Details of the Researcher

PHOTO

Toshiaki Kato
Section
Graduate School of Engineering
Job title
Professor
Degree
  • 博士(工学)(東北大学)

  • 修士(工学)(東北大学)

Research History 12

  • 2025/04 - Present
    Tohoku University Advanced Institute for Materials Research (WPI-AIMR) PI

  • 2025/04 - Present
    Tohoku University Graduate School of Engineering Professor

  • 2020/04 - Present
    Distinguished Researchers of Tohoku University

  • 2023/04 - 2025/03
    Advanced Institute for Materials Research (WPI-AIMR) Jr. PI

  • 2016/04 - 2025/03
    Tohoku University Graduate School of Engineering

  • 2017/10 - 2021/03
    JST-PRESTO

  • 2017/04 - 2018/03
    Institute of Advanced Energy, Kyoto University Visiting Associate Professor

  • 2013/10 - 2016/03
    Tohoku University Graduate School of Engineering

  • 2007/12 - 2013/09
    東北大学 大学院工学研究科 助教

  • 2008/09 - 2009/06
    Stanford University visiting researcher

  • 2007/10 - 2007/11
    東北大学 大学院工学研究科 研究員 日本学術振興会特別研究員(PD)

  • 2005/04 - 2007/09
    Tohoku University Graduate School of Engineering

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Education 2

  • Tohoku University Graduate School, Division of Engineering Department of Electronic Engineering

    - 2007/09

  • Tohoku University Faculty of Engineering

    - 2003/03

Research Areas 3

  • Nanotechnology/Materials / Nano/micro-systems /

  • Energy / Basic plasma science /

  • Nanotechnology/Materials / Nanomaterials /

Awards 17

  1. 平成29年度(第7回)RIEC Award 東北大学研究者賞

    2017/10/31 東北大学 電気通信研究所 大規模集積化グラフェンナノリボンデバイスの創製

  2. 第10回青葉工学振興会賞

    2016/12/02 一般財団法人 青葉工学振興会 グラフェンナノリボンの革新的集積化合成法の開発

  3. The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016) Best Conference Poster AWARD 「Sharp Photoluminessence from Localized Excitons in Monolayer Tungsten Disulfide」

    2016/04/20 The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016)

  4. 第14回インテリジェント・コスモス奨励賞

    2015/05/18 (公財)インテリジェント・コスモス学術振興財団 半導体原子層物質の構造制御合成と光電子デバイス応用

  5. 平成27年度 科学技術分野の文部科学大臣表彰 若手科学者賞

    2015/04/15 文部科学省 先進プラズマ活用ナノカーボン構造制御合成及び機能化の研究

  6. The 62nd JSAP Spring Meeting 『2015 Poster Award』

    2015/04/01 応用物理学会 Growth Mechanism of Suspended Graphene Nanoribbon by Plasma CVD

  7. 第12回プラズマエレクトロニクス賞

    2014/03/18 応用物理学会プラズマエレクトロニクス分科会

  8. 財団法人石田(實)記念財団平成23年度研究奨励賞

    2011/12/09 財団法人石田(實)記念財団 先進プラズマプロセスによるグラフェン利用次世代高性能トランジスタ開発

  9. 財団法人トーキン科学技術振興財団 第21回(平成22年度)研究奨励賞

    2011/06/02 財団法人トーキン科学技術振興財団 プラズマCVDによる単層カーボンナノチューブの精密構造制御合成と成長ダイナミクスの解明

  10. 応用物理学会プラズマエレクトロニクス分科会 第7回プラズマエレクトロニクス賞

    2009/03/30 応用物理学会プラズマエレクトロニクス分科会 Novel-Structured Carbon Nanotubes Creation by Nanoscopic Plasma Control

  11. 財団法人 青葉工学振興会 第14回研究奨励賞

    2009/01/28 青葉工学振興会 プラズマ化学気相堆積法成長単層カーボンナノチューブの成長機構解明と特殊光学特性の発現

  12. 第25回(平成20年度)井上研究奨励賞

    2008/12 財団法人 井上科学振興財団 プラズマCVDによる構造制御された単層カーボンナノチューブの形成

  13. 東北大学 平成19年度 総長賞

    2008/03/25 東北大学 プラズマCVDによる構造制御された単層カーボンナノチューブの成長

  14. Chemical Physics Letters Most Cited Paper 2003-2007 Award

    2008/01/22 Elsevier Single-Walled Carbon Nanotubes Produced by Plasma-Enhanced Chemical Vapor Deposition

  15. 16th Symposium of Materials Research Society of Japan, Award for Encouragement of Research of Materials Science

    2005/12/28 日本MRS学会 Role of Plasmas in the Growth of Freestanding-Individual Single-Walled Carbon Nanotubes with Diffusion Plasma CVD

  16. 第15回 日本MRS学術シンポジウム 奨励賞

    2004/12/24 日本MRS学会 プラズマCVDによる単層カーボンナノチューブ成長

  17. 平成15年度 電気関係学会東北支部連合大会 IEEE SENDAI SECTION "The Best Paper Prize"

    2003/11/18 電気関係学会東北支部 Formation of Single-Walled Carbon Nanotubes using Radio-Frequency Magnetron

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Papers 110

  1. Lattice-guided growth of dense arrays of aligned transition metal dichalcogenide nanoribbons with high catalytic reactivity Peer-reviewed

    Zongpeng Ma, Pablo Solís-Fernández, Kaito Hirata, Yung-Chang Lin, Keisuke Shinokita, Mina Maruyama, Kota Honda, Tatsuki Kato, Aika Uchida, Hiroto Ogura, Tomohiro Otsuka, Masahiro Hara, Kazunari Matsuda, Kazu Suenaga, Susumu Okada, Toshiaki Kato, Yasufumi Takahashi, Hiroki Ago

    Science Advances 11 (2) 2025/01/10

    Publisher: American Association for the Advancement of Science (AAAS)

    DOI: 10.1126/sciadv.adr8046  

    eISSN: 2375-2548

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    Transition metal dichalcogenides (TMDs) exhibit unique properties and potential applications when reduced to one-dimensional (1D) nanoribbons (NRs), owing to quantum confinement and high edge densities. However, effective growth methods for self-aligned TMD NRs are still lacking. We demonstrate a versatile approach for lattice-guided growth of dense, aligned MoS 2 NR arrays via chemical vapor deposition (CVD) on anisotropic sapphire substrates, without tailored surface steps. This method enables the synthesis of NRs with widths below 10 nanometers and longitudinal axis parallel to the zigzag direction, being also extensible to the growth of WS 2 NRs and MoS 2 -WS 2 heteronanoribbons. Growth is influenced by both substrate and CVD temperature, indicating the role of anisotropic precursor diffusion and substrate interaction. The 1D nature of the NRs was asserted by the observation of Coulomb blockade at low temperatures. Pronounced catalytic activity was observed at the edges of the NRs, indicating their promise for efficient catalysis.

  2. Synthesis of Ultrahigh-Purity (6,5) Carbon Nanotubes Using a Trimetallic Catalyst Peer-reviewed

    Satoru Shiina, Tennpei Murohashi, Koyo Ishibashi, Xing He, Takashi Koretsune, Zheng Liu, Wataru Terashima, Yuichiro K. Kato, Kazutoshi Inoue, Mitsuhiro Saito, Yuichi Ikuhara, Toshiaki Kato

    ACS Nano 18 (35) 23979-23990 2024/08/20

    Publisher: American Chemical Society (ACS)

    DOI: 10.1021/acsnano.4c01475  

    ISSN: 1936-0851

    eISSN: 1936-086X

  3. Strain-induced scrolling of Janus WSSe Peer-reviewed

    Yanlin Gao, Masahiko Kaneda, Takahiko Endo, Hiroshi Nakajo, Soma Aoki, Toshiaki Kato, Yasumitsu Miyata, Susumu Okada

    Physical Review B 110 (3) 2024/07/11

    Publisher: American Physical Society (APS)

    DOI: 10.1103/physrevb.110.035414  

    ISSN: 2469-9950

    eISSN: 2469-9969

  4. Chemically Tailored Semiconductor Moiré Superlattices of Janus Heterobilayers Peer-reviewed

    Wenjin Zhang, Zheng Liu, Hiroshi Nakajo, Soma Aoki, Haonan Wang, Yanlin Wang, Yanlin Gao, Mina Maruyama, Takuto Kawakami, Yasuyuki Makino, Masahiko Kaneda, Tongmin Chen, Kohei Aso, Tomoya Ogawa, Takahiko Endo, Yusuke Nakanishi, Kenji Watanabe, Takashi Taniguchi, Yoshifumi Oshima, Yukiko Yamada‐Takamura, Mikito Koshino, Susumu Okada, Kazunari Matsuda, Toshiaki Kato, Yasumitsu Miyata

    Small Structures 5 (5) 2024/03

    Publisher: Wiley

    DOI: 10.1002/sstr.202300514  

    ISSN: 2688-4062

    eISSN: 2688-4062

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    Janus monolayers of transition metal dichalcogenides (TMDCs) are promising building blocks for moiré superlattices because of their built‐in electric field and clean fabrication process. In particular, Janus TMDC monolayers can be chemically converted from conventional TMDC monolayers by atomic substitution, enabling the direct formation of lattice‐mismatched heterobilayers from TMDC bilayers. However, the moiré superlattices of Janus heterobilayers have not been studied experimentally. Herein, this work reports the fabrication and characterization of semiconductor moiré superlattices in chemically tailored Janus heterobilayers. The MoSSe/MoSe2 (or WSSe/WSe2) Janus heterobilayers are prepared by replacing the top layer Se atoms with S atoms in MoSe2 (or WSe2) bilayer using H2 plasma treatment. Scanning transmission electron microscopy reveals that an average moiré period of about 14 nm formed due to lattice mismatch resulting from the chalcogen substitutions. The cryogenic photoluminescence spectra show sharp, near‐infrared emissions, which are attributed to excitons trapped by moiré potentials based on comparison with theoretical calculations. The Janus‐based heterostructures provide a long‐period moiré system with built‐in potential even for nontwisted heterobilayers, allowing the functionalization of confined and correlated electron systems.

  5. Nanoscrolls of Janus Monolayer Transition Metal Dichalcogenides Peer-reviewed

    Masahiko Kaneda, Wenjin Zhang, Zheng Liu, Yanlin Gao, Mina Maruyama, Yusuke Nakanishi, Hiroshi Nakajo, Soma Aoki, Kota Honda, Tomoya Ogawa, Kazuki Hashimoto, Takahiko Endo, Kohei Aso, Tongmin Chen, Yoshifumi Oshima, Yukiko Yamada-Takamura, Yasufumi Takahashi, Susumu Okada, Toshiaki Kato, Yasumitsu Miyata

    ACS Nano 18 (4) 2772-2781 2024/01/17

    Publisher: American Chemical Society (ACS)

    DOI: 10.1021/acsnano.3c05681  

    ISSN: 1936-0851

    eISSN: 1936-086X

  6. Structural Diversity of Single‐Walled Transition Metal Dichalcogenide Nanotubes Grown via Template Reaction Peer-reviewed

    Yusuke Nakanishi, Shinpei Furusawa, Yuta Sato, Takumi Tanaka, Yohei Yomogida, Kazuhiro Yanagi, Wenjin Zhang, Hiroshi Nakajo, Soma Aoki, Toshiaki Kato, Kazu Suenaga, Yasumitsu Miyata

    Advanced Materials 35 (46) 2023/10/05

    Publisher: Wiley

    DOI: 10.1002/adma.202306631  

    ISSN: 0935-9648

    eISSN: 1521-4095

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    Abstract Monolayers of transition metal dichalcogenides (TMDs) are an ideal 2D platform for studying a wide variety of electronic properties and potential applications due to their chemical diversity. Similarly, single‐walled TMD nanotubes (SW‐TMDNTs)—seamless cylinders of rolled‐up TMD monolayers—are 1D materials that can exhibit tunable electronic properties depending on both their chirality and composition. However, much less has been explored about their geometrical structures and chemical variations due to their instability under ambient conditions. Here, the structural diversity of SW‐TMDNTs templated by boron nitride nanotubes (BNNTs) is reported. The outer surfaces and inner cavities of the BNNTs promote and stabilize the coaxial growth of SW‐TMDNTs with various diameters, including few‐nanometers‐wide species. The chiral indices (n,m) of individual SW‐MoS2NTs are assigned by high‐resolution transmission electron microscopy, and statistical analyses reveals a broad chirality distribution ranging from zigzag to armchair configurations. Furthermore, this methodology can be applied to the synthesis of various TMDNTs, such as selenides and alloyed Mo1−xWxS2. Comprehensive microscopic and spectroscopic analyses also suggest the partial formation of Janus MoS2(1−x)Se2x nanotubes. The BNNT‐templated reaction provides a universal platform to characterize the chirality‐dependent properties of 1D nanotubes with various electronic structures.

  7. Scalable fabrication of graphene nanoribbon quantum dot devices with stable orbital-level spacing Peer-reviewed

    Toshiaki Kato, Takahito Kitada, Mizuki Seo, Wakana Okita, Naofumi Sato, Motoya Shinozaki, Takaya Abe, Takeshi Kumasaka, Takumi Aizawa, Yui Muto, Toshiro Kaneko, Tomohiro Otsuka

    Communications Materials 3 (1) 2022/12/22

    Publisher: Springer Science and Business Media LLC

    DOI: 10.1038/s43246-022-00326-3  

    eISSN: 2662-4443

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    Abstract Large-scale integration of quantum-dot devices is essential for realizing various quantum devices. Graphene-based quantum dots provide a promising platform for spin qubits because of their low nuclear spin density and weak spin-orbit interaction. However, the integration of graphene-based quantum dots remains a challenge. Here, we demonstrate the scalable fabrication of graphene nanoribbon-based quantum-dot devices using a nickel nanobar technique. Fine structures formed in the middle of the nanoribbons exhibit quantum-dot behavior, and more than 56% of devices fabricated on the same substrate show Coulomb diamond features, indicating that large-scale integration of graphene nanoribbon quantum-dot devices is possible with our method. Cryogenic measurements reveal orbital-level spacings between the ground and excited states that are stable up to high-temperature conditions of ~20 K. We explain this stability in terms of the very fine structures formed in the middle of the nanoribbons and their relatively low effective mass.

