Details of the Researcher

PHOTO

Naoki Inomata
Section
Graduate School of Engineering
Job title
Associate Professor
Degree

  • 博士（工学）（東北大学）

  • 修士（工学）（東北大学）

Research History 2

  • 2025/10 - Present
    Tohoku University

  • 2024/04 - Present
    Tohoku University　Graduate School of Engineering Micro/Nano-Machining Research and Education Center　Deputy director

Committee Memberships 9

  • センサ・マイクロマシンと応用システムシンポジウム論文委員会　論文委員

    2022 - Present

  • 電気学会E部門論文委員会　論文委員

    2022 - Present

  • 電気学会バイオ・マイクロシステム研究会　委員

    2021/12 - Present

  • 電気学会「機能性材料とヒト感性マイクロシステム」調査専門委員会　委員

    2021/09 - Present

  • 集積化MEMSシンポジウム委員会　論文委員

    2018 - Present

  • 集積化MEMS技術研究会運営委員会　会計(2017年～2022年)，運営企画委員(2023年～)

    2017 - Present

  • センサ・マイクロマシンと応用システムシンポジウム実行委員会　若手企画副担当(2021年)，若手企画担当(2022年)

    2021 - 2022

  • Transducers2023　Technical Program Committee

    2023 -

  • 伝熱学会特定推進研究会「細胞内における熱・物理的環境」　委員

    2020/06 -

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Professional Memberships 3

  • 日本機械学会

  • 電気学会

  • 応用物理学会

Research Interests 8

  • Biological sensing

  • Metamaterials

  • Single cell analysis

  • Micro/nanomechanical resonators

  • Thermal sensors

  • MicroTAS

  • MEMS

  • 高感度センシングシステム

Research Areas 2

  • Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Electronic devices and equipment /

  • Nanotechnology/Materials / Nano/micro-systems /

Awards 13

  1. 2025年度科学計測振興賞

    2025/09　東北大学多元物質科学研究所（科学計測振興基金）　微細加工センサと蛍光観察の融合による細胞内熱分析技術

  2. Young Researcher Award

    2024/03　田中貴金属記念財団　テラヘルツメタマテリアルを用いた生体ガスの非標識センシング技術の創出

  3. 総合研究会優秀論文発表賞

    2023/07　電気学会センサ・マイクロマシン部門　高感度マイクロサーミスタを用いた単一細胞の熱物性評価

  4. 2021年優秀論文発表

    2022/04　電気学会　微小周期構造体の周期変化時における機械振動子のQ値評価

  5. 第38回「センサ・マイクロマシンと応用システム」シンポジウム奨励賞

    2021/11　電気学会　微小周期構造体の周期変化時における機械振動子のQ値評価

  6. Special Issue on Word State-of-the-art Research on Sensors and Micromachines, Best Paper Award

    2019/08　Mechanical Resonant Magnetic Sensor Using Magnetically Induced Compressive Load from Magnetostrictive Material

  7. 総長賞

    2013/03　東北大学

  8. MNC2011 Award for Most Impressive Presentation

    2011/11　24th International Microprocesses and Nanotechnology Conference　Vacuum-packaged Resonant Thermal Sensor for Biological Cell in liquid

  9. 三浦賞

    2010/03　日本機械学会

  10. 優秀ポスター発表賞

    2009/11　化学とマイクロ・ナノシステム研究会

  11. 優秀講演賞

    2009/03　(社)計測自動制御学会

  12. 平成19年度優秀学生顕彰事業学術分野 優秀賞

    2008/12　日本学生支援機構

  13. Best Poster Award

    2007/11　2007 IEEE International Symposium on Micromechatronics and Human Sciences　Observation of carbon nanotubes in water by supplying fluorescent reagent with porous structured PDMS supports

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Papers 72

  1. Cellular Temperature Sensing Techniques Leveraging Advantages of Micro/Nano‐Thermometers Invited Peer-reviewed

    Naoki Inomata

    IEEJ Transactions on Electrical and Electronic Engineering　20　(9)　1326-1332　2025/07/03

    Publisher: Wiley

    DOI： 10.1002/tee.70091 　

    ISSN： 1931-4973

    eISSN： 1931-4981

    More details Close

    Understanding the mechanisms within cells is essential for advancing biophysical research and applications in medicine and materials science. Temperature, in particular, is a crucial physical parameter that governs the behavior of both cells and living organisms. Therefore, investigating cellular mechanisms through temperature monitoring is a rational approach. This review summarizes current methodologies for measuring the temperature of single cells, highlighting their principles, advantages, and limitations. Thermosensitive nanoparticles, which rely on the temperature dependence of fluorescent properties, enable localized temperature measurements and mapping, providing detailed insights into subcellular thermal behavior. Additionally, microfabricated thermometers, including traditional tools such as thermocouples and thermistors, as well as unique devices like mechanical resonant thermometers and gallium nitride nanomembranes, are highlighted as powerful methods for cellular temperature sensing. This review describes recent advancements in measurement techniques for temperature detection while presenting experimentally obtained cellular thermal properties that depend on the surrounding temperature. By providing an overview of current progress and open challenges, this review lays the foundation for future investigations into cellular thermodynamics, fostering a deeper understanding of the role of temperature and heat in cellular processes. © 2025 Institute of Electrical Engineers of Japan and Wiley Periodicals LLC.

  2. Fabrication and application of 3D Terahertz metamaterials with vertical multinanogaps for spectroscopic sensing Peer-reviewed

    Naoki Inomata, Tomotsugu Takahashi, Yuki Sakai, Taiyu Okatani, Yoshiaki Kanamori

    Scientific Reports　15　(1)　2025/04/20

    Publisher: Springer Science and Business Media LLC

    DOI： 10.1038/s41598-025-98611-x 　

    eISSN： 2045-2322

  3. Piezoresistivity of Epitaxial SiGe Peer-reviewed

    Y. Yamamoto, W.-C. Wen, N. Inomata, A. A. Corley-Wiciak, D. Ryzhak, C. Corley-Wiciack, Z. Zhijian, R. Sorge, B. Tillack, T. Ono

    ECS Journal of Solid State Science and Technology　14　(4)　045001-045001　2025/04/01

    Publisher: The Electrochemical Society

    DOI： 10.1149/2162-8777/adc488 　

    ISSN： 2162-8769

    eISSN： 2162-8777

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    Piezoresistivity of B- and P-doped epitaxial Si1-xGex (x = 10%–30%) is investigated to assess its application potential for thin film strain sensors. The gauge factor (GF) is calculated based on the change in resistivity to the externally induced compressive uniaxial strain along the current flow direction. In the case of B-doped SiGe, the resistivity decreases under the induced compressive strain which may be related to hole mobility enhancement, while no influence on the resistivity of the P-doped SiGe. A significant increase in the GF is observed by lowering B concentration. At the same B concentration, slightly higher GF is observed for higher Ge content. Moreover, the GF is slightly improved by lowering the SiGe growth temperature, which may be related to improved crystallinity indicated by capacitance-voltage characteristics of metal-oxide-semiconductor structure using the epitaxial SiGe on Si. These results suggest that the low-doped p-type SiGe deposited at low temperature has reasonable GF and can potentially be applied in strain sensors.

  4. Fabrication of silicon microparticle dispersion as terahertz wave refractive index control material

    Shun Wakiuchi, Taiyu Okatani, Naoki Inomata, Yoshiaki Kanamori

    Optics & Laser Technology　181　112051-112051　2025/02

    Publisher: Elsevier BV

    DOI： 10.1016/j.optlastec.2024.112051 　

    ISSN： 0030-3992

  5. Terahertz Metamaterial Composed of Subwavelength Metal Layer - Porous Insulator - Metal Layer for Humidity Sensing

    Yuki Sakai, Taiyu Okatani, Naoki Inomata, Yoshiaki Kanamori

    IEEJ Transactions on Sensors and Micromachines　145　(1)　9-10　2025/01/01

    Publisher: Institute of Electrical Engineers of Japan (IEE Japan)

    DOI： 10.1541/ieejsmas.145.9 　

    ISSN： 1341-8939

    eISSN： 1347-5525

  6. Piezo Electric Properties of Epitaxial SiGe Peer-reviewed

    Yuji Yamamoto, Wei-Chen Wen, Naoki Inomata, Agnieszka Anna Corley-Wiciak, Diana Ryzhak, Cedric Corley-Wiciak, Roland Sorge, Bernd Tillack, Takahito Ono, Z. Zhizian

    ECS Transactions　114　(2)　353-361　2024/09/27

    Publisher: The Electrochemical Society

    DOI： 10.1149/11402.0353ecst 　

    ISSN： 1938-5862

    eISSN： 1938-6737

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    Piezo resistivity of B- and P-doped epitaxial Si1-xGex (x=10-30%) is investigated to assess its application potential for thin film strain sensors. The gauge factor (GF) is calculated based on the change in resistivity to the externally induced compressive uniaxial strain along the current flow direction. In the case of B-doped SiGe, the resistivity decreases under the induced compressive strain which may be related to hole mobility enhancement, while no influence on the resistivity of the P-doped SiGe. A significant increase in the GF is observed by lowering B concentration. At the same B concentration, slightly higher GF is observed for higher Ge content. Moreover, the GF is slightly improved by lowering the SiGe growth temperature. The slight improvement may be related to improved crystallinity. These results suggest that the low-doped p-type SiGe deposited at low temperature has reasonable GF and can potentially be applied in strain sensors.

