慧, 宇田豊

社団法人日本設計工学会研究発表講演会講演論文集　1997　(2)　29-30　1997/10/01
インプロセス測定器を用いた形状の自律的創成に関する基礎研究

小倉一朗, 高偉, 小岩秀樹, 厨川常元, 清野慧

精密工学会大会学術講演会講演論文集　1996　(2)　299-300　1996/09/01
2次元変位センサの自律校正法

林玉池, 清野慧, 高偉

精密工学会大会学術講演会講演論文集　1995　(2)　551-552　1995/09/01
On-Machine Measurement of Large Mirror Profile by Mixed Method

Kiyono Satoshi, Gao Wei

JSME International Journal. C　37　(2)　300-306　1994
Publisher: The Japan Society of Mechanical Engineers
ISSN： 1344-7653

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This paper presents a new differential method called the mixed method, which was developed to measure the profile accurately under the circumstances of on-machine measurement. In comparison with the 2-point method, this method can more remarkably reduce the datum errors due to scanning, vibration and thermal drift. This method also has the advantage of obtaining the high-frequency component of profiles accurately. An optical sensor was designed and constructed to realize both the 2-point method and the mixed method. With a modulation technique, the sensor has been made to have good thermal drift characteristics. It can measure the displacement and angle of two points on a mirror surface simultaneously with a resolution higher than 0.1μm and 1". Using this sensor ; an on-machine measurement system has been constructed, and measurements of the straightness of cylindrical mirrors have been attempted with the 2-point method and the mixed method. Comparing the results, the favorable characteristics of the mixed method have been confirmed.

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Books and Other Publications 13

精密計測学 : Bilingual edition

高, 偉, 清水, 裕樹, 水谷, 康弘, 道畑, 正岐, 河野, 大輔, 吉田, 一朗, 伊東, 聡, 清水, 浩貴

朝倉書店　2024/04/01

ISBN: 4254201788
Optical Metrology for Precision Engineering

Wei Gao, Yuki Shimizu

De Gruyter　2021/12/06

ISBN: 3110541092
Surface Metrology for Micro- and Nanofabrication

Wei Gao

Elsevier　2020/10
Metrology

Springer　2019/08

ISBN: 9789811049378
計測工学 Measurement and Instrumentation

高偉, 清水裕樹, 羽根一博, 祖山均, 足立幸志

朝倉書店　2017/03
Evaluation of Nanometer Cutting Tool Edge for Nanofabrication

Yuki Shimizu, Takemi Asai, Wei Gao

InTech　2011
Precision Nanometrology : Sensors and Measuring Systems for Nanomanufacturing

Wei Gao

Springer　2010
Precision Control of Planar Motion Stages: Design and Implementation of Precision Motion Control Strategies

Wei Gao, Songyi Dian

VDM Verlag　2010
実用精密位置決め技術事典

高偉

（株）産業技術サービスセンター　2009
An XYθ planar motion stage system driven by a surface motot for precision positioning

Wei Gao

Springer-Verlag　2008
機械工学便覧

高偉

日本機械学会編　2007
An Intelligent Nanofabrication Probe with Function of Surface Displacement/Profile Measurement

Wei Gao

Springer-Verlag　2006/08/02
超精密加工と非球面加工（庄司克雄監修）

高偉

（株）NTS　2004/07/30

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Presentations 23

In-situ dimensional metrology of precision parts for smart manufacturing International-presentation Invited

高偉

2018 IEEE International Conference on Advanced Manufacturing　2018/11/17
FS-FTS: an innovation of fast tool servo for nano-fabrication and in-process measurement of large-area micro optics International-presentation Invited

高偉

The 14th China-Japan International Conference on Ultra-Precision Machining Process　2018/09/13
On-machine and in-process metrology for large-area microptics by using FS-FTS International-presentation Invited

高偉

4th CIRP Conference on Surface Integrity　2018/07/12
Precision manufacturing metrology based on scanning probe systems International-presentation Invited

高偉

The 13th International Symposium on Measurement Technology and Intelligent Instruments　2017/09/22
In-situ, in-line, on-machine & in-process surface metrology of precision parts International-presentation Invited

高偉

39th International MATADOR Conference on Advanced Manufacturing　2017/07/08
Measurement technologies for precision manufacturing of large-area micro-optics International-presentation

高偉

International Symposium on Green Manufacturing and Applications　2017/06/28
Recent advances in sensor technologies for precision positioning International-presentation Invited

高偉

The 7th International Conference on Positioning Technology　2016/11/09
On-machine & in-process metrology for ultra-precision manufacturing of large-area microoptics International-presentation Invited

高偉

The 5th Asia Pacific Conference on Optics Manufacture　2016/10/31
Nanofabrication and applications of large-area microstructured optical elements International-presentation Invited

高偉

International Conference on Optical and Photonic Engineering　2016/09/27
Nano-manufacturing and metrology of scale gratings for ultra-precision positioning International-presentation Invited

高偉

The 5th International Conference on Nanomanufacturing　2016/08/16
Measurement technologies for precision positioning International-presentation

The International Academy for Production Engineering, 65th General Assembly　2015/08/23
Nano-fabrication and Metrology of Large-area Micro-optics International-presentation

The 38th International MATADOR Conference on Advanced Manufacturing　2015/03/28
Precision nanometrology for manufacturing of micro-optics International-presentation

Advanced Optical Manufacturing and Testing Technologies　2014/04/26
Surface form metrology of micro-optics International-presentation

International Conference on Optics in Precision Engineering and Nanotechnology　2013/04/09
Challenge & recent progress in micro/nano-metrology for ultra-precision nanomanufacuturing International-presentation

The 2nd International Forum on Trends in Nano-Manufacturing　2012/09/14
Sensors and Measuring Instruments for Precision Positioning International-presentation

The 10th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII-2011)　2011/06/11
Sensors and Measuring Instruments for Ultra-Precision Manufacturing International-presentation

6th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2010)　2010/08/08
Precison Nanometrology for Ultra-Precision Manufacturing International-presentation

ISPEN’09 International Symposium on Precision Engineering and Micro/Nanotechnology　2009/10/28
Fast measuring technologies for ultraprecision manufacturing International-presentation

The 9th International Symposium on Measurement Technology and Intelligent Instruments　2009/06/29
Nanomeasuring and Nanopositioning Technologies for Precision Nanomanufacturing International-presentation

53rd International Scientific Colloquium (IWK)　2008/09/08
Fabrication and evaluation of large area microstructured surfaces for optical applications International-presentation

The first Asia Pacific Conference on Optics Manufacture　2007/01/11
Sensor Technologies for Precision Positioning International-presentation

The Second International Conference on Positioning Technology　2006/10/12
State-of-the-Art Laser-based Systems for Precision Mechanical Measurements International-presentation

International Symposium on Precision Mechanical Measurements　2006/08/02

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Industrial Property Rights 43

