顔写真

トダ　マサヤ
戸田　雅也
Masaya Toda
所属
大学院工学研究科　機械機能創成専攻　機能システム学講座（微小機械構成学分野）
職名
准教授
学位

  • 博士（工学）（大阪大学）

  • 修士（工学）（大阪大学）

所属学協会 4

  • IEEE

  • 応用物理学会

  • 日本機械学会

  • 電気学会

研究キーワード 5

  • 磁気量子計測

  • 物理化学センサ

  • 高分子薄膜

  • 温度・熱計測

  • マイクロメカニカルセンサ

研究分野 1

  • ナノテク・材料 / ナノマイクロシステム /

受賞 5

  1. 速報ポスター賞

    2023年11月　電気学会センサ・マイクロマシン部門

  2. The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems Best Conference Paper Award

    2021年4月

  3. 第35回「センサ・マイクロマシンと応用システム」シンポジウム優秀技術論文賞

    2018年11月　電気学会　圧電薄膜共振子を利用した3.5 GHz 帯CMOS 発振回路の開発 と原子時計システムへの適用」

  4. MNC 2011 Award for Most Impressive Presentation

    2012年10月　International Microprocesses and Nanotechnology Conference Organizing Committee　Vacuum-packaged Resonant Thermal Sensor for Biological Cell in liquid

  5. 表面科学とナノテクノロジ－に関する国際シンポジウム トラベルアワード賞

    2005年11月　日本表面科学会　ポリマー膜への紫外線照射を利用したシリコン表面応力制御

論文 238

  1. A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film

    Chuan Hui Ou, Nguyen Van Toan, Yao Chuan Tsai, Ioana Voiculescu, Masaya Toda, Takahito Ono

    Journal of Microelectromechanical Systems　33　(1)　46-53　2024年2月1日

    DOI： 10.1109/JMEMS.2023.3337333 　

    ISSN：1057-7157

    eISSN：1941-0158

    詳細を見る 詳細を閉じる

    An electromagnetic tip-tilt-piston micromirror with a large stroke is presented. This research introduced a novel actuation structure, based on a spring made from conductive metallic glass with excellent mechanical properties. For the first time, two functional elements, an electromagnetic actuation element and a mechanical support structure, were successfully integrated into a single-layer spring, made of metallic glass. With this novel actuator, the performance of stroke and angle controllability is remarkably improved. The fabricated device can achieve a 418 ~\mu \text{m} static stroke in upward direction. Furthermore, the tilting angles of the micromirror can be controlled with maximum accuracy of 0.05°/mA. The device is robust and has miniature dimensions, comparable or smaller, than existing electromagnetic micromirror dimensions published in literature. The displacement values of the micromirror are larger, compared to state-of-the-art electromagnetic micromirrors, which usually have strokes under 300 ~\mu \text{m} and do not have angle control mechanism. In spectrometer applications, the micromirror with a large stroke and controllable angle allows spectrometers to achieve higher resolution. These special qualities of the micromirror, will provide efficient, and reliable spatial light modulation required for interferometer applications. [2023-0104]

  2. Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products

    Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Haitao Ye, Yasuo Koide, Zhaohui Huang, Meiyong Liao

    Applied Physics Express　2024年2月1日

    DOI： 10.35848/1882-0786/ad2027 　

  3. Preface to the Special Issue on “World State-of-the-art Research on Sensors and Micromachines”

    Koji Sugano, Masaya Toda

    IEEJ Transactions on Sensors and Micromachines　144　(1)　1　2024年

    DOI： 10.1541/ieejsmas.144.1 　

    ISSN：1341-8939

    eISSN：1347-5525

  4. Low Elastic Torsional Resonator Supported by a Thin Metallic Glass Beam

    Masaya Toda

    IEEJ Transactions on Sensors and Micromachines　144　(1)　23-24　2024年

    DOI： 10.1541/ieejsmas.144.23 　

    ISSN：1341-8939

    eISSN：1347-5525

    詳細を見る 詳細を閉じる

    An ultrasensitive torsional sensor that responds to changes in the quantum spin states of a sample was developed. The beam was fabricated using metallic glass to support the sensor stage and achieve high sensitivity. An experiment was conducted by applying a magnetic field to a magnetic sample mounted on the device stage. By changing the magnetic field at 0.6 mT, torsional movement was observed for the device with NiFe sample placed on the stage, which generated a rotational torque and torsional displacement of 19.6 µm. The validity of the torque was examined by comparing it with theoretical values to eliminate any magnetic moment on the stage.

  5. On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film

    Zilong Zhang, Wen Zhao, Guo Chen, Masaya Toda, Satoshi Koizumi, Yasuo Koide, Meiyong Liao

    Advanced Functional Materials　33　(27)　2023年7月4日

    DOI： 10.1002/adfm.202300805 　

    ISSN：1616-301X

    eISSN：1616-3028

    詳細を見る 詳細を閉じる

    Electrically integrable, high-sensitivity, and high-reliability magnetic sensors are not yet realized at high temperatures (500 °C). In this study, an integrated on-chip single-crystal diamond (SCD) micro-electromechanical system (MEMS) magnetic transducer is demonstrated by coupling SCD with a large magnetostrictive FeGa film. The FeGa film is multifunctionalized to actuate the resonator, self-sense the external magnetic field, and electrically readout the resonance signal. The on-chip SCD MEMS transducer shows a high sensitivity of 3.2 Hz mT−1 from room temperature to 500 °C and a low noise level of 9.45 nT Hz−1/2 up to 300 °C. The minimum fluctuation of the resonance frequency is 1.9 × 10−6 at room temperature and 2.3 × 10−6 at 300 °C. An SCD MEMS resonator array with parallel electric readout is subsequently achieved, thus providing a basis for the development of magnetic image sensors. The present study facilitates the development of highly integrated on-chip MEMS resonator transducers with high performance and high thermal stability.

  6. Metal-Multilayered Nanomechanical Cantilever Sensor for Detection of Molecular Adsorption

    Masaya Toda, Takahito Ono, Jun Okubo

    Biosensors　13　(6)　2023年6月

    DOI： 10.3390/bios13060573 　

    eISSN：2079-6374

    詳細を見る 詳細を閉じる

    A metal-multilayered nanomechanical cantilever sensor was proposed to reduce the temperature effect for highly sensitive gas molecular detection. The multilayer structure of the sensor reduces the bimetallic effect, allowing for the detection of differences in molecular adsorption properties on various metal surfaces with higher sensitivity. Our results indicate that the sensor exhibits higher sensitivity to molecules with greater polarity under mixed conditions with nitrogen gas. We demonstrate that stress changes caused by differences in molecular adsorption on different metal surfaces can be detected and that this approach could be used to develop a gas sensor with selectivity for specific gas species.

  7. Review of Magnetic Resonance Force Sensors Based on Nanomechanical Cantilever 査読有り

    142　(9)　224-229　2022年9月1日

    出版者・発行元：None

    DOI： 10.1541/ieejsmas.142.224 　

    ISSN：1341-8939

    eISSN：1347-5525

  8. Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro-thermoelectric generator 査読有り

    Nguyen Van Toan, Keisuke Ito, Truong Thi Kim Tuoi, Masaya Toda, Po Hung Chen, Mohd Faizul Mohd Sabri, Jinhua Li, Takahito Ono

    Energy Conversion and Management　267　2022年9月1日

    DOI： 10.1016/j.enconman.2022.115923 　

    ISSN：0196-8904

    詳細を見る 詳細を閉じる

    This work demonstrates the micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching (MACE) for heat dissipation enhancement to improve the performance of the micro-thermoelectric generator (µ-TEG). The heat dissipation through the micro-heat sink is enhanced by increasing the surface-to-volume ratio, which can be achieved by combining deep reactive ion etching (RIE) and MACE. Silicon nanowires with a diameter of 100 nm and a height of 9 µm are successfully formed in both horizontal and vertical surface directions. The micro-heat sink effectiveness is 8.3 times better than that of without employing the micro-heat sink. In addition, the performance of the µ-TEG has been significantly enhanced by utilizing the micro-heat sink. The maximum output power of the µ-TEG with and without the micro-heat sink are 93 µW and 18.5 µW, respectively, under the same evaluation conditions. The findings in this work may be useful not only for the µ-TEG, but also other applications such as micro-supercapacitors, micro-sensors, chemical analysis, and biological processes, which require a large surface-to-volume ratio.

  9. Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications 査読有り

    Gaopeng Xue, Masaya Toda, Xinghui Li, Bing Li, Takahito Ono

    Micromachines　13　(8)　2022年8月

    DOI： 10.3390/mi13081287 　

    eISSN：2072-666X

    詳細を見る 詳細を閉じる

    This study presents an experimental demonstration of the motion characteristics of a comb-drive actuator fabricated from heterogeneous structure and applied for cryogenic environments. Here, a silicon wafer is anodically bonded onto a glass substrate, which is considered to be a conventional heterogeneous structure and is commonly adopted for fabricating comb-drive actuators owing to the low-cost fabrication. The displacement sensor, also with comb-finger configuration, is utilized to monitor the motion characteristics in real time at low temperatures. The irregular motions, including displacement fluctuation and lateral sticking, are observed at specific low temperatures. This can be attributed to the different thermal expansion coefficients of two materials in the heterogeneous structure, further leading to structural deformation at low temperatures. The support spring in a comb-drive actuator is apt to be deformed because of suspended flexible structures, which affect the stiffness of the support spring and generate irregular yield behavior. The irregular yield behavior at low temperatures can be constrained by enhancing the stiffness of the support spring. Finally, we reveal that there are limited applications of the heterogeneous-structure-based comb-drive actuator in cryogenic environments, and simultaneously point out that the material substrate of silicon on the insulator is replaceable based on the homogeneous structure with a thin SiO2 layer.

  10. Nanoengineered nanochannels for thermally ionic nanofluidic energy harvesting 査読有り

    Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Megat Muhammad Ikhsan Megat Hasnan, Masaya Toda, Ioana Voiculescu, Suhana Mohd Said, Takahito Ono

    Energy Conversion and Management　264　2022年7月15日

    DOI： 10.1016/j.enconman.2022.115760 　

    ISSN：0196-8904

    詳細を見る 詳細を閉じる

    This work demonstrates thermal-to-electric energy conversion based on ionic nanofluidic transport in nanochannels inducted by a temperature gradient. Two types of highly periodic and high aspect ratio nanochannels have been fabricated in a silicon (Si) substrate and in an aluminium oxide (Al2O3) membrane. Silicon nanochannels with diameter of 100 nm and height of 300 μm have been produced by metal-assisted chemical etching process (MACE), while nanochannels with the dimensions of the 10 nm and 3 μm respectively, were fabricated in a Al2O3 membrane by the anodic aluminum oxidation (AAO) process. Moreover, a novel approach of thermally nanofluidic energy harvesting was proposed and conducted. The performance of the thermally ionic nanofluidic energy harvesting system in cases with and without nanochannels has been evaluated and compared. The advantage of the presence nanochannels on energy conversion has been confirmed. The electrolyte concentration dependence on the output power has been determined. Also, the effect of nanochannel materials, including alumina and silicon materials, on the power density has been verified. The ionic Seebeck coefficient was enhanced by 7.3 times when the nanochannels were present. The silicon substrate with nanochannels demonstrated the highest performance for energy harvesting. Its power density reaches approximately 1.47 mW/m2, which was 13.3 times larger than the case without nanochannels. This investigation may open new opportunities for the future thermoelectric generators based on ionic transport in nanochannels.

  11. 800 nm band MEMS-tunable VCSEL for microfabricated atomic clock 査読有り

    Zhijan Zhao, Masaya Toda, Takahito Ono, Motoaki Hara, Satoshi Shinada, Hiroshi Nakagawa, Katsuya Kikuchi

    Proceeding of Smart System Integration (SSI) Conference 2022　2022年4月

    DOI： 10.1109/SSI56489.2022.9901411 　

  12. Assembled Comb-Drive XYZ-Microstage with Large Displacements and Low Crosstalk for Scanning Force Microscopy 査読有り

    Gaopeng Xue, Masaya Toda, Xinghui Li, Xiaohao Wang, Takahito Ono

    Journal of Microelectromechanical Systems　31　(1)　54-62　2022年2月1日

    DOI： 10.1109/JMEMS.2021.3123962 　

    ISSN：1057-7157

    eISSN：1941-0158

    詳細を見る 詳細を閉じる

    This paper proposes and demonstrates a chip-level-microassembly comb-drive XYZ-microstage for providing large displacements and low crosstalk in scanning force microscopy applications at low temperatures. The three-dimensional structure of the comb-drive XYZ-microstage, consisting of an in-plane XY-microstage, two out-of-plane Z-actuators, and a base substrate, was accurately and orderly constructed using microassembly technology. This configuration can overcome the out-of-plane stroke-space limitation of conventional monolithic-wafer-based XYZ-microstages, and the crosstalk movements resulting from the coupling connection between in-plane and out-of-plane actuation units can be avoided. The in-plane actuation unit of the XY-microstage can provide low-crosstalk movements in the X- and Y-directions, due to the design of the decoupling-motion structure and constraint of the capacitance-coupling crosstalk of the actuation voltages. Folded-flexure springs with high stiffness were adopted in the XYZ-microstage to enhance the lateral stability of movable combs and improve the range of achievable strokes. The assembled comb-drive XYZ-microstage could provide quite large displacements of 49.2 μ m , 27.9~μ m , and 50.5~μ m in the X-, Y-, and Z-directions, respectively. Furthermore, to demonstrate the feasibility of the fabricated XYZ-microstage, a magnetic resonance force microscopy measurement system was constructed using the scanning XYZ-microstage with a specimen of 1, 1-Diphenyl-2-picrylhydrazyl radical. The magnetic resonance force from the electron spin resonance excited in the specimen could be detected by scanning the specimen in a specific resonance region. The results demonstrate that the proposed microassembly with the optimized actuation-unit structure is a promising means of establishing a comb-drive XYZ-microstage with large displacements, low crosstalk, and high adaptability. [2021-0112]

  13. Development of Nanomechanical Multisensory Arrays for Detection of Hazardous Volatile Materials and Gases 査読有り

    Md. Abdul Momin, Zhuqing Wang, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Yasuaki Kawaguchi, Takahito Ono

    2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)　2022年1月9日

    出版者・発行元：IEEE

    DOI： 10.1109/mems51670.2022.9699548 　

  14. FBAR Oscillator and MEMS Tunable VCSEL to Generate the Probe Lasers for Microfabricated Atomic Clock

    Motoaki Hara, Satoshi Shinada, Yuichiro Yano, Tetsuya Ido, Zhijian Zhao, Masaya Toda, Takahito Ono, Horoyuki Ito

    IEEE International Ultrasonics Symposium, IUS　2022-October　2022年

    DOI： 10.1109/IUS54386.2022.9958796 　

    ISSN：1948-5719

    eISSN：1948-5727

    詳細を見る 詳細を閉じる

    In this paper, we describe several new approaches to cost reduction for the realization of ultraminiaturized atomic clocks. One is the development of a wavelength tuner for vertical-cavity surface-emitting lasers (VCSELs) for the atomic clocks. Our VCSEL is designed so that an electrostatic actuator can control the length of the laser cavity, eliminating the offset from the desired central wavelength even in postprocessing. This is effective in reducing the screening cost, which is the main factor driving up the cost of laser chips for coherent population trapping (CPT) atomic clocks. In another approach, we used a thin film bulk acoustic resonator (FBAR) for the atomic clock oscillator to significantly reduce the circuit scale and added a balun circuit and a gain adjustment circuit. This oscillator was manufactured using a legacy process with a line width of 180 nm, and good oscillation was successfully confirmed in the 3 GHz band.

  15. Comprehensive study of magnetostriction-based MEMS magnetic sensor of a FeGa/PZT cantilever 査読有り

    Mohammad Akita Indianto, Masaya Toda, Takahito Ono

    Sensors and Actuators, A: Physical　331　2021年11月1日

    DOI： 10.1016/j.sna.2021.112985 　

    ISSN：0924-4247

    詳細を見る 詳細を閉じる

    This research comprehensively studies a magnetostriction-based cantilever resonator magnetic sensor of Iron Gallium (FeGa) coupled to a piezoelectric material of lead zirconate titanate (PZT) is performed. The study is meant to explore its magnetic sensing mechanism, reaction to magnetic field direction, the separate effect of magnetic force, and the advantage of miniaturization. The FeGa/PZT cantilever is sensitive to magnetic field direction when objected to a static DC magnetic field in the perpendicular direction with 5.47 Hz/mT sensitivity. It is also concluded that the FeGa/PZT cantilever is also sensitive to magnetic force with a different reaction to a static magnetic field. The sensitivity to magnetic force is in the value of 1.77 Hz/mT. Both sensitivities are calculated from the slope of the resonance frequency shift and magnetic field graph divided by its resonance frequency. The Allan variance method's minimum detectable magnetic field is determined with a frequency noise of 0.02 Hz, equal to 3.66 μT. The minimum detectable magnetic field can be improved by reducing the thermal noise through structure modification by designing a narrow, thin, and long cantilever with a high Q factor with complementary material. The magnetostriction-based magnetic sensor can be applied in either direct magnetic field measurement or a magnetic resonance system such as micro NMR or micro ESR.

  16. Three-dimensional imaging of electron spin resonance-magnetic resonance force microscopy at room temperature 査読有り

    Masaya Toda, Takahito Ono

    Journal of Magnetic Resonance　330　2021年9月

    DOI： 10.1016/j.jmr.2021.107045 　

    ISSN：1090-7807

    eISSN：1096-0856

    詳細を見る 詳細を閉じる

    In this study, we demonstrated the three-dimensional (3D) imaging by magnetic resonance force microscopy (MRFM) based on electron spin resonance (ESR) measurements at room temperature. For a microsample containing radicals, the 3D force distribution was obtained using a custom-made Si nanowire and a permanent magnetic particle. Calculation using precise values of the magnetic field distribution is required to define an accurate response function for the 3D deconvolution processing of the spin density distribution. A symmetric resonance magnetic field produces good periodic force maps using a spherical micromagnet, which simplifies the deconvolution processing with resonant slice systems. In addition, the 3D imaging method was processed in the wavenumber space by a Fourier transform that used a simple convolution with noise parameters in the response function. After the reconstruction of the distribution of electron spins (radicals), the shape of the sample agreed with that of the optical image; thus, the accuracy of the internal density structure was verified. We believe that the combination of a Si nanowire and a spherical magnetic particle used for magnetic resonance detection is a good candidate for Fourier transform 3D deconvolution in multiple MRFM applications.

  17. Evaluation of New Solid Rubidium Source Using Atomic Clock Stabilization Loop 査読有り

    Motoaki Hara, Yuichiro Yano, Masaya Toda, Takahito Ono, Tetsuya Ido

    2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)　2021年6月20日

    出版者・発行元：IEEE

    DOI： 10.1109/transducers50396.2021.9495382 　

  18. Reflection-type vapor cell for micro atomic clocks using local anodic bonding of 45° mirrors 査読有り

    Hitoshi Nishino, Yuichiro Yano, Motoaki Hara, Masaya Toda, Masatoshi Kajita, Tetsuya Ido, Takahito Ono

    Optics Letters　46　(10)　2272-2272　2021年5月15日

    出版者・発行元：None

    DOI： 10.1364/ol.424354 　

    ISSN：0146-9592

    eISSN：1539-4794

  19. Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures 査読有り

    Masaya Toda, Hideki Hayashi, Nguyen van Toan, Naoki Inomata, Takahito Ono

    Journal of Microelectromechanical Systems　30　(4)　1-9　2021年5月14日

    出版者・発行元：None

    DOI： 10.1109/jmems.2021.3076791 　

    ISSN：1057-7157

    eISSN：1941-0158

  20. Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk 査読有り

    Gaopeng Xue, Masaya Toda, Xinghui Li, Takahito Ono

    Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021　43-46　2021年4月

    DOI： 10.1109/NEMS51815.2021.9451392 　

    詳細を見る 詳細を閉じる

    This paper presents a chip-level-microassembly comb-drive XYZ-microstage with large displacements and low crosstalk for the applications of scanning force microscope at cryogenic environment. The three-dimensional comb-drive XYZ-microstage, with no affection to the thermal variation, was accurately and orderly constructed with three components of a comb-drive XY-microstage for in-plane actuation, two comb-drive Z-actuators for out-of-plane actuation, and a base substrate using a chip-level-microassembly technology. This configuration can overcome the out-of-plane stroke-space limitation of conventional monolithic-wafer-based XYZ-microstages, and the crosstalk movements resulting from the coupling connection between in-plane and out-of-plane actuation units can be avoided. Additionally, we further conducted two aspects of designing the decoupling-motion structure and constraining the capacitance-decoupling crosstalk, to achieve low-crosstalk movements in the in-plane actuation unit. The folded-flexure springs with high stiffness were adopted to enhance the lateral stability of movable combs and improve the range of achievable strokes. Finally, the fabricated comb-drive XYZ-micro stage, as a promising three-dimensional scanner, was capable of providing large displacements of 28.3 μm into +X direction, 20.9 μm into -X direction, 5.8 μm into +Y direction, 22.1 μm into -Y direction, and 50.5 μm into Z direction, respectively.

  21. Electroplated FePt Films for Micromechanical Magnetic Sensors 査読有り

    Masaya Toda, Hao Xu, Takahito Ono

    physica status solidi (a)　218　(8)　2000547-2000547　2021年4月

    出版者・発行元：None

    DOI： 10.1002/pssa.202000547 　

    ISSN：1862-6300

    eISSN：1862-6319

  22. Miniature piezoresistive sensor for detecting volatile organic components 査読有り

    Masaya Toda, Krzysztof Moorthi, Takumi Hokama, Zhuqing Wang, Mai Yamazaki, Takahito Ono

    Sensors and Actuators B: Chemical　333　129524-129524　2021年4月

    出版者・発行元：Elsevier BV

    DOI： 10.1016/j.snb.2021.129524 　

    ISSN：0925-4005

    詳細を見る 詳細を閉じる

    This paper reports a piezoresistive gas sensor, which detects the stress of polymer swollen due to sorption of trace gas molecules. The sensor consists of a Si-polymer composite and a Si cantilever with a piezoresistor at the support. The stress is transformed via the cantilever lateral deflection to the strain at the piezoresistor at the cantilever support. The saturation time for water signal is ca 440 s, and the response is reversible. The response rate, d(∆R/R)/dt, exhibits a maximum at 15.5 s. The ethanol and acetone signals show maxima of lower magnitude. The Fickian diffusion model with variable surface concentration of analyte represents very well the sensor response. The predicted maximum response rate is [d(∆R/R)/dt]max∝Sε∞D1/2b1/2, where S is device sensitivity, ε∞, is equilibrium strain of swollen polymer, D is analyte diffusivity, and b is the rate of change of surface concentration of analyte. The response time corresponding to this maximum is tmax∝1/b. For low humidity, the observed sensitivity is S=2.2. An array of sensors, with properly selected polymer sorbents is expected to function as detector of volatile gas components in human breath and/or in atmosphere.

  23. Torsional resonator of Pd–Si–Cu metallic glass with a low rotational spring constant 国際誌 査読有り

    Masaya Toda, Chunyang Li, Nguyen Van Toan, Yao-Chuan Tsai, Yu-Ching Lin, Takahito Ono

    Microsystem Technologies　27　(3)　929-935　2021年3月

    出版者・発行元：Springer Science and Business Media LLC

    DOI： 10.1007/s00542-020-04996-2 　

    ISSN：1862-6300

    eISSN：1862-6319

  24. Magnetic Resonance Force Microscopy With Vacuum-Packaged Magnetic Cantilever Towards Free Radical Detection 査読有り

    Gaopeng Xue, Masaya Toda, Xinghui Li, Xiaohao Wang, Takahito Ono

    IEEE Sensors Journal　2021年

    DOI： 10.1109/JSEN.2021.3106352 　

    ISSN：1530-437X

    eISSN：1558-1748

    詳細を見る 詳細を閉じる

    Magnetic resonance force microscopy is becoming increasingly important for three-dimensional image reconstruction inside a sample with non-invasive measurements. In this study, a magnetic resonance force sensor with a vacuum-packaged magnetic cantilever was developed for the detection of free radicals in an atmospheric environment. A 1.5-μm-thick silicon-based cantilever, which was mounted with a 25-μm-diameter Nd-Fe-B magnet at the end of the cantilever, was hermetically packaged in a vacuum cavity using an anodic-bonding technique. The evaluation of the pressure dependence on the quality factor of the mechanical magnet-based cantilever revealed that the packaged-cavity pressure was approximately in the range of 7.3×102–1.0×103 Pa after vacuum packaging. The corresponding detection sensitivity of the magnet-based cantilever sensor was calculated to be 1.1×10-13 N/√Hz. Based on the magnetic force interaction, the magnetic field gradients were detected by mapping the variations in the resonant frequency and resonant amplitude of the magnetic cantilever. Finally, the magnetic resonance force, caused by the electron spin resonance in a standard radical of 1, 1-Diphenyl-2-picrylhydrazyl, was detected with a spin density of ~1.5×1015 spins/cm3 in an atmospheric environment. The proposed vacuum-packaged magnet-based cantilever confirmed the high feasibility of magnetic resonance force detection within a non-hermetic environment.

  25. Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices 査読有り

    Nguyen Van Toan, Truong Thi Kim Tuoi, Naoki Inomata, Masaya Toda, Takahito Ono

    Scientific Reports　11　(1)　2021年1月

    出版者・発行元：Springer Science and Business Media LLC

    DOI： 10.1038/s41598-020-80880-3 　

    eISSN：2045-2322

    詳細を見る 詳細を閉じる

    <title>Abstract</title>This work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film and its novel applications to micro- and nano-devices. The AZO thin film is deposited successfully by atomic layer deposition (ALD). 50 nm-thick AZO film with high uniformity is checked by scanning electron microscopy. The element composition of the deposited film with various aluminum dopant concentration is analyzed by energy-dispersive X-ray spectroscopy. In addition, a polycrystalline feature of the deposited film is confirmed by selected area electron diffraction and high-resolution transmission electron microscopy. The lowest sheet resistance of the deposited AZO film is found at 0.7 kΩ/□ with the aluminum dopant concentration at 5 at.%. A novel method employed the ALD in combination with the sacrificial silicon structures is proposed which opens the way to create the ultra-high aspect ratio AZO structures. Moreover, based on this finding, three kinds of micro- and nano-devices employing the deposited AZO thin film have been proposed and demonstrated. Firstly, nanowalled micro-hollows with an aspect ratio of 300 and a height of 15 µm are successfully produced . Secondly, micro- and nano-fluidics, including a hollow fluidic channel with a nanowall structure as a resonator and a fluidic capillary window as an optical modulator is proposed and demonstrated. Lastly, nanomechanical resonators consisting of a bridged nanobeam structure and a vertical nanomechanical capacitive resonator are fabricated and evaluated.