  8. Fabrication of near-invisible solar cell with monolayer WS2 Peer-reviewed

    Xing He, Yuta Iwamoto, Toshiro Kaneko, Toshiaki Kato

    Scientific Reports 12 (1) 2022/12

    Publisher: Springer Science and Business Media LLC

    DOI: 10.1038/s41598-022-15352-x  

    eISSN: 2045-2322

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    Abstract Herein, we developed a near-invisible solar cell through a precise control of the contact barrier between an indium tin oxide (ITO) electrode and a monolayer tungsten disulfide (WS2), grown by chemical vapor deposition (CVD). The contact barrier between WS2 and ITO was controlled by coating various thin metals on top of ITO (Mx/ITO) and inserting a thin layer of WO3 between Mx/ITO and the monolayer WS2, which resulted in a drastic increase in the Schottky barrier height (up to 220 meV); this could increase the efficiency of the charge carrier separation in our Schottky-type solar cell. The power conversion efficiency (PCE) of the solar cell with the optimized electrode (WO3/Mx/ITO) was more than 1000 times that of a device using a normal ITO electrode. Large-scale fabrication of the solar cell was also investigated, which revealed that a simple size expansion with large WS2 crystals and parallel long electrodes could not improve the total power (PT) obtained from the complete device even with an increase in the device area; this can be explained by the percolation theory. This problem was addressed by reducing the aspect ratio (width/channel length) of the unit device structure to a value lower than a critical threshold. By repeating the experiments on this optimized unit device with an appropriate number of series and parallel connections, PT could be increased up to 420 pW from a 1-cm2 solar cell with a very high value (79%) of average visible transmission (AVT).

  9. Non-classical nucleation in vapor–liquid–solid growth of monolayer WS2 revealed by in-situ monitoring chemical vapor deposition Peer-reviewed

    Xiaoming Qiang, Yuta Iwamoto, Aoi Watanabe, Tomoya Kameyama, Xing He, Toshiro Kaneko, Yasushi Shibuta, Toshiaki Kato

    Scientific Reports 11 (22285) 1-9 2021/12

    Publisher: Springer Science and Business Media LLC

    DOI: 10.1038/s41598-021-01666-9  

    eISSN: 2045-2322

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    Abstract The very early nucleation stage of a transition metal dichalcogenide (TMD) was directly observed with in-situ monitoring of chemical vapor deposition and automated image analysis. Unique nucleation dynamics, such as very large critical nuclei and slow to rapid growth transitions, were observed during the vapor–liquid–solid (VLS) growth of monolayer tungsten disulfide (WS2). This can be explained by two-step nucleation, also known as non-classical nucleation, in which metastable clusters are formed through the aggregation of droplets. Subsequently, nucleation of solid WS2 takes place inside the metastable cluster. Furthermore, the detailed nucleation dynamics was systematically investigated from a thermodynamic point of view, revealing that the incubation time of metastable cluster formation follows the traditional time–temperature transformation diagram. Quantitative phase field simulation, combined with Bayesian inference, was conducted to extract quantitative information on the growth dynamics and crystal anisotropy from in-situ images. A clear transition in growth dynamics and crystal anisotropy between the slow and rapid growth phases was quantitatively verified. This observation supports the existence of two-step nucleation in the VLS growth of WS2. Such detailed understanding of TMD nucleation dynamics can be useful for achieving perfect structure control of TMDs.

  10. Nucleation dynamics of single crystal WS2 from droplet precursors uncovered by in-situ monitoring Peer-reviewed

    C. Li, T. Kameyama, T. Takahashi, T. Kaneko, T. Kato

    SCIENTIFIC REPORTS 9 (12958) 1-7 2019/09

    DOI: 10.1038/s41598-019-49113-0  

  11. Enhanced Thermoelectric Performance of As-Grown Suspended Graphene Nanoribbons Peer-reviewed

    Q.-Y. Li, T. Feng, W. Okita, Y. Komori, H. Suzuki, T. Kato, T. Kaneko, T. Ikuta, X. Ruan, K. Takahashi

    ACS NANO 13 (8) 9182-9189 2019/08

    DOI: 10.1021/acsnano.9b03521  

    ISSN: 1936-0851

    eISSN: 1936-086X

  12. Improvement in growth yield of single-walled carbon nanotubes with narrow chirality distribution by pulse plasma CVD Invited Peer-reviewed

    B. Xu, T. Kaneko, T. Kato

    Frontiers of Chemical Science and Engineering 13 (3) 485-492 2019/07

    DOI: 10.1007/s11705-019-1831-2  

    ISSN: 2095-0179

    eISSN: 2095-0187

  13. Highly Stable Persistent Photoconductivity with Suspended Graphene Nanoribbons Peer-reviewed

    Suzuki Hiroo, Ogura Noritada, Kaneko Toshiro, Kato Toshiaki

    SCIENTIFIC REPORTS 8 2018/08/07

    DOI: 10.1038/s41598-018-30278-z  

    ISSN: 2045-2322

  14. Wafer-scale synthesis and optoelectrical applications of bottom-up graphene nanoribbons

    Toshiaki Kato, Hiroo Suzuki, Toshiro Kaneko

    Optics InfoBase Conference Papers 2018 2018

    Publisher: OSA - The Optical Society

  15. Preferential synthesis of (6,4) single-walled carbon nanotubes by controlling oxidation degree of Co catalyst Peer-reviewed

    Bin Xu, Toshiro Kaneko, Yasushi Shibuta, Toshiaki Kato

    SCIENTIFIC REPORTS 7 2017/09

    DOI: 10.1038/s41598-017-11712-0  

    ISSN: 2045-2322

  16. Schottky solar cell using few-layered transition metal dichalcogenides toward large-scale fabrication of semitransparent and flexible power generator Peer-reviewed

    Toshiki Akama, Wakana Okita, Reito Nagai, Chao Li, Toshiro Kaneko, Toshiaki Kato

    SCIENTIFIC REPORTS 7 2017/09

    DOI: 10.1038/s41598-017-12287-6  

    ISSN: 2045-2322

  17. Large single-domain growth of monolayer WS2 by rapid-cooling chemical vapor deposition Peer-reviewed

    Chao Li, Yoshiki Yamaguchi, Toshiro Kaneko, Toshiaki Kato

    APPLIED PHYSICS EXPRESS 10 (7) 2017/07

    DOI: 10.7567/APEX.10.075201  

    ISSN: 1882-0778

    eISSN: 1882-0786

  18. How the alignment of adsorbed ortho H pairs determines the onset of selective carbon nanotube etching Peer-reviewed

    U. Khalilov, A. Bogaerts, B. Xu, T. Kato, T. Kaneko, E. C. Neyts

    NANOSCALE 9 (4) 1653-1661 2017/01

    DOI: 10.1039/c6nr08005g  

    ISSN: 2040-3364

    eISSN: 2040-3372

  19. Transport Dynamics of Neutral Excitons and Trions in Monolayer WS2 Peer-reviewed

    Toshiaki Kato, Toshiro Kaneko

    ACS NANO 10 (10) 9687-9694 2016/10

    DOI: 10.1021/acsnano.6b05580  

    ISSN: 1936-0851

    eISSN: 1936-086X

  20. Wafer-scale fabrication and growth dynamics of suspended graphene nanoribbon arrays Peer-reviewed

    Hiroo Suzuki, Toshiro Kaneko, Yasushi Shibuta, Munekazu Ohno, Yuki Maekawa, Toshiaki Kato

    NATURE COMMUNICATIONS 7 2016/06

    DOI: 10.1038/ncomms11797  

    ISSN: 2041-1723

  21. Investigation of band structures of few-layered transition metal dichalcogenide with photocurrent mapping measurement

    Tohoku-Section Joint Convention Record of Institutes of Electrical and Information Engineers, Japan 2016 48-48 2016

    Publisher: Organizing Committee of Tohoku-Section Joint Convention of Institutes of Electrical and Information Engineers, Japan

    DOI: 10.11528/tsjc.2016.0_48  

  22. Large Scale Fabrication of Suspended Graphene Nanoribbon Arrays Peer-reviewed

    Hiroo Suzuki, Toshiaki Kato, Toshiro Kaneko

    2016 COMPOUND SEMICONDUCTOR WEEK (CSW) INCLUDES 28TH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE & RELATED MATERIALS (IPRM) & 43RD INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS (ISCS) 2016

  23. Mass production of narrow chirality distributed single-walled carbon nanotubes by pulse plasma CVD Peer-reviewed

    Bin Xu, Toshiaki Kato, Toshiro Kaneko

    2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) 620-621 2016

    DOI: 10.1109/NANO.2016.7751458  

  24. Kinetics of Energy Selective Cs Encapsulation in Single-Walled Carbon Nanotubes for Damage-Free and Position-Selective Doping Peer-reviewed

    Toshiaki Kato, Erik C. Neyts, Yoshihiro Abiko, Toshiki Akama, Rikizo Hatakeyama, Toshiro Kaneko

    JOURNAL OF PHYSICAL CHEMISTRY C 119 (21) 11903-11908 2015/05

    DOI: 10.1021/acs.jpcc.5b00300  

    ISSN: 1932-7447

  25. Mild oxygen plasma treatment for functionalization of multi-layer tungsten diselenide

    Tohoku-Section Joint Convention Record of Institutes of Electrical and Information Engineers, Japan 2015 18-18 2015

    Publisher: Organizing Committee of Tohoku-Section Joint Convention of Institutes of Electrical and Information Engineers, Japan

    DOI: 10.11528/tsjc.2015.0_18  

  26. Direct growth of graphene and graphene nanoribbon on an insulating substrate by rapid-heating plasma CVD Peer-reviewed

    Toshiaki Kato, Rikizo Hatakeyama, Toshiro Kaneko

    Frontiers of Graphene and Carbon Nanotubes: Devices and Applications 37-52 2015/01/01

    Publisher: Springer Japan

    DOI: 10.1007/978-4-431-55372-4_4  

  27. Plasma doping processes for CNT devices Peer-reviewed

    Rikizo Hatakeyama, Toshiaki Kato, Yongfeng Li, Toshiro Kaneko

    Frontiers of Graphene and Carbon Nanotubes: Devices and Applications 143-163 2015/01/01

    Publisher: Springer Japan

    DOI: 10.1007/978-4-431-55372-4_11  

  28. Optical Detection of a Highly Localized Impurity State in Monolayer Tungsten Disulfide Peer-reviewed

    Toshiaki Kato, Toshiro Kaneko

    ACS NANO 8 (12) 12777-12785 2014/12

    DOI: 10.1021/nn5059858  

    ISSN: 1936-0851

    eISSN: 1936-086X

  29. Structure Controlled Nanoparticle Conjugates Synthesized by Gas-Liquid Interfacial Plasmas Peer-reviewed

    T. Kaneko, S. Takahashi, T. Kato

    Materials Science Forum 783-786 1996-2001 2014/05/23

    DOI: 10.4028/www.scientific.net/MSF.783-786.1996  

  30. Plasma Processing Based Synthesis of Functional Nanocarbons Peer-reviewed

    Rikizo Hatakeyama, Toshiaki Kato, Yongfeng Li, Toshiro Kaneko

    PLASMA CHEMISTRY AND PLASMA PROCESSING 34 (3) 377-402 2014/05

    DOI: 10.1007/s11090-014-9547-z  

    ISSN: 0272-4324

    eISSN: 1572-8986

  31. Plasma-Assisted Non-Equilibrium Reaction for Growth of High Quality Graphene and Graphene Nanoribbon Invited Peer-reviewed

    T. Kato, R. Hatakeyama, T. Kaneko

    Proceedings of the 8th International Conference on Reactive Plasmas 31st Symposium on Plasma Processing (ICRP-8/SPP-31) (CD-ROM) 4C-PM-A3 2014/02/03

  32. Fabrication of Single-Walled Carbon Nanotubes Based Stable PN Junction Diodes by Position Selective Doping of Cs Atoms Peer-reviewed

    Y. Abiko, T. Kato, R. Hatakeyama, T. Kaneko

    Proceedings of the 8th International Conference on Reactive Plasmas 31st Symposium on Plasma Processing (ICRP-8/SPP-31) (CD-ROM) 5P-PM-SPD-P04 2014/02/03

  33. Development of Novel Plasma CVD Method Aiming for Chirality-Controlled Synthesis of Single-Walled Carbon Nanotubes Peer-reviewed

    B. Xu, T. Kato, K. Murakoshi, T. Kaneko

    Proceedings of the 8th International Conference on Reactive Plasmas 31st Symposium on Plasma Processing (ICRP-8/SPP-31) (CD-ROM) 5P-PM-SPD-P05 2014/02/03

  34. Fabrication of stable pn junction single-walled carbon nanotube thin films by position selective Cs plasma irradiation method Peer-reviewed

    Y. Abiko, T. Kato, R. Hatakeyama, T. Kaneko

    26TH SYMPOSIUM ON PLASMA SCIENCES FOR MATERIALS (SPSM26) 518 2014

    DOI: 10.1088/1742-6596/518/1/012013  

    ISSN: 1742-6588

  35. Fabrication of Au Nanoparticle-Decorated Standing Graphene/Carbon Paper Composite Peer-reviewed

    Toshiaki Kato

    JSM Nanotechnology & Nanomedicine 1 (3) 1018-1-1018-3 2013/12

  36. Catalyst-Free Growth of High-Quality Graphene by High-Temperature Plasma Reaction Peer-reviewed

    Toshiaki Kato

    Nanoscience & Technology 1 (1) 1-4 2013/12

  37. Site- and alignment-controlled growth of graphene nanoribbons from nickel nanobars Peer-reviewed

    Toshiaki Kato, Rikizo Hatakeyama

    NATURE NANOTECHNOLOGY 7 (10) 651-656 2012/10

    DOI: 10.1038/nnano.2012.145  

    ISSN: 1748-3387

  38. Direct Growth of Doping-Density-Controlled Hexagonal Graphene on SiO2 Substrate by Rapid-Heating Plasma CVD Peer-reviewed