変位測定装置および変位測定方法

清水裕樹, 高偉, 仲村拓

特許第6570035号

Property Type: Patent
ワーク円筒部の形状測定方法および形状測定装置

花岡浩毅, 山崎宏, 柴本裕輔, 高偉, 清水裕樹, 伊東聡, 町田裕貴

特許第6496924号

Property Type: Patent
スティッチング加工方法

高偉, 廬泳辰

特許第5334054号

Property Type: Patent
角度センサ

高偉, 齋藤悠佑, 荒井義和, 鈴木達郎

特許第5322099号

Property Type: Patent
アクチュエータ、位置決め装置

相澤周二, 岡本幸一, 佐藤正一, 高偉, 荒井義和, 勝又大介

特許第5305380号

Property Type: Patent
接触式変位センサ

荒井義和, 高偉, 吉川泰生, 渋谷篤史, 長池康成

特許第5297735号

Property Type: Patent
アクチュエータ及びそれを用いた位置決め装置

高偉

特許第5176098号

Property Type: Patent
表面形状計測装置

高偉, 澁谷篤史, 清野慧

特許第4982731号

Property Type: Patent
3軸角度センサ

高偉, 齋藤悠佑, 清野慧

特許第4910126号

Property Type: Patent
XYZ軸変位測定装置

高偉, 木村彰秀, 清野慧

特許第4779117号

Property Type: Patent
アクチュエータ

高偉, 佐藤真路, 清野慧

特許第4264516号

Property Type: Patent
絶対位置測定装置および絶対位置測定方法

清水裕樹, 高偉, 松隈啓, 石塚稜

Property Type: Patent
切削工具切れ刃形状測定装置及び測定方法

清水裕樹, 高偉, 陳遠流, 蔡引テイ, 伊東聡, 國枝泰博, 篠田知顕

Property Type: Patent
回転角度検出装置および回転角度検出方法

清水裕樹, 高偉, 伊東聡, 陳遠流, 丸山泰司

Property Type: Patent
回折格子を用いた姿勢角計測方法及び姿勢角計測装置

伊東聡, 高偉, 石川龍弥, 清水裕樹, 片岡智史

Property Type: Patent
絶対角測定装置及び絶対角測定方法

清水裕樹, 高偉, 伊東聡, 工藤幸利

Property Type: Patent
微細輪郭形状測定装置および微細輪郭形状測定方法

清水裕樹, 高偉, 張城豪

Property Type: Patent
干渉リソグラフィにおける2次元パターンの一括露光手法

清水裕樹, 高偉, 李星輝, 伊東聡

Property Type: Patent
平滑面検査装置

清水裕樹, 高偉, 蘆文剣, 東豊大

Property Type: Patent
表面形状測定方法及びその装置

伊東聡, 高偉, 清水裕樹, 李康源

Property Type: Patent
回折格子を用いた3次元干渉計参照面の校正方法、および3次元干渉計

高偉, 清水裕樹, 金于載, 伊東聡

Property Type: Patent
輪郭形状測定方法及び輪郭形状測定装置

清水裕樹, 張城豪, 高偉, 浅井岳見, 伊東聡

Property Type: Patent
ステージ機構およびその駆動方法

清水裕樹, 高偉, 廬文剣

Property Type: Patent
間隙測定装置、表面形状測定装置、間隙測定方法および表面形状測定方法

高偉, 後藤成晶, 清水裕樹, 細渕啓一郎

Property Type: Patent
プローブの芯出し方法

後藤成晶, 高偉

Property Type: Patent
光学式エンコーダの設計方法

高偉, 木村彰秀, 細野幸治

Property Type: Patent
回折格子の形状誤差評価方法

木村彰秀, 高偉

Property Type: Patent
スティッチング加工方法

高偉, 廬泳辰

Property Type: Patent
走査運動誤差測定方法

荒井義和, 李貞徹, 廬泳辰, 高偉

Property Type: Patent
角度センサ

高偉, 齋藤悠佑, 荒井義和, 鈴木達郎

Property Type: Patent
接触式変位センサ

荒井義和, 高偉, 吉川泰生, 渋谷篤史, 長池康成

Property Type: Patent
アクチュエータ、位置決め装置

相澤周二, 岡本幸一, 佐藤正一, 高偉, 荒井義和, 勝又大介

Property Type: Patent
接触式変位センサのスタイラス及びその製造装置並びに接触式変位センサ

高偉, 吉川泰生

Property Type: Patent
長尺工具エッジの曲率半径の計測装置および長尺工具エッジの曲率半径の計測方法

高偉, 元木健順

Property Type: Patent
アクチュエータ及びそれを用いた位置決め装置

高偉

Property Type: Patent
微細形状加工装置

高偉, 田野誠, 清野慧

Property Type: Patent
XYZ軸変位測定装置

高偉, 木村彰秀, 清野慧

Property Type: Patent
3軸角度センサ

高偉, 齋藤悠佑, 清野慧

Property Type: Patent
位置決め装置

清野慧, 高偉, 清水浩貴, 渋谷篤史, 元木健順

Property Type: Patent
アクチュエータ

高偉, 佐藤真路, 清野慧

Property Type: Patent
表面形状計測装置

高偉, 澁谷篤史, 清野慧

Property Type: Patent
基準格子及びその製造方法

平田徹, 高偉

Property Type: Patent
検出装置及びステージ装置

高偉, 清野慧, 渡邉陽司, 冨田良幸, 牧野健一, 平田徹

Property Type: Patent

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Research Projects 28

光周波数コムを用いたピコラジアン級次世代ファブリペロー絶対角度計測法の創出

高偉, 佐藤遼

Offer Organization: 日本学術振興会

System: 科学研究費助成事業

Category: 基盤研究(B)

Institution: 東北大学

2024/04/01 - 2027/03/31
その場波面制御で自在に操る干渉定在波によるサブμｍ級自由微細構造の大面積露光創成

清水裕樹, 高偉

Offer Organization: 日本学術振興会

System: 科学研究費助成事業

Category: 基盤研究(B)

Institution: 北海道大学

2022/04/01 - 2025/03/31
光コム次元変換光学とその場自律校正法の創出によるサブアトム級３次元超精密計測

高偉, 清水裕樹, 松隈啓

Offer Organization: 日本学術振興会

System: 科学研究費助成事業基盤研究(A)

Category: 基盤研究(A)

Institution: 東北大学

2020/04/01 - 2024/03/31

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本研究では，次世代「つながる」超精密ものづくり実現に必須となる3次元超精密「絶対」形状計測基盤の確立を目的として，不等ピッチ絶対グリッド（不等間隔のものさし）および色収差レンズの分光作用をもとに，XYZ3軸絶対位置情報を光コム光源の光周波数情報に次元変換して検出する，極高感度絶対型XYZ位置コムを開発することを研究の目的としている．ナノメートル精度が限界である従来の計測・校正分離型信頼性保証（校正）体系の打破に向け，光コム光源をGPS衛星経由で「時間」の国家標準に直結することで実現する新概念の計測・校正一体型「その場自律校正体系」を確立し，遠隔地の生産現場における国家標準に匹敵する限界精度までの極高精度化を試みる．本年度は当初計画の通り，レーザ波面を分割制御した後に重ね合わせ，光の干渉により不等ピッチ光干渉絶対グリッド定在波を生成する1軸光学系を構築した後，波面分割型干渉計光学系に非球面ミラーを1枚追加して2軸化した．2軸化に伴うXYビーム間の干渉による歪み成分抑制のため，偏光制御光学系を導入した．HeCdレーザ光源を用いたビーム拡大光学系と組み合わせて，定在波一括転写システムを構築した．構築した定在波一括転写システムを用いて露光実験を行い不等ピッチ2軸絶対グリッドを作製するとともに，グリッドのピッチおよび振幅などを評価した．さらに，不等ピッチ絶対グリッドを用いた絶対型XY位置コムとして，光学読み取りヘッドの光源として用いるフェムト秒レーザのスペクトル帯域，および不等ピッチ絶対グリッドのピッチ変動幅を考慮して，±1次反射回折光を捕捉する差動型ファイバ受光光学系を設計・構築する生成光学系を開発した．その基本特性を実験によって調べた。また，次年度実施予定の不等ピッチ絶対グリッド製作システムの大面積化と最適化とともに，Z位置コム生成光学系に関する検討を前倒して実施した．
Frontier of the precision optical metrology created by the ultra-precision optical nano-grid reference artifact and the absolute optical scale comb