  26. Effect of Deep-Defects Excitation on Mechanical Energy Dissipation of Single-Crystal Diamond 査読有り

    Huanying Sun, Liwen Sang, Haihua Wu, Zilong Zhang, Tokuyuki Teraji, Tie-Fu Li, J. Q. You, Masaya Toda, Satoshi Koizumi, Meiyong Liao

    Physical Review Letters　125　(20)　2020年11月12日

    出版者・発行元：American Physical Society (APS)

    DOI： 10.1103/physrevlett.125.206802 　

    ISSN：0031-9007

    eISSN：1079-7114

    詳細を見る 詳細を閉じる

    The ultrawide band gap of diamond distinguishes it from other semiconductors, in that all known defects have deep energy levels that are less active at room temperature. Here, we present the effect of deep defects on the mechanical energy dissipation of single-crystal diamond experimentally and theoretically up to 973 K. Energy dissipation is found to increase with temperature and exhibits local maxima due to the interaction between phonons and deep defects activated at specific temperatures. A two-level model with deep energies is proposed to explain well the energy dissipation at elevated temperatures. It is evident that the removal of boron impurities can substantially increase the quality factor of room-temperature diamond mechanical resonators. The deep energy nature of the defects bestows single-crystal diamond with outstanding low intrinsic energy dissipation in mechanical resonators at room temperature or above.

  27. Development of assembled microchannel resonator as an alternative fabrication method of a microchannel resonator for mass sensing in flowing liquid 査読有り

    M. A. Indianto, M. Toda, T. Ono

    Biomicrofluidics　14　(6)　064111-064111　2020年11月

    出版者・発行元：AIP Publishing

    DOI： 10.1063/5.0032040 　

    ISSN：1932-1058

    eISSN：1932-1058

  28. Magnetic Field Sensor Based on Hybrid of Magnetostrictive and Piezoelectric Materials 査読有り

    Mohammad Akita Indianto, Masaya Toda, Takahito Ono

    Proceedings of IEEE Sensors　2020-October　MSS-19-047-1-MSS-19-047-4　2020年10月25日

    DOI： 10.1109/SENSORS47125.2020.9278725 　

    ISSN：1930-0395

    eISSN：2168-9229

    詳細を見る 詳細を閉じる

    © 2020 IEEE. In this research, a cantilever with two layers of a magnetostrictive material of iron-gallium (FeGa) film and a piezoelectric material of lead zirconate titanate (PZT) film is fabricated and evaluated as a magnetic field sensor. The characterization of the sensor is based on the vibration of the cantilever under the magnetic field. It is evaluated both optically using laser Doppler vibrometer (LDV) and electrically from the PZT film on the cantilever. High sensitivity performance is shown by the sensor with a value of 4.1 Hz/mT observed from the slope of the magnetic field and frequency relation. This result gives a possibility for local and direct detection of the magnetic field in the micro-scale. It is experimentally demonstrated that the sensor's performance can be improved by reducing the thermal noise by modifying the cantilever's structure.

  29. Bridged resonator based on assembled Si thin wire 国際誌 査読有り

    Masaya Toda, Taichi Nakamura, Naoki Inomata, Nguyen Van Toan, Takahito Ono

    Journal of Micromechanics and Microengineering　30　(10)　105015-105015　2020年10月1日

    出版者・発行元：IOP Publishing

    DOI： 10.1088/1361-6439/aba6cc 　

    ISSN：0960-1317

    eISSN：1361-6439

  30. Vacancy Color Stress Sensing with Embedded Diamond Particles on Si Micro-cantilevers 国際誌 査読有り

    Masaya Toda, Akhtar M Shahrukh, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　140　(9)　222-227　2020年9月1日

    出版者・発行元：Institute of Electrical Engineers of Japan (IEE Japan)

    DOI： 10.1541/ieejsmas.140.222 　

    ISSN：1341-8939

    eISSN：1347-5525

  31. Hermetically Packaged Microsensor for Quality Factor-Enhanced Photoacoustic Biosensing 国際誌 査読有り

    Imran Latif, Masaya Toda, Takahito Ono

    Photoacoustics　18　100189-100189　2020年6月

    出版者・発行元：Elsevier BV

    DOI： 10.1016/j.pacs.2020.100189 　

    ISSN：2213-5979

  32. Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures 国際誌 査読有り

    Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Takahito Ono

    Micromachines　11　(5)　523-523　2020年5月21日

    出版者・発行元：MDPI AG

    DOI： 10.3390/mi11050523 　

    eISSN：2072-666X

  33. Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures 査読有り

    Zilong Zhang, Yuanzhao Wu, Liwen Sang, Haihua Wu, Jian Huang, Linjun Wang, Yukiko Takahashi, Runwei Li, Satoshi Koizumi, Masaya Toda, Indianto Mohammad Akita, Yasuo Koide, Meiyong Liao

    MATERIALS RESEARCH LETTERS　8　(5)　180-186　2020年5月

    出版者・発行元：TAYLOR & FRANCIS INC

    DOI： 10.1080/21663831.2020.1734680 　

    ISSN：2166-3831

  34. Enhancing Delta E Effect at High Temperatures of Galfenol/Ti/Single-Crystal Diamond Resonators for Magnetic Sensing 国際誌 査読有り

    Zilong Zhang, Haihua Wu, Liwen Sang, Yukiko Takahashi, Jian Huang, Linjun Wang, Masaya Toda, Indianto Mohammad Akita, Yasuo Koide, Satoshi Koizumi, Meiyong Liao

    ACS APPLIED MATERIALS & INTERFACES　12　(20)　23155-23164　2020年5月

    出版者・発行元：AMER CHEMICAL SOC

    DOI： 10.1021/acsami.0c06593 　

    ISSN：1944-8244

    eISSN：1944-8252

  35. High Performance Micro-Thermoelectric Generator Based on Metal Doped Electrochemical Deposition

    Nguyen Van Toan, Truong Thi Kim Tuoi, Khairul Fadzli Samat, Hongtao Sui, Naoki Inomata, Masaya Toda, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2020-January　570-573　2020年1月

    DOI： 10.1109/MEMS46641.2020.9056358 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    © 2020 IEEE. This work reports the high performance micro-thermoelectric generators (TEGs) based on metal-doped electrochemical deposition. Ultra-thick (2 mm-thick) and compact electrodeposited thermoelectric material have been successfully synthesized with high Seebeck coefficient sim -143 mu mathrm{V}/mathrm{K}, high electrical conductivity ∼970 S/cm and low thermal conductivity ∼ 0.6 W/mK. As the result, the performance shows Figure of merit ZT=1 at room temperature, which is one of key factor for high performance TEG. Two kinds of TEG including pure Bi2Te3 and metal doped Bi2Te3 were fabricated, evaluated and compared.

  36. Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection 国際誌 査読有り

    Imran Latif, Masaya Toda, Takahito Ono

    2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)　2020-January　834-837　2020年1月

    出版者・発行元：IEEE

    DOI： 10.1109/mems46641.2020.9056209 　

    ISSN：1084-6999

  37. Resonator with a low spring constant for polarization-degree of nuclear spins sensing

    LI CHUNYANG, TODA Masaya, Nguyen Van Toan, Yao-Chuan Tsai, Yu-Ching Lin, ONO Takahito

    電気学会研究会資料.　2019　MSS-19-051-1-MSS-19-051-4　2019年12月26日

  38. NVCを有するナノダイヤモンドを用いた磁場イメージング

    戸田 雅也, アクタール シャールク, 小野 崇人

    電気学会研究会資料.　2019　MSS-19-046-1-MSS-19-046-3　2019年12月26日

  39. Drift-free FBAR oscillator using an atomic-resonance-stabilization technique 国際誌 査読有り

    Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Tetsuya Ido, Hiroyuki Ito, Masaya Toda, Takahito Ono

    Proceedings of IEEE International Ultrasonics Symposium (IUS)　2019　2178-2181　2019年12月9日

  40. Electrochemical Deposited Tbxdy(1-X) Fey Thin Film Evaluated from Microactuator 査読有り

    Shim Hang, Sakamoto Kei, Inomata Naoki, Toda Masaya, Van Toan Nguyen, Song Yunheub, Ono Takehito

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　36　21pm1-PS3-11-1-21pm1-PS3-11-4　2019年11月19日

    出版者・発行元：None

  41. Fabrication of Cantilever with FeGa/PZT Layers for Magnetic Field Sensor 査読有り

    Indianto Mohammad Akita, 戸田 雅也, 小野 崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　36　20am2-PS3-35-1-20am2-PS3-35-3　2019年11月19日

  42. 核スピン偏極度検出のための低弾性率共振子 査読有り

    李 春洋, 戸田 雅也, TOAN NGUYEN Van, 林 育菁, Tsai Yao-Chuan, 小野 崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　36　19pm3-T-5-1-19pm3-T-5-4　2019年11月19日

  43. Thermoelectric power battery using al<inf>2</inf>o<inf>3</inf> nanochannels of 10 nm diameter for energy harvesting of low-grade waste heat 国際誌 査読有り

    Nguyen Van Toan, Megat Muhammad Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, Takahito Ono

    Energy Conversion and Management　199　2019年11月1日

    DOI： 10.1016/j.enconman.2019.111979 　

    ISSN：0196-8904

    詳細を見る 詳細を閉じる

    © 2019 Elsevier Ltd This work reports the effective of thermal-to-electric energy conversion based on a fluidic transport of nanochannels electrochemical devices induced by a temperature gradient. Using highly order periodic and high aspect ratio anodized aluminum oxide (AAO) nanochannels with 10 nm-diameter and 3 µm-length, the Slip effect and Soret diffusion inside the nanochannels drive large ion separation of monovalent KCl electrolyte between hot reservoir and cold reservoir respectively to generate power density of 255 µW cm−2 at temperature difference of 30 °C. This device has distinct advantages for conventional thermoelectrochemical energy harvester. They do not require the presence of constant temperature gradient in order to operate, they do not require an external voltage to charge and are solely charged by the presence of heat. The need for expensive redox couple are eliminated. High voltage generated by 3 order magnitude higher than TEC than contain no nanochannel device using same KCl electrolyte. They retain charge for extended period of time, up to 60% after 48 h, hence demonstrating their strong viability as a thermally driven integrated generator-storage device. The fundamental explanation for high performance device is due to the ability for the nanochannels to drive and retain charge polarization under a temperature gradient due to slip of nanochannels wall and Soret effect of the electrolyte.

  44. Resonant magnetic sensor using concentration of magnetic field gradient by asymmetric permalloy plates 国際誌

    Naoki Inomata, Wataru Suwa, Nguyen Van Toan, Masaya Toda, Takahito Ono

    Microsystem Technologies　25　(10)　3983-3989　2019年10月1日

    DOI： 10.1007/s00542-018-4257-8 　

    ISSN：0946-7076

    eISSN：1432-1858

  45. Electrostatically Driven Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition 国際誌 査読有り

    Nguyen Van Toan, Dong Zhao, Naoki Inomata, Masaya Toda, Yunheub Song, Takahito Ono

    Physica Status Solidi (A) Applications and Materials Science　216　(14)　2019年7月24日

    DOI： 10.1002/pssa.201800797 　

    ISSN：1862-6300

    eISSN：1862-6319

  46. ナノダイヤモンドのイオン注入による蛍光強度評価

    巻島創, 戸田雅也, 小野崇人

    電気学会研究会資料　(MSS-19-011-028.030-034)　13‐15　2019年7月1日

  47. Silicon-based micro calorimeter with single thermocouple structure for thermal characterization 国際誌 査読有り

    Zhuqing Wang, Mitsuteru Kimura, Masaya Toda, Takahito Ono

    IEEE Electron Device Letters　40　(7)　1198-1200　2019年7月

    DOI： 10.1109/LED.2019.2918238 　

    ISSN：0741-3106

    eISSN：1558-0563

  48. A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks 国際誌 査読有り

    Hitoshi Nishino, Masaya Toda, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII　1530-1532　2019年6月

    DOI： 10.1109/TRANSDUCERS.2019.8808772 　

    詳細を見る 詳細を閉じる

    © 2019 IEEE. This paper reports the design, fabrication and evaluation of a reflection-type micro Rb vapor cell fabricated by local anodic bonding of small 45° mirrors. The 45° mirrors with a Bragg reflector are fabricated by using dicing process. The vapor cells having a horizontal cavity with the 45° mirrors at the both ends are fabricated by anodic bonding process. Optical absorption of Rb and CPT (Coherent Population Trapping) resonance for atomic clock operation are evaluated.

  49. Highly Sensitive Structure of Nanomechanical Gas Sensor Based on Stress Concentration Generated by Cantilever Lateral Deflection 国際誌 査読有り

    Zhuqing Wang, Takumi Hokama, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Takahito Ono

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII　2107-2109　2019年6月

    DOI： 10.1109/TRANSDUCERS.2019.8808616 　

  50. Metal-Assisted Chemical Etching Method Subjected to Micro/Nano Device Fabrication 国際誌 国際共著 査読有り

    Nguyen Van Toan, Xiaoyue Wang, Naoki Inomata, Masaya Toda, Ioana Voiculescu, Takahito Ono

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII　1639-1642　2019年6月

    DOI： 10.1109/TRANSDUCERS.2019.8808663 　

  51. Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition 国際誌 査読有り

    Nguyen Van Toan, Dong Zhao, Naoki Inomata, Masaya Toda, Yunheub Song, Takahito Ono

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII　1709-1711　2019年6月

    DOI： 10.1109/TRANSDUCERS.2019.8808313 　

  52. A Novel Photoacoustic Microsensor for Enhanced Quality Factor Detection of Low Concentration Analytes 国際誌 査読有り

    Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII　2065-2067　2019年6月

    DOI： 10.1109/TRANSDUCERS.2019.8808250 　

  53. Magnetostrictive Performance of Electrodeposited TB<inf>X</inf>DY<inf>(1-X)</inf>FE<inf>Y</inf> Thin Filmevaluated from Microactuator 国際誌 国際共著

    Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Yunheub Song, Takahito Ono

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII　1698-1700　2019年6月

    DOI： 10.1109/TRANSDUCERS.2019.8808489 　

  54. Piezoresistive strain sensor based on monolayer molybdenum disulfide continuous film deposited by chemical vapor deposition 国際誌 査読有り

    Minjie Zhu, Kei Sakamoto, Jinhua Li, Naoki Inomata, Masaya Toda, Takahito Ono

    Journal of Micromechanics and Microengineering　29　(5)　2019年3月15日

    DOI： 10.1088/1361-6439/ab0726 　

    ISSN：0960-1317

    eISSN：1361-6439

  55. 磁歪材料の電解めっき成膜とそのひずみセンサ応用

    江面大河, 猪股直生, 戸田雅也, 古屋泰文, 小野崇人

    電気学会全国大会講演論文集(CD-ROM)　2019　ROMBUNNO.3‐172　2019年3月1日

  56. Piezoresistive Nanomechanical Humidity Sensors Using Internal Stress In-Plane of Si-Polymer Composite Membranes 国際誌 国際共著 査読有り

    Md. Mahabub Hossain, Masaya Toda, Takumi Hokama, Mai Yamazaki, Krzysztof Moorthi, Takahito Ono

    IEEE Sensors Letters　3　(2)　2500404-1-2500404-4　2019年1月16日

  57. Vanadium-doped molybdenum disulfide film-based strain sensors with high gauge factor 国際誌 査読有り

    Minjie Zhu, Jinhua Li, Naoki Inomata, Masaya Toda, Takahito Ono

    Applied Physics Express　12　(1)　015003-015003　2019年1月1日

    出版者・発行元：IOP Publishing

    DOI： 10.7567/1882-0786/aaf5c4 　

    ISSN：1882-0778

    eISSN：1882-0786

  58. A reflection-type vapor cell using anisotropic etching of silicon for micro atomic clocks 国際誌 査読有り

    Hitoshi Nishino, Motoaki Hara, Yuichiro Yano, Masaya Toda, Yoshiaki Kanamori, Masatoshi Kajita, Tetsuya Ido, Takahito Ono

    Applied Physics Express　12　(7)　072012　2019年

    DOI： 10.7567/1882-0786/ab2a3c 　

    ISSN：1882-0778

    eISSN：1882-0786

  59. Low Cost and High-Aspect Ratio Micro/Nano Device Fabrication by Using Innovative Metal-Assisted Chemical Etching Method 国際誌 査読有り

    Nguyen Van Toan, Xiaoyue Wang, Naoki Inomata, Masaya Toda, Ioana Voiculescu, Takahito Ono

    Advanced Engineering Materials　21　(8)　1900490　2019年

    DOI： 10.1002/adem.201900490 　

    ISSN：1438-1656

    eISSN：1527-2648

  60. A Reflection-Type Vapor Cell for Micro Atomic Clock 国際誌 査読有り

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2019-January　915-918　2019年1月

    DOI： 10.1109/MEMSYS.2019.8870878 　

    ISSN：1084-6999

  61. Electrolyte Based Thermal to Electric Energy Conversion Utilising 10 nm Diameter AL2O3 Nanochannels 国際誌 査読有り

    Nguyen van Toan, Megat Muhammad Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, Takahito Ono

    507-510　2019年1月

    出版者・発行元：None

    DOI： 10.1109/memsys.2019.8870755 　

    ISSN：1084-6999

  62. High Gauge Factor Strain Sensors Based on Vanadium Doped Molybedenum Disulfide 2D Films 国際誌 査読有り

    Minjie Zhu, Naoki Inomata, Masaya Toda, Takahito Ono

    2019-January　335-338　2019年1月

    DOI： 10.1109/MEMSYS.2019.8870660 　

    ISSN：1084-6999

  63. 埋め込み型ナノダイヤモンドを用いたダイヤモンドNVセンタによるストレス検出

    戸田 雅也, アクタール シャールク, 小野 崇人

    電気学会研究会資料.　2018　(204-224)　27-29　2018年12月20日

  64. Constructing in-chip micro-supercapacitors of 3D graphene nanowall/ruthenium oxides electrode through silicon-based microfabrication technique 国際誌 査読有り

    Jinhua Li, Minjie Zhu, Zhonglie An, Zhuqing Wang, Masaya Toda, Takahito Ono

    Journal of Power Sources　401　204-212　2018年10月15日

    DOI： 10.1016/j.jpowsour.2018.08.099 　

    ISSN：0378-7753

  65. FBAR oscillator stabilized by Rb atomic resonator for SHF/EHF band wireless devices 国際誌 査読有り

    Motoaki Hara, Yuichiro Yano, Hiroyuki Ito, Masaya Toda, Takahito Ono, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Tetsuya Ido

    the 2018 IEEE International Ultrasonics Symposium　2018-January　2018年10月

    DOI： 10.1109/ULTSYM.2018.8579685 　

    ISSN：1948-5727

  66. 圧電薄膜共振子を利用した3.5 GHz帯CMOS発振回路の開発 と原子時計システムへの適用 査読有り

    原 基揚, 矢野 雄一郎, 梶田 雅稔, 西野 仁, 戸田 雅也, 原 紳介, 笠松 章史, 伊藤 浩之, 小野 崇人, 井戸 哲也

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　2018　01am2-A-3-1-01am2-A-3-4　2018年10月

  67. 反射型マイクロ原子時計セル 査読有り

    西野 仁, 戸田 雅也, 金森 義明, 矢野 雄一郎, 梶田 雅稔, 井戸 哲也, 原 基揚, 小野 崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　2018　30pm4-PS-16-1-30pm4-PS-16-6　2018年10月

  68. Photoacoustic signal generation in condensed media and detection using vacuum packaged resonator 査読有り

    Latif Imran, An Zhonglie, 戸田 雅也, 小野 崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　2018　01pm1-PS-190-1-01pm1-PS-190-6　2018年10月

  69. ポリマーの体積変化とカンチレバーの横変位による応力集中を用いたピエゾ抵抗型ガスセンサ 査読有り

    外間 匠, 戸田 雅也, 山崎 舞, Moorthi Krzystof, 小野 祟人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　2018　01pm1-PS-190-1--01pm1-PS-190-6　2018年10月

  70. Microwave oscillator using piezoelectric thin-film resonator aiming for ultraminiaturization of atomic clock 国際誌 査読有り

    M. Hara, Y. Yano, M. Kajita, H. Nishino, Y. Ibata, M. Toda, S. Hara, A. Kasamatsu, H. Ito, T. Ono, T. Ido

    Review of Scientific Instruments　89　(10)　2018年10月1日

    DOI： 10.1063/1.5048633 　

    ISSN：0034-6748

    eISSN：1089-7623

  71. Reducing intrinsic energy dissipation in diamond-on-diamond mechanical resonators toward one million quality factor 国際誌 国際共著 査読有り

    Haihua Wu, Liwen Sang, Yumeng Li, Tokuyuki Teraji, Tiefu Li, Masataka Imura, Jianqiang You, Yasuo Koide, Masaya Toda, Meiyong Liao

    2　(9)　2018年9月

    出版者・発行元：AMER PHYSICAL SOC

    DOI： 10.1103/PhysRevMaterials.2.090601 　

    ISSN：2475-9953

  72. Young's modulus of plasma-polymerized allylamine films using micromechanical cantilever sensor and laser-based surface acoustic wave techniques 国際誌 国際共著 査読有り

    Masaya Toda, Koji Miyake, Li Qiang Chu, Marjan Zakerin, Renate Förch, Rüdiger Berger, Akiko N. Itakura

    Plasma Processes and Polymers　15　(9)　2018年9月1日

    DOI： 10.1002/ppap.201800083 　

    ISSN：1612-8850

    詳細を見る 詳細を閉じる

    © 2018 WILEY-VCH Verlag GmbH &amp; Co. KGaA, Weinheim Mechanical properties of ultra-thin organic films are fundamentally important in coating applications. Micromechanical cantilever sensor (MCS) and laser-based surface acoustic wave (LA-SAW) techniques were both used to measure Young&#039;s moduli (E) of plasma polymerized films at different humidities (H). For plasma polymerized allylamine (ppAA) films deposited at 5 W and 90 W, E of 1400 ± 350 MPa and 110 ± 20 MPa at H between 10 and 40%, and 1070 ± 250 MPa and 32 ± 10 MPa at H between 70 and 80% were measured. The LA-SAW technique revealed E lower than 60% of that measured by MCS. The difference suggested either an enhanced swelling at the air interface or a gradient of cross-linking density.

  73. Highly Sensitive Hermetically Packaged Microsensor for Photoacoustic Detection 査読有り

    Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono

    E部門総合研究会研究会資料　2018　(1-6)　27-30　2018年7月

  74. Capacitive Silicon Nanomechanical Resonator Capable of Selective Vibration of High-Order Mode 査読有り

    Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Masaya Toda, Takahito Ono

    Proceedings of the 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology　2018　14-1-14-2　2018年6月

  75. Hermetically Packaged Resonant Microsensor for Photoacoustic Detection 査読有り

    Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono

    Proceedings of the 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology　2018　67-1-67-2　2018年6月

  76. Nanomechanical Piezoresistive Sensor with Polymer-Si Membrane for Gas Detection 査読有り

    Takumi Hokama, Md. Mahabub Hossain, Masaya Toda, Krzysztof Moorthi, Mai Yamazaki, Takahito Ono

    Proceedings of the 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology　2018　80-1-80-2　2018年6月

  77. Thermal resistance change of liquid carbon dioxide based on narrow space effect in micro chamber 査読有り

    Masaya Toda, Tomoyuki Yamagami, Naoki Inomata, Takashi Fujii, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2018-January　1296-1299　2018年4月

    DOI： 10.1109/MEMSYS.2018.8346803 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    © 2018 IEEE. The micro fluidic chamber with narrow gap for high pressurized fluid has been designed and fabricated. The carbon dioxide (CO2) is injected into the narrow gap spaces of 0.5 μm and 1.6 μm. Their thermal resistance changes have been measured by changing the pressure and temperature. Hence, related to the effect of narrow space the critical pressure of supercritical CO2 is shifted to lower values. When the gap distance is shorter, the pressure of the minimum total-thermal-resistance (Rtotal) becomes lower. This 'narrow space effect' is enhanced by the shorter gap distance. Additionally, the change of thermal resistance related to pressure change is more responsive for narrower spacing. The smaller spacing seems to make more sensitive responsibility of the inserted fluid property. These results indicate that the filled fluid in a micro-chamber can be applied for the applications of sensing and switching devices using variable physical properties of the packaged fluid in narrow spaces.

  78. Fabrication and evaluation of assembled micro-tube resonator for mass measurement in flowing liquid 査読有り

    Mohammad Akita Indianto, Masaya Toda, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2018-January　1261-1264　2018年4月

    DOI： 10.1109/MEMSYS.2018.8346793 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    © 2018 IEEE. In this research, an assembled micro-tube resonator for mass sensing in liquid is fabricated and evaluated. The fabrication process of this assembled micro-tube resonator is simply combining three different fabrications of a groove part, a micro-tube part, and a glass part, which are fabricated by common micromachining. Flowing liquid is injected as the evaluation of mass change detection performance of the device. The evaluated result shows consistent value with the actual mass. Self-oscillation experiment has been used for recording actual mass change based on the resonance frequency shift with flowing liquid using digital data logger. Minimum mass resolution of the device, which is calculated by noise analysis, is in the value of 1.04 pg.

  79. Electrically driven ion transport in nanopores fabricated by metal assisted chemical etching method 査読有り

    Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2018-January　1253-1256　2018年4月

    DOI： 10.1109/MEMSYS.2018.8346791 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    © 2018 IEEE. This work reports the electrically driven ion transport in nanopores fabricated by a metal assisted chemical etching (MACE) method. The nanopores with approximate 15 nm diameter and 200 μm height were successful produced by MACE. Ion transport through nanopores was observed and could be controlled by application of gate voltages to nanopores.

  80. Evaluation of piezoresistive property of vanadium oxide thin film 査読有り

    Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2018-January　1044-1047　2018年4月

    DOI： 10.1109/MEMSYS.2018.8346738 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    © 2018 IEEE. This paper shows the evaluation of piezpresistive property of a vanadium oxide (VOx) film. The VOx film is deposited and patterned as a piezoresistor on an edge of suspended silicon (Si) membrane. The VOx resistor, electrode pads connected to the resistor, and the suspended membrane structure are fabricated using conventional microfabrication techniques. The resistance of the VOx resistor changes as the membrane is deflected. The deflection of the membrane is caused by evacuating to each differential pressure (from -0.02 to -0.05 by -0.01 MPa), and measured using a white-light interferometer. The resistance decreases as the strain is increased. The gauge factor of the deposited VOx is 259, which value is higher than general semiconductor materials such as Si. The feasibility of VOx as a focusing material for MEMS/NEMS application (ex. strain gauge) is indicated by our experiment.