    Toshiaki Kato, Rikizo Hatakeyama

    ACS NANO 6 (10) 8508-8515 2012/10

    DOI: 10.1021/nn302290z  

    ISSN: 1936-0851

  39. Fabrication of n-Type Thin Film Transistor with Cs Encapsulated Single-Walled Carbon Nanotubes

    Tohoku-Section Joint Convention Record of Institutes of Electrical and Information Engineers, Japan 2012 22-22 2012

    Publisher: Organizing Committee of Tohoku-Section Joint Convention of Institutes of Electrical and Information Engineers, Japan

    DOI: 10.11528/tsjc.2012.0_22  

  40. Direct growth of high-quality mono-layer graphene on insulating substrate by advanced plasma CVD Peer-reviewed

    Toshiaki Kato, Rikizo Hatakeyama

    2012 12TH IEEE CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) 2012

  41. Fabrication of Stable N-Type Thin-Film Transistor with Cs Encapsulated Single-Walled Carbon Nanotubes Peer-reviewed

    T. Kato, R. Hatakeyama, Y. Osanai

    Proceedings of 11th IEEE International Conference on Nanotechnology 996-999 2011/08/15

    DOI: 10.1109/NANO.2011.6144534  

    More details Close

    2011.8.15-18. (発表 8/17)

  42. Plasma-synthesized single-walled carbon nanotubes and their applications Peer-reviewed

    R. Hatakeyama, T. Kaneko, T. Kato, Y. F. Li

    Journal of Physics D: Applied Physics 44 (17) 2011/05/04

    DOI: 10.1088/0022-3727/44/17/174004  

    ISSN: 0022-3727 1361-6463

  43. Room-Temperature Edge Functionalization and Doping of Graphene by Mild Plasma Peer-reviewed

    Toshiaki Kato, Liying Jiao, Xinran Wang, Hailiang Wang, Xiaolin Li, Li Zhang, Rikizo Hatakeyama, Hongjie Dai

    SMALL 7 (5) 574-577 2011/03

    DOI: 10.1002/smll.201002146  

    ISSN: 1613-6810

  44. Chirality Distribution Control of Single-Walled Carbon Nanotubes by Gold-Catalyzed Plasma CVD

    Ghorannevis Zohreh

    Tohoku-Section Joint Convention Record of Institutes of Electrical and Information Engineers, Japan 2011 10-10 2011

    Publisher: Organizing Committee of Tohoku-Section Joint Convention of Institutes of Electrical and Information Engineers, Japan

    DOI: 10.11528/tsjc.2011.0_10  

  45. Diameter Tuning of Single-Walled Carbon Nanotubes by Diffusion Plasma CVD Peer-reviewed

    Toshiaki Kato, Shunsuke Kuroda, Rikizo Hatakeyama

    JOURNAL OF NANOMATERIALS 2011

    DOI: 10.1155/2011/490529  

    ISSN: 1687-4110

  46. Direct Growth of Short Single-Walled Carbon Nanotubes with Narrow-Chirality Distribution by Time-Programmed Plasma Chemical Vapor Deposition Peer-reviewed

    Toshiaki Kato, Rikizo Hatakeyama

    ACS NANO 4 (12) 7395-7400 2010/12

    DOI: 10.1021/nn102379p  

    ISSN: 1936-0851

  47. Time-Programmed Plasma CVD for Detailed Structure Control of Single-Walled Carbon Nanotubes Peer-reviewed

    T. Kato, R. Hatakeyama

    Proceedings of 63rd Gaseous Electron Conference & 7th International Conference on Reactive Plasmas(CD ROM) DTP-072 2010/10/04

  48. Plasma Processing Power for Nanocarbon Nanobioelectronics Invited Peer-reviewed

    R. Hatakeyama, T. Kaneko, T. Kato, Y. F. Li, Q. Chen

    Proceedings of 63rd Gaseous Electron Conference and 7th International Conference on Reactive Plasmas (CD ROM) GW-002 2010/10/04

  49. Structure Control and Etching Stabilities of Carbon Nanowalls Grown by Low Magnetic-Field Helicon Plasma CVD Peer-reviewed

    M. Yamazaki, T. Kato, R. Ueda, T. Kaneko, R. Hatakeyama, C. Takahashi

    Proceedings of 63rd Gaseous Electron Conference and 7th International Conference on Reactive Plasmas (CD ROM) TF2-004 2010/10/04

  50. Green-Nanoelectronics Oriented Nanoscopic Plasma Control Peer-reviewed

    R. Hatakeyama, T. Kaneko, T. Kato, Y. F. Li

    Proceedings of the 4th International Symposium on Information Electronics Systems 60-66 2010/07/07

  51. Narrow-Chirality Distributed Single-Walled Carbon Nanotube Growth from Nonmagnetic Catalyst Peer-reviewed

    Zohreh Ghorannevis, Toshiaki Kato, Toshiro Kaneko, Rikizo Hatakeyama

    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY 132 (28) 9570-9572 2010/07

    DOI: 10.1021/ja103362j  

    ISSN: 0002-7863

  52. Effects of Plasma Conditions on the Growth of Single-Walled Carbon Nanotubes from Nonmagnetic Catalysts Peer-reviewed

    Z. Ghorannevis, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of the 27th Symposium on Plasma Processing 13-14 2010/02/01

  53. Growth of Single-Walled Carbon Nanotubes by Plasma CVD Peer-reviewed

    Toshiaki Kato

    Journal of Nanotechnology 2010 (256906) 1-11 2010

  54. Growth of Single-Walled Carbon Nanotubes from Nonmagnetic Catalysts by Plasma Chemical Vapor Deposition Peer-reviewed

    Zohreh Ghorannevis, Toshiaki Kato, Toshiro Kaneko, Rikizo Hatakeyama

    JAPANESE JOURNAL OF APPLIED PHYSICS 49 (2) 2010

    DOI: 10.1143/JJAP.49.02BA01  

    ISSN: 0021-4922

  55. Electrical Transport Properties of Calcium-Encapsulated Single-Walled Carbon Nanotubes Realized Using Calcium Plasma Peer-reviewed

    Tetsuhiro Shimizu, Toshiaki Kato, Wataru Oohara, Rikizo Hatakeyama

    JAPANESE JOURNAL OF APPLIED PHYSICS 49 (2) 2010

    DOI: 10.1143/JJAP.49.02BD05  

    ISSN: 0021-4922

  56. Investigation of H2/CH4 Plasma Composition in Nonmagnetic Growth of Single-Walled Carbon Nanotubes by Plasma Chemical Vapor Deposition Peer-reviewed

    Z. Ghorannevis, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of the 2nd Student Organizing International Mini-Conference on Information Electronics Systems 93-94 2009/10/27

  57. Synthesis and Functionalization of Carbon Nanotubes Using Plasma-Based Processes Invited Peer-reviewed

    R. Hatakeyama, T. Kaneko, T. Kato, Y. F. Li

    Proceedings of 2nd International Conference on Advanced Plasma Technologies: 1st International Plasma Nanoscience Symposium 60-64 2009/09/29

  58. P-N junction with donor and acceptor encapsulated single-walled carbon nanotubes Peer-reviewed

    Toshiaki Kato, Rikizo Hatakeyama, Jun Shishido, Wataru Oohara, Kazuyuki Tohji

    APPLIED PHYSICS LETTERS 95 (8) 2009/08

    DOI: 10.1063/1.3207742  

    ISSN: 0003-6951

  59. Formation and Property Evaluation of Calcium Encapsulated Single-Walled Carbon Nanotubes via Plasma Ion Irradiation Peer-reviewed

    T. Shimizu, T. Kato, W. Oohara, R. Hatakeyama

    Proceedings of International Symposium on Carbon Nanotube Nanoelectronics 109-110 2009/06/09

  60. Formation of Single-Walled Carbon Nanotubes through Methane Decomposition over Au Catalyst by Plasma CVD Invited Peer-reviewed

    Z. Ghorannevis, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of International Symposium on Carbon Nanotube Nanoelectronics 87-88 2009/06/09

  61. 新規ナノカーボン形成におけるプラズマの効果 Invited Peer-reviewed

    金子 俊郎, 加藤 俊顕, 畠山 力三

    日本真空協会 スパッタリングおよびプラズマプロセス技術部会 第113回定例研究会資料 24 (2) 11-20 2009/05/28

  62. Transistor Fabrication and Electronic Transport Property of Calcium Encapsulated Single-Walled Carbon Nanotubes Created by Plasma Ion Irradiation Peer-reviewed

    T. Shimizu, T. Kato, W. Oohara, R. Hatakeyama

    Proceedings of Plasma Science Symposium 2009 / The 26th Symposium on Plasma Processing 34-35 2009/02/02

  63. Growth Kinetics of Single-Walled Carbon Nanotubes in Plasma and Thermal CVD with Nonmagnetic Catalysts Peer-reviewed

    Z. Ghorannevis, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of Plasma Science Symposium 2009 / The 26th Symposium on Plasma Processing 20-21 2009/02/02

  64. Gold Catalyzing Growth of Single-Walled Carbon Nanotubes Using Chemical Vapor Deposition Method Peer-reviewed

    Z. Ghorannevis, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of the 1st Student Organizing International Mini-Conference on Information Electronics Systems 17-18 2008/10/16

  65. Formation of Calcium Encapsulated Single-Walled Carbon Nanotubes via Calcium Plasma Ion Irradiation Peer-reviewed

    T. Shimizu, T. Kato, W. Oohara, R. Hatakeyama

    Proceedings of International Interdisciplinary-Symposium on Gaseous and Liquid Plasmas 143-146 2008/09/06

  66. Growth of Carbon Nanotubes Using Plasma CVD Over Gold Catalyst Peer-reviewed

    Z. Ghorannevis, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of International Interdisciplinary-Symposium on Gaseous and Liquid Plasmas 175-178 2008/09/05

  67. Gas Pressure Effects on the Structure of Single-Walled Carbon Nanotube Grown with Diffusion Plasma CVD Peer-reviewed

    S. Kuroda, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of International Interdisciplinary-Symposium on Gaseous and Liquid Plasmas 171-174 2008/09/05

  68. Nanodevice-Oriented Nanoscopic Plasma Process Control Peer-reviewed

    R. Hatakeyama, T. Kaneko, T. Kato, Y.F. Li

    Proceedings of the 2nd International Symposium on Information Electronics Systems 66-71 2008/07/14

  69. Exciton energy transfer-assisted photoluminescence brightening from freestanding single-walled carbon nanotube bundles Peer-reviewed

    Toshiaki Kato, Rikizo Hatakeyama

    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY 130 (25) 8101-8107 2008/06

    DOI: 10.1021/ja802427v  

    ISSN: 0002-7863

  70. Novel-structured carbon nanotubes creation by nanoscopic plasma control Peer-reviewed

    R. Hatakeyama, T. Kaneko, W. Oohara, Y. F. Li, T. Kato, K. Baba, J. Shishido

    PLASMA SOURCES SCIENCE & TECHNOLOGY 17 (2) 2008/05

    DOI: 10.1088/0963-0252/17/2/024009  

    ISSN: 0963-0252

    eISSN: 1361-6595

  71. Modification of electrical transport properties of single-walled carbon nanotubes realized by negative-ion irradiation with electron-free pure alkali-halogen plasma Peer-reviewed

    Jun Shishido, Toshiaki Kato, Wataru Oohara, Rikizo Hatakeyama, Kazuyuki Tohji

    JAPANESE JOURNAL OF APPLIED PHYSICS 47 (4) 2044-2047 2008/04

    DOI: 10.1143/JJAP.47.20441  

    ISSN: 0021-4922

  72. Growth of Single-Walled Carbon Nanotubes Using Different Catalysts with Plasma and Thermal CVD Peer-reviewed

    Z. Ghorannevis, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of the 1st International Conference on Plasma Nanotechnology & Science P-42 2008/03/14

  73. Growth Equation of Single-Walled Carbon Nanotubes upon Plasma CVD Peer-reviewed

    T. Kato, R. Hatakeyama

    Proceedings of the 25th Symposium on Plasma Processing 45-46 2008/01

  74. Electrical Properties of Single-Walled Carbon Nanotubes Irradiated with Ions in a Calcium Plasma Peer-reviewed

    T. Shimizu, J. Shishido, T. Kato, W. Oohara, R. Hatakeyama

    Proceedings of the 25th Symposium on Plasma Processing 165-166 2008/01

  75. Kinetics of reactive ion etching upon single-walled carbon nanotubes Peer-reviewed

    Toshiaki Kato, Rikizo Hatakeyama

    APPLIED PHYSICS LETTERS 92 (3) 2008/01

    DOI: 10.1063/1.2837463  

    ISSN: 0003-6951

  76. Growth Kinetics of Single-Walled Carbon Nanotubes Produced by Plasma CVD Peer-reviewed

    T. Kato, R. Hatakeyama

    Proceedings of the 5th Asia-Pacific International Symposium on the Basic and Application of Plasma Technology 161-164 2007/12

  77. Time evolution of single-walled carbon nanotube growth with diffusion plasma CVD Peer-reviewed

    T. Kato, R. Hatakeyama

    Proceedings of 18th International Symposium on Plasma Chemistry (CD-ROM) 28P 156 2007/08

  78. Air-stable p-n junction diodes based on single-walled carbon nanotubes encapsulating Fe nanoparticles Peer-reviewed

    Y. F. Li, R. Hatakeyama, J. Shishido, T. Kato, T. Kaneko

    APPLIED PHYSICS LETTERS 90 (17) 2007/04

    DOI: 10.1063/1.2734509  

    ISSN: 0003-6951

  79. Negative differential resistance in tunneling transport through C-60 encapsulated double-walled carbon nanotubes Peer-reviewed