Gao Wei

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (S)

Category: Grant-in-Aid for Scientific Research (S)

Institution: Tohoku University

2015/05/29 - 2020/03/31

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Aiming to create a Frontier of the precision optical metrology, the absolute optical scale comb that can be realized by a fusion of the two-axis optical nano-grid reference artifact and the optical frequency comb has been developed. A multi-beam interferometer has been developed to fabricate two-axis optical nano-grid reference artifact with a sub-micrometric grating pitch over a size of 100mm×100mm. In addition, the self-calibration method has been developed for the evaluation of the Z-out-of-flatness and the XY-directional pitch deviation of the optical nano-grid reference artifact. Furthermore, a method of generating the absolute optical scale comb with the enhancement of the dispersive function of the optical nano-grid reference artifact has been established.
２軸干渉グリッド定在波一括転写と自律的精度保証による次世代光ナノグリッド基準創出

高偉

Offer Organization: 日本学術振興会

System: 科学研究費助成事業基盤研究(A)

Category: 基盤研究(A)

Institution: 東北大学

2015/04/01 - 2019/03/31
ダイヤモンドマイクロ切削工具エッジ形状のサブナノメートル超高精度計測法の研究

高偉, CHEN YUANLIU

Offer Organization: 日本学術振興会

System: 科学研究費助成事業特別研究員奨励費

Category: 特別研究員奨励費

Institution: 東北大学

2015/04/24 - 2017/03/31

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本研究題目では「次世代ダイヤモンドマイクロエッジ形状の自律校正」について取り組み，反転エッジ形状を利用した工具刃先のマイクロエッジ形状の新規な自律的測定法を確立し，その有効性を実験的に検証することを目的としている．本研究題目では，ダイヤモンド工具刃先のマイクロエッジを軟質金属表面に押し込み，表面に形成される反転エッジの形状とダイヤモンド工具刃先の形状から測定に起因する誤差を分離することで，マイクロエッジの自律的な絶対形状測定の算出を行う反転エッジ作動法の提案と検証を実施する．工具刃先マイクロエッジおよび反転エッジの形状は原子間力顕微鏡(Atomic force microscope: AFM)により測定し，それぞれの測定結果との比較からAFMプローブチップおよび測定の誤差を評価し，それぞれの絶対形状を取得する．平成28年度は高精度反転エッジの形成と反転エッジ作動法の実行可能性を実験的な検証を実施するために，高分解能反転エッジ形成システムの構築に取り組んだ．超精密インテンデーションシステムと高分解能変位検出システムにより構成された高分解能反転エッジ形成システムを開発し，軟質金属表面への反転エッジの形成および反転エッジ作動法による工具刃先マイクロエッジとAFMチップの自律的な形状計測を行った．その結果，本研究題目で開発した反転エッジ作動法はサブナノメートルの精度でそれぞれの形状を計測できることが実験的に確認され，本研究課題の目的であるダイヤモンド切削工具マイクロエッジの絶対形状の高精度計測に関する有効性が確認された．
Development of an optical method for evaluation of three-dimensional tool edge form with a high resolution beyond the diffraction limit

Shimizu Yuki, GAO Wei

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research

Category: Grant-in-Aid for Challenging Exploratory Research

Institution: Tohoku University

2015/04/01 - 2017/03/31

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For the quantitative evaluation of edge forms of next-generation high-precision cutting tools, a measurement method, in which a focused laser beam referred to as the micro-laser probe is employed to realize non-contact and high-speed tool edge evaluations, has been developed. A prototype optical setup with a high-precision objective lens for the micro-laser probe has been developed, and its basic characteristics have been evaluated in experiments. The experimental results have demonstrated that the developed micro-laser probe has a high measurement resolution beyond the diffraction limit for tool edge measurement. It has also been verified that the developed micro-laser probe can be applied for the quantitative evaluation of a tool edge contour. Furthermore, a feasibility of the micro-laser probe for evaluation of a tool cutting edge radius has also been verified throughout theoretical and experimental investigations.
A study for sub-nanometer ultra-high precision measurement method of micro cutting edge of diamond tool

Gao Wei, SHIMIZU YUKI

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research

Category: Grant-in-Aid for Challenging Exploratory Research

Institution: Tohoku University

2014/04/01 - 2016/03/31

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In this research, an ultra-precision form measurement has been verified for three dimensional measurement of micro-cutting edge of the diamond cutting tools. A reversal edge of the cutting edge, which is made by the indentation of the diamond cutting edge on the soft material, is created for the canceling of the measurement errors due to the AFM probe scanning. A force-sensor integrated fast tool servo (FS-FTS) was constructed for single point diamond micro-cutting and in-process measurement of both of the cutting force and tool displacement. By using the FS-FTS, the micrometric reversal edge of the cutting tool can be created during the measurement of the cutting force. Molecular dynamics (MD) simulations were introduced for the investigation and optimization of the creation of the reversal edge on the soft materials. The results of MD simulation indicated that 3D surface form of the diamond micro cutting edge could be obtained with sub-nanometric accuracy by using the reversal edge.
Development of a three-axis laser autocollimator for measurement of angular error motions of a next-generation ultra-precision positioning stage

GAO Wei, SHIMIZU Yuki, ITO So

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

Category: Grant-in-Aid for Scientific Research (B)

Institution: Tohoku University

2012/04/01 - 2015/03/31

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To realize next-generation ultra-precision positioning systems having a sub-nanometric positioning accuracy, a new principle for angle measurement, which is referred to as a three-axis laser autocollimator in this research, has been proposed. A compact micro optical sensor head in a size of 50mmx30mmx30mm has been designed and developed based on the proposed method, and its feasibility has been investigated in experiments. It was verified in experiments that the developed sensor had resolutions of 0.01 arcsecond, 0.01 arcsecond and 0.2 arcsecond for measurement of roll, yaw and pitch motions, respectively. Furthermore, a new method, which is referred to as the edge effect in this research, for detecting position of a focused laser beam has also been proposed. Experimental results revealed that the proposed method could achieve measurement resolution of beyond 0.001arcsecond.
A new scanning electrostatic force microscope for noncontact surface profile measurement of micro-specimens of bio-optics

GAO WEI, SHIMIZU Yuki

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research

Category: Grant-in-Aid for Challenging Exploratory Research

Institution: Tohoku University

2012/04/01 - 2014/03/31

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In this research, a new scanning electrostatic force microscope has been developed for noncontact surface profile measurement of micro-specimens of bio-optics. A charged conducting probe tip is oscillated by a tuning fork quartz crystal resonator. The probe tip is scanned over the sample surface by using an XY scanner in such a way that the frequency shift of the tuning fork oscillation, which corresponds to the electrostatic force gradient, is kept constant by controlling the probe Z position with a Z scanner. A dual height method is proposed to accurately obtain the tip to sample distances through removing the influence of the electric field distribution on the sample surface.
XYZ three-axis surface encoder with a single measurement point based on interference of diffraction beams