  81. 0 3 FBAR-Based 3.4 GHz Oscillator Without Frequency Multiplications Aiming for an Integrated Atomic Clock Chip 査読有り

    Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Masaya Toda, Hiroyuki Ito, Takahito Ono, Tetsuya Ido

    Proceedings of the 2018 European Frequency and Time Seminar　2018年4月

  82. Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method 査読有り

    Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono

    Nanotechnology　29　(19)　195301-1-195301-7　2018年3月16日

    DOI： 10.1088/1361-6528/aab1d3 　

    ISSN：0957-4484

    eISSN：1361-6528

    詳細を見る 詳細を閉じる

    © 2018 IOP Publishing Ltd. In this work, we report a simple and low-cost way to create nanopores that can be employed for various applications in nanofluidics. Nano sized Ag particles in the range from 1 to 20 nm are formed on a silicon substrate with a de-wetting method. Then the silicon nanopores with an approximate 15 nm average diameter and 200 μm height are successfully produced by the metal-assisted chemical etching method. In addition, electrically driven ion transport in the nanopores is demonstrated for nanofluidic applications. Ion transport through the nanopores is observed and could be controlled by an application of a gating voltage to the nanopores.

  83. Pico-thermogravimetric material properties analysis using diamond cantilever beam 国際誌 国際共著 査読有り

    Ioana Voiculescu, Meiyong Liao, Marjan Zakerin, Rüdiger Berger, Takahito Ono, Masaya Toda

    Sensors and Actuators, A: Physical　271　356-363　2018年3月1日

    DOI： 10.1016/j.sna.2018.01.004 　

    ISSN：0924-4247

  84. MICRO ATOMIC FREQUENCY STANDARDS EMPLOYING AN INTEGRATED FBAR-VCO OSCILLATING ON THE 87RB CLOCK FREQUENCY WITHOUT A PHASE LOCKED LOOP 査読有り

    Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Hitoshi Nishino, Yasuhiro Ibata, Masaya Toda, Shinsuke Hara, Akifumi Kasamatsu, Hiroyuki Ito, Takahito Ono, Tetsuya Ido

    The 31st IEEE International Conference on Micro Electro Mechanical Systems　2018-January　715-718　2018年1月

    DOI： 10.1109/MEMSYS.2018.8346655 　

    ISSN：2160-1968

  85. Evaluation of Piezoresistive Property of Vanadium Oxide Thin Film Deposited by Sputtering 査読有り

    Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono

    IEEE Sensors Letters　2　(1)　2500204　2018年

  86. Nano and microsensors for mammalian cell studies 国際誌 国際共著 査読有り

    Ioana Voiculescu, Masaya Toda, Naoki Inomata, Takahito Ono, Fang Li

    9　(9)　2018年

    DOI： 10.3390/mi9090439 　

    eISSN：2072-666X

  87. Microfabricated temperature-sensing devices using a microfluidic chip for biological applications 査読有り

    Naoki Inomata, Masaya Toda, Takahito Ono

    International Journal of Automation Technology　12　(1)　15-23　2018年

    DOI： 10.20965/ijat.2018.p0015 　

    ISSN：1881-7629

    eISSN：1883-8022

    詳細を見る 詳細を閉じる

    © 2018, Fuji Technology Press. All rights reserved. Microelectromechanical systems (MEMS) and micro-total analysis systems (μTAS) have been developed using microfabrication technologies. As MEMS and μTAS contribute to smaller, higher-performance, less expensive, and integrated sensing techniques, they have been applied in many fields. In this paper, we focus on microfabricated thermal detection devices, including a microthermistor fabricated using vanadium oxide (VOx) and a resonant thermal sensor integrated into a microfluidic chip, and we present the research work we have done into biological applications, applications using a unique material and detection method for liquid samples. The VOx thermistor, which has a high temperature coefficient of resistance at –1.3%/K, is mounted onto a thermally insulated membrane in the microfluidic chip. This device is used to detect glucose and cholesterol concentrations in solutions. The resonant thermal sensor is another candidate for obtaining highly sensitive thermal measurements; however, this sensor is difficult to use with liquids because of vibration damping and thermal loss. To solve these problems, we propose a partial vacuum packaging system for the sensor in the microfluidic chip. This technique, which involves silicon resonators, was used to successfully detect the heat from a single brown fat cell. Moreover, the possibility of using a VOx resonant thermal sensor is discussed. The future prospects for MEMS and automation technology are described, with a focus on the Internet of Things/big data for medical and healthcare applications.

  88. New Approach to Increase CNT Contents in Electrodeposited Ni-CNT Composite Thin Films by Modified Current Conditions 査読有り

    Akhtar Muhammad Shahrukh, Zhonglie An, Masaya Toda, Takahito Ono

    IEEE Transactions on Nanotechnology　16　(6)　931-938　2017年11月

    DOI： 10.1109/TNANO.2017.2726183 　

    ISSN：1536-125X

    詳細を見る 詳細を閉じる

    © 2002-2012 IEEE. In this paper, an electrodeposition method for nickel (Ni)-multiwalled carbon nanotubes (MWCNTs) composite thin films is presented. The composite film is deposited using an electrolyte in which MWCNTs are randomly dispersed. Two kinds of MWCNTs annealed at 1200 °C and 2600 °C were used for the electrodeposition using pulse or sine waveforms. An electrodeposition condition using CNT annealed at 1200 °C and sine waveform with maximum current 0.2 A and frequency 5.0 Hz results in a maximum CNT weight fraction of 5.4% in the composite film. The electrodeposited film with the maximum CNT content shows a microindentation hardness of 17.0 GPa, which is approximately 1.45 times greater than that of a pure Ni film. Moreover, mechanical strengthening is found in the composite films due to the addition of CNTs. This result shows that the electrodeposition for the Ni-MWCNT composite thin film with modified current condition would be applicable to microsystem, which requires micromechanical components with high mechanical strength.

  89. Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products 査読有り

    Nguyen Van Toan, Masaya Toda, Takumi Hokama, Takahito Ono

    Advanced Engineering Materials　19　(11)　1700203-1-1700203-5　2017年11月

    DOI： 10.1002/adem.201700203 　

    ISSN：1438-1656

    eISSN：1527-2648

    詳細を見る 詳細を閉じる

    © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim This work reports the patterning silicon pillars by metal-assisted chemical etching (MACE) process as a post process on a silicon cantilever for a moisture detection. Although the cantilever is very fragile, the patterning of the pillar structures on the cantilever has been successfully demonstrated. The cantilever coated with a material absorbing water (such as polyimide and mesoporous silica) can use as a humidity sensor. Its bending is due to the surface stress change from water molecule absorption. However, the bending of the cantilever is usually at a small value. Here, the silicon cantilever with high aspect ratio pillars on its surface is proposed, which is expected for a larger bending of the cantilever during the water molecule absorption. The moisture detection utilizes the principle that the pillars stack together based upon the condensation behavior of a water vapor on their surfaces.

  90. Microfabrication of a scanning probe with NV centers in a selectively grown diamond thin film through a xenon difluoride etching process 査読有り

    Minjie Zhu, Jinhua Li, Masaya Toda, Takahito Ono

    Journal of Micromechanics and Microengineering　27　(12)　125007-1-125007-7　2017年10月30日

    DOI： 10.1088/1361-6439/aa8f12 　

    ISSN：0960-1317

    eISSN：1361-6439

    詳細を見る 詳細を閉じる

    © 2017 IOP Publishing Ltd. A scanning probe with nitrogen vacancy (NV) centers in diamond thin film was fabricated via a standard micro/nano electromechanical system process. The diamond thin film was selectively grown by microwave plasma enhanced chemical vapor deposition on a partially nucleated silicon surface. NV centers are embedded during the diamond growth with a pure nitrogen gas flow to the growth chamber. The existence of NV centers in the diamond thin film was confirmed by photoluminescence measurements. In addition, we found that a xenon difluoride (XeF2) etching process and anneal treatment have an influence on the existence of NV centers in the diamond. The fabricated scanning probe with NV centers in diamond thin film can be used as a magnetic scanning sensor. It is anticipated that the alternative method of selectively growing diamond thin film provides various diamond structures in diverse applications.

  91. Ir/YSZ/Si上に成膜したダイヤモンドを用いた振動子の作製と評価 査読有り

    持丸 裕矢, 戸田 雅也, 小野 崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　34　01pm4-PLN-11-1-01pm4-PLN-11-2　2017年10月24日

  92. パーマロイコンセントレータによる磁場勾配を用いた共振型磁気センサ 査読有り

    諏訪 亘, 猪股 直生, 戸田 雅也, 小野 崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　34　01pm4-PS-146-1-01pm4-PS-146-2　2017年10月24日

  93. 原子時計チップ開発に向けた卓上原子時計テストベンチによるMEMSガスセルおよびFBAR-VCOの評価 査読有り

    原 基揚, 矢野 雄一郎, 梶田 雅稔, 西野 仁, 井端 泰大, 朱 敏杰, Latif Imran, 戸田 雅也, 小野 崇人, 井戸 哲也

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　34　31am3-PS-17-1-31am3-PS-17-4　2017年10月24日

    出版者・発行元：Institute of Electrical Engineers of Japan

  94. Assembled Micro-Tube Resonator for Mass Detection of Flowing Liquid 査読有り

    Mohammad Akita Indianto, Masaya Toda, Takahito Ono

    マイクロ・ナノ工学シンポジウム講演集　8　31am3-PN-33-1-31am3-PN-33-2　2017年10月

  95. Fabrication of PMUT using silicon on nothing process for fingerprint sensor 査読有り

    Shim Hang, Nguyen Van Toan, Masaya Toda, Naoki Inomata, Takahito Ono, Yoshiaki Kanamori, Song Yunheub, Oh Youngtaek

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　31　31am3-PS-19-1-31am3-PS-19-2　2017年10月

  96. Vacuum packaged cantilever sensor mounted with a magnetic particle for magnetic force detection 査読有り

    Gaopeng Xue, Masaya Toda, Takahito Ono

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems　2017　(7994243)　1096-1099　2017年7月26日

    DOI： 10.1109/TRANSDUCERS.2017.7994243 　

    詳細を見る 詳細を閉じる

    © 2017 IEEE. The vacuum packaged cantilever with a small magnet is fabricated successfully, and applied to map the magnetic field and radical density at the ambient atmosphere based on magnetic force sensing. The 1.5-μm-thick Si cantilever with a 20-μm-diameter of Nd-Fe-B particle is packaged in a vacuum cavity using an anodic-bonding technique. Before the final bonding process, the relationship of the quality (Q) factor of cantilever with pressure is calibrated. After vacuum packaging, the pressure is determined to be in the range of 7.3×102 ∼ 1.0×103 Pa. The force sensitivity is estimated to be 1.1×10-13 N/√Hz. The magnetic fields with a resolution of ∼4.0×10-6 and ∼2.4×10-10 T are detected by measuring the variations of the resonant frequency and resonant amplitude of the cantilever, respectively. Also, the magnetic force caused by electron spin resonance (ESR) of a standard radical polymer, DPPH, is demonstrated at atmospheric environment.

  97. Pico-thermogravimetric material properties analysis using diamond cantilever beam 査読有り

    Ioana Voiculescu, Masaya Toda, Meiyong Liao, Takahito Ono

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems　19　(7994519)　2223-2226　2017年7月26日

    DOI： 10.1109/TRANSDUCERS.2017.7994519 　

    詳細を見る 詳細を閉じる

    © 2017 IEEE. This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond cantilever beam. The thermal decomposition of calcium carbonate (CaCO3) was examined using this method. The diamond cantilever beam with CaCO3 attached on the tip was introduced in a thermal chamber and the temperature was raised to 600°C. The cantilever beam was vibrated and the resonant frequency was monitored in real time during the thermal process. From the resonant frequency behavior, there was evidence that the thermal conversion from CaCO3 to CaO starts around 500°C. The novel technique used very small amount of material and variations of the analyzed material pico-mass can be observed from the cantilever beam measurements. The information about the conversion temperature was highly accurate.

  98. Resonant magnetic sensor using magnetic gradient field formed by permalloy concentrator 査読有り

    Wataru Suwa, Naoki Inomata, Masaya Toda, Takahito Ono

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems　19　(7994175)　822-825　2017年7月26日

    DOI： 10.1109/TRANSDUCERS.2017.7994175 　

    詳細を見る 詳細を閉じる

    © 2017 IEEE. This paper reports a novel resonant magnetic sensor using a magnetic gradient field formed by a magnetic concentrator consisted of asymmetric and facing two permalloy plates. A Si cantilever with a size of 5×15×200 μm3 is placed between the gap of the magnetic concentrator, and a 10μm-diameter magnetic particle is placed on the tip of the cantilever. The resonant frequency changes as the magnetic force is impinged on the magnetic particle by the magnetic field gradient formed by the magnetic concentrator. The extremal magnetic field can be measured from the resonant frequency change. The resonant magnetic sensor is fabricated by conventional microfabrication techniques, and the magnetic force-depended resonant frequency change is evaluated under the self-oscillation condition. The experimental magnetic resolution was estimated to be 5.1×10-7 T considering the experimental noise level (3.29 ppm). By downsizing the cantilever and optimizing the permalloy concentrator, this resonant magnetic sensor has a feasibility to achieve a magnetic field resolution of 1.7 ×10-14 T.

  99. Fabrication of an Assembled Scanning Probe with Nitrogen Vacancy Centers in Diamond Particle 査読有り

    Minjie Zhu, Masaya Toda, Takahito Ono

    IEEE Transactions on Nanotechnology　16　(4)　545-550　2017年7月

    DOI： 10.1109/TNANO.2016.2640191 　

    ISSN：1536-125X

  100. High Aspect Ratio Silicon Structures Produced via Metal-Assisted Chemical Etching and Assembly Technology for Cantilever Fabrication 査読有り

    Nguyen Van Toan, Masaya Toda, Takahito Ono

    IEEE Transactions on Nanotechnology　16　(4)　567-573　2017年7月

    DOI： 10.1109/TNANO.2016.2645781 　

    ISSN：1536-125X

    詳細を見る 詳細を閉じる

    © 2002-2012 IEEE. This paper presents a metal-assisted chemical etching (MACE) method for high aspect silicon structures. Ultrahigh aspect trenches and pillars of 400 and 80, respectively, have been achieved using MACE. A survey of the MACE method investigated the etching time, pattern sizes, and concentration of etching solution. In addition, a comparison of the etching methods related to the etching depth, surface roughness, and aspect ratio structure, etc., between the deep reactive ion etching and MACE methods has been reported. A simple method for cantilever fabrication has been proposed and demonstrated. Cantilever-based pillars fabricated by MACE were successfully produced via an assembly technology. The pillars were assembled onto a glass substrate and fixed with a conductive glue. The fabricated cantilever showed a resonance frequency of 235 kHz and a quality factor of 800.

  101. Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy 査読有り

    Marjan Zakerin, Antonin Novak, Masaya Toda, Yves Emery, Filipe Natalio, Hans-Juergen Butt, Ruediger Berger

    SENSORS　17　(6)　1191-1-1191-11　2017年6月

    出版者・発行元：MDPI AG

    DOI： 10.3390/s17061191 　

    ISSN：1424-8220

    詳細を見る 詳細を閉じる

    In this paper, we apply a digital holographic microscope (DHM) in conjunction with stroboscopic acquisition synchronization. Here, the temperature-dependent decrease of the first resonance frequency (S-1(T)) and Young's elastic modulus (E-1(T)) of silicon micromechanical cantilever sensors (MCSs) are measured. To perform these measurements, the MCSs are uniformly heated from T-0 = 298 K to T = 450 K while being externally actuated with a piezo-actuator in a certain frequency range close to their first resonance frequencies. At each temperature, the DHM records the time-sequence of the 3D topographies for the given frequency range. Such holographic data allow for the extracting of the out-of-plane vibrations at any relevant area of the MCSs. Next, the Bode and Nyquist diagrams are used to determine the resonant frequencies with a precision of 0.1 Hz. Our results show that the decrease of resonance frequency is a direct consequence of the reduction of the silicon elastic modulus upon heating. The measured temperature dependence of the Young's modulus is in very good accordance with the previously-reported values, validating the reliability and applicability of this method for micromechanical sensing applications.

  102. パーマロイ磁気コンセントレータによる磁場勾配を用いた共振型磁気センサ

    諏訪亘, 猪股直生, 戸田雅也, 小野崇人

    電気学会全国大会講演論文集(CD-ROM)　2017　ROMBUNNO.3‐132　2017年3月5日

  103. Cantilever beam temperature sensors for biological applications 査読有り

    Masaya Toda, Naoki Inomata, Takahito Ono, Ioana Voiculescu

    IEEJ Transactions on Electrical and Electronic Engineering　12　(2)　153-160　2017年3月1日

    DOI： 10.1002/tee.22360 　

    ISSN：1931-4973

    eISSN：1931-4981

  104. Patterning high aspect silicon pillars on cantilever by metal assisted chemical etching for humidity sensing 査読有り

    Nguyen Van Toan, Masaya Toda, Takumi Hokama, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　0　(7863639)　1232-1235　2017年2月23日

    DOI： 10.1109/MEMSYS.2017.7863639 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    © 2017 IEEE. Pillars formed by metal assisted chemical etching (MACE) process as a post process on a silicon cantilever are presented in this work. Although the cantilever is very fragile, the patterning of the pillar structures on the cantilever have been successfully demonstrated. The high aspect silicon pillar structures from 20 to 40 with smooth surfaces and vertically etched shapes on the cantilever are formed by MACE. In addition, silicon cantilever with high aspect ratio pillars on its surface is proposed for humidity sensing application. The humidity sensing utilize the principle that the pillars stack together based upon the condensation behavior of water vapor on their surfaces.

  105. Improvement of the quality factor of single crystal diamond mechanical resonators 査読有り

    Meiyong Liao, Masaya Toda, Liwen Sang, Tokuyuki Teraji, Masataka Imura, Yasuo Koide

    JAPANESE JOURNAL OF APPLIED PHYSICS　56　(2)　024101-1-024101-5　2017年2月

    出版者・発行元：IOP PUBLISHING LTD

    DOI： 10.7567/JJAP.56.024101 　

    ISSN：0021-4922

    eISSN：1347-4065

    詳細を見る 詳細を閉じる

    Single-crystal diamond (SCD) has the potential to boost microelectromechanical system (MEMS) with unprecedented performance in terms of its intrinsic mechanical, chemical, and electronic properties, especially in the applications under extreme conditions. On the basis of the analysis of the energy dissipation in diamond mechanical resonators, the authors report on the marked improvement of the quality factor of SCD-MEMS resonators. Ion implantation assisted lift-off technique (IAL) is utilized to fabricate the SCD resonators. The quality factor of the resonator fabricated from the ion-damaged SCD layer alone is as low as 100-300 owing to the bulk or surface defects. The growth of homoepitaxial layers on the ionimplanted SCD substrates significantly improves the quality factor by more than 100 times. Cantilevers made of SCD epilayers of different thicknesses are examined. It is found that the quality factor increases with increasing the epilayer thickness. The maximum quality factor of the SCD cantilevers fabricated by the IAL technique reaches 3.9 x 10(4). A bilayer model is proposed to describe the variation of the quality factor. (c) 2017 The Japan Society of Applied Physics

  106. Vacuum packaged micro-cantilever with a magnetic particle 査読有り

    Nurasyikin Mohd, Gaopeng Xue, Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　137　(8)　245-246　2017年

    DOI： 10.1541/ieejsmas.137.245 　

    ISSN：1341-8939

    eISSN：1347-5525

  107. Microchanneled calorimetric concentration sensor for picoliter liquid samples of cytochrome c 国際誌 査読有り

    Masaya Toda, Ning Xia, Naoki Inomata, Takahito Ono

    137　(1)　28-31　2017年1月

    DOI： 10.1541/ieejsmas.137.28 　

    ISSN：1341-8939

    eISSN：1347-5525

  108. ナノ表面構造を持つカンチレバーの力学応答を利用した湿度センサ

    外間 匠, 菊池 亜紀応, Nguyen Van Toan, 戸田 雅也, 小野 崇人

    東北支部総会・講演会 講演論文集　2017　(0)　2017年

    出版者・発行元：一般社団法人 日本機械学会

  109. Comb-Drive XYZ-microstage with Large Displacements Based on Chip-Level Microassembly 査読有り

    Gaopeng Xue, Masaya Toda, Takahito Ono

    Journal of Microelectromechanical Systems　25　(6)　989-998　2016年12月

    DOI： 10.1109/JMEMS.2016.2607233 　

    ISSN：1057-7157

    詳細を見る 詳細を閉じる

    © 2016 IEEE. This paper reports the novel design, fabrication, and testing of a chip-level comb-drive XYZ-microstage that produces large displacements into x-, y-, and z-directions. The main parts of the XYZ-microstage, consisting of a combdrive XY-microstage for in-plane actuations, two comb-drive Z-actuators for out-of-plane actuation, and a bottom silicon base substrate, are assembled together based on chiplevel microassembly technology. The Z-actuators are vertically mounted on the grooves of silicon base substrate and kept in place by the support base block. Then, the XY-microstage is mounted onto the Z-actuators. The small pillars supported by mechanical springs in Z-actuator chips are inserted into the holes of XY-microstage. The conductive glue is used to hold the assembled structure of XYZ-microstage after curing, and also to achieve the electrical connections between the pillars in Z-actuators and the outer driving source of the XY-microstage. Therefore, all the bonded wires can be arranged together on Z-actuator chips, for the application of actuation voltages. It is demonstrated that the assembled comb-drive XYZ-microstage can achieve large displacements of 25.2μm in x-direction, 20.4μm in y-direction, and 58.5 ìm in z-direction. [2015-0273]

  110. Scanning probe with nitrogen vacancy centers in diamond particle for magnetic resonance imaging 査読有り

    Minjie Zhu, Masaya Toda, Takahito Ono

    16th International Conference on Nanotechnology - IEEE NANO 2016　16　210-213　2016年11月21日

    DOI： 10.1109/NANO.2016.7751404 　

    詳細を見る 詳細を閉じる

    © 2016 IEEE. Nitrogen vacancy (NV-) centers possess exceptional sensitivity to magnetic field even under ambient condition. The optically detectable electron spins and the atomic size make it a promising candidate for advanced magnetic resonance imaging (MRI) technique with nanoscale spatial resolution. In this work, diamond particles with NV-centers were deposited by microwave plasma chemical vapor deposition (MPCVD) under gaseous N2dopant and were fixed on the fabricated scanning probe as a magnetic sensor. While the existence of NV-center was determined by Raman spectroscopy, the photoluminescence intensity at 2.87 GHz microwave frequency was decreased by an optically detected magnetic resonance (ODMR) system. It implies that the NV-spin state can be manipulated and read out using optical excitation.

  111. Fabrication and evaluation of CVD diamond resonators 査読有り

    Yuya Mochimaru, Masaya Toda, Takahito Ono

    16th International Conference on Nanotechnology - IEEE NANO 2016　16　676-677　2016年11月21日

    DOI： 10.1109/NANO.2016.7751555 　

    詳細を見る 詳細を閉じる

    © 2016 IEEE. In this paper, thin film diamond resonators on Si wafer for high sensitivity force sensing have been developed. Patterned diamond structures have been formed on Ir/YSZ/Si substrate. The completed diamond resonator of cantilever shows a resonance frequency of 51.0 kHz with a quality factor of 14911. The both clamped resonator shows the force sensitivity of 3.36X1013 N/Hz05 at 229.3 kHz with 23500 of Q factor. While the crystallites and surface roughness are required to be improved, the patterned diamond resonator can be used as a high sensitive physicochemical sensing tool.

  112. High aspect silicon structures using metal assisted chemical etching 査読有り

    N. V. Toan, M. Toda, T. Ono

    16th International Conference on Nanotechnology - IEEE NANO 2016　16　720-723　2016年11月21日

    DOI： 10.1109/NANO.2016.7751348 　

    詳細を見る 詳細を閉じる

    © 2016 IEEE. This work reports on metal assisted chemical etching (MACE) for high aspect silicon structures. Ultra-high aspect trenches and pillars of 400 and 80, respectively, have been achieved by MACE. Additionally, a cantilever fabrication based on above pillars is demonstrated by using assembly technology. The pillars are assembled onto glass substrate and fixed by conductive glue. The fabricated cantilever shows a resonance frequency of 235 kHz and a quality factor of 800.

  113. Electrodeposition and characterization of nickel-carbon nanotube composite thin films with high carbon nanotube content 査読有り

    Muhammad Shahrukh Akhtar, Zhonglie An, Masaya Toda, Takahito Ono

    16th International Conference on Nanotechnology - IEEE NANO 2016　16　904-906　2016年11月21日

    DOI： 10.1109/NANO.2016.7751464 　

    詳細を見る 詳細を閉じる

    © 2016 IEEE. In this work, we present the electrodeposition of nickel (Ni)-carbon nanotube (CNT) composite thin films and evaluate the CNT weight percentage in films using energy-dispersive x-ray spectroscopy (EDX). To increase the CNTs codeposition, the CNTs are functionalized with positive charges and the composite thin films are deposited with different current waveforms. Furthermore, two kinds of composite films with CNTs annealed at different temperatures (1200°C and 2600°C) were compared for their CNT contents also the nanoindentation hardness of the composite films were evaluated. The composite films with a maximum CNT content of 5.4±2.0 wt% with a hardness of 17.0±3.0 GPa are achieved in the case of CNTs annealed at 1200°C. In the case of CNTs annealed at 2600°C, the CNT content of the composite was found to be 3.7±2.0 wt% with hardness of 14.9±3.0 GPa. For all Ni-CNTs composites, mechanical strengthening was found in the composites compared with pure Ni films.

  114. Assembled comb-drive XYZ-microstage with DPPH sample for the 3D scanning of magnetic resonance force microscope 査読有り

    Gaopeng Xue, Masaya Toda, Takahito Ono

    16th International Conference on Nanotechnology - IEEE NANO 2016　16　980-981　2016年11月21日

    DOI： 10.1109/NANO.2016.7751422 　

    詳細を見る 詳細を閉じる

    © 2016 IEEE. This paper presents an assembled comb-drive XYZ-microstage with large displacements for the scanning of magnetic resonance force microscopy (MRFM) at cryogenic environment. The scanning XYZ-microstage with little affection to the thermal variation and magnetic fields is required. The comb-drive XYZ-microstage is assembled with an XY-microstage, two Z-actuators and a silicon base substrate using a microassembly technology. For measurements, a sample of 1, 1-Diphenyl-2-picrylhydrazyl radical (DPPH) is glued onto the assembled XYZ-microstage. The imaging system is consisted of the scanning XYZ-microstage with DPPH sample, a sensitive cantilever sensor with a small magnetic particle, a fiber-optic interferometer to detect the vibration of the cantilever and a radio frequency (RF) coil. The measurements are performed at low pressure in a vacuum chamber. The vibration of the cantilever sensor based on magnetic force from electron spin resonance (ESR) spectroscopy can be detected through adjusting the magnetic field intensity of the RF coil.