  7. 3D Bulk Metamaterials with Engineered Optical Dispersion at Terahertz Frequencies Utilizing Amorphous Multilayered Split‐Ring Resonators

    Ying Huang, Takanori Kida, Shun Wakiuchi, Taiyu Okatani, Naoki Inomata, Yoshiaki Kanamori

    Advanced Science　2024/07/08

    Publisher: Wiley

    DOI： 10.1002/advs.202405378 　

    ISSN： 2198-3844

    eISSN： 2198-3844

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    Abstract A 3D bulk metamaterial (MM) containing amorphous multilayered split‐ring resonators is proposed, fabricated, and evaluated. Experimentally, the effective refractive index is engineered via the 3D bulk MM, with a contrast of 0.118 across the frequency span from 0.315 to 0.366 THz and the index changing at a slope of 2.314 per THz within this frequency range. Additionally, the 3D bulk MM exhibits optical isotropy with respect to polarization. Moreover, the peak transmission and optical dispersion are tailored by adjusting the density of the split‐ring resonators. Compared to reported conventional approaches for constructing bulk MMs, this approach offers advantages in terms of the potential for large‐scale manufacturing, the ability to adopt any shape, optical isotropy, and rapid optical dispersion. These features hold promise for dispersive optical devices operating at THz frequencies, such as high‐dispersive prisms for high‐resolution spectroscopy.

  8. Vibration Readout of Microstructure Based on Inverse-Magnetostriction With an Integrated Hall Sensor

    Takahito Ono, Taiga Ezura, Naoki Inomata

    IEEE Sensors Journal　24　(7)　9604-9610　2024/04/01

    DOI： 10.1109/JSEN.2024.3364129 　

    ISSN： 1530-437X

    eISSN： 1558-1748

  9. Terahertz stretchable metamaterials with deformable dolmen resonators for uniaxial strain measurement

    Taiyu Okatani, Munkh Orgil Dashdeleg, Naoki Inomata, Yoshiaki Kanamori

    Optics Express　32　(7)　12024-12039　2024/03/25

    DOI： 10.1364/OE.514848 　

    eISSN： 1094-4087

  10. Tunable Fabry–Perot interferometer operated in the terahertz range based on an effective refractive index control using pitch-variable subwavelength gratings

    Ying Huang, Yangxun Liu, Taiyu Okatani, Naoki Inomata, Yoshiaki Kanamori

    Optics Letters　49　(4)　951-951　2024/02/09

    Publisher: Optica Publishing Group

    DOI： 10.1364/ol.515504 　

    ISSN： 0146-9592

    eISSN： 1539-4794

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    We constructed a tunable Fabry–Perot interferometer (FPI) by controlling the effective refractive index of pitch-variable subwavelength gratings (PV-SWGs) that were incorporated into an FP cavity. The period of the PV-SWG can be varied to change the effective refractive index and shift the optical resonant frequency of the FPI. Compared with conventional methods that tune the optical resonance by adding fillers or deforming the cavity, the proposed FPI obtained a higher transmission and quality factor (Q-factor) for the transmittance peak, and its resonant frequency can be shifted by simply stretching the PV-SWG. A peak transmittance of 0.87, a Q-factor of 34, and a frequency shift of 17 GHz were obtained by the PV-SWG-based FPI for THz incomes around the frequency of 0.303 THz. As the effective refractive index and the working frequency can be tailored by altering the geometry design of the PV-SWG, the FPI holds significance for the development of THz communications and for applications at different wave bands.

  11. A reconfigurable THz metamaterial based on microelectromechanical cantilever switches with a dimpled tip

    Ying Huang, Taiyu Okatani, Naoki Inomata, Yoshiaki Kanamori

    Optics Express　2023/08/03

    Publisher: Optica Publishing Group

    DOI： 10.1364/oe.497514 　

    eISSN： 1094-4087

  12. Micro-fabricated Si subwavelength grating for frequency-domain THz beam steering covering the 0.3–0.5 THz frequency band

    Kohei Chiba, Taiyu Okatani, Naoki Inomata, Yoshiaki Kanamori

    Optics Express　31　(17)　27147-27147　2023/07/31

    Publisher: Optica Publishing Group

    DOI： 10.1364/oe.492942 　

    eISSN： 1094-4087

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    We designed and fabricated beam steering subwavelength grating (BS-SWG) with high efficiency, wide angles, and broadband beam steering in the terahertz (THz) range. Beam steering technology in the THz range by a fixed structure and frequency sweep has to date lacked a device combining high efficiency and a wide beam steering angle. A subwavelength structure using float zone Si, a low-loss dielectric, could combine both of these aspects, but no experimental demonstration in the THz range has been performed to our knowledge. The BS-SWG was designed with an efficiency of 0.708 at 0.4 THz and beam steering angles of −72.1°–−34.8° by sweeping the incident frequency from 0.3 THz to 0.5 THz including the Beyond 5 G/6 G communication bands. An efficiency of 0.354 at 0.400 THz and beam steering angles of −74°–−34° were experimentally achieved, demonstrating the potential of high-efficiency, wide-angle beam steering for THz communications, imaging, and radar applications.

  13. A reconfigurable ladder-shaped THz metamaterial integrated with a microelectromechanical cantilever array

    Ying Huang, Taiyu Okatani, Naoki Inomata, Yoshiaki Kanamori

    Applied Physics Letters　122　(5)　051705-051705　2023/01/30

    Publisher: AIP Publishing

    DOI： 10.1063/5.0124601 　

    ISSN： 0003-6951

    eISSN： 1077-3118

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    We experimentally demonstrate a microelectromechanically reconfigurable ladder-shaped metamaterial (LS-MM) operating in a terahertz (THz) range. Ultrasmall cantilever actuators with a beam length of 14  μm are employed to independently reshape each unit cell of the LS-MM, correspondingly switching the transmission response of THz waves. The microelectromechanically driven LS-MM achieves a tuning contrast of 60.1% in transmittance at 0.78 THz and a 0.9-rad delay in the transmission phase shift at 1.35 THz through the off-to-on reconfiguration. In particular, the cantilever actuator has a high mechanical resonant frequency of 585 kHz owing to its small size. The microelectromechanically driven LS-MM advantageously offers a pathway for applications requiring fast tunable transmission modulations, such as high-resolution THz imaging and wireless communications.

  14. Measurement of cellular thermal properties and their temperature dependence based on frequency spectra via an on-chip-integrated microthermistor Peer-reviewed

    Naoki Inomata, Takumi Miyamoto, Kohki Okabe, Takahito Ono

    Lab on a Chip　2023

    Publisher: Royal Society of Chemistry (RSC)

    DOI： 10.1039/d2lc01185a 　

    ISSN： 1473-0197

    eISSN： 1473-0189

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    The thermal properties of cells were determined to depend on both temperatures and local heating frequencies using on-chip-integrated microthermistors.