GAO Wei, SHIMIZU Yuki

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

Category: Grant-in-Aid for Scientific Research (B)

Institution: Tohoku University

2009 - 2011

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A new type of XYZ three-axis surface encoder has been developed for measurement and control of next-generation XYZ three-axis stages. In the surface encoder, a single laser beam is projected onto a micro-structured surface grating. A compact sensor head, which can be mounted on the stage, has been designed and constructed. It has been verified that the surface encoder has the ability to measure the three-axis XYZ displacements with a resolution of 0. 1 nm over a measurement area of 100mm(X)x 100mm(Y)x 1mm(Z)by using the information from the single measurement point.
High Speed and High Precision Measurement of Nanometric 3D Edge Profiles of Next Generation Diamond Micro-Tools

GAO Wei, ONO Takahito, KURIYAGAWA Tsunemoto, SHIMIZU Hiroki

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (A)

Category: Grant-in-Aid for Scientific Research (A)

Institution: Tohoku University

2006 - 2008
ナノスケール生産基盤におけるコア計測技術に関する企画調査

高増潔, 高谷裕浩, 高偉, 高辻利之, 笹島和幸, 古谷涼秋

Offer Organization: 日本学術振興会

System: 科学研究費助成事業基盤研究(C)

Category: 基盤研究(C)

Institution: 東京大学

2006 - 2007

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知的ナノメートル計測を発展させ,ナノスケール生産基盤として日本の産業における「ものづくり」への適用を考えるためには,4つのコア計測技術における課題解決のための共同研究が必要となる.本企画調査では,これらの課題解決を目的とした特定領域研究設置のための調査研究を行った.以下のような4つのグループを作り,調査研究を行った. (1)知的計測技術研究グループ知的計測手法の基本的な技術を体系化し,これを産業界で応用する場合の方法を定式化した. (2)ナノメートル加工計測技術研究グループナノメートル加工計測技術に知的計測手法を応用するために最適な対象を調査した. (3)ナノメートル計測標準研究グループナノメートル計測の標準化により,産業界にナノメートル領域のトレーサビリティを確立するための方法を検討した. (4)ものづくりへの展開研究グループ本組織の母体となる精密工学会「知的ナノ計測専門委員会」の産業界からのメンバー(10社〜20社程度)を研究協力者として,産業界におけるものづくりへ知的ナノメートル計測技術を適用する手法について検討した. このような連携活動を有効的,効率的に行うために,上記専門委員会の活動を支援し連携して調査研究を行った.また,関連する国際会議8th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2007) (2007年9月25日〜27日,東北大学,委員長高教授)を支援することで,国際的な連携,動向調査を行った.この国際会議は,参加者:250人(23カ国),発表:214件,企業展示:15社と,計測分野の国際会議として大きな成功を収めた.このためにインターネットおよびホームページを有効に利用した情報収集,および国際的な情報発信やメールや郵送を利用した情報収集を行った.これらの連携,研究,調査の結果を特定領域研究の新規発足研究領域の準備に利用する.
Measurement system of fluctuation map of strength and mechanical properties of nano-scale materials using nano-positioning technique

MIURA Hideo, GAO Wei, OGAWA Kazuhiro, SASAGAWA Kazuhiko

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (A)

Category: Grant-in-Aid for Scientific Research (A)

Institution: TOHOKU UNIVERSITY

2004 - 2006

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The main purpose of this research is to develop a new measurement system that enables us to understand the reason for the fluctuation of the strength and mechanical properties of materials in nano-scale. The mechanism of the fluctuation of various physical properties has been clarified for the functional materials used in such as semiconductor devices, high-temperature gas turbines considering the fluctuation of nano-scale crystallographic texture of the materials measured by our measurement system. Based on this research activity, it was found that the three-dimensional anisotropic mechanical properties appeared when the nano-scale texture consisted of fine columnar structure with weak grain boundaries. In addition, various point defects such as oxygen vacancies and interstitial carbon atoms caused serious decrease of band gap of high-k materials and thus deteriorated the electronic reliability of the material significantly. Since such point defects diffused in the materials rapidly, the degraded sites were found to move easily even at room temperature. These analytically estimated results were confirmed by experiments using synchrotron-radiation photoemission spectroscopy at SPring-8. Furthermore, the degradation mechanism of high-temperature alloys used for a gas turbine system was made clear by applying quantum chemical molecular dynamics. The stress-induced anisotropic diffusion was found to occur in the alloys and to change the nano-scale texture of the materials from initially dispersed fine polycrystalline texture to the uni-axially aligned coarse texture. The predicted phenomenon was also validated by the synchrotron-radiation photoemission spectroscopy. Finally, a new measurement system for detecting the fluctuation map of strength and mechanical properties of nano-scale materials using nano-positioning technique has been developed successfully. The spatial resolution of the measurement is 20 nm, and the resolution of the load is 1 nN. This system is a strong tool for explicating the fluctuation mechanism of strength and mechanical properties of highly functional materials.
Development of a surface encoder for next generation three-axis precision stages

KIYONO Satoshi, GAO Wei, YAMANAKA Masashi, JU Bingfeng, SHIMIZU Hiroki

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (S)

Category: Grant-in-Aid for Scientific Research (S)

Institution: Tohoku University

2002 - 2006

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This research has developed a surface encoder consisting of a sinusoidal angle grid and a two-dimensional slope sensor for multi-degree-of-freedom planar motion measurement. The angle grid has a three dimensional micro-structured surface, which is a superposition of periodic sinusoidal waves in the X-and Y-directions. The laser-based slope sensor is used to read local slope profiles of the grid surface. The X-and Y-positions together with tilt motions about the X-, Y-and Z-axes can be detected by using multiple sensors with a maximum speed of 550mm/s. a double pass surface encoder for nanometer position measurement in the XY plane. By using a double pass optical layout, the sensitivity of the sensor becomes twice as much as that of the single pass surface encoder. A resolution of 2 nm has been realized. Diamond turning with a fast tool servo has been chosen as the fabrication method for the angle grid. The constructed fast tool servo, which employs a piezoelectric tube actuator to actuate the diamond tool and a capacitance probe as the feedback sensor, was confirmed to have a bandwidth of approximately 4 kHz and a tool displacement accuracy of several nanometers in the closed-loop mode. An evaluation technique based on the two-dimensional discrete Fourier transform (DFT) of interference microscope images has been developed to evaluate the fabricated grid surface effectively. The fabrication result of a grid surface over an area of φ150 mm has indicated the effectiveness of the fabrication system. The fabricated minimum pitch of the angle grid is 10 μm. A UV roller replication technique has also been developed to fabricate the angle grid on large area films. The surface encoder has been applied for surface motor-driven stages for five degree-of-freedom precision positioning. The surface motor consists of pairs of linear motors placed on the same surface. The magnetic array and the stator winding of the linear motor are mounted on the platen (the moving element) and the stage base, respectively. The angle grid of the surface encoder is mounted on the platen of the stage which is levitated by air-bearings. The slope sensors and the air-bearing pads are fixed on the stage base so that the motion of the platen is not affected by the electronic cables and air hoses. The surface encoder has also been applied to Sawyer motor driven stages.
ナノチューブを用いた次世代3次元ピコインデンターチップに関する研究