  115. Magnetic field sensor based on vacuum packaged cantilever with a mounted magnet

    Gaopeng Xue, Masaya Toda, Nurasyikin Mohd, Zhonglie An, Nguyen Van Toan, Takahito Ono

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　33　25pm4-PS-060-1-25pm4-PS-060-4　2016年10月24日

  116. Packaging Technique of Micro Cantilever for Magnetic Force Sensing 査読有り

    Nurasyikin Mohd, Naoki Inomata, Nguyen Van Toan, Takahito Ono, Masaya Toda

    Proceedings of the International Workshop on Nanomechanical Sensors　12　150-151　2016年6月22日

  117. Comparative investigation into surface charged multi-walled carbon nanotubes reinforced Cu nanocomposites for interconnect applications 査読有り

    Zhonglie An, Masaya Toda, Takahito Ono

    Composites Part B: Engineering　95　(15)　137-143　2016年6月15日

    DOI： 10.1016/j.compositesb.2016.03.086 　

    ISSN：1359-8368

    詳細を見る 詳細を閉じる

    © 2016 Elsevier Ltd. 2016 Elsevier Ltd. All rights reserved. We present the electrodeposition of copper (Cu) nanocomposites with a high content of carbon nanotubes (CNTs), and evaluate the mechanical and thermal properties of the nanocomposites. Two kinds of multi-walled CNTs (MWCNTs), thermally-annealed at 1200 °C and 2600 °C, are pretreated in a polyelectrolyte solution to show positive charges on their surfaces and added into a sulfuric Cu electroplating solution. The weight fractions of the MWCNTs in the electroplated composites are 5.3 wt% and 2.8 wt%, respectively. The Young's moduli of the composites are approximately 1.2 times and 1.1 times greater than that of a pure Cu thin film, and the coefficients of thermal expansion (CTEs) of the composites are reduced to be 77% and 85% of the CTE of the pure Cu film, respectively. The mechanical strengthening and thermal expansion reduction are found in the composite. These results show that the nanocomposites would be used instead of Cu thin film for interconnect applications.

  118. Investigation of bimaterial cantilever beam for heat sensing in liquid 国際誌 国際共著 査読有り

    I. Voiculescu, F. Liu, T. Ono, M. Toda

    Sensors and Actuators, A: Physical　242　58-66　2016年5月1日

    DOI： 10.1016/j.sna.2015.11.030 　

    ISSN：0924-4247

  119. An investigation of processes for glass micromachining 査読有り

    Nguyen Van Toan, Masaya Toda, Takahito Ono

    Micromachines　7　(3)　1-12　2016年3月22日

    DOI： 10.3390/mi7030051 　

    ISSN：2072-666X

    eISSN：2072-666X

  120. CVDダイヤモンド振動子の作製と評価

    持丸 裕矢, 戸田 雅也, 小野 崇人

    日本機械学会東北支部第51期総会・講演会講演論文集　2016　(1)　75-76　2016年3月11日

  121. Mechanical properties of Carbon nanotubes-nickel composite thin films synthesized with high carbon nanotube content

    Akhtar M Shahrukh, Zhonglie An, Toda Masaya, Takahito Ono

    日本機械学会東北支部第51期総会・講演会講演論文集　2016　(1)　77-78　2016年3月11日

    出版者・発行元：一般社団法人日本機械学会

  122. Temperature-depended mechanical properties of microfabricated vanadium oxide mechanical resonators for thermal sensing 査読有り

    Naoki Inomata, Libao Pan, Masaya Toda, Takahito Ono

    Japanese Journal of Applied Physics　55　(3)　037201-1-037201-5　2016年3月

    DOI： 10.7567/JJAP.55.037201 　

    ISSN：0021-4922

    eISSN：1347-4065

    詳細を見る 詳細を閉じる

    © 2016 The Japan Society of Applied Physics. This study describes our newly fabricated resonant thermal sensors based on vanadium oxide and investigates the temperature dependences of their resonant frequencies and Q factor. The suspended vanadium oxide resonators are microfabricated using Au or SiO2 as the sacrificial layer. The resonant frequency of the fabricated vanadium oxide resonators linearly varies with temperature, and the value of temperature coefficient of the resonant frequency is %1308 ppm/K in the range of 20-100 C. The averaged Q factor in this range was 540. The temperature and thermal resolution of the vanadium oxide resonator are estimated as 1.7mK/p and 4.3 nW/p , respectively, which are higher than those of a Si resonator having similar dimensions and under similar conditions. Therefore, the feasibility that vanadium oxide is a promising material for resonant thermal sensors is indicated.

  123. Electrodeposition of carbon nanotubes-Cu composite for microelectrical elements applications 査読有り

    Zhonglie An, Masaya Toda, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2016-February　528-531　2016年2月26日

    DOI： 10.1109/MEMSYS.2016.7421678 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    © 2016 IEEE. In this paper, we present the electrodeposition of copper (Cu) composites with high contents of carbon nanotubes (CNTs), and evaluate the mechanical, electrical and thermal properties of the composites. A novel electroplating method is developed for the electrodeposition of the CNTs-Cu composite with two kinds of multi-walled CNTs (MWCNTs), thermally-annealed at 1200°C and 2600°C. The weight fractions of the CNTs in the composites are 5.0 wt%, and 2.8 wt%, and the Young's moduli of the composites are approximately 1.2 times and 1.1 times greater than that of the Cu film, respectively. The composites exhibit 26% and 16% lower coefficients of thermal expansion (CTE) than that of the Cu, and possess the same electrical resistivity with the Cu. This results show that the CNTs-Cu composite is ideally suited for microelectrical elements applications.

  124. Microfabricated vanadium oxide resonant thermal sensor with a high temperature coefficient of resonant frequency 査読有り

    Naoki Inomata, Libao Pan, Masaya Toda, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2016-February　1042-1045　2016年2月26日

    DOI： 10.1109/MEMSYS.2016.7421812 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    © 2016 IEEE. This study describes our newly fabricated resonant thermal sensors based on vanadium oxide and investigates the temperature dependences of their resonant frequencies and Q factor. The deposited vanadium oxide thin films comprise 55% VO2 and 45% V2O5. The resonant frequency of the fabricated vanadium oxide resonators linearly varies with temperature, and the value of temperature coefficient of the resonant frequency is -1308 ppm/K in the range of 20-100°C. The averaged Q factor in this range was 540. The temperature and thermal resolution of the vanadium oxide resonator are estimated as 1.69 mKWHz and 4.3 nW/√Hz, respectively, which are higher than those of a Si resonator having similar dimensions and under similar conditions.

  125. Pulse-Reverse Electrodeposition and Micromachining of Graphene–Nickel Composite: An Efficient Strategy toward High-Performance Microsystem Application 査読有り

    Jinhua Li, Zhonglie An, Zhuqing Wang, Masaya Toda, Takahito Ono

    ACS Appl. Mater. Interfaces　8　(6)　3969-3976　2016年2月24日

    DOI： 10.1021/acsami.5b11164 　

    ISSN：1944-8244

    eISSN：1944-8252

  126. Bimaterial nanocantilever beam calorimeter for atmospheric pressure and liquid applications

    Ioana Voiculescu, Masaya Toda, Takahito Ono, Fei Liu

    Nanocantilever Beams: Modeling, Fabrication and Applications　411-429　2016年1月12日

    DOI： 10.4032/9789814613248 　

  127. Highly sensitive thermometer using a vacuum-packed Si resonator in a microfluidic chip for the thermal measurement of single cells 査読有り

    Naoki Inomata, Masaya Toda, Takahito Ono

    Lab on a Chip　16　(18)　3597-3603　2016年

    DOI： 10.1039/c6lc00949b 　

    ISSN：1473-0197

    eISSN：1473-0189

    詳細を見る 詳細を閉じる

    © 2016 The Royal Society of Chemistry. A highly sensitive thermometer system for a living cell is proposed, fabricated, and evaluated. The system possesses a resonant thermal sensor surrounded by vacuum in a microfluidic chip. The measurement principle relies on resonant frequency tracking of the resonator in temperature variations due to the heat from a sample cell; the heat is conducted from the sample cell in the microfluidic channel via a heat guide connecting the resonator to a sample stage. This configuration can reduce heat loss from the resonator to the surroundings and damping in water. Two types of resonators are prepared, i.e., a cantilevered resonator and a double-supported resonator. The resonator sizes as a sensor are 30 × 50 × 1.5 μm in the cantilevered resonator, 30 × 75 × 0.40 μm in the double-supported one, respectively. The temperature and thermal resolutions of 79 μK and 1.90 nW, respectively, are achieved using the double-supported resonator. Two types of heat emissions from single brown fat cells are detected; one is continuous heat generation in the presence of chemical stimulation by a norepinephrine solution, and the other is pulsed without any stimulation.

  128. 139 CVDダイヤモンド振動子の作製と評価

    持丸 裕矢, 戸田 雅也, 小野 崇人

    東北支部総会・講演会 講演論文集　2016　(0)　75-76　2016年

    出版者・発行元：一般社団法人 日本機械学会

  129. Photoacoustic Microsensor for Glucose Monitoring in Human Blood

    Imran Latif, Masaya Toda, Takahito Ono

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　32　28pm1-B-5-1-28pm1-B-5-6　2015年10月28日

    出版者・発行元：Institute of Electrical Engineers of Japan

  130. Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of magnetic resonance force microscopy

    Gaopeng Xue, Masaya Toda, Takahito Ono

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　32　29pm3-PS-47-1-29pm3-PS-47-4　2015年10月28日

    出版者・発行元：Institute of Electrical Engineers of Japan

  131. 酸化バナジウムを用いた共振型マイクロ熱量センサ

    猪股 直生, 潘 立葆, 戸田 雅也, 小野 崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　32　30am2-PS-66-1-30am2-PS-66-4　2015年10月28日

    出版者・発行元：Institute of Electrical Engineers of Japan

  132. 磁気共鳴イメージングためのNVセンターを有するダイヤモンドプローブ

    朱 敏杰, 戸田 雅也, 小野 崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　32　30am2-PS-076-1-30am2-PS-076-4　2015年10月28日

    出版者・発行元：Institute of Electrical Engineers of Japan

  133. Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of low temperature measurement systems

    Gaopeng Xue, Masaya Toda, Takahito Ono

    Japan-China-Korea Joint Conference on MEMS/NEMS 2015 (JCK MEMS/NEMS 2015)　6　73-74　2015年9月23日

  134. Probe with Nitrogen Vacancy in Diamond Thin Film for Magnetic Resonance Imaging

    Minjie Zhu, Masaya Toda, Takahito Ono

    Japan-China-Korea Joint Conference on MEMS/NEMS 2015 (JCK MEMS/NEMS 2015)　6　85-86　2015年9月23日

  135. 磁気共鳴イメージングためのNVセンターを 有するダイヤモンドプローブ

    朱 敏杰, 戸田 雅也, 小野 崇人

    日本機械学会2015年度年次大会講演論文集　15　(1)　J2220306-1-J2220306-4　2015年9月13日

    出版者・発行元：一般社団法人日本機械学会

    詳細を見る 詳細を閉じる

    Magnetic resonance imaging (MRI) is the key technology to investigate anatomy and phyisiology by a non-destructive imaging method. The analysis of molecular structures in nano-scale plays an important role for future nanotechnology. Since the spatial resolution of conventional MRI sytsems is limited to tens of micrometers, the high sensitive magnetic sensor is required for imaging in nanometer spatial resolution. The luminescence of nitrogen vacancy (NV) centers in diamond is sensitive to magnetic field, which applicable to MRI at room temperature through optical detection. Si scanning probes with a diamond particle having the NV centers are developed. Firstly, the diamond particles with the NV centers is deposited on a dummy wafer by microwave plasma chemical vapor deposition (MPCVD) with additional N_2 gas. While a graphite component in the diamond particle is observed by Raman spectroscopy, and the luminescence of the NV centers has been slightly detected. After XeF_2 etching and annealing, diamond particles which own NV centers are picked up and fixed onto the fabricated probe pillar using a glass needle and glue.

  136. 非線形減衰を用いたSi振動子のQ値向上

    猪股 直生, 斎藤 和也, 戸田 雅也, 小野 崇人

    日本機械学会2015年度年次大会講演論文集　15　(1)　J2210303-1-J2210303-2　2015年9月13日

  137. Chip-level microassembly of XYZ-microstage with large displacements 査読有り

    Gaopeng Xue, Masaya Toda, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　135　(6)　236-237　2015年6月1日

    DOI： 10.1541/ieejsmas.135.236 　

    ISSN：1341-8939

    eISSN：1347-5525

  138. Comb-drive XYZ-microstage based on assembling technology for low temperature measurement systems 国際誌 査読有り

    Gaopeng Xue, Masaya Toda, Takahito Ono

    ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference　(7111006)　83-88　2015年5月20日

    DOI： 10.1109/ICEP-IAAC.2015.7111006 　

  139. Microstructuring of carbon nanotubes-nickel nanocomposite 国際誌 査読有り

    Zhonglie An, Liang He, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono

    Nanotechnology　26　(19)　195601-1-195601-8　2015年5月15日

    DOI： 10.1088/0957-4484/26/19/195601 　

    ISSN：0957-4484

    eISSN：1361-6528

  140. Si nanowire probe with Nd–Fe–B magnet for attonewton-scale force detection 国際誌 査読有り

    Yong-Jun Seo, Masaya Toda, Takahito Ono

    Journal of Micromechanics and Microengineering　25　(4)　045015-1-045015-5　2015年4月

    DOI： 10.1088/0960-1317/25/4/045015 　

    ISSN：0960-1317

    eISSN：1361-6439

  141. 超薄型カンチレバーを用いた高感度バイオセンシング

    倉田慎, 小野崇人, 戸田雅也

    日本機械学会東北支部第50期総会・講演会講演論文集　2015　(1)　255-256　2015年3月13日

  142. Electrochemical Biosensor for Single Cell Impedance Spectroscopy

    Sena Nur Arslan, Masaya Toda, Takahito Ono

    日本機械学会東北支部第50期総会・講演会講演論文集　2015　(1)　249-250　2015年3月13日

  143. Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems 国際誌 査読有り

    Gaopeng Xue, Masaya Toda, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2015-February　(February)　14-17　2015年2月26日

    DOI： 10.1109/MEMSYS.2015.7050874 　

    ISSN：1084-6999

  144. Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum 査読有り

    Hideki Hayashi, Masaya Toda, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2015-February　(February)　344-347　2015年2月26日

    DOI： 10.1109/MEMSYS.2015.7050959 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    © 2015 IEEE. A micro fluidic chamber with 178 nm-thick single crystal Si windows on a micro channel has been developed. Because of these thin windows, the aquatic sample inside of the channel can be observed by scanning electron microscopy. Secondary electrons from a sample in the channel are able to be detected in vacuum with an acceleration voltage of 15 kV, where the emission current is 75 μA. The micro fluidic chamber is possibly applied to cell imaging via the Si thin window in vacuum using magnetic resonance force microscopy.

  145. Synthesis of carbon nanotubes-Ni composite for micromechanical elements application 査読有り

    Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　2015-February　(February)　401-404　2015年2月26日

    DOI： 10.1109/MEMSYS.2015.7050974 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    © 2015 IEEE. We present the fabrication and characterization of a silicon micromirror with carbon nanotubes (CNTs)-nickel (Ni) composite beams, and evaluate the mechanical stability of the micromirror in terms of resonant frequency. A novel electroplating method is developed for the synthesis of the CNTs-Ni composite. The weight fraction of the CNTs in the electroplated composite is 2.6 wt%, and the ultramicroindentation hardness of the composite is 18.6 GPa. The maximum variation of the resonant frequency of the fabricated micromirror during a long term stability test is approximately 0.25%, and its scanning angle is approximately 20°. It shows the potential ability of the CNTs-Ni composite for micromechanical elements application.

  146. Sub-nanowatt thermal detection device based on a Si double-supported resonator for single cells

    Naoki Inomata, Masaya Toda, Takahito Ono

    MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences　69-71　2015年

    詳細を見る 詳細を閉じる

    © 15CBMS-0001. We have developed a highly sensitive thermal detection device based on a Si double-supported resonator to measure a heat from single cells. The double-supported resonators are expected to have a large temperature coefficient of the resonant frequency (TCF). The sensor is vacuum-enclosed in a microfluidic chip, which make it possible to measure the heat from cells captured in liquid with negligible heat loss to the surrounding and damping. The TCF of the fabricated sensor is -590 ppm/K, and 0.16 nW/√Hz of the thermal resolution is achieved. Then, the thermal measurement of a single brown fat cell is succeeded by using the fabricated device.

  147. Si-based micro-nanomechanics for ultimate sensing 査読有り

    Takahito Ono, Masaya Toda, Yong Jun Seo, Naoki Inomata

    ECS Transactions　66　(5)　123-129　2015年

    DOI： 10.1149/06605.0123ecst 　

    ISSN：1938-5862

    eISSN：1938-6737

    詳細を見る 詳細を閉じる

    © The Electrochemical Society. Resonant sensors for ultimate sensing are developed. By scaling down, the sensitivity of a magnetic resonance force microscopy probe is improved, and three-dimensional imaging of radical density in a poly-10-(4-vinylbenzyl)-10H-phenothiazine particle is demonstrated at room temperature. Also resonant thermal sensor with a microchannel is developed and applied to detect heat from a single brawn fat cell.

  148. J2210303 非線形減衰を用いたSi振動子のQ値向上

    猪股 直生, 齊藤 和也, 戸田 雅也, 小野 崇人

    年次大会　2015　(0)　_J2210303--_J2210303-　2015年

    出版者・発行元：一般社団法人 日本機械学会

    詳細を見る 詳細を閉じる

    The Q factor enhancement of Si resonators using nonlinear damping is investigated for highly sensitive resonant sensors. The thermomechanical noise, which limits the physical resolution of resonant sensors, can be improved by increasing the Q factor. In this paper, the nonlinear damping effect of thin Si resonators was investigated and the Q factor enhancement caused by nonlinear damping is measured. The resonator thickness used for the Q factor measurements are 100, 400, 800, 1500 nm. The Q factor of the 100 nm-thick resonator is dramatically increased as its vibration amplitude become larger, while the Q factor change become smaller as the resonator thickness become thicker. These results show that Si resonators have the nonlinear damping effect, and the large Q factor enhancement by this effect is markedly observed in the thin resonator. It is concluded that the Q factors of nanomechanical resonators can be increased by only adjusting its vibration amplitudes.

  149. J2220306 磁気共鳴イメージングためのNVセンターを有するダイヤモンドプローブ

    朱 敏杰, 戸田 雅也, 小野 崇人

    年次大会　2015　(0)　_J2220306--_J2220306-　2015年

    出版者・発行元：一般社団法人 日本機械学会

    詳細を見る 詳細を閉じる

    Magnetic resonance imaging (MRI) is the key technology to investigate anatomy and phyisiology by a non-destructive imaging method. The analysis of molecular structures in nano-scale plays an important role for future nanotechnology. Since the spatial resolution of conventional MRI sytsems is limited to tens of micrometers, the high sensitive magnetic sensor is required for imaging in nanometer spatial resolution. The luminescence of nitrogen vacancy (NV) centers in diamond is sensitive to magnetic field, which applicable to MRI at room temperature through optical detection. Si scanning probes with a diamond particle having the NV centers are developed. Firstly, the diamond particles with the NV centers is deposited on a dummy wafer by microwave plasma chemical vapor deposition (MPCVD) with additional N_2 gas. While a graphite component in the diamond particle is observed by Raman spectroscopy, and the luminescence of the NV centers has been slightly detected. After XeF_2 etching and annealing, diamond particles which own NV centers are picked up and fixed onto the fabricated probe pillar using a glass needle and glue.

  150. Energy dissipation in micron- and submicron-thick single crystal diamond mechanical resonators 査読有り

    Meiyong Liao, Masaya Toda, Liwen Sang, Shunichi Hishita, Shuji Tanaka, Yasuo Koide

    APPLIED PHYSICS LETTERS　105　(25)　251904-1-251904-5　2014年12月

    出版者・発行元：AMER INST PHYSICS

    DOI： 10.1063/1.4904990 　

    ISSN：0003-6951

    eISSN：1077-3118

    詳細を見る 詳細を閉じる

    The authors report the resonance frequency and the energy dissipation of single crystal diamond cantilevers with different dimensions, which were fabricated by ion implantation assisted technique. The resonance frequency well followed the inverse power law relationship with the length of the cantilevers and exhibited a high reproducibility with varying the dimensions. The energy dissipation decreased with increasing the cantilever length and saturated or reduced at a certain value. For the shorter cantilevers, clamping loss governed the energy dissipation. As the cantilever length increased to a certain value, defects relaxation or surface effect became dominant. The possible origins for these energy dissipations were discussed. (C) 2014 AIP Publishing LLC.

  151. Fabrication and characterization of silicon micromirror with carbon nanotubes-nickel nanocomposite beams 査読有り

    Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono

    Proceedings of the IEEE Conference on Nanotechnology　14　888-892　2014年11月26日

    DOI： 10.1109/NANO.2014.6968008 　

    eISSN：1944-9399

    詳細を見る 詳細を閉じる

    © 2014 IEEE. In this paper, we present the fabrication and characterization of a silicon micromirror with carbon nanotubes (CNTs)-nickel (Ni) nanocomposite beams, and evaluate the mechanical stability of the micromirror in terms of resonant frequency. A novel electroplating method is developed for synthesis of the CNTs-Ni nanocomposite. CNTs are pretreated to have positive charges on their surface and added into a Ni electroplating solution to form a CNTs-Ni nanocomposite electroplating suspension. The weight fraction of the CNT in the electroplated nanocomposite is 9.1 wt%, and the ultramicroindentation hardness is 13 GPa. The mechanical strengthening improvement is found in the nanocomposite in comparison with a Ni film. The maximum variation of the resonant frequency of the micromirror during a long term stability test is about 0.4%, and its scanning angle is about 11°. It shows the potential ability of the CNTs-Ni nanocomposite with proper design for microstructure application.

  152. Assembled comb-drive XYZ-microstage integrated with capacitive displacement sensor for low temperature measurement systems 査読有り

    Gaopeng Xue, Masaya Toda, Takahito Ono

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　31　1-6　2014年10月20日

    出版者・発行元：Institute of Electrical Engineers of Japan

  153. 真空中細胞観察のための薄膜Si窓を有する マイクロチャネル型チャンバー 査読有り

    林秀樹, 戸田雅也, 小野 崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　31　1-5　2014年10月20日

    出版者・発行元：Institute of Electrical Engineers of Japan

  154. Improved thermal interface property of carbon nanotube–Cu composite based on supercritical fluid deposition 査読有り

    Zhonglie An, Masaya Toda, Takahito Ono

    Carbon　75　281-288　2014年8月

    DOI： 10.1016/j.carbon.2014.04.003 　

    ISSN：0008-6223

  155. Resonant Silicon Micromirror with Electrophated Carbon Nanotubes-Nickel Composite Beams for MEMS Application

    Ahonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono

    The IEEE International Nanoelectonics Conference　6　173　2014年7月28日

  156. Micro/Nano-mechanical Resonators for Ultimate Sensing 招待有り 査読有り

    Takahito Ono, Naoki Inomata, Masaya Toda

    The Asia-Pacific Conference on Transducers and Micro/Nano Technologies　7　1　2014年6月29日

  157. SYNTHESIS AND CHARACTERIZATION OF CARBON NANOTUBES-NICKEL COMPOSITE WITH HIGH CONTENT OF CARBON NANOTUBES 査読有り

    Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono

    The Asia-Pacific Conference on Transducers and Micro/Nano Technologies　7　14-5　2014年6月29日

  158. MICROSTAGE DRIVEN BY COMB-DRIVE ACTUATORS FOR LOW TEMPERATURE MEASUREMENT SYSTEMS 査読有り

    Gaopeng Xue, Masaya Toda, Takahito Ono

    The Asia-Pacific Conference on Transducers and Micro/Nano Technologies　7　7-1　2014年6月29日

  159. Temperature changes in brown adipocytes detected with a bimaterial microcantilever 査読有り

    Masaaki K. Sato, Masaya Toda, Naoki Inomata, Hisataka Maruyama, Yuko Okamatsu-Ogura, Fumihito Arai, Takahito Ono, Akihiko Ishijima, Yuichi Inoue

    Biophysical Journal　106　(11)　2458-2464　2014年6月3日

    DOI： 10.1016/j.bpj.2014.04.044 　

    ISSN：0006-3495

    eISSN：1542-0086

    詳細を見る 詳細を閉じる

    Mammalian cells must produce heat to maintain body temperature and support other biological activities. Methods to measure a cell's thermogenic ability by inserting a thermometer into the cell or measuring the rate of oxygen consumption in a closed vessel can disturb its natural state. Here, we developed a noninvasive system for measuring a cell's heat production with a bimaterial microcantilever. This method is suitable for investigating the heat-generating properties of cells in their native state, because changes in cell temperature can be measured from the bending of the microcantilever, without damaging the cell and restricting its supply of dissolved oxygen. Thus, we were able to measure increases in cell temperature of <1 K in a small number of murine brown adipocytes (n = 4-7 cells) stimulated with norepinephrine, and observed a slow increase in temperature over several hours. This long-term heat production suggests that, in addition to converting fatty acids into heat energy, brown adipocytes may also adjust protein expression to raise their own temperature, to generate more heat. We expect this bimaterial microcantilever system to prove useful for determining a cell's state by measuring thermal characteristics. © 2014 Biophysical Society.