    Y. F. Li, R. Hatakeyama, T. Kaneko, T. Kato, T. Okada

    APPLIED PHYSICS LETTERS 90 (7) 2007/02

    DOI: 10.1063/1.2535817  

    ISSN: 0003-6951

  80. Effect of Ion-Energy and –Flux on the Growth of Freestanding-Individual Single-Walled Carbon Nanotubes with Diffusion-Plasma CVD Peer-reviewed

    T. Kato, R. Hatakeyama

    Proceedings of the Joint International Conference of 4th International Symposium on Construction of Global-Network-Oriented Information Electronics and Student-Organizing International Mini-Conference on Information Electronic System 294-295 2007/01

  81. Effects of Ion-Flux and -Energy on the Growth of Carbon Nanomaterials Using a Helicon-Wave Plasma Peer-reviewed

    T. Morio, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of the 24th Symposium on Plasma Processing 25-26 2007/01

  82. Electrical Transport Properties of Alkali-Metal/Halogen Encapsulated Single-Walled Carbon Nanotubes Peer-reviewed

    J. Shishido, T. Kato, W. Oohara, R. Hatakeyama, K. Tohjji

    2007 7TH IEEE CONFERENCE ON NANOTECHNOLOGY, VOL 1-3 647-+ 2007

  83. Modification of double-walled carbon nanotubes by Cs plasma ion irradiation Peer-reviewed

    Yongfeng Li, Takeshi Izumida, Takeru Okada, Toshiaki Kato, Rikizo Hatakeyama, Jieshan Qiu

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 45 (10B) 8330-8334 2006/10

    DOI: 10.1143/JJAP.45.83301  

    ISSN: 0021-4922

  84. Synthesis and electronic properties of ferrocene-filled double-walled carbon nanotubes Peer-reviewed

    Y. F. Li, R. Hatakeyama, T. Kaneko, T. Izumida, T. Okada, T. Kato

    NANOTECHNOLOGY 17 (16) 4143-4147 2006/08

    DOI: 10.1088/0957-4484/17/16/025  

    ISSN: 0957-4484

  85. Electronic transport properties of Cs-encapsulated double-walled carbon nanotubes Peer-reviewed

    Y. F. Li, R. Hatakeyama, T. Kaneko, T. Izumida, T. Okada, T. Kato

    APPLIED PHYSICS LETTERS 89 (9) 2006/08

    DOI: 10.1063/1.2339931  

    ISSN: 0003-6951

  86. Electrical properties of ferromagnetic semiconducting single-walled carbon nanotubes Peer-reviewed

    Y. F. Li, R. Hatakeyama, T. Kaneko, T. Izumida, T. Okada, T. Kato

    APPLIED PHYSICS LETTERS 89 (8) 2006/08

    DOI: 10.1063/1.2337872  

    ISSN: 0003-6951

  87. Synthesis of Cs-filled double-walled carbon nanotubes by a plasma process Peer-reviewed

    Yongfeng Li, Rikizo Hatakeyama, Takeru Okada, Toshiaki Kato, Takeshi Izumida, Takamichi Hirata, Jieshan Qiu

    CARBON 44 (8) 1586-1589 2006/07

    DOI: 10.1016/j.carbon.2006.02.012  

    ISSN: 0008-6223

  88. Formation of freestanding single-walled carbon nanotubes by plasma-enhanced CVD Peer-reviewed

    Toshiaki Kato, Rikizo Hatakeyama

    CHEMICAL VAPOR DEPOSITION 12 (6) 345-352 2006/06

    DOI: 10.1002/cvde.200506451  

    ISSN: 0948-1907

    eISSN: 1521-3862

  89. Fast growth of carbon nanowalls from pure methane using helicon plasma-enhanced chemical vapor deposition Peer-reviewed

    Genta Sato, Tetsuharu Morio, Toshiaki Kato, Rikizo Hatakeyama

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 45 (6A) 5210-5212 2006/06

    DOI: 10.1143/JJAP.45.5210  

    ISSN: 0021-4922

  90. Investigation of Gas-Liquid Interface in Microplasmas Contacting with Solvent Peer-reviewed

    K. Hirai, T. Okada, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of 3rd International Workshop on Microplasmas 86 2006/05

  91. Diffusion plasma chemical vapour deposition yielding freestanding individual single-walled carbon nanotubes on a silicon-based flat substrate Peer-reviewed

    T Kato, R Hatakeyama, K Tohji

    NANOTECHNOLOGY 17 (9) 2223-2226 2006/05

    DOI: 10.1088/0957-4484/17/9/025  

    ISSN: 0957-4484

  92. Production and application of reactive plasmas using helicon-wave discharge in very low magnetic fields Peer-reviewed

    G Sato, T Kato, W Oohara, R Hatakeyama

    THIN SOLID FILMS 506 550-554 2006/05

    DOI: 10.1016/j.tsf.2005.08.049  

    ISSN: 0040-6090

  93. Production of Single-Walled Carbon Nanotubes Using a Helicon-Wave Plasma Peer-reviewed

    T. Morio, G. Sato, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing 529-530 2006/01/24

  94. Freestanding Growth of Isolated Single-Walled Carbon Nanotubes with Diffusion-Plasma CVD Peer-reviewed

    T. Kato, R. Hatakeyama

    Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing (ICRP-6/SPP-23) 531-532 2006/01

  95. Synthesis of Functional Double-Walled Carbon Nanotubes using Plasma Method Peer-reviewed

    Y. F. Li, T. Okada, T. Kato, T. Izumida, R. Hatakeyama, J. Qiu

    Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing (ICRP-6/SPP-23) 2006

  96. Synthesis of Magnetic-Metals Encapsulated Single-Walled Carbon Nanotubes Peer-reviewed

    Y.F. Li, T. Okada, T. Kato, T. Kaneko, R. Hatakeyama

    Proceedings of the 3rd Student-Organizing International Mini-Conference on Information Electronics System 59-62 2005/10/06

  97. Plasma-CVD-Produced Individual Single-Walled Carbon Nanotubes Standing on a Silicon-Based Flat Substrate Peer-reviewed

    T. Kato, R. Hatakeyama

    Proceedings of the 3rd Student-Organizing International Mini-Conference on Information Electronics System 79-82 2005/10

  98. Effects of micro- and macro-plasma-sheath electric fields on carbon nanotube growth in a cross-field radio-frequency discharge Peer-reviewed

    R Hatakeyama, GH Jeong, T Kato, T Hirata

    JOURNAL OF APPLIED PHYSICS 96 (11) 6053-6060 2004/12

    DOI: 10.1063/1.1809777  

    ISSN: 0021-8979

    eISSN: 1089-7550

  99. Formation of Individually-Freestanding Single-Walled Carbon Nanotubes Based on Plasma Sheath Effects Peer-reviewed

    T. Kato, T. Hirata, R. Hatakeyama

    Proceedings of the 2nd Student-Organizing International Mini-Conference on Information Electronics System (SOIM-COE04) 53-56 2004/10

  100. Freestanding individual single-walled carbon nanotube synthesis based on plasma sheath effects Peer-reviewed

    T Kato, GH Jeong, T Hirata, R Hatakeyama, K Tohji

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 43 (10A) L1278-L1280 2004/10

    DOI: 10.1143/JJAP.43.L1278  

    ISSN: 0021-4922

  101. Production and Growth Mechanism of Individually- and Vertically -Aligned Single-Walled Carbon Nanotubes under the Plasma-Enhanced Chemical Vapor Deposition Method Peer-reviewed

    T. Kato, G.-H. Jeong, T. Hirata, R. Hatakeyama, K. Tohji

    Abstract of Int. Conf. on the Science and Application of Nanotubes 2004/07

    DOI: 10.1016/j.cplett.2003.10.007  

  102. Simple methods for site-controlled carbon nanotube growth using radio-frequency plasma-enhanced chemical vapor deposition Peer-reviewed

    GH Jeong, N Satake, T Kato, T Hirata, R Hatakeyama, K Tohji

    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 79 (1) 85-87 2004/06

    DOI: 10.1007/s00339-004-2599-9  

    ISSN: 0947-8396

  103. Structure control of carbon nanotubes using radio-frequency plasma enhanced chemical vapor deposition Peer-reviewed

    T Kato, GH Jeong, T Hirata, R Hatakeyama

    THIN SOLID FILMS 457 (1) 2-6 2004/06

    DOI: 10.1016/j.tsf.2003.12.002  

    ISSN: 0040-6090

  104. Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition Peer-reviewed

    T. Kato, T. Hirata, G. H. Jeong, R. Hatakeyama, K. Tohji

    Proceedings - Electrochemical Society PV 2004-12 10-17 2004

  105. Single-Walled Carbon Nanotube Formation Using Plasma-Enhanced Chemical Vapor Deposition Peer-reviewed

    R. Hatakeyama, T. Kato, G. -H. Jeong, T. Hirata

    Proceedings of International Workshop on Plasma Nano-Technology and Its Future Vision P3.1-3.2 2004

  106. Plasma Effects on Single-Walled Carbon Nanotube Formation Peer-reviewed

    T. Kato, G. -H. Jeong, T. Hirata, R. Hatakeyama

    Proceedings of the 21st Symposium on Plasma Processing 234-235 2004/01

  107. Individual single-walled carbon nanotubes with vertical alignment Peer-reviewed

    T Kato, GH Jeong, T Hirata, R Hatakeyama, K Tohji

    2004 4TH IEEE CONFERENCE ON NANOTECHNOLOGY 541-543 2004

  108. Single-walled carbon nanotubes produced by plasma-enhanced chemical vapor deposition Peer-reviewed

    T Kato, GH Jeong, T Hirata, R Hatakeyama, K Tohji, K Motomiya

    CHEMICAL PHYSICS LETTERS 381 (3-4) 422-426 2003/11

    DOI: 10.1016/j.cplett.2003.10.007  

    ISSN: 0009-2614

  109. Time evolution of nucleation and vertical growth of carbon nanotubes during plasma-enhanced chemical vapor deposition Peer-reviewed

    GH Jeong, N Satake, T Kato, T Hirata, R Hatakeyama, K Tohji

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 42 (11A) L1340-L1342 2003/11

    DOI: 10.1143/JJAP.42.L1340  

    ISSN: 0021-4922

  110. Magnetron-type radio-frequency plasma control yielding vertically well-aligned carbon nanotube growth Peer-reviewed

    T Hirata, N Satake, GH Jeong, T Kato, R Hatakeyama, K Motomiya, K Tohji

    APPLIED PHYSICS LETTERS 83 (6) 1119-1121 2003/08

    DOI: 10.1063/1.1601303  

    ISSN: 0003-6951

Show all ︎Show first 5

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    プラズマ・核融合学会誌 94 (5) 235‐241 2018/05/25

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    応用物理学会春季学術講演会講演予稿集(CD-ROM) 65th ROMBUNNO.20a‐C202‐3 2018/03/05

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    「Web Journal -次世代エネルギー太陽電池・二次電池・燃料電池-」, アクトライ・エム 23 (9) 6-9 2018/02

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    プラズマCVDにおける成膜条件の最適化に向けた制御技術と成膜事例」,Science & Technology 2018

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  10. ナノバー触媒からのグラフェンナノリボン合成に関する触媒金属依存性

    和藤勇太, 鈴木弘朗, 金子俊郎, 加藤俊顕

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 78th ROMBUNNO.8a‐C16‐9 2017/08/25

  11. Development of an innovative method for integrated synthesis of graphene nanoribbon

    加藤俊顕, 金子俊郎

    応用物理 86 (7) 581‐585-585 2017/07/10

    Publisher: 応用物理学会

    ISSN: 0369-8009

  12. 架橋グラフェンナノリボンアレイのウェハースケール高集積化合成と光電子デバイス応用

    鈴木弘朗, 金子俊郎, 澁田靖, 大野宗一, 前川侑毅, 加藤俊顕

    応用物理学会春季学術講演会講演予稿集(CD-ROM) 64th ROMBUNNO.16p‐B6‐9 2017/03/01

  13. High purity synthesis of (6,4) single-walled carbon nanotube by surface state control of co catalyst

    Bin Xu, Toshiro Kaneko, Yasushi Shibuta, Toshiaki Kato

    Optics InfoBase Conference Papers Part F78-JSAP 2017 2017/01/01

  14. グラフェンナノリボンの革新的集積化合成法の開発

    加藤 俊顕, 金子 俊郎

    応用物理学会学会誌 86 (7) 581-585 2017

    Publisher: 応用物理学会

    ISSN: 0369-8009

  15. 架橋型数層TMDを用いた高性能光電子デバイス作製におけるマイルドプラズマ効果

    永井黎人, 金子俊郎, 加藤俊顕

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 77th ROMBUNNO.16a‐A32‐8 2016/09/01

  16. 遷移金属ダイカルコゲナイドを用いたショットキー型太陽電池の発電機構

    大北若奈, 金子俊郎, 加藤俊顕

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 77th ROMBUNNO.16a‐A32‐7 2016/09/01

  17. 架橋グラフェンナノリボンアレイのウェハースケール高集積化合成

    鈴木弘朗, 金子俊郎, 澁田靖, 大野宗一, 前川侑毅, 加藤俊顕

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 77th ROMBUNNO.16a‐A33‐5 2016/09/01

  18. 2次元原子層物質の構造制御合成とプラズマ機能化

    加藤俊顕, 金子俊郎

    電子情報通信学会技術研究報告 116 (118(SDM2016 32-47)) 65‐68 2016/06/22

    ISSN: 0913-5685

  19. マイルド酸素プラズマ機能化数層WSe2を用いた高性能光電子デバイスの開発

    永井黎人, 加藤俊顕, 金子俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM) 63rd ROMBUNNO.20P-S421-6 2016/03/03

  20. 単層単結晶WS2の広域集積化合成

    高橋智之, 加藤俊顕, 金子俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM) 63rd ROMBUNNO.22A-S421-7 2016/03/03

  21. 数層WSe2ショットキー型太陽電池における光発電特性の高性能化

    赤間俊紀, 加藤俊顕, 金子俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM) 63rd ROMBUNNO.20P-S421-10 2016/03/03