  15. Quality factor control of mechanical resonators using variable phononic bandgap on periodic microstructures Peer-reviewed

    Naoki Inomata, Yuka Tonsho, Takahito Ono

    Scientific Reports　12　(1)　2022/12

    DOI： 10.1038/s41598-021-04459-2 　

    eISSN： 2045-2322

  16. Effects of temperature and doping concentration on the piezoresistive property of vanadium dioxide thin film Peer-reviewed

    Naoki Inomata, Takuto Usuda, Yuji Yamamoto, Marvin H. Zoellner, Ioan Costina, Takahito Ono

    Sensors and Actuators A: Physical　346　2022/10/16

    DOI： 10.1016/j.sna.2022.113823 　

    ISSN： 0924-4247

  17. Temperature depended resistive property of fermented soybeans (Japanese natto) as a temperature sensor material Peer-reviewed

    Naoki Inomata, Takahito Ono

    Japanese Journal of Applied Physics　61　(10)　2022/10/01

    DOI： 10.35848/1347-4065/ac8bbb 　

    ISSN： 0021-4922

    eISSN： 1347-4065

  18. Nanoengineered nanochannels for thermally ionic nanofluidic energy harvesting

    Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Megat Muhammad Ikhsan Megat Hasnan, Masaya Toda, Ioana Voiculescu, Suhana Mohd Said, Takahito Ono

    Energy Conversion and Management　264　2022/07/15

    DOI： 10.1016/j.enconman.2022.115760 　

    ISSN： 0196-8904

  19. Review of Quality-factor Controls of Micro/Nano Mechanical Resonators using Structural Methods Invited Peer-reviewed

    Naoki Inomata, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　142　(7)　127-132　2022/07/01

    Publisher: Institute of Electrical Engineers of Japan (IEE Japan)

    DOI： 10.1541/ieejsmas.142.127 　

    ISSN： 1341-8939

    eISSN： 1347-5525

  20. Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices International-journal Peer-reviewed

    Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Masaya Toda, Takahito Ono

    Scientific Reports　11　(1)　1204-1204　2021/12

    Publisher: Springer Science and Business Media LLC

    DOI： 10.1038/s41598-020-80880-3 　

    eISSN： 2045-2322

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    <title>Abstract</title>This work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film and its novel applications to micro- and nano-devices. The AZO thin film is deposited successfully by atomic layer deposition (ALD). 50 nm-thick AZO film with high uniformity is checked by scanning electron microscopy. The element composition of the deposited film with various aluminum dopant concentration is analyzed by energy-dispersive X-ray spectroscopy. In addition, a polycrystalline feature of the deposited film is confirmed by selected area electron diffraction and high-resolution transmission electron microscopy. The lowest sheet resistance of the deposited AZO film is found at 0.7 kΩ/□ with the aluminum dopant concentration at 5 at.%. A novel method employed the ALD in combination with the sacrificial silicon structures is proposed which opens the way to create the ultra-high aspect ratio AZO structures. Moreover, based on this finding, three kinds of micro- and nano-devices employing the deposited AZO thin film have been proposed and demonstrated. Firstly, nanowalled micro-hollows with an aspect ratio of 300 and a height of 15 µm are successfully produced . Secondly, micro- and nano-fluidics, including a hollow fluidic channel with a nanowall structure as a resonator and a fluidic capillary window as an optical modulator is proposed and demonstrated. Lastly, nanomechanical resonators consisting of a bridged nanobeam structure and a vertical nanomechanical capacitive resonator are fabricated and evaluated.

  21. Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures

    Masaya Toda, Hideki Hayashi, Nguyen van Toan, Naoki Inomata, Takahito Ono

    Journal of Microelectromechanical Systems　30　(4)　560-568　2021

    DOI： 10.1109/JMEMS.2021.3076791 　

    ISSN： 1057-7157

    eISSN： 1941-0158

  22. Temperature-dependence of the electrical impedance properties of sodium hydroxide-contained polyethylene oxide as an ionic liquid Peer-reviewed

    Naoki Inomata, Nguyen van Toan, Takahito Ono

    Sensors and Actuators A: Physical　316　112369-112369　2020/12

    Publisher: Elsevier BV

    DOI： 10.1016/j.sna.2020.112369 　

    ISSN： 0924-4247

  23. Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology Peer-reviewed

    Nguyen Van Toan, Truong Thi Kim Tuoi, Jinhua Li, Naoki Inomata, Takahito Ono

    Materials Research Bulletin　131　110977-110977　2020/11

    Publisher: Elsevier BV

    DOI： 10.1016/j.materresbull.2020.110977 　

    ISSN： 0025-5408

  24. Bridged resonator based on assembled Si thin wire Peer-reviewed

    Masaya Toda, Taichi Nakamura, Naoki Inomata, Nguyen Van Toan, Takahito Ono

    Journal of Micromechanics and Microengineering　30　(10)　105015-105015　2020/10/01

    Publisher: IOP Publishing

    DOI： 10.1088/1361-6439/aba6cc 　

    ISSN： 0960-1317

    eISSN： 1361-6439

  25. Compact Micro Thermal Sensor Based on Silicon Thermocouple Junction and Suspended Fluidic Channel Peer-reviewed

    Zhuqing Wang, Mitsuteru Kimura, Naoki Inomata, Jinhua Li, Takahito Ono

    IEEE Sensors Journal　20　(19)　11122-11127　2020/10/01

    Publisher: Institute of Electrical and Electronics Engineers (IEEE)

    DOI： 10.1109/jsen.2020.2997926 　

    ISSN： 1530-437X

    eISSN： 2379-9153

  26. Flexible Porous Carbon Black-Polymer Composites with a High Gauge Factor Peer-reviewed

    Yi-Te Huang, Naoki Inomata, Zhuqing Wang, Yu-Ching Lin, Takahito Ono

    Sensors and Materials　32　(7)　2527-2527　2020/07/31

    Publisher: MYU K.K.

    DOI： 10.18494/sam.2020.2853 　

    ISSN： 0914-4935

  27. Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures Peer-reviewed

    Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Takahito Ono

    Micromachines　11　(5)　523-523　2020/05/21

    Publisher: MDPI AG

    DOI： 10.3390/mi11050523 　

    eISSN： 2072-666X

  28. Diamagnetic Levitation Thermometer Peer-reviewed

    Naoki Inomata, Eiji Inomata, Takahito Ono

    IEEJ Transactions on Electrical and Electronic Engineering　15　(5)　773-774　2020/05

    Publisher: Wiley

    DOI： 10.1002/tee.23115 　

    ISSN： 1931-4973

    eISSN： 1931-4981

  29. Short-term temperature change detections and frequency signals in single cultured cells using a microfabricated thermistor Peer-reviewed

    Naoki Inomata, Ryohei Inaoka, Kohki Okabe, Takashi Funatsu, Takahito Ono

    Sensing and Bio-Sensing Research　27　100309-100309　2020/02

    Publisher: Elsevier BV

    DOI： 10.1016/j.sbsr.2019.100309 　

    ISSN： 2214-1804

    eISSN： 2214-1804

  30. Thermoelectric power battery using al<inf>2</inf>o<inf>3</inf> nanochannels of 10 nm diameter for energy harvesting of low-grade waste heat Peer-reviewed

    Nguyen Van Toan, Megat Muhammad Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, Takahito Ono

    Energy Conversion and Management　199　2019/11/01

    DOI： 10.1016/j.enconman.2019.111979 　

    ISSN： 0196-8904

  31. Fabrication of on-chip vacuum pump using a silicon nanostructure by metal-assisted chemical etching Peer-reviewed

    Naoki Inomata, Kentaro Kamakura, Nguyen Van Toan, Takahito Ono

    IEEJ Transactions on Electrical and Electronic Engineering　14　(6)　954-958　2019/06

    Publisher: Wiley

    DOI： 10.1002/tee.22887 　

    ISSN： 1931-4973

    eISSN： 1931-4981

  32. High-Gauge Factor Strain Sensor Based on Piezoelectric Aluminum Nitride Coupled to MOSFET Peer-reviewed

    Minjie Zhu, Naoki Inomata, Nobuyoshi Adachi, Atsushi Sakurai, Masanobu Nomura, Takahito Ono

    IEEE Sensors Journal　19　(10)　3626-3632　2019/05/15

    DOI： 10.1109/JSEN.2019.2895267 　

    ISSN： 1530-437X

    eISSN： 1558-1748

  33. Liquid Thermocouple Using Thermoelectric Ionic Liquids Peer-reviewed

    Naoki Inomata, Nguyen Van Toan, Takahito Ono

    IEEE Sensors Letters　3　(5)　1-4　2019/05

    Publisher: Institute of Electrical and Electronics Engineers (IEEE)