  160. Fabrication of nano-gap structures based on plastic deformation of strained Si springs by stiction effects 国際誌 査読有り

    Masaya Toda, Atsushi Yokoyama, Nguyen Van Toan, Naoki Inomata, Takahito Ono

    Microsystem Technologies　21　(3)　649-654　2014年5月1日

    DOI： 10.1007/s00542-014-2182-z 　

    ISSN：0946-7076

    eISSN：1432-1858

  161. Calibration study of bimaterial cantilever beam nanocalorimeter used in liquid applications 査読有り

    Masaya Toda, Ioana Voiculescu, Fei Liu, Takahito Ono

    Proceedings of the International Workshop on Nanomechanical Sensors　11　112-113　2014年4月30日

  162. Thin Polyelectrolyte Multilayers Made by Inkjet Printing and Their Characterization by Nanomechanical Cantilever Sensors 国際誌 国際共著 査読有り

    Masaya Toda, Yun Chen, Sebastian K. Nett, Akiko N. Itakura, Jochen Gutmann, Ruediger Berger

    JOURNAL OF PHYSICAL CHEMISTRY C　118　(15)　8071-8078　2014年4月

    出版者・発行元：AMER CHEMICAL SOC

    DOI： 10.1021/jp501464j 　

    ISSN：1932-7447

  163. Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis 査読有り

    Liang He, Masaya Toda, Yusuke Kawai, Hidetoshi Miyashita, Mamoru Omori, Toshiyuki Hashida, Rüdiger Berger, Takahito Ono

    Microsystem Technologies　20　(2)　201-208　2014年2月

    DOI： 10.1007/s00542-013-1771-6 　

    ISSN：0946-7076

    詳細を見る 詳細を閉じる

    A fabrication method of carbon nanotube (CNT)-carbon composite microstructures has been developed. CNT-carbon composite microstructures with dimensions from 10 micrometers to several hundred micrometers have been fabricated by pyrolysis process from the patterned SU-8 photoresist mixed with 1 wt% of CNTs at temperature of ~600 C under inert atmosphere. The resulting composite microstructures with a high aspect ratio of ~34 can be successfully fabricated by this novel fabrication method. This research provides a simple approach that is compatible with microfabrication technology and is capable of fabricating composite microstructures with reproducible shape and dimensions, at desired locations. This approach has potential for the further exploring of applications of composite micro/nano structures as functional units in various microdevices. Also the ultramicroindentation hardness of the CNT-carbon composite films was investigated by nanoindentation measurement. © 2013 Springer-Verlag Berlin Heidelberg.

  164. A capacitive silicon resonator with a movable electrode structure for gap width reduction 査読有り

    Nguyen Van Toan, Masaya Toda, Yusuke Kawai, Takahito Ono

    Journal of Micromechanics and Microengineering　24　(2)　025006-1-025006-11　2014年2月

    DOI： 10.1088/0960-1317/24/2/025006 　

    ISSN：0960-1317

    eISSN：1361-6439

    詳細を見る 詳細を閉じる

    This paper presents a capacitive silicon resonator with movable electrode structures to reduce the motional resistance for lower insertion loss and lower phase noise, and also increase the tuning frequency range for the compensation of temperature drift of the silicon oscillator. The resonant frequency of the fabricated device with a length of 500 m, width of 440 m and thickness of 5 m is observed at 9.65 MHz, and the quality factor is 49 000. Using an electrostatically drived movable electrode structure, it is shown that the motional resistance is reduced by 200 times, the output signal (insertion loss) is increased by 21 dB and the tuning characteristic of the frequency is also increased by seven times over that of the structures without movable electrodes. © 2014 IOP Publishing Ltd.

  165. Ultrasensitive Si nanowire probe for magnetic resonance detection 査読有り

    Yong Jun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　151-154　2014年

    DOI： 10.1109/MEMSYS.2014.6765596 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    In this study, we have fabricated a 210 nm-wide and 32 μm-long Si nanowire probe with a Si mirror from a silicon-on-insulator wafer. Additionally, a Nd-Fe-B magnet is mounteded at the end of the nanowire for magnetic force detection in MRFM measurements. The fabricated probe shows a resonance frequency f0 of 11.256 kHz and a Q factor of 12000 after annealing at 800 oC for 2 hours in forming gas. The probe exhibits atto-newton sensitivity, and the measurement of force mapping based on electron spin resonance is demonstrated for three-dimensional imaging of radical density. The detected force is approximately 8.5 aN at room temperature. © 2014 IEEE.

  166. A long bar type silicon resonator with a high quality factor 査読有り

    Nguyen Van Toan, Masaya Toda, Yusuke Kawai, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　134　(2)　26-31+2　2014年

    DOI： 10.1541/ieejsmas.134.26 　

    ISSN：1341-8939

    eISSN：1347-5525

    詳細を見る 詳細を閉じる

    This paper presents a long bar type silicon resonator with a high quality (Q) factor and an evaluation of the hermetic packaged device. This research aims at developing the integration technology of the capacitive silicon resonator on LSI for application of a timing device. The structure of the silicon resonator is defined by deep reactive ion etching of the top Si layer of a silicon on insulator wafer, and then the patterned top Si layer is transferred onto a low temperature co-fired ceramic substrate. Fabricated resonator is hermetically sealed by anodic bonding technique. The resonator is excited in the extensional bulk acoustic mode at a resonant frequency of 9.69 MHz. The Q factor measured for this device is approximately 368,000 at vacuum chamber pressure of 0.01 Pa. Additionally, the dependence of the Q factor on the operating pressure is measured in order to evaluate the vacuum level of the hermetically packaged device. © 2014 The Institute of Electrical Engineers of Japan.

  167. Synthesis and characterization of carbon nanotube-Cu composite using supercritical fluid deposition 査読有り

    Zhonglie An, Masaya Toda, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　134　(2)　38-39　2014年

    DOI： 10.1541/ieejsmas.134.38 　

    ISSN：1341-8939

    eISSN：1347-5525

    詳細を見る 詳細を閉じる

    We propose a new approach to synthesize a carbon nanotube (CNT) - copper (Cu) composite on a silicon substrate using combination of supercritical fluid deposition (SCFD) and electrochemical plating (ECP) process. The measured density of the composite is 8.2 ± 0.3 g/cm3, and the volume percentage of voids is 3~6%. The evaluated thermal resistance including the thermal interface resistance and bulk resistance of the composite is 28.4~42.1 mm2 KW-1. It shows the potential ability of the CNTs-Cu composite for thermal interface material. © 2014 The Institute of Electrical Engineers of Japan.

  168. Fabrication of silicon nanowire probe with magnet for magnetic resonance force microscopy 査読有り

    Yong Jun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　134　(6)　166-167　2014年

    DOI： 10.1541/ieejsmas.134.166 　

    ISSN：1341-8939

    eISSN：1347-5525

    詳細を見る 詳細を閉じる

    Silicon nanowires have attracted considerable attention due to their excellent mechanical and electrical properties and widely investigated for various applications. One of the exciting applications is magnetic resonance force microscopy (MRFM), which requires a high sensitive probe for three-dimensional imaging of spin densities. In this study, we have fabricated a 160 nm-wide and 52 μm-long Si nanowire probe with a Si mirror and Ni magnet from a silicon-on-insulator wafer. The nanowire is suitable structure as the probe for a detection of MRFM. The probe shows a resonance frequency of 8.007 kHz and a Q factor of approximately 5000. Two-dimensional force mapping based on electron spin resonance has been demonstrated using the fabricated nanowire probe. © 2014 The Institute of Electrical Engineers of Japan.

  169. J2230201 全反射減衰法による体内成分分析のためのマイクロ化フーリエ変換赤外分光計の開発([J223-02]マイクロナノメカトロニクス(2),マイクロ・ナノ工学部門一般セッション)

    佐藤 祐樹, 棚橋 辰之, 戸田 雅也, 猪股 直生, 小野 崇人

    年次大会　2014　(0)　_J2230201--_J2230201-　2014年

    出版者・発行元：一般社団法人 日本機械学会

    詳細を見る 詳細を閉じる

    This work aims at developing a miniature Fourier transform infrared spectrometer (FTIR) for monitoring body components using an attenuated total reflection (ATR) method. An electrostatically driven Wishbone Si micro-interferometer with a size of 8×8 mm^2 and elliptic ATR crystal are developed using a microfabrication technique. Micro-corner cube mirrors is fabricated and assembled on the interferometer. The corner cube mirrors on the interferometer can be rotated by approximately 3 degrees. The elliptic ATR crystal is fabricated from a float-zone Si wafer using laser dicing. The measured transmittance of the elliptic ATR crystal is 44% larger than that of a rectangular ATR crystal.

  170. Carbon nanotube-Cu Composite Formation based on Supercritical Fluid Process 査読有り

    Zhonglie An, Masaya Toda, Takahito Ono

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　30　6AM2-A-1-1-6AM2-A-1-5　2013年11月5日

    出版者・発行元：Institute of Electrical Engineers of Japan

  171. A Si Nanowire Probe with a Nd-Fb-B magnet for Force Detection 査読有り

    Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　30　6PM1-A-2-1-6PM1-A-2-5　2013年11月5日

    出版者・発行元：Institute of Electrical Engineers of Japan

  172. An electrostatically driven microstage with capacitive displacement sensor for low temperature operation 査読有り

    Gaopeng Xue, Masaya Toda, Liang He, Yusuke Kawai, Takahito Ono

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　30　6PM3-PSS-22-1-6PM3-PSS-22-4　2013年11月5日

    出版者・発行元：Institute of Electrical Engineers of Japan

  173. Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors 査読有り

    Akiko N. Itakura, Masaya Toda, Koji Miyake, Renate Foerch, Ruediger Berger

    JAPANESE JOURNAL OF APPLIED PHYSICS　52　(11)　110111-1-110111-5　2013年11月

    出版者・発行元：IOP PUBLISHING LTD

    DOI： 10.7567/JJAP.52.110111 　

    ISSN：0021-4922

    eISSN：1347-4065

    詳細を見る 詳細を閉じる

    Determination of mechanical properties of thin films, such as the Young's modulus, is of fundamental importance when the films are used for coating or for materials of microelectromechanical systems (MEMS). We show a simple method to calculate the effective Young's modulus of thin films by comparing lateral and vertical expansions. The stress of the film due to expansion in the lateral direction was measured using micromechanical cantilever sensor (MCS) techniques which allow for a calculation of the lateral expansion ratio of the film. The vertical expansion was measured using ellipsometry, surface plasmon resonance (SPR) and other film thickness meters. There is no limitation by the method for a measurement of Young's modulus, even if soft and thin polymer film. We detected the influence of humidity on effective Young's modulus of a polymer material by the method, as an example. (C) 2013 The Japan Society of Applied Physics

  174. Silicon Nanowire Probe with Nd-Fe-B magnet for Magnetic Resonance Force Microscopy 査読有り

    Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

    International Conference on Micro and Nano Engineering　39　208　2013年9月16日

  175. Synthesis of Carbon Nanotubes-Cu Composite Film using Supercritical Fluid Deposition for Thermal Interface 査読有り

    Zhonglie An, Masaya Toda, Takahito Ono

    International Conference on Micro and Nano Engineering　39　483　2013年9月

  176. Si Nanowire Probe with a magnet for Magnetic ResonanceDetection 査読有り

    Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

    Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013)　4　P-02　2013年8月22日

  177. Supercritical Fluid Deposition and Characterization of Carbon Nanotubes-Cu composite 査読有り

    Zhonglie An, Masaya Toda, Takahito Ono

    Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013)　4　O-06　2013年8月22日

  178. Pico-calorimeter using a resonant thermal sensor 査読有り

    Naoki Inomata, Masaya Toda, Takahito Ono

    Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013)　4　P-01　2013年8月22日

  179. Fabrication of an hermetically packaged silicon resonator on LTCC substrate 査読有り

    Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono

    Microsystem Technologies　19　(8)　1165-1175　2013年8月

    DOI： 10.1007/s00542-012-1716-5 　

    ISSN：0946-7076

    詳細を見る 詳細を閉じる

    The design, fabrication and packaging process of silicon resonators capable of the integration of LSI (Large Scale Integration) have been developed on the basis of packaging technology using an LTCC (Low Temperature Co-fired Ceramic) substrate. The structures of silicon resonators are defined by deep reactive ion etching (DRIE) on a silicon on insulator (SOI) wafer and then transferred onto the LTCC substrate and hermetically sealed by anodic bonding technique. The measured resonant frequency of a micromechanical bulk acoustic mode silicon resonator after packaging at 0.02 Pa is 20.24 MHz with a quality factor of 50,600. © 2012 Springer-Verlag Berlin Heidelberg.

  180. Suspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquid 国際誌 査読有り

    Masaya Toda, Tomoyuki Otake, Hidetoshi Miyashita, Yusuke Kawai, Takahito Ono

    19　(7)　1049-1054　2013年7月

    DOI： 10.1007/s00542-012-1698-3 　

    ISSN：0946-7076

  181. SILICON NANOWIRE PROBE FOR MAGNETIC RESONANCE FORCE MICROSCOPY 査読有り

    YongJun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

    Proceedings of the International Workshop on Nanomechanical Sensing　10　59-60　2013年5月1日

  182. POLYELECTROLYTE MULTILAYERS ON MCS MADE BY INKJET PRINTING 査読有り

    Masaya Toda, Yun Chen, Sebastian Nett, Jochen Gutmann, Ruediger Berger

    Proceedings of the International Workshop on Nanomechanical Sensing　10　105-106　2013年5月1日

  183. CANTILEVERS FOR NANOSENSING: CALORIMETRY FOR A LIVING CELL 査読有り

    Masaya Toda, Naoki Inomata, Masaaki Sato, Akihiko Ishijima, Takahito Ono

    Proceedings of the International Workshop on Nanomechanical Sensors　17　35-36　2013年5月1日

  184. Fabrication and packaging process of silicon resonators capable of the integration of LSI for application of timing device 査読有り

    Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　26　377-380　2013年

    DOI： 10.1109/MEMSYS.2013.6474257 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    In this paper, silicon resonators were hermetically packaged on basis of anodic bonding of Si and LTCC (Low Temperature Co-fired ceramic) substrates. This research aims at developing the integration technology of the resonator on LSI (Large Scale Integration) for application of a timing device. The structures of the resonators were transferred onto the LTCC substrate using the anodic bonding of silicon and LTCC for electrical interconnections. Then the resonator structures were packaged hermetically by the second anodic bonding of silicon and Tempax glass for encapsulation. The device can be directly bonded to LSI. © 2013 IEEE.

  185. Miniature Fourier transform infrared spectrometer for middle infrared wavelength range 査読有り

    Tatsuyuki Tanahashi, Masaya Toda, Hidetoshi Miyashita, Takahito Ono

    2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013　17　2509-2512　2013年

    DOI： 10.1109/Transducers.2013.6627316 　

    詳細を見る 詳細を閉じる

    A miniature Fourier transform infrared spectrometer (FTIR) is designed and fabricated. The spectrometer consists of an electrostatically-driven Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. Three-dimensional Si micromirror is assembled on the interferometer. The miniature FTIR operates in mid-infrared range, and multi gas detection including CO2 and water has been demonstrated using this miniaturized FTIR. © 2013 IEEE.

  186. J026032 生体試料のための真空隔離型共振熱センサ([J026-03]細胞および分子のマイクロ・ナノスケール解析(3))

    猪股 直生, 戸田 雅也, 小野 崇人

    年次大会　2013　(0)　_J026032-1-_J026032-3　2013年

    出版者・発行元：一般社団法人 日本機械学会

    詳細を見る 詳細を閉じる

    We have developed a resonant thermal sensor system for biological samples. The measurement principle relies on the resonant frequency shift of the resonant thermal sensor due to the temperature change. Brown fat cells, which are frequently used for metabolism researches, attract our interests to solve obesity, metabolic syndrome, and so on. To measure its thermal characteristics in single cell level, a heat loss to surrounding environments and a vibration damping should be solved when resonant thermal sensors are immersed in water. To solve these problems and realize highly sensitive thermal measurements, a resonant thermal sensor was partly placed in vacuum, and another end was in microchannel as a sample stage in a microfluidic chip. They were connected physically and thermally by a heat guide. The heat from the cell is conducted to the sensor via the heat guide, and measured. A fabricated device was evaluated by using laser Doppler vibrometer. The thermal resolution of the device was 5.2 pJ. The single brown fat cell was set on the sample stage, and generated heats were measured with and without stimulation. With the stimulation, pulsed heats were observed, which have not observed in bulk measurements. With the stimulation, gradual and long heat generations were caused similarly with bulk measurements. We have succeeded in detecting the heat from single brown fat cell by using the fabricated device.

  187. 166 ピコリットル液体サンプルのためのマイクロチャンネルを有するカロリーメーター(マイクロ・ナノ工学I,一般講演)

    夏 寧, 戸田 雅也, 猪股 直生, 小野 崇人

    東北支部総会・講演会 講演論文集　2013　(0)　134-135　2013年

    出版者・発行元：一般社団法人 日本機械学会

  188. High sensitive Si cantilevers for magnetic resonance force microscopy 査読有り

    Masaya Toda, Yong Jun Seo, Yusuke Kawai, Hidetoshi Miyashita, Takahito Ono

    Proceedings of the International Microprocesses & Nanotechnology Conference　25　1P-7-61-1-1P-7-61-2　2012年10月30日

  189. マイクロアセンブリにより作製した小型 Si フーリエ変換赤外分光計 査読有り

    棚橋辰之, 戸田雅也, 宮下英俊, 小野崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　29　417-422　2012年10月22日

  190. Young’s Modulus of MWCNT-Carbon Cantilevered Microstructures 査読有り

    Liang He, Masaya Toda, Yusuke Kawai, Mamoru Omori, Toshiyuki Hashida, Takahito Ono

    International Conference on Micro and Nano Engineering　38　P173-208　2012年9月16日

  191. Design and Fabrication of Capacitive Silicon Resonator on LTCC substrate 査読有り

    Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono

    International Conference on Micro and Nano Engineering　38　P286-131　2012年9月16日

  192. FABRICATION OF HERMETICALLY-PACKAGED CAPACITIVE RESONATOR ON LTCC SUBSTRATE 査読有り

    Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono

    Proceedings of the Asia-Pacific Conference on Transducers and Micro/Nano Technologies　6　ac12000268-1-ac12000268-2　2012年7月7日

  193. Pico calorimeter for detection of heat produced in an individual brown fat cell 査読有り

    Naoki Inomata, Masaya Toda, Masaaki Sato, Akihiko Ishijima, Takahito Ono

    Applied Physics Letters　100　(15)　154104-1-154104-4　2012年4月

    DOI： 10.1063/1.3701720 　

    ISSN：0003-6951

    詳細を見る 詳細を閉じる

    A pico calorimeter with a highly sensitive sensor for detecting heat from a biological cell is developed and evaluated, and also the heat detection of a single brown fat cell has been demonstrated. The measurement principle relies on resonant frequency tracking of a resonator in temperature variation due to the heat from the sample; the resonator is placed in vacuum, and heat is conducted from the sample in the microfluidic channel via a heat guide. This configuration can prevent heat loss from the resonator to the surroundings and damping in water. The heat resolution of the fabricated sensor is 5.2 pJ. Heat emissions from single cells are detected as pulsed or continuous in the absence and presence of stimulation, respectively. © 2012 American Institute of Physics.

  194. Acoustic spin pumping: Direct generation of spin currents from sound waves in Pt/Y <inf>3</inf>Fe <inf>5</inf>O <inf>12</inf> hybrid structures 査読有り

    K. Uchida, H. Adachi, T. An, H. Nakayama, M. Toda, B. Hillebrands, S. Maekawa, E. Saitoh

    Journal of Applied Physics　111　(5)　053903-1-053903-8　2012年3月1日

    DOI： 10.1063/1.3688332 　

    ISSN：0021-8979

    詳細を見る 詳細を閉じる

    Using a Pt/Y 3Fe 5O 12 (YIG) hybrid structure attached to a piezoelectric actuator, we demonstrate the generation of spin currents from sound waves. This acoustic spin pumping (ASP) is caused by the sound wave generated by the piezoelectric actuator, which then modulates the distribution function of magnons in the YIG layer and results in a pure-spin-current injection into the Pt layer across the Pt/YIG interface. In the Pt layer, this injected spin current is converted into an electric voltage due to the inverse spin-Hall effect (ISHE). The ISHE induced by the ASP is detected by measuring a voltage in the Pt layer at the piezoelectric resonance frequency of the actuator coupled with the Pt/YIG system. The frequency-dependent measurements enable us to separate the ASP-induced signals from extrinsic heating effects. Our model calculation based on the linear response theory provides us with a qualitative and quantitative understanding of the ASP in the Pt/YIG system. © 2012 American Institute of Physics.

  195. 3PS013 バイメタルカンチレバーを用いた褐色脂肪細胞の発熱量の定量的解析(日本生物物理学会第50回年会(2012年度))

    Sato Masaaki, Toda Masaya, Inomata Naoki, Inoue Yuichi, Ono Takahito, Ishijima Akihiko

    生物物理　52　S148　2012年

    出版者・発行元：一般社団法人 日本生物物理学会

    DOI： 10.2142/biophys.52.S148_1 　

  196. Resonant thermal sensor for a living cell in liquid 査読有り

    Naoki Inomata, Masaya Toda, Masaaki Sato, Akihiko Ishijima, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　25　108-111　2012年

    DOI： 10.1109/MEMSYS.2012.6170105 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    High-sensitive heat detection sensor with a microfluidic chip is proposed, fabricated and evaluated, and also heat detection of a brown fat cell (BFC) has been demonstrated. The measurement principle relies on resonant thermal sensor, where the resonant frequency of a Si resonator changes due to incident heat to the resonator from a sample in water via a heat guide. The surrounding of the resonant thermal sensor is evacuated in vacuum area for minimizing the heat loss. The fabricated sensor has 1.6 mK of the temperature resolution, and 6.2 pJ of the detectable heat. As the result of the thermal measurement of the single BFC with stimulation, continuous heat production is observed. We show that this thermally insulated resonant thermal sensor has a high sensitivity, and is applicable to the observation of the thermogenic activity of a cell. © 2012 IEEE.

  197. Fabrication of a Si-PZT hybrid XY-microstage with CNT-carbon hinges 査読有り

    Liang He, Masaya Toda, Yusuke Kawai, Mohd Faizul Sarbi, Mamoru Omori, Toshiyuki Hashida, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　132　(11)　425-426　2012年

    DOI： 10.1541/ieejsmas.132.425 　

    ISSN：1341-8939

    eISSN：1347-5525

    詳細を見る 詳細を閉じる

    A Si-PZT (PbZrTiO3) hybrid XY-microstage with "carbon nanotube (CNT)-carbon composite" hinges is designed and fabricated. The CNT-carbon composite is partially used for the flexible hinge parts in the Si-PZT hybrid XY-microstage. The CNT-carbon composite has a low elastic constant and no mechanical hysteresis. The CNT-carbon hinge parts are formed by the process including micromolding and pyrolysis. Then, two stacked PZT actuators are assembled into the XY-microstage. © 2012 The Institute of Electrical Engineers of Japan.

  198. Redox active polymers with phenothiazine moieties for nanoscale patterning via conductive scanning force microscopy 査読有り

    Ali A. Golriz, Tassilo Kaule, Jeannine Heller, Maria B. Untch, Philipp Schattling, Patrick Theato, Masaya Toda, Shinya Yoshida, Takahito Ono, Hans Jürgen Butt, Jochen Stefan Gutmann, Rüdiger Berger

    Nanoscale　3　(12)　5049-5058　2011年12月

    DOI： 10.1039/c1nr10917k 　

    ISSN：2040-3364

    eISSN：2040-3372

    詳細を見る 詳細を閉じる

    Redox active polymers with phenothiazine moieties have been synthesized by Atomic Transfer Radical Polymerization (ATRP). These novel polymers reveal bistable behaviour upon application of a bias potential above the oxidation threshold value. Using conductive Scanning Force Microscopy, two distinguishable conductivity levels were induced on a nanoscale level. These levels were related to a high conducting "On" and a low conducting "Off" state. The "On" state is generated by the oxidation of the phenothiazine side chains to form stable phenothiazine radical cations. The formation and stability of the radical sites was examined by cyclic voltammetry, electron spin resonance and optical spectroscopy. Polymers with phenothiazine moieties show the ability to retain their redox state for several hours and can therefore be used for nonvolatile organic memory devices. Furthermore, thin films made from the phenothiazine containing polymers show high mechanical nanowear stability. © 2011 The Royal Society of Chemistry.

  199. Surface-acoustic-wave-driven spin pumping in Y<inf>3</inf>Fe <inf>5</inf>O<inf>12</inf>/Pt hybrid structure 査読有り

    Ken Ichi Uchida, Toshu An, Yosuke Kajiwara, Masaya Toda, Eiji Saitoh

    Applied Physics Letters　99　(21)　212501-1-212501-3　2011年11月21日

    DOI： 10.1063/1.3662032 　

    ISSN：0003-6951

    詳細を見る 詳細を閉じる

    A spin current generated from a surface acoustic wave (SAW) was observed in an Y3Fe5O12 (YIG)/Pt hybrid structure. At the YIG/Pt interface, a SAW generated in the YIG layer was found to pump a spin current into the Pt layer, which was detected through the inverse spin-Hall effect in the Pt. The YIG/Pt lateral structure combined with a piezoelectric wedge transducer enables the systematic investigation of the spin-voltage distribution due to the SAW in the YIG. Since the observed phenomenon has high affinity with SAW-based electronics, it will pave the way for constructing spintronic SAW devices. © 2011 American Institute of Physics.

  200. Vacuum-packaged Resonant Thermal Sensor for Biological Cell in Liquid 査読有り

    Naoki Inomata, Masaya Toda, Takahito Ono

    International Microprocesses & Nanotechnology Conference　24　27B-10-3-1-27B-10-3-2　2011年10月24日

  201. Microchanneled resonant heat sensor for a living cell 査読有り

    Masaya Toda, Tomoyuki Otake, Naoki Inomata, Takahito Ono

    International Microprocesses & Nanotechnology Conference　24　27P-11-95-1-27P-11-95-2　2011年10月24日

  202. Long-range spin Seebeck effect and acoustic spin pumping 査読有り

    K. Uchida, H. Adachi, T. An, T. Ota, M. Toda, B. Hillebrands, S. Maekawa, E. Saitoh

    Nature Materials　10　(10)　737-741　2011年10月

    DOI： 10.1038/nmat3099 　

    ISSN：1476-1122

    eISSN：1476-4660

    詳細を見る 詳細を閉じる

    Imagine that a metallic wire is attached to a part of a large insulator, which itself exhibits no magnetization. It seems impossible for electrons in the wire to register where the wire is positioned on the insulator. Here we found that, using a Ni81Fe19/Pt bilayer wire on an insulating sapphire plate, electrons in the wire recognize their position on the sapphire. Under a temperature gradient in the sapphire, surprisingly, the voltage generated in the Pt layer is shown to reflect the wire position, although the wire is isolated both electrically and magnetically. This non-local voltage is due to the coupling of spins and phonons: the only possible carrier of information in this system. We demonstrate this coupling by directly injecting sound waves, which realizes the acoustic spin pumping. Our finding provides a persuasive answer to the long-range nature of the spin Seebeck effect 1-8, and it opens the door to 'acoustic spintronics' in which sound waves are exploited for constructing spin-based devices. © 2011 Macmillan Publishers Limited. All rights reserved.