  22. ヘテロ接合原子膜の超精密構造制御合成と光電子デバイス応用

    加藤俊顕

    村田学術振興財団年報 (29-2) 127‐135 2015/12

    ISSN: 0919-3383

  23. 単層カーボンナノチューブ/遷移金属ダイカルコゲナイドヘテロ接合太陽電池

    赤間俊紀, 加藤俊顕, 畠山力三, 金子俊郎

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 76th ROMBUNNO.14P-2U-10 2015/08/31

  24. 単層二硫化タングステンの大面積合成とその合成機構

    高橋智之, 加藤俊顕, 金子俊郎

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 76th ROMBUNNO.15P-2U-2 2015/08/31

  25. プラズマCVDによるグラフェンナノリボンの架橋合成機構

    鈴木弘朗, 加藤俊顕, 金子俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM) 62nd ROMBUNNO.13A-P12-1 2015/02/26

  26. Synthesis and Application of Graphene with Plasma Processing

    加藤俊顕, 金子俊郎

    電気学会誌 135 (3) 151-153 (J-STAGE) 2015

    DOI: 10.1541/ieejjournal.135.151  

    ISSN: 1340-5551

  27. 架橋グラフェンナノリボンアレイの高効率合成

    鈴木弘朗, 加藤俊顕, 金子俊郎

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 75th ROMBUNNO.19A-B3-7 2014/09/01

  28. 高配向半導体単層カーボンナノチューブ薄膜を用いた太陽電池の創製

    赤間俊紀, 加藤俊顕, 安彦嘉浩, 畠山力三, 金子俊郎

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 75th ROMBUNNO.19A-B1-6 2014/09/01

  29. 単層WS2グレインバウンダリーからの特異な発光現象

    加藤俊顕, 金子俊郎

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 75th ROMBUNNO.18P-B3-3 2014/09/01

  30. パルスプラズマCVDによる(6,4)単層カーボンナノチューブの高純度合成

    XU Bin, 加藤俊顕, 金子俊郎

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 75th ROMBUNNO.20A-B1-4 2014/09/01

  31. プラズマCVD中グラフェンナノリボンの合成機構

    加藤俊顕, 鈴木弘朗, 畠山力三, 金子俊郎

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 75th ROMBUNNO.18A-S1-1 2014/09/01

  32. マイルドプラズマによる遷移金属ダイカルコゲナイドの機能化

    高橋智之, 加藤俊顕, 金子俊郎

    応用物理学会秋季学術講演会講演予稿集(CD-ROM) 75th ROMBUNNO.20A-B3-5 2014/09/01

  33. グラフェンナノリボンの新規合成手法の開発

    加藤俊顕, 畠山力三, 金子俊郎

    New Diamond 30 (3) 3-5 2014/07/25

    Publisher: オーム社

    ISSN: 1340-4792

  34. プラズマエレクトロニクス賞を受賞して

    加藤俊顕, 畠山力三

    Plasma Electronics (60) 9-10 2014/06/23

  35. Plasma Processing Based Synthesis of Functional Nanocarbons

    R. Hatakeyama, T. Kato, Y. Li, T. Kaneko

    Plasma Chemistry and Plasma Processing 34 (3) 377-402 2014/03/29

  36. グラフェンナノリボンのプラズマCVD合成と応用

    加藤俊顕, 畠山力三, 金子俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM) 61st ROMBUNNO.18P-F7-4 2014/03/03

  37. ニッケルナノバー触媒からのグラフェンナノリボン析出合成におけるプラズマ効果

    鈴木弘朗, 加藤俊顕, 金子俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM) 61st ROMBUNNO.20P-E2-1 2014/03/03

  38. パルスプラズマCVDによる(6,5)単層カーボンナノチューブの高純度合成

    XU Bin, 加藤俊顕, 村越幸史, 金子俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM) 61st ROMBUNNO.19A-E18-7 2014/03/03

  39. Effect of ion impact on incubation time of single-walled carbon nanotubes grown by plasma chemical vapor deposition

    Bin Xu, Toshiaki Kato, Koshi Murakoshi, Toshiro Kaneko

    Plasma and Fusion Research 9 1206075-1206075 (J-STAGE) 2014

    Publisher: Japan Society of Plasma Science and Nuclear Fusion Research

    DOI: 10.1585/pfr.9.1206075  

    ISSN: 1880-6821

    eISSN: 1880-6821

  40. Improvement of electrical device performances for graphene directly grown on a SiO2 substrate by plasma chemical vapor deposition

    Hiroo Suzuki, Toshiaki Kato, Toshiro Kaneko

    Plasma and Fusion Research 9 1206079-1206079 (J-STAGE) 2014

    Publisher: Japan Society of Plasma Science and Nuclear Fusion Research

    DOI: 10.1585/pfr.9.1206079  

    ISSN: 1880-6821

  41. グラフェンナノリボンの直接合成と集積化

    加藤俊顕, 畠山力三, 金子俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM) 60th ROMBUNNO.28P-G12-6 2013/03/11

  42. Csプラズマ照射による単層カーボンナノチューブ薄膜pn接合ダイオードの創製

    安彦嘉浩, 加藤俊顕, 畠山力三, 金子俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM) 60th ROMBUNNO.29P-G10-21 2013/03/11

  43. プラズマCVDによる原子置換単層カーボンナノチューブの創製及び電気特性評価

    村越幸史, 加藤俊顕, 安久津誠, 畠山力三, 金子俊郎

    応用物理学会学術講演会講演予稿集(CD-ROM) 73rd ROMBUNNO.13A-C2-10 2012/08/27

  44. プラズマCVD成長単層カーボンナノチューブのカイラリティ分布に対する水素ラジカルの効果

    村越幸史, 加藤俊顕, 金子俊郎, 畠山力三

    応用物理学関係連合講演会講演予稿集(CD-ROM) 59th ROMBUNNO.15A-A3-2 2012/02/29

  45. シリコン酸化膜上へのグラフェン直接合成と成長機構

    加藤俊顕, 畠山力三

    応用物理学関係連合講演会講演予稿集(CD-ROM) 59th ROMBUNNO.16P-A3-12 2012/02/29

  46. 拡散プラズマプロセスによる単層カーボンナノチューブ及びグラフェンの構造制御合成と機能化

    加藤俊顕, 畠山力三

    応用物理学関係連合講演会講演予稿集(CD-ROM) 59th ROMBUNNO.15P-E8-7 2012/02/29

  47. 拡散プラズマCVDにより合成した窒素ドーピング単層カーボンナノチューブを用いた薄膜トランジスタの電気特性

    安久津誠, 加藤俊顕, 黒田峻介, 金子俊郎, 畠山力三

    応用物理学会学術講演会講演予稿集(CD-ROM) 72nd ROMBUNNO.30A-ZJ-10 2011/08/16

  48. 弱磁場ヘリコンプラズマCVDによるカーボンナノチューブへのカーボンナノウォール修飾

    佐藤拓矢, 加藤俊顕, 金子俊郎, 畠山力三

    応用物理学会学術講演会講演予稿集(CD-ROM) 72nd ROMBUNNO.30A-ZT-12 2011/08/16

  49. プラズマCVD中グラフェン合成におけるプラズマ効果

    加藤俊顕, 森川昌登, 畠山力三

    応用物理学会学術講演会講演予稿集(CD-ROM) 72nd ROMBUNNO.2P-ZF-1 2011/08/16

  50. Plasma-synthesized single-walled carbon nanotubes and their applications

    R. Hatakeyama, T. Kaneko, T. Kato, Y. F. Li

    Journal of Physics D: Applied Physics 44 (17) 174004-1-174004-21 2011/04/14

  51. 拡散プラズマCVD法により合成した直径制御単層カーボンナノチューブを用いた薄膜トランジスタの電気特性評価

    安久津誠, 黒田峻介, 加藤俊顕, 金子俊郎, 畠山力三

    応用物理学関係連合講演会講演予稿集(CD-ROM) 58th ROMBUNNO.26P-KQ-13 2011/03/09

  52. 単層カーボンナノチューブ薄膜トランジスタのプラズマイオン照射ドーピング制御とその電気特性評価

    小山内陽祐, 加藤俊顕, 畠山力三

    応用物理学会学術講演会講演予稿集(CD-ROM) 71st ROMBUNNO.15A-ZM-13 2010/08/30

  53. 弱磁場ヘリコン波プラズマCVDによるカーボンナノウォールの構造制御合成

    山崎雅博, 加藤俊顕, 上田亮, 金子俊郎, 畠山力三, 高橋千春

    応用物理学会学術講演会講演予稿集(CD-ROM) 71st ROMBUNNO.15A-ZM-5 2010/08/30

  54. 時間制御プラズマCVDによる極短尺単層カーボンナノチューブの直接成長とそのカイラリティ分布制御

    加藤俊顕, 畠山力三

    応用物理学会学術講演会講演予稿集(CD-ROM) 71st ROMBUNNO.17A-ZQ-4 2010/08/30

  55. カーボンナノウォールを利用した反射防止体の作製

    上田亮, 山崎雅博, 加藤俊顕, 金子俊郎, 畠山力三, 高橋千春

    応用物理学会学術講演会講演予稿集(CD-ROM) 71st ROMBUNNO.15A-ZM-6 2010/08/30

  56. 拡散プラズマCVD法による非磁性金属触媒を利用した極めて狭いカイラリティ分布をもつ単層カーボンナノチューブの合成

    GHORANNEVIS Z, 加藤俊顕, 金子俊郎, 畠山力三

    応用物理学会学術講演会講演予稿集(CD-ROM) 71st ROMBUNNO.17A-ZQ-5 2010/08/30

  57. カルシウム内包カーボンナノチューブの薄膜トランジスタ作製とその電気特性評価

    小山内陽祐, 清水哲弘, 加藤俊顕, 大原渡, 畠山力三

    応用物理学関係連合講演会講演予稿集(CD-ROM) 57th ROMBUNNO.18P-TD-10 2010/03/03

  58. Effect of Gold catalytic layer thickness on growth of single-walled carbon nanotubes using thermal and plasma CVD

    GHORANNEVIS Zohreh, KATO Toshiaki, KANEKO Toshiro, HATAKEYAMA Rikizo

    J Plasma Fusion Res Ser (Web) 8 595-598 (WEB ONLY) 2009/09/30

    ISSN: 1883-9630

  59. プラズマ・ナノカーボン融合科学の創成

    畠山力三, 金子俊郎, 加藤俊顕, LI Y. F, 馬場和彦, 岡田健

    応用物理学会学術講演会講演予稿集 70th (0) 24 2009/09/08

  60. 拡散プラズマCVD法により合成したSWNTsの直径分布と圧力・高周波電力の相関調査

    黒田峻介, 加藤俊顕, 金子俊郎, 畠山力三

    応用物理学会学術講演会講演予稿集 70th (1) 457 2009/09/08

  61. 拡散プラズマCVD法により合成したSWNTsのカイラリティ分布に対する圧力依存性

    黒田峻介, 加藤俊顕, 金子俊郎, 畠山力三

    応用物理学関係連合講演会講演予稿集 56th (1) 527 2009/03/30

  62. 異種原子分子接合内包単層カーボンナノチューブによるpn接合構造の創製とその電気特性

    加藤俊顕, 宍戸淳, 大原渡, 畠山力三, 田路和幸

    応用物理学関係連合講演会講演予稿集 56th (1) 520 2009/03/30

  63. Fabrication of Calcium Encapsulated Carbon Nanotubes by Plasma Ions Control

    清水哲弘, 加藤俊顕, 畠山力三, 大原渡

    電気学会プラズマ研究会資料 PST-08 (58-68) 53-57 2008/10/31

  64. カルシウムプラズマ創製 カルシウム内包単層カーボンナノチューブの電気特性評価

    清水哲弘, 加藤俊顕, 大原渡, 畠山力三

    核融合エネルギー連合講演会予稿集 7th 144 2008/05/27

  65. アルカリ土類金属を内包した単層カーボンナノチューブの電気特性

    清水哲弘, 加藤俊顕, 大原渡, 畠山力三

    応用物理学関係連合講演会講演予稿集 55th (1) 504 2008/03/27

  66. 孤立垂直配向単層カーボンナノチューブからの蛍光観測

    加藤俊顕, 畠山力三

    応用物理学会学術講演会講演予稿集 68th (1) 539 2007/09/04

  67. アルカリ金属/ハロゲンを内包した単層カーボンナノチューブの特性

    宍戸淳, 加藤俊顕, 大原渡, 畠山力三, 田路和幸

    応用物理学関係連合講演会講演予稿集 54th (1) 569 2007/03/27

  68. ナノカーボンテクノロジーにおけるプラズマの効果

    畠山力三, 金子俊郎, 大原渡, 加藤俊顕

    応用物理学関係連合講演会講演予稿集 54th (0) 65 2007/03/27

  69. 弱磁場ヘリコン波プラズマを用いたイオンエネルギー制御によるカーボンナノウォールの構造制御

    森尾哲治, 加藤俊顕, 金子俊郎, 畠山力三

    応用物理学関係連合講演会講演予稿集 54th (1) 547 2007/03/27

  70. Formation of C60- Encapsulated Double-Walled Carbon Nanotubes with Novel Electrical Transport Properties Based on Plasma Technology

    LI Yongfeng, HATAKEYAMA Rikizo, KANEKO Toshiro, KATO Toshiaki, OKADA Takeru

    Plasma Fusion Res (Web) 2 017-017 (J-STAGE)-17 2007

    Publisher: The Japan Society of Plasma Science and Nuclear Fusion Research

    DOI: 10.1585/pfr.2.017  

    ISSN: 1880-6821

    More details Close

    The encapsulation of C60 molecules inside double-walled carbon nanotubes (DWNTs) is realized by means of a plasma ion-irradiation method. Transmission electron microscopy observations confirm that DWNTs have been filled with C60 fullerenes having amorphous morphology. More importantly, electrical transport measurements indicate that C60-encapsulated metallic DWNTs exhibit a novel negative differential resistance behavior.