    DOI： 10.1109/lsens.2019.2912418 　

    eISSN： 2475-1472

  34. Piezoresistive strain sensor based on monolayer molybdenum disulfide continuous film deposited by chemical vapor deposition Peer-reviewed

    Minjie Zhu, Kei Sakamoto, Jinhua Li, Naoki Inomata, Masaya Toda, Takahito Ono

    Journal of Micromechanics and Microengineering　29　(5)　2019/03/15

    DOI： 10.1088/1361-6439/ab0726 　

    ISSN： 0960-1317

    eISSN： 1361-6439

  35. Low Cost and High-Aspect Ratio Micro/Nano Device Fabrication by Using Innovative Metal-Assisted Chemical Etching Method Peer-reviewed

    Nguyen Van Toan, Xiaoyue Wang, Naoki Inomata, Masaya Toda, Ioana Voiculescu, Takahito Ono

    Advanced Engineering Materials　21　(8)　2019

    DOI： 10.1002/adem.201900490 　

    ISSN： 1438-1656

    eISSN： 1527-2648

  36. Vanadium-doped molybdenum disulfide film-based strain sensors with high gauge factor Peer-reviewed

    Minjie Zhu, Jinhua Li, Naoki Inomata, Masaya Toda, Takahito Ono

    Applied Physics Express　12　(1)　2019/01/01

    DOI： 10.7567/1882-0786/aaf5c4 　

    ISSN： 1882-0778

    eISSN： 1882-0786

  37. Mechanical resonant magnetic sensor utilizing magnetically induced compressive load from magnetostrictive material Peer-reviewed

    Naoki Inomata, Taiga Ezura, Nguyen Van Toan, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　139　(1)　21-26　2019

    DOI： 10.1541/ieejsmas.139.21 　

    ISSN： 1341-8939

    eISSN： 1347-5525

  38. Resonant magnetic sensor using concentration of magnetic field gradient by asymmetric permalloy plates Peer-reviewed

    Naoki Inomata, Wataru Suwa, Nguyen Van Toan, Masaya Toda, Takahito Ono

    Microsystem Technologies　25　(10)　3983-3989　2018/12/18

    Publisher: Springer Science and Business Media LLC

    DOI： 10.1007/s00542-018-4257-8 　

    ISSN： 0946-7076

    eISSN： 1432-1858

  39. Logic gates based on electrically driven nanoelectromechanical switches

    Nguyen Van Toan, Dong Zhao, Naoki Inomata, Takahito Ono

    IEEJ Transactions on Electrical and Electronic Engineering　14　(2)　335-336　2018/10/11

    Publisher: Wiley

    DOI： 10.1002/tee.22814 　

    ISSN： 1931-4973

    eISSN： 1931-4981

  40. Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method Peer-reviewed

    Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono

    Nanotechnology　29　(19)　195301　2018/03/16

    DOI： 10.1088/1361-6528/aab1d3 　

    ISSN： 0957-4484

    eISSN： 1361-6528

  41. Knudsen pump produced via silicon deep RIE, thermal oxidation, and anodic bonding processes for on-chip vacuum pumping Peer-reviewed

    Nguyen Van Toan, Naoki Inomata, Nguyen Huu Trung, Takahito Ono

    Journal of Micromechanics and Microengineering　28　(5)　055001　2018/02/23

    DOI： 10.1088/1361-6439/aaae26 　

    ISSN： 0960-1317

    eISSN： 1361-6439

  42. Nano and microsensors for mammalian cell studies

    Ioana Voiculescu, Masaya Toda, Naoki Inomata, Takahito Ono, Fang Li

    Micromachines　9　(9)　2018

    DOI： 10.3390/mi9090439 　

    eISSN： 2072-666X

  43. Evaluation of Piezoresistive Property of Vanadium Oxide Thin Film Deposited by Sputtering Peer-reviewed

    N. Inomata, N. V. Toan, M. Toda, T. Ono

    IEEE Sensors Letters　2　(1)　2500204　2018

  44. Microfabricated temperature-sensing devices using a microfluidic chip for biological applications Peer-reviewed

    Naoki Inomata, Masaya Toda, Takahito Ono

    International Journal of Automation Technology　12　(1)　15-23　2018

    DOI： 10.20965/ijat.2018.p0015 　

    ISSN： 1881-7629

    eISSN： 1883-8022

  45. High-aspect-ratio aluminum-doped zinc oxide nanomechanical resonator Peer-reviewed

    Nguyen Van Toan, Naoki Inomata, Takahito Ono

    IEEJ Transactions on Electrical and Electronic Engineering　12　(S2)　S141-S142　2017/12

    DOI： 10.1002/tee.22561 　

    ISSN： 1931-4973

    eISSN： 1931-4981

  46. Piezoresistive property of an aluminum-doped zinc oxide thin film deposited via atomic-layer deposition for microelectromechanical system/nanoelectromenchanical system applications Peer-reviewed

    Naoki Inomata, Nguyen Van Toan, Takahito Ono

    IEEJ Transactions on Electrical and Electronic Engineering　12　(S2)　S120-S124　2017/12

    DOI： 10.1002/tee.22570 　

    ISSN： 1931-4973

    eISSN： 1931-4981

  47. Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode Peer-reviewed

    Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Yunheub Song, Takahito Ono

    MICROMACHINES　8　(10)　312-1-312-9　2017/10

    DOI： 10.3390/mi8100312 　

    ISSN： 2072-666X

  48. Geometry dependence of temperature coefficient of resonant frequency in highly sensitive resonant thermal sensors Peer-reviewed

    Naoki Inomata, Takahito Ono

    Japanese Journal of Applied Physics　56　(8)　087201　2017/08

    DOI： 10.7567/JJAP.56.087201 　

    ISSN： 0021-4922

    eISSN： 1347-4065

  49. Vanadium oxide thermal microsensor integrated in a microfluidic chip for detecting cholesterol and glucose concentrations Peer-reviewed

    Naoki Inomata, Libao Pan, Zhuqing Wang, Mitsuteru Kimura, Takahito Ono

    Microsystem Technologies　23　(7)　2873-2879　2017/07/01

    DOI： 10.1007/s00542-016-3090-1 　

    ISSN： 0946-7076

  50. Q factor enhancement of Si resonator by nonlinear damping Peer-reviewed

    Naoki Inomata, Kazuya Saito, Takahito Ono

    Microsystem Technologies　23　(5)　1201-1205　2017/05/01

    DOI： 10.1007/s00542-016-2827-1 　

    ISSN： 0946-7076

  51. Fabrication of a SiO<inf>2</inf> optical window for controlling light transmission Peer-reviewed

    Nguyen Van Toan, Suguru Sangu, Tetsuro Saito, Naoki Inomata, Takahito Ono

    Microsystem Technologies　23　(4)　919-927　2017/04

    DOI： 10.1007/s00542-016-2826-2 　

    ISSN： 0946-7076

  52. Cantilever beam temperature sensors for biological applications Peer-reviewed

    Masaya Toda, Naoki Inomata, Takahito Ono, Ioana Voiculescu

    IEEJ Transactions on Electrical and Electronic Engineering　12　(2)　153-160　2017/03/01

    DOI： 10.1002/tee.22360 　

    ISSN： 1931-4973

    eISSN： 1931-4981

  53. Vacuum packaged micro-cantilever with a magnetic particle Peer-reviewed

    Nurasyikin Mohd, Gaopeng Xue, Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　137　(8)　245-246　2017

    DOI： 10.1541/ieejsmas.137.245 　

    ISSN： 1341-8939

    eISSN： 1347-5525

  54. Microchanneled calorimetric concentration sensor for picoliter liquid samples of cytochrome c Peer-reviewed

    Masaya Toda, Ning Xia, Naoki Inomata, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　137　(1)　28-31　2017

    DOI： 10.1541/ieejsmas.137.28 　

    ISSN： 1341-8939

    eISSN： 1347-5525

  55. Glass capillaries based on a glass reflow into nano-trench for controlling light transmission Peer-reviewed

    Nguyen Van Toan, Suguru Sangu, Naoki Inomata, Takahito Ono

    Microsystem Technologies　22　(12)　2835-2840　2016/12/01

    DOI： 10.1007/s00542-015-2607-3 　

    ISSN： 0946-7076

  56. Temperature-depended mechanical properties of microfabricated vanadium oxide mechanical resonators for thermal sensing Peer-reviewed