  203. Fabrication of einzel lens array with one-mask reactive ion etching process for electron micro-optics 査読有り

    Hidetoshi Miyashita, Eiichi Tomono, Yusuke Kawai, Masaya Toda, Masayoshi Esashi, Takahito Ono

    Japanese Journal of Applied Physics　50　(10 PART 1)　106503-1-106503-5　2011年10月

    DOI： 10.1143/JJAP.50.106503 　

    ISSN：0021-4922

    eISSN：1347-4065

    詳細を見る 詳細を閉じる

    In this paper, we report the fabrication of electron micro-optics by using deep reactive ion etching of three stacked silicon wafers. The three 120-μm-thick silicon wafers stacked with cavities are etched by a direct cavity through etching technique, where each wafer is bonded with a 200-μm-thick glass with through holes, thus separated by a space in part. An array of the electron micro-optics consisting of three electrodes can be fabricated by a one-mask process without assembling and alignment process. The dimensional profiles of a sample etched using this technique are also investigated. This micro-optics fabrication technology is useful for making future multiple electron beam devices with electron optics. © 2011 The Japan Society of Applied Physics.

  204. 液中における細胞熱計測のための 真空封止マイクロカンチレバー型熱量センサ 査読有り

    猪股直生, 戸田雅也, 小野崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　28　617-622　2011年9月26日

  205. High Aspect Ratio Carbon Nanotube-Carbon Composite Microstructures Fabricated by Silicon Molding Technique 査読有り

    Liang He, Masaya Toda, Yusuke Kawai, Mamoru Omori, Toshiyuki Hashida, Takahito Ono

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　28　371-374　2011年9月26日

  206. Measurements of the phase transition and the average length of the density fluctuation under supercritical fluid using micromechanical resonators 国際誌 査読有り

    Masaya Toda, Takashi Fujii, Atsushi Yoshida, Toshiyuki Hashida, Takahito Ono

    Applied Physics Letters　99　(7)　074101-1-074101-3　2011年8月15日

    DOI： 10.1063/1.3610942 　

    ISSN：0003-6951

  207. Micro wishbone interferometer for Fourier transform infrared spectrometry 査読有り

    Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono

    Journal of Micromechanics and Microengineering　21　(6)　065039-1-065039-1　2011年6月

    DOI： 10.1088/0960-1317/21/6/065039 　

    ISSN：0960-1317

    eISSN：1361-6439

    詳細を見る 詳細を閉じる

    A miniature wishbone-type Si interferometer with electrically actuated rotary comb drive actuators is designed and fabricated to apply a Fourier transform infrared (FTIR) spectrometer. Corner cube mirrors are mounted on the end of the Si interferometer that is formed on a glass substrate. The total size of the interferometer is approximately 8 mm × 8 mm. The corner cube mirrors with sharp edges with a size of approximately 1 × 1 × 0.5 mm3 are fabricated using an indentation technique. The rotation angle of rotary comb drive actuators is approximately 11° with an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 νm is achieved, which corresponds to the highest resolution of ∼4 cm -1 as a spectrometer. © 2011 IOP Publishing Ltd.

  208. Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring 査読有り

    Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)　24　716-719　2011年

    DOI： 10.1109/MEMSYS.2011.5734525 　

    ISSN：1084-6999

    詳細を見る 詳細を閉じる

    Miniature interferometer with a maximum resolution of approximately 2 cm-1 which consists of the rotary comb drive actuator, three-dimensional corner cube mirrors, beam splitter and capacitive displacement sensor. The total size of the interferometer is approximately 8 × 8 mm2. The displacement of the corner cube mirror has approximately 650 μm when a voltage of 180 V is applied and this displacement observed using capacitive displacement sensor. Hereby, the maximum optical path difference of approximately 2640 μm is achieved. The interferogram of the superluminescent diode light source is successfully detected and its wavenumber of approximately 12000 cm-1 is indentified.

  209. Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique 査読有り

    Liang He, Masaya Toda, Yusuke Kawai, Hidetoshi Miyashita, Chuanyu Shao, Mamoru Omori, Toshiyuki Hashida, Takahito Ono

    2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11　16　2331-2334　2011年

    DOI： 10.1109/TRANSDUCERS.2011.5969549 　

    詳細を見る 詳細を閉じる

    This paper reports the fabrication and characterization of carbon nanotube (CNT)/carbon composite microstructures with higher Young's modulus than that of pyrolysis carbon. Hybrid microstructures consisted of CNT composite and Si are successfully fabricated by micromolding and pyrolysis of a resist (SU-8) mixed with CNTs. The photoresist mixed with CNTs is filled into a Si micromold fabricated by deep reactive ion etching (deep RIE), then the CNT/resist is converted to CNT/carbon microstructures using two-step high temperature pyrolysis process in an inert gas. Then, the Si substrate is patterned by deep RIE. The maximum aspect ratio of the composite structures is approximately 40 © 2011 IEEE.

  210. Bimorph cantilevers actuated by focused laser from the side 査読有り

    Masaya Toda, Naoki Inomata, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　131　(9)　327-331　2011年

    DOI： 10.1541/ieejsmas.131.327 　

    ISSN：1341-8939

    eISSN：1347-5525

  211. Ultra-high sensitive bimorph cantilever for heat sensing 査読有り

    Masaya Toda, Naoki Inomata, Takahito Ono

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　27　371-374　2010年10月14日

  212. Integratin of Nanomaterials into Microsystem 招待有り

    Takahito Ono, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, He Liang, Masayoshi Esashi

    The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology　5　46-46　2010年7月

  213. Evaluation of bimaterial cantilever beam for heat sensing at atmospheric pressure 国際誌 国際共著 査読有り

    Masaya Toda, Takahito Ono, Fei Liu, Ioana Voiculescu

    Review of Scientific Instruments　81　(5)　055104-1-055104-6　2010年5月

    DOI： 10.1063/1.3397320 　

    ISSN：0034-6748

  214. Swelling of Composite Films at Interfaces 国際誌 国際共著 査読有り

    Masaya Toda, Yvonne Joseph, Ruediger Berger

    JOURNAL OF PHYSICAL CHEMISTRY C　114　(5)　2012-2017　2010年2月

    出版者・発行元：AMER CHEMICAL SOC

    DOI： 10.1021/jp9087578 　

    ISSN：1932-7447

  215. Micro Wishbone interferometer for miniature FTIR spectrometer 査読有り

    Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono

    IEEJ Transactions on Sensors and Micromachines　130　(7)　333-334　2010年

    DOI： 10.1541/ieejsmas.130.333 　

    ISSN：1341-8939

    eISSN：1347-5525

    詳細を見る 詳細を閉じる

    "Wishbone" type of a Si micro interferometer with a size of 7.5 mm × 7.5 mm is designed and fabricated for applications of the Fourier Transform Infrared (FTIR) spectrometer. The structure of the Si interferometer is fabricated by ICP-RIE etching. Si arms with Au-coated corner cube mirrors at the end can be rotated by integrated rotary comb drive actuators using electrostatic force. Rotational motion of ±4° and the maximum optical path difference of 1920 μm are achieved at an applied voltage of 80 V. With this path length, the resolution of the FT spectroscopy is estimated to be ∼5 cm-1. © 2010 The Institute of Electrical Engineers of Japan.

  216. Miniature interferometer with corner cube mirrors 査読有り

    Young Min Lee, Masaya Toda, Takahito Ono, Masayoshi Esashi

    Proceedings of IEEE Sensors　9　65-70　2010年

    DOI： 10.1109/ICSENS.2010.5690828 　

    ISSN：1930-0395

    詳細を見る 詳細を閉じる

    A miniature Wishbone type interferometer for a spectrometer is designed and fabricated, which has electrically actuated rotary comb drives. The three-dimensional corner cube mirror is mounted at the end of Si arms integrated with rotary comb drive actuators. The total size of the interferometer is approximately 8 mm x 8 mm, which is bonded with a glass substrate. The corner cube mirrors with sharp edges are fabricated using indentation technique. The size of the corner cube mirrors is approximately 1 mm x 1 mm x 0.5 mm. The rotation angle of the rotary comb drive was approximately 11 degrees at an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 μm was achieved, which corresponds to the theoretical resolution of ∼ 4.0 cm-1 as a spectrometer. ©2010 IEEE.

  217. Microsystems for Nanoscale Processing 招待有り

    Takahito Ono, Hidetoshi Miyashita, Yusuke Kawai, Masaya Toda, Masayoshi Esashi

    Proceeding of the International Workshop on Nanotechnology and Application　83-86　2009年11月

  218. Fabrication of Electrostatic Actuated Totary for Micro Interferometer

    Young Min Lee, Masaya Toda, Takahito Ono, Masayoshi Esashi

    Abstracts of the 2009 International Conference on Solid State Devices and Materials　681-682　2009年10月

  219. Heat Sensing with Self-excited Microcantilever in Water 査読有り

    Masaya Toda, Takahito Ono, Wonje Cho, Masayoshi Esashi

    Proceedings of the International Workshop on Nanomechanical Sensors　6　L4.4-1-L4.4-3　2009年5月20日

  220. Fabrication of Rotary Comb Drive Actuator for Micro Wishbone Interferometer 査読有り

    Young-Min LEE, Masaya Toda, Masayoshi Esashi, Takahito Ono

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　26　618-621　2009年

  221. Polyelectrolyte Multilayers coated by Nano-Plotting 査読有り

    Masaya Toda, Sebastian Nett, Jochen Gutmann, Ruediger Berger

    Proceedings of the European Conference on Surface Science　25　437-438　2008年6月28日

  222. Nano-Plotting of Polyelectrolyte Multilayers 査読有り

    Masaya Toda, Sebastian Nett, Jochen Stefan Gutmann, Ruediger Berger

    Proceedings of the International Workshop on Nanomechanical Sensors　5　67-68　2008年5月19日

  223. Fabrication of nano mechanical probe for thermal sensing 査読有り

    Masaya Toda, Takahito Ono, Wonje Cho, Sang-Jin Kim, Masayoshi Esashi

    Proceedings of the International Workshop on Nanomechanical Sensors　5　211-212　2008年5月19日

  224. Transduction of swelling of Au-nanoparticle films into a nanomechanical motion 査読有り

    Masaya Toda, Hans-Juergen Butt, Ruediger Berger, Yvonne Joseph, Tobias Vossmeyer, Akio Yasuda

    Proceedings of the International Workshop on Nanomechanical Sensors　5　213-214　2008年5月19日

  225. Young's modulus measurement of plasma-polymerized allylamine films using micro cantilever sonsors 査読有り

    Akiko Nakamura Itakura, Andrey Grinevich, Masaya Toda, Renate Foerch, Ruediger Berger

    Proceedings of the European Conference on Surface Science　25　378-379　2008年5月19日

  226. Surface stress, thickness, and mass of the first few layers of polyelectrolyte 国際誌 国際共著 査読有り

    Masaya Toda, Akiko N. Itakura, Shinichi Igarashi, Karsten Buescher, Jochen S. Gutmann, Karlheinz Graf, Ruediger Berger

    LANGMUIR　24　(7)　3191-3198　2008年4月

    出版者・発行元：AMER CHEMICAL SOC

    DOI： 10.1021/la7028214 　

    ISSN：0743-7463

  227. 薄膜の実効的ヤング率と膜質の関係

    板倉 明子, グリネビッチ アンドレイ, 戸田 雅也, ベルガー ルーディガー

    表面科学講演大会講演要旨集　27　(0)　123-123　2007年

    出版者・発行元：公益社団法人 日本表面科学会

    詳細を見る 詳細を閉じる

    10nm以下の膜厚の有機高分子薄膜の実効的なヤング率を測定する方法を確立し、薄膜のヤング率を測定した。膜に紫外線を照射することによって、重合度を積極的に変えて、その結果膜の機械特性が変わる様子を調べた。

  228. Swelling signals of polymer films measured by a combination of micromechanical cantilever sensor and surface plasmon resonance spectroscopy 査読有り

    Shinichi Igarashi, Akiko N. Itakura, Masaya Toda, Masahiro Kitajima, Liqiang Chu, Anye N. Chifene, Renate Foerch, Ruediger Berger

    SENSORS AND ACTUATORS B-CHEMICAL　117　(1)　43-49　2006年9月

    出版者・発行元：ELSEVIER SCIENCE SA

    DOI： 10.1016/j.snb.2005.11.001 　

    ISSN：0925-4005

    詳細を見る 詳細を閉じる

    Swelling of plasma-polymerized allylarnme (PPAA) films has been investigated by using a combination of micromechanical cantilever sensor (MCS) and surface plasmon resonance (SPR) spectroscopy. The bending responses of the polymer-coated MCS were compared with simultaneously measured reflectivity changes recorded by SPR for both, highly and low crosslinked plasma-polymerized films in N-2 atmospheres with different humidity. Signals attributed to reversible swelling for both plasma polymers were obtained. With increasing the humidity, the thickness increase of a highly crosslinked film was lower than that of a low crosslinked film. In contrast, the MCS coated with a highly crosslinked film exhibited a larger deflection. This demonstrates that a plasma-polymerized allylamine film of higher crosslink density can transduce more efficiently the swelling to the MCS bending than a film of lower crosslink density under identical environmental conditions. (c) 2005 Elsevier B.V. All rights reserved.

  229. SURFACE STRESS OF POLYELECTROLYTE ADSORPTION 査読有り

    Masaya Toda, Akiko Nakamura Itakura, Junichi Yanagisawa, Shinichi Igarashi, Karsten Buescher, Karlheinz Graf, Ruediger Berger

    Proceedings of the International Workshop on Nanomechanical Sensors　3　33-34　2006年5月7日

  230. SWELLING OF PLASMA-POLYMERIZED FILM 査読有り

    Shinichi Igarashi, Akiko Nakamura Itakura, Masaya Toda, Masahiro Kitajima, Daisuke Fujita, Chu, L, Renate Foerch, Ruediger Berger

    Proceedings of the International Workshop on Nanomechanical Sensors　3　90-91　2006年5月7日

  231. LOCAL STRESS ARRANGEMENT BY UV IRRADIATION ON PLASMA 査読有り

    Akiko Nakamura Itakura, Shinichi Igarashi, Masaya Toda, Masahiro Kitajima, Renate Foerch, Ruediger Berger

    Proceedings of the International Workshop on Nanomechanical Sensors　3　96-97　2006年5月7日

  232. Surface stress of polyelectrolyte adsorption measured by micromechanical cantilever sensors 国際誌 国際共著 査読有り

    Masaya Toda, Akiko Nakamura Itakura, Karsten Büscher, Karlheinz Graf, Rüdiger Berger

    e-Journal of Surface Science and Nanotechnology　4　96-99　2006年1月19日

    DOI： 10.1380/ejssnt.2006.96 　

    ISSN：1348-0391

  233. YOUNG’S MODULUS OF PLASMA-POLYMERIZED ALLYLAMINE FILMS 査読有り

    Shinichi Igarashi, Akiko Nakamura Itakura, Masaya Toda, Renate Foerch, Ruediger Berger, Koji Miyake, Kenji Sakurai, Masahiro Kitajima, Daisuke Fujita

    Proceedings of the European Conference on Surface Science　24　211　2006年

  234. Formation of GaN layer on SiN surface using low-energy Ga ion implantation 国際誌 査読有り

    J Yanagisawa, M Toda, T Kitamura, H Matsumoto, Y Akasaka

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　23　(6)　3205-3208　2005年11月

    出版者・発行元：None

    DOI： 10.1116/1.2134722 　

    ISSN：1071-1023

  235. 有機分子膜の膜成長と表面応力

    板倉 明子, 五十嵐 慎一, 戸田 雅也, Berger, Ruediger, 北島 正弘

    表面科学講演大会講演要旨集　25　(0)　50-50　2005年

    出版者・発行元：公益社団法人 日本表面科学会

    詳細を見る 詳細を閉じる

    アルカンチオール、ジチオール、アリルアミンなどの有機分子膜は、膜と下地間の格子不整合などで応力を作る。また、有機分子膜に、イオン照射や紫外線照射を行うと、膜の構造が変わることによって、応力の値も変わる。イオンや紫外線をを部分的に印加し、応力分布を作る。

  236. ポリマー膜への紫外線照射を利用したシリコン表面応力制御

    五十嵐 慎一, 板倉 明子, 戸田 雅也, 北島 正弘, リーチャン チュー, アニエ チフェン, レナーテ フェルヒ, ルーディガー ベルガー

    表面科学講演大会講演要旨集　25　(0)　57-57　2005年

    出版者・発行元：公益社団法人 日本表面科学会

    詳細を見る 詳細を閉じる

    応力の有効利用のため，応力を表面の局所領域に掛ける手法を開発してきた。薄いシリコン基板の裏面に薄膜を蒸着し，照射による薄膜の構造（体積）変化を利用して基板を局所的に曲げ，表面に応力を掛ける手法である。

  237. Formation of GaN films by Ga ion direct deposition under nitrogen radical atmosphere 国際誌 査読有り

    M Toda, J Yanagisawa, K Gamo, Y Akasaka

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B　22　(6)　3012-3015　2004年11月

    出版者・発行元：A V S AMER INST PHYSICS

    DOI： 10.1116/1.1808733 　

    ISSN：1071-1023

  238. アルカンチオール自己集合膜の膜成長と応力

    板倉 明子, 五十嵐 慎一, 戸田 雅也, 北島 正弘, Berger Ruediger

    表面科学講演大会講演要旨集　24　(0)　80-80　2004年

    出版者・発行元：公益社団法人 日本表面科学会

    詳細を見る 詳細を閉じる

    自己集合単層膜を作ることが知られているアルカンチオール、ジチオールについて、単層以下の膜成長の範囲で、実時間で、偏光解析法で膜厚を測りながら、膜の作る応力を測定した。

︎全件表示 ︎最初の5件までを表示

MISC 7

  1. 「将来のIoTに向けたセンサ・センシングシステム技術」

    戸田 雅也, 寒川 雅之, 佐々木 実

    140　(9)　221-221　2020年9月1日

    出版者・発行元：電気学会

    DOI： 10.1541/ieejsmas.140.221 　

    ISSN：1341-8939

    eISSN：1347-5525

  2. 磁気共鳴を用いたラジカルセンシングのための磁気センサ

    椎名司, 戸田雅也, 小野崇人

    電気学会研究会資料　(MSS-20-020-045)　2020年

  3. 特集号の論文募集（「将来のIoTに向けたセンサ・センシングシステム技術」特集／センサ・マイクロマシン英文特集号／「Society 5.0を支えるケミカルセンサ」特集）

    戸田雅也

    IEEJ Transactions on Sensors and Micromachines　140　(1)　NL1_3-NL1_4　2020年1月1日

    出版者・発行元：Institute of Electrical Engineers of Japan (IEE Japan)

    DOI： 10.1541/ieejsmas.140.nl1_3 　

    ISSN：1341-8939

    eISSN：1347-5525

  4. 国際会議報告：The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016)

    戸田 雅也

    電気学会論文誌. E, センサ・マイクロマシン部門誌　136　(8)　NL8_2-NL8_2　2016年

    出版者・発行元：一般社団法人 電気学会

    ISSN：1341-8939

  5. 国際会議報告：The 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2015)

    戸田 雅也

    電気学会論文誌. E, センサ・マイクロマシン部門誌　136　(1)　NL1_1-NL1_1　2016年

    出版者・発行元：一般社団法人 電気学会

    ISSN：1341-8939

  6. カーボンナノチューブーニッケル複合に基づいた走査マイクロミラーのためのマイクロ製作

    An Zhonglie, Toda Masaya, Yamamoto Go

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]　31　5p　2014年10月20日

    出版者・発行元：Institute of Electrical Engineers of Japan

  7. ドイツ・マックスプランク高分子研究所（MPIP）にて

    戸田雅也

    表面科学 : hyomen kagaku = Journal of the Surface Science Society of Japan　34　(5)　271-272　2013年5月10日

    出版者・発行元：公益社団法人 日本表面科学会

    DOI： 10.1380/jsssj.34.271 　

    ISSN：0388-5321

︎全件表示 ︎最初の5件までを表示

書籍等出版物 4

  1. 図説 表面分析ハンドブック 日本表面真空学会, 朝倉書店

    戸田雅也

    日本表面真空学会　2021年

  2. Compendium of Surface and Interface Analysis

    Masaya Toda

    The Surface Science Society of Japan　2018年2月

  3. Advances in Glass Science and Technology

    Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono

    IntechOpen　2018年

  4. Nanocantilever Beams

    Ioana Voiculescu, Masaya Toda, Takahito Ono, Fei Liu

    Pan Stanford Pblishing　2016年

    ISBN: 9789814613231

講演・口頭発表等 173

  1. NMR計測のためのマイクロ流路型共振器

    柴木 涼介, 小野 崇人, 戸田 雅也

    マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム合同研究会　2023年12月20日

  2. 多孔質AZO薄膜を用いた蒸発発電

    日當 歩, 小野 崇人, 戸田 雅也

    マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム合同研究会　2023年12月20日

  3. 多孔質酸化亜鉛を用いた水の蒸発発電

    日當 歩, 小野 崇人, 戸田 雅也

    第40回「センサ・マイクロマシンと応用システム」シンポジウム　2023年11月7日

  4. 磁気トルクを利用した高感度磁気センサ

    趙 智健, 戸田 雅也, 小野 崇人

    第40回「センサ・マイクロマシンと応用システム」シンポジウム　2023年11月7日

  5. Si カンチレバー上のナノダイヤモンドによる静磁場下多軸応力センシング

    山川幹太, 落合宥太, 小野 崇人, 戸田 雅也

    電気学会研究会E部門総合研究会マイクロマシン・センサシステム研究会　2023年7月1日

  6. LOW ELASTIC SPIN TORQUE SENSOR BASED ON ANGULAR MOMENTUM CONSERVATION LAW

    Masaya Toda, Kohei Oka, Takahito Ono

    The 22th International Conference on Solid-State Sensors, Actuators and Microsystems　2023年6月27日

  7. 800 nm band MEMS-tunable VCSEL for microfabricated atomic clock 招待有り

    Zhijan Zhao, Masaya Toda, Takahito Ono, Motoaki Hara, Satoshi Shinada, Hiroshi Nakagawa, Katsuya Kikuchi

    Proceeding of Smart System Integration (SSI) Conference 2022　2022年4月26日

  8. New Approaches for Cost Reduction in Microfabricated Atomic Clocks 招待有り

    Motoaki Hara, Yuichiro Yano, Satoshi Shinada, Zhijian Zhao, Masaya Toda, Hiroyuki Ito, Takahito Ono, Tetsuya Ido

    Joint conference of the European Frequency and Time Forum & the IEEE International Frequency Control Symposium　2022年4月27日

  9. Development of Nanomechanical Multisensory Arrays for Detection of Hazardous Volatile Materials and Gases

    Md Abdul Momin, Zhuqing Wang, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Yasuaki Kawaguchi, Takahito Ono

    The IEEE International Conference on Micro Electro Mechanical Systems (IEEE-MEMS)　2022年1月12日

  10. Evaluation of new solidity rubidium sources using atomic clock stabilization loop

    Motoaki Hara, Yuichiro Yano, Masaya Toda, Takahito Ono, Tetsuya Ido

    The 21th International Conference on Solid-State Sensors, Actuators and Microsystems　2021年7月24日

  11. Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk

    Gaopeng Xue, Masaya Toda, Xinghui Li, Takahito Ono

    The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (IEEE-NEMS 2021)　2021年4月25日

  12. マイクロ波原子時計チップの開発進捗

    原基揚, 矢野雄一郎, 戸田雅也, 原紳介, 笠松章史, 伊藤浩之, 小野崇人, 井戸哲也

    圧電材料・デバイスシンポジウム2021　2021年1月21日

  13. Magnetic Field Sensor Based on Hybrid of Magnetostrictive and Piezoelectric Materials

    Indianto, Mohammad Akita, Toda, Masaya, Ono, Takahito

    2020 IEEE Sensors　2020年10月28日

  14. スマート社会に向けた高機能・高感度センサ技術の研究動向

    戸田雅也

    令和2年電気学会基礎・材料・共通部門大会　2020年9月2日

  15. Micro-Device-Technologies Toward Chip Level Integration of Microwave Atomic Clock System 国際会議

    Yuichiro Yano, Motoaki Hara, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Tetsuya Ido, Hiroyuki Ito, Masaya Toda, Takahito Ono

    Joint Conference of the IEEE International Frequency Control Symposium & IEEE International Symposium on Applications of Ferroelectrics (IFCS-ISAF 2020)　2020年7月20日

  16. 磁気共鳴を⽤いたラジカルセンシングのための磁気センサ

    椎名 司, 戸田雅也, 小野崇人

    電気学会研究会E部門総合研究会マイクロマシン・センサシステム研究会　2020年7月6日

  17. 小型原子時計のためガスセル開発

    西野 仁, 戸田雅也, 矢野雄一郎, 梶田雅稔, 井戸哲也, 原 基揚, 小野崇人

    圧電材料・デバイスシンポジウム 2020　2020年1月31日

  18. Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection 国際会議 招待有り

    Imran Latif, Masaya Toda, Takahito Ono

    The 33rd IEEE International COnference on Micro Electro Mechanical Systems 2020 (MEMS2020)　2020年1月20日

  19. Resonator with a low spring constant for polarization-degree of nuclear spins sensing

    LI CHUNYANG, TODA Masaya, Nguyen Van Toan, Yao-Chuan Tsai, Yu-Ching Lin, ONO Takahito

    マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム合同研究会　2019年12月26日

  20. SELF-SENSING MAGNETIC SENSOR ON A HYBRID CANTILEVER OF MAGNETOSTRICTIVE AND PIEZOELECTRIC MATERIALS

    MOHAMMAD AKITA INDIANTO, MASAYA TODA, TAKAHITO ONO

    マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム合同研究会　2019年12月26日

  21. NVCを有するナノダイヤモンドを用いた磁場イメージング

    戸田 雅也, ホアヴァンチャウ ジョニー, 小野 崇人

    マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム合同研究会　2019年12月26日

  22. Electrochemical Deposited Tbxdy(1-X) Fey Thin Film Evaluated from Microactuator

    Shim Hang, Sakamoto Kei, Inomata Naoki, Toda Masaya, Van Toan Nguyen, Song Yunheub, Ono Takehito

    第36回「センサ・マイクロマシンと応用システム」シンポジウム　2019年11月19日

  23. Fabrication of Cantilever with FeGa/PZT Layers for Magnetic Field Sensor

    Indianto Mohammad Akita, 戸田 雅也, 小野 崇人

    第36回「センサ・マイクロマシンと応用システム」シンポジウム　2019年11月19日

  24. 核スピン偏極度検出のための低弾性率共振子

    李 春洋, 戸田 雅也, TOAN NGUYEN Van, 林 育菁, Tsai Yao-Chuan, 小野 崇人

    第36回「センサ・マイクロマシンと応用システム」シンポジウム　2019年11月19日

  25. Drift-free FBAR oscillator using an atomic-resonance-stabilization technique

    Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Tetsuya Ido, Hiroyuki Ito, Masaya Toda, Takahito Ono