  71. プラズマCVD中単層カーボンナノチューブ成長におけるイオンダメージ効果

    加藤俊顕, 畠山力三

    応用物理学会学術講演会講演予稿集 67th (1) 471 2006/08/29

  72. アルカリ―ハロゲンプラズマによるイオン照射単層カーボンナノチューブの電気特性

    宍戸淳, 加藤俊顕, 大原渡, 畠山力三, 田路和幸

    応用物理学会学術講演会講演予稿集 67th (1) 473 2006/08/29

  73. 弱磁場ヘリコン波プラズマを用いたカーボンナノウォールの低温形成

    森尾哲治, 加藤俊顕, 金子俊郎, 畠山力三

    応用物理学会学術講演会講演予稿集 67th (1) 451 2006/08/29

  74. VIII-3 Challenge and Outlook on Plasma CVD Synthesis of Carbon Nanotubes

    HATAKEYAMA Rikizo, KATO Toshiaki, KANEKO Toshiro

    (23) 47-47 2006

    Publisher: プラズマ・核融合学会

  75. 29aA07P Elucidation of defect formation mechanism of single-walled carbon nanotubes with electron temperature controlled plasmas

    KATO Toshiaki, HATAKEYAMA Rikizo

    (23) 124-124 2006

    Publisher: プラズマ・核融合学会

  76. 周辺プラズマ利用単層カーボンナノチューブ形成とイオン衝撃効果の解明

    畠山力三, 加藤俊顕

    核融合エネルギー連合講演会予稿集 6th 189 2006

  77. Aligned Carbon Nanotube Formation via Radio-Frequency Magnetron Plasma Chemical Vapor Deposition

    畠山力三, 加藤俊顕

    プラズマ・核融合学会誌 81 (9) 653-659 2005/09/25

    Publisher: The Japan Society of Plasma Science and Nuclear Fusion Research

    DOI: 10.1585/jspf.81.653  

    ISSN: 0918-7928

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    The plasma-enhanced chemical vapor deposition method, which has such benefits as low synthesis temperature and vertical alignment control, was successfully applied to the single-walled carbon nanotube (SWNT) formation stage. By means of plasma sheath effects, the individual SWNT with a freestanding form was grown on a silicon-based flat substrate surface. The detailed plasma effects are also discussed in order to achieve more precise control of the growth of the carbon nanotube.

  78. 弱磁場ヘリコン波プラズマによるカーボンナノ物質の創製とプラズマ効果

    森尾哲治, 佐藤玄太, 加藤俊顕, 金子俊郎, 畠山力三

    応用物理学会学術講演会講演予稿集 66th (1) 400 2005/09/07

  79. 拡散プラズマCVDによるシリコン基板上への孤立垂直配向単層カーボンナノチューブ形成

    加藤俊顕, 畠山力三, 田路和幸

    応用物理学会学術講演会講演予稿集 66th (1) 395 2005/09/07

  80. Creation of Carbon Nanomaterials Based on Plasma Science and Future Prospects

    畠山力三, 平田孝道, 岡田健, 加藤俊顕, 泉田健, 大原渡, 金子俊郎

    放電研究 48 (2) 14-20 2005/05/17

    ISSN: 0911-8713

  81. ヘリコン波プラズマ支援化学気相成長法によるナノカーボン合成

    佐藤玄太, 加藤俊顕, 大原渡, 畠山力三

    応用物理学関係連合講演会講演予稿集 52nd (1) 196 2005/03/29

  82. 30aC02 Freestanding formation of individual single-walled carbon nanotubes by diffusion plasma CVD method

    KATO Toshiaki, HATAKEYAMA Rikizo

    (22) 158-158 2005

    Publisher: プラズマ・核融合学会

  83. Creation of novel structured nanocarbons based on plasma technology

    Rikizo Hatakeyama, Takamichi Hirata, Wataru Oohara, Toshiaki Kato, Takeshi Izumida

    Shinku/Journal of the Vacuum Society of Japan 48 (3) 238-240 2005

    DOI: 10.3131/jvsj.48.238  

    ISSN: 0559-8516

  84. ヘリコン波プラズマ支援化学気相成長法によるカーボンナノチューブ形成

    佐藤玄太, 加藤俊顕, 大原渡, 畠山力三

    応用物理学会学術講演会講演予稿集 65th (1) 125 2004/09/01

  85. プラズマCVD形成単層カーボンナノチューブの構造評価及びそのプラズマ効果

    加藤俊顕, JCONG G‐H, 平田孝道, 畠山力三, 田路和幸

    応用物理学会学術講演会講演予稿集 65th (1) 400 2004/09/01

  86. 単層カーボンナノチューブの成長及び構造決定におけるプラズマ効果

    加藤俊顕, 平田孝道, 畠山力三

    電気学会基礎・材料・共通部門大会講演論文集 2004 327 2004/08/30

  87. ヘリコン波放電プラズマを用いたナノカーボンの創製

    佐藤玄太, 加藤俊顕, JEONG G‐H, 平田孝道, 畠山力三

    応用物理学関係連合講演会講演予稿集 51st (1) 163 2004/03/28

  88. プラズマCVDによる垂直配向孤立単層カーボンナノチューブの形成及びそのプラズマ効果

    加藤俊顕, JEONG G‐H, 平田孝道, 畠山力三, 田路和幸

    応用物理学関係連合講演会講演予稿集 51st (1) 545 2004/03/28

  89. 25pB03 The growth mechanism of single walled carbon nanotubes under the plasma-enhanced chemical vapor deposition

    KATO Toshiaki, HIRATA Takamichi, HATAKEYAMA Rikizo

    (21) 208-208 2004

    Publisher: プラズマ・核融合学会

  90. 24aB06P Formation of Carbon Nanotubes under Very Low Gas Pressures Using Helicon-Wave Plasma Enhanced Chemical Vapor Deposition

    SATO Genta, KATO Toshiaki, OOHARA Wataru, HATAKEYAMA Rikizo

    (21) 152-152 2004

    Publisher: プラズマ・核融合学会

  91. 高周波マグネトロン型プラズマCVD法を用いた単層カーボンナノチューブの形成

    加藤俊顕, 平田孝道, 畠山力三, 田路和幸, 本宮憲一, JEONG G‐H

    応用物理学会学術講演会講演予稿集 64th (1) 447 2003/08/30

  92. 高周波グロー放電反応性プラズマを用いたカーボンナノチューブ形成機構及び構造制御

    佐竹信彦, JEONG G‐H, 加藤俊顕, 平田孝道, 畠山力三, 田路和幸

    応用物理学関係連合講演会講演予稿集 50th (1) 550 2003/03/27

  93. 25pB05 Formation of Single-Walled Carbon Nanotubes Using Plasma-Enhanced Chemical Vapor Deposition Method

    HATAKEYAMA Rikizo, KATO Toshiaki, JEONG Goo-Hwan, HIRATA Takamichi

    (20) 106-106 2003

    Publisher: プラズマ・核融合学会

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Books and Other Publications 7

  1. カルコゲナイド系層状物質の最新研究

    加藤俊顕, 金子俊郎

    シーエムシー出版 2016/07/28

  2. Frontiers of Graphene and Carbon Nanotubes 『Plasma Doping Processes for CNT Devices』

    R. Hatakeyama, T. Kato, Y. Li, T. Kaneko

    Springer 2015

  3. Frontiers of Graphene and Carbon Nanotubes 『Direct growth of Graphene and Graphene Nanoribbon on an Insulating Substrate by Rapid-Heating Plasma CVD』

    T. Kato, R. Hatakeyama, T. Kaneko

    Springer 2015

  4. Nanoelectronic Device Applications Handbook

    Toshiaki Kato, Rikizo Hatakeyama, Yosuke Osanai

    2012

  5. Recent Progress in Carbon Nanotube Research

    Toshiaki Kato, Rikizo Hatakeyama

    2012

  6. Carbon Nanotube/Graphene Handbook

    R. Hatakeyama, T. Kato

    CORONA PUBLISHING CO.,LTD. 2011/09/12

  7. Plasma processing of nanomaterials

    Rikizo Hatakeyama, Toshiaki Kato

    CRC Press 2011

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Presentations 16

  1. Bottom up Synthesis and Optoelectrical Application of Suspended Graphene Nanoribbon Arrays in Wafer Scale International-presentation Invited

    T. Kato, T. Kaneko

    2018 MRS Fall Meeting & Exhibit 2018

  2. Schottky solar cell using few-layered TMDs International-presentation Invited

    T. Kato, T. Kaneko

    3rd EU-Japan Workshop on Graphene and Related 2D Materials 2018

  3. Wafer-scale Fabrication of Suspended Graphene Nanoribbon Arrays -from Growth Dynamics to Optoelectrical Applications- International-presentation Invited

    T. Kato, T. Kaneko

    The AVS 65th International Symposium & Exhibition, October 21 - 26, 2018 2018

  4. Fabrication of Solar Cells Using Plasma Processed Semiconducting Single-Walled Carbon Nanotubes and Transition Metal Dichalcogenide International-presentation Invited

    T. Kaneko, T. Akama, W. Okita, C. Li, T. Kato

    2018 International Symposium on Plasmas for Catalyses and Energy Materials (ISPCEM-2018) 2018

  5. Wafer-Scale Synthesis and Optoelectrical Applications of Bottom-up Graphene Nanoribbons Invited

    T. Kato, H. Suzuki, T. Kaneko

    2018

  6. Purity improvement of preferentially synthesized (6,4) single-walled carbon nanotubes by controlling plasma parameters

    T. Shima, B. Xu, T. Kaneko, T. Kato

    2018

  7. Mechanism of on/off improvement of graphene nanoribbon transistors synthesized by advanced plasma CVD

    N. Ogura, H. Suzuki, T. Kaneko, T. Kato

    2018

  8. Layer-number-controlled synthesis of WS2 integrated by Au dot technology

    T. Kameyama, C. Li, T. Kaneko, T. Kato

    2018

  9. Performance improvement of transparent solar cell using few-layered transition metal dichalcogenide by Schottky barrier control

    Y. Yamaguchi, W. Okita, C. Li, T. Kaneko, T. Kato

    2018

  10. Low temperature electrical transport properties of suspended graphene nanoribbons grown by plasma CVD International-presentation

    W. Okita, H. Suzuki, T. Kaneko, T. Kato

    2018 International Conference on Solid State Devices and Materials 2018

  11. Fabrication of graphene nanoribbon transistor with high on/off ratio using advanced plasma CVD International-presentation

    N. Ogura, Y. Wato, H. Suzuki, T. Kaneko, T. Kato

    2018 International Conference on Solid State Devices and Materials 2018

  12. High yield fabrication of quantum device made of graphene nanoribbon

    W. Okita, H. Suzuki, T. Kaneko, T. Kato

    2018

  13. In-situ measurement of WS2 crystal growth with Au dot nucleation control

    C. Li, T. Kameyama, T. Kaneko, T. Kato

    2018

  14. Synthesis mechanism of bottom up graphene nanoribbon by plasma CVD

    N. Ogura, H. Suzuki, T. Kaneko, T. Kato

    2018

  15. Bottom-up synthesis of atomically-precise low-dimensional nanocarbon materials by nanoscale plasma processing International-presentation Invited

    T. Kato, T. Kaneko

    The 7th International Conference on Microelectronics and Plasma Technology (ICMAP 2018) 2018

  16. Integrated synthesis of graphene nanoribbons toward high performance optoelectrical devices International-presentation Invited

    T.Kato, T. Kaneko

    10th International Symposium on Organic Molecular Electronics (ISOME 2018) 2018

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Research Projects 25

  1. Investigation of the physics of bunddle effect of carobon nanotube for the fabrication of high electrical and thermal conductive materials and development of technology to control the conductivity

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (B)

    Institution: Kyushu Institute of Technology

    2024/04/01 - 2027/03/31

  2. プラズママテリアルズインフォマティクスが拓く完全カイラリティ制御ナノチューブ合成

    加藤 俊顕, 岩崎 悠真, 大塚 朋廣, 是常 隆

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 基盤研究(A)

    Institution: 東北大学

    2023/04/01 - 2027/03/31

  3. Nano and atomic scale evaluation of atomic-layer materials and devices by scanning nonlinear dielectric microscopy

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (B)

    Institution: Tohoku University

    2020/04/01 - 2024/03/31

  4. 先進プラズマ活用1次元ナノカーボン材料の完全原子配列制御合成と革新的応用開拓

    加藤 俊顕, 大塚 朋廣, 澁田 靖

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 基盤研究(A)

    Institution: 東北大学

    2019/04/01 - 2023/03/31

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    研究四年計画の二年度目にあたる今年度は、1次元ナノカーボン材料の原子レベル構造制御合成と応用に向けた研究を行い以下の成果を得た。 第一に、初年度に立ち上げたその場観測プラズマCVDを用いることで、(6,5)ナノチューブの90%以上の超高純度合成を実現した。これはこれまで報告されている(6,5)ナノチューブの世界最高純度である。次年度以降では、プラズマ条件の最適化によりさらなる高純度化、及び(6,5)以外のカイラリティの選択合成を目指す。 第二に、グラフェンナノリボンの量子デバイス応用に関して、本手法で合成したグラフェンナノリボンにおいて、量子化に伴う励起準位が明確に発現することを実証した。また、通常数百ミリKでしか安定に存在しない励起準位が20K以上の高温条件でも観測可能であることを明らかとした。さらに、グラフェンナノリボン合成に用いるニッケルナノバー長とプラズマCVD合成条件を最適化することで、励起準位が観測できるグラフェンナノリボン量子ドットを高確率で合成することにも成功した。次年度以降は、高確率で励起準位観測が可能な本GNR量子ドットを用いることで、二重量子ドットを活用した量子演算の実証を試みる。 第三に、1次元ナノカーボン材料と類似の原子層物質である遷移金属ダイカルコゲナイドに関して、一般的な気相―固相相転移に加え、液相―固相相転移による結晶成長が支配的であることを実験的に明らかにした。さらに、液相―固相相転移において、液相前駆体の化学ポテンシャルが核成長に与える効果を熱力学的観点から実験的に説明することに成功した。

  5. Development of Room-Temperature Stable and Flexible Single Photon Source with Controllable Heavy-ion Doping to Atomically Thin Layered Materials

    KATO Toshiaki

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Challenging Exploratory Research

    Institution: Tohoku University

    2016/04/01 - 2019/03/31

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    We obtained following important results relating with the development of flexible single photon source with transition metal dichalcogenide (TMD). (1) Detailed diffusion dynamics of excitons in TMD have been revealed under the various temperature ranges from 4.5 to 300 K. (2) High quality and large monolayer TMD can be grown with our developed rapid cooling CVD system. (3) Effects of mild plasma treatment on the structure and properties of TMD have been investigated. Inter layer interaction can be modified by mild oxygen plasma treatment for double layer TMD. (4) Flexible and transparent solar cell has been developed with the few-layer TMD under the Schottky device configurations. The highest power conversion efficiency can be achieved within TMD-based solar cell.