    Naoki Inomata, Libao Pan, Masaya Toda, Takahito Ono

    Japanese Journal of Applied Physics　55　(3)　0.7201　2016/03

    DOI： 10.7567/JJAP.55.037201 　

    ISSN： 0021-4922

    eISSN： 1347-4065

  57. Sensitive thermal microsensor with pn junction for heat measurement of a single cell Peer-reviewed

    Taito Yamada, Naoki Inomata, Takahito Ono

    Japanese Journal of Applied Physics　55　(2)　027001　2016/02

    DOI： 10.7567/JJAP.55.027001 　

    ISSN： 0021-4922

    eISSN： 1347-4065

  58. Parametrically actuated resonant micromirror using stiffness tunable torsional springs Peer-reviewed

    Yusuke Kawai, Jin Hyeok Kim, Naoki Inomata, Takahito Ono

    Sensors and Materials　28　(2)　131-139　2016

    DOI： 10.18494/SAM.2016.1163 　

    ISSN： 0914-4935

  59. Highly sensitive thermometer using a vacuum-packed Si resonator in a microfluidic chip for the thermal measurement of single cells Peer-reviewed

    Naoki Inomata, Masaya Toda, Takahito Ono

    Lab on a Chip　16　(18)　3597-3603　2016

    DOI： 10.1039/c6lc00949b 　

    ISSN： 1473-0197

    eISSN： 1473-0189

  60. Si-Based Micro-Nanomechanics for Ultimate Sensing Peer-reviewed

    T. Ono, M. Toda, Y.-J. Seo, N. Inomata

    ECS Transactions　66　(5)　123-129　2015/05/15

    Publisher: The Electrochemical Society

    DOI： 10.1149/06605.0123ecst 　

    ISSN： 1938-6737

    eISSN： 1938-5862

  61. Fabrication of nano-gap structures based on plastic deformation of strained Si springs by stiction effects Peer-reviewed

    Masaya Toda, Atsushi Yokoyama, Nguyen Van Toan, Naoki Inomata, Takahito Ono

    Microsystem Technologies　21　(3)　649-654　2015

    DOI： 10.1007/s00542-014-2182-z 　

    ISSN： 0946-7076

    eISSN： 1432-1858

  62. High Aspect Ratio SiO2 Capillary Based On Silicon Etching and Thermal Oxidation Process for Optical Modulator Peer-reviewed

    N. V. Toan, S. Sangu, T. Saitoh, N. Inomata, T. Ono

    International Journal of Chemical, Nuclear, Materials and Metallurgical Engineering　9　(5)　666-671　2015

  63. Temperature changes in brown adipocytes detected with a bimaterial microcantilever Peer-reviewed

    Masaaki K. Sato, Masaya Toda, Naoki Inomata, Hisataka Maruyama, Yuko Okamatsu-Ogura, Fumihito Arai, Takahito Ono, Akihiko Ishijima, Yuichi Inoue

    Biophysical Journal　106　(11)　2458-2464　2014/06/03

    DOI： 10.1016/j.bpj.2014.04.044 　

    ISSN： 0006-3495

    eISSN： 1542-0086

  64. Synthesis of cubic boron nitride films on Si tips via chemical vapor deposition and the field emission properties Peer-reviewed

    Masanori Kobayashi, Hidetoshi Miyashita, Naoki Inomata, Takahito Ono

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　32　(2)　2014/03

    DOI： 10.1116/1.4843075 　

    ISSN： 1071-1023

  65. Thermal sensor probe with a Si resonator in a cavity for thermal insulation Peer-reviewed

    Naoki Inomata, Takahito Ono

    Japanese Journal of Applied Physics　52　(11 PART 1)　117201　2013/11

    DOI： 10.7567/JJAP.52.117201 　

    ISSN： 0021-4922

    eISSN： 1347-4065

  66. Pico calorimeter for detection of heat produced in an individual brown fat cell Peer-reviewed

    Naoki Inomata, Masaya Toda, Masaaki Sato, Akihiko Ishijima, Takahito Ono

    Applied Physics Letters　100　(15)　154104　2012/04

    DOI： 10.1063/1.3701720 　

    ISSN： 0003-6951

  67. Investigation of the Resistance Dependence on Temperature of Single Carbon Nanotube in Different Environments Peer-reviewed

    Naoki Inomata, Fumihito Arai

    JAPANESE JOURNAL OF APPLIED PHYSICS　50　(12)　125101　2011/12

    DOI： 10.1143/JJAP.50.125101 　

    ISSN： 0021-4922

    eISSN： 1347-4065

  68. Omnidirectional Actuation of Magnetically Driven Microtool for Cutting of Oocyte in a Chip Peer-reviewed

    Naoki Inomata, Takehito Mizunuma, Yoko Yamanishi, Fumihito Arai

    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS　20　(2)　383-388　2011/04

    DOI： 10.1109/JMEMS.2010.2100028 　

    ISSN： 1057-7157

    eISSN： 1941-0158

  69. Bimorph cantilevers actuated by focused laser from the side Peer-reviewed

    Masaya Toda, Naoki Inomata, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　131　(9)　327-331　2011

    DOI： 10.1541/ieejsmas.131.327 　

    ISSN： 1341-8939

    eISSN： 1347-5525

  70. Two DOF Magnetically Driven Microtool for Soft Peeling of Zona Pellucida Peer-reviewed

    Y. Yamanishi, T. Kawahara, T. Iyanagi, M. Hagiwara, T. Mizunuma, N. Inomata, S. Kudo, F. Ara

    Journal of Robotics and Mechatronics　22　(5)　623-630　2010

  71. Manipulation and Observation of Carbon Nanotubes in Water Under an Optical Microscope Using a Microfluidic Chip Peer-reviewed

    Naoki Inomata, Yoko Yamanishi, Fumihito Arai

    IEEE TRANSACTIONS ON NANOTECHNOLOGY　8　(4)　463-468　2009/07

    DOI： 10.1109/TNANO.2008.2012346 　

    ISSN： 1536-125X

    eISSN： 1941-0085

  72. ポーラス構造PDMS担体を用いた蛍光試薬供給によるカーボンナノチューブの液中観察 Peer-reviewed

    猪股直生, 山西陽子, 大川原竜人, 林 育菁, 新井史人

    日本機械学会論文集(C編)　74　(743)　199-206　2008

    DOI： 10.1299/kikaic.74.1879 　

Show all ︎Show first 5

Misc. 38

  1. Piezo Resistivity of Epitaxial SiGe Peer-reviewed

    Yuji Yamamoto, Naoki Inomata (Co-first-author, Daiki Udagawa, Henriette Tetzner, Felix Reichmann, Wei-Chen Wen, Ber, d Tillack, Junichi Murota, Takahito Ono

    Proceedings of 3rd Joint International Conference on Silicon Epitaxy and Heterostructures & International SiGe Technology and Device Meeting (ICS-ISTDM2023)　S6 -14-S6 -15　2023/05

  2. Integration of Magnetostrictive Microsensor With Hall Element for Microstructure Resonant Detection Peer-reviewed

    Taiga Ezura, Naoki Inomata, Takahito Ono

    2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)　418-422　2021/06/20

    Publisher: IEEE

    DOI： 10.1109/transducers50396.2021.9495689 　

  3. Temperature Sensor Using Two Thermoelectric Liquid Electrolytes in Microfluidic Channels Peer-reviewed

    Naoki Inomata, Nguyen Van Toan, Takahito Ono

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII　2166-2169　2019/06

    DOI： 10.1109/TRANSDUCERS.2019.8808737 　

  4. 磁歪材料の電解めっき成膜とそのひずみセンサ応用

    江面大河, 猪股直生, 戸田雅也, 古屋泰文, 小野崇人

    電気学会全国大会講演論文集(CD-ROM)　2019　ROMBUNNO.3‐172　2019/03/01

  5. Evaluation of piezoresistive property of vanadium oxide thin film Peer-reviewed

    Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2018-January　1044-1047　2018/04

    DOI： 10.1109/MEMSYS.2018.8346738 　

    ISSN： 1084-6999

  6. Resonant Magnetic Sensor using a Magnetostrictive Material Peer-reviewed

    34　4p　2017/10/31

    Publisher: Institute of Electrical Engineers of Japan

  7. パーマロイコンセントレータによる磁場勾配を用いた共振型磁気センサ Peer-reviewed

    諏訪亘, 猪股直生, 戸田雅也, 小野崇人

    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)　34　01pm4-PS-146-1-01pm4-PS-146-2　2017/10/24