高偉, 小野崇人, 清水浩貴

Offer Organization: 日本学術振興会

System: 科学研究費助成事業萌芽研究

Category: 萌芽研究

Institution: 東北大学

2004 - 2005

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本研究では、カーボンナノチューブなどのインデンターの先端をXYZ3次元的に超精密に制御し,インデンテーションをすることによって3次元ナノ構造体などの局所的な機械的特性を計測できる超小型ピコインデンターチップ装置を提案する.本年度では、昨年度提案したインデンテーション機構の装置化及びインデンテーション実験を行った.インデンテーション装置はインデンター部と試料支持部で構成される.インデンター部の3軸PZTアクチュエータにインデンターを取り付ける.試料支持部のレバーで試料を保持する.試料がインデンター部のZ軸PZTによって押し込まれると試料保持レバーがたわみ,そのたわみ量を静電容量型変位センサで計測する.PZTの押し込み量とレバーのたわみ量との差を取ることによって,インデンテーション深さを求める.また,レバーの弾性係数とたわみ量からインデンテーション力を計算する.試作した装置の基本特性を実験で調べた結果,インデンテーション深さとインデンテーション力の範囲はそれぞれ0.1nm〜6μm,0.2μN〜13mNとなっていることが分かった.また,120秒間のインデンテーション深さ及びインデンテーション力の安定性はそれぞれ5nmと10μNとなっていることを確認した.さらに,3次元微細構造の局所的な機械特性を調べる目的で,走査型電子顕微鏡でのインデンテーション実験も行った.走査電子顕微鏡を用いて特定した位置にインデンテーションを行った.位置決めの分解能は0.1μmオーダであった.試料にはLSIなどの配線で用いられているアルミを用いた.本装置でインデンテーションをして得たインデンテーション深さ及びインデンテーション力のデータからアルミ試料のマイクロハードネスを計算した.カタログ値に近い値が得られたことから本研究で開発したインデンテーション装置の有効性を確認した.
High-accuracy Fabrication of Large Area Micro-Structured Metrology Surface by a Nano-Machining Probe with Surface Profile Measurement Function

GAO Wei, KIYONO Satoshi, SHIMIZU Hiroki

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

Category: Grant-in-Aid for Scientific Research (B)

Institution: Tohoku University

2003 - 2004

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A nanomachining instrument with nanometrology function for precision nanofabrication of large area micro-structured metrology surfaces. A single crystal diamond tool for diamond turning is mounted on one end of a hollow-type piezoelectric (PZT) ring actuator with a stroke of 10μm. The other end of the PZT is attached to a compact piezoelectric force sensor. The diamond tool is actuated by the PZT for nanomachining of micro-structures over a large area surface through employing the fast-tool-servo technique. The depth-of-cut, which is the displacement of the PZT actuator, is measured accurately by a capacitance-type displacement probe with a resolution of 1nm situated inside the PZT and used as the servo signal for the fast tool servo machining. The instrument is designed to be stiff enough for nanomachining on a diamond turning machine. The same instrument can also be used for nanometrology of the machined surface through utilizing the force sensor output. To measure the surface profile, the diamond tool is scanned along the surface and the contact force is detected by the force sensor. During the scanning, the diamond tool is servo controlled by the PZT so that the tool tip is kept contact with the surface with a constant contact force based on the force sensor output. The displacement of the PZT, which corresponds to the profile height of the machined surface, can thus be obtained from the capacitance sensor inside the PZT. To reduce the contact force so that the surface will not be damaged in the measurement process, the diamond tool is oscillated with a small amplitude of 1nm and a certain frequency of 500 Hz to modulate the output of the force sensor into an AC signal for high sensitivity detection with a lock-in amplifier. Experimental results have shown that the machined surface can be measured with a small contact force on the order of 0.01 mN. The frequency bandwidths in the thrust direction and the cutting direction have been evaluated to be 2.5 kHz and 1 kHz, respectively. A large area sinusoidal metrology surface with amplitude of 15 nm and wavelength of 100 μm has successfully been fabricated on a optical glass plate.
マイクロ角度センサアレイを用いた微小癌触診用小型硬さ分布測定プローブの開発

高偉, 松本健郎, 清水浩貴, 清野慧

Offer Organization: 日本学術振興会

System: 科学研究費助成事業萌芽研究

Category: 萌芽研究

Institution: 東北大学

2002 - 2003

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本研究は,大腸等の管状器官に挿入,あるいは内視鏡と共に生体内に送り込み,管内壁や内臓器官に存在するサブmmから数mmオーダの微小癌検出を簡単かつ確実に行うため,ゴム膜を膨らませたバルーン型プローブを生体軟組織に押し込み,その変形を光学的に捉えることで面内の硬さ分布を測定し,微小癌等を検出する手法を提案するものである. 今年度の研究成果は以下の通りである 1.硬度変化部の検出感度を上げるため,押し込み方向に対してCCDカメラを傾けて設置することによりマイクロセンサアレイを実現する方法を提案した.実験により,提案手法によって異物の大きさや固さの大小関係を判別できると同時に,従来の押し込み方向から観察する手法に比べ感度が向上することを示した.また,このプローブによるXY方向測定範囲,深さ方向の測定可能範囲等の基礎特性を実験により明らかにした. 2.CCDカメラにビデオ出力ができるものを用い,押し込み過程における変位を連続的に取得できるようにシステムおよびプログラムを改良した.これにより埋め込み物の深さ情報に関連があると考えられる押し込み時の過渡状態の取得を可能とした. 3.ゴム膜上のパターンパターン無しに,7×7個のマルチビーム生成プロジェクターヘッドと光三角法を用いることにより,当初の目的であるマルチビームによる多点の同時変位検出および硬度変化部検出実験を行った.その結果,各ビームスポット軸上の多点のプローブ変位を同時に取得でき,校正によりZ軸方向の絶対移動量検出が可能であることを示した.また,本手法は従来の押し込み方向から印刷パターン変位を観察する方法に比べてZ軸方向変位検出分解能が向上することを示した.
An Ultra-precision Measurement System for Next Generation 400 mm Silicon Wafers

GAO Wei, OHISHI Hiroshi, SHIMIZU Hiroki, KURIYAGAWA Tunemoto

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

Category: Grant-in-Aid for Scientific Research (B)