  6. Fundamental Study for Atomic Engineering of Nanocarbon Materials with Advanced Plasma Processing

    KATO Toshiaki

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (B)

    Institution: Tohoku University

    2016/04/01 - 2019/03/31

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    We obtained the following important results for the structural controlled synthesis of single-walled carbon nanotubes (SWNTs) and graphene nanoribbon (GNR). (1) We have succeeded in the preferential synthesis of (6,4) SWNTs for the first time through the adjustment of surface state of catalyst nano particle. (2) The growth dynamics of suspended GNR from Ni nanobar has been revealed. Integrated synthesis of suspended GNR in wafer scale has been realized by following this growth dynamics. (3) Unique photo response, named persistent photoconductivity (PPC), has been observed in GNR. (4) Non-volatile memory operation has been demonstrated by using GNR-PPC device.

  7. Proton Beam Generation via Nanotube Accelerator

    Murakami Masakatsu

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (B)

    Institution: Osaka University

    2014/04/01 - 2017/03/31

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    Irradiating ultra intense ultrashort laser pulses on nano size cluster targets, protons are accelerated due to Coulomb explosion, the energies of which are of the order of a few MeV. In terms of the reactions between Lithium and the protons, neutrons are generated. optimizing the laser and target parameters, we maximize the coupling efficiency of neutron yields. In particular, the cluster targets are made of two or three atomic components in order to produce quasi-monoenergetc protons. The resultant neutrons are expected to have relatively low temperatures lower than a few 100 keV because the endothermic reactions.

  8. Creation of nanocarbon quantum-dot photoelectric conversion devices by intelligent plasma control

    KANEKO Toshiro

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (B)

    Institution: Tohoku University

    2014/04/01 - 2017/03/31

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    In order to create novel photoelectric conversion devices which can generate multiple excitons in the full-spectrum light region, we synthesized the n-type semiconducting carbon nanotube (CNT) which can extract the excitons from the nano-graphene or transition metal dichalcogenide (TMD), and then, fabricated the CNT/graphene・TMD photoelectric conversion devices. In the beginning, it was clarified that the nano-graphene can be formed on the CNT surface by irradiating the CNT with the methane plasma. We tried to dope nitrogen or cesium ions into the CNT by plasma ion irradiation method, and found that the n-type semiconducting CNT can be synthesized. Furthermore, we fabricated the CNT/TMD photoelectric conversion device and succeeded in photovoltaic power generation using the CNT/TMD device for the first time.

  9. Construction of nano-plasma control technique and biological function control by localized plasma irradiation

    KANEKO Toshiro, KANZAKI Makoto, TACHIKAWA Masanori, KANETAKA Hiroyasu, TAKASHIMA Keisuke

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)

    Institution: Tohoku University

    2012/06/28 - 2017/03/31

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    In order to develop a highly efficient and minimally invasive drug delivery method, the applications of plasmas generated in liquid to control of biological response have been proposed. In the beginning, it has been experimentally verified that micro-scale plasma was generated by applying a pulse voltage to coaxial type thin electrode and had the capability to enhance the cellular uptake of drugs and genes. Next, investigation of effects of separated plasma-derived stimuli on drug uptake showed that plasma-produced short-lived reactive species contribute to the drug uptake. Furthermore, it is clarified that relatively short-lived reactive species (i.e., deactivated within approximately 10 min) in plasma-irradiated saline induced physiologically relevant calcium ion influx through ion channel on cell membrane, which triggers activation of gene and drug uptake.

  10. 超高品質半導体原子層物質の革新的合成・機能化法の開発

    加藤 俊顕

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 新学術領域研究(研究領域提案型)

    Institution: 東北大学

    2014/04/01 - 2016/03/31

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    二年計画の二年目にあたる今年度は, 単層二硫化タングステン(WS2)の完全構造制御合成に特化した研究を行い以下の成果を得た. 従来のWS2を始めとした遷移金属ダイカルコゲナイド(TMD)の結晶成長手法では, 基板上の任意の位置から様々な大きさの結晶成長が行われるため, 結晶構造(位置, サイズ, 結晶性等)にばらつきが大きく, これらを制御した合成は全く実現されていないのが現状である. このような構造制御合成は, TMDの各種産業応用を見据えた場合に, 非常に重要な課題である. そこで本研究では, 単層TMDの構造制御, 具体的には成長位置, サイズ, 結晶性(単結晶, あるいは多結晶)を全て制御する完全構造制御の実現を目指して研究を行った. まず, 最大の問題である結晶成長位置を制御するためには, 核発生位置を制御することが重要である. そこで, 核発生誘発物質として金ドットを用いる手法を考案した. あらかじめ金ドットを配列した基板に対して単層WS2合成を行った結果, 金ドットを中心として高品質な単層WS2が合成されることを明らかとした. また, 本手法において, 様々な合成条件下で実験を行った結果, 単層WS2が金ドットから成長する確率が合成温度と金ドット直径に強く依存していることが明らかとなった. さらに, 単層WS2の結晶性(単結晶, あるいは多結晶)が金ドット直径とWS2の結晶サイズの比によって決定していることを見出した. また, これらの情報をもとに合成条件を最適化した結果, ウェハースケールで単層単結晶WS2を集積化合成することに世界で初めて成功した. 本研究において得られた単層単結晶WS2のウェハースケールでの集積化合成に関する成果は, 今後のWS2を用いた光電子デバイス応用に向けて極めて大きな貢献が期待できるものである.

  11. Challenge to plant immunity control by plant activator using plasma electrification droplet

    KANEKO TOSHIRO, TAKAHASHI HIDEKI, KATO TOSHIAKI

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Challenging Exploratory Research

    Institution: Tohoku University

    2014/04/01 - 2016/03/31

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    Two functions of the plasma generated reactive species for agricultural applications, the germination suppression of pathogenic conidia and the induction of defense related genes of rice seeds, are experimentally investigated. The germination suppression effect is enhanced by the water molecular fraction increase in plasma, correlating with hydroxy radical density in the plasma effluent and nitrate ion concentration in the conidia suspension. On the other hand, the gene expression degree of the defense related genes of rice seeds are significantly increased under a certain plasma effluent exposure condition and are varied simultaneously with the mixture variation of the reactive species. The difference of the reactive species correlated with the germination suppression and the defense related genes indicates the feasibility to switch those functions by the reactive species control in the plasma effluent.

  12. Development of innovative application of graphene nanoribbon with advanced plasma processing

    Kato Toshiaki

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Young Scientists (A)

    Institution: Tohoku University

    2013/04/01 - 2016/03/31

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    Wafer-scale, high-yield synthesis of suspended graphene nanoribbon arrays using a bottom-up approach is demonstrated and a promising growth model of suspended graphene nanoribbons is also established through a comprehensive study that combined experiments, molecular dynamics simulations and theoretical calculations with a phase-diagram analysis. Since the suspended graphene nanoribbon includes unique electrical and mechanical structures, our results can contribute to developing a novel application of graphene nanoribbon.

  13. Fabrication of novel molecular motor device with hybrid nanocarbon materials grown by plasma processing

    Kato Toshiaki, KANEKO TOSHIRO

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Challenging Exploratory Research

    Institution: Tohoku University

    2013/04/01 - 2016/03/31

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    Synthesis of vertically standing graphene from single-walled carbon nanotube (SWNTs) is realized through the adjustment of ion energy coming to the substrate during plasma CVD. The detailed electrical measurements reveal that the vertically standing graphene on SWNTs acts as a quantum dot for the carrier transport of SWNTs with high thermal stability. Decoration of nanoparticles on the vertically standing graphene is also realized aiming for the molecular motor application. Clear plasmonic response can also be observed from the nanoparticles decorated on the vertically standing graphene. Since the novel hybrid nanomaterial, nanoparticle decorated-vertically standing graphene/SWNTs, includes optically responsible and room temperature stable quantum dot structure, this novel material can be useful for wide variety of optoelectrical applications.

  14. Formation and application of non-equilibrium nanoscale plasma

    HATAKEYAMA Rikizo, KANEKO Toshiro, KATO Toshiaki

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Challenging Exploratory Research

    Institution: Tohoku University

    2012/04/01 - 2015/03/31

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    Nanoscale plasma generation and measurement system has been developed based on a nanoscale metallic tip and planer discharge in liquid. It is revealed that the localized discharge can be observed on the surface of micrometer scale metallic tip where carbon nanotubes (diameter: 1 nm)are coated, indicating the nanoscale plasma generation may be realized around the nanotubes. The time evolution of initial nanoscale discharge is also systematically investigated, which reveals that the direct ionization model is found to be reasonable in the primary streamer propagation.

  15. Growth of free-standing two-dimensional atomic sheet by nano-plasma processing and its applications

    KATO Toshiaki

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Young Scientists (B)

    Institution: Tohoku University

    2011 - 2012

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    Direct growth of graphene on an insulating substrate is realized by rapid-heating plasma CVD (RH-PCVD), which is originally developed by our group. For the first time, integration of graphene nanoribbons, quasi-one-dimensional structure of graphene, is also realized using Ni nanobar as catalysts for their growth. It is also revealed that the graphene nanoribbon devices show very high transistor performance (on/off ratio > 10,000).

  16. New phenomena on turbulence transport caused by electron-ion hybrid temperature gradient in magnetized plasma

    KANEKO Toshiro, KATO Toshiaki, HATAKEYAMA Rikizo

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (B)

    Institution: Tohoku University

    2010 - 2012

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    Electron temperature gradient (ETG) perpendicular to magnetic field lines is formed by superimposing high-temperature electrons of an electron cyclotron resonance (ECR) plasma upon low-temperature thermionic electrons. The formed ETG is found to excite a high-frequency fluctuation (ETG mode), and also, to stimulate a low-frequency fluctuation (drift-wave mode) excitement via multi-scale nonlinear interaction, which ultimately causes ETG mode energy to be transferred to the drift-wave mode. Furthermore, the strong E×B velocity shear is demonstrated to suppress the ETG mode and drift-wave mode, experimentally.

  17. Foundation Establishment of Plasma-Exploited Nanocarbon Biotronics

    HATAKEYAMA Rikizo, KANEKO Toshiro, KATO Toshiaki, LI Yongfeng

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (A)

    Institution: Tohoku University

    2010 - 2012

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    We have created novel atoms- or molecules-encapsulated fullerenes and carbon nanotubes, and DNA containing atoms or molecules in the fashion of extremely precise control of their inner- or surface-nanosaces by developing and exploiting plasma production and control techniques of new concept. Then, by clarifying their new functionality of electrical, magnetic, optical, and molecule recognition properties, we have demonstrated that a next-generation nanobioelectronics-device system can be constructed, which covers energy, non Si (inorganic) semiconductor, magnetic semiconductor, superconductivity, and biomedical fields, establishing the foundation of nanocarbon biotronics.

  18. Challenge to fabrication and functionalization of novel graphene by advanced plasma processing

    HATAKEYAMA Rikizo, KANEKO Toshiro, KATOU Toshiaki

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Challenging Exploratory Research

    Institution: Tohoku University

    2009 - 2011

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    A transfer-free method for growing graphene directly on a SiO2 substrate has been realized for the first time by plasma chemical vapor deposition (PCVD). Using this method, high-quality single-layer graphene sheets can be selectively grown between a Ni film and the SiO2 substrate. Systematic investigations reveal that the relatively thin Ni layer and PCVD are critical to the success of this unique method of graphene growth. Selective edge functionalization of graphene is also realized by mild plasma treatment. The electrical transport properties of graphene can be tuned from p-to n-type with our developed mild plasma treatment.

  19. Creation of Functional Carbon Nanotubes by Plasma Process Control

    HATAKEYAMA Rikizo, KANEKO Toshiro, TOHJI Kazuyuki

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research on Priority Areas

    Institution: Tohoku University

    2007 - 2011

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    In order to electrically, magnetically, and optically functionalize single-walled (SWNT) and double-walled (DWNT) carbon nanotubes, methods of diffusion plasma chemical vapor deposition (CVD) and plasma-ion injection were developed, applied, and made the best use of. As a result, we succeeded in the structure-controlled growth of SWNTsuch as narrow-chirality distributed growth, creation of various charge- /spin-exploited atoms and moleculesencapsulated SWNT and DWNT, and universal control of SWNT/DWNT semiconducting properties. Moreover, we demonstrated the principles of novel surrounding-stable nanodevices such as high-performance nagative differential resistance element, ultimate pn-junction diode, semiconductor-magnetism fusion element, electrooptic fusion (optoelectronic switch, photoelectric conversion) element, and n-type thin film transistor.