  8. High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing Peer-reviewed

    Naoki Inomata, Takahito Ono

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems　970-973　2017/07/26

    DOI： 10.1109/TRANSDUCERS.2017.7994212 　

  9. Resonant magnetic sensor using magnetic gradient field formed by permalloy concentrator Peer-reviewed

    Wataru Suwa, Naoki Inomata, Masaya Toda, Takahito Ono

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems　822-825　2017/07/26

    DOI： 10.1109/TRANSDUCERS.2017.7994175 　

  10. パーマロイ磁気コンセントレータによる磁場勾配を用いた共振型磁気センサ Peer-reviewed

    諏訪亘, 猪股直生, 戸田雅也, 小野崇人

    電気学会全国大会講演論文集(CD-ROM)　2017　ROMBUNNO.3‐132　2017/03/05

  11. Geometry dependence of temperature coefficient of resonant frequency for resonant thermal sensors Peer-reviewed

    Naoki Inomata, Takahito Ono

    29th International Microprocesses and Nanotechnology Conference (MNC2016)　9C-3-2　2016/11

  12. On-Chip micro Knudsen pump having the dense nanochannels formed by Reactive Ion Etching

    2016　(9)　11-13　2016/06/29

    Publisher: 電気学会

  13. 141 On-Chip micro Knudsen pump manufactured by Reactive Ion Etching

    suwa Wataru, inomata Naoki, ono Takahito

    日本機械学会東北支部第51期総会・講演会講演論文集　2016　(51)　79-80　2016

    Publisher: The Japan Society of Mechanical Engineers

  14. Thermal microsensor with pn junction diode for heat measurement of a single cell

    32　1-4　2015/10/28

    Publisher: Institute of Electrical Engineers of Japan

  15. Biosensor using VOx microresistance thermometer

    32　4p　2015/10/28

    Publisher: Institute of Electrical Engineers of Japan

  16. 酸化バナジウムを用いた共振型マイクロ熱量センサ

    猪股 直生, 潘 立葆, 戸田 雅也, 小野 崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　32　30am2-PS-66-1-30am2-PS-66-4　2015/10/28

    Publisher: Institute of Electrical Engineers of Japan

  17. J2220301 VO_2 Thermal Micro Sensor for Healthcare Monitoring

    PAN Libao, INOMATA Naoki, ONO Takahito

    日本機械学会2015年度年次大会講演論文集　2015　"J2220301-1"-"J2220301-4"　2015/09/13

    Publisher: The Japan Society of Mechanical Engineers

    More details Close

    Biomolecules monitoring methods has been studied for the management of diseases like diabetes or hyperlipidemia for several decades. In this study, we report on a novel high sensitive electrochemical therml micro sensor based on VO_2 for an enzymatic healthcare monitoring system. In the process of glucose oxidation with the catalysis of enzyme, heat will be generated, which can be measured by a high sensitive thermal micro sensor so that the concentration of glucose solution can be calculated. A VO_2 thin film is used as a material of thermal micro sensor due to its high temperature coefficient of resistance of 15000 ppm/℃. The VO_2 thermal micro sensor is fabricated by the technology of MEMS with high temperature resolution of 0.299 mV/√Hz. This sensor has been utilized for the estimation of glucose concentration as an example. The result of glucose estimation indicates that the time rate of the output signal has positive correlation with glucose solution concentraitons.

  18. 非線形減衰を用いたSi振動子のQ値向上

    猪股 直生, 斎藤 和也, 戸田 雅也, 小野 崇人

    日本機械学会2015年度年次大会講演論文集　15　(1)　J2210303-1-J2210303-2　2015/09/13

  19. Sub-nanowatt thermal detection device based on a Si double-supported resonator for single cells Peer-reviewed

    Naoki Inomata, Masaya Toda, Takahito Ono

    MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences　69-71　2015

  20. Micro/Nano-mechanical Resonators for Ultimate Sensing Invited Peer-reviewed

    Takahito Ono, Naoki Inomata, Masaya Toda

    The Asia-Pacific Conference on Transducers and Micro/Nano Technologies　7　1　2014/06/29

  21. CANTILEVERS FOR NANOSENSING: CALORIMETRY FOR A LIVING CELL Invited

    Masaya Toda, Naoki Inomata, Masaaki Sato, Akihiko Ishijima, Takahito Ono

    Proceedings of 2013 Nanomechanical Sensing　35-36　2013/05/02

  22. J026032 Resonant thermal sensor isolated in vacuum for biological samples

    INOMATA Naoki, TODA Masaya, ONO Takahito

    日本機械学会2013年度年次大会講演論文集　2013　(0)　_J026032-1-_J026032-3　2013

    Publisher: 一般社団法人 日本機械学会

    More details Close

    We have developed a resonant thermal sensor system for biological samples. The measurement principle relies on the resonant frequency shift of the resonant thermal sensor due to the temperature change. Brown fat cells, which are frequently used for metabolism researches, attract our interests to solve obesity, metabolic syndrome, and so on. To measure its thermal characteristics in single cell level, a heat loss to surrounding environments and a vibration damping should be solved when resonant thermal sensors are immersed in water. To solve these problems and realize highly sensitive thermal measurements, a resonant thermal sensor was partly placed in vacuum, and another end was in microchannel as a sample stage in a microfluidic chip. They were connected physically and thermally by a heat guide. The heat from the cell is conducted to the sensor via the heat guide, and measured. A fabricated device was evaluated by using laser Doppler vibrometer. The thermal resolution of the device was 5.2 pJ. The single brown fat cell was set on the sample stage, and generated heats were measured with and without stimulation. With the stimulation, pulsed heats were observed, which have not observed in bulk measurements. With the stimulation, gradual and long heat generations were caused similarly with bulk measurements. We have succeeded in detecting the heat from single brown fat cell by using the fabricated device.

  23. Pico-calorimeter using a resonant thermal sensor

    Naoki Inomata, Takahito Ono

    The 4th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013)　P-01-P-01　2013/01

  24. Resonant thermal sensor for a living cell in liquid

    Naoki Inomata, Masaya Toda, Masaya Toda, Masaaki Sato, Akihiko Ishijima, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　108-111　2012/05/07

    DOI： 10.1109/MEMSYS.2012.6170105 　

    ISSN： 1084-6999

  25. Vacuum-packaged Resonant Thermal Sensor for Biological Cell in liquid Invited Peer-reviewed

    N. Inomata, M. Toda, T. Ono

    The 56th International Conference on Electron, Ion, and Photo Beam Technology and Nanofabricatiom　2012

  26. Microchanneled resonant heat sonsor for a living cell

    Masaya Toda, Tomoyuki Otake, Naoki Inomata, Takahito Ono

    Microprocess and Nanotechnology Conference　27P-11-95.　2011/10

  27. 液中における細胞熱計測のための真空封止マイクロカンチレバー型熱量センサ

    Naoki Inomata, Masaya Toda, Takahito Ono

    センサ・マイクロマシンと応用システムシンポジウム　28　617-622　2011/09

  28. Ultra-high sensitive bimorph cantilever for heat sensing

    Masaya Toda, Naoki Inomata, Takahito Ono

    第27回センサ・マイクロマシンと応用システムシンポジウム論文集　27　371-374　2010/10

  29. OMNI-directional actuation of magnetically driven microtool for enucleation of oocyte Peer-reviewed

    Fumihito Arai, Naoki Inomata, Shogo Kudo, Yoko Yamanishi, Takehito Mizunuma

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　1167-1170　2010

    DOI： 10.1109/MEMSYS.2010.5442419 　

    ISSN： 1084-6999

  30. 2A2-L10 Laser Driven Robot-on-a-chip (LDRoC) : Part 3: Design and Fabrication of Tethered Microtool

    INOMATA Naoki, MARUYAMA Hisataka, ARAI Fumihito

    2009　"2A2-L10(1)"-"2A2-L10(4)"　2009/05/25

    Publisher: The Japan Society of Mechanical Engineers

    More details Close

    In this paper, we fabricated a tethered microtool and a microheater by using the metal material and manipulated the tethered microtool by optical tweezers. Conventional microtools are made of polymer materials. Although polymer microtool has good characteristics such as transparency, mass productivity by photolithography, application of the microtool was limited such as mechanical manipulations of small object and local measurement using indicators. This metal microtool was designed to tethered shape to be fixed to the substrate, and has high heat transfer and high electrical conductivity to achieve various functions such as local temperature stimulus, local electrical stimulus and mechanical stimulus. However, the metal microtool cannot be manipulated by optical tweezers directly since metal is non-transparent. We employed the gel-microtool to manipulate the metal microtool indirectly by adhering the gel-microtool to the metal microtool. We analyzed and fabricated the microheater. We demonstrated the manipulation of the metal microtool with the gel-microtool by optical tweezers.