Institution: Tohoku University

2000 - 2002

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The purpose of this study is to develop an accurate flatness measuring system for large silicon wafers with diameters of up to 400 mm. The system consists of two-dimensional (2D) slope sensor unit, a wafer spindle, and a sensor carriage. The wafer sample is mounted on a vacuum chuck vertically and can be rotated by the spindle. The 2D slope sensor unit consists of two 2D slope sensors. The 2D slope sensor unit is placed on the sensor carriage. It detects the 2D local slopes (X-and Y-directional local slopes) at a point on the wafer surface. The 2D slope sensor is moved by the sensor carriage along X-direction to scan the wafer surface while the wafer is rotating. In this angle-based measuring system the transnational error motions of the sensor carriage (straightness error motions) and the wafer spindle (axial error motion) will not affect in the sensor outputs. Based on the concept of error separation, the 2D local slopes of the wafer surface can be separated from the angular error motions of the sensor carriage (yaw, roll) and the wafer spindle (angular error motion) using the 2D outputs of the slope sensors. The cross-sectional height profiles of the wafer surface along radial directions can be obtained through integrating the X-directional local slopes of the wafer surface, and the cross-sectional height profiles along concentric circles can be obtained through integrating the Y-directional local slopes. The height profile of the entire wafer surface can thus be evaluated from combining the sectional profiles in these two directions. Two-dimensional slope sensors, which utilizes the principle of autocollimation, were developed to realize the measuring system. The two-dimensional local slopes (angles) are obtained through detecting the corresponding two-dimensional positions of the reflected light spot on the focal plane of the object lens using position-sensing devices. To make the sensor compact in size, it is more effective to improve the sensitivity of angle detection by selecting proper position-sensing devices than using an objective lens with a larger focal distance. It was shown that a quadrant photodiode is the best for highly sensitive two-dimensional slope detection. The compact prototype slope sensors were confirmed to have a resolution of approximately 0.01 arc-seconds. Flatness measurement experiments of large silicon wafers have been conducted to indicate the feasibility of the developed system.
A new method of position and attitude detection based on an angle sensor

KIYONO Satoshi, SHIMIZU Hiroki, YAMANAKA Masashi, GAO Wei, OKAZAKI Yuichi

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (A)

Category: Grant-in-Aid for Scientific Research (A)

Institution: Tohoku University

1999 - 2001

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The objectives of this research is to propose a new multi-degrees-of-freedom encoder system by combining a 2-dimensional angle sensor and a 2-dimensional angle grid on which 2D sinusoidal angle patterns are generated. At first, we developed first prototype of surface encoder system to detect the X- and the Y- directional position/displacement with combining the newly developed angle sensor that could detect the local slope and the angle grid made with Fast tool servo. Second, modified surface encoder employing a scanning laser beam type angle sensor and new position detection method using interpolations of time domain are proposed. By using these, the surface encoder system has the ability of detecting pitch, roll and yaw in addition to the X- and the Y- directional positions : thus, it has been shown that 5DOF motions can be detected by this method. Furthermore, scanning type angle sensor has the merit of reducing the form error of the angle grid. Third, we propose the self-calibration method of the pitch of angle grid and have the result that position detection error can be reduced from 15 μm to 1 μm. Fourth, the new angle sensor that employ multi-spot light source was proposed and it was confirmed this sensor is effective to reduce the affection of form error of angle grid. At last, we combine the methods mentioned above and develop the multi-spot scanning type 2-dimensional angle sensor. With respect to the angle grid, a new method evaluating the form error of angle grid using 2-dimensional FFT has been developed. "Moreover, by applying this method, the form error induced by tool-shape has been reduced definitely. As an application of surface encoder, surface motor driven XYθz stage controlled by output signal of surface encoder was constructed and it is confirmed surface encoder is effective to make compact and simple the stage system.
静電容量型2次元角度センサの試作研究

張世宙, 高偉

Offer Organization: 日本学術振興会

System: 科学研究費助成事業基盤研究(C)

Category: 基盤研究(C)

Institution: 東北大学

1999 - 2000

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本研究では,光を用いることのできない状況で利用することを目的に,静電容量型2次元角度センサを試作し,その出力特性を自律的に校正するシステムを構築する.この静電容量型2次元角度センサは非接触,高精度,高い周波数応答を有し,ターゲットの材質および表面反射率の影響を受けず,また電磁ノイズや熱的外乱に強いインプロセス測定やオンマシン測定にも利用できるものである.さらに試作した静電容量型2次元角度センサが非鏡面の形状測定やそれを利用した運動誤差の計測に有効であることを示す. 今年度はまず,静電容量型2次元角度センサ本体の設計製作を行うとともに,そのセンサの検出用インターフェース回路の製作を行った.また,静電容量型2次元角度センサ校正用のレバーシステムの設計,および自律校正用のプログラムを製作した.試作した静電容量型2次元角度センサの出力感度とそのドリフト特性を調べ,角度センサは±100s(arc)の範囲で約1mV/s(arc)の感度,0.1s(arc)の分解能,0.03s(arc)/minの安定性を有することがわかった.センサの分解能が0.1より高い目標値までに達していないのは,主として試作した校正装置のターゲット回転軸が角度センサの中心に離れてセンサ端面がターゲットに設計値まで十分に近づくことができないので,高感度の出力特性が得られないことと,検出回路に混入する外乱ノイズと校正装置の回転軸の振動などの影響を受けることである.現在ターゲット回転軸とセンサの中心を合わせるような校正装置の改善を計画している.また,検出回路に混入する外乱と校正装置の回転軸の振動などの除去対策を検討しており,目標値0.1より高い精度を達成するための対策を準備している.
ソフトウェアデータムによる真円度・直径の機上同時計測に関する研究

高偉

Offer Organization: 日本学術振興会

System: 科学研究費助成事業奨励研究(A)

Category: 奨励研究(A)

Institution: 東北大学

1999 - 2000

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円形部品は最も多く存在する加工物で、その寸法(半径)及び形状(真円度)に対する精度要求がますます高まっている。測定効率の向上や、修正加工への対応上から、直径と真円度を工作機械上で高精度かつ同時に測定することが重要な課題である。そのためには、工作機械主軸の回転運動誤差の影響を取り除くことが必要不可欠になる。本研究では、円周の90゜の位置に配置される一本の変位計と一本の角度計を用いて構成するソフトウェアデータム(直交型混合法)により、工作機械の主軸の回転運動誤差の影響を取り除いた形で円形加工物の平均半径と真円度形状(基準円からの形状偏差)を同時に測定する方法を提案し、検証実験を行っている。本年度はまず前年度の結果を踏まえて、角度センサのその場自律校正法を提案して、試作したセンサを装置に取りつけたまま、その線形誤差を校正した。この校正結果を用いて補正をすることによって、センサの誤差を10秒から0.2秒程度に低減することができた。また、変位プローブは市販の容量型センサを利用しており、その線形誤差を従来の自律校正法によって校正を行っている。次に、半径と真円度の同時測定実験を行った。測定試料は公称半径40mmのアルミ円筒を用いた。±8μm程度の真円度誤差を±5nmの繰り返し精度で測定できた。また、半径測定値は40.174mmであり、繰り返し性は±10μm程度である。このように本研究の手法を用いることによって、半径と真円度を同時に測定することができた。さらに、自作の角度センサの安定性を改善すれば、半径測定精度は1μm程度に向上できる見通しも得られている。
Straightness Measurement of Long Cylinder for Construction of Linear Collider

KIYONO Satoshi, HITOMI Nobuteru, ZHANG Sizhou, GAO Wei, HIGASHI Yashuo

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

Category: Grant-in-Aid for Scientific Research (B)