  20. イオン液体基板へのプラズマ照射による量子スピン系フラーレンの創製

    金子 俊郎, 畠山 力三, 加藤 俊顕

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 挑戦的萌芽研究

    Institution: 東北大学

    2008 - 2010

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    磁性金属を内包したフラーレン,すなわち量子スピン系フラーレンを創製することを目的として,前年度までの成果を基に,ニッケルイオンのフラーレンへの照射実験と解析を行った.本年度は特に,ニッケルイオンの照射エネルギーを制御し,ニッケル内包フラーレン(Ni@C_<60>)が高効率に形成される条件を詳細に調べた. 1.フラーレンを堆積させる基板の電位を変化させた場合でも,プラズマ空間電位は変化しないことを実測し,空間電位と基板電位との差で加速されるニッケルイオンのフラーレンへの照射エネルギーの制御が可能であることを示した. 2.合成したNi@C_<60>を含有する試料をレーザー脱離飛行時間型質量分析器で解析し,Ni@C_<60>に相当する質量数778m/zのピーク強度のニッケルイオン照射エネルギー依存性を調べたところ,Ni@C_<60>の合成効率がイオン照射エネルギーに顕著に依存し,35~40eVの場合に最大となることが明らかとなった.このイオン照射エネルギーの最適値は,第一原理計算を用いたNi@C_<60>合成のシミュレーションの結果と類似していることも明らかとなった. 3.合成された試料を硝酸と混合・撹絆し,C_<60>球殻の外側に付着しているニッケルを除去した場合にも,質量数778m/zのピークが検出されたこと,並びにニッケル外接C_<60>の合成実験を行った結果からは,質量数778m/zのピークが検出されていないことから,本研究において検出された質量スペクトルはNi外接C_<60>由来のものではなく,Ni内包C_<60>のものであると考えられる. 4.純度向上プロセスに必須のNi@C_<60>が溶解する溶媒を探索したところ,クロロナフタレンに僅かに溶解することが判明し,高速液体クロマトグラフィによってNi@C_<60>を分離精製する基盤を確立した.

  21. Electrical transport property control of single-walled carbon nanotubes by time-programmed plasma CVD

    KATO Toshiaki

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Young Scientists (Start-up)

    Institution: Tohoku University

    2008 - 2009

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    Narrow-diameter and -chirality distributed single-walled carbon nanotubes (SWNTs) are successfully grown by time-programmed diffusion plasma chemical vapor deposition (CVD). By precisely adjusting a growth time of SWNTs on the order of a few second, it is found that chirality distributions of SWNTs become fairly narrow. Furthermore, the SWNTs grown at such an initial stage are also revealed to have unique length distributions, and almost all of such narrow length distributed SWNTs are very short (~100nm).

  22. Nano-structure devices fabricated by precise position and growth control of carbon nanotubes

    NAKAMOTO Masayuki, GOTOH Yasuhito, HATAKEYAMA Rikizo, SUZUKI Sinzo, MOON Jonghyun, KATO Toshiaki, TULLER Harry

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (B)

    Institution: Shizuoka University

    2007 - 2009

  23. Exploitation of Untrodden Field of Carbon-Based Nano-Bio Research Using Innovative Plasma Technology

    HATAKEYAMA Rikizo, KANEKO Toshiro, HIRATA Takamichi

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Scientific Research (S)

    Institution: Tohoku University

    2006 - 2009

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    In order to pioneer an untrodden field of carbon-based nano-bio research, an originally developed experimental-method of injecting atoms and/or molecules into nanospaces in gas-phase plasmas was extended to the case of liquid-phase plasmas, where biomaterials can stably exist . As a result, we have realized the disposition control of various kinds of electronic states charge- and/or spin-exploited atoms, a novel class of fullerenes such as atom encapsulated C_<60>, biomolecules DNA, ionic liquids, colloids, and so on inside the nanospaces of single-walled and double-walled carbon nanotubes, succeeding in making these super-structured nanotubes display new electronic and optical properties.

  24. 気液相複合プラズマプロセスによるナノシリコン・ナノカーボン混成新奇発光場の創成

    畠山 力三, 金子 俊郎, 加藤 俊顕, 大原 渡

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 萌芽研究

    Institution: 東北大学

    2006 - 2008

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    新奇発光場として期待されるシリコン内包カーボンナノチューブの創製を目的として, 本年度はSiナノ粒子の形成効率向上を目指し, 溶液中および高気圧中のレーザーアブレーションプラズマを用いてシリコンナノ粒子の形成実験を行い, さらにカーボンナノチューブへの照射により内包を試みた. 1. アルゴンガス雰囲気下でのレーザーアブレーションによってシリコンプラズマを生成し, シリコンターゲットから10mm離れた基板上に堆積した物質を解析したところ, シリコン原子数が1〜15個程度で構成されるシリコンナノ粒子が形成されていることが明らかとなった. 2. 高いアルゴンガス圧力の下でレーザーアブレーションを行うことにより, 蛍光特性を有するシリコンナノ粒子を形成できることを明らかにした. 蛍光波長は約600nmであり, この蛍光強度は, Arガス圧力が500Pa程度で形成されたナノ粒子において最大となることが分かった. 3. 高いガス圧力の下でレーザーアブレーションにより形成したシリコンナノ粒子を, プラズマイオン照射法により単層カーボンナノチューブに照射し, 透過型電子顕微鏡により観察を行った. その結果, 単層カーボンナノチューブの内壁に沿ってシリコンと考えられる物質が存在していることが観測され, 本手法によってシリコンを内包したカーボンナノチューブを形成できることを実証した.

  25. プラズマ支援化学気相堆積法による単層カーボンナノチューブの形成及び構造制御

    加藤 俊顕

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 特別研究員奨励費

    Institution: 東北大学

    2005 - 2007

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    本年度は,プラズマの持つ新たな側面に着目した単層カーボンナノチューブ(SWNTs)の直径,カイラリティ制御に関する研究,及びその光学特性評価に関する研究を行い以下のことを明らかとした. 1.半導体的性質を持つ単層カーボンナノチューブのバンドギャップは,各グラファイトシートの螺旋度(カイラリティ)により異なるため,SWNTsからの蛍光を観測することで,試料中のカイラリティ分布を正確に評価することができる.しかしSWNTsには金属と半導体が混在するため,このような蛍光評価のためには特殊な化学的処理により個々を完全に孤立化することが必要不可欠であった.本研究では,前年度までにプラズマシース中強電場効果を利用することにより,個々が基板垂直に孤立した状態で配向成長させることに成功している.そこでこの手法により成長したSWNTsを化学処理を施さず成長したままの状態で蛍光観測を試みた結果,半導体SWNTs由来の蛍光特性が明確に観測されることを明らかとした. 2.上記の成長したままのSWNTsからの蛍光特性の経時変化を測定した結果,時間が経つにつれ蛍光強度が増大する現象が観測された.この結果は,不安定な形状の孤立垂直配向SWNTsが時間の経過と共に安定な束(バンドル)状形状へと変化することにより,バンドル間の励起子エネルギー変換が生じたことに由来すると考えられる.一本のSWNTsからの蛍光強度は非常に弱く,このことが光学的応用を妨げる主たる要因となっていたことから,このような発光強度の増大はSWNTsの光学素子応用に向けた重要な成果と言える. 3.現在一般的に用いられているいくつかのSWNTs成長方法の場合,成長温度やガス圧力,触媒条件等の詳細な制御は可能であるが,成長時間に関しては,ガス流速,及び反応場の圧力安定等の要因により数分オーダーの精度が限界であった.一方プラズマCVD法の場合,プラズマ照射時にのみSWNTsが成長し,プラズマ生成時間は電気信号によりマイクロ秒オーダーでの精密な制御が可能である.この高い成長時間制御性に着目しプラズマCVDの成長時間を精密に制御することで,直径,カイラリティ分布の極めて狭いSWNTs成長に成功した.このような成長時間に着目した研究は例が無く,プラズマCVDの新たな利点を見出し,それによりSWNTs産業応用の最も重要な課題の一つである構造ばらつきを大きく抑制できたことは,極めて重要な成果と考えられる.

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Social Activities 4

  1. Shaping atomically thin materials for mechanical nanoscale oscillators

    2016/06/17 -

  2. Shaping atomically thin materials in suspended structures

    2016/06/14 -

  3. Researchers Realize Wafer-Scale, High-Yield Synthesis of Suspended Graphene Nanoribbons

    2016/06/14 -

  4. [One day カレッジ〜大学の先生を囲む会〜] 秋田県立本荘高等学校

    2015/07/09 -

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    高校生を対象とし「プラズマが拓く最先端ナノテクノロジーの科学」という題目で大学での研究活動に関する出張講義を行った。

Media Coverage 9

  1. 未来の起源 "透明フレキシブル太陽電池の開発"

    TBS

    2017/11/19

    Type: TV or radio program

  2. Suspended Graphene Nanoribbons Shape up as Future Oscillators

    ASIA ELECTRONICS INDUSTRY

    2016/09

    Type: Newspaper, magazine

  3. LSI回路幅半分に 東北大などシート状炭素分子利用

    日経産業新聞

    2016/06/30

    Type: Newspaper, magazine

  4. Shaping Atomically Thin Materials in Suspended Structures

    EurekAlert!

    2016/06/13

    Type: Other

  5. 東北大、グラフェンナノリボンの合成・集積法を開発 -次世代デバイスに期待

    Yahoo! Japan ニュース

    2012/09/12

    Type: Other

  6. 東北大、トランジスタ技術 大きさを1/100に 炭素のナノ素材使う

    日本経済産業新聞

    2012/09/11

    Type: Newspaper, magazine

  7. グラフェンナノリボン 位置や方向を制御 電子回路 東北大が合成法開発

    日刊工業新聞

    2012/09/11

    Type: Newspaper, magazine

  8. 「グラフェンナノリボン」新合成法 超小型成形自在

    河北新報

    2012/09/11

    Type: Newspaper, magazine

  9. トランジスタ100分の1に東北大が小型化

    日本経済新聞

    2012/09/11

    Type: Newspaper, magazine

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Other 8

  1. 先進プラズマ活用ヘテロ接合グラフェンナノリボンの合成と応用

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    本研究では, 近年原子層物質として大きな注目を集めているグラフェンがさらに進化した形状のグラフェンナノリボンを対象として, 異なる幅を持つグラフェンナノリボンが軸方向に接合したヘテロ接合グラフェンナノリボンの集積化合成と光電子デバイス応用を目指すものである.

  2. 機械学習を活用したナノカーボンアトミックエンジニアリング

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    本研究では、ナノカーボン材料合成分野における機械学習の有用性を実証することを目的として、ナノカーボンの精密原子構造制御手法の開発を目指します。炭素1次元物質であるカーボンナノチューブを主な研究対象とし、機械学習と従来合成技術を融合することで、ナノチューブの物性を決定している構造因子であるカイラリティを精密制御可能な新合成システムの開発に挑戦します。

  3. ヘテロ接合原子膜の超精密構造制御合成と光電子デバイス応用

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    ヘテロ接合原子膜を合成し, 革新的光電子デバイスの創製を目指すものである.

  4. グラフェンナノリボン利用超高密度集積デバイスの開発

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    本研究では, 近年独自に開発したグラフェンナノリボン合成手法をさらに発展させることにより, トランジスタ密度2,000億個/cm2の 超高密度集積グラフェンナノリボンデバイスの実現を目指す. これにより, 既存のシリコンベースデバイスを凌駕する革新的ナノカーボンデバイス実現が期待できる.

  5. 革新的プラズマ反応によるグラフェンナノリボンの多量合成

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    近年独自に開発したグラフェンナノリボンの新規合成法を用いることにより, グラフェンナノリボンデバイスを集積合成することに成功した. 一方, 現在の手法で基板上に合成できるグラフェンナノリボンの量は極わずかであるため, グラフェンナノリボンをバルクの材料として取り扱える段階には達していない. グラフェンナノリボンの多量合成が実現でき, バルクの半導体材料として様々な分野に提供することが可能となれば, 例えば印刷法によるトランジスタ形成を行うフレキシブルエレクトロニクス分野等にも大きな貢献が可能となり, より一層の社会的インパクトを与えることが期待できる. このような背景のもと, 本研究では, グラフェンナノリボンの多量合成に特化した研究を行う.

  6. 革新的プラズマナノプロセスによる高性能n型グラフェントランジスタの創製

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    本研究では, 独自に開発したプラズマナノプロセスを活用することにより, 様々な環境下で安定に動作するn型グラフェントランジスタを創製することを目的としております. 本研究成果を応用することにより, グラフェンの極めて優れた諸特性を活用した次世代イノベーションの創成が大いに期待できると考えられます.

  7. 精密パラメータ制御拡散プラズマCVDによるグラフェンナノリボンの直接合成

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    近年, グラファイト一層のみからなる新材料“グラフェン”が世界中で大きな注目を集めている. この二次元シート構造のグラフェンは金属的性質を示すのに対し, グラフェンが一次元的なナノリボン形状(幅5 nm以下, 長さ数百nm以上)をとることで, バンドギャップが発生し金属から半導体へと電子状態が大きく変化することが明らかとなった. このグラフェンナノリボンの合成は, 一般にはグラフェンシートをナノリボン形状に切り取るトップダウン方式により行われているが, この方式では5 nm以下にリボン幅を精密制御することは困難である. ナノリボンのバンドギャップはリボン幅に反比例するため,リボン幅の精密制御は産業応用には必要不可欠な課題である. そこで本研究では, 従来のトップダウン方式ではなくプラズマを活用することにより, 原料ガスを基板上で分解し, ナノリボン形状を直接合成するボトムアップ方式により, 1 nmオーダーでのリボン幅の制御が可能なグラフェンナノリボン新規合成手法の確立を目指す. 本手法が確立することで, シリコン材料を遥かに凌ぐキャリア移動度を有するグラフェンを用いた半導体デバイス応用に関して極めて大きな貢献が期待できる.

  8. 拡散プラズマ化学気相堆積法による電気的特性の制御された単層カーボンナノチューブ形成

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    多くの産業応用が期待されている単層カーボンナノチューブであるが, 構造により金属的にも半導体的にも成りうる特徴を有しているため, 単層カーボンナノチューブの電気的特性を制御することが, つまり金属的なものと半導体的なものを選択的に形成する技術が強く望まれている. そこで本研究では, プラズマ拡散領域を活用した拡散プラズマCVD法を用いて, 半導体的特性の単層カーボンナノチューブのみを選択的に形成する手法の構築を目的に研究を遂行した.

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