  31. 2P1-L13 Local temperature measurement on microfluidic chip having world-to-chip interface

    KATO Takahiro, INOMATA Naoki, MARUYAMA Hisataka, ARAI Fumihito

    2009　"2P1-L13(1)"-"2P1-L13(3)"　2009/05/25

    Publisher: The Japan Society of Mechanical Engineers

    More details Close

    We proposed a microfluidic chip having a world-to-chip interface to insert a cantilever as a high-sensitive sensor from outside for multi-scale environment measurement in a chip. There are several techniques for on-chip measurement employing probe sensor, integrated microsensor, and fluorescence method. Each technique has advantages to other methods. Multi-scale environment measurement is achieved by combining these methods. A probe sensor is expected to have high sensitivity and high positioning accuracy rather than the other methods. However, the probe cannot be employed for sensing inside a closed space of the microfluidic chip easily. To employ these methods in the chip simultaneously, probe sensor has to be inserted into the chip. Here, we proposed a microfluidic chip having a world-to-chip interface to insert a probe sensor without leakage of the solution. The edge of the chip is open to insert the probe sensor. Solution around the interface was drawn to the drain ports to avoid leakage of the solution at the interface so as to be used on the inverted microscope. We demonstrated insertion of the cantilever into the chip through the interface and confirmed that flow was not disturbed by the cantilever.

  32. On-chip magnetically driven micro-robot for enucleation of oocyte Peer-reviewed

    Naoki Inomata, Takehito Mizunuma, Yoko Yamanishi, Shogo Kudo, Fumihito Arai

    20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science　493-498　2009

    DOI： 10.1109/MHS.2009.5351824 　

  33. Microfluidic chip with world-to-chip interface for temperature detection in micro-nanoscale Peer-reviewed

    Naoki Inomata, Hisataka Maruyama, Takahiro Kato, Fumihito Arai

    20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science　456-461　2009

    DOI： 10.1109/MHS.2009.5351965 　

  34. Observation of Carbon Nanotubes in Water by Supplying Fluorescent Reagent from Porous Structured PDMS Supports

    INOMATA Naoki, YAMANISHI Yoko, OOKAWARA Ryuto, LIN Yu-Ching, ARAI Fumihito

    Transactions of the Japan Society of Mechanical Engineers C　74　(743)　1879-1886　2008/07/25

    Publisher: The Japan Society of Mechanical Engineers

    ISSN： 0387-5024

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    We demonstrate visualization of carbon nanotubes (CNTs) in water with fluorescent microscopy by using fluorescent dye background conditions that display a reversal contrast. We could observe CNTs under a constant excitation light for more than ten minutes. We have developed novel chip system to supply fluorescence dye with appropriate concentration. The salt reaching method has been applied to PDMS (poly-dimethyl siloxane) in order to obtain porous structures. We have found that this porous structure provides homogeneous concentration of fluorescence dye by putting it in water and found out porous-PDMS support with larger porous gives a higher and steady concentration. The fine control of the concentration of the fluorescence dye in the microchannel has been achieved with a controlled speed of flow and mixture by means of a micro magnetic stirrer. Dielectrophoretic force was used for CNTs deposition onto electrodes that consist of transparent conductive film. It was confirmed that the proposed microfluidic system controls the concentration of fluorescent dye for a long term observation in water and is useful to apply CNTs to several biological application fields.

  35. Multiscale Environmental Measurement by Biochip with World-to-chip Interface

    加藤貴広, 猪股直生, 佐久間臣耶, 山西陽子, 丸山央峰, 新井史人

    日本ロボット学会学術講演会予稿集(CD-ROM)　26th　2008

  36. Multi scale temperature measurement on microfluidic chip Peer-reviewed

    Naoki Inomata, Hisataka Maruyama, Takahiro Kato, Fumihito Arai

    2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008　21-26　2008

    DOI： 10.1109/MHS.2008.4752416 　

  37. 2A1-O06 On-chip cell manipulation systems : Part4 : On-demand supply of fluorescence reagent

    Arai Fumihito, Inomata Naoki, Yamanishi Yoko, Ookawara Ryuto, Lin Yu-Ching

    2007　"2A1-O06(1)"-"2A1-O06(4)"　2007/05/11

    Publisher: The Japan Society of Mechanical Engineers

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    We demonstrate visualization method of carbon nanotubes (CNTs) in water with fluorescent microscopy through quenching effect that cause a decrease of fluorescent intensity around CNTs. Reversal contrast in fluorescence imaging of the CNTs was observed in fluorescent dye solution. The novel on-demand and on-chip control system of concentration of fluorescent dye has been developed in order to adjust appropriate concentration to observe quenching effect of CNTs. We could observe CNTs under a constant excitation light for more than ten minutes. Dielectrophoretic force was used for CNTs deposition onto electrodes that consist of transparent conductive film. The observation using a scanning electron microscope revealed that CNTs deposited onto electrodes were observed with fluorescent microscopy. Using four gage method, electrical resgistance of CNTs were measured. It can be applied for biological sensing devises with nanomanipulation.

  38. Observation of carbon nanotubes in water by supplying fluorescent reagent with porous structured PDMS supports Peer-reviewed

    Fumihito Arai, Naoki Inomata, Ryuto Ookawara, Yoko Yamanishi, Yu-Ching Lin

    2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS　231-236　2007

    DOI： 10.1109/MHS.2007.4420858 　

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Books and Other Publications 5

  1. 生き物と温度の辞典

    猪股 直生

    朝倉書店　2025/11

    ISBN: 9784254172003

  2. 細胞と温度～細胞の温度計測と10^5ギャップ問題の今～

    猪股 直生

    化学とマイクロ・ナノシステム学会 会誌　2022/10

  3. マイクロシステムにおけるナノテクノロジー活用

    猪股 直生

    ナノ学会会報　2021/10

  4. 微細加工温度センサを用いた細胞の温度計測

    猪股 直生

    月刊「細胞」　2020/12

  5. 温度で迫る細胞のメカニズム―超高感度センサで単一細胞の発熱を測る―

    猪股 直生

    電気学会誌　2020

Presentations 11

  1. Cellular Thermophysiology Analysis via Microfabricated On-chip Platform Invited

    Naoki Inomata

    248th ECS Meeting　2025/10/15

  2. Unique thermal behaviors of single cells revealed by microfabricated thermometer Invited

    Naoki Inomata

    第63回日本生物物理学会年会　2025/09/25

  3. Microfabricated Thermometers: Focusing on Cellular Measurement Applications Invited

    Naoki Inomata

    The 5th International Conference on Engineering, Physics, MEMS-Biosensors and Applications (5th ICEBA 2024)　2024/11

  4. 高感度センシングと最近の動向 Invited

    猪股 直生

    有機機能材料のリソグラフィ加工コンソーシアム・53回定例会　2024/10

  5. Highly sensitive thermometers and its applications for cellular measurements Invited

    Naoki Inomata

    the 11th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT2024)　2024/06

  6. ⾼感度および時間分解能を活かした温度計測から導かれる細胞の熱特性と周波数特性 Invited

    猪股 直生

    量子生命科学会第5回大会　2023/05

  7. マイクロ温度センサと細胞計測への応用 Invited

    猪股 直生

    第34 回バイオエンジニアリング講演会　2022/06

  8. マイクロ温度センサを用いた細胞の温度計測 Invited

    猪股 直生

    第 36 回プラズマ新領域研究会「計測技術の基礎と最新動向」　2022/02

  9. 微細加工温度センサを用いた細胞の温度計測 Invited

    猪股 直生

    Biothermology Workshop 2020　2020/12

  10. Micro/Nano-mechanical Resonators for Ultimate Sensing Invited

    Takahito Ono, Naoki Inomata, Masaya Toda

    The Asia-Pacific Conference on Transducers and Micro/Nano Technologies　2014/06/29