Institution: TOHOKU UNIVERSITY

1998 - 1999

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The purpose of this study is to develop an accurate straightness measuring system for the purpose of constructing a next generation of linear collider. This linear collider is approximately 20km in length and is going to be constructed by aligning components consisting of three cylinders with a length of 1.5m. To construct the entire linear collider straight enough, it is necessary to align each component with a straightness in approximately 10 microns. For this purpose, an accurate measurement system, which can measure the straightness of long cylinders up to 5 m with an accuracy of several microns, must be established. Considering the ratio of accuracy to length and the measuring environment, scanning probe technique is the only approach to satisfy this request. In this study, a new scanning multi-probe method for accurately measuring straightness profiles has been developed. This scanning probe method is developed from the traditional three-probe method, which can measure the profile accurately without the influence of motion errors of the scanning stage. In the three-probe method, zero-adjustment errors between probes are the largest error source, and so far there was no good methods to accurately adjust the zero-adjustment error. In this study, a new method was proposed, in which two sets of three-probe method sensor units are used. The two sensor units are placed in the two sides of the collider component and are used to scan the two opposed generatrices of the component simultaneously. One of the cylinders in the component is then rotated 180 degrees and scanned by the probe units again. The zero-adjustment error, as well as the straightness profiles of the component can be accurately evaluated from the output data of the two measurements. An experimental setup based on the proposed method was constructed to measure the collider component of 5m in length. Six capacitance probes with a resolution of several nanometers were employed. The probe distance was set to be 150 mm. The straightness of the entire component was measured with an accuracy of several microns, and this indicated the feasibility of the developed straightness measuring system.
Development of Absolute Self-Calibration Systems for Displacement and Profile Measuring Instruments with Subnanometric Accuracy

KIYONO Satoshi, UDA Yutaka, ISAWA Yoshiaki, ZHANG Shizhou, GAO Wei

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (A)

Category: Grant-in-Aid for Scientific Research (A)

Institution: Tohoku University

1996 - 1997

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The purpose of this study is to establish absolute self-calibration systems for displacement and profile measuring instruments with subnanometricaccuracy. It is necessary to frequently calibrate the linearity error ofsuch instruments in situ. In this study, we first proposed a new self-calibration method. This method can obtain the linearity error by using only the measurement data, without using any calibration references and extra devices. In this method, the derivative of the calibration curve is measured from the difference of two measurement data obtained before and after a small shift of the sample in the sensing direction. The calibration curve can then be evaluated by the integration of the derivative. The feasibility and accuracy of this method was investigated by computer simulations and calibration experiments of several kinds of instruments. It was verified that the calibration error of this method is less than twice of the resolution of the calibrated instruments. Next, the absolute calibration was performed by including the calibration of mean sensitivity. For this purpose, a specially designed compact laser interferometer, was set in the sample holder. The shift amount between the two measurements in the self-calibration method was controlled to be several times of the wavelength of the interferometer laser source. As a result, the mean sensitivity can be calibrated in an accuracy that is determined by the stability of the wavelength. The effectiveness of the absolute calibration method was confirmed by an experiment of calibrating an interferometer microscope. In addition, the self-calibration method has been compared with the external monitoring method, which had been proposed in a research project of improving the accuracy of STM/AFM.The results of the two method achieved a good agreement, and this proved the reliability of the self-calibration method. Finally, a theory of a new autonomous method, which can detect the wavefront error due to the reference mirror and optical path distortion in a interferometer, has also been established. This method uses two surfaces and four interferograms obtained at different positions of a specimen.
エアスピンドルの3次元エラーモーションの動的超精密測定

高偉

Offer Organization: 日本学術振興会

System: 科学研究費助成事業奨励研究(A)

Category: 奨励研究(A)

Institution: 東北大学

1996 - 1996

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エアスピンドルの3次元回転誤差(エラーモーション)の動的超精密測定を実現するには,半径方向誤差(ラジアルモーション),軸の傾斜誤差(アンギュラモーション)と軸方向の振れ(アキシャルモーション)を同時に測定する必要がある.本研究では,まずアンギュラモーションの測定法を提案した.この新しい測定法では,軸の同一断面の円周上に2本の角度プローブを配置し,軸方向の角度変化を測定する.それぞれの角度プローブの出力には,軸のアンギュラモーションと,プローブ間隔分だけ位相がずれた試料の軸方向の角度形状が含まれるが,通常の形状測定の2点法の手法によって,両者を分離して求めることができる.ラジアルモーションについては,先に提案した直交型混合法を用いる.この方法では,1本の変位プローブと1本の角度プローブが円周上に直角に配置され,その出力から,ラジアルモーションと真円誤差を分離して求める.直交型混合法によって,ラジアルモーションをナノメートルオーダの精度で測定できることはすでに確認されている.また,軸端面に1本の変位プローブを設けることによって,アキシャルモーションを測定する.実験では,アンギュラモーションを測定するための角度センサユニットの開発に重点を置いた.角度プローブは臨界角の原理を利用するものを用いることにした.角度プローブを高感度にするため,臨界角プリズムの初期反射率を0.80にした.またこの角度センサユニットを,先に開発した直交型混合法ユニット及び軸端面の振れを測定する容量型変位計とを組み合わせて,エラーモーションの3次元動的システムを構築した.それぞれのエラーモーションを繰り返し性よく計測できることを確認した.これらの情報を利用すれば,任意の位置でのエラーモーションを3次元的に捉えることができる見通しを得た.
Basic Study on Ultra-Precision Self-Profile-Generation

KIYONO Satoshi, GAO Wei, KURIYAGAWA Tsunemoto

Offer Organization: Japan Society for the Promotion of Science

System: Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

Category: Grant-in-Aid for Scientific Research (B)

Institution: Tohoku University

1995 - 1996

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A new ultra-precision self-profile-generation system by applying the technique of software datum has been proposed. In this research, we first developed a new kind of lapping probe that simultaneously acts as a force-controlled displacement probe. This probe, which utilize the principle of AFM,consists of a force sensing lever with a lapping pad attached at the center of the laver and optical detectors to measure the inclination of the lever. Both ends of the lever are held by PZT actuators. The machining force can be controlled by adjusting the inclination of the lever using the PZT actuators. On the other hand, the profile height can also be obtained from the inclination of the lever. Calibration results showed that the developed probe has a displacement resolution of 10nm. Next, we investigated the possibility of using three of the new lapping and measuring probes for scanning measurements of lapped profiles. The method of profile measurements is based on the 3-point method for constructing software datum. Profile measurements can be realized with the accuracy of the probe by canceling the pitching error and the translational error in the scanning motion using the information of the output data of the three probes. Computer simulations showed that abrasion amount of the lapping pad which results in a parabolic error in the evaluated profile with the method of software datum can be detected and compensated by using the proposed technique of absolute profile measurements. The effectiveness of the new system has also been confirmed by profile measurement and machining experiments.
2次元PSDの高度利用のための自律校正法の研究

林玉池, 高偉

Offer Organization: 日本学術振興会

System: 科学研究費助成事業一般研究(C)

Category: 一般研究(C)