    IEEE International Ultrasonics Symposium, IUS　2019年10月6日

  26. ナノダイヤモンドのイオン注入による蛍光強度評価

    巻島 創, 戸田 雅也, 小野 崇人

    平成31年度E部門総合研究会　2019年7月1日

  27. HIGHLY SENSITIVE STRUCTURE OF NANOMECHANICAL GAS SENSOR BASED ON STRESS CONCENTRATION GENERATED BY CANTILEVER LATERAL DEFLECTION 国際会議

    Zhuqing Wang, Takumi Hokama, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Takahito Ono

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems　2019年6月23日

  28. A NOVEL PHOTOACOUSTIC MICROSENSOR FOR ENHANCED QUALITY FACTOR DETECTION OF LOW CONCENTRATION ANALYTES 国際会議

    Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems　2019年6月23日

  29. NANOELECTROMECHANICAL LOGICAL GATES UTILISING SELECTIVE TUNGSTEN CHEMICAL VAPOR DEPOSITION 国際会議

    Nguyen Van Toan, Dong Zhao, Naoki Inomata, Masaya Toda, Yunheub Song, Takahito Ono

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems　2019年6月23日

  30. MAGNETOSTRICTIVE PERFORMANCE OF ELECTRODEPOSITED TBXDY(1-X)FEY THIN FILMEVALUATED FROM MICROACTUATOR 国際会議

    Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Yunheub Song, Takahito Ono

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems　2019年6月23日

  31. METAL-ASSISTED CHEMICAL ETCHING METHOD SUBJECTED TO MICRO/NANO DEVICE FABRICATION 国際会議

    Nguyen Van Toan, Xiaoyue Wang, Naoki Inomata, Masaya Toda, Ioana Voiculescu, Takahito Ono

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems　2019年6月23日

  32. A REFLECTION TYPE VAPOR CELL BASED ON LOCAL ANODIC BONDING OF 45° MIRRORS FOR MICRO ATOMIC CLOCKS 国際会議

    Hitoshi Nishino, Masaya Toda, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems　2019年6月23日

  33. Advanced Sensing with Assembled, Packaged and Embedded Technologies 国際会議 招待有り

    戸田雅也

    Smart Systems Integration; 13th International Conference and Exhibition on Integration Issues of Miniaturized Systems　2019年4月10日

  34. 企画のねらい

    戸田雅也

    平成31年電気学会全国大会シンポジウム　2019年3月14日

  35. Functional Composite Polymer-silicon Based Resonant Humidity Sensor

    王 竹卿, 戸田 雅也, 山崎 舞, ムルティ スニル, 小野 崇人

    日本機械学会東北支部 第54期講演会　2019年3月12日

  36. Magnetic Sensor with Electroplated L10FePt Ferromagnetic Film

    徐 浩, 戸田 雅也, 小野 崇人

    日本機械学会東北支部 第54期講演会　2019年3月12日

  37. ELECTROLYTE BASED THERMAL TO ELECTRIC ENERGY CONVERSION UTLISING 10NM DIAMETER AL2O3 NANOCHANNELS 国際会議

    Nguyen Van Toan, Megat Muhammad, Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, Takahito Ono

    The 32nd IEEE International COnference on Micro Electro Mechanical Systems 2019 (MEMS2019)　2019年2月27日

  38. A REFLECTION-TYPE VAPOR CELL FOR MICRO ATOMIC CLOCK 国際会議

    Hitoshi Nishino, Masaya Toda, Yoshiaki Kanamori, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono

    The 32nd IEEE International COnference on Micro Electro Mechanical Systems 2019 (MEMS2019)　2019年1月27日

  39. HIGH GAUGE FACTOR STRAIN SENSORS BASED ON VANADIUM DOPED MOLYBEDENUM DISULFIDE 2D FILMS 国際会議

    Minjie Zhu, Naoki Inomata, Masaya Toda, Takahito Ono

    The 32nd IEEE International COnference on Micro Electro Mechanical Systems 2019 (MEMS2019)　2019年1月27日

  40. 埋め込み型ナノダイヤモンドを用いたダイヤモンドNVセンタによるストレス検出

    戸田 雅也, アクタール シャールク, 小野 崇人

    マグネティックス マイクロマシン・センサシステム バイオ・マイクロシステム合同研究会 磁気・バイオ・MEMS・IOT等に関連するセンシング技術の研究発表　2018年12月20日

  41. ポリマーの体積変化とカンチレバーの横変位による応力集中を用いたピエゾ抵抗型ガスセンサ

    外間 匠, 戸田 雅也, 山崎 舞, Moorthi Krzystof, 小野 祟人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　2018年11月1日

  42. Photoacoustic signal generation in condensed media and detection using vacuum packaged resonator

    Latif Imran, An Zhonglie, Masaya Toda, Takahito Ono

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　2018年11月1日

  43. 圧電薄膜共振子を利用した3.5 GHz帯CMOS発振回路の開発 と原子時計システムへの適用

    原 基揚, 矢野 雄一郎, 梶田 雅稔, 西野 仁, 戸田 雅也, 原 紳介, 笠松 章史, 伊藤 浩之, 小野 崇人, 井戸 哲也

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　2018年11月1日

  44. 反射型マイクロ原子時計セル

    西野 仁, 戸田 雅也, 金森 義明, 矢野 雄一郎, 梶田 雅稔, 井戸 哲也, 原 基揚, 小野 崇人

    「センサ・マイクロマシンと応用システム」シンポジウム論文集　2018年10月30日

  45. Magnetic resonance nanomechanical sensors 国際会議 招待有り

    戸田 雅也

    Japan Science and Technology Symposium 2018 (VJST2018)　2018年9月15日

  46. Highly Sensitive Hermetically Packaged Microsensor for Photoacoustic Detection

    Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono

    平成30年度E部門総合研究会　2018年7月13日

  47. Capacitive Silicon Nanomechanical Resonator Capable of Selective Vibration of High-Order Mode 国際会議

    Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Masaya Toda, Takahito Ono

    The 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2018)　2018年6月24日

  48. Hermetically Packaged Resonant Microsensor for Photoacoustic Detection 国際会議

    Imran Latif, Zhonglie An, Masaya Toda, Takahito Ono

    The 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2018)　2018年6月24日

  49. Nanomechanical Piezoresistive Sensor with Polymer-Si Membrane for Gas Detection 国際会議

    Takumi Hokama, Md. Mahabub Hossain, Masaya Toda, Krzysztof Moorthi, Mai Yamazaki, Takahito Ono

    The 9-th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2018)　2018年6月24日

  50. FBAR-based 3.4 GHz Oscillator without Frequency Multiplications Aiming for an Integrated Atomic Clock Chip 国際会議

    M. Hara, Y. Yano, M. Kajita, S. Hara, A. Kasamatsu, M. Toda, H. Ito, T. Ono, T. Ido

    The 2018 European Frequency and Time Seminar　2018年4月12日

  51. Thermal resistance change of liquid carbon dioxide based on narrow space effect in micro chamber 国際会議

    Masaya Toda, Tomoyuki Yamagami, Naoki Inomata, Takashi Fujii, Takahito Ono

    IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2018)　2018年1月21日

  52. Fabrication and evaluation of assembled micro-tube resonator for mass measurement in flowing liquid 国際会議

    Mohammad Akita Indianto, Masaya Toda, Takahito Ono

    IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2018)　2018年1月21日

  53. Electrically driven ion transport in nanopores fabricated by metal assisted chemical etching method 国際会議

    Nguyen Van Toan, Naoki Inomata, Masaya Toda, Takahito Ono

    IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2018)　2018年1月21日

  54. Evaluation of piezoresistive property of vanadium oxide thin film 国際会議

    Naoki Inomata, Nguyen Van Toan, Masaya Toda, Takahito Ono

    IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2018)　2018年1月21日

  55. Micro atomic frequency standards employing an integrated FBAR-VCO oscillating on the 87Rb clock frequency without a phase locked loop 国際会議

    Motokai Hara, Yuichiro Yano, Masatoshi Kajita, Hitoshi Nishino, Yasuhiro Ibata, Masaya Toda, Shinsuke Hara, Akifumi Kasamatsu, Hiroyuki Ito, Takahito Ono, Tetsuya Ido

    IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2018)　2018年1月21日

  56. FBAR Oscillator Stabilized by Rb Atomic Resonator for SHF/EHF-Band Wireless Devices

    Motoaki Hara, Yuichiro Yano, Hiroyuki Ito, Masaya Toda, Takahito Ono, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Tetsuya Ido

    IEEE International Ultrasonics Symposium, IUS　2018年1月1日

    詳細を見る 詳細を閉じる

    © 2018 IEEE. We propose an FBAR oscillator for the wireless system used in the superhigh-frequency (SHF) band or extremely high-frequency (EHF) band. At these frequencies, a high-precision standard clock is required, and it is preferable that the clock frequency be set to a GHz-order band to mitigate the amount of frequency multiplication. In this study, we developed a 3.5 GHz band thin-film bulk acoustic resonator (FBAR)oscillator and stabilized it to the hyperfine transition of alkali atoms 87 Rb. Consequently, a short-term frequency instability of 8.5 × 10- 12 at 1s was achieved.

  57. FABRICATION OF PMUT USING SILICON ON NOTHING PROCESS FOR FINGERPRINT SENSOR

    HANG SHIM, Toan Nguyen Van, Toda Masaya, Inomata Naoki, Kanamori Yoshiaki, Yunheub Song, Youngtaek Oh, Takahito Ono

    第34回「センサ・マイクロマシンと応用システム」シンポジウム　2017年10月31日

  58. Ir/YSZ/Si上に成膜したダイヤモンドを用いた振動子の作製と評価

    持丸 裕矢, 戸田 雅也, 小野 崇人

    第34回「センサ・マイクロマシンと応用システム」シンポジウム　2017年10月31日

  59. パーマロイコンセントレータによる磁場勾配を用いた共振型磁気センサ

    諏訪 亘, 猪股 直生, 戸田 雅也, 小野 崇人

    第34回「センサ・マイクロマシンと応用システム」シンポジウム　2017年10月31日

  60. 原子時計チップ開発に向けた卓上原子時計テストベンチによるMEMSガスセルおよびFBAR-VCOの評価

    原 基揚, 矢野 雄一郎, 梶田 雅稔, 西野 仁, 井端 泰大, 朱 敏杰, Latif Imran, 戸田 雅也, 小野 崇人, 井戸 哲也

    第34回「センサ・マイクロマシンと応用システム」シンポジウム　2017年10月31日

  61. Pico-thermogravimetric material properties analysis using diamond cantilever beam 国際会議

    Ioana Voiculescu, Masaya Toda, Meiyong Liao, Takahito Ono

    The 19th International Conference on Solid-State Sensors, Actuators and Microsystems　2017年6月18日

  62. Vacuum packaged cantilever sensor mounted with a magnetic particle for magnetic force detection 国際会議

    Gaopeng Xue, Masaya Toda, Takahito Ono

    The 19th International Conference on Solid-State Sensors, Actuators and Microsystems　2017年6月18日

  63. Resonant magnetic sensor using magnetic gradient fieldformed by permalloy concentrator 国際会議

    Wataru Suwa, Naoki Inomata, Masaya Toda, Takahito Ono

    The 19th International Conference on Solid-State Sensors, Actuators and Microsystems　2017年6月18日

  64. ナノ表面構造を持つカンチレバーの力学応答を利用した湿度センサ

    外間 匠, 菊池 亜紀応, Nguyen Van Toan, 戸田 雅也, 小野 崇人

    日本機械学会東北支部 第52期講演会　2017年3月14日

  65. パーマロイ磁気コンセントレータによる磁場勾配を用いた共振型磁気センサ

    諏訪亘, 猪股直生, 戸田雅也, 小野崇人

    電気学会全国大会講演論文集(CD-ROM)　2017年3月5日

  66. PATTERNING HIGH ASPECT SILICON PILLARS ON CANTILEVER BY METAL ASSISTED CHEMICAL ETCHING FOR HUMIDITY SENSING 国際会議

    Nguyen Van Toan, Masaya Toda, Takumi Hokama, Takahito Ono

    IEEE International Conference on Micro Electro Mechanical Systems　2017年1月22日

  67. Scanning probe with nitrogen vacancy centers in diamond particle for magnetic resonance imaging

    Minjie Zhu, Masaya Toda, Takahito Ono

    16th International Conference on Nanotechnology - IEEE NANO 2016　2016年11月21日

    詳細を見る 詳細を閉じる

    © 2016 IEEE. Nitrogen vacancy (NV-) centers possess exceptional sensitivity to magnetic field even under ambient condition. The optically detectable electron spins and the atomic size make it a promising candidate for advanced magnetic resonance imaging (MRI) technique with nanoscale spatial resolution. In this work, diamond particles with NV-centers were deposited by microwave plasma chemical vapor deposition (MPCVD) under gaseous N2dopant and were fixed on the fabricated scanning probe as a magnetic sensor. While the existence of NV-center was determined by Raman spectroscopy, the photoluminescence intensity at 2.87 GHz microwave frequency was decreased by an optically detected magnetic resonance (ODMR) system. It implies that the NV-spin state can be manipulated and read out using optical excitation.

  68. High aspect silicon structures using metal assisted chemical etching 国際会議 招待有り

    N. V. Toan, M. Toda, T. Ono

    16th International Conference on Nanotechnology - IEEE NANO 2016　2016年11月21日

    詳細を見る 詳細を閉じる

    © 2016 IEEE. This work reports on metal assisted chemical etching (MACE) for high aspect silicon structures. Ultra-high aspect trenches and pillars of 400 and 80, respectively, have been achieved by MACE. Additionally, a cantilever fabrication based on above pillars is demonstrated by using assembly technology. The pillars are assembled onto glass substrate and fixed by conductive glue. The fabricated cantilever shows a resonance frequency of 235 kHz and a quality factor of 800.

  69. Assembled comb-drive XYZ-microstage with DPPH sample for the 3D scanning of magnetic resonance force microscope

    Gaopeng Xue, Masaya Toda, Takahito Ono

    16th International Conference on Nanotechnology - IEEE NANO 2016　2016年11月21日

    詳細を見る 詳細を閉じる

    © 2016 IEEE. This paper presents an assembled comb-drive XYZ-microstage with large displacements for the scanning of magnetic resonance force microscopy (MRFM) at cryogenic environment. The scanning XYZ-microstage with little affection to the thermal variation and magnetic fields is required. The comb-drive XYZ-microstage is assembled with an XY-microstage, two Z-actuators and a silicon base substrate using a microassembly technology. For measurements, a sample of 1, 1-Diphenyl-2-picrylhydrazyl radical (DPPH) is glued onto the assembled XYZ-microstage. The imaging system is consisted of the scanning XYZ-microstage with DPPH sample, a sensitive cantilever sensor with a small magnetic particle, a fiber-optic interferometer to detect the vibration of the cantilever and a radio frequency (RF) coil. The measurements are performed at low pressure in a vacuum chamber. The vibration of the cantilever sensor based on magnetic force from electron spin resonance (ESR) spectroscopy can be detected through adjusting the magnetic field intensity of the RF coil.

  70. Electrodeposition and characterization of nickel-carbon nanotube composite thin films with high carbon nanotube content

    Muhammad Shahrukh Akhtar, Zhonglie An, Masaya Toda, Takahito Ono

    16th International Conference on Nanotechnology - IEEE NANO 2016　2016年11月21日

    詳細を見る 詳細を閉じる

    © 2016 IEEE. In this work, we present the electrodeposition of nickel (Ni)-carbon nanotube (CNT) composite thin films and evaluate the CNT weight percentage in films using energy-dispersive x-ray spectroscopy (EDX). To increase the CNTs codeposition, the CNTs are functionalized with positive charges and the composite thin films are deposited with different current waveforms. Furthermore, two kinds of composite films with CNTs annealed at different temperatures (1200°C and 2600°C) were compared for their CNT contents also the nanoindentation hardness of the composite films were evaluated. The composite films with a maximum CNT content of 5.4±2.0 wt% with a hardness of 17.0±3.0 GPa are achieved in the case of CNTs annealed at 1200°C. In the case of CNTs annealed at 2600°C, the CNT content of the composite was found to be 3.7±2.0 wt% with hardness of 14.9±3.0 GPa. For all Ni-CNTs composites, mechanical strengthening was found in the composites compared with pure Ni films.

  71. Magnetic resonance force measurement by high sensitive Si cantilever with a magnet particle 国際会議

    Molecular Photoscience Research Center International Workshop　2016年11月8日

  72. Magnetic field sensor based on vacuum packaged cantilever with a mounted magnet

    Xue Gaopeng, Masaya Toda, Nurasyikin Mohd, Zhonglie An, Nguyen Van Toan, Takahito Ono

    第33回「センサ・マイクロマシンと応用システム」シンポジウム　2016年10月24日

  73. 単結晶ダイヤモンド機械共振子の品質係数の向上

    廖梅勇, 戸田雅也, 桑立雯, 寺地徳之, 井村将隆, 小出康夫

    第77回応用物理学会秋季学術講演会　2016年9月13日

  74. Scanning Probe with Nitrogen Vacancy Centers in Diamond Particle for Magnetic Resonance Imaging 国際会議

    Minjie Zhu, Masaya Toda, Takahito Ono

    IEEE International Conference on Nanotechnology　2016年8月22日

  75. Fabrication and evaluation of CVD diamond resonators 国際会議

    Yuya Mochimaru, Masaya Toda, Takahito Ono

    IEEE International Conference on Nanotechnology　2016年8月22日

  76. High Aspect Silicon Structures Using Metal Assisted Chemical Etching 国際会議

    Nguyen Van Toan, Masaya Toda, Takahito Ono

    IEEE International Conference on Nanotechnology　2016年8月22日

  77. Electrodeposition and Characterization of Nickel-Carbon Nanotube Composite Thin Films with High Carbon Nanotube Content 国際会議

    Muhammad Shahrukh Akhtar, Zhonglie An, Masaya Toda, Takahito Ono

    IEEE International Conference on Nanotechnology　2016年8月22日

  78. Assembled Comb-drive XYZ-microstage with DPPH Sample for the 3D Scanning of Magnetic Resonance Force Microscope 国際会議

    Gaopeng Xue, Masaya Toda, Takahito Ono

    IEEE International Conference on Nanotechnology　2016年8月22日

  79. Packaging Technique of Micro Cantilever for Magnetic Force Sensing 国際会議

    Nurasyikin Mohd, Naoki Inomata, Nguyen Van Toan, Takahito Ono, Masaya Toda

    International Workshop on Nanomechanical Sensors　2016年6月22日

  80. Energy Dissipation in Single Crystal Diamond Mechanical Resonators

    廖梅勇, 戸田 雅也, 桑 立雯, 井村 将隆, 菱田 俊一, 田中 秀治, 小出 康夫

    第63回応用物理学会春季学術講演会　2016年3月19日

  81. CVDダイヤモンド振動子の作製と評価

    持丸 裕矢, 戸田 雅也, 小野 崇人

    日本機械学会東北支部 第51期講演会　2016年3月11日

  82. Mechanical properties of Carbon nanotubes-nickel composite thin films synthesized with high carbon nanotube content

    アフタームハマド シャルク, 安 忠烈, 戸田 雅也, 小野 崇人

    日本機械学会東北支部 第51期講演会　2016年3月11日

  83. MICROFABRICATED VANADIUM OXIDE RESONANT THERMAL SENSOR WITH A HIGH TEMPERATURE COEFFICIENT OF RESONANT FREQUENCY 国際会議

    Naoki Inomata, Libao Pan, Masaya Toda, Takahito Ono

    IEEE International Conference on Micro Electro Mechanical Systems　2016年1月24日

  84. Photoacoustic Microsensor for Glucose Monitoring in Human Blood

    ラティフ イムラン, 戸田 雅也, 小野 崇人

    第32回「センサ・マイクロマシンと応用システム」シンポジウム　2015年10月28日

  85. Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of magnetic resonance force microscopy

    薛 高鵬, 戸田 雅也, 小野 崇人

    第32回「センサ・マイクロマシンと応用システム」シンポジウム　2015年10月28日

  86. 酸化バナジウムを用いた共振型マイクロ熱量センサ

    猪股 直生, 潘 立葆, 戸田 雅也, 小野 崇人

    第32回「センサ・マイクロマシンと応用システム」シンポジウム　2015年10月28日

  87. 磁気共鳴イメージングためのNVセンターを有するダイヤモンドプローブ

    朱 敏杰, 戸田 雅也, 小野 崇人

    第32回「センサ・マイクロマシンと応用システム」シンポジウム　2015年10月28日

  88. Assembled comb-drive XYZ-microstage with large displacements for the 3D scanning stage of low temperature measurement systems 国際会議

    Gaopeng Xue, Masaya Toda, Takahito Ono

    The 6th Japan-China-Korea MEMS/NEMS Conference 2015　2015年9月23日

  89. Probe with Nitrogen Vacancy in Diamond Thin Film for Magnetic Resonance Imaging 国際会議

    Minjie Zhu, Masaya Toda, Takahito Ono

    The 6th Japan-China-Korea MEMS/NEMS Conference 2015　2015年9月23日

  90. 磁気共鳴イメージングためのNV センターを 有 するダイヤモンドプローブ

    朱敏杰, 戸田雅也, 小野崇人

    日本機械学会 2015年度年次大会　2015年9月13日

  91. 非線形減衰を用いたSi 振動子のQ 値向上

    猪 股直生, 金築俊介, 斎藤和也, 戸田雅 也, 小野崇人

    日本機械学会 2015年度年次大会　2015年9月13日

  92. IEEE-NEMS2015 参加報告 招待有り

    戸田雅也

    有機機能材料のリソグラフィ加工コンソーシアム　2015年6月15日

  93. Comb-drive XYZ-Microstage Based on Assembling Technology for Low Temperature Measurement Systems 国際会議

    Gaopeng Xue, Masaya Toda, Takahito Ono

    ICEP-IAAC 2015　2015年4月14日

  94. 超薄膜カンチレバーを用いた高感度バイオセンシ ング

    倉田慎, 戸田雅也, 小野崇人

    日本機械学会東北支部 第50期講演会　2015年3月13日

  95. Electrochemical Biosensor for Single Cell Impedance Spectroscopy

    アルスラン セナ ノア, 戸田雅也, 小野崇人

    日本機械学会東北支部 第50期講演会　2015年3月13日

  96. Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum 国際会議

    Hideki Hayashi, Masaya Toda, Takahito Ono

    IEEE International Conference on Micro Electro Mechanical Systems　2015年1月18日

  97. SYNTHESIS OF CARBON NANOTUBES-NI COMPOSITE FOR MICROMECHANICAL ELEMENTS APPLICATION 国際会議

    Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono

    IEEE International Conference on Micro Electro Mechanical Systems　2015年1月18日

  98. ASSEMBLED COMB-DRIVE XYZ-MICROSTAGE WITH LARGE DISPLACEMENTS FOR LOW TEMPERATURE MEASUREMENT SYSTEMS 国際会議

    Gaopeng Xue, Masaya Toda, Takahito Ono

    IEEE International Conference on Micro Electro Mechanical Systems　2015年1月18日

  99. Sub-nanowatt thermal detection device based on a Si double-supported resonator for single cells

    Naoki Inomata, Masaya Toda, Takahito Ono

    MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences　2015年1月1日

    詳細を見る 詳細を閉じる

    © 15CBMS-0001. We have developed a highly sensitive thermal detection device based on a Si double-supported resonator to measure a heat from single cells. The double-supported resonators are expected to have a large temperature coefficient of the resonant frequency (TCF). The sensor is vacuum-enclosed in a microfluidic chip, which make it possible to measure the heat from cells captured in liquid with negligible heat loss to the surrounding and damping. The TCF of the fabricated sensor is -590 ppm/K, and 0.16 nW/√Hz of the thermal resolution is achieved. Then, the thermal measurement of a single brown fat cell is succeeded by using the fabricated device.