  11. Vacuum-packaged Resonant Thermal Sensor for Biological Cell in liquid Invited

    N. Inomata, M. Toda, T. Ono

    N. Inomata;M. Toda;T. Ono　2012/05

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Industrial Property Rights 7

  1. センサシステム、物理量検出方法、振動装置、及び、物理量検出装置

    猪股 直生

    Property Type: Patent

  2. 熱物性推定装置、及び、熱物性推定方法

    猪股 直生

    Property Type: Patent

  3. 温度センサ及びその製造方法

    特許7164177

    Property Type: Patent

  4. 酸化バナジウムを用いた熱量センサ

    特許6598361

    Property Type: Patent

  5. 熱量センサおよびそれを用いた熱量検出装置並びに熱量センサの製造方法

    特許5754693

    Property Type: Patent

  6. 自動透明帯除去装置

    Property Type: Patent

  7. 磁気駆動マイクロツールの駆動機構およびマイクロデバイス

    Property Type: Patent

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Research Projects 6

  1. 細胞内熱ダイナミクスの解明

    System: 戦略的創造研究推進事業さきがけ

    Institution: 東北大学

    2023/04 -

  2. 細胞内伝熱機構解明のための超高分解能温度センサシステム

    猪股 直生

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 基盤研究(B)

    Institution: 東北大学

    2020/04/01 - 2023/03/31

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    温度は生体内や細胞内機能発現のトリガーとして様々な生理機能や生体リズムに影響を与え，生体の恒常性維持と密接な関わりがある．そのため，生体にとって温度は最も重要なパラメータのひとつである．しかし，温度は生命の維持や細胞の機能発現に不可欠であるにも関わらず，それらと密接に関わりのある細胞の熱物性や熱機能の詳細は未だに明らかになっていない．近年，細胞の熱物性は，水では近似できないこと，内部の温度分布が一様ではないこと等，様々な知見が得られている．本研究では，高温度分解能(数u℃)かつ高応答性(サブミリ秒)を有し，培養細胞を計測対象とする温度センサデバイス・システムの実現を通して，細胞自身が発する温度信号や細胞の温度挙動を定量的に計測することを目指し，細胞の温度特性と細胞内伝熱機構を解明する．本年度の実績概要は次の通りである． <BR> 【デバイス上での細胞培養】：一般的な細胞の信号計測で行われている市販の培養用シャーレ上で細胞培養プロトコルをもとに，デバイス上での細胞培養プロトコルを検討し，デバイス上でも細胞の培養が可能であることを実際に確認した． 【細胞の温度信号計測】：作製したデバイスを用いた細胞の温度計測に取り組んだ．最終的に，低温，室温，最適温，高温の各温度帯域における培養細胞群中の単一の細胞から自発的に得られる温度信号を計測し，解析を行った．さらに，培養細胞に対して，顕微鏡上の対物レンズを介して，局所的に赤外線レーザを照射し，外部刺激としての加熱が可能であることを確認した． 【温度センサの高感度化】：共振センサにおける温度センシングの高感度化を目指し，周期性微小構造体の選択的振動伝搬特性を活かした共振センサの振動スペクトルの能動的コントールに関する研究を行った．

  3. Sub-pico Watt high sensitive thermal measurement system for single cells

    Inomata Naoki

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Young Scientists (A)

    Institution: Tohoku University

    2017/04/01 - 2020/03/31

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    A thermal measurement deice with high-temperature resolution for single cultured cells were developed. The device had vanadium oxide thermistors as temperature sensors, suspended membrane structure under the sensors for thermal insulation, and a chamber for cell culturing. The device was fabricated using microfabrication techniques. The temperature signals from the cells cultured on the device were measured. The gradual and long-time temperature increase was observed by chemical stimulating. Also, the signals at the environment temperature of 25 and 37°C were compared, resulting in the larger temperature fluctuation at 37°C. We succeeded in developing the target device and measuring the temperature signals of single cultured cells.

  4. Picowatt thermal sensor using nanostructure

    Inomata Naoki

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Young Scientists (B)

    Institution: Tohoku University

    2015/04/01 - 2017/03/31

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    The fabrication process of VOx mechanical resonators was established: then, the VOx resonator was fabricated and evaluated the temperature coefficient of resonant frequency (TCRF) and Q factor (TCRF:-1308 ppm/K, Q: approximately 500). To obtain the high TCRF which is important parameter for high thermal sensitivity, a microfluidic chip thermal detection device having Si double-supported resonator was fabricated and evaluated (TCRF: 1900 ppm/K, thermal resolution: 79uK&1.90nW). The thermal measurements of a brown fat cell was succeeded using this device. Also, the thermal detection device using a VOx microthermistor was fabricated and evaluated (thermal resolution: 0.3mK/√Hz). The device could detect the heat generation of glucose and cholesterol solutions. The minimum detectable concentration was 30，15uM/√Hz in glucose and cholesterol, respectively.

  5. sub-picojoule thermal sensor

    INOMATA Naoki

    Offer Organization: Japan Society for the Promotion of Science

    System: Grants-in-Aid for Scientific Research

    Category: Grant-in-Aid for Research Activity Start-up

    Institution: Tohoku University

    2013/08/30 - 2015/03/31

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    For highly thermal sensitivity, downsizing of the sensor was required. pn junction, which is capable of downsizing by microfabrication techniques, was employed as a measurement principle due to its temperature dependence of electrical resistance. The fabrication process to enclose a pn junction based thermal sensor in a vacuum area in a microfluidic chip was established, and the characteristics of the fabricated device was evaluated. The thermal resolution of the device was 31.3 nJ. Further downsizing is possible by using electron beam lithography, and the thermal resolution could be improved more than 1000 times. In this research, the feasibility of the thermal device having pico-Joule thermal resolution was indicated.

  6. カーボンナノチューブを用いた単一生体分子応答計測

    猪股 直生

    Offer Organization: 日本学術振興会

    System: 科学研究費助成事業

    Category: 特別研究員奨励費

    Institution: 東北大学

    2010 - 2012

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    本年度の目的は,プローブ型センサの開発であった.共振熱センサの一部を真空下に置き,周囲への熱損失と振動減衰を防止することで高感度化が可能であることをマイクロ流体チップ型の熱センサデバイスで既に実証した.マイクロ流体チップ型デバイスでは,マイクロ流路に細胞を流し,偶発的に捕捉された細胞の熱計測を行う.そのため,培養シャーレ上の特定の細胞の熱計測は非常に難しい.2次元空間上の特定の領域の熱計測に適した例として,走査型熱顕微鏡等に用いられるプローブ型熱センサが挙げられる従来のプローブ型センサで高感度計測を行うには,周囲への熱損失を避けるため真空環境が求められるしかし,液体の試料や液体環境を求められる試料の熱計測は,真空中では行うことはできない.上記原理をプローブ型センサに適応することで,従来とは異なり,真空下でなくとも高感度で液体環境を要する試料の熱を高感度で計測できるようになり,かつ,2次元空間上の特定の領域にアクセスできるようになる.本プローブ型センサは,ガラスで形成されたプローブ本体にSiが挟まれた構造(ガラス-Si-ガラス)を有している.プローブ本体の先端にSiの熱検知部が,本体内部のキャピラリー内にはSiの共振熱センサが設けられた.熱検知部-共振熱センサ間はSiを介して物理的熱的に接続されており,プローブ先端で検知された熱は熱センサに伝導され,そこで計測される.本年度は,基本的な微細加工技術を用いたプローブ型センサの作製,特性評価(共振熱センサの隔離性,共振周波数温度係数,周波数ゆらぎ)を行った.応用としての生体試料(グルコース)を含む液滴の熱計測により,本プローブセンサが原理的に大気環境下で高感度計測が可能であることを実験的に証明したと言える.単一のカーボンナノチューブ(CNT)をプローブ先端に接着できることも既に確認しており,CNTを用いた高感度プローブセンサの開発に大きく貢献した.

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Media Coverage 1

  1. 細胞１個の熱伝導率や比熱を精密に測定できる新技術を開発 ─ 細胞機能の基本原理解明や細胞レベルで生じる難病治療法研究の進展に期待 ─

    東北大学　日本経済新聞・オプトロニクスオンライン

    2023/03