Institution: 東北大学

1995 - 1995

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2次元PSDの線形誤差をその素子の分解能の限界まで詳細に校正し,そのデータを基に2次元ソフトウェアリニアライザを構築することを目的に研究を進めた.まず2次元PSDの2次元の位置決めができる特性を生かし,その線形誤差の自律校正法を開発した.その手法により,特別な基準を用いずに2次元PSDの詳細な線形誤差が得られる.次にその自律校正法を実現するための実験装置を試作した.装置は光ビーム走査部と受光部からなる.光ビーム走査部は光源部とxyテーブルから構成され,受光部は校正対象となる2次元PSDと,上下に移動できるzテーブルから構成される.zテーブルは上下に移動すると,光源とPSDの距離が変わるので,これを利用してPSDに入射する光スポット径を変える.PSDのXとYの全測定範囲をスポット走査方向とそれに直角な方向に関して同じピッチでm(m=20)分割する.一回測定した後,1ピッチ移動してもう一回測定する.XとYを全部測定すると,PSDの受光面上に測定点が(m-1)×(m-1)の格子状に生じる.データ処理の上で,初めのYの読みの1/nを基準にしてXの誤差を推定し,その結果を使ってYの誤差を推定する.それからXとYの入力変位の値をそれぞれ相手の一つ前の校正結果を使って補正する手順を収束が完了するまで繰り返す.構築した校正装置を用いて2種類の2次元PSDを校正した.分解能と測定系のノイズとドリフトによる限界の繰返し精度で校正ができた.また,ディジタル変位計による校正結果と比べると,ほぼ同様の線形誤差の傾向が得られた.なお,少なくとも低周波特性ではカタログの分解能より1けた以上高い精度でPSDを使うことができることをも示した,
形状誤差と運動誤差の分離によるエアスピンドルの回転運動精度の超精密測定

高偉

Offer Organization: 日本学術振興会

System: 科学研究費助成事業奨励研究(A)

Category: 奨励研究(A)

Institution: 東北大学

1995 - 1995

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数ナノメータの精度でエアスピンドルの回転精度を測定するするために,本研究では,まずナノメートルの精度を持つ直交型混合法用光学式センサを試作し,その基本特性を調べた.センサは直角に配置される変位プローブと角度プローブからなる.試料の真円度形状とエアスピンドルの回転運動誤差をナノメートルオーダの精度で分離して測定するために,分離能が1nmと0.01″の変位と角度プローブが必要になる.その要求に満たすことのできるものとして,本研究では,臨界角の原理を利用する変位プローブと角度プローブを用いることにした.変位プローブと角度プローブは類似の光学原理のものを利用することで,温度ドリフト特性などを揃えることをもねらう.角度プローブを高感度にするため,臨界角プリズムの初期反射率を0.80にした.また,角度プローブの光ビーム径に合わせるため,変位プローブのワイドレンジを使った.それぞれ容量型変位計と光電式オートコリメータを基準にして,変位プローブと角度プローブをそれぞれ±1.2μm,±25arcsecの範囲で校正した結果,3次近似曲線からの当てはめ誤差はどちらも測定範囲の±0.5%以内となった.なお,プローブの安定性を調べた実験結果から,20秒間の測定時間において,変位プローブと角度プローブとも分解能のレベルの安定性を保てることが分かった.次に,直径1インチのマスター球をエアスピンドルに取り付け,直交型混合法によるエアスピンドルの回転運動誤差及びマスター球の真円度形状の測定を行った.測定結果から,全空間周波数にわたってナノメータの精度で両者測定できる見通しを得た.

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Social Activities 6

精密工学会超精密位置決め専門委員会変位センサ小委員長

2000/06 - Present

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精密工学会超精密位置決め専門委員会変位センサ小委員長
精密工学会光による形状計測研究分科会委員

2000/04 - Present

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精密工学会光による形状計測研究分科会委員
精密工学会精密支部会計幹事

2000/04 - Present

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精密工学会精密支部会計幹事
精密工学会広報委員会委員

1996/04 - Present

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精密工学会広報委員会委員
精密工学会、インプロセス計測加工制御専門委員会委員

1995/04 - 2000/03

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精密工学会、インプロセス計測加工制御専門委員会委員
精密工学会、産学協同研究協議会研究協力分科会”ソフトウェアデータムを利用したオンマシン形状測定の研究”委員

1994/04 - 1996/03

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精密工学会、産学協同研究協議会研究協力分科会”ソフトウェアデータムを利用したオンマシン形状測定の研究”委員

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Other 28

光学式ナノラジアン超高分解能ローリングセンサに関する研究

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光学式ナノラジアン超高分解能ローリングセンサに関する研究
A three-axis surface encoder with large-area mosaic gratings

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A three-axis surface encoder with large-area mosaic gratings
大型のワークを簡易で高精度に測定できる機上形状計測システムの開発

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大型のワークを簡易で高精度に測定できる機上形状計測システムの開発
Measurement of large precision lathe

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Measurement of large precision lathe
A large-area high-accuracy three dimensional micro-structured surface for precision positioning

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A large-area high-accuracy three dimensional micro-structured surface for precision positioning
３軸マクロ角度センサに関する研究

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３軸マクロ角度センサに関する研究
回転直動一体型精密ナノアクチュエータの研究

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回転直動一体型精密ナノアクチュエータの研究
自律的測定法による次世代高精度マイクロ非球面形状の精密ナノ計測

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自律的測定法による次世代高精度マイクロ非球面形状の精密ナノ計測
自律的測定法による次世代高精度マイクロ非球面形状の精密ナノ計測

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自律的測定法による次世代高精度マイクロ非球面形状の精密ナノ計測
AFMによる大面積微細形状測定に関する研究

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AFMによる大面積微細形状測定に関する研究
Measurement technology of motion and assembled errors for ultra precision machine tools on large surfaces

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Measurement technology of motion and assembled errors for ultra precision machine tools on large surfaces
次世代高速高精度Sawyer型平面モータの開発

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次世代高速高精度Sawyer型平面モータの開発
小型高精度角度センサの開発

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小型高精度角度センサの開発
小型自己検知タイプAFMによるダイヤモンド切削工具微小磨耗の機上ナノ計測

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小型自己検知タイプAFMによるダイヤモンド切削工具微小磨耗の機上ナノ計測
大型超精密加工面形状計測のための高精度２次元角度センサに関する研究』

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大型超精密加工面形状計測のための高精度２次元角度センサに関する研究
角度格子による多自由度位置・姿勢計測装置を組込んだ次世代超精密ステージの開発

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角度格子による多自由度位置・姿勢計測装置を組込んだ次世代超精密ステージの開発
超精密XY多軸ステージの研究

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超精密XY多軸ステージの研究
Flatness measurement of large silicon wafers

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Flatness measurement of large silicon wafers
ダイヤモンド切削工具による超精密切削面の機上形状計測に関する基礎的研究

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ダイヤモンド切削工具による超精密切削面の機上形状計測に関する基礎的研究
自律的手法による大型ミラー形状の機上超精密計測に関する基礎的研究

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自律的手法による大型ミラー形状の機上超精密計測に関する基礎的研究
工作機械上における円筒度と直径の同時計測に関する研究

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工作機械上における円筒度と直径の同時計測に関する研究
熱間圧延機のワークロール形状の超精密オンライン計測に関する基礎的研究

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熱間圧延機のワークロール形状の超精密オンライン計測に関する基礎的研究
小型３次元ナノ切削試験装置の開発及びその加工面形状の自律的超精密測定

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小型３次元ナノ切削試験装置の開発及びその加工面形状の自律的超精密測定
Modeling and Experiments of Nano-cutting of Ceramic Materials

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Modeling and Experiments of Nano-cutting of Ceramic Materials
Nanocutting and measurement of britile materials

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Nanocutting and measurement of britile materials
Damage-free surfacing of large brittle wafers with on-machine flatness control

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Damage-free surfacing of large brittle wafers with on-machine flatness control
回転軸の３次元回転運動誤差の動的超精密測定

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回転軸の３次元回転運動誤差の動的超精密測定
自律的超精密形状創成の研究

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自律的超精密形状創成の研究

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