  100. Assembled comb-drive XYZ-microstage integrated with capacitive displacement sensor for low temperature measurement systems

    Gaopeng Xue, Masaya Toda, Takahito Ono

    第31回「センサ・マイクロマシンと応用システム」シンポジウム　2014年10月20日

  101. 真空中細胞観察のための薄膜Si窓を有する マイクロチャネル型チャンバー

    林秀樹, 戸田雅也, 小野崇人

    第31回「センサ・マイクロマシンと応用システム」シンポジウム　2014年10月20日

  102. Microfabrication based on Carbon Nanotubes-Nickel Composite for Scanning Micromirror

    Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono

    第31回「センサ・マイクロマシンと応用システム」シンポジウム　2014年10月20日

  103. 微小センサによる温度や磁気共鳴の計測

    第13回 マイクロシステム融合研究会　2014年10月14日

  104. 全反射減衰法による体内 成分分析のためのマイクロ化フーリエ変換赤外分光計の開発

    佐藤裕樹, 棚橋辰之, 戸田雅也, 猪股直生, 小野崇人

    日本機械学会2014年度年次大会　2014年9月7日

  105. 磁気共鳴力顕微鏡の開発

    Masaya Toda, Yonjun Seo, Takahito Ono

    第45回先端融合推進研究会　2014年9月2日

  106. Fabrication and Characterization of Silicon Micromirror with Carbon Nanotubes-Nickel Nanocomposite Beams 国際会議

    Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono

    14th International Conference on Nanotechnology　2014年8月18日

  107. Resonant Silicon Micromirror with Electrophated Carbon Nanotubes-Nickel Composite Beams for MEMS Application 国際会議

    Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono

    The 6th IEEE International Nanoelectonics Conference　2014年7月28日

  108. Micro/Nano-mechanical Resonators for Ultimate Sensing 国際会議 招待有り

    Takahito Ono, Naoki Inomata, Masaya Toda

    The 7th Asia-Pacific Conference on Transducers and Micro / Nano Technologies　2014年6月29日

  109. Microstage Driven by Comb-Drive Actuators for Low Temperature Measurement Systems 国際会議

    Gaopeng Xue, Masaya Toda, Takahito Ono

    The 7th Asia-Pacific Conference on Transducers and Micro / Nano Technologies　2014年6月29日

  110. Synthesis and Characterization of Carbon nanotubes-Nickel Composite with High Content of Carbon nanotubes 国際会議

    Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono

    The 7th Asia-Pacific Conference on Transducers and Micro / Nano Technologies　2014年6月29日

  111. CALIBRATION STUDY OF BIMATERIAL CANTILEVER BEAM NANOCALORIMETER USED IN LIQUID APPLICATIONS 国際会議

    Masaya Toda, Ioana Voiculescu, Fei Liu, Takahito Ono

    11st International Workshop on Nanomechanical Sesing　2014年4月30日

  112. Synthesis and mechanical property of carbon nanotubes-nickel composite

    Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, Takahito Ono

    電気学会全国大会　2014年3月18日

  113. 真空中細胞観察のための薄膜Si窓を有するマイクロチャネル

    林秀樹, 戸田雅也, 小野崇人

    第61回応用物理学会春季学術講演会　2014年3月17日

  114. Ultrasensitive Si Nanowire Probe for Magnetic Resonance Detection 国際会議

    Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

    IEEE International Conference on Micro Electro Mechanical Systems　2014年1月26日

  115. A Si Nanowire Probe with a Nd-Fb-B magnet for Force Detection

    Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

    第30回「センサ・マイクロマシンと応用システム」シンポジウム　2013年11月5日

  116. An electrostatically driven microstage with capacitive displacement sensor for low temperature operation

    Gaopeng Xue, Masaya Toda, Liang He, Yusuke Kawai, Takahito Ono

    第30回「センサ・マイクロマシンと応用システム」シンポジウム　2013年11月5日

  117. Carbon nanotube-Cu Composite Formation based on Supercritical Fluid Process

    Zhonglie An, Masaya Toda, Takahito Ono

    第30回「センサ・マイクロマシンと応用システム」シンポジウム　2013年11月5日

  118. A Long Bar Type Silicon Resonator with a High Quality Factor

    Nguyen Van Toan, Masaya Toda, Yusuke Kawai, Takahito Ono

    第30回「センサ・マイクロマシンと応用システム」シンポジウム　2013年11月5日

  119. Silicon Nanowire Probe with Nd-Fe-B magnet for Magnetic Resonance Force Microscopy 国際会議

    Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

    39th International Conference on Micro and Nano Engineering　2013年9月16日

    詳細を見る 詳細を閉じる

    208

  120. Si Nanowire Probe with a magnet for Magnetic Resonance Detection 国際会議

    Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

    4th Japan-China-Korea Joint Conference on MEMS/NEMS　2013年8月22日

    詳細を見る 詳細を閉じる

    P-02

  121. Cantilevers of nanosensing: calorimetry ofr a living cell 国際会議 招待有り

    Masaya Toda, Naoki Inomata, Masaaki Sato, Akihiko Ishijima, Takahito Ono

    10th International Workshop on Nanomechanical Sensors　2013年5月1日

  122. SILICON NANOWIRE PROBE FOR MAGNETIC RESONANCE FORCE MICROSCOPY 国際会議

    YongJun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono

    10th International Workshop on Nanomechanical Sensors　2013年5月1日

  123. 磁気共鳴力顕微鏡のための微粒子磁石付Siカンチレバーセンサ

    戸田雅也, 徐溶晙, 小野崇人

    第60回応用物理学会春季学術講演会　2013年3月27日

  124. 磁気共鳴力顕微鏡用シリコンナノワイヤーカンチレバー

    徐溶晙, 戸田雅也, 川合祐輔, 小野崇人

    第60回応用物理学会春季学術講演会　2013年3月27日

  125. 単結晶ダイヤモンド機械共振特性の研究

    廖梅勇, 戸田雅也, Liwen Sang, 井村将隆, 池田直樹, 小出康夫

    第60回応用物理学会春季学術講演会　2013年3月27日

  126. マイクロアセンブリにより作製した小型Si フーリエ変換赤外分光計

    棚橋 辰之, 戸田 雅也, 宮下 英俊, 小野 崇人

    第29回「センサ・マイクロマシンと応用システム」シンポジウム　2012年10月22日

  127. 磁気共鳴力顕微鏡のための高感度Siカンチレバーセンサの開発

    戸田雅也, YongJun Seo, 小野崇人

    第59回応用物理学関係連合講演会　2012年3月15日

  128. Vacuum-packaged Resonant Thermal Sensor for Biological Cell in liquid 国際会議 招待有り

    Inomata, Naoki, Toda, Masaya, Ono, Takahito

    5th international conference on electron, ion and photon beam technology and nanofabrication (EIPBN)　2012年

  129. シリコンモールデング法によるカーボンナノチューブ-カーボン複合材料の高アスペクト比マイクロ構造

    He Liang, Toda Masaya, Kawai Yusuke, Omori Mamoru, Hashida Toshiyuki, Ono Takahito

    第28回「センサ・マイクロマシンと応用システム」シンポジウム　2011年9月26日

  130. 液中における細胞熱計測のための真空封止マイクロカンチレバー型熱量センサ

    猪股 直生, 戸田 雅也, 小野 崇人

    第28回「センサ・マイクロマシンと応用システム」シンポジウム　2011年9月26日

  131. マイクロSiカンチレバー振動子を用いた超臨界流体の揺らぎ計測

    戸田雅也, 藤井孝志, 横山惇史, 吉田篤, 橋田俊之, 小野崇人

    第72回応用物理学会学術講演会　2011年8月29日

  132. Fabrication of carbon nanotube-carbon composite microstructures based on silicon molding technique

    何亮, 戸田雅也, 大森守, 橋田俊之, 小野崇人

    第58回応用物理学関係連合講演会　2011年3月24日

  133. マイクロ・ナノ機械と計測への応用 招待有り

    戸田雅也

    高分子・ハイブリッド材料研究センター(PHyM)若手フォーラム　2010年12月6日

  134. Ultra-high sensitive bimorph cantilever for heat sensing

    Masaya Toda, Naoki Inomata, Takahito Ono

    第27回「センサ・マイクロマシンと応用システム」シンポジウム　2010年10月14日

  135. ユニモルフカンチレバー型熱センサの大気中における感度

    戸田雅也, フェイ リュウ, イオアナ ヴォイスレスク, 小野崇人

    第57回応用物理学関係連合講演会　2010年3月17日

  136. Electronic Bistable Recording Media for Scanning Multiprobe based Ultrahigh-Density Data Storage 招待有り

    Berger, Rüdiger, Ono, Takahito, Toda, Masaya

    JST-DFG workshop on Nanoelectronics　2010年1月18日

  137. 熱量計測のためのマイクロプローブの作製と評価 招待有り

    戸田雅也

    2009 Japan ANSYS Conference　2009年11月20日

  138. Fabrication of Rotary Comb Drive Actuator for Micro Wishbone Interferometer

    Young-Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono

    第26回「センサ・マイクロマシンと応用システム」シンポジウム　2009年10月15日

  139. Micro probes for heat sensing in liquid 国際会議 招待有り

    Masaya Toda

    Group seminar in Pohang University of Science and Technology　2009年9月22日

  140. 水中における微少熱量計測のためのマイクロカンチレバーセンサ

    戸田雅也, 小野崇人

    第70回応用物理学会学術講演会　2009年9月8日

  141. Fabrication and Evaluation of micro-bimaterial probe for heat 国際会議

    Internationnal Workshop on Biological Application of Carbon Nanotube　2009年9月4日

  142. ナノ・マイクロマシニングとその構造体 招待有り

    日本放射光学会第一回若手研究会「Ｘ線ナノ集光技術研究会」　2009年8月10日

  143. Heat Sensing With Self-Excited Microcantilever in Water 国際会議

    Masaya Toda, Takahito Ono, Wongje Cho, Masayoshi Esashi

    International Workshop on Nanomechanical Sensors　2009年5月20日

  144. A Bimetal Resonator on a Scanning Micro-probe for Local Heat Sensing

    Masaya Toda, Takahito Ono, Masayoshi Esashi

    東北大学日仏ジョイントラボラトリー　2008年12月1日

  145. Polyelectrolyte Multilayers coated by Nano-Plotting 国際会議

    M. Toda, S. Nett, J. Gutmann, R. Berger

    ECOSS25　2008年7月

  146. Nano-Plotting of Polyelectrolyte Multilayers 国際会議

    S. Nett, J. Gutmann, R. Berger

    International Workshop on Nanomechanical Sensors　2008年5月18日

  147. The Role of the Interface in the Transduction of Swelling into a NanomechanicalMotion 国際会議

    Masaya Toda, Hans-Jürgen Butt, Rüdiger Berger, Yvonne Joseph, Tobias Vossmeyer, Akio Yasuda

    International Workshop on Nanomechanical Sensors　2008年5月18日

  148. Fabrication of nano mechanical probe for thermal sensing 国際会議

    Masaya Toda, Takahito Ono, Wongje Cho, Sang-Jin Kim, Masayoshi Esashi

    International Workshop on Nanomechanical Sensors　2008年5月18日

  149. マイクロメカニカルカンチレバーセンサ上に堆積したポリエレクトロ ライト多層膜の膨張反応

    戸田雅也, グラフ・カールハインツ, グットマン・ヨハン, ベルガー・ルーディガー

    第55回応用物理学関係連合講演会　2008年3月27日

  150. Young's modulus measurement of plasma-polymerized allylamine films by using micro cantilever sensors 国際会議

    A. N. Itakura, A. Grinevich, L. Chu, K. Miyake, R. Forch, R. Berger

    IVC-17/ICSS-13 and ICN+T2007 Congress　2007年7月2日

  151. Polyelectrolyte film characterization by X-ray photoelectron spectroscopy 国際会議

    A. N. Itakura, J. Yanagisawa, K. Graf, R. Berger

    IVC-17/ICSS-13 and ICN+T2007 Congress　2007年7月2日

  152. カンチレバーセンサを利用した薄膜ヤング率測定法

    板倉明子, 五十嵐慎一, 戸田雅也, R. Berger

    第４７回真空に関する連合講演会　2006年11月

  153. Young's modulus of plasma-polymelized allylamine films 国際会議

    A. N. Itakura, S. Igarashi, M. Toda, R. Forch, R. Berger, K. Miyake, K. Sakurai, M. Kitajima, D. Fujita

    24th European Conference on Surface Science (ECOSS 24)　2006年9月4日

  154. SURFACE STRESS MEASUREMENT OF POLYELECTROLYTE ADSORPTION BY MICROMECHANICAL CANTILEVER SENSORS 国際会議

    M. Toda, A. N. Itakura, J. Yanagisawa, S. Igarashi, K. Büscher, K. Graf, R. Berger

    International Workshop on Nanomechanical Sensors　2006年5月7日

  155. Swelling of plasma-plymerized film 国際会議

    S. Igarashi, A. N. Itakura, M. Toda, M. Kitajima, D. Fujita, L.Chu, A.N.Chifen, R. Forch, R. Berger

    International Workshop on Nanomechanical Sensors　2006年5月7日

  156. Localstress arragement by UV irradiation on plasma polymerized alylemine films 国際会議

    A. N. Itakura, S. Igarashi, M. Toda, M. Kitajima, R. Forch, R. Berger

    International Workshop on Nanomechanical Sensors　2006年5月7日

  157. Gaイオン注入したSiN基板へのECR-MBEによるGaN成長

    松本博義, 福山高章, 白石雄起, 北村剛志, 戸田雅也, 淀徳男, 柳沢淳一, 赤坂洋一

    第53回応用物理学関係連合講演会　2006年3月

  158. ポリマー膜を用いたシリコン表面の応力制御

    五十嵐慎一, 板倉明子, 戸田雅也, 北島正弘, L. Chu, A. N. Chifen, R. Forc, R. Berger

    第4回ナノテクノロジー総合シンポジウム　2006年2月

  159. Stress control on Si surface with ultraviolet light irradiation to plasma polymerized film 国際会議

    S. Igarashi, A. N. Itakura, M. Toda, M. Kitajima L. Chu, A. N. Chifen, R. Roerch, R. Berger

    International Symposium on Surface Science and Nanotechnology (ISSS4)　2005年11月14日

  160. Surface stress of polyelectrolyte adsorption measured by micromechanical cantilever sensors 国際会議

    M. Toda, A. N. Itakura, K. Buescher, K. Graf, R. Berger

    International Symposium on Surface Science and Nanotechnology (ISSS4)　2005年11月14日

  161. Surface stress measurement during alkanethiol SAM growth on gold 国際会議

    A. N. Itakura, S. Igarashi, M. Toda, M. Kitajima, R. Berger

    International Symposium on Surface Science and Nanotechnology (ISSS4)　2005年11月14日

  162. 有機分子膜の膜成長と表面応力

    板倉朋子, 五十嵐慎一, 戸田雅也, R. Berger, 北島正弘

    第25回表面科学講演大会　2005年11月

  163. ポリマー膜への紫外線照射を利用したシリコン表面応力制御

    五十嵐慎一, 板倉明子, 戸田雅也, 北島正弘, L. Chu, A. N. Chifen, R. Foerch, R. Berger

    第46回真空に関する連合講演会　2005年11月

  164. ポリマー膜への紫外線照射を利用したシリコン表面応力制御

    五十嵐慎一, 板倉朋子, 戸田雅也, 北島正弘, L. Chu, A. N. Chifen, R. Foerch, R. Berger

    第25回表面科学講演大会　2005年11月

  165. Real time measurement of surface stress and thickness during alkanethiol adsorption on gold 国際会議

    N. Itakura, S. Igarashi, M. Toda, M. Kitajima, R. Berger

    Atomically Controlled Surfaces, Interfaces & Nanostructures / 13th international Congress on Thin Films　2005年6月19日

  166. Formation of GaN layer on SiN surface using low-energy Ga ion implantation 国際会議

    J. Yanagisawa, T. Kitamura, H. Matsumoto, Y. Akasaka

    The 49th Intern. Conf. on Electron, Ion, and Photon Beam Technology and Nanofabrication　2005年5月31日

  167. SiN薄膜への低エネルギーGaイオンビーム照射によるGaN層の形成

    北村剛志, 戸田雅也, 松本博義, 柳沢淳一, 赤坂洋一

    第52回応用物理学関係連合講演会　2005年3月

  168. アルカンチオール自己集合膜の膜成長と応力

    板倉明子, 五十嵐慎一, 戸田雅也, 北島正弘, R. Berger

    第24回表面科学講演大会　2004年11月

  169. アルカンチオール自己集合膜の膜成長と応力

    板倉明子, 五十嵐慎一, 戸田雅也, 北島正弘, R. Berger

    第45回真空に関する連合講演会　2004年10月

  170. Formation of GaN films by Ga ion direct deposition under nitrogen radical atmosphere 国際会議

    Masaya Toda, Junichi Yanagisawa, Kenji Gamo, Yoichi Akasaka

    The 48th Intern. Conf. on Electron, Ion, and Photon Beam Technology and Nanofabrication　2004年6月1日

  171. 熱フィラメント法による窒素ラジカル雰囲気中のGaイオン直接堆積によるGaN薄膜の形成

    戸田雅也, 柳沢淳一, 赤坂洋一

    第1回Cat-CVD研究会　2004年5月

  172. 活性窒素雰囲気中でのGaイオン直接堆積法によるGaN薄膜作製プロセスの研究(II)

    戸田雅也, 北村剛志, 柳沢淳一, 赤坂洋一

    第51回応用物理学関係連合講演会（春季）　2004年3月

  173. ECRプラズマ源を用いた活性窒素雰囲気中でのGaイオン直接堆積法によるGaN薄膜作製プロセスの研究

    戸田雅也, 沖中寛昭, 柳沢淳一, 蒲生健次, 赤坂洋一

    第64回応用物理学会学術講演会　2003年8月

︎全件表示 ︎最初の5件までを表示

産業財産権 6

  1. センサ、検出方法、及び、センサ製造方法

    小野 崇人, 戸田 雅也

    産業財産権の種類: 特許権

  2. センサ、及び、センサ製造方法

    小野 崇人, 戸田 雅也, 栗原 舞

    産業財産権の種類: 特許権

  3. 熱量センサ及びそれを用いた熱量検出装置並びに熱量センサの製造方法

    小野 祟人, 猪股 直生, 戸田 雅也

    特許第5754693号

    産業財産権の種類: 特許権

  4. 薄膜のヤング率相当の機械特性の測定方法とそれに用いる装置

    中村 明子, 五十嵐 慎一, 戸田 雅也, ベルガー, ルーディガー

    特許第4930940号

    産業財産権の種類: 特許権

  5. 窒化ガリウム成長用基板及びその製造方法

    柳沢 淳一, 戸田 雅也, 赤坂 洋一

    産業財産権の種類: 特許権

  6. 光学干渉計、及びこれを用いたフーリエ変換型分光器

    小野 祟人, 戸田 雅也, 本間 康之, 齊藤 勝利

    特許第5519067号

    産業財産権の種類: 特許権

︎全件表示 ︎最初の5件までを表示

共同研究・競争的資金等の研究課題 9

  1. 革新的な高機能・高信頼ダイヤンモンド MEMSの基盤構築と磁気センサの応用

    廖 梅勇, 戸田 雅也

    2020年4月1日 ～ 2023年3月31日

    詳細を見る 詳細を閉じる

    ダイヤモンドMEMS高温磁気センサーを開発するために、高い品質因子（Q値）を持つダイヤモンドMEMS共振子及びダイヤモンドの上に高温磁歪材料の成長は重要です。2018年以来、ダイヤモンドMEMSの高速成長技術を開発したによって、Q値20000を超えた高品質ダイヤモンドMEMSの作製に成功してきました。続いて、(1) R3年度は、ダイヤモンド高速ドライエッチング技術を開発に成功し、エッチング速度を20倍に改善し、Q値を20000から200000に向上しました。(2) 一方、ダイヤモンドの上に成長された磁歪材料FeGa薄膜の結晶構造、表面形態、磁気特性に及ぼす成長条件の影響を調査しました。 表面粗さが1nm未満、保磁力（Hc）が26.2 Oe、飽和磁化磁場（Hs）が450 Oe、残留磁気比（Mr / Ms）が0.9を持つ優れた結晶化磁歪材料FeGa薄膜得られました。(3) ダイヤモンドMEMSのQ値に対するFeGa薄膜の影響も調べしました。Q値が8000から3000に低下しでも、磁気センシングにはまだ十分な高さであることがわかりました。(4) 更に、室温から高温700°CまでダイヤモンドMEMSの共振周波数法によって、ダイヤモンドヤング率の温度依存性を研究して、ダイヤモンドMEMSの高い熱安定性（6ppm/K）をわかりました。したがって、ダイヤモンドMEMSは優れた熱安定性を持ち、高温磁気センシングへ応用を期待しています。

  2. ナノセンサとマイクロシステムの融合による革新的スピン検出技術の創成

    戸田 雅也

    提供機関：Japan Society for the Promotion of Science

    制度名：Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

    研究種目：Grant-in-Aid for Scientific Research (B)

    研究機関：Tohoku University

    2019年4月1日 ～ 2022年3月31日

    詳細を見る 詳細を閉じる

    走査型磁気力顕微鏡(MRFM)は，非接触非破壊で試料内部のスピン密度の三次元分布を得ることができる。本研究では、従来にはなかった常温常圧での微小試料内部の磁気共鳴分布をイメージング可能なMRFMを開発した。磁性球体を先端に有する高感度なSiナノワイヤー型磁力センサと画像処理に必要な応答関数を正確に定義することで、観測データ数が少なくても広範囲の電子スピン密度分布を高精度に画像化することを可能にした。さらに、応答関数にノイズパラメータを使用した波数空間での畳み込みを使用するフーリエ変換を用いることによって、3D画像化処理にかかる時間の短縮に成功し、常温常圧下でも高精度に画像化が可能となった。

  3. 極限環境用ダイヤモンドナノマシンロジック回路基盤技術の構築

    廖 梅勇, 戸田 雅也, 小出 康夫

    提供機関：Japan Society for the Promotion of Science

    制度名：Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

    研究種目：Grant-in-Aid for Scientific Research (B)

    研究機関：National Institute for Materials Science

    2015年4月1日 ～ 2019年3月31日

    詳細を見る 詳細を閉じる

    極限環境、例えば原子力発電所、自動車、航空宇宙における燃焼制御のための推進システムなどでは、電気信号に安全、迅速に応答及び制御するため、熱的に安定な耐放射線性論理回路が必要である。従来の半導体デバイスは、熱リーク電流の問題があり、オン/オフ比または高温で出力が低減する。ナノマシンスイッチは、オン - オフの動作が物理的空気/真空ギャップとの静電作動によって制御され、高温でもほぼゼロ漏れ電流をもつデバイスであり、無限オン/ オフ比をもつ。本研究では、単結晶ダイヤモンド新概念を利用し、従来のスイッチの問題点を克服するため、極限環境でも動作られるダイヤモンドナノマシンロジック回路を目指す。

  4. 超臨界流体を利用したナノマイクロシステムの開発

    戸田 雅也, 藤井 孝志

    提供機関：Japan Society for the Promotion of Science

    制度名：Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research

    研究種目：Grant-in-Aid for Challenging Exploratory Research

    研究機関：Tohoku University

    2015年4月1日 ～ 2018年3月31日

    詳細を見る 詳細を閉じる

    流体は微小空間へ閉じ込められることにより通常と異なる物性を示すことが知られている。このような流体の「微小空間効果」を利用したマイクロチャンバデバイスを高圧に加圧できるマイクロチャンバを作製し、CO2を微小空間に閉じ込め、超臨界流体の特異な物性を明らかにした。 圧力を変えたときの熱抵抗変化からあきらかに臨界点と考えられる圧力近傍で熱抵抗の低下が観測された。また、微小空間に閉じ込めることで0.2 [MPa]の臨界圧力のシフトが観測できた。微小空間に閉じ込めた効果によって現れる物性変化が実証できたため，臨界点付近で状態が温度変化に敏感であることに基づいたデバイスへの応用の可能性を示すことができた。

  5. 高感度小型磁気共鳴力計測装置による早期アポトーシス検出技術の開発

    戸田 雅也

    提供機関：Japan Society for the Promotion of Science

    制度名：Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (A)

    研究種目：Grant-in-Aid for Young Scientists (A)

    研究機関：Tohoku University

    2014年4月1日 ～ 2017年3月31日

    詳細を見る 詳細を閉じる

    細胞といった液中試料の磁気共鳴力計測法に基づくフローサイトメトリー技術を構築するために、振動型カセンサとしては、先端に直径が8.2μmの微小磁石(NeFeB）を取り付けた高感度磁気力センサを作製した。真空用サンプルチャンバとしては、厚さ178nmの超薄膜窓を有する細胞を流すための真空中マイクロ流路型チャンバーを開発した。また、プローブ形状先端にNVセンターを有するダイヤモンド薄膜を設置することに成功し、高周波電磁波を用いて、NVセンターから発する蛍光強度変化を観測することに成功し、作製したNVセンターを有するダイヤモンドプローブが磁気共鳴計測に応用出来るセンサであることを示すことができた。

  6. 高感度小型磁気共鳴力計測装置による早期アポトーシス検出技術の開発（国際共同研究強化）

    戸田 雅也

    提供機関：Japan Society for the Promotion of Science

    制度名：Grants-in-Aid for Scientific Research Fund for the Promotion of Joint International Research (Fostering Joint International Research)

    研究種目：Fund for the Promotion of Joint International Research (Fostering Joint International Research)

    研究機関：Tohoku University

    2016年 ～ 2017年

    詳細を見る 詳細を閉じる

    より迅速な細胞診断をするために、本研究ではハイスループットで個々の細胞が測定できるフローサイトメトリーと非侵食で細胞内部の活性濃度を直接測定する電子スピン共鳴力計測法に着目した。ラジカルの濃度を計測するための微小振動子を用いて大気圧下液中にいる細胞を計測対象とするために、真空封止型の磁気センサの開発を行った。また、ダイヤモンド膜内にあるNVセンターを有するプローブを作製し，それが蛍光強度計測に基づく磁気プローブセンサとして応用することができることを示した。また、アポトーシス等を起こした細胞の質量変化（数ピコグラム）を計測できるような振動型のマイクロ流路の開発を行った。

  7. フェムトワット熱量センサ

    小野 崇人, 戸田 雅也, 川合 祐輔

    提供機関：Japan Society for the Promotion of Science

    制度名：Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (A)

    研究種目：Grant-in-Aid for Scientific Research (A)

    研究機関：Tohoku University

    2013年4月1日 ～ 2016年3月31日

    詳細を見る 詳細を閉じる

    マイクロ加工技術を利用して、溶液中の単一細胞などの微量な熱量を分析する熱量センサを開発した。機械的な振動子の共振周波数が温度に依存することを利用したセンサであり、液中の試料からセンサまでを熱導波路を利用して熱を伝導することを特徴としている。また、振動型のセンサは、周囲を真空に保つことで熱絶縁し、熱損失を防いでいる。センサの小型化により、熱容量が小さくなり、わずかな熱量でも大きく温度が変化する。実際に単一細胞において、発熱を計測することに成功した。

  8. 狭ギャップ熱電子素子

    小野 崇人, 戸田 雅也, 川合 祐輔

    提供機関：Japan Society for the Promotion of Science

    制度名：Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research

    研究種目：Grant-in-Aid for Challenging Exploratory Research

    研究機関：Tohoku University

    2013年4月1日 ～ 2015年3月31日

    詳細を見る 詳細を閉じる

    熱電子発電は、熱を電気に変換するクリーンエネルギーの一つである。我々は、低温でも動作が可能な、SiCを利用したマイクロギャップを有する熱電発電デバイスを試作し評価し、830℃という比較的低温で動作させることに成功した。また、最大の出力密度として、11.5 mW/cm2 を得た。さらに、エミッタからの熱損失を実験と理論の両面で評価した。熱損失を見積もるために、エミッタとコレクタ間の熱抵抗を測定した結果、約2.4 K/Wであった。この結果、最も大きな熱損失は、酸化膜スペーサーによるエミッタ‐コレクタ間の熱損失であった。スペーサのサイズを小さくすることで、熱損失を減らし効率を上げることが可能である。

  9. 磁気共鳴力顕微鏡のための超高感度プローブ

    戸田 雅也

    提供機関：Japan Society for the Promotion of Science

    制度名：Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B)

    研究種目：Grant-in-Aid for Young Scientists (B)

    研究機関：Tohoku University

    2012年4月1日 ～ 2014年3月31日

    詳細を見る 詳細を閉じる

    微粒子磁石が先端に付けられたシリコン製ナノワイヤーカンチレバーセンサを作製し、双安定高分子材料を用いた磁気共鳴力顕微鏡(MRFM)を用いた評価を行った。カンチレバーの中央には変位計測に用いる干渉計のためのミラー部を設け、先端には直径3.5ミクロンのNdFeB粒子を取り付けた。酸化すると安定的にラジカルが分子内で保持される試料を MRFMシステム内で試料をXYZ走査させたときの高分子薄膜からの確かな磁気共鳴信号を計測でき、薄膜状のラジカルや欠陥など試料表面のイメージング評価に応用できることが示せた。

︎全件表示 ︎最初の5件までを表示

メディア報道 4

  1. 東北大、超小型3D MRI技術を開発

    日本経済新聞

    2021年8月

  2. ラジカル分布観測 微小試料向け超小型３DMRI 東北大学

    日刊工業新聞

    2021年8月

  3. 原子時計をスマートフォンに搭載できるくらいの超小型システムへ～圧電薄膜の機械振動を利用～

    共同通信

    2018年1月

  4. NICT と東北大と東工大、圧電薄膜の機械振動を利用したシンプルな超小型原子時計システムを開発

    日本経済新聞

    2018年1月